CN110635711B - Nanometer displacement linear stepping motor - Google Patents
Nanometer displacement linear stepping motor Download PDFInfo
- Publication number
- CN110635711B CN110635711B CN201910602746.2A CN201910602746A CN110635711B CN 110635711 B CN110635711 B CN 110635711B CN 201910602746 A CN201910602746 A CN 201910602746A CN 110635711 B CN110635711 B CN 110635711B
- Authority
- CN
- China
- Prior art keywords
- displacement
- stack
- piezoelectric ceramic
- thickness
- electrode layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 298
- 239000000919 ceramic Substances 0.000 claims abstract description 148
- 238000005452 bending Methods 0.000 claims description 101
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 19
- 238000010344 co-firing Methods 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 4
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 50
- 239000010410 layer Substances 0.000 description 49
- 238000010586 diagram Methods 0.000 description 10
- 230000033001 locomotion Effects 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 230000032683 aging Effects 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a nano-displacement linear stepping motor, which comprises a motor shell, a motor rotor, at least one pair of first piezoelectric ceramic drivers and at least one pair of second piezoelectric ceramic drivers. The motor rotor is arranged in the motor shell, at least one pair of first piezoelectric ceramic drivers are symmetrically arranged around the motor rotor and are arranged on the motor shell, and at least one pair of second piezoelectric ceramic drivers are symmetrically arranged around the motor rotor and are arranged on the motor shell. The tips of at least one pair of first piezoceramic actuators are in contact with the motor mover to provide at least an axial force and an axial displacement, and the tips of at least one pair of second piezoceramic actuators are in contact with the motor mover to provide at least a radial force and a radial displacement. The nano displacement linear stepping motor has the advantages of simple structure and high precision.
Description
Technical Field
The invention relates to the field of integrated circuit equipment manufacturing, in particular to a nano-displacement linear stepping motor.
Background
In recent years, with the increasing integration of large-scale integrated circuit devices, the precision requirement of a workpiece table is continuously increased, and particularly, the motion precision of a stage in a photoetching machine and film thickness detection, a regulation and control module of an objective lens and the like is improved year by year along with the increasing requirement of the workpiece table. The displacement driving technology is also continuously improved, so that the piezoelectric ceramic micro-displacement driver is widely applied. At present, the main modes in the precise driving are as follows: mechanical lead screws, linear motors and piezo-ceramic actuators, whereas piezo-ceramic actuators are the main in nano-scale displacement drives.
A certain patent adopts the combination of a plurality of thickness displacement stacks to form the pressurizing and driving actions of the rotor, and has the advantages of complex structure, high manufacturing cost, complex manufacturing process and difficult commercialization.
The method is characterized in that a central shaft is driven to move in a stepping mode by means of the combination of four groups of thickness displacement stacks and axial displacement stacks, the axial piezoelectric stacks are complex in process in manufacturing, organic colloid is needed for bonding, the bonding cannot be achieved by a co-firing process, and due to the fact that the organic colloid exists, the piezoelectric driver is prone to failure under the conditions of time aging resistance and severe temperature and illumination.
At present, the piezoelectric ceramic linear motor is mainly applied to PI companies and PM companies, and the axial displacement is mainly provided by using axially polarized piezoelectric ceramic plates of piezoelectric ceramics, so that the axial displacement ceramic plates are firstly manufactured, and then the ceramic plates are bonded by an organic adhesive layer, the manufacturing process is complex, the illumination resistance and the temperature aging resistance of the piezoelectric ceramic linear motor are limited due to the existence of the organic adhesive layer, and the use limitation of the piezoelectric ceramic motor is also caused due to the fact that the axial piezoelectric ceramic plates cannot recover after the characteristics of the piezoelectric ceramics are degraded.
Disclosure of Invention
The invention aims to provide a nano-displacement linear stepping motor so as to solve the problems in the prior art.
In order to solve the above-mentioned problems, according to an aspect of the present invention, there is provided a nano-displacement linear stepper motor characterized in that the nano-displacement linear stepper motor comprises a motor housing, a motor mover, at least one pair of first piezoelectric ceramic drivers and at least one pair of second piezoelectric ceramic drivers,
The motor rotor is arranged in the motor shell,
The at least one pair of first piezoceramic actuators are symmetrically arranged about the motor mover and mounted on the motor housing,
The at least one pair of second piezoceramic actuators are symmetrically arranged about the motor mover and mounted on the motor housing,
The tips of the at least one pair of first piezoceramic actuators are in contact with the motor mover to provide at least an axial force and an axial displacement, and the tips of the at least one pair of second piezoceramic actuators are in contact with the motor mover to provide at least a radial force and a radial displacement.
In one embodiment, the first piezoceramic actuator comprises a flex-shift stack formed from a stack of a plurality of piezoceramic sheets or directly fabricated by a multi-layer co-firing process, wherein the surfaces of the piezoceramic sheets of the flex-shift stack are covered with spaced apart electrode layers to form a first set of electrode layers and a second set of electrode layers, and a swing arm.
In one embodiment, the first group of electrode layers are powered on during operation, so that the bending displacement stack forms a certain angle of bending, then the second group of electrode layers are powered on, the bending displacement stack is enabled to restore to a vertical state, then the voltage of the first group of electrode layers or the second group of electrode layers is reduced to zero, the bending displacement stack forms a certain angle of bending again, and therefore the mover swings back and forth or moves in the same direction, and the swing arm is used for amplifying the displacement amount of the bending displacement stack.
In one embodiment, the first piezoceramic displacement actuator further comprises a thickness-displacement stack formed by stacking a plurality of piezoceramic sheets or directly manufactured by a multi-layer co-firing process, and the surfaces of the piezoceramic sheets of the thickness-displacement stack are covered with a full electrode layer, so that the first piezoceramic actuator is further capable of providing radial force and radial displacement.
In one embodiment, the second piezoceramic displacement actuator comprises a thickness displacement stack and a swing arm, wherein the thickness displacement stack is directly manufactured by a multi-layer co-firing process or a plurality of piezoceramic sheets are stacked, and the surfaces of the piezoceramic sheets of the thickness displacement stack are covered with a full electrode layer, so that the second piezoceramic actuator can provide radial acting force and radial displacement.
