CN103199732B - Based on the micropositioner of piezoelectricity thread Driving technique - Google Patents
Based on the micropositioner of piezoelectricity thread Driving technique Download PDFInfo
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Abstract
The invention discloses a kind of micropositioner based on piezoelectricity thread Driving technique belonging to precision optical machinery and automation field, the described micropositioner based on piezoelectricity thread Driving technique comprises employing piezoelectricity thread driver Direct driver micropositioner one dimension micropositioner and prototype with displacement resolution.Appropriate location on upper plate is symmetrical arranged two fixed muffles, two piezoelectricity thread drivers are connected with fixed muffle screw-internal thread fit; Piezoelectricity thread driver center fixed drive screw rod, and contact with lower plate; Two springs and steel ball are that isosceles triangle is supported on micro-vibration of piezoelectric ceramic of the present invention between upper plate and lower plate drive screw positive and negative direction linearly can be made to move, and drive screw Direct driver micropositioner, without intermediate transmission mechanism; Micropositioner can realize XY and rotate, pitching table top, and this novel micropositioner has the features such as structure is simple, integrated level is high, load capacity is strong, is adapted at the field application such as light path adjustment, precision actuation, micro-system, Structure Attitude Control, biological medicine.<!--1-->
Description
Technical field
The invention belongs to precision optical machinery and automation field, particularly a kind of micropositioner based on piezoelectricity thread Driving technique, be particluarly suitable for the field application such as light path adjustment, precision actuation, micro-system, Structure Attitude Control, biological medicine.
Background technology
Traditional fine motion control desk, usually adopts manual fine-tuning knob, therefore precision and repeatability poor.For the micropositioner control system of various dimensions motion, manual adjustments is more complicated, and precision is lower.What traditional electromagnetic motor was equipped with decelerator also can carry out micro-positioning regulators, but the usual volume of this type systematic is large, system complex, and equipment cost is high, and its deceleration device is made up of multiple gear, causes reduction gearing mechanism idle running large, uses inconvenience.Eighties of last century nineties, " tablecloth principle " piezoelectric actuators of NewFocus company of U.S. invention, adopts piezo-activator to drive, and feature is that volume is little, displacement resolution is high, simple operation etc.But this micropositioner cost is very high, fetch long price.
In recent years, due to the develop rapidly of nanosecond science and technology, PZT (piezoelectric transducer) (PZT) is widely used as driver in Precision Position Location System.Traditional micro-displacement mechanism, in order to reach requirement, must design the huge and navigation system of complexity.And usually adopting the micro-displacement apparatus structure of piezoelectric actuator simple, positioning precision is high.This kind of micro-displacement apparatus is also study hotspot in recent years, can realize wide range, high displacement resolution in theory.In addition, the actual operation requirements of satisfied following Mechatronic Systems Highgrade integration is conducive to based on the micro-displacement apparatus of piezoelectric driving technology.
Micropositioner device advantage based on piezoelectric actuator design is numerous, but the stroke of usual this kind of micropositioner is shorter, limits more.Therefore, constantly there is modified model driver in recent years, can work on the micropositioner of Long Distances, and very high displacement resolution can be kept.
At present, most of micropositioner utilizes the electromagnetic machine or piezo-electric motor that rotate, adopt the movement conversion mechanism of plug-in feed screw nut at the output shaft place of motor or motor, indirectly convert rotary motion to rectilinear motion, and then drive the table top of micropositioner to produce micrometric displacement.The prototype with displacement resolution that the piezo-electric supersonic micro-motor that the people such as Hunan, Dong another name for Sichuan Province in 1998, Li Long soil propose drives is exactly this typical types, wherein piezo-electric motor output shaft inserts in vernier knob centre bore and forms driving member, drive micropositioner work (as shown in Figure 1, 2), this micropositioner precision is higher, flexible structure, and the rotation of XY table top can be realized.But what adopt due to transmission mechanism is the motion conversion regime of the plug-in feed screw nut of the output shaft of motor, idle stroke certainly will will be produced in the process driven, be inevitable from structure drive principle, thus reduce the stability of this type of micropositioner and the further raising of positioning precision; And the structural design of this kind of micropositioner is simplified not, especially motor self structure is complicated, and parts are many, assembling and adjustment