CN203219209U - Piezoelectric screw thread driving technology based microchecker - Google Patents
Piezoelectric screw thread driving technology based microchecker Download PDFInfo
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- CN203219209U CN203219209U CN 201320161260 CN201320161260U CN203219209U CN 203219209 U CN203219209 U CN 203219209U CN 201320161260 CN201320161260 CN 201320161260 CN 201320161260 U CN201320161260 U CN 201320161260U CN 203219209 U CN203219209 U CN 203219209U
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Abstract
The utility model discloses a piezoelectric screw thread driving technology based microchecker, belonging to the precision machine and automatic control fields. The piezoelectric screw thread driving technology based microchecker comprises a one-dimensional microchecker and a two-dimensional microchecker, and each of the one-dimensional microchecker and the two-dimensional microchecker adopts a piezoelectric screw thread driver to directly drive the microchecker. Two fixed sleeves are symmetrically arranged in the proper positions of an upper plate, and the above two piezoelectric screw thread drivers are in fit connection with the internal threads of the fixed sleeves; the centers of the piezoelectric screw thread drivers fix driving screws and contact with a lower plate; two springs and a steel ball form an isosceles triangle and are supported between the upper plate and the lower plate; the microvibration of the piezoelectric ceramic of the piezoelectric screw thread driving technology based microchecker makes the driving screws to move along the positive and negative directions of a straight line, and the driving screws directly drive the microchecker without any intermediate transmission mechanisms; and the microchecker can realize XY rotation and table board pitching. The novel microchecker has the characteristics of simple structure, high integration level, strong load capacity and the like, and can be applied to the optical path adjusting field, the precision driving field, the microsystem field, the structural attitude control field, the biomedicine field and the like.
Description
Technical field
The utility model belongs to precision optical machinery and automation field, and particularly a kind of micropositioner based on the piezoelectricity thread Driving technique is particluarly suitable for fields application such as light path adjustment, accurate driving, micro-system, Structure Attitude Control, biological medicine.
Background technology
Traditional fine motion control desk adopts the manual fine-tuning knob usually, so precision and repeated relatively poor.For the micropositioner control system of various dimensions motion, manual adjustments is more complicated, and precision is lower.Traditional electromagnetic motor is equipped with the fine motion of also can carrying out of decelerator and regulates, but the common volume of this type systematic is big, system complex, the equipment cost height, and also its deceleration device is made up of a plurality of gears, causes the reduction gearing mechanism idle running big, and it is inconvenient to use.Eighties of last century nineties, " tablecloth principle " piezoelectric actuated device of U.S. NewFocus company invention adopts piezo-activator to drive, and characteristics are that volume is little, displacement resolution is high, simple operation etc.But this micropositioner cost is very high, fetch long price.
In recent years, because the develop rapidly of nanosecond science and technology, PZT (piezoelectric transducer) (PZT) is widely used as driver in Precision Position Location System.Traditional micro-displacement mechanism must the huge and complicated navigation system of design in order to reach requirement.And adopt the micro-displacement apparatus of piezoelectric actuator simple in structure usually, the positioning accuracy height.This class micro-displacement apparatus also is research focus in recent years, can realize wide range, high displacement resolution in theory.In addition, be conducive to satisfy the actual instructions for use of following Mechatronic Systems Highgrade integration based on the micro-displacement apparatus of Piezoelectric Driving technology.
Micropositioner device advantage based on the piezoelectric actuator design is numerous, but the stroke of this class micropositioner is shorter usually, limits more.Therefore, the modified model driver is arranged constantly in recent years, can enough work on the micropositioner of big stroke, and can keep very high displacement resolution.