In one embodiment, the second piezoceramic displacement actuator further comprises a bending displacement stack mounted between the thickness displacement stack and the swing arm such that the second piezoceramic displacement actuator is further capable of providing an axial force and an axial displacement.
In one embodiment, the nano-displacement linear stepper motor includes two pairs of first piezoceramic actuators and two pairs of second piezoceramic actuators, the two pairs of first piezoceramic actuators and the two pairs of second piezoceramic actuators being aligned.
In one embodiment, the nano-displacement linear stepper motor includes two pairs of first piezoceramic drivers and two pairs of second piezoceramic drivers, the two pairs of first piezoceramic drivers being aligned in one column and the two pairs of second piezoceramic drivers being aligned in another column.
In one embodiment, one end of the swing arm is in contact with the mover and the other end of the swing arm is in contact with the bending displacement stack or the thickness displacement stack for separating the swing arm from the mover when the mover is not in operation, and for bringing the swing arm into contact with the mover and applying pressure when the mover is in operation.
In one embodiment, one end of the thickness-shift stack is connected to the bending-shift stack and the other end of the thickness-shift stack is connected to the swing arm.
In one embodiment, one end of the bending displacement stack is connected to the thickness displacement stack and the other end of the bending displacement stack is connected to the swing arm.
In one embodiment, one end of the swing arm is connected to a thickness displacement stack and the other end of the swing arm is connected to the bending displacement stack.
In one embodiment, the piezoceramic displacement actuator comprises a plurality of the bending displacement stacks and/or a plurality of the thickness displacement stacks.
In one embodiment, the thickness-shift stack and the bend-shift stack are co-fired stacks, and/or the thickness-shift stack and the bend-shift stack are organic adhesive bonding stacks, and/or the thickness-shift stack and the bend-shift stack are stacks formed by a glass paste sintering process.
In one embodiment, the connections between the thickness shift stack, the bending shift stack, and the swing arm are cofired connections, and/or organic adhesive bond connections, and/or glass frit sintering process connections.
In one embodiment, the swing arm has a rectangular, triangular, hemispherical, inverted T-shaped cross-section and/or a square bottom surface and a circular arc, hemispherical and/or inverted T-shaped top;
in one embodiment, the electrode layers of the thickness-shifted stack are fully electrode or the edge of the electrode layers is between 0-1mm from the ceramic edge spacing;
in one embodiment, the electrode layer of the bending displacement stack is composed of two or more divided electrodes, wherein the distance gap between the electrodes in the two parts is between 0.1mm and 2 mm;
In one embodiment, the piezoelectric ceramic displacement driver has a cross-sectional side length in the range of 1mm-50 mm;
in one embodiment, the height of the thickness-shift stack is between 0.1mm and 100 mm;
in one embodiment, the height of the curved stack may be between 0.1mm and 100 mm;
in one embodiment, the swing arm has a height between 0.1mm and 100 mm.
According to another aspect of the present invention, there is provided a nano-displacement linear stepper motor, the nano-displacement linear stepper motor including a motor housing, a motor mover, at least one pair of first piezoceramic drivers, a guide rail and a slider, one side of the motor mover being mounted on the top of the motor housing through the guide rail and the slider, the at least one pair of first piezoceramic drivers being mounted side by side on the bottom of the motor housing, and the top of the first piezoceramic drivers being in contact with the motor mover and providing at least an axial force and an axial displacement.
In one embodiment, the first piezoceramic actuator comprises a flex-shift stack formed from a stack of a plurality of piezoceramic sheets or directly fabricated by a multi-layer co-firing process, wherein the surfaces of the piezoceramic sheets of the flex-shift stack are covered with spaced apart electrode layers to form a first set of electrode layers and a second set of electrode layers, and a swing arm.
In one embodiment, the first group of electrode layers are powered on during operation, so that the bending displacement stack forms a certain angle of bending, then the second group of electrode layers are powered on, the bending displacement stack is enabled to restore to a vertical state, then the voltage of the first group of electrode layers or the second group of electrode layers is reduced to zero, the bending displacement stack forms a certain angle of bending again, and therefore the mover swings back and forth or moves in the same direction, and the swing arm is used for amplifying the displacement amount of the bending displacement stack.
In one embodiment, the first piezoceramic displacement actuator further comprises a thickness-displacement stack formed by stacking a plurality of piezoceramic sheets or directly manufactured by a multi-layer co-firing process, and the surfaces of the piezoceramic sheets of the thickness-displacement stack are covered with a full electrode layer, so that the first piezoceramic actuator is further capable of providing radial force and radial displacement.
According to another aspect of the present invention, there is provided a nano-displacement linear stepper motor including a motor housing, a motor mover, at least one pair of first piezoelectric ceramic drivers and at least one pair of second piezoelectric ceramic drivers,
The motor rotor is arranged in the motor shell,
The at least one pair of first piezoceramic actuators are symmetrically arranged about and mounted on the motor mover,
The at least one pair of second piezoceramic actuators are symmetrically arranged about and mounted on the motor mover,
The tips of the at least one pair of first piezoceramic actuators are in contact with the motor housing to provide at least an axial force and an axial displacement,
The tips of the at least one pair of second piezoceramic actuators are in contact with the motor housing to provide at least a radial force and a radial displacement.
The invention realizes high-precision displacement of the piezoelectric ceramic motor, ensures that the piezoelectric ceramic motor has high driving force, solves the environmental characteristics problems of illumination resistance, temperature aging and the like of the piezoelectric ceramic motor in the prior art, and solves the problem that the axial displacement stack of the piezoelectric ceramic stepping motor in the prior art cannot recover the electrical performance after the performance is degraded.
Drawings
Fig. 1 is a schematic structural diagram of a high-precision nano-displacement linear stepper motor according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view of a high-precision piezoelectric ceramic displacement driver according to a first embodiment of the present invention.
Figures 3a-d show schematic diagrams of the operation of the piezo ceramic displacement driver of figure 2.
