CN201153129Y - Micro-displacement amplifying device - Google Patents

Micro-displacement amplifying device Download PDF

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Publication number
CN201153129Y
CN201153129Y CNU2008200424831U CN200820042483U CN201153129Y CN 201153129 Y CN201153129 Y CN 201153129Y CN U2008200424831 U CNU2008200424831 U CN U2008200424831U CN 200820042483 U CN200820042483 U CN 200820042483U CN 201153129 Y CN201153129 Y CN 201153129Y
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CN
China
Prior art keywords
displacement amplifying
flexible hinge
connecting rod
push rod
displacement
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU2008200424831U
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Chinese (zh)
Inventor
张建瓴
陈万银
可欣荣
洪添胜
张铁民
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South China Agricultural University
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South China Agricultural University
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Priority to CNU2008200424831U priority Critical patent/CN201153129Y/en
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Publication of CN201153129Y publication Critical patent/CN201153129Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a micrometric displacement amplifying device used in the field of precise location and micro drive. The micrometric displacement amplifying device comprises a base, a piezoelectric ceramic drive arranged on the base, and a displacement amplifying mechanism driven by the piezoelectric ceramic drive, wherein, the displacement amplifying mechanism is formed by connecting a plurality of drive rods in series and parallel through flexible hinges, and the displacement amplifying mechanism outputs displacement. The micrometric displacement amplifying device has larger displacement magnification times, little error and compact structure.

Description

The micrometric displacement amplifying device
Technical field
The utility model relates to a kind of transmission mechanism, relates in particular to a kind of micrometric displacement amplifying device.
Background technology
In micro-nano Study on Technology work, micro/nano level control and location are one of cores of micro-nano technology, for micro-nano technology provides technical foundation in the application of every field, are considered to the core technology of 21 century.In MEMS (micro electro mechanical system) (MEMS) field, micro-nano technology relates to different research directions such as little driving, microposition, little processing, little assembling.Because mode is amplified at present existing traditional displacement, as enlargers such as gear or levers, motion is many with the force-transmitting ring joint, accumulated error big, reliability is poor, nonlinearity erron is big, accuracy is low, directly influence output displacement resolution has limited its practical application and expansion in the micrometer/nanometer technical field.
Piezoelectric ceramic is used widely in micrometric displacement driving and precision positioning field with its superior driveability, obtained effect preferably, but on the whole, the displacement of piezoelectric ceramic actuator is generally less than tens microns, for need be aspect the stroke driving more than the displacement of hundreds of micron, just can't directly utilize piezoelectric ceramic actuator to drive, can not give full play to the superior driveability of piezoelectric ceramic, limit its range of application.This just requires further improvement, and amplifies the drive displacement of piezoelectric ceramic is done greatly, satisfies the needs of bigger movement travel.
The utility model content
At the shortcoming of prior art, the purpose of this utility model provides a kind of micrometric displacement amplifying device with the little and compact conformation of bigger displacement multiplication factor, error.
For achieving the above object, the technical solution of the utility model is: a kind of micrometric displacement amplifying device, the displacement amplifying mechanism that comprises pedestal, is located at the piezoelectric ceramic actuator on the pedestal and drives by piezoelectric ceramic actuator, wherein, this displacement amplifying mechanism is connected and is connected in parallel by flexible hinge by some drive rods and forms, and by this displacement amplifying mechanism output displacement.
This displacement amplifying mechanism comprises push rod, push rod, first connecting rod, second connecting rod, pull bar, take-off lever and connects the flexible hinge structure of each bar, this push rod is driven by piezoelectric ceramic actuator, connect with push rod after push rod and the first connecting rod parallel connection, second connecting rod is connected with push rod, pull bar is connected with first connecting rod, connects with the take-off lever of output displacement after second connecting rod and the pull bar parallel connection.
Piezoelectric ceramic actuator contacts with an end of push rod, the other end of push rod is connected with an end of push rod and first connecting rod respectively by flexible hinge, the other end of push rod is connected with an end of second connecting rod by flexible hinge, the other end of first connecting rod is connected with an end of pull bar by flexible hinge, and second connecting rod all is connected with take-off lever by flexible hinge with the other end of pull bar.
Above-mentioned flexible hinge is the revolute pair flexible hinge.
The monolithic construction that each drive rod of displacement amplifying mechanism is connected as one by flexible hinge and pedestal.
Piezoelectric ceramic actuator is installed on the pedestal of displacement amplifying mechanism, and by the screw pretension.
Compared with prior art, the utility model is by multistage series connection of some drive rods and the multistage structure for amplifying that is connected in parallel, adopted differential amplification principle, realize bigger displacement multiplication factor, have bigger stroke, again because drive rod all adopts the syndeton of flexible hinge, make and do not have friction between each drive rod, no gap is so displacement amplifying mechanism can reduce error as much as possible increasing the displacement multiplication factor simultaneously.
In addition, the monolithic construction that the utility model also utilizes each drive rod of displacement amplifying mechanism to be connected as one by flexible hinge and pedestal, displacement amplifying mechanism can be processed by a block of material, make the displacement amplifying mechanism compact conformation, need not assembling, thus the error that produces when having avoided assembling.
Description of drawings
Fig. 1 is the structural representation of the utility model micrometric displacement amplifying device.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
A kind of micrometric displacement amplifying device as shown in Figure 1, the displacement amplifying mechanism that comprises pedestal 1, is located at the piezoelectric ceramic actuator 2 on the pedestal 1 and drives by piezoelectric ceramic actuator 2, wherein, this displacement amplifying mechanism is connected and is connected in parallel by flexible hinge by some drive rods and forms, and by this displacement amplifying mechanism output displacement.
The monolithic construction that each drive rod of displacement amplifying mechanism is connected as one by flexible hinge and pedestal 1, piezoelectric ceramic actuator 2 are installed on the pedestal 1 and can pass through screw 17 suitable pretensions.
This displacement amplifying mechanism comprises push rod 3, push rod 6, first connecting rod 8, second connecting rod 14, pull bar 10, take-off lever 16 and connects the flexible hinge structure of each bar, this push rod 3 is driven by piezoelectric ceramic actuator 2, connect with push rod 3 in push rod 6 and first connecting rod 8 backs in parallel, second connecting rod 14 is connected with push rod 6, pull bar 10 is connected with first connecting rod 8, and second connecting rod 14 is connected with the take-off lever 16 of output displacement with pull bar 10 backs in parallel.
Piezoelectric ceramic actuator 2 contacts with an end of push rod 3, the other end of push rod 3 is connected with an end of push rod 6 and first connecting rod 8 by flexible hinge 5,4 respectively, the other end of push rod 6 is connected with an end of second connecting rod 14 by flexible hinge 13, the other end of first connecting rod 8 is connected with an end of pull bar 10 by flexible hinge 9, and second connecting rod 14 all is connected with take-off lever 16 by flexible hinge 15,11 with the other end of pull bar 10.
In the present embodiment, above-mentioned each flexible hinge is the revolute pair flexible hinge.
During this micrometric displacement amplifying device work, micro displacement magnifying mechanism drives push rod 3 by piezoelectric ceramic actuator 2, and push rod 3 is passed to push rod 6 and first connecting rod 8 to displacement respectively through flexible hinge 5,4.First connecting rod 8 makes displacement amplify with flexible hinge 4,7 combinations, and drives flexible hinge 9, pull bar 10, flexible hinge 11 and move downward, and the direction of motion just direction of displacement with piezoelectric ceramic actuator 2 is opposite; The combination of flexible hinge 12,13 and second connecting rod 14 makes that the displacement of push rod 6 obtains amplifying, and drives flexible hinge 15 and move upward, and the direction of motion is identical with the direction of displacement of piezoelectric ceramic actuator 2.Because the direction of motion of flexible hinge 11 is opposite with piezoelectric ceramic actuator 2 directions of motion, promptly move downward, the direction of motion of flexible hinge 15 is identical with piezoelectric ceramic actuator 2 directions of motion, promptly moves upward, so make the output of take-off lever 16 can export bigger displacement.
Integral tpe microdisplacement enlarger of the present utility model can clamp pedestal 1 or fix in use, and total displacement output is exported by the end on the take-off lever 16.