At present, most of micropositioners are electromagnetic machine or the piezo-electric motors that utilize rotation, adopt the movement conversion mechanism of plug-in feed screw nut at the output shaft place of motor or motor, will rotatablely move indirectly and convert rectilinear motion to, and then drive the table top generation micrometric displacement of micropositioner.The prototype with displacement resolution that the piezo-electric supersonic micro-motor that people such as Hunan, Dong another name for Sichuan Province in 1998, Li Long soil propose drives is exactly this typical types, wherein the piezo-electric motor output shaft inserts in the vernier knob centre bore and constitutes driving member, drive micropositioner work (as shown in Figure 1, 2), this micropositioner precision is higher, structure is flexible, and can realize the rotation of XY table top.But be the motion conversion regime of the plug-in feed screw nut of the output shaft of motor because transmission mechanism adopts, in the process that drives, idle stroke certainly will to be produced, be inevitably from the structure drive principle, thereby reduced the further raising of stability and the positioning accuracy of this type of micropositioner; And the structural design of this class micropositioner simplifies inadequately, motor self structure complexity especially, and parts are many, assembling and adjust inconveniently, integrated difficulty is higher in the future; Simultaneously, the structure of bearing, thread bush makes the precision of micropositioner be subjected to border condition effect such as installation, fixed form big (as shown in Figure 1), and the gap of the levelness of the upper plate of bearing and micropositioner, piezo-electric motor output shaft and thread bush etc. all exert an influence to the precision raising of micropositioner; In addition, this structure subject matter is, the influence that the performance index of micropositioner are subjected to piezoelectric ultrasonic micro motor is very big, fixed form between electrical micro-machine and the micropositioner and the size of bed knife all directly have influence on output characteristic such as the mode of oscillation of electrical micro-machine self and output torque, and these remote-effects have arrived positioning accuracy, repetitive positioning accuracy and stability thereof and the reliability of micropositioner.
The utility model content
The purpose of this utility model is at the deficiencies in the prior art, a kind of micropositioner based on the piezoelectricity thread Driving technique is proposed, it is characterized in that described micropositioner based on the piezoelectricity thread Driving technique comprises that the employing piezoelectricity thread driver directly drives micropositioner one dimension micropositioner and prototype with displacement resolution; Described one dimension micropositioner is two ends at the right-angled intersection center line of relatively-movable upper plate 3 and lower plate 4, spring 7 is supported between upper plate 3 and the lower plate 4, screw 6 is connected upper plate 3 after passing spring 7 with lower plate 4 then, another a end at the right-angled intersection center line, steel ball 5 is fixed between upper plate 3 and the lower plate 4, cooperate in the round tube hole on the upper plate 3 of the other end and insert fixed muffle 2, the stator plectane 10 of piezoelectricity thread driver 1 is connected with fixed muffle 2 internal threads; Piezoelectricity thread driver 1 center fixation drive screw 8, and contact with lower plate 4, constitute the one dimension micropositioner;
Described prototype with displacement resolution is on upper plate 3 diagonal, is symmetrical arranged round tube hole on one the end positions therein, and each cooperates the stator plectane 10 that inserts 2, two piezoelectricity thread drivers 1 of fixed muffle to be connected with fixed muffle 2 internal threads in two round tube holes; Piezoelectricity thread driver 1 center fixation drive screw 8, and contact with lower plate 4; At another cornerwise end, steel ball 5 is fixed between upper plate 3 and the lower plate 4, in this another diagonal and steel ball 5 the same sides, be the isosceles triangle place with steel ball 5, spring 7 is supported between upper plate 3 and the lower plate 4, screw 6 is connected upper plate 3 after passing spring 7 with lower plate 4 then, constitutes prototype with displacement resolution;
When the lower plate 4 of micropositioner fixedly the time, piezoelectricity thread driver 1 drives drive screw 8 and does rectilinear motion, the load device motion that directly drives upper plate 3 and be fixed thereon.
Central through hole is all opened at the center of described upper plate 3 and lower plate 4; Fine motion platen each other.
Screw hole on described upper plate 3 and the lower plate 4, one is through hole, another is the screwed hole that cooperates with screw 6.
Described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator; Stator is made up of plectane 10 and pipe 11 two parts, and pipe 11 is fixing and perpendicular to the center of plectane 10; The exciting element group is alternately arranged to be enclosed within on the pipe cylindrical with electrode slice 13 by four piezoelectric ceramic pieces 12 and is formed, and be threaded by locking nut 14 and pipe 11 cylindricals middle part, pipe lower internal thread 111 is connected with drive screw 8, the outer ledge of plectane 10 is useful on the external screw thread 110 that is connected with fixed muffle 2, fixed muffle 2 is connected by internal thread and piezoelectricity thread driver 1, the rectangular through-hole 15 that lead passes on the fixed muffle 2 is connected with described electrode slice 13, after applying the signal of telecommunication, the piezoelectricity thread driver 1 on the fixed muffle 2 promotes drive screw 8 and does rectilinear motion under the effect of exciting element group.
The beneficial effects of the utility model are that this fine motion platen has replaced traditional screw structure by the piezoelectricity thread driver output shaft, whole transmission mechanism-free, directly drive the fine motion platen by the piezoelectricity thread driver output shaft, it is a kind of small size with absolute construction, the piezoelectricity thread driver of high-resolution characteristic, this activation configuration is simple, easy for installation, easy with the micropositioner assembling, compare as the micropositioner of driving element with traditional employing electromagnetic machine or ultrasonic motor, its reliability and resolution improve greatly, are applicable to the operational environment of condition harshness more.Have following characteristics:
1. little vibration of piezoelectric ceramic directly is coupled into the mechanical whorl motion of macroscopic view, realize one dimension or the two-dimentional accurate nanoscale setting movement of micropositioner, this little vibration is to the conversion of mechanical whorl motion, it is not the conversion of the motion mode that rotates to straight line of traditional feed screw nut formula, realize little vibration of above-mentioned piezoelectric ceramic is directly changed into the linear drives of thread mechanism, namely, this actuating force is directed to little vibration of piezoelectric ceramic, does not also just have the mechanical play problem.And this novel Piezoelectric Driving mode, simple in structure, little vibration of piezoelectric ceramic and thread transmission have formed independently system or device, have realized that the height of micropositioner drive system is integrated.
2. but fine motion platen XY rotation, but pitching table top, non-traditional straight line micropositioner, use fixed muffle to cooperate with micropositioner upper plate centre bore, use trip bolt that fixed muffle is installed on the micropositioner upper plate, device is compact, fixed form is easy, makes the drive screw of piezoelectricity thread driver directly drive the fine motion platen, two piezoelectricity thread drivers can independently be realized the pitching of table top, and then realize the multidimensional rotation.
3. the advantage of integrated level, be reflected in number of components and parts and the cost aspect of micropositioner driving device system, rotatablely moving of ultrasonic motor forms the straight line fine motion of micropositioner by feed screw nut switching mechanism, at least 12 of the related main parts size quantity of one dimension platform.And novel type of drive of the present invention realizes that the required amount of parts of said function one dimension platform only needs 6.If two-dimentional platform, amount of parts is double respectively according to number of dimensions.Dimension is more many, and the cost advantage that this technology embodies and technical advantage are more obvious.
Description of drawings
Fig. 1 is conventional piezoelectric electric machine structure schematic diagram.
Fig. 2 is the drive principle schematic diagram of Fig. 1 micropositioner.
Fig. 3 is the drive principle schematic diagram based on the micropositioner of piezoelectricity thread Driving technique.
Fig. 4 is the one dimension micropositioner structural representation that piezoelectricity thread driver directly drives.
Fig. 5 is Fig. 4 side schematic view.
Fig. 6 is the fine motion platen fine motion schematic diagram of Fig. 4.
Fig. 7 is the prototype with displacement resolution structural representation that piezoelectricity thread driver directly drives.
Fig. 8 is the piezoelectricity thread driver structural representation.
Embodiment
The utility model provides a kind of micropositioner based on the piezoelectricity thread Driving technique, and it comprises that the employing piezoelectricity thread driver directly drives micropositioner one dimension micropositioner and prototype with displacement resolution; Below in conjunction with description of drawings and embodiment the utility model is described further.
In the one dimension micropositioner structural representation that the piezoelectricity thread driver shown in Fig. 4-6 directly drives,
Described one dimension micropositioner is two ends at the right-angled intersection center line of relatively-movable upper plate 3 and lower plate 4, spring 7 is supported between upper plate 3 and the lower plate 4, screw 6 is connected upper plate 3 after passing spring 7 with lower plate 4 then, another a end at the right-angled intersection center line, steel ball 5 is fixed between upper plate 3 and the lower plate 4, cooperate in the round tube hole on the upper plate 3 of the other end and insert fixed muffle 2, the stator plectane 10 of piezoelectricity thread driver 1 is connected with fixed muffle 2 internal threads; Piezoelectricity thread driver center fixation drive screw 8, drive screw 8 contacts with lower plate 4, constitutes the one dimension micropositioner,
In the prototype with displacement resolution structural representation that piezoelectricity thread driver shown in Figure 7 directly drives, on upper plate 3 diagonal, be symmetrical arranged round tube hole on one the end positions therein, each cooperates insertion fixed muffle 2 in two round tube holes, the stator plectane 10 of two piezoelectricity thread drivers 1 respectively two be connected with fixed muffle 2 internal threads, piezoelectricity thread driver 1 center fixation drive screw 8, and contact with lower plate 4; At another cornerwise end, steel ball 5 is fixed between upper plate 3 and the lower plate 4, in this another diagonal and steel ball 5 the same sides, be the isosceles triangle place with steel ball 5, spring 7 is supported between upper plate 3 and the lower plate 4, screw 6 is connected upper plate 3 after passing spring 7 with lower plate 4 then, constitutes prototype with displacement resolution;
Above-mentioned upper plate 3 and lower plate 4 are relatively-movable fine motion platen, and when with lower plate 4 fixedly the time, this plate is fixed head, and upper plate 3 is for relatively moving plate, and vice versa; Steel ball 5, two groups of tension springs 7 that are placed on the screw 6 be used for to keep upper plate 3 and lower plate 4 to be in suitable pretightning force state, and two groups of springs and steel ball are formed three stress points of upper plate 3 and lower plate 4; When the lower plate 4 of micropositioner fixedly the time, piezoelectricity thread driver 1 drives drive screw 8 and does rectilinear motion, the load device motion that directly drives upper plate 3 and be fixed thereon; Figure 3 shows that the drive principle schematic diagram based on the micropositioner of piezoelectricity thread Driving technique.
Fig. 8 is the piezoelectricity thread driver structural representation for Fig. 8, and described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator; Stator is made up of plectane 10 and pipe 11 two parts, and pipe 11 is fixing and perpendicular to the center of plectane 10; The exciting element group is alternately arranged to be enclosed within on the pipe cylindrical with electrode slice 13 by four piezoelectric ceramic pieces 12 and is formed, and be threaded by locking nut 14 and pipe 11 cylindricals middle part, pipe lower internal thread 111 is connected with drive screw 8, the outer ledge of plectane 10 is useful on the external screw thread 110 that is connected with fixed muffle 2, fixed muffle 2 is connected by internal thread and piezoelectricity thread driver 1, the rectangular through-hole 15 that lead passes on the fixed muffle 2 is connected with described electrode slice 13, after applying the signal of telecommunication, the piezoelectricity thread driver 1 on the fixed muffle 2 promotes drive screw 8 and does rectilinear motion under the effect of exciting element group; Drive screw directly drives micropositioner, and no intermediate transmission mechanism does not have the existence of mechanical play.
Above-mentioned exciting element also can also adopt magnetostrictive material, electrostriction material, artificial-muscle, marmem etc. except adopting piezoceramic material.
Claims (4)
1. the micropositioner based on the piezoelectricity thread Driving technique is characterized in that, described micropositioner based on the piezoelectricity thread Driving technique comprises that the employing piezoelectricity thread driver directly drives micropositioner one dimension micropositioner and prototype with displacement resolution; Described one dimension micropositioner is two ends at the right-angled intersection center line of relatively-movable upper plate (3) and lower plate (4), spring (7) is supported between upper plate (3) and the lower plate (4), screw (6) is connected upper plate (3) after passing spring (7) with lower plate (4) then, another a end at the right-angled intersection center line, steel ball (5) is fixed between upper plate (3) and the lower plate (4), cooperate in the round tube hole on the upper plate (3) of the other end and insert fixed muffle (2), the stator plectane (10) of piezoelectricity thread driver (1) is connected with fixed muffle (2) internal thread; Piezoelectricity thread driver (1) center fixation drive screw (8), and contact with lower plate (4), constitute the one dimension micropositioner;
Described prototype with displacement resolution is on upper plate (3) diagonal, be symmetrical arranged round tube hole on one the end positions therein, each cooperates insertion fixed muffle (2) in two round tube holes, and the stator plectane (10) of two piezoelectricity thread drivers (1) is connected with fixed muffle (2) internal thread; Piezoelectricity thread driver (1) center fixation drive screw (8), and contact with lower plate (4); At another cornerwise end, steel ball (5) is fixed between upper plate (3) and the lower plate (4), in this another diagonal and steel ball (5) the same side, be the isosceles triangle place with steel ball (5), spring (7) is supported between upper plate (3) and the lower plate (4), screw (6) passes behind the spring (7) that (3 are connected with lower plate (4), constitute prototype with displacement resolution with upper plate then.
2. according to the described micropositioner based on the piezoelectricity thread Driving technique of claim 1, it is characterized in that central through hole is all opened at the center of described upper plate (3) and lower plate (4); Fine motion platen each other.
3. according to the described micropositioner based on the piezoelectricity thread Driving technique of claim 1, it is characterized in that, the screw hole on described upper plate (3) and the lower plate (4), one is through hole, another is the screwed hole that cooperates with screw (6).
4. according to the described micropositioner based on the piezoelectricity thread Driving technique of claim 1, it is characterized in that described piezoelectricity thread driver comprises the coaxial composition of exciting element group, drive screw and stator; Stator is made up of plectane (10) and pipe (11) two parts, and pipe (11) is fixing and perpendicular to the center of plectane (10); The exciting element group is alternately arranged to be enclosed within on the pipe cylindrical with electrode slice (13) by four piezoelectric ceramic pieces (12) and is formed, and be threaded by locking nut (14) and pipe (11) cylindrical middle part, (8 are connected pipe lower internal thread (111) with drive screw, the outer ledge of plectane (10) is useful on the external screw thread (110) that is connected with fixed muffle (2), fixed muffle (2) is connected by internal thread and piezoelectricity thread driver (1), the rectangular through-hole (15) that lead passes on the fixed muffle (2) is connected with described electrode slice (13), after applying the signal of telecommunication, the piezoelectricity thread driver (1) on the fixed muffle (2) promotes drive screw (8) and does rectilinear motion under the effect of exciting element group.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320161260 CN203219209U (en) | 2013-04-02 | 2013-04-02 | Piezoelectric screw thread driving technology based microchecker |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320161260 CN203219209U (en) | 2013-04-02 | 2013-04-02 | Piezoelectric screw thread driving technology based microchecker |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103199732A (en) * | 2013-04-02 | 2013-07-10 | 清华大学 | Micropositioner based on piezoelectric thread driving technology |
| CN108612744A (en) * | 2018-07-02 | 2018-10-02 | 燕山大学 | A kind of Three Degree Of Freedom bearing ball bearing |
-
2013
- 2013-04-02 CN CN 201320161260 patent/CN203219209U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103199732A (en) * | 2013-04-02 | 2013-07-10 | 清华大学 | Micropositioner based on piezoelectric thread driving technology |
| CN103199732B (en) * | 2013-04-02 | 2016-02-10 | 清华大学 | Based on the micropositioner of piezoelectricity thread Driving technique |
| CN108612744A (en) * | 2018-07-02 | 2018-10-02 | 燕山大学 | A kind of Three Degree Of Freedom bearing ball bearing |
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