Fig. 4a-d are schematic diagrams of the polarization direction of the electrode layers and the electric field application state of the piezo-ceramic displacement driver of fig. 2.
Fig. 5 is a schematic structural view of a piezoelectric ceramic displacement driver according to a second embodiment of the present invention.
Fig. 6 is a schematic structural view of a piezoelectric ceramic displacement driver according to a third embodiment of the present invention.
Fig. 7 is an electrode structure schematic of the electrode layers of the bend displacement stack of fig. 5.
Fig. 8 is a schematic structural view of a piezoelectric ceramic displacement driver according to a fourth embodiment of the present invention.
Fig. 9 is a schematic structural view of a piezoelectric ceramic displacement driver according to a fifth embodiment of the present invention.
Fig. 10 is a schematic structural view of a first piezoelectric ceramic displacement actuator according to the present invention.
Fig. 11 is a schematic structural view of a second piezoelectric ceramic displacement actuator according to the present invention.
Figures 12a-12f illustrate the motion of a high precision nano-displacement linear stepper motor in accordance with one embodiment of the present invention.
Figures 13a-13h illustrate the motion of a high precision nano-displacement linear stepper motor of another embodiment.
Fig. 14 shows a schematic structural diagram of a nano-displacement linear stepper motor according to another embodiment.
Fig. 15a-b show schematic structural views of a nano-displacement linear stepper motor of another embodiment, wherein fig. 15b is a side view of fig. 15 a.
Fig. 16 shows a schematic structural diagram of a nano-displacement linear stepper motor according to another embodiment.
Fig. 17 shows a schematic structural diagram of a nano-displacement linear stepper motor according to another embodiment.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the attached drawings, so that the objects, features and advantages of the present invention will be more clearly understood. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the invention, but rather are merely illustrative of the true spirit of the invention.
In the following description, for the purposes of explanation of various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that an embodiment may be practiced without one or more of the specific details. In other instances, well-known devices, structures, and techniques associated with the present application may not be shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the following description, for the purposes of clarity of presentation of the structure and manner of operation of the present invention, the description will be made with the aid of directional terms, but such terms as "forward," "rearward," "left," "right," "outward," "inner," "outward," "inward," "upper," "lower," etc. are to be construed as convenience, and are not to be limiting.
According to one aspect of the invention, the problems that the existing piezoelectric ceramic stepping motor is complex in structure, difficult to realize commercial use, or complex in manufacturing process and high in cost can be solved. According to another aspect of the invention, the problem that the axial displacement stack of the existing piezoelectric ceramic stepping motor is made by bonding an organic colloid, so that the motor has shorter service life in resisting the environment characteristics such as illumination resistance, temperature aging resistance and the like of the organic colloid can be solved. According to the invention, the problem that the axial displacement stack of the traditional piezoelectric ceramic stepping motor cannot recover the electrical performance by energizing after performance depolarization can be solved. According to the invention, the problem that the piezoelectric ceramic in the prior art is driven by low voltage to form a large stroke in axial displacement can be solved.
The present invention generally relates to a nano-displacement linear stepper motor comprising a motor housing, a motor mover, at least one pair of first piezo-ceramic drivers and at least one pair of second piezo-ceramic drivers. The motor rotor is arranged in the motor shell, and at least one pair of first piezoelectric ceramic drivers are symmetrically arranged around the motor rotor and are arranged on the motor shell. At least one pair of second piezoceramic actuators are symmetrically arranged about the motor mover and mounted on the motor housing. The tips of at least one pair of first piezoceramic actuators are in contact with the motor mover to provide at least an axial force and an axial displacement. The tips of at least one pair of second piezoceramic actuators are in contact with the motor mover to provide at least a radial force and a radial displacement.
In one embodiment, the first piezoceramic actuator comprises a bending displacement stack and a swing arm. The bending displacement stack is directly manufactured by stacking a plurality of piezoelectric ceramic plates or a multi-layer co-firing process. The surfaces of the piezoelectric ceramic sheets of the bending displacement stack are covered with spaced apart electrode layers to form a first set of electrode layers and a second set of electrode layers. When the movable element is operated, the first group of electrode layers are firstly electrified to enable the bending displacement stack to form bending at a certain angle, then the second group of electrode layers are electrified to enable the bending displacement stack to recover to a vertical state, then the voltage of the first group of electrode layers or the second group of electrode layers is reduced to zero, and the bending displacement stack is enabled to form bending at a certain angle again, so that the movable element swings back and forth or moves towards the same direction. The swing arm is used for amplifying the displacement amount of the bending displacement stack.
Exemplary embodiments of the nano-displacement linear stepper motor of the present invention are described in detail below with reference to the accompanying drawings.
Example 1
Fig. 1 is a schematic structural diagram of a high-precision nano-displacement linear stepper motor according to an embodiment of the present invention. As shown in fig. 1, the nano-displacement linear stepper motor 100 includes a motor housing 10, a motor mover 20, at least one pair of first piezoceramic actuators 30, and at least one pair of second piezoceramic actuators 40. The motor mover 20 is mounted within the motor housing 10, and at least one pair of first piezoceramic actuators 30 are symmetrically arranged about the motor mover 20 and mounted on the motor housing 10. At least one pair of second piezoceramic actuators 40 are symmetrically arranged about the motor mover 20 and mounted on the motor housing 10. The tips of at least one pair of first piezoceramic actuators 30 are in contact with the motor mover 20 to provide at least an axial force and an axial displacement. The tips of at least one pair of second piezoceramic actuators 40 are in contact with the motor mover 20 to provide at least a radial force and a radial displacement.
Various types of piezo-ceramic actuators (either a first piezo-ceramic actuator or a second piezo-ceramic actuator) for the high precision nano-displacement linear stepper motor of the invention are described in detail below with reference to fig. 2-9.