inconvenience, and integrated difficulty is higher in the future; Simultaneously, the structure of bearing, thread bush make the precision of micropositioner by the boundary conditions such as installations, fixed form impact comparatively greatly (as shown in Figure 1), the gap etc. of the levelness of the upper plate of bearing and micropositioner, piezo-electric motor output shaft and thread bush is all improved the precision of micropositioner and is had an impact; In addition, this structure subject matter is, the impact that the performance index of micropositioner are subject to piezoelectric ultrasonic micro motor is very large, fixed form between electrical micro-machine and micropositioner and the size of bed knife all directly have influence on the output characteristic such as mode of oscillation and output torque of electrical micro-machine self, and these remote-effects have arrived the positioning precision of micropositioner, repetitive positioning accuracy and stability thereof and reliability.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of micropositioner based on piezoelectricity thread Driving technique is proposed, it is characterized in that, the described micropositioner based on piezoelectricity thread Driving technique comprises employing piezoelectricity thread driver Direct driver micropositioner one dimension micropositioner and prototype with displacement resolution; Described one dimension micropositioner is two ends of the right-angled intersection center line in relatively-movable upper plate 3 and lower plate 4, spring 7 is supported between upper plate 3 and lower plate 4, then upper plate 3 is connected with lower plate 4 through after spring 7 by screw 6, in another one end of right-angled intersection center line, steel ball 5 is fixed between upper plate 3 and lower plate 4, coordinate in round tube hole on the upper plate 3 of the other end and insert fixed muffle 2, the stator plectane 10 of piezoelectricity thread driver 1 is connected with fixed muffle 2 internal thread; Piezoelectricity thread driver 1 center fixed drive screw rod 8, and contact with lower plate 4, form one dimension micropositioner, when the lower plate 4 of micropositioner is fixed, piezoelectricity thread driver 1 drives drive screw 8 to do rectilinear motion, Direct driver upper plate 3 and the load device motion be fixed thereon;
Described prototype with displacement resolution is on upper plate 3 diagonal, the end positions of is symmetrical arranged round tube hole wherein, and in two round tube holes, each stator plectanes 10 inserting fixed muffle 2, two piezoelectricity thread drivers 1 that coordinate are connected with fixed muffle 2 internal thread; Piezoelectricity thread driver 1 center fixed drive screw rod 8, and contact with lower plate 4; In another cornerwise one end, steel ball 5 is fixed between upper plate 3 and lower plate 4, in this another diagonal and steel ball 5 the same side, with steel ball 5 in isosceles triangle place, spring 7 is supported between upper plate 3 and lower plate 4, and then upper plate 3 is connected with lower plate 4 through after spring 7 by screw 6, form prototype with displacement resolution, when the lower plate 4 of micropositioner is fixed, piezoelectricity thread driver 1 drives drive screw 8 to do rectilinear motion, Direct driver upper plate 3 and the load device motion be fixed thereon.
Central through hole is all opened in the center of described upper plate 3 and lower plate 4; Fine motion platen each other.
Screw hole in described upper plate 3 and lower plate 4, one is through hole, and another is the screwed hole coordinated with screw 6.
Described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator, stator is made up of plectane 10 and pipe 11 two parts, and pipe 11 is fixing and perpendicular to the center of plectane 10, exciting element group is alternately arranged to be enclosed within pipe cylindrical by four piezoelectric ceramic pieces 12 and electrode slice 13 and forms, and be threaded with in the middle part of pipe 11 cylindrical by locking nut 14, pipe lower internal thread 111 is connected with drive screw 8, the outer ledge of plectane 10 has the external screw thread 110 for being connected with fixed muffle 2, fixed muffle 2 is connected by internal thread and piezoelectricity thread driver 1, wire is connected with described electrode slice 13 through the rectangular through-hole 15 on fixed muffle 2, when after the applying signal of telecommunication, piezoelectricity thread driver 1 on fixed muffle 2 promotes drive screw 8 and does rectilinear motion under the effect of exciting element group, described drive screw Direct driver micropositioner, without intermediate transmission mechanism, the existence of mechanical play.
Described piezoelectricity thread driver, by arranging the waveform of driving voltage added by the polarised direction of the different subregion of self piezoelectric ceramic and different subregion, realizes micro-vibration of described piezoelectric ceramic group to be directly changed into drive screw forward linearly or motion in the other direction.
Described piezoelectricity thread driver output shaft is drive screw, without intermediate transmission mechanism, can Direct driver realize described in the upper plate of micropositioner and lower plate between relative motion.
The invention has the beneficial effects as follows that fine motion platen of the present invention instead of traditional screw structure by piezoelectricity thread driver output shaft, overall transmission mechanism-free, by piezoelectricity thread driver output shaft Direct driver fine motion platen, it is a kind of small size with absolute construction, the piezoelectricity thread driver of high-resolution characteristic, this activation configuration is simple, easy for installation, assemble easily with micropositioner, with traditional employing electromagnetic machine or ultrasonic motor as driving element micropositioner compared with, its reliability and resolution improve greatly, be more applicable for the operational environment of condition harshness.There is following features:
1. micro-vibration direct-coupling of piezoelectric ceramic is become the mechanical whorl motion of macroscopic view, realize the one dimension of micropositioner or two-dimentional accurate nanoscale setting movement, the conversion that this micro-vibration is moved to mechanical whorl, the not conversion rotating to the motion mode of straight line of traditional feed screw nut formula.The present invention can by the specific waveforms of driving voltage added by the electric polarization direction of the different subregion of regulation and control piezoelectric ceramic and different subregion, realize the linear drives micro-vibration of above-mentioned piezoelectric ceramic being directly changed into thread mechanism, namely, this actuating force is directed to micro-vibration of piezoelectric ceramic, do not need the conversion of the mechanical mechanism motion mode of conventional nut screw type, just there is not mechanical play problem yet.And this novel Piezoelectric Driving mode, structure is simple, and micro-vibration of piezoelectric ceramic and thread transmission define independently system or device, and the height achieving micropositioner drive system is integrated.
2. fine motion platen can rotate by XY, can pitching table top, non-traditional straight line micropositioner.Fixed muffle is used to coordinate with micropositioner upper plate centre bore, use trip bolt that fixed muffle is installed on micropositioner upper plate, device is compact, fixed form is easy, make the drive screw Direct driver fine motion platen of piezoelectricity thread driver, two piezoelectricity thread drivers independently can realize the pitching of table top, and then realize multidimensional rotation.
3. the advantage of integrated level, be reflected in quantity and the cost aspect of the parts of micropositioner driving device system, with the micropositioner that conventional piezoelectric motor (or ultrasonic motor) drives, the rotary motion of ultrasonic motor forms the straight line fine motion of micropositioner, the main parts size quantity at least 12 involved by one dimension platform by feed screw nut switching mechanism.And novel type of drive of the present invention, the amount of parts realized needed for said function one dimension platform only needs 6.If two-dimentional platform, amount of parts is double respectively according to number of dimensions.Dimension is more, the cost advantage that this technology embodies and technical advantage more obvious.
Accompanying drawing explanation
Fig. 1 is conventional piezoelectric electric machine structure schematic diagram.
Fig. 2 is the drive principle schematic diagram of Fig. 1 micropositioner.
Fig. 3 is the drive principle schematic diagram of the micropositioner based on piezoelectricity thread Driving technique.
Fig. 4 is the one dimension micropositioner structural representation of piezoelectricity thread driver Direct driver.
Fig. 5 is Fig. 4 side schematic view.
Fig. 6 is the fine motion platen fine motion schematic diagram of Fig. 4.
Fig. 7 is the prototype with displacement resolution structural representation of piezoelectricity thread driver Direct driver.
Fig. 8 is piezoelectricity thread driver structural representation.
Fig. 9 be piezoelectricity thread driver potsherd subregion, polarize and power up mode schematic diagram.
Embodiment
The invention provides a kind of micropositioner based on piezoelectricity thread Driving technique, it comprises employing piezoelectricity thread driver Direct driver micropositioner one dimension micropositioner and prototype with displacement resolution; .Illustrate that the present invention will be further described with embodiment below in conjunction with accompanying drawing.
In the one dimension micropositioner structural representation of the piezoelectricity thread driver Direct driver shown in Fig. 4-6,
Described one dimension micropositioner is two ends of the right-angled intersection center line in relatively-movable upper plate 3 and lower plate 4, spring 7 is supported between upper plate 3 and lower plate 4, then upper plate 3 is connected with lower plate 4 through after spring 7 by screw 6, in another one end of right-angled intersection center line, steel ball 5 is fixed between upper plate 3 and lower plate 4, coordinate in round tube hole on the upper plate 3 of the other end and insert fixed muffle 2, the stator plectane 10 of piezoelectricity thread driver 1 is connected with fixed muffle 2 internal thread; Piezoelectricity thread driver center fixed drive screw rod 8, drive screw 8 contacts with lower plate 4, forms one dimension micropositioner,
In the prototype with displacement resolution structural representation of the piezoelectricity thread driver Direct driver shown in Fig. 7, on upper plate 3 diagonal, the end positions of one is symmetrical arranged round tube hole wherein, in two round tube holes, each cooperation inserts fixed muffle 2, stator plectane 10 difference two of two piezoelectricity thread drivers 1 is connected with fixed muffle 2 internal thread, piezoelectricity thread driver 1 center fixed drive screw rod 8, and contact with lower plate 4; In another cornerwise one end, steel ball 5 is fixed between upper plate 3 and lower plate 4, in this another diagonal and steel ball 5 the same side, with steel ball 5 in isosceles triangle place, spring 7 is supported between upper plate 3 and lower plate 4, then upper plate 3 is connected with lower plate 4 through after spring 7 by screw 6, forms prototype with displacement resolution;
Above-mentioned upper plate 3 and lower plate 4 are relatively-movable fine motion platen, and when lower plate 4 is fixing time, this plate is fixed head, and upper plate 3 is can relative movement plate, and vice versa; Steel ball 5, two groups of tension springs 7 be placed on screw 6, for keeping upper plate 3 and lower plate 4 to be in suitable pretightning force state, three stress points of two groups of springs and steel ball composition upper plate 3 and lower plate 4; When the lower plate 4 of micropositioner is fixed, piezoelectricity thread driver 1 drives drive screw 8 to do rectilinear motion, Direct driver upper plate 3 and the load device motion be fixed thereon; Figure 3 shows that the drive principle schematic diagram of the micropositioner based on piezoelectricity thread Driving technique.
Fig. 8 is piezoelectricity thread driver structural representation, and described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator, stator is made up of plectane 10 and pipe 11 two parts, and pipe 11 is fixing and perpendicular to the center of plectane 10, exciting element group is alternately arranged to be enclosed within pipe cylindrical by four piezoelectric ceramic pieces 12 and electrode slice 13 and forms, and be threaded with in the middle part of pipe 11 cylindrical by locking nut 14, pipe lower internal thread 111 is connected with drive screw 8, the outer ledge of plectane 10 has the external screw thread 110 for being connected with fixed muffle 2, fixed muffle 2 is connected by internal thread and piezoelectricity thread driver 1, wire is connected with described electrode slice 13 through the rectangular through-hole 15 on fixed muffle 2, when after the applying signal of telecommunication, piezoelectricity thread driver 1 on fixed muffle 2 promotes drive screw 8 and does rectilinear motion under the effect of exciting element group, described drive screw Direct driver micropositioner, without intermediate transmission mechanism, the existence of mechanical play.
Fig. 9 be piezoelectricity thread driver potsherd subregion, polarize and power up mode schematic diagram.Exciting element group in Fig. 8 is divided into piezoelectric ceramic 121 and piezoelectric ceramic 122 liang of groups when encouraging, the surface electrode of every sheet pottery is evenly divided into two subregions, each subregion polarizes along the thickness direction of pottery, but the direction of polarization is contrary, with the polarised direction that "+" "-" symbology is different in figure.When placement first group of piezoelectric ceramic 121 and second group of piezoelectric ceramic, 122 liang of group potteries, spatially stagger 90 degree, first group of piezoelectric ceramic 121 and second group of piezoelectric ceramic, 122 liang of group potteries add sinusoidal signal and the cosine signal that phase difference is 90 degree respectively, when the two-phase AC signal that phase difference is 90 degree is carried on first group of piezoelectric ceramic 121 and second group of piezoelectric ceramic 122 by electrode slice 13, stator will be excited and do rotary flexural vibrations of shaking the head, the dynamic stator surface particle that will make of this row wave-wave produces elliptic motion, this elliptic motion is contacted with drive screw 8 by the driving screw thread 111 on stator, drive screw 8 is made circumferentially to rotate and produce rectilinear motion, exchange reverse rotation and reverse linear motion that two paths of signals can realize drive screw 8.
In the various embodiments described above, exciting element, except employing piezoceramic material, also can also adopt magnetostrictive material, electrostriction material, artificial-muscle, marmem etc.
Claims (4)
1., based on a micropositioner for piezoelectricity thread Driving technique, the described micropositioner based on piezoelectricity thread Driving technique comprises employing piezoelectricity thread driver Direct driver micropositioner one dimension micropositioner and prototype with displacement resolution, described one dimension micropositioner is two ends of the right-angled intersection center line in relatively-movable upper plate (3) and lower plate (4), spring (7) is supported between upper plate (3) and lower plate (4), then upper plate (3) is connected with lower plate (4) through after spring (7) by screw (6), in another one end of right-angled intersection center line, steel ball (5) is fixed between upper plate (3) and lower plate (4), coordinate in round tube hole on the upper plate (3) of the other end and insert fixed muffle (2), the stator plectane (10) of piezoelectricity thread driver (1) is connected with fixed muffle (2) internal thread, it is characterized in that, central through hole is all opened in the center of upper plate (3) and lower plate (4), upper plate (3) and lower plate (4) fine motion platen, therebetween relative motion each other, piezoelectricity thread driver (1) center fixed drive screw rod (8), and contact with lower plate (4), form one dimension micropositioner, when the lower plate (4) of micropositioner is fixing, piezoelectricity thread driver (1) drives drive screw (8) to do rectilinear motion, Direct driver upper plate (3) and the load device motion be fixed thereon,
Described prototype with displacement resolution is on upper plate (3) diagonal, the end positions of one is symmetrical arranged round tube hole wherein, in two round tube holes, each cooperation inserts fixed muffle (2), and the stator plectane (10) of two piezoelectricity thread drivers (1) is connected with fixed muffle (2) internal thread, piezoelectricity thread driver (1) center fixed drive screw rod (8), and contact with lower plate (4), in another cornerwise one end, steel ball (5) is fixed between upper plate (3) and lower plate (4), in this another diagonal and steel ball (5) the same side, with steel ball (5) in isosceles triangle place, spring (7) is supported between upper plate (3) and lower plate (4), then upper plate (3) is connected with lower plate (4) through after spring (7) by screw (6), form prototype with displacement resolution, when the lower plate (4) of micropositioner is fixing, piezoelectricity thread driver (1) drives drive screw (8) to do rectilinear motion, Direct driver upper plate (3) and the load device motion be fixed thereon.
2. according to claim 1 based on the micropositioner of piezoelectricity thread Driving technique, it is characterized in that, described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator, stator is made up of plectane (10) and pipe (11) two parts, and pipe (11) is fixing and perpendicular to the center of plectane (10), exciting element group is alternately arranged to be enclosed within pipe cylindrical by four piezoelectric ceramic pieces (12) and electrode slice (13) and forms, and be threaded with in the middle part of pipe (11) cylindrical by locking nut (14), pipe lower internal thread (111) is connected with drive screw (8), the outer ledge of plectane (10) has the external screw thread (110) for being connected with fixed muffle (2), fixed muffle (2) is connected by internal thread and piezoelectricity thread driver (1), wire is connected with described electrode slice (13) through the rectangular through-hole (15) on fixed muffle (2), when after the applying signal of telecommunication, piezoelectricity thread driver (1) on fixed muffle (2) promotes drive screw (8) and does rectilinear motion under the effect of exciting element group, described drive screw Direct driver micropositioner, without intermediate transmission mechanism, the existence of mechanical play.
3. according to claim 1 based on the micropositioner of piezoelectricity thread Driving technique, it is characterized in that, described piezoelectricity thread driver, by arranging the waveform of driving voltage added by the polarised direction of the different subregion of self piezoelectric ceramic and different subregion, realizes micro-vibration of described piezoelectric ceramic group to be directly changed into drive screw forward linearly or motion in the other direction.
4. according to claim 1 based on the micropositioner of piezoelectricity thread Driving technique, it is characterized in that, described piezoelectricity thread driver output shaft is drive screw, without intermediate transmission mechanism, can Direct driver realize described in the upper plate of micropositioner and lower plate between relative motion.
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| CN108612744B (en) * | 2018-07-02 | 2021-03-19 | 燕山大学 | Three-freedom-degree supporting ball bearing |
| CN109061829B (en) * | 2018-09-13 | 2024-07-12 | 昆山联滔电子有限公司 | Lens driving device and camera module |
| CN113676650B (en) * | 2021-08-25 | 2023-11-14 | 维沃移动通信有限公司 | Image pickup assembly and electronic apparatus |
| CN117118269B (en) * | 2023-10-20 | 2024-07-09 | 无锡星微科技有限公司杭州分公司 | Multi-dimensional ultra-precise micro-driver and control system |
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| CN101436436A (en) * | 2007-11-16 | 2009-05-20 | 同济大学 | Accurate one-dimensional rotary and two-dimensional tilting table |
| CN101505114A (en) * | 2009-03-19 | 2009-08-12 | 清华大学 | Screw linear motor driven by piezoelectric composite bent beam with one end fixed |
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| US8063383B2 (en) * | 2008-11-04 | 2011-11-22 | Sergiy Pryadkin | Inertial positioner and an optical instrument for precise positioning |
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|---|---|---|---|---|
| CN101436436A (en) * | 2007-11-16 | 2009-05-20 | 同济大学 | Accurate one-dimensional rotary and two-dimensional tilting table |
| CN101505114A (en) * | 2009-03-19 | 2009-08-12 | 清华大学 | Screw linear motor driven by piezoelectric composite bent beam with one end fixed |
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