CN110912444B - Bionic creeping type piezoelectric actuator - Google Patents
Bionic creeping type piezoelectric actuator Download PDFInfo
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- CN110912444B CN110912444B CN201910291894.7A CN201910291894A CN110912444B CN 110912444 B CN110912444 B CN 110912444B CN 201910291894 A CN201910291894 A CN 201910291894A CN 110912444 B CN110912444 B CN 110912444B
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- 230000033001 locomotion Effects 0.000 claims abstract description 37
- 230000009193 crawling Effects 0.000 claims abstract description 14
- 230000003071 parasitic effect Effects 0.000 claims description 13
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
- H02N2/062—Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis
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Abstract
The invention relates to a bionic creeping type piezoelectric driver, which mainly comprises a piezoelectric stack, an asymmetric thin-wall type flexible hinge mechanism and a rotor. The two piezoelectric stacks are arranged in the asymmetric thin-wall type flexible hinge mechanism; the pretightening knob is used for adjusting the initial pretightening force between the asymmetric thin-wall type flexible hinge mechanism and the rotor; the base supports and mounts other components. The advantages are that: the asymmetric thin-wall flexible hinge mechanism has high rigidity, can bear larger load and improves the output load of the driving device; the two piezoelectric stacks alternately provide driving force through time sequence control of the electric signals, so that the output load is increased, and the output performance is improved; the two asymmetric thin-wall flexible hinge mechanisms perform bionic crawling motion under the alternate driving of the two piezoelectric stacks, so that the backspacing phenomenon of a rotor in a motion period can be eliminated; the device has simple structure, and can be applied to the fields of precise and ultra-precise machining, micro electro mechanical systems and micro operation robots.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a bionic crawling type piezoelectric driver.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving device, a piezoelectric element and a rotor mass block are usually arranged in parallel in the motion direction of the piezoelectric element, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole device mainly depends on the friction force generated by the pretightening force. However, a piezoelectric element such as a piezoelectric stack generally adopts a d33 operating mode, and the rigidity of the piezoelectric element is smaller on a cross section perpendicular to the main output direction, so that the generated pre-tightening force is smaller, the output load of the whole device is greatly reduced, and the larger rigidity of the piezoelectric element in the main output direction is not fully utilized; the output load provided by a single piezoelectric stack is small; the back-off phenomenon in motion further degrades output performance. Therefore, it is necessary to design a piezoelectric driver that fully utilizes the stiffness of the piezoelectric stack in the main output direction, eliminates the rollback phenomenon, improves the output load, and further improves the output load of the piezoelectric driving device by generating the pretightening force and the driving force through the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism.
Disclosure of Invention
The invention aims to provide a bionic crawling type piezoelectric actuator, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the linear motion output function.
The bionic crawling type piezoelectric power generator adopts two groups of piezoelectric driving units, the main output direction of the piezoelectric stacks and the moving direction of the rotor are obliquely arranged, two asymmetric flexible hinge mechanisms connected by four thin-wall flexible hinges are adopted, and parasitic inertia motion is sequentially realized by the asymmetric thin-wall flexible hinge mechanisms according to time sequence under the alternate driving of the two piezoelectric stacks.
The above object of the present invention is achieved by the following technical solutions:
a bionic crawling type piezoelectric driver comprises a piezoelectric stack (3), an asymmetric thin-wall flexible hinge mechanism (4), a piezoelectric stack (7), an asymmetric thin-wall flexible hinge mechanism (6), a rotor (5), a pre-tightening wedge block (2), a pre-tightening wedge block (8), a pre-tightening knob (1), a pre-tightening knob (10) and a base (9), and the precision driving device utilizes a parasitic inertia principle to achieve micro-nano bionic crawling type precision linear driving. The mover (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (9) through a screw; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are arranged on the base (9) through screws; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), the pre-tightening wedge block (8) is arranged between the piezoelectric stack (7) and the asymmetric thin-wall flexible hinge mechanism (6), and the piezoelectric stack (3) and the piezoelectric stack (7) can be pre-tightened through the pre-tightening wedge block (2) and the pre-tightening wedge block (8) respectively; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9) and are in contact with the lower ends of the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6); the asymmetric thin-wall type hinge mechanism (4) and the asymmetric thin-wall type hinge mechanism (6) are connected by four thin-wall type flexible hinges to form an asymmetric form, and the arc-shaped structure at the upper end of the asymmetric thin-wall type hinge mechanism is in contact with the rotor (5); the base (9) plays a role in supporting and installing and fixing other parts.
The piezoelectric stacks (3) and (7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), the piezoelectric stacks (3) are driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stacks (7) are driven to drive the asymmetric thin-wall flexible hinge mechanism (6) to extend, and the bionic crawling type motion among the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is realized by controlling the time sequence between the piezoelectric stacks (3) and the piezoelectric stacks (7), so that the rotor (5) is driven to linearly and precisely move.