Fig. 2 is a schematic cross-sectional view of a high-precision piezoelectric ceramic displacement driver according to a first embodiment of the present invention. Fig. 3a-d are schematic diagrams showing the operation of the piezo-ceramic displacement driver of fig. 2, and fig. 4a-d are schematic diagrams showing the polarization direction of the electrode layers and the electric field application state of the piezo-ceramic displacement driver of fig. 2. As shown in fig. 2-4, the piezoceramic displacement actuator comprises a thickness displacement stack 101, a bending displacement stack 102, and a swing arm 103. Wherein the thickness displacement stack 101 is connected with the base 300 and the swing arm 103 contacts the mover 200. Wherein the thickness displacement stack is formed by combining 10 piezoelectric ceramic plates 106 with the thickness of 0.5mm and full electrode layers 107 on the upper surface and the lower surface, and the polarization directions of two adjacent piezoelectric ceramic plates 106 are opposite, as shown in fig. 4a-4 d.
The bending displacement stack 102 is formed by stacking 10 piezoelectric ceramic plates 106 with the thickness of 0.5mm, the upper surface and the lower surface are respectively covered with split electrodes 108a and 108b, the polarization directions of the two electrodes 108a and 108b of the same piezoelectric ceramic plate are the same, and the polarization directions of the adjacent piezoelectric ceramics are opposite, as shown in fig. 4a-4d, a certain gap is formed between the split electrodes 108a and 108b, and the gap distance can be 1mm, for example. The bottom surface of the swing arm 103 is square, the side length is 10mm, and the height of the swing arm 103 is 5arctan60 degrees.
In the first embodiment of the piezoelectric ceramic displacement driver of the present invention, as shown in fig. 3a, in an initial state, the piezoelectric ceramic displacement driver is connected to the base 300, and the end surface of the swing arm 103 is spaced from the mover 200 by a distance of about 5um; neither the thickness-shift stack 101 nor the bending-shift stack 102 applies an electric field; secondly, an electric field E is applied to the electrode 108a part of the bending displacement stack 102 to make the bending degree of the ceramic chip maximum, and then an electric field E is applied to the thickness displacement stack 101 to make the end point of the swing arm 103 contact the mover 200 and apply a certain pressure, as shown in FIG. 3 b; thirdly, an electric field E is applied to the electrode 108b part of the bending displacement stack 102 until the electric field is consistent with the electric field applied by the electrode 108a part, the swing arm 103 is driven to return to the middle position, meanwhile, the mover 200 is pushed to move right, the electric field E is applied to the thickness displacement stack 101, and the pressure applied by the swing arm 103 to the mover 200 is kept, as shown in fig. 3 c; fourth, the electric field applied to the electrode 108a is reduced, so that the bending displacement stack 102 bends and swings rightwards, the mover 200 is pushed to move rightwards continuously, the electric field is applied to the thickness displacement stack 101, and the pressure applied to the mover by the swing arm is kept, as shown in fig. 3 d; fifth, the electric field applied to the thickness-shift stack 101 is removed, so that the swing arm 103 is separated from contact with the mover 200, and then the electric field applied to the bending-shift stack 102 is removed, so that the piezoceramic displacement actuator finally returns to the initial state as shown in fig. 3 a.
In the first embodiment, the maximum achievable swing displacement is determined by the performance characteristics of the piezoelectric ceramic and the displacement magnification of the swing arm, and in this embodiment, the achievable displacement of the piezoelectric ceramic is 0.1% of the height of the tile, and the magnification of the swing arm is 1 times, determined by the maximum voltage applied to the electrode 106; the maximum displacement of the half swing in this example is 5um, while the maximum displacement of the full swing is 10um.
In this embodiment, the maximum thrust that the thickness displacement stack can provide is 4000 n, and the maximum thrust of the bending displacement stack is 1800 n, so the maximum driving force that the piezoelectric ceramic displacement driver can output is not greater than 1800 n; the actual driving force depends on the product of the static friction coefficient of the contact surface of the rotor and the swing arm and the thrust of the swing arm driven by the thickness displacement stack to the vertical direction of the rotor, and the maximum thrust provided by the example is 800N.
Fig. 5 is a schematic structural diagram of a piezoelectric ceramic displacement driver according to a second embodiment of the present invention, as shown in fig. 3, the piezoelectric ceramic displacement driver of the present embodiment includes a bending displacement stack 102, a thickness displacement stack 101 and a swing arm 103, wherein one end of the bending displacement stack 102 is connected to a base 300, the other end of the bending displacement stack 103 is connected to the thickness displacement stack 101, and the thickness displacement stack 101 is connected to the swing arm 103. The height of the bending displacement stack is 6mm, the height of the thickness displacement stack is 10mm, the height of the swing arm is 2mm, and the ceramic tiles stacked to form the bending displacement stack 102 and the thickness displacement stack 101 are square with side length of 10 mm. Since the thickness shift stack 101 also acts as a swing arm when the bending shift stack 102 is in operation, the swing shift magnification of the present invention is 1.3 times, so the single-step maximum driving shift of the piezoelectric ceramic shift driver of the present embodiment is 13um.
The difference between the present embodiment and the first embodiment is the positions of the bending displacement stack and the thickness displacement stack, in the first embodiment, the bending displacement stack is located between the thickness displacement stack and the flapping arm, and in the second embodiment, the thickness displacement stack is located between the bending displacement stack and the swing arm, and the structures of the bending displacement stack 102 and the thickness displacement stack 101 are the same as those of the first embodiment, and will not be repeated here.
Fig. 6 is a schematic structural view of a piezoelectric ceramic displacement actuator according to a third embodiment of the present invention, and fig. 7 is a schematic structural view of electrodes of electrode layers of the bending displacement stack of fig. 6. As shown in fig. 6-7, in this embodiment, the piezoceramic displacement actuator still includes a thickness displacement stack 101, a bending displacement stack 102, and a swing arm 104. Wherein the thickness displacement stack 101 is used to connect the base, swing arm 104, to the mover. In an embodiment, the main difference is the structure of the electrode layers, which include spaced apart electrode layers 109a, 109b, 109c and 109, as shown in fig. 7, the electrode layers 109a, 109b, 109c and 109d being of a fan-shaped structure, each electrode being spaced apart from the other electrode.
