JP5172884B2 - Substrate processing apparatus and substrate processing method - Google Patents

Description

  The present invention relates to a substrate processing apparatus and a substrate processing method for processing a substrate. Examples of substrates to be processed include semiconductor wafers, glass substrates for liquid crystal display devices, substrates for plasma displays, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, Substrates such as a photomask substrate and a solar cell substrate are included.

  For example, in a manufacturing process of a semiconductor device, a process using a chemical solution is performed on a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display panel. For this chemical processing, a single-wafer type substrate processing apparatus that performs processing one by one on a substrate may be used. A single-wafer type substrate processing apparatus includes a processing chamber having partition walls that define an internal space, a spin chuck that is accommodated in the processing chamber and rotates while holding the substrate substantially horizontal, and a chemical solution for supplying a chemical to the substrate. And a chemical nozzle.

  For example, in the removal process of removing the polymer from the surface of the substrate, a chemical solution with a sufficiently reduced oxygen concentration may be discharged from the chemical solution nozzle in order to prevent undesired etching of the wiring formed on the substrate. (Patent Document 1). In this case, it is desirable to control the atmosphere in the processing chamber to a low oxygen concentration so that oxygen does not dissolve in the processing liquid discharged from the chemical nozzle.

However, various members are accommodated in the internal space of the processing chamber, and the internal space is relatively wide. Therefore, it is difficult to sufficiently control the atmosphere in the processing chamber.
JP 2004-158482 A

In order to sufficiently control the atmosphere in the processing chamber, the inventors of the present application are considering sealing the internal space of the processing chamber and narrowing the internal space.
However, since various members are collectively arranged in the processing chamber, the internal space cannot be effectively narrowed. In particular, in the case where a shielding plate that is disposed close to the substrate surface and rotates while covering the substrate surface when the substrate is dried, the processing chamber needs to be configured to surround the spin chuck and the shielding plate. Therefore, since the volume of the internal space of the processing chamber cannot be effectively reduced, the atmosphere control in the processing chamber may be insufficient.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a substrate processing apparatus and a substrate processing method capable of performing good processing on a substrate in a sealed chamber having a structure capable of reducing the volume of an internal space.

In order to solve the above-mentioned problems, the invention according to claim 1 is characterized in that a chamber body (6) having an opening (5), a lid member (7) provided so as to be rotatable with respect to the chamber body and closing the opening. And a sealed chamber (2) having a first liquid seal structure (8) for sealing between the lid member and the chamber body with a liquid, and the internal space is sealed from the outside, and the lid member is rotated. A lid member rotating means (32) for rotating, a substrate holding rotating means (3, 43, 44) for rotating while holding the substrate in the internal space of the sealed chamber, and a substrate rotated by the substrate holding rotating means a processing liquid supplying means for supplying a liquid (4), by moving at least one of the substrate holding and rotating means and said sealed chamber, and the substrate held by the substrate holding and rotating means and said cover member, approaching / separating A first moving means (100) for causing the substrate to be subjected to a liquid treatment with a treatment liquid supplied from the treatment liquid supply means, and a position relative to the liquid treatment position. The substrate approaches the lid member, and is configured to move at least one of the substrate holding and rotating means and the sealed chamber between a drying position for performing a drying process on the substrate, and the lid member includes: And a substrate facing surface (23) facing the entire main surface of the substrate held by the substrate holding / rotating means, and controlling the first moving means to control the substrate holding / rotating means and the sealed chamber. The substrate is moved to the drying position, and the substrate holding / rotating means and the lid member rotating means are controlled so that the substrate and the lid member held by the substrate holding / rotating means are respectively dried at a predetermined level. Rolling further comprising a speed drying control means for rotating in the same direction (131), a substrate processing apparatus (1).

In addition, although the alphanumeric characters in parentheses represent corresponding components in the embodiments described later, the scope of the claims is not intended to be limited to the embodiments. The same applies hereinafter.
According to this configuration, the processing liquid can be supplied to the substrate while rotating the substrate by the substrate holding and rotating means in the internal space of the sealed chamber.
Since the lid member is rotatable, the lid member and the substrate can be relatively rotated or rotated synchronously. Therefore, it is also possible to rotate the lid member in connection with the processing of the substrate, whereby the processing of the substrate can be performed satisfactorily.

  The lid member and the chamber body are sealed by the first liquid seal structure. Therefore, the internal space of the sealed chamber can be kept sealed even when the lid member is rotated. Since a liquid seal structure is employed as the seal structure, dust generation and a decrease in sealing performance hardly occur as compared with the case where a contact seal is used. Thereby, the seal | sticker between a cover member and a chamber main body can be kept favorable over a long period of time.

  Thus, in the present invention, the sealed space is defined by the chamber body, the rotatable lid member, and the first liquid seal structure that seals between them. Since the rotatable lid member can also function as the above-described blocking plate, it is not necessary to separately provide a blocking member in the sealed space. Therefore, since the volume of the sealed space can be reduced, the internal atmosphere can be sufficiently controlled. For example, the atmosphere in the internal space can be controlled to a sufficiently low oxygen atmosphere.

Further, since further comprising a first moving means, it is possible to change the relative position between the substrate and the lid member. Therefore, it is possible to change the relative position of the substrate and the lid member between the time of liquid processing in which the substrate is processed by the processing liquid supplied from the processing liquid supply means and the other time. Thereby, a liquid process and other processes can be performed under appropriate conditions.
According to this configuration, the substrate is subjected to the drying process in a state where the substrate holding rotating member and the sealed chamber are in the drying position different from the liquid processing position. Therefore, it is possible to perform the drying process on the substrate while suppressing the influence of the processing liquid.
In addition, the substrate is subjected to a drying process at a drying position where the substrate is closer to the lid member than the processing position. Therefore, a minute space can be formed between the substrate and the lid member during the drying process. Accordingly, the substrate can be dried while the space between the substrate and the lid member is blocked from the surrounding atmosphere. Thereby, a favorable drying process can be realized in a state in which the atmosphere in the vicinity of the surface of the substrate is precisely controlled, and foreign matter can be prevented from adhering to the substrate surface during the drying process.
Further, by rotating the lid member in synchronization with the rotation of the substrate, a stable airflow is formed between the main surface of the substrate and the substrate facing surface of the lid member. Thereby, a favorable drying process can be performed with respect to a board | substrate.

According to a second aspect of the present invention, the first moving unit further includes a liquid processing position where the substrate is subjected to a liquid process using the processing liquid supplied from the processing liquid supply unit, and the substrate is more than the liquid processing position. The holding rotation means approaches the lid member, and is configured to move at least one of the substrate holding rotation means and the sealed chamber between a chamber cleaning position for cleaning the inside of the sealed chamber. The substrate processing apparatus according to claim 1 .

  According to this configuration, the inside of the sealed chamber is cleaned in a state where the substrate holding rotation means or the sealed chamber is at a chamber cleaning position different from the liquid processing position. At the chamber cleaning position, the substrate holding and rotating means is closer to the lid member than at the liquid processing position. On the inner wall surface of the hermetic chamber, the processing liquid scattered from the substrate during the liquid processing adheres to a region facing the periphery of the substrate at the liquid processing position. Therefore, when cleaning the sealed chamber, the substrate holding and rotating means is moved closer to the lid member than the liquid processing position. Thereby, for example, the inner wall surface area facing the periphery of the substrate at the liquid processing position is located at a position lower than the substrate holding and rotating means. Therefore, it is possible to prevent the processing liquid removed from the inner wall surface of the hermetic chamber (the processing liquid adhered during the liquid processing) from adhering to the substrate holding and rotating means when the inner chamber wall surface is cleaned. Thereby, since the contamination of the substrate holding and rotating means can be suppressed, the contamination of the substrate held by the substrate holding and rotating means can be suppressed.

According to a third aspect of the present invention, it may further include a cleaning liquid discharge means (34) for discharging a cleaning liquid toward the lid member.
In this case, as described in claim 4 , the lid member rotating means is controlled to rotate the lid member at a predetermined lid cleaning rotational speed, and the cleaning liquid discharging means is controlled to control the cleaning liquid discharging means. It may further include a chamber cleaning control means (131) for discharging the cleaning liquid from the chamber.

The processing liquid scattered from the main surface of the substrate adheres to the lid member and the chamber body. If this treatment liquid dries and crystallizes on the surface of the lid member or the inner wall of the chamber body, it may cause substrate contamination. This problem is particularly noticeable when the treatment liquid is a chemical liquid.
According to this configuration, the processing liquid adhering to the lid member can be washed away with the cleaning liquid by discharging the cleaning liquid from the cleaning liquid discharging means toward the lid member while rotating the lid member. In addition, the cleaning liquid supplied to the lid member receives a centrifugal force generated by the rotation of the lid member, moves toward the peripheral edge of the lid member, and is supplied to the inner wall of the chamber body. Therefore, the processing liquid adhering to the inner wall of the chamber body can be washed away. Thereby, the entire inner wall of the sealed chamber can be cleaned. Even in the rotating state of the lid member, the sealed state in the sealed chamber can be maintained by the action of the first liquid seal structure. Thus, the inner wall of the sealed chamber that partitions the narrow internal space can be kept clean, so that the substrate processing in the internal space can be satisfactorily performed.

Invention 請 Motomeko 5 wherein, the substrate holding and rotating means has an exposed portion (40, 45) exposed to the outside of the sealed chamber, the substrate holding and rotating means and said sealed chamber, relatively a second moving means for moving the (100), further comprising a second liquid seal structure for sealing (13) between the substrate holding and rotating means and the chamber body in a liquid, either of claims 1-4 one The substrate processing apparatus according to the item.

  According to this configuration, the substrate holding and rotating means and the sealed chamber are relatively moved. The second liquid seal structure seals between the substrate holding and rotating means and the sealed chamber with a liquid regardless of the relative positions of the substrate holding and rotating means and the sealed chamber. Therefore, the inner space of the sealed chamber can be maintained in a sealed state regardless of the position of the substrate holding rotation means and the sealed chamber.

According to a sixth aspect of the present invention, the first liquid seal structure has a seal groove (104) formed in the chamber body over the entire circumference of the opening, and can store a sealing liquid, and the lid The member has a seal ring (101) that enters the seal groove and is immersed in the seal liquid, and further includes a liquid supply means for supplying the seal liquid to the seal groove, and the substrate processing apparatus in the active state, the seal groove, the said sealing liquid from the liquid supply means is always supplied, a substrate processing apparatus according to any one of claims 1-5.

  According to this configuration, the seal groove is formed in the chamber body over the entire circumference of the opening. With the sealing liquid stored in the seal groove, the seal ring of the lid member enters the seal groove and is immersed in pure water. Thereby, the space between the seal ring and the seal groove is sealed with the sealing liquid. The seal by the first liquid seal structure is maintained even when the lid member is rotated.

Since the sealing liquid is constantly supplied to the sealing groove, there is no possibility that the sealing liquid will run out. Thereby, the seal | sticker between a cover member and a chamber main body can be maintained over a long period of time. Further, since the sealing liquid in the seal groove can be always replaced, it is possible to suppress the accumulation of contamination in the sealing liquid in the seal groove.
According to a seventh aspect of the present invention, the sealed chamber may further include inert gas supply means (29, 30) for supplying an inert gas.