Initial pretightening force among the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is respectively adjusted through the pretightening knob (1) and the pretightening knob (10);
the piezoelectric stacks (3) and (7) adopt piezoelectric ceramic stacks PZT with controllable shapes and surfaces, parasitic inertial motion is realized by controlling the voltage of the piezoelectric stacks (3) and (7), and bionic crawling type linear driving can be realized by orderly controlling the voltage of the piezoelectric stacks (3) and (7).
The main advantages of the invention are: the main output direction of the piezoelectric stack and the motion direction of the rotor are obliquely arranged by utilizing a parasitic inertial motion principle; two asymmetric flexible hinge mechanisms connected by four thin-wall flexible hinges are adopted; under the alternate driving of the two piezoelectric stacks, the asymmetric thin-wall flexible hinge mechanism sequentially performs parasitic inertia motion according to a time sequence, and the bionic crawling type motion can eliminate the backspacing phenomenon of the rotor in a motion period; the invention can greatly improve the output performance of the device, realizes the linear motion of the rotor along a certain direction, and has the advantages of high driving reliability, good stability, high working efficiency and the like; the method can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like; the invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left side view of the present invention;
FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, the bionic crawling type piezoelectric driver mainly comprises a rotor (5), a piezoelectric stack (3), a piezoelectric stack (7), a pre-tightening wedge block (2), a pre-tightening wedge block (8), a pre-tightening knob (1), a pre-tightening knob (10), an asymmetric thin-wall flexible hinge mechanism (4), an asymmetric thin-wall flexible hinge mechanism (6) and a base (9), and the precise driving device realizes piezoelectric linear precise driving through a parasitic inertia principle. The mover (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are arranged on the base through screws; the piezoelectric stacks (3) and (7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), and the main output direction of the piezoelectric stacks and the motion direction of the rotor (5) are obliquely arranged; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), the pre-tightening wedge block (8) is arranged between the piezoelectric stack (7) and the asymmetric thin-wall flexible hinge mechanism (6), and the piezoelectric stack (3) and the piezoelectric stack (7) can be pre-tightened through the pre-tightening wedge block (2) and the pre-tightening wedge block (8) respectively; the pre-tightening knob (1) and the pre-tightening knob (10) are fastened on the base (9) and are in contact with the lower ends of the asymmetric thin-wall hinge mechanism (4) and the asymmetric thin-wall hinge mechanism (6); the asymmetric thin-wall type hinge mechanism (4) and the asymmetric thin-wall type hinge mechanism (6) are connected by four thin-wall type flexible hinges to form an asymmetric form, and the arc-shaped structure at the upper end of the asymmetric thin-wall type hinge mechanism is in contact with the rotor (5); the base (9) plays a role in supporting and installing and fixing other parts, and the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) are installed on the base (9) through screws.
The bionic creeping type piezoelectric actuator realizes piezoelectric linear precision driving by utilizing a parasitic inertia principle. The main output directions of the piezoelectric stacks (3) and (7) and the motion direction of the rotor (5) are obliquely arranged, so that the large rigidity of the piezoelectric stacks (3) and (7) in the main output directions is fully utilized; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) have good rigidity output performance, can bear larger pretightening force, and move stably and efficiently, the piezoelectric stack (3) and the piezoelectric stack (7) are electrified to transmit the driving force of the linear motion of the rotor (5) and the pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) respectively through the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), so that the output load of the piezoelectric driving device is greatly improved, and the linear motion along a certain direction is realized.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (10).
The piezoelectric stacks (3) and (7) adopt piezoelectric ceramic stacks PZT with controllable surface shapes, and parasitic inertial motion is realized by controlling the voltage of the piezoelectric stacks (3) and (7).
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
realizing linear motion of the rotor, and in an initial state: the contact distance between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is adjusted by adjusting the pre-tightening knob (1), and the contact distance between the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5), namely the initial pre-tightening force in the parasitic movement process, is adjusted by adjusting the pre-tightening knob (10); the piezoelectric stack (3) and the piezoelectric stack (7) are controlled by adopting a piezoelectric signal in a sawtooth wave or triangular wave form, and the piezoelectric stack (3) and the piezoelectric stack (7) are sequentially electrified according to a time sequence by controlling voltage; the piezoelectric stack (3) and the piezoelectric stack (7) are not electrified, and the system is in a free state; when the piezoelectric stack (3) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (4) to deform, the rotor (5) is pressed by the asymmetric thin-wall flexible hinge mechanism (4), and the rotor (5) is driven to move by the asymmetric thin-wall flexible hinge mechanism (4) under the action of the static friction force between the rotor (5) and the rotor; when the piezoelectric stack (3) loses power and rapidly returns to an initial position, the asymmetric thin-wall flexible hinge mechanism (4) also returns to the initial state, the rotor (5) is still kept at the moved position under the action of inertia force, meanwhile, the piezoelectric stack (7) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (6) to deform, the asymmetric thin-wall flexible hinge mechanism (6) compresses the rotor (5), and the asymmetric thin-wall flexible hinge mechanism (6) drives the rotor (5) to move under the action of static friction force between the rotor (5) and the rotor (6); when the piezoelectric stack (7) loses power and rapidly retracts to the initial position, the asymmetric thin-wall flexible hinge mechanism (6) also restores to the initial state, and the mover (5) is still kept at the position after the second movement under the action of inertia force, so that one movement cycle of the driving device is completed. By repeating the steps, the driving device can realize linear motion in the required direction, and large output displacement is obtained.