In operation, the bend-displaced stack may be formed by applying a positive displacement electric field to electrode layers 109a and 109d, while applying no electric field or an opposite electric field to electrode layers 109b and 109c, thereby causing the stack to oscillate in the left direction; or by applying a positive displacement electric field to the electrode layers 109b and 109c, while applying no electric field or an electric field in the opposite direction to the electrode layers 109a and 109d, thereby forming a swing in the right direction; or by applying a positive displacement electric field to the electrode layers 109a and 109b, while no electric field or an electric field of opposite direction is applied to the electrode layers 109c and 109d, thereby causing the stack to oscillate in the rearward (upward in fig. 7) direction; or by applying a positive displacement electric field to the electrode layers 109c and 109d, while applying no electric field or an electric field in the opposite direction to the electrode layers 109a and 109b, a swing in the forward direction is formed. Thus, the piezoelectric ceramic displacement driver of the present embodiment can realize displacement control of two degrees of freedom in the X and Y directions by one bending displacement stack.
Fig. 8 is a schematic structural view of a piezoelectric ceramic displacement driver according to a fourth embodiment of the present invention. As shown in fig. 8, the piezoceramic displacement actuator includes a thickness displacement stack 101, a bending displacement stack 102, and a swing arm 105. The structures of the thickness shift stack 101 and the bending shift stack 102 are the same as those of the first embodiment, and will not be described again here. As shown in fig. 8, the swing arm 105 is cylindrical, a groove 105a is formed in the upper end surface of the swing arm 105, a protruding ball 201 protrudes from the lower bottom surface of the mover 200, and the protruding ball 201 is matched with the groove 105a, so that an axial driving force provided by the swing of the bending displacement stack 102 can be transmitted through the structure of the swing arm 105, and the structure 201 of the mover 200 is directly pushed, so that the mover 200 acts.
In the present embodiment, the swing arm 105 acts on the mover 200 not by a static friction force but by the recess 105a on the swing arm 105 and the protruding ball 201 on the mover 200 cooperating, so that the movement of the mover is directly driven by the swing of the bending displacement stack, and thus the piezo-ceramic displacement driver is not limited to a static friction force driving manner.
Fig. 9 is a schematic structural view of a piezoelectric ceramic displacement driver according to a fifth embodiment of the present invention. As shown in fig. 9, the piezoceramic displacement actuator includes a thickness displacement stack 101, a bending displacement stack 102, and a swing arm 106. The structures of the thickness shift stack 101 and the bending shift stack 102 are the same as those of the first embodiment, and will not be described again here. The present embodiment differs from the above-described embodiment mainly in the structure of the swing arm 106. In this embodiment, the swing arm 106 is cylindrical, and is provided with a protrusion 106a on the upper surface, and the protrusion 106a contacts and drives the mover to move. The motion of the axial displacement of the swing arm 106 is driven upon bending action of the bending displacement stack 102, thereby enabling the swing arm to output axial displacement and thrust. Those skilled in the art will appreciate that the swing arm 106 may be configured as a T-shaped configuration as shown, however, the shape of the swing arm may be configured in other shapes, and is not limited to triangular, hemispherical, T-shaped, etc.
The high precision nano-displacement linear stepper motor of the present invention will now be described with continued reference to FIGS. 1-11.
Fig. 10 is a schematic structural view of a first piezoelectric ceramic displacement driver 30 according to the present invention, and fig. 11 is a schematic structural view of a second piezoelectric ceramic displacement driver 40 according to the present invention. As shown in fig. 10-11, the first piezoceramic displacement actuator 30 includes a thickness displacement stack 101, a bending displacement stack 102, and a swing arm 103. The thickness displacement stack 101, the bending displacement stack 102 and the swing arm 103 form a piezoceramic actuator that provides radial and axial displacement. The second piezoceramic actuator 40 comprises a thickness displacement stack 101 and a swing arm 103. The thickness-displacement stack and the wobble form a piezoceramic actuator that provides radial displacement.
Referring back to fig. 1, a pair of first piezoceramic actuators 30 are mounted on the motor casing from both sides of the motor mover 20, respectively, and are axisymmetric with respect to the motor mover 20. A pair of second piezoceramic actuators 40 are mounted on the motor housing from both sides of the motor mover 20, respectively, and are axisymmetric with respect to the motor mover 20.
The motion process of the high-precision nano-displacement linear stepper motor according to an embodiment of the present invention will be described with reference to fig. 12a-12 f.
In the present embodiment, the initial state is as shown in fig. 12a, and the end surfaces of the first and second piezo-ceramic displacement drivers 30 and 40 are in contact with the motor mover 20 and a certain pressure is provided by the motor housing.
As shown in fig. 12b, an electric field is applied to the second piezoceramic displacement actuator 40, and the second piezoceramic displacement actuator 40 is extended by 10um, so that the contact surface between the first piezoceramic actuator 30 and the motor mover 20 is separated.
Second, as shown in fig. 12c, an electric field is applied to the bending displacement stack of the first piezoelectric ceramic displacement actuator 30, so that the bending displacement stack of the first piezoelectric ceramic displacement actuator 30 is bent in the left direction, and the swing arm of the first piezoelectric ceramic displacement actuator 30 is swung left.
As shown in fig. 12d, the electric field applied to the second piezoelectric ceramic actuator 40 is reduced to 0V, and the electric field is applied to the thickness shift stack on the first piezoelectric ceramic displacement actuator 30, so that the swing arm of the first piezoelectric ceramic displacement actuator 30 contacts the motor mover 20, and the swing arm of the second piezoelectric ceramic displacement actuator 40 is separated from contact with the motor mover.
Action four as shown in fig. 12e, the electric field of the bending displacement stack applied to the first displacement driver 30 is adjusted, so that the bending displacement stack on the first displacement driver 30 swings rightward, and the motor mover 20 moves rightward, and the axial displacement of 5um can be divided into displacement equal parts of 1nm by subdividing the control electric field, thereby realizing control of nano displacement precision.