Claims (6)

1, a kind of micrometric displacement amplifying device, the displacement amplifying mechanism that comprises pedestal (1), is located at the piezoelectric ceramic actuator (2) on the pedestal (1) and drives by piezoelectric ceramic actuator (2), it is characterized in that: this displacement amplifying mechanism is connected and is connected in parallel by flexible hinge by some drive rods and forms, and by this displacement amplifying mechanism output displacement.
2, micrometric displacement amplifying device according to claim 1, it is characterized in that: this displacement amplifying mechanism comprises push rod (3), push rod (6), first connecting rod (8), second connecting rod (14), pull bar (10), take-off lever (16) and connect the flexible hinge structure of each bar, this push rod (3) is driven by piezoelectric ceramic actuator (2), connect with push rod (3) in push rod (6) and first connecting rod (8) back in parallel, second connecting rod (14) is connected with push rod (6), pull bar (10) is connected with first connecting rod (8), and second connecting rod (14) is connected with the take-off lever (16) of output displacement with pull bar (10) back in parallel.
3, micrometric displacement amplifying device according to claim 2, it is characterized in that: piezoelectric ceramic actuator (2) contacts with an end of push rod (3), the other end of push rod (3) is respectively by flexible hinge (5), (4) end with push rod (6) and first connecting rod (8) is connected, the other end of push rod (6) is connected with an end of second connecting rod (14) by flexible hinge (13), the other end of first connecting rod (8) is connected with an end of pull bar (10) by flexible hinge (9), and the other end of second connecting rod (14) and pull bar (10) is all by flexible hinge (15), (11) be connected with take-off lever (16).
4, according to claim 1 or 2 or 3 described micrometric displacement amplifying devices, it is characterized in that: described flexible hinge is the revolute pair flexible hinge.
5, micrometric displacement amplifying device according to claim 1 is characterized in that: the monolithic construction that each drive rod of displacement amplifying mechanism is connected as one by flexible hinge and pedestal (1).
6, micrometric displacement amplifying device according to claim 5 is characterized in that: piezoelectric ceramic actuator (2) is installed on the pedestal (1), and by screw (17) pretension.
CNU2008200424831U 2008-01-04 2008-01-04 Micro-displacement amplifying device Expired - Fee Related CN201153129Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008200424831U CN201153129Y (en) 2008-01-04 2008-01-04 Micro-displacement amplifying device

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Application Number Priority Date Filing Date Title
CNU2008200424831U CN201153129Y (en) 2008-01-04 2008-01-04 Micro-displacement amplifying device

Publications (1)

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CN201153129Y true CN201153129Y (en) 2008-11-19

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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252072A (en) * 2010-05-17 2011-11-23 迈瑞医疗(瑞典)公司 Mechanical amplifier, mechanical amplification system and mechanical amplification method of motion
CN102284955A (en) * 2011-07-22 2011-12-21 吉林大学 Six-freedom degree micro robot based on hybrid drive
CN103163024A (en) * 2013-03-20 2013-06-19 清华大学 Film loading device
CN103216595A (en) * 2013-04-11 2013-07-24 浙江大学 Fillet-type-flexible-hinge-based micro-displacement high-power magnification mechanism and method thereof
CN104265829A (en) * 2014-09-16 2015-01-07 上海卫星工程研究所 Integrated absorber having hinge and vibration isolation functions and initiative and passive vibration isolation system
CN108565334A (en) * 2018-06-08 2018-09-21 合肥铭传电子科技有限公司 A kind of micro-displacement amplifying device
CN109931858A (en) * 2019-03-25 2019-06-25 浙江大学宁波理工学院 Double freedom electrichydraulic control declines displacement system
CN110155935A (en) * 2019-05-13 2019-08-23 天津大学 The XY θ three freedom meek precisively positioning platform of second level displacement equations
CN110445413A (en) * 2019-08-05 2019-11-12 包头稀土研究院 The actuator with three-level micro displacement magnifying mechanism of shell offer axial magnetic field
CN110492783A (en) * 2019-08-05 2019-11-22 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of shell offer axial magnetic field
CN110500979A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN110500980A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
WO2021022803A1 (en) * 2019-08-05 2021-02-11 包头稀土研究院 Micro-displacement amplification mechanism, and amplification method for same

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102252072A (en) * 2010-05-17 2011-11-23 迈瑞医疗(瑞典)公司 Mechanical amplifier, mechanical amplification system and mechanical amplification method of motion
CN102252072B (en) * 2010-05-17 2016-04-13 深圳迈瑞生物医疗电子股份有限公司 Mechanical amplifier, the system of this amplifier and a kind of mechan-amplifier method of motion
CN102284955A (en) * 2011-07-22 2011-12-21 吉林大学 Six-freedom degree micro robot based on hybrid drive
CN103163024A (en) * 2013-03-20 2013-06-19 清华大学 Film loading device
CN103216595A (en) * 2013-04-11 2013-07-24 浙江大学 Fillet-type-flexible-hinge-based micro-displacement high-power magnification mechanism and method thereof
CN104265829A (en) * 2014-09-16 2015-01-07 上海卫星工程研究所 Integrated absorber having hinge and vibration isolation functions and initiative and passive vibration isolation system
CN104265829B (en) * 2014-09-16 2016-08-17 上海卫星工程研究所 Possess hinge and the integrated shock absorber of vibration isolation function and vibration isolation system
CN110500979A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN110500980A (en) * 2018-05-17 2019-11-26 技鼎股份有限公司 Displacement amplification device and displacement amplifier
CN108565334A (en) * 2018-06-08 2018-09-21 合肥铭传电子科技有限公司 A kind of micro-displacement amplifying device
CN108565334B (en) * 2018-06-08 2022-05-24 合肥铭传电子科技有限公司 Micro-displacement amplifying device
CN109931858A (en) * 2019-03-25 2019-06-25 浙江大学宁波理工学院 Double freedom electrichydraulic control declines displacement system
CN109931858B (en) * 2019-03-25 2020-07-07 浙江大学宁波理工学院 Double-freedom-degree electro-hydraulic control type micro-displacement system
CN110155935A (en) * 2019-05-13 2019-08-23 天津大学 The XY θ three freedom meek precisively positioning platform of second level displacement equations
CN110445413A (en) * 2019-08-05 2019-11-12 包头稀土研究院 The actuator with three-level micro displacement magnifying mechanism of shell offer axial magnetic field
CN110492783A (en) * 2019-08-05 2019-11-22 包头稀土研究院 The actuator with second level micro displacement magnifying mechanism of shell offer axial magnetic field
WO2021022803A1 (en) * 2019-08-05 2021-02-11 包头稀土研究院 Micro-displacement amplification mechanism, and amplification method for same
JP2022502986A (en) * 2019-08-05 2022-01-11 包頭稀土研究院Baotou Research Institute Of Rare Earths Micro-displacement expansion mechanism and its expansion method
JP7090234B2 (en) 2019-08-05 2022-06-24 包頭稀土研究院 Micro-displacement expansion mechanism and its expansion method

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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20081119

Termination date: 20110104