In order to solve the above-mentioned problem, the invention according to claim 8 includes a chamber main body (6) having an opening (5), and a lid member (7) provided so as to be rotatable with respect to the chamber main body and closing the opening. And a step of preparing a sealed chamber (2) having a first liquid seal structure (8) for sealing between the lid member and the chamber body with a liquid and having an internal space sealed from the outside, and the sealing A substrate rotation process in which a substrate (W) is disposed in the internal space of the chamber and the substrate is rotated in the internal space, and a process of supplying a processing liquid to the substrate in the internal space of the chamber in parallel with the substrate rotation process. A liquid supply step , a dry position placement step of placing the substrate and the lid member at a dry position where the substrate is closer to the lid member than at the time of the treatment liquid supply step, and the lid member and the substrate at the dry position. The Respectively and a drying step of rotating at a predetermined drying rotation speed is a substrate processing method.

According to the method of this invention, there exists an effect similar to the effect demonstrated in relation to Claim 1.
The invention according to claim 9 is a lid cleaning position in which the substrate and the lid member are closer to the lid member than during the treatment liquid supply step , and the substrate is separated from the lid member than the drying position. a lid cleaning position arrangement step of arranging, in its lid cleaning position, with rotating the lid member at a predetermined lid washing rotational speed, and the lid member cleaning step of discharging the cleaning liquid toward the lid member from the cleaning liquid discharge means The substrate processing method according to claim 8 , further comprising:

According to the method of this invention, there exists an effect similar to the effect demonstrated in relation to Claim 2 , and the effect demonstrated in relation to Claim 4 .

1 is a schematic sectional view showing a configuration of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic plan view for explaining the configuration of the substrate processing apparatus shown in FIG. 1. FIG. 2 is an illustrative sectional view for explaining a configuration of a first liquid sealing mechanism shown in FIG. 1 and its surroundings. FIG. 3 is a schematic cross-sectional view for explaining a configuration of a second liquid seal mechanism shown in FIG. 1 and its surroundings. FIG. 5 is a schematic cross-sectional view for explaining the configuration of a third liquid seal mechanism shown in FIG. 1. It is sectional drawing seen from the cut surface line VI-VI of FIG. It is sectional drawing seen from the cut surface line VII-VII of FIG. It is a schematic diagram of the structure for supplying a process liquid with respect to the process module shown in FIG. It is an illustration figure of piping with which the substrate processing apparatus shown in FIG. 1 was equipped. It is a block diagram for demonstrating the electrical structure of the substrate processing apparatus shown in FIG. It is sectional drawing for demonstrating an example of the surface state of the wafer processed with the substrate processing apparatus shown in FIG. FIG. 2 is a schematic cross-sectional view for explaining an example of processing a substrate by the substrate processing apparatus shown in FIG. 1. FIG. 12B is an illustrative sectional view showing a step subsequent to FIG. 12A. FIG. 12D is an illustrative sectional view showing a step subsequent to FIG. 12B. FIG. 12D is an illustrative sectional view showing a step subsequent to FIG. 12C. FIG. 12D is an illustrative sectional view showing a step subsequent to FIG. 12D. It is an illustration sectional view showing a chamber washing process. It is a figure which shows the relationship between the oxygen concentration in inert gas dissolved water, and the etching amount of copper. It is a figure which shows the relationship between the oxygen concentration above a wafer, and the oxygen concentration in the pure water supplied to the upper surface of the wafer. It is a figure which shows the relationship between the oxygen concentration in a pure water, and the nitrogen concentration in a pure water.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a schematic cross-sectional view showing the configuration of the substrate processing apparatus 1. FIG. 2 is a schematic plan view for explaining the configuration of the substrate processing apparatus 1. FIG. 2 mainly illustrates the configuration related to the processing liquid nozzle (processing liquid supply means) 4 and the nozzle arm 15 in the substrate processing apparatus 1, and the configuration not directly related to these is omitted as appropriate. .

The substrate processing apparatus 1 includes a rare wafer as an example of a chemical solution on the surface (main surface) on the device formation region side of a circular semiconductor wafer W (hereinafter simply referred to as “wafer W”) as an example of a substrate. This is a single wafer type apparatus for performing a cleaning process with an acid (for example, a polymer residue removing process).
The substrate processing apparatus 1 has a processing module M1 for processing the wafer W. The processing module M1 holds the wafer W horizontally within the sealed chamber 2 and the internal space of the sealed chamber 2, and rotates the wafer W about a vertical axis passing through the center thereof (substrate holding and rotating means). 3) and a processing liquid nozzle 4 for supplying a processing liquid (chemical solution or inert gas dissolved water) to the surface of the wafer W held by the spin chuck 3 in the internal space of the sealed chamber 2. . In the processing module M1, the internal space of the sealed chamber 2 contains not only the entire spin chuck 3 but only a part thereof (such as the spin base 43 and the clamping member 44) and supports the processing liquid nozzle 4. A linear drive mechanism 36 for driving the nozzle arm 15 is disposed outside the sealed chamber 2. Therefore, the internal space of the sealed chamber 2 is effectively reduced, and the internal space is set to a minimum size for performing the cleaning process on the wafer W.

  The sealed chamber 2 includes a substantially cylindrical chamber body 6 having an upper opening (opening) 5 and a lower opening 200, and a lid member 7 for opening and closing the upper opening 5 (in FIG. 2, the sealed chamber 2). The state in which the lid member 7 is removed from is shown). The lid member 7 is provided so as to be rotatable with respect to the chamber body 6. The sealed chamber 2 further includes a first liquid seal structure 8 that seals between the chamber body 6 and the lid member 7. The first liquid seal structure 8 seals the space between the upper end of the chamber body 6 and the peripheral edge of the lid member 7 with a sealing liquid (pure water). It is cut off from the atmosphere. The lower opening 200 of the chamber body 6 is closed by the spin chuck 3.

  The chamber body 6 has a partition wall 9 that partitions the internal space of the sealed chamber 2. The partition wall 9 has a substantially rotationally symmetric shape with respect to the rotation axis C of the wafer W by the spin chuck 3 (hereinafter simply referred to as “rotation axis C”). The partition wall 9 includes a substantially cylindrical cylindrical portion 10 centering on the rotation axis C, an inclined portion 11 extending obliquely upward (in the direction approaching the rotation axis C) from the upper end of the cylindrical portion 10, and a lower end portion of the cylindrical portion 10. And a bottom portion 12 having a ring shape in plan view. The part except the upper end part in the cylindrical part 10 is formed thicker as it goes downward. The bottom portion 12 and the spin chuck 3 (the cover member 45) are sealed by the second liquid seal structure 13. The inclined portion 11 is formed with a passage hole 14 penetrating the inner and outer surfaces. The passage hole 14 is inserted through a nozzle arm 15 (described later), and is provided on a reference line L1 (described later).

  The inner surface of the inclined portion 11 has a conical first conical surface 17 with the rotation axis C as the center. The inner surface of the cylindrical portion 10 has a cylindrical surface 18 centered on the rotation axis C and a conical waste liquid guide surface 19 centered on the rotation axis C. At the time of chemical liquid processing or rinsing processing on the wafer W, the processing liquid (chemical liquid or rinsing liquid) splashed from the periphery of the wafer W in a rotating state is mainly received by the cylindrical surface 18 and the waste liquid guide surface 19. Then, the processing liquid received by the cylindrical surface 18 and flowing down to the waste liquid guide surface 19 and the processing liquid received by the waste liquid guide surface 19 are guided from the waste liquid guide surface 19 to an exhaust liquid groove 20 (described later) ( Led).

  The lid member 7 has a substantially disk shape that is slightly larger in diameter than the wafer W. The first liquid seal structure 8 described above seals between the outer peripheral portion of the lid member 7 and the upper end portion of the partition wall 9 of the chamber body 6. A portion excluding the peripheral edge portion of the lid member 7 forms a circular flat plate portion 21. The lower surface of the flat plate portion 21 forms a substrate facing surface 23 composed of a horizontal flat surface facing the surface of the wafer W held by the spin chuck 3.

  On the upper surface of the lid member 7, an upper rotation shaft 24 is fixed along an axis common to the rotation axis C. The upper rotating shaft 24 is formed hollow, and a processing liquid upper nozzle 25 for supplying carbonated water as a rinsing liquid to the surface of the wafer W is inserted into the upper rotating shaft 24. The processing liquid upper nozzle 25 has a processing liquid upper discharge port 26 for discharging the processing liquid toward the rotation center of the surface of the wafer W held by the spin chuck 3. Carbonated water is supplied to the treatment liquid upper nozzle 25 via a carbonated water valve 27. Further, an inert gas flow passage (inert gas) for supplying nitrogen gas as an inert gas toward the center of the wafer W is formed between the inner wall of the upper rotating shaft 24 and the outer wall of the processing liquid upper nozzle 25. Supply means) 28 is formed. The inert gas flow passage 28 has an inert gas discharge port (inert gas supply means) 29 that opens to the substrate facing surface 23. The inert gas flow passage 28 is supplied with nitrogen gas via an inert gas valve (inert gas supply means) 30.

  The upper rotating shaft 24 is rotatably attached to the distal end portion of the upper rotating shaft 24 in a state of hanging from the distal end portion of the lid arm 31 provided so as to extend substantially horizontally. That is, the lid member 7 is held by the lid arm 31. A lid member rotating mechanism (lid member rotating means) 32 for rotating the lid member 7 substantially in synchronization with the rotation of the wafer W by the spin chuck 3 is coupled to the upper rotating shaft 24.

  A lid member elevating mechanism 33 for elevating the lid arm 31 is coupled to the lid arm 31. By this lid member lifting mechanism 33, the lid member 7 is separated from the closed position (the position shown in FIG. 1) that closes the upper opening 5 of the chamber body 6 and the upper opening 5 of the chamber body 6. Can be moved up and down between the open position (the position shown in FIG. 12A). The lid member 7 is held by the lid arm 31 both in the closed position and in the open position.

  On the inner surface of the partition wall 9 of the chamber body 6 (more specifically, the boundary portion between the first conical surface 17 and the cylindrical surface 18), a cleaning liquid nozzle (cleaning liquid discharge means) for cleaning the inside of the sealed chamber 2 is provided. 34 is provided. The cleaning liquid nozzle 34 is, for example, a straight nozzle that discharges the cleaning liquid in a continuous flow state, and is attached to the inner surface of the partition wall 9 of the chamber body 6 with its discharge port facing obliquely upward. The cleaning liquid discharged from the discharge port of the cleaning liquid nozzle 34 is discharged toward an intermediate position between the central portion and the peripheral portion of the lower surface of the lid member 7. A cleaning liquid (for example, pure water) from a cleaning liquid supply source (not shown) is supplied to the cleaning liquid nozzle 34 via a cleaning liquid valve 35.

  The treatment liquid nozzle 4 is attached to the tip of a nozzle arm 15 that extends above the spin chuck 3. The nozzle arm 15 has a rod shape extending linearly in the horizontal direction, and extends across the inside and outside of the sealed chamber 2. The nozzle arm 15 is along a linear reference line L1 passing on the rotation axis C (see FIG. 2), and its cross-sectional shape is a rectangular shape (see FIGS. 5 and 6). The nozzle arm 15 is supported by a linear drive mechanism 36 disposed outside the sealed chamber 2 so as to be movable in the direction along the reference line L1.

  The nozzle arm 15 is inserted through a passage hole 14 formed in the partition wall 9 of the chamber body 6. The passage hole 14 is located on the reference line L1. Since the nozzle arm 15 extending along the reference line L1 moves along the reference line L1, the nozzle arm 15 always passes through the reference line L1 in the partition wall 9. Since the passage hole 14 is provided at that position, the size of the passage hole 14 can be kept to a minimum size. A space between the nozzle arm 15 and the partition wall 9 of the chamber body 6 is sealed by a third seal structure 37.

A processing liquid supply pipe 38 is connected to the processing liquid nozzle 4. The processing liquid supply pipe 38 is selectively supplied with a chemical liquid and a rinsing liquid as a processing liquid from an in-pipe preparation unit 51 (see FIG. 8) described later. By supplying the processing liquid (chemical liquid or rinsing liquid) to the processing liquid supply pipe 38, the processing liquid can be discharged from the processing liquid nozzle 4.
As shown in FIG. 2, the linear drive mechanism 36 includes a nozzle drive motor 139, a timing belt 142 spanned between the output shaft 140 of the nozzle drive motor 139 and a rotatable pulley 141, and a timing belt 142 A connecting member 143 coupled to the middle portion and a linear guide 144 that restricts the movement of the connecting member 143 and moves the connecting member 143 only in the direction along the reference line L1 are provided. The connecting member 143 is connected to the base end portion of the nozzle arm 15 and supports the nozzle arm 15. When the nozzle drive motor 139 is driven to rotate, the timing belt 142 rotates, and the connecting member 143 coupled to the timing belt 142 moves along the reference line L1. Thereby, the rotational driving force of the nozzle drive motor 139 can be input to the nozzle arm 15, and the nozzle arm 15 can be moved along the reference line L1.

  By this movement of the nozzle arm 15, the processing liquid nozzle 4 is held on the side of the wafer W held by the spin chuck 3 (the state shown in FIG. 1 and shown by a solid line in FIG. 2) and the spin chuck 3. The surface of the wafer W can be moved between the surfaces of the wafer W (shown by a two-dot chain line in FIG. 2), and the discharge position of the processing liquid from the processing liquid nozzle 4 can be moved on the surface of the wafer W. it can. Thus, since the linear drive mechanism 36 is arrange | positioned out of the sealed chamber 2, size reduction of the sealed chamber 2 can be achieved.

  The spin chuck 3 will be described with reference to FIG. 1 again. The spin chuck 3 includes a horizontally extending base (exposed portion) 40, a spin motor 41 fixed on the base 40, a rotating shaft 42 extending in the vertical direction to which the rotational driving force of the spin motor 41 is input, and rotation. A disc-shaped spin base (substrate holding and rotating means) 43 mounted horizontally on the upper end of the shaft 42, a plurality of clamping members (substrate holding and rotating means) 44 disposed on the spin base 43, and a spin motor 41 And a cover member (exposed portion) 45 that surrounds the sides. The spin base 43 is, for example, a disk-shaped member having a diameter slightly larger than that of the wafer W. The lower end of the cover member 45 is fixed to the outer periphery of the base 40. The cover member 45 and the base 40 are in close contact with each other so that the atmosphere outside the sealed chamber 2 does not flow into the casing formed by the cover member 45 and the base 40. The upper end of the cover member 45 extends to the vicinity of the spin base 43. A hook-shaped member 46 is attached to the upper end portion of the cover member 45.

  Specifically, the bowl-shaped member 46 includes a horizontal portion 47 that projects substantially horizontally from the cover member 45 radially outward, an inner wall portion 48 that hangs vertically downward from a middle portion in the radial direction of the horizontal portion 47, and a horizontal portion. 47 is provided integrally with an outer wall portion 49 that hangs vertically downward from the outer peripheral edge of 47. The inner wall portion 48 and the outer wall portion 49 are each formed in a cylindrical shape centered on the rotation axis C. The lower end of the inner wall portion 48 and the lower end of the outer wall portion 49 are set at substantially the same height.

  The plurality of clamping members 44 are arranged at appropriate intervals on the circumference corresponding to the outer peripheral shape of the wafer W at the peripheral edge of the upper surface of the spin base 43. The plurality of clamping members 44 can cooperate with each other to clamp (hold) one wafer W in a horizontal posture. In a state where the wafer W is held by the plurality of clamping members 44, the rotational driving force of the spin motor 41 is input to the rotation shaft 42, so that the held wafer W is rotated around the vertical rotation axis passing through the center thereof. It is rotated.

  In this embodiment, the spin chuck 3 closes the lower opening 200 of the chamber body 6. The spin base 43 and the clamping member 44 are accommodated in the sealed chamber 2, and almost all the part of the cover member 45 and the base 40 are exposed outside the sealed chamber 2. The inner wall 48 of the bowl-shaped member 46 constitutes a part of the second liquid seal structure 13 that seals between the chamber body 6 and the spin chuck 3.

Note that the spin chuck 3 is not limited to a sandwiching type, and for example, the wafer W is held in a horizontal posture by vacuum-sucking the back surface of the wafer W, and further rotated around a vertical rotation axis in that state. Thus, a vacuum chucking type (vacuum chuck) that can rotate the held wafer W may be employed.
In this embodiment, the spin chuck 3 is configured to be able to move up and down. The substrate processing apparatus 1 includes a processing position (liquid processing position; position shown in FIG. 1), a spin dry position (drying position; position shown in FIG. 12E), and a chamber cleaning position (position shown in FIG. 12F). A chuck raising / lowering mechanism (first moving means, second moving means) 100 for raising and lowering between the two is provided. The chuck raising / lowering mechanism 100 is constituted by, for example, a ball screw mechanism or a motor, and is coupled to the base 40 of the spin chuck 3, for example. The processing position is a position for performing chemical processing or rinsing processing on the wafer W held on the spin chuck 3. The spin dry position is a position for separating the wafer W from the processing position and performing a drying process on the wafer W, and a position for transferring the wafer W to and from a transfer robot (not shown). It is. The chamber cleaning position is a position for cleaning the inner wall of the sealed chamber 2 (that is, the substrate facing surface 23 of the lid member 7 and the inner surface of the partition wall 9 of the chamber body 6).

In this embodiment, the first liquid seal structure 8, the second liquid seal structure 13, and the third seal structure 37 reliably block the internal space of the sealed chamber 2 and the space outside the sealed chamber 2. Therefore, it is possible to prevent the atmosphere outside the sealed chamber 2 from entering the sealed chamber 2 and the leakage of the atmosphere inside the sealed chamber 2 to the outside of the sealed chamber 2.
FIG. 3 is a schematic cross-sectional view for explaining the configuration of the first liquid seal structure 8 and its periphery. With reference to FIG. 1 and FIG. 3, the structure of the 1st liquid seal structure 8 and its periphery is demonstrated.

A cylindrical seal ring 101 that hangs vertically downward from the periphery of the lid member 7, and an annular ridge 102 that is annular in plan view and protrudes radially inwardly from the seal ring 101 at the peripheral edge of the lid member 7. Is provided. The cross-sectional shape of the protrusion 102 is a triangular shape, and the lower surface 103 of the protrusion 102 has a conical shape that becomes lower as the distance from the rotation axis C increases.
At the upper end of the partition wall 9 of the chamber body 6, that is, the upper end of the inclined portion 11, a first seal groove 104 capable of storing pure water as a sealing liquid is formed over the entire circumference. The first seal groove 104 is formed in an annular shape in plan view with the rotation axis C (see FIG. 1) as the center. Specifically, the upper end portion of the inclined portion 11 includes an upper end surface 105 formed of a flat surface that is annular in plan view, a cylindrical inner wall portion 106 that rises vertically upward from the inner peripheral edge of the upper end surface 105, and the upper end surface 105. A cylindrical outer wall portion 107 that rises vertically upward from the outer peripheral edge is integrally provided. The upper end surface 105, the outer surface of the inner wall portion 106, and the inner surface of the outer wall portion 107 have a substantially U-shaped cross section, and the first seal groove 104 is formed by the upper end surface 105, the outer surface of the inner wall portion 106, and the inner surface of the outer wall portion 107. Is formed. A seal ring 101 is located on the first seal groove 104. The seal ring 101 and the first seal groove 104 constitute a first liquid seal structure 8. The first liquid seal structure 8 stores pure water as a sealing liquid.

  In a state where the lid member 7 is in the closed position, the lower end portion of the seal ring 101 is accommodated in the first seal groove 104 with a minute gap between the lower end portion and the bottom portion of the first seal groove 104. Since pure water (sealing liquid) is stored in the first seal groove 104, the seal ring 101 enters the first seal groove 104 and is immersed in pure water when the lid member 7 is in the closed position. The Therefore, the space between the seal ring 101 and the first seal groove 104 is sealed with pure water.

On the side of the lid member 7, a sealing liquid supply nozzle 108 for discharging pure water is disposed with its discharge port facing the first seal groove 104. The discharge of pure water from the sealing liquid nozzle 108 is always performed in the activated state of the substrate processing apparatus 1. Therefore, pure water is always stored in the first seal groove 104.
The upper end surface of the inner wall portion 106 is set at a position higher than the upper end surface of the outer wall portion 107. Therefore, the pure water overflowing from the first seal groove 104 flows out of the chamber body 6 through the upper end surface of the outer wall 107 and flows down along the outer periphery of the chamber body 6. Therefore, the pure water that has been stored in the first seal groove 104 does not flow into the chamber body 6, that is, into the sealed chamber 2. The pure water flowing down along the outer periphery of the chamber body 6 is drained through a waste liquid path (not shown) provided outside the sealed chamber 2.

When the lid member rotation mechanism 32 is driven in a state where the lid member 7 is in the closed position, the lid member 7 rotates around the rotation axis C. Since the space between the first seal groove 104 and the seal ring 101 in the rotating state is sealed with pure water, the internal space of the sealed chamber 2 is maintained in the atmosphere outside the sealed chamber 2 even during the rotation of the lid member 7. Can be cut off from.
The lid member 7 has a relatively large diameter (in this embodiment, a diameter larger than that of the wafer W). Therefore, the radii of the seal ring 101 and the first seal groove 104 are also relatively large. Therefore, when the lid member 7 rotates at a high speed (for example, during a drying process), the peripheral speed of the seal ring 101 increases, and a large amount of pure water may be scattered from the first seal groove 104. However, since pure water is always supplied to the first seal groove 104, the seal ring 101 is always immersed in pure water. As a result, the gap between the lid member 7 and the chamber body 6 can be sealed for a long time.

  When the lid member 7 is in the closed position (the state shown in FIGS. 1 and 3), the lower surface 103 of the protrusion 102 is substantially flush with the first conical surface 17 of the inclined portion 11. As will be described later, pure water as a cleaning liquid is supplied to the substrate facing surface 23 of the lid member 7 during chamber cleaning. The pure water supplied to the substrate facing surface 23 receives a centrifugal force due to the rotation of the lid member 7, moves along the substrate facing surface 23 to the peripheral edge of the lid member 7, and moves to the lower surface 103 of the protrusion 102. Reach. Since the lower surface 103 and the first conical surface 17 are substantially in the same plane, the pure water that has reached the lower surface 103 moves smoothly to the first conical surface 17. Therefore, the processing liquid supplied to the substrate facing surface 23 of the lid member 7 can be smoothly guided to the inner surface of the partition wall 9 of the chamber body 6.

FIG. 4 is a schematic cross-sectional view for explaining the configuration of the second liquid seal structure 13 shown in FIG. 1 and its surroundings. With reference to FIG. 1 and FIG. 4, the 2nd liquid seal structure 13 and the structure of the periphery of it are demonstrated.
The bottom portion 12 of the chamber body 6 is formed with an inner wall portion 146 that rises vertically upward from the inner peripheral edge of the bottom wall of the bottom portion 12, and an outer wall portion 147 that rises vertically upward from the middle in the radial direction of the bottom wall of the bottom portion 12. ing. A second seal groove 148 for storing pure water as a sealing liquid is formed by the outer surface of the inner wall portion 146, the inner surface of the outer wall portion 147, and the bottom surface of the bottom portion 12. The second seal groove 148 is formed in an annular shape with the rotation axis C as the center. The second seal groove 148 has a U-shaped cross section, and the inner wall portion 48 of the flange-shaped member 46 is located above the second seal groove 148. Pure water as a sealing liquid is stored in the second seal groove 148.

  Further, an exhaust liquid groove 20 is formed by the outer surface of the outer wall portion 147 and the outer peripheral surface and the bottom surface of the bottom portion 12. The exhaust liquid groove 20 is used as a sealing liquid for draining the processing liquid (chemical liquid or inert gas dissolved water) and the cleaning liquid used for processing the wafer W and exhausting the atmosphere in the internal space of the sealed chamber 2. It is for collecting pure water. The exhaust liquid groove 20 is formed in an annular shape around the rotation axis C (not shown) so as to surround the second seal groove 148. The exhaust liquid groove 20 has a U-shaped cross section, and one end of an exhaust liquid passage 110 (not shown in FIG. 4; see FIG. 1) is connected to the bottom thereof. The other end of the exhaust liquid passage 110 is connected to a waste liquid treatment facility (not shown) or an exhaust treatment facility (not shown) via a gas-liquid separator (not shown). Above the exhaust liquid groove 20, the outer wall portion 49 of the bowl-shaped member 46 is located.

In a state where the spin chuck 3 is at the processing position (position shown in FIG. 1), the lower end portion of the inner wall portion 48 is accommodated in the second seal groove 148 while maintaining a minute gap with the bottom portion of the second seal groove 148. Is done.
When the spin chuck 3 is located at the spin dry position (position shown in FIG. 12E), the lower end portion of the inner wall portion 48 overlaps a part of the second seal groove 148 in the left-right direction. That is, even in this state, the lower end portion of the inner wall portion 48 is accommodated in the second seal groove 148.

  Pure water is supplied to the second seal groove 148 via the pure water pipe 201. The supply of pure water to the second seal groove 148 is always performed in the activated state of the substrate processing apparatus 1. Therefore, the second seal groove 148 is always filled with pure water. The pure water overflowing from the second seal groove 148 flows into the exhaust liquid groove 20 and is guided from the exhaust liquid groove 20 through the exhaust liquid passage 110 to the waste liquid facility outside the apparatus.

FIG. 5 is an illustrative sectional view for explaining the configuration of the third seal structure 37 shown in FIG. 6 is a cross-sectional view taken along section line VI-VI in FIG. FIG. 7 is a cross-sectional view taken along section line VII-VII in FIG.
The third seal structure 37 includes a gas seal portion 111 fixedly attached to the outer side surface of the partition wall 9 so as to cover the passage hole 14, and the gas seal portion 111 opposite to the partition wall 9 with respect to the gas seal portion 111. And a liquid seal portion 121 that is fixedly attached to the main body.

  The liquid seal portion 121 has a liquid seal main body 122 having a thick rectangular plate shape. A first insertion hole 123 (see FIG. 5) through which the nozzle arm 15 is inserted is formed at the center of the liquid seal body 122. The first insertion hole 123 penetrates the liquid seal body 122 in the thickness direction. The cross-sectional shape of the first insertion hole 123 is a rectangular shape that matches the cross-sectional shape of the nozzle arm 15.

  The gas seal portion 111 has a gas seal main body 112 having a thick rectangular plate shape. A second insertion hole 113 (see FIG. 5) through which the nozzle arm 15 is inserted is formed at the center of the gas seal body 112. The second insertion hole 113 penetrates the gas seal body 112 in the thickness direction. The cross-sectional shape of the second insertion hole 113 is a rectangular shape that matches the cross-sectional shape of the nozzle arm 15.

  The second insertion hole 113 of the gas seal part 111 and the first insertion hole 123 of the liquid seal part 121 communicate with the passage hole 14 of the partition wall 9. One surface (the right surface in FIG. 5) of the gas seal main body 112 is joined in close contact with the outer surface of the partition wall 9 of the chamber main body 6. One surface (the right surface in FIG. 5) of the liquid seal main body 122 is joined in close contact with the other surface (the left surface in FIG. 5) of the gas seal main body 112. Therefore, the atmosphere in the space communicating with the passage hole 14, the second insertion hole 113, and the first insertion hole 123 is between the partition wall 9 and the gas seal portion 111 or between the gas seal portion 111 and the liquid seal portion 121. Never leak out.

  The nozzle arm 15 is slidably inserted through the inner peripheral surface of the first insertion hole 123 and the inner peripheral surface of the second insertion hole 113. Between the liquid seal portion 121 and the outer surface of the nozzle arm 15 inserted through the first insertion hole 123, as described later, a rectangular annular first surrounding the entire outer surface of the nozzle arm 15 is provided. A single flow passage 130 is formed. The first flow passage 130 is liquid-tight with pure water as a sealing liquid. Further, between the gas seal portion 111 and the outer surface of the nozzle arm 15 that passes through the second insertion hole 113, as described later, a square annular shape that surrounds the outer surface of the nozzle arm 15 over the entire circumference thereof. The second flow passage 120 is formed.

There is a possibility that the processing liquid (chemical liquid or rinsing liquid containing chemical liquid) scattered from the wafer W during the chemical liquid processing and the rinsing processing may adhere to the outer surface of the nozzle arm 15. When the chemical liquid is dried and crystallized on the outer surface of the nozzle arm 15, the dried chemical liquid may become particles, which may contaminate the wafer W rotating on the spin chuck 3.
However, since the inside of the square annular first flow passage 130 is liquid-tight with pure water, the pure water comes into contact with the outer surface of the nozzle arm 15 and adheres to the outer surface of the nozzle arm 15 by this pure water. The treated liquid (chemical solution or rinse solution) is washed away. That is, the outer surface of the nozzle arm 15 can be washed with pure water.

Further, since nitrogen gas flows through the square annular second flow passage 120, pure water (pure water attached by the liquid seal portion 121) and the like attached to the outer surface of the nozzle arm 15 is removed, and the nozzle arm 15 The outer surface is dried.
Further, the gas seal portion 111 is disposed closer to the internal space of the sealed chamber 2 than the liquid seal portion 121. Therefore, when moving into the sealed chamber 2, each position on the outer surface of the nozzle arm 15 enters the sealed chamber 2 after being supplied with nitrogen gas. Pure water adhering to the outer surface of the nozzle arm 15 by the liquid seal portion 121 is removed by nitrogen gas in the gas seal portion 111. Thereby, drawing of pure water into the internal space of the sealed chamber 2 can be reliably prevented.

Next, the liquid seal part 121 will be described in detail with reference to FIGS. 5 and 6.
A square annular first annular groove 124 is formed on the inner peripheral surface of the first insertion hole 123 (see FIG. 5) at the central position in the thickness direction over the entire circumferential direction. A portion of the first annular groove 124 facing the upper surface of the nozzle arm 15 is a direction orthogonal to both the thickness direction and the vertical direction (the direction orthogonal to the paper surface in FIG. 5; the left-right direction in FIGS. 6 and 7; A liquid introduction connecting path 125 that connects a central portion (referred to as “left-right direction”) and the upper end surface of the liquid seal main body 122 is opened. The liquid introduction connection path 125 extends along the vertical direction and opens at the upper end surface of the liquid seal main body 122, and the opening portion forms a liquid introduction port 126 for introducing pure water as a sealing liquid. . The liquid inlet 126 is supplied with pure water from a pure water supply source (not shown).

  In the first annular groove 124 facing the lower surface of the nozzle arm 15, a liquid outlet connection path 127 that connects the central portion in the left-right direction and the lower end surface of the liquid seal main body 122 opens. The liquid lead-out connection path 127 extends along the vertical direction and opens at the lower end surface of the liquid seal main body 122, and the opening portion forms a liquid lead-out port 128 through which pure water is led out. A waste liquid path 129 (see FIG. 5) for guiding the pure water led to the liquid outlet 128 to the waste liquid facility is connected to the liquid outlet 128.

In a state where the nozzle arm 15 is inserted through the first annular groove 124, a rectangular annular first flow passage 130 is formed between the first annular groove 124 and the outer surface (upper surface, lower surface and both side surfaces) of the nozzle arm 15. The The first flow passage 130 communicates with the liquid inlet 126 and the liquid outlet 128, respectively.
Pure water supplied to the liquid inlet 126 and flowing through the liquid inlet connection path 125 passes through the first flow path 130 in one side portion in the left-right direction on the upper surface of the nozzle arm 15 (right side portion of the upper surface shown in FIG. 6). The liquid passes through the liquid outlet connection passage 127 while moving along one side surface (right side surface) of the nozzle arm 15 and one side portion (right side portion of the bottom surface shown in FIG. 6) in the left-right direction on the lower surface of the nozzle arm 15. It is discharged from the outlet 128.

  The pure water supplied to the liquid inlet 126 passes through the first flow path 130 on the other side portion in the left-right direction on the upper surface of the nozzle arm 15 (left side portion on the upper surface shown in FIG. 6), and on the other side of the nozzle arm 15. The liquid is discharged from the liquid outlet 128 through the liquid outlet connection path 127 while moving along the side surface (left side surface) and the other side portion in the left-right direction on the lower surface of the nozzle arm 15 (left portion of the lower surface shown in FIG. 6). . Thereby, the space between the inner peripheral surface of the liquid seal main body 122 and the outer surface of the nozzle arm 15 is sealed with pure water.

Next, the gas seal portion 111 will be described in detail with reference to FIGS. 5 and 7.
The gas seal part 111 (refer FIG. 5) has the gas seal main body 112 which makes | forms a thick rectangular plate shape. A second insertion hole 113 through which the nozzle arm 15 is inserted is formed at the center of the gas seal body 112. The second insertion hole 113 penetrates the gas seal body 112 in the thickness direction. The cross-sectional shape of the second insertion hole 113 is a rectangular shape that matches the cross-sectional shape of the nozzle arm 15.

  On the inner peripheral surface of the second insertion hole 113, a square annular second annular groove 114 is formed at the central position in the thickness direction over the entire circumferential direction. A gas introduction connection path 115 that connects the central portion in the left-right direction and the upper end surface of the gas seal main body 112 is opened at a portion of the second annular groove 114 facing the upper surface of the nozzle arm 15. The gas introduction connecting path 115 extends along the vertical direction and opens at the upper end surface of the gas seal main body 112, and the opening portion forms a gas introduction port 116 for introducing nitrogen gas as a sealing liquid. . Nitrogen gas from a nitrogen gas supply source (not shown) is supplied to the gas inlet 116.

  A gas outlet connection path 117 that connects the central portion in the left-right direction and the lower end surface of the gas seal body 112 is opened at a portion of the second annular groove 114 that faces the lower surface of the nozzle arm 15. The gas lead-out connection path 117 extends along the vertical direction and opens at the lower end surface of the gas seal main body 112, and the opening portion forms a gas lead-out port 118 for leading out nitrogen gas. An exhaust passage 119 (see FIG. 5) for guiding the nitrogen gas led out to the gas lead-out port 118 to the exhaust treatment facility is connected to the gas lead-out port 118.

In a state where the nozzle arm 15 is inserted through the second annular groove 114, a square annular second flow passage 120 is formed between the second annular groove 114 and the outer surface (upper surface, lower surface and both side surfaces) of the nozzle arm 15. The The second flow passage 120 communicates with the gas inlet 116 and the gas outlet 118, respectively.
Nitrogen gas supplied to the gas introduction port 116 and flowing through the gas introduction connection path 115 passes through the second flow passage 120 in one side portion in the left-right direction on the upper surface of the nozzle arm 15 (right side portion of the upper surface shown in FIG. 7). The gas passes through the gas outlet connection path 117 while moving along one side surface (right side surface) of the nozzle arm 15 and one side portion (right side portion of the bottom surface shown in FIG. 7) in the left-right direction on the lower surface of the nozzle arm 15. It is discharged from the outlet 118.

  Further, the nitrogen gas supplied to the gas inlet 116 passes through the second flow path 120 through the other side portion in the left-right direction on the upper surface of the nozzle arm 15 (the left side portion of the upper surface shown in FIG. 7) and the other side of the nozzle arm 15. The gas is discharged from the gas outlet port 118 through the gas outlet connection path 117 while moving along the side surface (left side surface) and the other side portion in the left-right direction on the lower surface of the nozzle arm 15 (left side portion of the lower surface shown in FIG. 7). . Thereby, the space between the inner peripheral surface of the gas seal main body 112 and the outer surface of the nozzle arm 15 is sealed with nitrogen gas.

FIG. 8 is a schematic diagram of a configuration for supplying the processing liquid to the processing module M1 (see FIG. 1). The substrate processing apparatus 1 degass oxygen in pure water, adds an inert gas to the pure water, and generates an inert gas-dissolved water, and a processing module M1. A processing liquid supply module M2 for supplying a processing liquid is further provided.
The inert gas dissolved water production | generation unit 50 can produce | generate inert gas dissolved water from the pure water supplied from the pure water supply source (not shown). The inert gas dissolved water generated by the inert gas dissolved water generating unit 50 is supplied to the treatment liquid supply module M2. The inert gas dissolved water generation unit 50 performs degassing of oxygen from pure water and addition of the inert gas to pure water through, for example, a hollow fiber separation membrane having gas permeability and liquid impermeability. Is. As the inert gas dissolved water production | generation unit 50 of such a structure, the brand name "Lixel (trademark) separation membrane contactor" by a Membrana company can be used, for example. A specific configuration of the inert gas dissolved water generation unit 50 is disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-22572.

  The inert gas dissolved water generation unit 50 degass oxygen until the oxygen concentration in the supplied pure water becomes, for example, 20 ppb or less. Moreover, the inert gas dissolved water production | generation unit 50 adds nitrogen gas with high purity (concentration of nitrogen gas is 99.999% to 99.99999999999%, for example) to pure water, and the nitrogen concentration is For example, 7 ppm to 24 ppm of inert gas dissolved water is generated. By setting the nitrogen concentration in the inert gas-dissolved water to a value within this range, it is possible to suppress or prevent the oxygen concentration in the inert gas-dissolved water from increasing with time.

  The processing liquid supply module M2 shows only the configuration for supplying the processing liquid to the processing liquid supply pipe 38 in FIG. 8, but for discharging the processing liquid to other nozzles such as the processing liquid upper nozzle 25. The processing liquid can be supplied to the configuration. The treatment liquid supply module M2 mixes a chemical solution stock and an inert gas-dissolved water to prepare a chemical solution as a treatment liquid, and a chemical supply unit 53 that supplies the chemical solution to the in-pipe preparation unit 51. And.

The “chemical solution stock” means a chemical solution before mixing with the inert gas-dissolved water. Examples of the chemical stock solution include hydrofluoric acid (HF), hydrochloric acid (HCL), a mixed liquid of hydrofluoric acid and IPA (isopropyl alcohol), and ammonium fluoride (NH ₄ F). When hydrofluoric acid is used as the chemical solution stock solution, the hydrofluoric acid and the inert gas-dissolved water are mixed (prepared) at a predetermined ratio in the in-pipe preparation unit 51 to generate dilute hydrofluoric acid (DHF).

  The in-pipe preparation unit 51 is connected to the inert gas dissolved water generation unit 50 through the supply pipe 54. The in-pipe preparation unit 51 is supplied with the inert gas-dissolved water from the inert gas-dissolved water generation unit 50 through the supply pipe 54. The in-pipe preparation unit 51 is connected to the chemical solution supply unit 53 via the chemical solution supply pipe 55. The chemical solution stock solution is supplied from the chemical solution supply unit 53 to the in-pipe preparation unit 51 via the chemical solution supply pipe 55. The in-pipe preparation unit 51 mixes the chemical solution supplied from the chemical supply unit 53 and the inert gas-dissolved water supplied from the inert gas-dissolved water generation unit 50 to prepare a chemical as a treatment liquid. Can do.

  The in-pipe preparation unit 51 is connected to a processing liquid supply pipe 38 and can supply a chemical liquid as a processing liquid to the processing liquid nozzle 4 through the processing liquid supply pipe 38. Further, the inert gas-dissolved water supplied from the in-pipe preparation unit 51 and the inert gas-dissolved water generation unit 50 is not mixed with the chemical solution stock solution, and the inert gas-dissolved water is used as the rinse liquid as it is as the treatment liquid supply pipe 38. Can be supplied to the treatment liquid nozzle 4. Thereby, a chemical | medical solution and an inert gas dissolved water can be selectively supplied to the process liquid nozzle 4. FIG.

  The in-pipe preparation unit 51 includes a mixing part 59 as a pipe capable of mixing the chemical solution stock solution and the inert gas dissolved water therein, a valve 60 and a flow rate adjusting valve 61 interposed in the supply pipe 54, A chemical liquid valve 62 and a chemical liquid flow rate adjusting valve 63 provided in the chemical liquid supply pipe 55 are provided. The supply pipe 54 and the chemical solution supply pipe 55 are each connected to the mixing unit 59.

  When the valve 60 is opened, the inert gas dissolved water having a predetermined flow rate adjusted by the flow rate adjusting valve 61 can be supplied to the mixing unit 59, and the chemical solution flow rate adjusting valve 63 is adjusted by opening the chemical solution valve 62. The chemical solution stock solution having a predetermined flow rate can be supplied to the mixing unit 59. When the chemical solution valve 62 is opened while the valve 60 is opened, the chemical solution stock solution is injected (injected) into the inert gas dissolved water flowing through the mixing section 59, and the chemical solution stock solution and the inert gas dissolved water are injected. Can be mixed. Therefore, the chemical | medical solution prepared by the predetermined | prescribed ratio can be produced | generated by adjusting the supply amount of the chemical | medical solution stock solution with respect to the mixing part 59, and the supply amount of inert gas dissolved water. Moreover, only the inert gas dissolved water can be supplied to the mixing part 59 by opening only the valve 60 with the chemical liquid valve 62 closed. Thus, the inert gas-dissolved water can be supplied as it is to the treatment liquid supply pipe 38 as a rinse liquid without mixing the chemical solution stock solution with the inert gas-dissolved water.

  The chemical solution supply unit 53 includes a chemical solution tank 71 that stores the chemical solution stock solution, and a chemical solution supply pipe 55 that guides the chemical solution stock from the chemical solution tank 71 to the in-pipe preparation unit 51. The chemical liquid tank 71 is a sealed container, and the internal space of the chemical liquid tank 71 is blocked from the external space. One end of the chemical solution supply pipe 55 is connected to the chemical solution tank 71. A pump 72, a filter 73, and a deaeration unit 74 are interposed in the chemical solution supply pipe 55 in this order from the chemical solution tank 71 side. The deaeration unit 74 has the same configuration as the inert gas dissolved water generation unit 50, and does not add an inert gas.

  Further, a chemical liquid supply pipe 75 is connected to the chemical liquid tank 71. A chemical solution stock solution from a chemical solution stock source (not shown) is supplied to the chemical solution tank 71 via a chemical solution supply pipe 75. The chemical solution supply pipe 75 is provided with a chemical solution valve 76 for switching between supply and stop of supply of the chemical solution to the chemical solution tank 71. For example, when the amount of liquid in the chemical liquid tank 71 becomes a predetermined amount or less, the unused chemical liquid stock solution is supplied to the chemical liquid tank 71. Thus, the unused chemical solution stock solution can be replenished to the chemical solution tank 71.

  An inert gas supply pipe 77 is connected to the chemical tank 71. The chemical tank 71 is supplied with an inert gas from an inert gas supply source (not shown) via an inert gas supply pipe 77. The inert gas supply pipe 77 is provided with an inert gas valve 78 for switching between supply and stop of supply of the inert gas to the chemical tank 71. For example, an inert gas is constantly supplied to the chemical tank 71.

  By supplying an inert gas to the chemical liquid tank 71, air can be expelled from the chemical liquid tank 71. Therefore, it is possible to suppress or prevent the oxygen contained in the air in the chemical solution tank 71 from being dissolved in the chemical solution stock stored in the chemical solution tank 71 and increasing the amount of dissolved oxygen in the chemical solution stock. Further, by pressurizing the chemical liquid tank 71 with the inert gas, the chemical liquid stock solution stored in the chemical liquid tank 71 can be pumped to the chemical liquid supply pipe 55.

  The chemical solution stock solution in the chemical solution tank 71 is pumped out of the chemical solution tank 71 by the pressure of the inert gas or the suction force by the pump 72. And the chemical | medical solution stock solution pumped out is pressurized by the pump 72, passes the filter 73, and a foreign material is removed. Furthermore, the chemical solution stock that has passed through the filter 73 is degassed by the degassing unit 74, and the amount of dissolved oxygen is reduced. Then, the chemical solution stock solution in which the amount of dissolved oxygen is reduced is supplied to the in-pipe preparation unit 51.

FIG. 9 is an illustrative view of piping provided in the substrate processing apparatus 1.
All the pipes for circulating the processing liquid such as the processing liquid supply pipe 38 have the structure shown in FIG. Hereinafter, all the pipes for circulating the processing liquid such as the processing liquid supply pipe 38 are collectively referred to as “pipe 79”.
The pipe 79 has a double pipe structure including an inner pipe 80 through which the processing liquid flows and an outer pipe 81 surrounding the inner pipe 80. The inner pipe 80 is supported inside the outer pipe 81 by a support member (not shown) interposed between the inner pipe 80 and the outer pipe 81. The inner pipe 80 is supported in a non-contact state with respect to the outer pipe 81. A cylindrical space is formed between the inner pipe 80 and the outer pipe 81. The inner pipe 80 and the outer pipe 81 are made of, for example, a fluororesin (more specifically, PFA (perfluoroalkylvinyl ether tetrafluoro ethlene copolymer) having excellent chemical resistance and heat resistance. The PFA is permeable to oxygen. Can do.

  Further, an inert gas supply pipe 83 provided with an inert gas valve 82 and an exhaust pipe 85 provided with an exhaust valve 84 are connected to the outer pipe 81. By opening the inert gas valve 82, an inert gas from an inert gas supply source (not shown, for example, nitrogen gas) can be supplied into the outer pipe 81 through the inert gas supply pipe 83. . Thereby, an inert gas can be filled between the inner pipe 80 and the outer pipe 81. Further, by opening the exhaust valve 84, gas can be exhausted from between the inner pipe 80 and the outer pipe 81.

  By opening the inert gas valve 82 in a state where the exhaust valve 84 is opened, air can be expelled from between the inner pipe 80 and the outer pipe 81, and the atmosphere in the meantime can be replaced with an inert gas atmosphere. Thereby, the inner pipe 80 can be surrounded by the inert gas. Then, after the atmosphere between the inner pipe 80 and the outer pipe 81 is replaced with the inert gas atmosphere, the inner pipe 80 is surrounded by the inert gas by closing the inert gas valve 82 and the exhaust valve 84. Can be maintained.