When the required displacement is reached, the fifth operation is performed, as shown in fig. 12f, the adjustment of the electric field applied to the bending displacement stack of the first piezoelectric ceramic displacement actuator 30 is stopped, the electric field is applied to the second piezoelectric ceramic actuator 40, the position of the mover is fixed, and then the electric field applied to the first piezoelectric ceramic actuator 30 is reduced to 0v, and the state shown in fig. 12b is reached. If the operation is stopped, the electric field applied to the piezoelectric ceramic actuator can be stopped, and the state shown in fig. 12a can be restored. The motor can continuously act through the steps to enable the rotor to reach the required position, and the motor rotor can be fixed through the pretightening force of the motor shell when the motor is not in action.
Example 2
The present embodiment differs from embodiment 1 in that the second piezoceramic actuator is identical to the first piezoceramic actuator, and includes a thickness displacement stack, a bending displacement stack, and a swing arm. The high-precision nano-displacement linear stepper motor of example 2 will be described with reference to fig. 13a-13 h.
In embodiment 2, the initial state is as shown in fig. 13a, the end surfaces of the first and second piezoelectric ceramic displacement drivers 30 and 40 are in contact with the motor mover 20, and a certain pressure is provided by the motor housing.
As shown in fig. 13b, an electric field is applied to the second piezoceramic displacement actuator 40, and the second piezoceramic actuator 40 is extended by 10um, so that the contact surface between the first piezoceramic actuator 30 and the motor mover 20 is separated.
Second, as shown in fig. 13c, an electric field is applied to the bending displacement stack of the first piezoceramic actuator 30, so that the bending displacement stack of the first piezoceramic actuator 30 is bent in the left direction, and the swing arm of the first piezoceramic actuator 30 is swung left.
As shown in fig. 13d, the electric field applied to the second piezoceramic actuator is reduced to 0V, and the electric field is applied to the thickness displacement stack of the first piezoceramic actuator 30, so that the swing arm of the first piezoceramic actuator 30 contacts the motor mover 20, and simultaneously the voltage of the thickness displacement stack of the second piezoceramic actuator is reduced to 0V, so that the swing arm of the second piezoceramic actuator is separated from contact with the motor mover.
Action four as shown in fig. 13e, the electric field applied to the bending displacement stack of the first piezoceramic actuator 30 is adjusted to return the swing arm of the first piezoceramic actuator 30 to the neutral position, and the electric field is applied to the bending displacement stack of the second piezoceramic actuator 40 to swing the swing arm of the second piezoceramic actuator 40 to the left.
Action five as shown in fig. 13f, the electric field applied to the bending displacement stack of the first piezoceramic actuator 30 is adjusted to continue the bending displacement stack of the first piezoceramic actuator 30 to swing rightward, thereby moving the mover rightward.
Action six as shown in fig. 13g, the electric field applied to the bending displacement stack of the second piezoceramic actuator 40 is adjusted to swing the swing arm of the second piezoceramic actuator rightward, and the electric field of the bending displacement stack of the first piezoceramic actuator is lowered to 0V, and the swing arm of the first piezoceramic actuator 30 swings back to the initial position.
Operation seven as shown in fig. 13h, the electric field applied to the bending displacement stack of the second piezoceramic actuator 40 is adjusted to swing the swing arm of the second piezoceramic actuator 40 rightward, and the bending displacement stack of the first piezoceramic actuator 40 leftward.
When the first piezoelectric ceramic driver 30 and the second piezoelectric ceramic driver 40 repeatedly and alternately act, the mover 20 can be driven to continuously move rightward, and the axial displacement of 5um can be divided into displacement equal parts of 1nm by subdividing the control electric field, so that the control of nanometer displacement precision is realized.
In the motor driving process, one group of the first piezoelectric ceramic driver 30 and the second piezoelectric ceramic driver 40 always drives the mover 20 to act, and the other group of the moving group piezoelectric ceramic drivers can stop voltage change when reaching a required position, the piezoelectric ceramic drivers of the moving group piezoelectric ceramic drivers can completely reduce the electric field to 0V and then pressurize to the highest working voltage, meanwhile, the thickness displacement stack applied electric field of the moving group piezoelectric ceramic drivers is reduced to 0V, the switching of the pressed piezoelectric ceramic groups is realized, the applied electric field of the bent piezoelectric ceramic stacks is reduced to 0V, and then the applied electric field of all piezoelectric ceramic groups is reduced to 0V, so that the position of the mover is stabilized.
When the order of the movements of the bending stacks of the first and second piezoceramic actuators 30 and 40 is reversed, a reverse movement direction of the mover 20 can be achieved, i.e., the mover can be moved leftward.
Examples 3 to 4
Embodiments 3 and 4 of the high-precision nano-displacement linear stepper motor of the present invention are briefly described below. Example 3 and example 4 differ from example 2 only in the number of piezo-ceramic displacement drivers.
The schematic of the nano-displacement linear stepper motor embodiment 3 is shown in fig. 14, with four piezo-ceramic drivers added. That is, the nano-displacement linear stepper motor includes two pairs of first piezoelectric ceramic drivers 30 and two pairs of second piezoelectric ceramic drivers 40, and the two pairs of first piezoelectric ceramic drivers 30 and the two pairs of second piezoelectric ceramic drivers 40 are aligned. In operation, the two pairs of first piezoceramic actuators 30 are operated in unison, and the two pairs of second piezoceramic actuators 40 are operated in unison.
A schematic structure of embodiment 4 of the present invention is shown in fig. 15, and fig. 15b is a side view of fig. 15a, with four piezo-ceramic actuators added. That is, the nano-displacement linear stepping motor comprises two pairs of first piezoelectric ceramic drivers and two pairs of second piezoelectric ceramic drivers, wherein the two pairs of first piezoelectric ceramic drivers are arranged in one row, and the two pairs of second piezoelectric ceramic drivers are arranged in the other row. In operation, the two pairs of first piezoceramic actuators 30 are operated in unison, and the two pairs of second piezoceramic actuators 40 are operated in unison.
Example 5
The nano-displacement linear stepper motor of example 5 of the invention is schematically shown in fig. 16, the mover 20 is mounted on the motor housing 10 through the precision guide rail 201 and the sliders 202 and 203, the piezoelectric ceramic drivers 30 and 40 are mounted on the other side of the motor housing 10, and the swing arms of the piezoelectric ceramic drivers 30 and 40 are in contact with the mover 20.