The bionic creeping type piezoelectric actuator adopts two groups of piezoelectric stacks as driving sources and an asymmetric thin-wall type flexible hinge mechanism as a power transmission element, has the characteristics of small heat, stable driving, reliability and high efficiency, and can realize the functions of linear precise motion and the like.
Claims (3)
1. The utility model provides a bionical crawl formula piezoelectric actuator, includes piezoelectric stack (3), the flexible hinge mechanism of asymmetric thin-walled formula (4), piezoelectric stack (7), the flexible hinge mechanism of asymmetric thin-walled formula (6), active cell (5), pretension voussoir (2), pretension voussoir (8), pretension knob (1), pretension knob (10), base (9), its characterized in that: the piezoelectric stacks (3) and (7) are respectively arranged in the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6), the piezoelectric stacks (3) are driven, the asymmetric thin-wall flexible hinge mechanism (4) extends to drive the piezoelectric stacks (7), the asymmetric thin-wall flexible hinge mechanism (6) extends, and bionic crawling type motion between the asymmetric thin-wall flexible hinge mechanism (4), the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5) is realized by controlling the time sequence between the driving piezoelectric stacks (3) and the piezoelectric stacks (7), so that the rotor (5) is driven to do linear motion; the rotor (5) adopts a high-precision linear guide rail with a sliding block, and the guide rail is fixed on the base through a screw to realize high-precision linear motion; the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are arranged on the base through screws; the piezoelectric stack (3) and the piezoelectric stack (7) can be pre-tightened through a pre-tightening wedge block (2) and a pre-tightening wedge block (8) respectively; the pre-tightening knob (1) and the pre-tightening knob (10) respectively adjust initial pre-tightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) and the rotor (5); the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) can be made of spring steel and high-strength aluminum alloy materials and are connected through four thin-wall flexible hinges to form an asymmetric parallelogram structure.
2. The bionic crawling type piezoelectric actuator according to claim 1, characterized in that the parasitic inertia driving principle of the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) is adopted, when the single piezoelectric stack (3) and the piezoelectric stack (7) are respectively powered on, the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) are respectively pushed to generate compound motions in two directions, namely a main motion and a parasitic motion, the parasitic motion is a linear motion of the mover (5), and the main motion is the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) to apply pretightening force to the mover (5).
3. The bionic crawling piezoelectric actuator according to claim 1, wherein the two groups of piezoelectric driving units I and II are controlled in time sequence to alternately provide driving voltage, and the asymmetric thin-wall flexible hinge mechanism (4) and the asymmetric thin-wall flexible hinge mechanism (6) perform bionic crawling motion under the alternate driving of the piezoelectric stacks (3) and the piezoelectric stacks (7).
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| CN112497186B (en) * | 2020-12-15 | 2024-06-25 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Micro-operation device and method based on bionic surface |
| CN113219649B (en) * | 2021-04-30 | 2022-11-22 | 哈尔滨芯明天科技有限公司 | High-reliability piezoelectric deflection mirror for aerospace application |
| CN113938052B (en) * | 2021-09-29 | 2023-09-08 | 东北电力大学 | Piezoelectric stick-slip driver based on two-stage lever amplifying mechanism |
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| JPH05121790A (en) * | 1991-10-29 | 1993-05-18 | Hitachi Ltd | Piezoelectric drive device |
| WO2012165189A1 (en) * | 2011-05-27 | 2012-12-06 | 株式会社村田製作所 | Piezoelectric motor and piezoelectric motor device |
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| DE10017332C2 (en) * | 2000-04-07 | 2002-04-18 | Daimler Chrysler Ag | Piezoelectric actuator for flap control on the rotor blade of a helicopter |
| CN203251240U (en) * | 2013-05-13 | 2013-10-23 | 吉林大学 | Positive pressure adjustable micro nano stick slip inertia drive platform |
| CN105583692B (en) * | 2016-03-02 | 2017-06-27 | 吉林大学 | A kind of three-dimensional cutting force measurement method and device of fast tool servo turning |
| CN207039485U (en) * | 2017-06-16 | 2018-02-23 | 吉林大学 | A kind of single Ω shapes piezoelectricity straight line driver |
| CN207573263U (en) * | 2017-12-25 | 2018-07-03 | 吉林大学 | The device of the pre- parasitic principle piezoelectric actuator output performance of frictional force regulation and control |
| CN208597034U (en) * | 2018-09-26 | 2019-03-12 | 吉林大学 | Arcuate structure hinge inhibits the device of parasitic piezoelectric actuator rollback movement |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05121790A (en) * | 1991-10-29 | 1993-05-18 | Hitachi Ltd | Piezoelectric drive device |
| WO2012165189A1 (en) * | 2011-05-27 | 2012-12-06 | 株式会社村田製作所 | Piezoelectric motor and piezoelectric motor device |
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