By enclosing the inner pipe 80 with the inert gas, the amount of oxygen entering the inner pipe 80 can be reduced. Thereby, it can suppress or prevent that oxygen melt | dissolves in the process liquid which distribute | circulates the inside piping 80, and the oxygen concentration in the said process liquid rises.
FIG. 10 is a block diagram for explaining the electrical configuration of the substrate processing apparatus 1.
The substrate processing apparatus 1 includes a control device (chamber cleaning control means, drying control means) 131 including a microcomputer. The control device 131 controls operations of the spin motor 41, the lid member lifting mechanism 33, the lid member rotating mechanism 32, the chuck lifting mechanism 100, the nozzle drive motor 139, and the like. The opening / closing of the valves 27, 30, 35, 60 to 63, 76, 78 provided in the substrate processing apparatus 1 is controlled by the control device 131.

FIG. 11 is a cross-sectional view for explaining an example of the surface state of the wafer W processed by the substrate processing apparatus 1.
As will be described below, the wafer W carried into the substrate processing apparatus 1 has, for example, a polymer residue (residue after dry etching or ashing) attached to the surface and an exposed metal pattern. The metal pattern may be a single film of copper, tungsten, or other metal, or may be a multilayer film in which a plurality of metal films are stacked. As an example of the multilayer film, a laminated film in which a barrier metal film for preventing diffusion is formed on the surface of a copper film can be cited.

  As shown in FIG. 11, an interlayer insulating film 87 is formed on the surface of the wafer W. In the interlayer insulating film 87, a lower wiring groove 88 is formed by digging from the upper surface. A copper wiring 89 is embedded in the lower wiring groove 88. On the interlayer insulating film 87, a low dielectric constant insulating film 91 as an example of a film to be processed is laminated via an etch stopper film 90. An upper wiring groove 92 is formed in the low dielectric constant insulating film 91 by digging from the upper surface. Further, a via hole 93 reaching the surface of the copper wiring 89 from the bottom surface of the upper wiring groove 92 is formed in the low dielectric constant insulating film 91. Copper is buried in the upper wiring trench 92 and the via hole 93 in a lump.

  The upper wiring trench 92 and the via hole 93 are subjected to a dry etching process after a hard mask is formed on the low dielectric constant insulating film 91, and a portion exposed from the hard mask in the low dielectric constant insulating film 91 is removed. Is formed. After the formation of the upper wiring trench 92 and the via hole 93, an ashing process is performed, and the unnecessary hard mask is removed from the low dielectric constant insulating film 91. At the time of dry etching and ashing, the reaction product including the components of the low dielectric constant insulating film 91 and the hard mask becomes a polymer residue, and the surface of the low dielectric constant insulating film 91 (the inner surfaces of the upper wiring trench 92 and the via hole 93). ). Therefore, after ashing, a process for removing the polymer residue from the surface of the low dielectric constant insulating film 91 is performed by supplying a polymer removing liquid to the surface of the wafer W. Below, the process example for removing a polymer residue from the surface of the wafer W using the substrate processing apparatus 1 is demonstrated.

12A to 12F are process diagrams for explaining an example of the processing of the wafer W by the substrate processing apparatus 1. Hereinafter, processing examples of the wafer W by the substrate processing apparatus 1 will be described with reference to FIGS. 1, 8, 9, and 12 </ b> A to 12 </ b> F.
Prior to the processing of the wafer W, as shown in FIG. 12A, the lid member 7 is disposed at a spaced position spaced upward from the spin base 43 of the spin chuck 3. Therefore, the upper opening 5 of the sealed chamber 2 is opened. Further, the spin chuck 3 is raised to the spin dry position (position shown in FIG. 12E) and is kept waiting at the spin dry position. The processing liquid nozzle 4 is retracted to the retracting position on the side of the spin chuck 3. All of the valves 27, 30, 35, 60 to 63, 76, 78 are closed.

  The ashed wafer W is carried into the substrate processing apparatus 1 by a transfer robot (not shown), and is held by the spin chuck 3 in the spin dry position with its surface facing upward. After holding the wafer W, the controller 131 controls the chuck lifting mechanism 100 to lower the spin chuck 3 toward the processing position. Further, the control device 131 controls the lid member lifting mechanism 33 to lower the lid member 7 to the closed position (see FIG. 1). Thereafter, the upper opening 5 of the chamber body 6 is closed by the lid member 7 (see FIG. 12B). Thereby, the internal space of the sealed chamber 2 is sealed from the outside, and the sealed chamber 2 functions as a substantially sealed chamber.

  Next, as shown in FIG. 12B, an inert gas purge process is performed in which the air atmosphere in the internal space of the sealed chamber 2 is replaced with an inert gas (nitrogen gas) atmosphere. Specifically, the control device 131 opens the inert gas valve 30 to supply nitrogen gas into the internal space of the sealed chamber 2 from the inert gas discharge port 29. The discharge flow rate of nitrogen gas from the inert gas discharge port 29 at this time is, for example, 50 to 300 L / min, preferably 150 L / min. Nitrogen gas discharged from the inert gas discharge port 29 spreads in the internal space of the sealed chamber 2, and the air in the sealed chamber 2 passes outside the sealed chamber 2 through the exhaust port of the exhaust liquid groove 20 (see FIGS. 1 and 4). Extrude into. Thereby, the atmosphere in the sealed chamber 2 is replaced with a nitrogen gas atmosphere. The supply of nitrogen gas into the sealed chamber 2 is continued until the end of the drying process.

In this embodiment, the wafer W is in a stationary state (non-rotating state) during the nitrogen gas purge period. However, the wafer W may be rotated by the control device 131 controlling the spin motor 41.
This inert gas purge process is continued until the oxygen concentration in the internal space of the sealed chamber 2 reaches a predetermined low concentration (for example, 100 ppm or less). Whether or not the oxygen concentration in the sealed chamber 2 has reached a predetermined low concentration is determined by arranging an oxygen concentration sensor (not shown) on the inner surface of the partition wall 9 of the chamber body 6 to detect the oxygen concentration in the sealed chamber 2. The determination may be made by determining whether or not the discharge time of the nitrogen gas from the inert gas discharge port 29 has reached a predetermined time. When the oxygen concentration in the sealed chamber 2 reaches a predetermined low concentration, chemical processing (see FIG. 12C) for removing the polymer residue from the surface of the wafer W is then performed on the wafer W.

When the chemical liquid processing start timing comes, the control device 131 controls the spin motor 41 to rotate the wafer W at a predetermined liquid processing speed (10 to 500 rpm, preferably 250 rpm).
Further, the control device 131 controls the in-pipe preparation unit 51 and discharges dilute hydrofluoric acid as a chemical solution from the treatment liquid nozzle 4. Specifically, the control device 131 opens the chemical liquid valve 62 and the valve 60. When the chemical solution valve 62 and the valve 60 are opened, hydrofluoric acid and inert gas-dissolved water as a chemical solution stock solution are supplied to the mixing unit 59. As a result, hydrofluoric acid is injected into the inert gas-dissolved water flowing through the mixing section 59, and the diluted hydrofluoric acid prepared at the predetermined ratio is generated. Further, the control device 131 sets the opening degrees of the flow rate adjustment valve 61 and the chemical flow rate adjustment valve 63 in order to set the mixture ratio and discharge flow rate of dilute hydrofluoric acid to the desired mixture ratio and discharge flow rate (supply flow rate), respectively. adjust. Dilute hydrofluoric acid is an example of a chemical solution and an example of a polymer removal solution. In this embodiment, dilute hydrofluoric acid generated in the mixing unit 59 is, for example, mixed with hydrofluoric acid and pure water at a mixing ratio of 1:10 to 1: 1800, preferably 1:10 to 1: 800 (preparation). ) The discharge flow rate (supply flow rate) of dilute hydrofluoric acid generated by the mixing unit 59 is 0.5 L / min to 3 L / min, preferably 1 L / min. The diluted hydrofluoric acid generated by the mixing unit 59 is supplied to the processing liquid supply pipe 38 and discharged from the processing liquid nozzle 4 toward the surface of the wafer W. The diluted hydrofluoric acid discharged from the treatment liquid nozzle 4 was diluted with pure water from which oxygen was deaerated by the degassing unit 74 with pure water from which oxygen was degassed by the inert gas dissolved water generation unit 50. Is. Therefore, the oxygen concentration is sufficiently reduced.

  As shown in FIG. 12C, in the chemical processing, the control device 131 controls the nozzle drive motor 139 to reciprocate the nozzle arm 15 within a predetermined range. Thus, the supply position on the surface of the wafer W from which the diluted hydrofluoric acid from the processing liquid nozzle 4 is guided crosses the rotation direction of the wafer W within a range from the rotation center of the wafer W to the peripheral edge of the wafer W. Reciprocates while drawing a linear trajectory. Further, the diluted hydrofluoric acid supplied to the surface of the wafer W spreads over the entire surface of the wafer W. Thereby, dilute hydrofluoric acid is supplied uniformly over the entire surface of the wafer W. By supplying dilute hydrofluoric acid from the processing liquid nozzle 4 to the surface of the wafer W, the polymer residue formed on the surface of the wafer W can be removed by the chemical ability of the dilute hydrofluoric acid. The diluted hydrofluoric acid supplied to the surface of the wafer W is scattered from the peripheral edge of the wafer W toward the side of the wafer W. At this time, the processing liquid scattered from the surface of the wafer W mainly adheres to the inner surface (particularly the cylindrical surface 18 and the waste liquid guide surface 19) of the partition wall 9 of the chamber body 6, the outer surface of the nozzle arm 15, and the processing liquid nozzle 4. .

  Further, when chemical treatment is performed, nitrogen gas is supplied to the internal space of the sealed chamber 2. Therefore, the internal space of the sealed chamber 2 is maintained in a nitrogen gas atmosphere, and an increase in oxygen concentration in the internal space of the sealed chamber 2 is suppressed or prevented. Therefore, it is possible to suppress the oxygen in the atmosphere from being dissolved in the diluted hydrofluoric acid discharged from the treatment liquid nozzle 4, thereby suppressing or preventing an increase in the oxygen concentration in the diluted hydrofluoric acid. Therefore, dilute hydrofluoric acid with a sufficiently reduced oxygen concentration can be supplied to the surface of the wafer W. Thereby, it is possible to suppress or prevent the occurrence of an oxidation reaction due to dissolved oxygen in dilute hydrofluoric acid on the wafer W. As a result, even if the chemical solution supplied to the wafer W has an etching action on the oxide, such as dilute hydrofluoric acid, it is possible to suppress or prevent undesired etching on the wafer W. it can.

When the chemical treatment is performed for a predetermined time (for example, 10 to 60 seconds, preferably 30 seconds), a rinsing process (see FIG. 12D) for washing away the chemical from the surface of the wafer W is then performed on the wafer W.
Specifically, the control device 131 closes the chemical solution valve 62 while keeping the valve 60 of the in-pipe preparation unit 51 open. When the chemical liquid valve 62 is closed and the valve 60 is opened, only the inert gas-dissolved water is supplied to the mixing unit 59. Accordingly, the inert gas-dissolved water is supplied to the treatment liquid supply pipe 38, and the inert gas-dissolved water as the rinse liquid is discharged from the treatment liquid nozzle 4.

  Also in the rinsing process, the control device 131 controls the nozzle drive motor 139 to reciprocate the nozzle arm 15 within a predetermined range. As a result, the supply position on the surface of the wafer W to which the inert gas dissolved water from the processing liquid nozzle 4 is guided is within the range from the rotation center of the wafer W to the peripheral edge of the wafer W and the rotation direction of the wafer W. Reciprocate while drawing intersecting linear trajectories. Further, the inert gas dissolved water supplied to the surface of the wafer W spreads over the entire surface of the wafer W, and the diluted hydrofluoric acid adhering to the surface of the wafer W is washed away by the inert gas dissolved water. Then, the inert gas-dissolved water containing dilute hydrofluoric acid is shaken off by the rotation of the wafer W, and scattered from the peripheral edge to the side. At this time, the inert gas-dissolved water containing dilute hydrofluoric acid mainly adheres to the inner surface (particularly the cylindrical surface 18 and the waste liquid guide surface 19) of the partition wall 9 of the chamber body 6, the outer surface of the nozzle arm 15, and the treatment liquid nozzle 4. To do.

  The inert gas dissolved water discharged from the treatment liquid nozzle 4 is degassed by the inert gas dissolved water generating unit 50, and the amount of dissolved oxygen is sufficiently reduced. Further, the inert gas-dissolved water produced by the inert gas-dissolved water production unit 50 is suppressed or prevented from increasing in oxygen concentration over time due to the addition of nitrogen gas. In addition, the oxygen concentration in the atmosphere in the sealed chamber 2 is sufficiently reduced. Accordingly, the inert gas-dissolved water having a sufficiently reduced oxygen concentration can be supplied to the surface of the wafer W, and an oxidation reaction due to the dissolved oxygen in the inert gas-dissolved water occurs on the wafer W. This can be suppressed or prevented. Therefore, it is possible to suppress the etching of the oxide by dilute hydrofluoric acid remaining on the wafer W, thereby suppressing or preventing the occurrence of undesired etching on the wafer W.

This rinsing process is continued until the residual amount of fluorine ions in the internal space of the sealed chamber 2 reaches, for example, a predetermined low value (0.15 ng / cm ² or less). Whether or not the residual amount of fluorine ions in the sealed chamber 2 has reached a predetermined low value is determined by placing a fluorine ion sensor (not shown) on the inner surface of the partition wall of the chamber body 6 and remaining fluorine ions in the sealed chamber 2. It may be determined by detecting the amount, or may be determined when the discharge time of the inert gas dissolved water from the treatment liquid nozzle 4 has reached a predetermined time. When the remaining amount of fluorine ions in the sealed chamber 2 reaches a predetermined low value, a chamber cleaning process for cleaning the inside of the sealed chamber 2 is then performed. The chamber cleaning process will be described later.

After the chamber cleaning process is completed, as shown in FIG. 12E, a drying process (spin drying) for drying the wafer W is performed.
The control device 131 controls the chuck lifting mechanism 100 to raise the spin chuck 3 to the uppermost spin dry position. Thereby, the substrate facing surface 23 of the lid member 7 comes close to the surface of the wafer W held by the spin chuck 3. In this spin dry position, the distance between the surface of the wafer W held by the spin chuck 3 and the substrate facing surface 23 of the lid member 7 is a predetermined narrow distance (for example, 0.1 to 5.0 mm, preferably 2). .5 mm). For this reason, a minute space is formed between the surface of the wafer W and the substrate facing surface 23 and is shielded from the atmosphere on the side thereof.

  When the spin chuck 3 is raised to the spin dry position, the control device 131 accelerates the rotation speed of the spin motor 41 and moves the wafer W held on the spin chuck 3 to a high rotation speed (for example, 1000 to 2500 rpm). It is preferably rotated at 2500 rpm. During the drying process, the control device 131 controls the lid member rotation mechanism 32 to rotate the lid member 7 in the same direction as the rotation direction of the wafer W in synchronization with the rotation of the wafer W. Therefore, a stable airflow is formed between the surface of the wafer W and the substrate facing surface 23 of the lid member 7, and the space between the surface of the wafer W and the substrate facing surface 23 is blocked from the side atmosphere. The

Further, the discharge of nitrogen gas from the inert gas discharge port 29 is continued. Therefore, a nitrogen gas flow from the center of the wafer W toward the peripheral edge of the wafer W is formed between the surface of the wafer W and the substrate facing surface 23, and the space between the surface of the wafer W and the substrate facing surface 23 is formed. Filled with nitrogen gas. As a result, the wafer W can be dried in a low oxygen atmosphere.
In this drying process, when the wafer W is rotated at a high rotational speed, the rinsing liquid (inert gas-dissolved water) adhering to the wafer W is subjected to a centrifugal force generated by the rotation of the wafer W and is surrounded by the wafer W. It is shaken off. Thereby, the rinse liquid is removed from the wafer W, and the wafer W is dried.

  Also, the IPA liquid can be supplied to the surface of the wafer W immediately before the drying process at the spin dry position of the spin chuck 3. As shown by a two-dot chain line in FIG. 1, when the IPA liquid is supplied to the processing liquid upper nozzle 25, the IPA liquid can be supplied to the center of the surface of the wafer W. The gas-dissolved water (rinse liquid) and the IPA liquid can be satisfactorily replaced, and the surface of the wafer W can be satisfactorily dried.

  When the drying process is performed for a predetermined drying time, the control device 131 controls the spin motor 41 to stop the rotation of the wafer W. Further, the control device 131 drives the lid member rotating mechanism 32 to stop the rotation of the lid member 7 and drives the lid member rotating mechanism 32 to move the lid member 7 upward from the spin base 43 of the spin chuck 3. It raises to the open position which separated (refer FIG. 12A). Thereby, the upper opening 5 of the sealed chamber 2 is opened. The control device 131 closes the inert gas valve 30 and stops the supply of nitrogen gas from the inert gas discharge port 29.

Thereafter, the wafer W is transferred from the spin chuck 3 located at the spin dry position to the substrate transfer robot (not shown) through the opened upper opening 5, and the wafer W is transferred from the sealed chamber 2 by the substrate transfer robot. The
In the rinsing process, the rinsing process may be performed using the rinsing liquid from the processing liquid upper nozzle 25 instead of the rinsing process using the rinsing liquid from the processing liquid nozzle 4. In this case, at the time of the rinsing process, the carbonated water valve 27 is opened, and carbonated water is discharged from the process liquid upper discharge port 26 of the process liquid upper nozzle 25 toward the upper surface of the wafer W. The carbonated water supplied to the wafer W receives a centrifugal force due to the rotation of the wafer W and spreads over the entire surface of the wafer W, thereby washing away the chemical solution adhering to the surface of the wafer W.

Further, the rinsing process may be performed using both the rinsing liquid from the processing liquid nozzle 4 and the rinsing liquid from the processing liquid upper nozzle 25.
Next, a chamber cleaning process for cleaning the inside of the sealed chamber 2 with a cleaning liquid (for example, pure water) will be described. This chamber cleaning process may be performed during the processing by the substrate processing apparatus 1. During the chamber cleaning process, the wafer W is not held on the spin chuck 3, and the spin chuck 3 is positioned at the chamber cleaning position. ing.

  The control device 131 controls the chuck lifting mechanism 100 to lower the spin chuck 3 to the chamber cleaning position. The control device 131 controls the lid member lifting mechanism 33 to lower the lid member 7 to the closed position, and controls the lid member rotation mechanism 32 to rotate the lid member at a predetermined rotation speed. Further, the control device 131 opens the cleaning liquid valve 35 so that the cleaning liquid is supplied from the cleaning liquid nozzle 34 to the substrate facing surface 23 of the lid member 7. In this embodiment, pure water is used as the cleaning liquid (see FIG. 12F).

  The pure water supplied to the substrate facing surface 23 of the lid member 7 receives the centrifugal force generated by the rotation of the lid member 7 and moves outward in the rotational radius direction along the substrate facing surface 23 of the lid member 7. Accordingly, the pure water can be distributed evenly over substantially the entire area of the substrate facing surface 23 of the lid member 7, and the chemical liquid adhering to the substrate facing surface 23 of the lid member 7 and the rinsing liquid containing the chemical liquid are purified water. Can be washed away with.

  The pure water moving outward in the rotational radial direction along the substrate facing surface 23 of the lid member 7 passes through the lower surface 103 (see FIG. 3) and the first conical surface 17 (see FIG. 1). 6 is guided to the inner surface of the partition wall 9 and flows down along the inner surface of the partition wall 9 of the chamber body 6. At this time, the processing liquid (chemical liquid or rinsing liquid containing chemical liquid) adhering to the inner surface of the partition wall 9 is washed away by the cleaning liquid. The pure water from which the treatment liquid has been washed out flows into the exhaust liquid groove 20 and is guided to the waste liquid treatment facility through the exhaust liquid groove 20 and the exhaust liquid passage 110.

  Further, the chamber cleaning process is executed at a chamber cleaning position different from the processing position. When the chamber cleaning position is executed at the processing position, the processing liquid (the rinsing liquid including the chemical liquid and the chemical liquid) scattered from the periphery of the wafer W during the chemical liquid processing and the rinsing process and attached to the inner surface of the partition wall 9 of the chamber body 6. There is a risk that the spin chuck 3 may be struck and contaminated. However, at the chamber cleaning position different from the liquid processing position, the processing liquid adhering to the inner surface of the partition wall 9 does not touch the spin chuck 3. Therefore, the inside of the sealed chamber 2 can be cleaned without contaminating the spin chuck 3.

  The chamber cleaning process can also be performed during a series of cleaning processes on the wafer W. In this case, it is desirable to carry out after the rinse treatment and before the drying treatment. At this time, the wafer W is held on the spin chuck 3, and it is considered that the cleaning liquid is applied to the wafer W by the chamber cleaning process. In this case, it is desirable to use inert gas-dissolved water as the cleaning liquid so that oxygen is not supplied to the wafer W via the cleaning liquid. When the chamber cleaning process is performed during a series of cleaning processes, it is desirable that nitrogen gas is supplied from the inert gas discharge port 29 during the chamber cleaning process. Thereby, the inside of the sealed chamber 2 can be maintained in a low oxygen concentration state even during the chamber cleaning process.

  Further, in a series of processes (cleaning process for the wafer W), the supply flow rate of nitrogen gas in the sealed chamber 2 in the chemical solution process may be the same as that at the time of nitrogen gas purge, or may be made larger than that at the time of nitrogen gas purge. It may be. In addition, the supply flow rate of nitrogen gas in the sealed chamber 2 in the rinsing process may be the same flow rate as during the nitrogen gas purge, or may be a larger flow rate than during the nitrogen gas purge. Furthermore, the supply flow rate of nitrogen gas in the sealed chamber 2 during the drying process may be the same as that during the nitrogen gas purge, or may be larger than that during the nitrogen gas purge.

  As described above, according to this embodiment, the internal space of the sealed chamber 2 is sealed. Moreover, the volume of the internal space is made small. Therefore, the atmosphere control of the internal space of the sealed chamber 2 can be performed satisfactorily. Therefore, the atmosphere in the internal space can be controlled to a sufficiently low oxygen atmosphere, and thus the wafer W can be processed with the processing liquid in an atmosphere in which the oxygen concentration is sufficiently reduced.

  The lid member 7 and the chamber body 6 are sealed with a first liquid seal structure 8. Therefore, even when the lid member 7 is rotated, the internal space of the sealed chamber 2 can be kept sealed. In addition, since a liquid seal structure is employed, dust generation and a decrease in sealing performance hardly occur as compared with the case where a contact seal is used. Thereby, the seal | sticker between the cover member 7 and the chamber main body 6 can be kept favorable over a long period of time.

Hereinafter, measurement results and the like obtained by processing the wafer W by the substrate processing apparatus 1 will be described.
FIG. 13 is a diagram showing the relationship between the oxygen concentration in the inert gas-dissolved water and the etching amount of copper. FIG. 13 shows the measurement results of the etching amount (film reduction) of copper when a chemical solution treatment (polymer removal treatment) with dilute hydrofluoric acid is performed on the surface of the wafer W. The dilute hydrofluoric acid used was prepared with a ratio of hydrofluoric acid to pure water of 1: 100. In addition, as the hydrofluoric acid contained in the diluted hydrofluoric acid, oxygen that was not degassed was used. The dilute hydrofluoric acid used in this measurement has a very small proportion of hydrofluoric acid relative to the proportion of pure water, so the oxygen concentration in dilute hydrofluoric acid is the inertness used to prepare the dilute hydrofluoric acid. It can be considered that it is substantially equal to the oxygen concentration in the gas dissolved water. The chemical treatment time is 60 seconds.

  In FIG. 13, the leftmost measurement value (the leftmost ● value) is prepared by diluting hydrofluoric acid with an inert gas dissolved water having an oxygen concentration of 12 ppb, and using this dilute hydrofluoric acid to perform chemical treatment. This is the amount of copper etching performed. The second measured value from the left (second value from the left) is prepared by dilute hydrofluoric acid with an inert gas dissolved water having an oxygen concentration of 20 ppb, and chemical treatment is performed using this dilute hydrofluoric acid. This is the amount of copper etching. From the measurement results shown in FIG. 13, it is understood that copper etching can be reliably suppressed or prevented by performing chemical treatment using dilute hydrofluoric acid prepared with an inert gas-dissolved water having an oxygen concentration of 20 ppb or less. That is, it is understood that the formation of copper oxide can be reliably suppressed or prevented with dilute hydrofluoric acid prepared with an inert gas-dissolved water having an oxygen concentration of 20 ppb or less.

FIG. 14 is a diagram illustrating the relationship between the oxygen concentration above the wafer W and the oxygen concentration in the pure water supplied to the surface of the wafer W.
In FIG. 14, the inert gas-dissolved water is discharged from the processing liquid nozzle 4 toward the surface of the wafer W held on the spin chuck 3 with the spin chuck 3 positioned at the processing position. It is the result of having measured the oxygen concentration of the inert gas dissolved water supplied to. From the treatment liquid nozzle 4, an inert gas-dissolved water having an oxygen concentration adjusted to 10 ppb was discharged.

  In FIG. 14, the leftmost measured value (leftmost solid value) is the inertness supplied to the surface of the wafer W when the oxygen concentration above the wafer W is 0.001% (10 ppm). It is the value of the oxygen concentration of the gas-dissolved water, and the oxygen concentration in the inert gas-dissolved water at this time was 12 ppb. The second measured value from the left (the second value from the left) is the inert gas supplied to the surface of the wafer W when the oxygen concentration above the wafer W is 0.01% (100 ppm). This is the value of the dissolved water oxygen concentration, and the oxygen concentration in the inert gas dissolved water at this time was 20 ppb.

  From the measurement results shown in FIG. 14, when the pure water whose oxygen concentration is adjusted to 10 ppb is discharged toward the surface of the wafer W, if the oxygen concentration above the wafer W is 100 ppm or less, the surface of the wafer W is It can be seen that the oxygen concentration of pure water supplied to the water can be maintained at 20 ppb or less. Therefore, considering the measurement results shown in FIG. 13, if the oxygen concentration above the wafer W is set to 100 ppm or less and dilute hydrofluoric acid having an oxygen concentration of 10 ppb or less is discharged toward the surface of the wafer W, the oxygen concentration is 20 ppb. By supplying the following diluted hydrofluoric acid to the surface of the wafer W, it is possible to reliably suppress or prevent copper from being oxidized by dissolved oxygen in the diluted hydrofluoric acid.

  FIG. 15 is a diagram showing the relationship between the oxygen concentration in pure water and the nitrogen concentration in pure water. In FIG. 15, the value indicated by the alternate long and short dash line is a measured value of the oxygen concentration immediately after degassing oxygen from pure water, and the value indicated by the solid line indicates that oxygen has reached the value indicated by the alternate long and short dash line. This is a measured value of oxygen concentration after degassed pure water is opened to the atmosphere for 10 seconds or more. Moreover, the nitrogen concentration in the pure water when no nitrogen gas was added to the pure water was 3 ppm.

  From the measurement results shown in FIG. 15, when the nitrogen concentration in the pure water is less than 7 ppm, the oxygen concentration in the pure water increases with time. Therefore, it is possible to suppress or prevent the oxygen concentration in the pure water from increasing over time by adding nitrogen gas to the pure water so that the nitrogen concentration in the pure water is 7 ppm or more. Thereby, the oxygen concentration in the pure water from which oxygen has been deaerated can be maintained in a low state.

As mentioned above, although one Embodiment of this invention was described, this invention can also be implemented with another form.
For example, when the wafer W is loaded / unloaded, the spin chuck 3 is not in the spin dry position, but the wafer W is separated upward from the spin dry position (the spin chuck 3 approaches the lid member 7). It may be held by the chuck 3.

  Moreover, it is also possible to adopt a configuration in which the sealed chamber 2 is moved up and down instead of the configuration in which the spin chuck 3 is moved up and down. Moreover, it can also be set as the structure which raises / lowers both the spin chuck 3 and the sealed chamber 2. FIG. In these cases, an elevating mechanism for elevating the sealed chamber 2 is coupled to the main body chamber 6, for example. And when raising / lowering the sealed chamber 2, it is necessary to raise / lower drive mechanisms, such as the nozzle arm 15 and the nozzle drive motor 139, with the raising / lowering of the sealed chamber 2 (namely, the chamber main body 6 and the cover member 7). is there.

Further, the cross-sectional shape of the nozzle arm 15 may be a circular shape instead of a rectangular shape.
If the linear drive mechanism 36 for driving the nozzle arm 15 is accommodated in the sealed chamber 2 by devising the shape of the sealed chamber 2 or the like, the linear drive mechanism can be used when the volume in the sealed chamber 2 can be reduced. 36 may be accommodated in the sealed chamber 2.
Furthermore, instead of the processing liquid nozzle 4 that is a moving nozzle, a processing liquid nozzle that is fixedly disposed above the spin chuck 3 with its discharge port facing the surface (for example, the central portion) of the wafer W may be used. it can. In this case, the configuration of the linear drive mechanism 36 is not necessary.

  In addition, various design changes can be made within the scope of matters described in the claims.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Sealed chamber 3 Spin chuck (substrate holding rotation means)
4 treatment liquid nozzle (treatment liquid supply means)
5 Upper opening (opening)
6 Chamber body 7 Lid member 8 First liquid seal structure 13 Second liquid seal structure 23 Substrate facing surface 28 Inert gas flow passage (inert gas supply means)
29 Inert gas outlet (inert gas supply means)
30 Inert gas valve (inert gas supply means)
32 Lid member rotating mechanism (Lid member rotating means)
34 Cleaning liquid nozzle (cleaning liquid discharge means)
40 Base (exposed part)
43 Spin base (substrate holding and rotating means)
44 Holding member (substrate holding and rotating means)
45 Cover (exposed part)
100 Chuck elevating mechanism (first moving means, second moving means)
101 Seal ring 104 Seal groove 131 Control device (chamber cleaning control means, drying control means)
W Wafer (Substrate)

Claims (9)

A chamber body having an opening; a lid member rotatably provided to the chamber body to close the opening; and a first liquid seal structure for sealing a gap between the lid member and the chamber body with a liquid. A sealed chamber whose internal space is sealed from the outside;
A lid member rotating means for rotating the lid member;
A substrate holding and rotating means for rotating while holding the substrate in the internal space of the sealed chamber;
Treatment liquid supply means for supplying a treatment liquid to the substrate rotated by the substrate holding rotation means ;
First moving means for moving at least one of the substrate holding and rotating means and the hermetic chamber so that the substrate held by the substrate holding and rotating means and the lid member approach / separate,
The first moving unit has a liquid processing position where the substrate is subjected to liquid processing using the processing liquid supplied from the processing liquid supply unit, and the substrate is closer to the lid member than the liquid processing position and is dried on the substrate. It is configured to move at least one of the substrate holding and rotating means and the sealed chamber between a drying position for performing processing,
The lid member has a substrate facing surface facing the entire main surface of the substrate held by the substrate holding and rotating means,
The first moving unit is controlled to move the substrate holding / rotating unit and the sealed chamber to the drying position, and the substrate holding / rotating unit and the lid member rotating unit are controlled by the substrate holding / rotating unit. A substrate processing apparatus, further comprising a drying control unit configured to rotate the held substrate and the lid member in the same direction at a predetermined drying rotation speed . The first moving unit further includes a liquid processing position where the substrate is subjected to liquid processing with the processing liquid supplied from the processing liquid supply unit, and the substrate holding and rotating unit is attached to the lid member more than the liquid processing position. The substrate processing apparatus according to claim 1 , wherein the substrate processing apparatus is configured to move and move at least one of the substrate holding rotation means and the sealed chamber between a chamber cleaning position for approaching and cleaning the inside of the sealed chamber. . Further comprising a cleaning liquid discharging means for discharging the cleaning liquid toward the cover member, the substrate processing apparatus according to claim 1 or 2. The chamber further includes chamber cleaning control means for controlling the lid member rotating means to rotate the lid member at a predetermined lid cleaning rotational speed and controlling the cleaning liquid discharging means to discharge the cleaning liquid from the cleaning liquid discharging means. The substrate processing apparatus according to claim 3 . The substrate holding and rotating means has an exposed portion exposed outside the sealed chamber;
Second moving means for relatively moving the substrate holding and rotating means and the sealed chamber;
Further comprising a second liquid seal structure for sealing between said chamber body and the substrate holding and rotating means in liquid, the substrate processing apparatus according to any one of claims 1-4. The first liquid seal structure has a seal groove that is formed over the entire circumference of the opening in the chamber body, and can store a sealing liquid.
The lid member has a seal ring that enters the seal groove and is immersed in the sealing liquid;
Liquid supply means for supplying the sealing liquid to the seal groove;
In active state of the substrate processing apparatus, the seal groove, said sealing liquid from said liquid supply means is fed continuously, a substrate processing apparatus according to any one of claims 1-5. Wherein the sealed chamber further comprises an inert gas supply means for supplying an inert gas, a substrate processing apparatus according to any one of claims 1-6. A chamber body having an opening; a lid member rotatably provided to the chamber body to close the opening; and a first liquid seal structure for sealing a gap between the lid member and the chamber body with a liquid. Preparing a sealed chamber having an internal space sealed from the outside;
A substrate rotating step of disposing a substrate in the internal space of the sealed chamber and rotating the substrate in the internal space;
In parallel with the substrate rotation step, a processing liquid supply step for supplying a processing liquid to the substrate in the internal space of the chamber;
A drying position arranging step of arranging the substrate and the lid member at a drying position where the substrate is closer to the lid member than at the time of the treatment liquid supply step;
And a drying step of rotating the lid member and the substrate at a predetermined drying rotation speed at the drying position. A lid cleaning position arranging step of arranging the substrate and the lid member at a lid washing position where the substrate is closer to the lid member than at the time of the processing liquid supply step and the substrate is separated from the lid member than the drying position. When,
The substrate according to claim 8 , further comprising a lid member cleaning step of rotating the lid member at a predetermined lid cleaning rotational speed at the lid cleaning position and discharging a cleaning liquid from a cleaning liquid discharge unit toward the lid member. Processing method.

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