Example 6
The structure of the nano-displacement linear stepping motor of embodiment 6 of the invention is schematically shown in fig. 17, and a pair of piezoelectric ceramic drivers 30 and a pair of piezoelectric ceramic drivers 40 are mounted on a mover 20, and when the nano-displacement linear stepping motor is operated, the swing arms of the piezoelectric ceramic drivers contact a motor housing 10, and the piezoelectric ceramic drivers move together with a follower.
Various embodiments of the nano-displacement linear stepper motor and piezo-ceramic displacement driver of the present invention are described above. Although the nano-displacement linear stepper motor in the embodiments is described with respect to only one or two piezoelectric ceramic displacement drivers, it will be understood by those skilled in the art that the various piezoelectric ceramic displacement drivers in the embodiments of the present invention may be applied to the nano-displacement linear stepper motor in the embodiments.
While the preferred embodiments of the present application have been described in detail, it will be appreciated that those skilled in the art, upon reading the above teachings, may make various changes and modifications to the application. Such equivalents are also intended to fall within the scope of the application as defined by the following claims.
Claims (2)
1. A nano-displacement linear stepping motor is characterized by comprising a motor shell, a motor rotor, at least one pair of first piezoelectric ceramic drivers and at least one pair of second piezoelectric ceramic drivers,
The motor rotor is arranged in the motor shell,
The at least one pair of first piezoceramic actuators are symmetrically arranged about the motor mover and mounted on the motor housing,
The at least one pair of second piezoceramic actuators are symmetrically arranged about the motor mover and mounted on the motor housing, and
The tips of the at least one pair of first piezoceramic actuators are in contact with the motor mover to provide at least an axial force and an axial displacement to drive the motor mover to move, and the tips of the at least one pair of second piezoceramic actuators are in contact with the motor mover to provide at least a radial force and a radial displacement;
The first piezoelectric ceramic driver comprises a bending displacement stack and a swing arm, wherein the bending displacement stack is formed by stacking a plurality of piezoelectric ceramic plates or is directly manufactured by a multi-layer co-firing process, and the surfaces of the piezoelectric ceramic plates of the bending displacement stack are covered with spaced electrode layers so as to form a first group of electrode layers and a second group of electrode layers; firstly, electrifying the first group of electrode layers to enable the bending displacement stack to form bending with a certain angle, then electrifying the second group of electrode layers to enable the bending displacement stack to recover to a vertical state, reducing the voltage of the first group of electrode layers or the second group of electrode layers to zero, enabling the bending displacement stack to form bending with a certain angle again, and enabling a rotor to swing reciprocally or move in the same direction, wherein the swing arm is used for amplifying the displacement of the bending displacement stack;
The first piezoelectric ceramic driver further comprises a thickness displacement stack, wherein the thickness displacement stack is formed by stacking a plurality of piezoelectric ceramic plates or is directly manufactured by a multi-layer co-firing process, and the surface of the piezoelectric ceramic plates of the thickness displacement stack is covered with a full electrode layer, so that the first piezoelectric ceramic driver can also provide radial acting force and radial displacement;
the second piezoelectric ceramic driver comprises a thickness displacement stack and a swing arm, wherein the thickness displacement stack is formed by stacking a plurality of piezoelectric ceramic plates or is directly manufactured by a multilayer cofiring process, and the surface of the piezoelectric ceramic plates of the thickness displacement stack is covered with a full electrode layer, so that the second piezoelectric ceramic driver can provide radial acting force and radial displacement;
The second piezoceramic actuator further comprises a bending displacement stack, the second piezoceramic actuator further being capable of providing an axial force and an axial displacement;
The nano-displacement linear stepping motor comprises two pairs of first piezoelectric ceramic drivers and two pairs of second piezoelectric ceramic drivers, wherein the two pairs of first piezoelectric ceramic drivers are arranged in one row, and the two pairs of second piezoelectric ceramic drivers are arranged in another row;
One end of the swing arm is in contact with the mover, the thickness displacement stack is used for separating the swing arm from the mover when the mover does not act, and the swing arm is in contact with the mover and applies pressure when the mover acts;
one end of the thickness displacement stack is connected with the bending displacement stack, and the other end of the thickness displacement stack is connected with the swing arm;
the thickness-shift stack and the bend-shift stack are co-fired stacks, and/or the thickness-shift stack and the bend-shift stack are organic adhesive bonding stacks, and/or the thickness-shift stack and the bend-shift stack are stacks formed by a glass paste sintering process;
The thickness displacement stack, the bending displacement stack and the swing arm are connected by co-firing, and/or organic adhesive bonding and/or glass paste sintering process;
the cross section of the swing arm is rectangular, triangular, hemispherical, inverted T-shaped and/or the bottom surface of the swing arm is square, and the top of the swing arm is arc-shaped, hemispherical and/or inverted T-shaped;
The electrode layers of the thickness-shift stack are fully electrode or the edge of the electrode layers is between 0 and 1mm from the ceramic edge spacing;
The electrode layers of the bending displacement stack comprise four spaced electrode layers, the four electrode layers are of a fan-shaped structure, each electrode is spaced from the other electrode, and the distance gap between the electrodes in the two parts is between 0.1mm and 2 mm;
The side length range of the section of the first piezoelectric ceramic driver and the second piezoelectric ceramic driver is between 1mm and 50 mm;
the height of the thickness-shift stack is between 0.1mm and 100 mm;
the height of the curved stack is between 0.1mm and 100 mm;
The height of the swing arm is between 0.1mm and 100 mm.
2. The nano displacement linear stepping motor is characterized by comprising a motor shell, a motor rotor, at least one pair of first piezoelectric ceramic drivers, a guide rail and a sliding block, wherein one side of the motor rotor is arranged at the top of the motor shell through the guide rail and the sliding block, the at least one pair of first piezoelectric ceramic drivers are arranged at the bottom of the motor shell side by side, and the top of the first piezoelectric ceramic drivers is contacted with the motor rotor and provides axial acting force and axial displacement at least;
The first piezoelectric ceramic driver comprises a bending displacement stack and a swing arm, wherein the bending displacement stack is formed by stacking a plurality of piezoelectric ceramic plates or is directly manufactured by a multi-layer co-firing process, and the surfaces of the piezoelectric ceramic plates of the bending displacement stack are covered with spaced electrode layers so as to form a first group of electrode layers and a second group of electrode layers;
When the bending displacement stack is operated, firstly, power is applied to the first group of electrode layers to enable the bending displacement stack to form bending with a certain angle, then power is applied to the second group of electrode layers to enable the bending displacement stack to recover to a vertical state, then the voltage of the first group of electrode layers or the second group of electrode layers is reduced to zero, and the bending displacement stack is enabled to form bending with a certain angle again, so that a rotor swings back and forth or moves in the same direction, wherein the swing arm is used for amplifying the displacement of the bending displacement stack;
The first piezoelectric ceramic driver further comprises a thickness displacement stack, wherein the thickness displacement stack is formed by stacking a plurality of piezoelectric ceramic plates or is directly manufactured by a multi-layer co-firing process, and the surface of the piezoelectric ceramic plates of the thickness displacement stack is covered with a full electrode layer, so that the first piezoelectric ceramic driver can also provide radial acting force and radial displacement;
one end of the thickness displacement stack is connected with the bending displacement stack, and the other end of the thickness displacement stack is connected with the swing arm;
The electrode layers of the thickness-shift stack are fully electrode or the edge of the electrode layers is between 0 and 1mm from the ceramic edge spacing;
The electrode layers of the bending displacement stack comprise four spaced electrode layers, the four electrode layers are of a fan-shaped structure, each electrode is spaced from the other electrode, and the distance gap between the electrodes in the two parts is between 0.1mm and 2 mm;
the side length range of the section of the first piezoelectric ceramic driver is between 1mm and 50 mm;
the height of the thickness-shift stack is between 0.1mm and 100 mm;
the height of the curved stack is between 0.1mm and 100 mm;
The height of the swing arm is between 0.1mm and 100 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910602746.2A CN110635711B (en) | 2019-07-05 | 2019-07-05 | Nanometer displacement linear stepping motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910602746.2A CN110635711B (en) | 2019-07-05 | 2019-07-05 | Nanometer displacement linear stepping motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110635711A CN110635711A (en) | 2019-12-31 |
| CN110635711B true CN110635711B (en) | 2024-06-14 |
Family
ID=68969025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910602746.2A Active CN110635711B (en) | 2019-07-05 | 2019-07-05 | Nanometer displacement linear stepping motor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110635711B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112600459B (en) * | 2020-11-11 | 2021-10-15 | 南京航空航天大学 | Linear piezoelectric transmission device based on static friction and working method thereof |
| CN113472237B (en) * | 2021-08-12 | 2022-11-15 | 吉林农业科技学院 | Buckling combined actuating inchworm type linear piezoelectric driver and excitation method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209731108U (en) * | 2019-07-05 | 2019-12-03 | 季华实验室 | Nano displacement linear stepping motor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100485596B1 (en) * | 2002-06-04 | 2005-04-27 | 한국과학기술연구원 | Bender typed multilayer actuator |
| CN106301065B (en) * | 2016-07-28 | 2018-08-31 | 中国计量科学研究院 | Uniaxial nanometer displacement actuator with millimeter stroke |
| CN106953539B (en) * | 2017-04-14 | 2019-04-12 | 哈尔滨工业大学 | Vertical-curved compound creeping motion type precision piezoelectric actuator and its motivational techniques |
| CN107612415A (en) * | 2017-10-30 | 2018-01-19 | 哈尔滨工业大学 | A kind of multiple degrees of freedom sandwich micro-containing operators and its displacement output control method |
-
2019
- 2019-07-05 CN CN201910602746.2A patent/CN110635711B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN209731108U (en) * | 2019-07-05 | 2019-12-03 | 季华实验室 | Nano displacement linear stepping motor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110635711A (en) | 2019-12-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5642015A (en) | Elastomeric micro electro mechanical systems | |
| US6208065B1 (en) | Piezoelectric transducer and actuator using said piezoelectric transducer | |
| CN110635711B (en) | Nanometer displacement linear stepping motor | |
| US8022596B2 (en) | Guided electromechanical motor | |
| CN111313747A (en) | Multi-layer ceramic co-fired piezoelectric driver, piezoelectric motor and preparation method thereof | |
| CN103227279A (en) | Slip-stick piezoelectric actuator | |
| CN110635713B (en) | Piezoelectric ceramic rotary motor | |
| WO2005078815A1 (en) | Wide frequency range electromechanical actuator | |
| CN110224634B (en) | Piezoelectric ceramic displacement driver | |
| CN107040161B (en) | Piezoelectric type multi-degree-of-freedom hybrid driving type driver | |
| CN1623240A (en) | Curved electro-active actuators | |
| US10777730B2 (en) | Scalable piezoelectric linear actuator | |
| CN209731108U (en) | Nano displacement linear stepping motor | |
| CN104124891A (en) | Piezoelectric vibrator and precise displacement platform comprising same | |
| CN209731109U (en) | piezoelectric ceramic displacement driver | |
| CN102522916B (en) | Nano-motor based on frictional force variation | |
| CN101018024A (en) | Piezoelectric inertia step driving device | |
| CN116800122A (en) | Multilayer piezoelectric ceramic linear ultrasonic motor and driving method | |
| CN209731111U (en) | piezoelectric ceramic rotary motor | |
| KR100924097B1 (en) | Piezoelcetric linear actuator | |
| CN103427703A (en) | Miniature nanomotor based on shearing piezoelectric effect | |
| CN201022181Y (en) | Piezoelectricity inertia stepping driving device | |
| CN114442303B (en) | Micro-displacement actuator based on piezoelectric ceramic stack | |
| CN114244183B (en) | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof | |
| JP4413873B2 (en) | Microswitch actuator and microswitch |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |