CN116907463B - High-precision full-decoupling triaxial MEMS gyroscope - Google Patents
High-precision full-decoupling triaxial MEMS gyroscope Download PDFInfo
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- 230000008878 coupling Effects 0.000 claims description 24
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/005—Measuring angular rate using gyroscopic effects
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Abstract
The invention discloses a high-precision full-decoupling triaxial MEMS gyroscope, which comprises a substrate layer; the driving unit is fixedly connected with the substrate layer and is used for providing push-pull driving force in opposite directions; the driving detection unit is used for providing a differential detection output signal for the driving end; a first detection unit for detecting an angular velocity in an X direction; a second detection unit for detecting an angular velocity in a Y direction; the third detection unit is used for detecting the angular velocity in the Z direction and is driven to do butterfly wing type movement; and the feedback detection unit is used for providing a Z-axis detection output closed-loop control signal. The invention has the beneficial effects that under the same set of driving mode, the full differential angular velocity measurement of the X axis, the Y axis and the Z axis is realized, the chip size of the gyroscope is small, the reliability and the stability of the device are high, the detection sensitivity of the gyroscope is improved, and the coordination and consistency problem of the triaxial gyroscope on the working precision is also satisfied.
Description
Technical Field
The invention relates to the technical field of MEMS gyroscopes, in particular to a high-precision full-decoupling triaxial MEMS gyroscope.
Background
The MEMS gyroscope is a device for measuring angular velocity/angle of an object, and along with continuous penetration of an intelligent and unmanned application scene, the market puts forward higher demands on motion information such as position, azimuth and gesture of a carrier, and the like, and particularly, the demands on the high-precision triaxial MEMS gyroscope are more urgent in fields such as industrial processes and control, navigation processes and control, special military application, and the like.
In the prior art, the common three-axis MEMS gyroscope implementation scheme is to design three independent X-axis, Y-axis and Z-axis gyroscope structures, each axis of the solution scheme needs independent driving and detecting modules, so that the whole area of a chip is larger, the reliability and stability of a device are affected, and in actual work, the problem that the detection precision of the angular speeds of the X-axis, the Y-axis and the Z-axis is not coordinated exists, so that the application of the three-axis MEMS gyroscope in a high-precision market environment is limited.
Disclosure of Invention
The invention aims to solve the problems, and designs a high-precision full-decoupling triaxial MEMS gyroscope.
Comprises a substrate layer;
the driving unit is fixedly connected with the substrate layer and is used for providing push-pull driving force in opposite directions;
the driving detection unit is fixedly connected with the substrate layer and is used for providing a differential detection output signal for the driving end;
the first detection unit is fixedly connected with the substrate layer, is arranged on one side of the substrate layer and is used for detecting the angular velocity in the X direction;
the second detection unit is fixedly connected with the substrate layer and is arranged on the other side of the substrate layer and used for detecting the angular velocity in the Y direction;
the third detection unit is fixedly connected with the substrate layer, is arranged at the left side and the right side of the substrate layer and is used for detecting the angular speed in the Z direction, and is driven to do butterfly wing type movement;
the feedback detection unit is fixedly connected with the substrate layer, is arranged at the left side and the right side of the substrate layer and is used for providing a Z-axis detection output closed-loop control signal;
the X direction, the Y direction and the Z direction are perpendicular to each other.
Further, the device also comprises a driving double-end supporting beam which is fixedly connected with the substrate layer;
the driving frame is connected with the driving double-end supporting beam;
and the Goldng mass block group is fixedly connected with the driving frame.
Further, the coriolis mass block group comprises a first coriolis mass block, a second coriolis mass block, a third coriolis mass block and a fourth coriolis mass block, wherein the first coriolis mass block and the second coriolis mass block are arranged on one side of the substrate layer and are distributed in bilateral symmetry, and the third coriolis mass block and the fourth coriolis mass block are arranged on the other side of the substrate layer and are distributed in vertical symmetry.
Further, the driving unit is fixedly connected with the driving double-end clamped beam, the driving unit comprises two groups of driving positive electrode comb tooth pairs and driving negative electrode comb tooth pairs which are respectively fixed on the substrate layer, the two groups of driving positive electrode comb tooth pairs and the driving negative electrode comb tooth pairs are respectively arranged on the left side and the right side of the substrate layer, one group of driving positive electrode comb tooth pairs and the driving negative electrode comb tooth pairs are distributed in a bilateral symmetry manner and are connected with the driving unit, and the other group of driving positive electrode comb tooth pairs and the driving negative electrode comb tooth pairs are distributed in an upper-lower symmetry manner.
Further, the driving detection unit comprises two groups of driving detection positive electrode comb tooth pairs and driving detection negative electrode comb tooth pairs which are respectively fixed on the substrate layer, the two groups of driving detection positive electrode comb tooth pairs and driving detection negative electrode comb tooth pairs are respectively arranged on the left side and the right side of the substrate layer, one group of driving detection positive electrode comb tooth pairs and driving detection negative electrode comb tooth pairs are distributed in a bilateral symmetry mode and are vertically symmetrical to the driving unit, and the other group of driving detection positive electrode comb tooth pairs and driving detection negative electrode comb tooth pairs are distributed in a vertical symmetry mode and are laterally symmetrical to the driving unit.
Further, the first detection unit is arranged on one side of the substrate layer and comprises an X-axis detection positive electrode which forms a variable gap plate capacitor with the first Goldbach mass block, and the X-axis detection positive electrode is fixed on the substrate layer;
an X-axis detection negative electrode which forms a variable gap plate capacitor with the second Golgi mass, wherein the X-axis detection negative electrode is fixed on a substrate layer;
the X-axis detection positive electrode is bilaterally symmetrical to the X-axis detection negative electrode.
Further, the second detection unit is arranged on the other side of the substrate layer and comprises a Y-axis detection positive electrode which forms a variable gap plate capacitor with the third Golgi mass block, and the Y-axis detection positive electrode is fixed on the substrate layer;
a Y-axis detection negative electrode, which is fixed on a substrate layer, and a variable gap plate capacitor formed by the Y-axis detection negative electrode and the fourth coriolis mass;
and the Y-axis detection positive electrode is vertically symmetrical with the Y-axis detection negative electrode.
Further, the third detection unit comprises a Z-axis detection positive electrode comb tooth pair and a Z-axis detection negative electrode comb tooth pair which are fixed on the substrate layer, the Z-axis detection positive electrode comb tooth pair and the Z-axis detection negative electrode comb tooth pair are respectively and correspondingly connected with electrodes to form a group of differential capacitance electrodes, the two differential capacitance electrodes are respectively arranged on the left side and the right side of the substrate layer, and the Z-axis detection positive electrode comb tooth pair and the Z-axis detection negative electrode comb tooth pair are driven to do butterfly wing type movement.
Further, a feedback detection unit for providing a Z-axis detection output closed-loop control signal,
the electrode structure comprises a Z-axis detection feedback positive electrode comb tooth pair and a Z-axis detection feedback negative electrode comb tooth pair which are fixed on a substrate layer, wherein the Z-axis detection feedback positive electrode comb tooth pair and the Z-axis detection feedback negative electrode comb tooth pair are respectively and correspondingly connected with electrodes to form a group of differential capacitance electrodes, and the detection feedback positive electrode comb tooth pair and the Z-axis detection feedback negative electrode comb tooth pair are respectively arranged on the left side and the right side of the substrate layer.
The high-precision full-decoupling triaxial MEMS gyroscope manufactured by the technical scheme of the invention has the following beneficial effects:
according to the invention, a four-mass-block torsion type structure is designed in the plane, the detection of the angular velocity of the Z axis is realized by adopting a fully-decoupling fully-differential working mode, meanwhile, a plane electrode device is designed outside the plane, the fully-differential angular velocity measurement of the X axis and the Y axis is realized under the same set of driving modes of the Z axis, and the detection of three axial angular velocities of a single-chip structure is realized;
through the combined innovative design of the truss, the driving coupling ring beam and the second driving coupling ring beam, the vertical cooperative movement of the left and right frame structures is realized, the modal separation of the driving frame is realized, and the in-phase coupling error of the device is restrained;
the triaxial MEMS gyroscope chip has small size and high reliability and stability;
the triaxial MEMS gyroscope improves the detection sensitivity of the gyroscope, thereby improving the measurement accuracy of the gyroscope;
the invention has compact structure and small chip area, improves the detection sensitivity of the gyroscope and meets the coordination and consistency problem of the triaxial gyroscope on the working precision, and can be widely applied to high-end fields of industry, aviation, military and the like.
Drawings
FIG. 1 is a schematic diagram of a high-precision fully-decoupled triaxial MEMS gyroscope according to the present invention;
FIG. 2 is a schematic diagram of the structural motion of a high-precision fully-decoupled triaxial MEMS gyroscope according to the present invention under the driving action;
FIG. 3 is a schematic illustration of the present invention when measuring the X-axis;
FIG. 4 is a schematic illustration of the present invention when measuring the Y-axis;
FIG. 5 is a schematic diagram of the present invention when measuring the Z axis;
in the figure, 1, a substrate layer; 2. a first anchor point; 3. driving the double-end clamped beam; 4. a driving frame; 5. driving the coupling clamped beam; 6. detecting the double-end clamped beam on the X axis; 7. a second anchor point; 8. driving the negative electrode comb teeth pair; 9. a third anchor point; 10. driving the positive electrode comb teeth pair; 11. a fourth anchor point; 12. driving and detecting the positive electrode comb tooth pair; 13. a fifth anchor point; 14. driving and detecting a negative electrode comb tooth pair; 15. a group of coriolis masses; 16. a Z-axis detection frame; 17. detecting the coupling beam by a Z axis; 18. detecting a frame fulcrum by a Z axis; 19. z-axis detection truss; 20. a first drive coupling ring beam; 21. a sixth anchor point; 22. detecting a negative electrode comb tooth pair by a Z axis; 23. a seventh anchor point; 24. z-axis detection feedback negative electrode comb tooth pairs; 25. an eighth anchor point; 26. detecting a positive electrode comb tooth pair by a Z axis; 27. a ninth anchor point; 28. z-axis detection feedback positive electrode comb tooth pairs; 29. detecting a negative electrode on the X axis; 30. detecting a positive electrode on the X axis; 31. detecting a negative electrode on a Y axis; 32. detecting a positive electrode by a Y axis; 33. a second drive coupling ring beam; 34. driving the truss; 35. driving a truss fulcrum; 36. and detecting the double-end clamped beam by the Y-axis.
Detailed Description
The invention is specifically described below with reference to the accompanying drawings, and a high-precision full-decoupling triaxial MEMS gyroscope, as shown in fig. 1, comprises a substrate layer 1 and a device layer, wherein the substrate layer 1 and the device layer are both made of silicon. The device layer structure is fixed on the substrate layer 1 through corresponding anchor points, and the device layer comprises a driving unit which is fixedly connected with the substrate layer 1 and is used for providing push-pull driving force in opposite directions;
the driving detection unit is fixedly connected with the substrate layer 1 and is used for providing a differential detection output signal for the driving end;
the first detection unit is fixedly connected with the substrate layer 1, is arranged on one side of the substrate layer 1 and is used for detecting the angular velocity in the X direction;
the second detection unit is fixedly connected with the substrate layer 1, is arranged on the other side of the substrate layer 1 and is used for detecting the angular velocity in the Y direction;
the third detection unit is fixedly connected with the substrate layer 1, is arranged at the left side and the right side of the substrate layer 1 and is used for detecting the angular speed in the Z direction, and the third detection unit is driven to do butterfly wing type movement;
the feedback detection unit is fixedly connected with the substrate layer 1, is arranged at the left side and the right side of the substrate layer 1 and is used for providing a Z-axis detection output closed-loop control signal;
the X direction, the Y direction and the Z direction are perpendicular to each other.
The device further comprises a fixing unit, and specifically comprises a driving double-end supporting beam 3, a driving frame 4, a driving coupling supporting beam 5, an X-axis detection double-end supporting beam 6, a Z-axis detection frame 16, a Z-axis detection coupling beam 17, a Z-axis detection frame pivot 18, a Z-axis detection truss 19, a first driving coupling ring beam 20, a second driving coupling ring beam 33, a driving truss 34, a driving truss pivot 35 and a Y-axis detection double-end supporting beam 36.
Specifically, the double-end supporting beam 3 is driven to be fixedly connected with the substrate layer 1 through the first anchor point 2; and the driving frame 4 is connected with the driving double-end supporting beam 3. The X-axis detection double-end clamped beam 6 is connected with the driving frame 4 at one end, the other end is connected with each Gong's mass block in the Gong's mass block group 15, one end of the driving coupling clamped beam 5 is connected with each Gong's mass block, the other end is connected with the Z-axis detection truss 19, the other end of the Z-axis detection truss 19 is connected with the Z-axis detection frame 16, the two ends of the Z-axis detection coupling beam 17 are respectively connected with the left and right Z-axis detection frames 16, so that the Z-axis detection frames 16 are separated in a modal manner, one end of the Z-axis detection frame pivot 18 is connected with the Z-axis detection frames 16, one end of the Z-axis detection frame pivot 18 is connected with a central anchor point structure, the driving coupling annular beam 20 is in an annular structure, the two vertical radial directions of the driving truss 34 are connected with each other, so that the motion of the two driving frames 4 connected in operation is consistent, one end of the driving truss 35 is connected with the middle point of the driving truss 34, one end of the driving truss 35 is connected with the anchor point 2, and the driving truss 34 can swing around the driving truss 34. The driving frame 4 and the X-axis detection double-end supporting beam 6 are used for fixing a first detection unit, the driving frame 4 and the Y-axis detection double-end supporting beam 36 are used for fixing a second detection unit, and the Z-axis detection frame 16, the Z-axis detection coupling beam 17, the Z-axis detection frame pivot 18 and the Z-axis detection truss 19 are used for fixing a third detection unit.
The coriolis mass group 15 is fixedly connected to the drive frame 4. The coriolis mass block group 15 comprises a first coriolis mass block, a second coriolis mass block, a third coriolis mass block and a fourth coriolis mass block, wherein the first coriolis mass block and the second coriolis mass block are arranged on one side of the substrate layer 1 and are distributed in bilateral symmetry, and the third coriolis mass block and the fourth coriolis mass block are arranged on the other side of the substrate layer 1 and are distributed in vertical symmetry. The driving frame 4 and the coriolis mass block group 15 together form a driving loop mass, the first coriolis mass block and the second coriolis mass block distributed on the left side of the overall structure are simultaneously X-axis detection loop masses, the third coriolis mass block and the fourth coriolis mass block distributed on the right side of the overall structure are simultaneously Y-axis detection loop masses, and the Z-axis detection frame 16 and the first coriolis mass block, the second coriolis mass block, the third coriolis mass block and the fourth coriolis mass block together form a Z-axis detection loop mass, so that the overall three-axis MEMS gyroscope structure is of a fully decoupled differential design.
The driving unit is fixedly connected with the driving double-end supporting beam 3, the driving unit comprises two groups of driving positive electrode comb teeth pairs 10 and driving negative electrode comb teeth pairs 8 which are respectively fixed on the substrate layer 1, the two groups of driving positive electrode comb teeth pairs 10 and driving negative electrode comb teeth pairs 8 are respectively arranged on the left side and the right side of the substrate layer 1, one group of driving positive electrode comb teeth pairs 10 and driving negative electrode comb teeth pairs 8 are distributed in bilateral symmetry and are connected with the driving unit, and the other group of driving positive electrode comb teeth pairs 10 and driving negative electrode comb teeth pairs 8 are distributed in bilateral symmetry. The driving positive electrode comb teeth pair 10 is fixed on the substrate layer 1 through a third anchor point 9, the driving negative electrode comb teeth pair 8 is fixed on the substrate layer 1 through a second anchor point 7, the driving positive electrode comb teeth pair 10 is provided with N pairs which are designed for variable area comb teeth, the driving negative electrode comb teeth pair 8 is provided with N pairs which are designed for variable area comb teeth, the electrodes respectively correspondingly connected with the driving positive electrode comb teeth pair 10 and the driving negative electrode comb teeth pair 8 form a group of differential capacitor electrodes which are respectively symmetrically distributed on the left side and the right side of the driving structure and are rotationally arranged at 90 degrees about an illustration Y axis, and the differential capacitor electrodes provide push-pull driving force for the triaxial MEMS gyroscope.
The driving detection unit comprises two groups of driving detection positive electrode comb teeth pairs 12 and driving detection negative electrode comb teeth pairs 14 which are respectively fixed on the substrate layer 1, wherein the two groups of driving detection positive electrode comb teeth pairs 12 and driving detection negative electrode comb teeth pairs 14 are respectively arranged on the left side and the right side of the substrate layer 1, one group of driving detection positive electrode comb teeth pairs 12 and driving detection negative electrode comb teeth pairs 14 are distributed in a bilateral symmetry manner and are vertically symmetrical to the driving unit, and the other group of driving detection positive electrode comb teeth pairs 12 and driving detection negative electrode comb teeth pairs 14 are distributed in a bilateral symmetry manner and are laterally symmetrical to the driving unit. The driving detection positive electrode comb tooth pair 12 is fixed on the substrate layer 1 through a fourth anchor point 11, the driving detection negative electrode comb tooth pair 14 is fixed on the substrate layer 1 through a fifth anchor point 13, the driving detection positive electrode comb tooth pair 12 is provided with N pairs which are designed for variable area comb teeth, the driving detection negative electrode comb tooth pair 14 is provided with N pairs which are designed for variable area comb teeth, electrodes respectively correspondingly connected with the driving detection positive electrode comb tooth pair 12 and the driving detection negative electrode comb tooth pair 14 form a group of differential capacitance electrodes which are respectively symmetrically distributed on the left side and the right side of the structure and are rotationally arranged at 90 degrees about the graphic Y, and the differential capacitance electrodes provide differential detection output signals for the driving end of the triaxial MEMS gyroscope.
The first detection unit is arranged on one side of the substrate layer 1 and comprises an X-axis detection positive electrode 30, wherein the X-axis detection positive electrode 30 and the first Goldbach mass block form a variable gap plate capacitor, and the X-axis detection positive electrode 30 is fixed on the substrate layer 1; an X-axis detection negative electrode 29 forming a variable gap plate capacitance with the second coriolis mass, the X-axis detection negative electrode 29 being fixed to the substrate layer 1; the X-axis detection positive electrode 30 is bilaterally symmetrical to the X-axis detection negative electrode 29. The X-axis detection positive electrode 30 is a plate electrode structure, forms a variable gap plate capacitor with the first coriolis mass block to form an X-axis capacitance detection positive electrode, the X-axis detection negative electrode 29 is a plate electrode structure, forms a variable gap plate capacitor with the second coriolis mass block to form an X-axis capacitance detection negative electrode, and the capacitance detection positive electrode and the X-axis capacitance detection negative electrode form a group of fully differential capacitance electrodes distributed on the left side of the whole structure and provide an X-axis differential detection output signal for the triaxial MEMS gyroscope to detect the X-axis angular velocity.
The second detection unit is arranged on the other side of the substrate layer 1 and comprises a Y-axis detection positive electrode 32, a variable gap plate capacitor is formed by the Y-axis detection positive electrode 32 and the third Golgi mass block, and the Y-axis detection positive electrode 32 is fixed on the substrate layer 1; and a Y-axis detection negative electrode 31, which is formed with the fourth coriolis mass and is a variable gap plate capacitor, wherein the Y-axis detection negative electrode 31 is fixed on the substrate layer 1, and the Y-axis detection positive electrode 32 is vertically symmetrical with the Y-axis detection negative electrode 31. The Y-axis detection positive electrode 32 is a plate electrode structure, forms a gap-variable plate capacitor with the third coriolis mass block to form a Y-axis capacitance detection positive electrode, the Y-axis detection negative electrode 31 is a plate electrode structure, forms a gap-variable plate capacitor with the fourth coriolis mass block to form a Y-axis capacitance detection negative electrode, and the Y-axis capacitance detection positive electrode and the Y-axis capacitance detection negative electrode form a group of fully differential capacitance electrodes which are distributed on the right side of the whole structure and provide Y-axis differential detection output signals for the triaxial MEMS gyroscope to detect the Y-axis angular velocity.
The third detection unit comprises a Z-axis detection positive electrode comb tooth pair 26 and a Z-axis detection negative electrode comb tooth pair 22 which are fixed on the substrate layer 1, electrodes which are respectively and correspondingly connected with the Z-axis detection positive electrode comb tooth pair 26 and the Z-axis detection negative electrode comb tooth pair 22 form a group of differential capacitance electrodes, the two differential capacitance electrodes are respectively arranged on the left side and the right side of the substrate layer 1, and the Z-axis detection positive electrode comb tooth pair 26 and the Z-axis detection negative electrode comb tooth pair 22 are driven to do butterfly wing type movement. The Z-axis detection positive electrode comb tooth pair 26 is fixed on the substrate layer 1 through a corresponding eighth anchor point 25, the Z-axis detection negative electrode comb tooth pair 22 is fixed on the substrate layer 1 through a sixth anchor point 21, the Z-axis detection positive electrode comb tooth pair 26 is provided with N pairs which are designed as variable-gap comb teeth, the Z-axis detection negative electrode comb tooth pair 22 is provided with N pairs which are designed as variable-gap comb teeth, and electrodes respectively correspondingly connected with the Z-axis detection positive electrode comb tooth pair 26 and the Z-axis detection negative electrode comb tooth pair 22 form a group of differential capacitor electrodes which are respectively distributed on the left side and the right side of the whole structure and are rotationally arranged at 90 degrees about an illustrated Y axis, and the differential capacitor electrodes provide Z-axis differential detection output signals for a three-axis MEMS gyroscope so as to detect the Z-axis angular velocity.
The feedback detection unit is configured to provide a Z-axis detection output closed-loop control signal, and includes a Z-axis detection feedback positive electrode comb pair 28 and a Z-axis detection feedback negative electrode comb pair 24 that are fixed on the substrate layer 1, where electrodes of the Z-axis detection feedback positive electrode comb pair 28 and the Z-axis detection feedback negative electrode comb pair 24 that are respectively and correspondingly connected form a set of differential capacitor electrodes, and the detection feedback positive electrode comb pair and the Z-axis detection feedback negative electrode comb pair 24 are respectively disposed on the left and right sides of the substrate layer 1. The Z-axis detection feedback positive electrode comb teeth pair 28 is fixed on the substrate layer 1 through a ninth anchor point 27, the Z-axis detection feedback negative electrode comb teeth pair 24 is fixed on the substrate layer 1 through a seventh anchor point 23, the Z-axis detection feedback positive electrode comb teeth pair 28 is provided with N pairs which are designed as variable gap comb teeth, the Z-axis detection feedback negative electrode comb teeth pair 24 is provided with N pairs which are designed as variable gap comb teeth, and electrodes respectively correspondingly connected with the Z-axis detection feedback positive electrode comb teeth pair 28 and the Z-axis detection feedback negative electrode comb teeth pair 24 form a group of differential capacitor electrodes which are respectively distributed on the left side and the right side of the whole structure and are rotationally arranged at 90 degrees about an illustrated Y axis, and the differential capacitor electrodes provide Z-axis detection output closed-loop control signals for the three-axis MEMS gyroscope.
The working principle of the triaxial MEMS gyroscope is as follows:
the MEMS gyroscope mainly works based on the Golgi force effect, firstly, a driving structure is kept to be in constant amplitude and constant frequency oscillation through a gyroscope driving loop, when external angular velocity acts on each axial direction, the structure generates the Golgi force under the effect, the corresponding detection structure of the MEMS gyroscope is enabled to generate micro displacement, further, capacitance change of corresponding structure electrodes is caused, and capacitance detection is completed through an external interface circuit, so that measurement of each axial angular velocity is finally achieved.
As shown in fig. 2, the motion of the driving structure of the driving loop under the action of the driving push force is shown.
As shown in fig. 3, when an X-axis angular velocity is input from the outside, the corresponding first coriolis mass and second coriolis mass in the MEMS gyroscope structure will receive a coriolis force to generate an out-of-plane micro displacement, so as to cause a corresponding capacitance change between the X-axis detection positive electrode 30 and the X-axis detection negative electrode 29, and the capacitance detection will be completed through an external interface circuit, thereby realizing the measurement of the X-axis angular velocity.
As shown in fig. 4, when the Y axial angular velocity is input from the outside, the corresponding third and fourth coriolis mass blocks in the MEMS gyroscope structure will receive the coriolis force, so that the coriolis mass blocks generate out-of-plane micro displacement, and further cause corresponding capacitance change between the Y axis detection positive electrode 32 and the Y axis detection negative electrode 31, and the capacitance detection will be completed through the external interface circuit, thereby realizing the measurement of the Y axial angular velocity.
As shown in fig. 5, when the Z axial angular velocity is input from the outside, the corresponding coriolis mass blocks in the MEMS gyroscope structure are subjected to coriolis force, so that each coriolis mass block generates micro-displacement in a plane, and the Z axis detection frame 16 generates butterfly wing type motion under the action of the coriolis force, so as to drive the Z axis detection positive electrode comb teeth pair 26 and the Z axis detection negative electrode comb teeth pair 22 distributed on the Z axis detection frame 16 to generate in-plane torsion, and at this time, corresponding capacitance change is caused between the positive and negative detection electrodes of the Z axis, and capacitance detection is completed through an external interface circuit, thereby realizing measurement of the Z axial angular velocity.
In the invention, during the detection of the X-axis and Y-axis angular speeds, the structure adopts a double-mass block out-of-plane fully differential detection mode, so that most common-mode interference noise is eliminated, and the sensitivity and the signal-to-noise ratio of the device are high.
In the detection of the Z-axis angular velocity, the structure adopts an in-plane four-mass-block torsion type full-differential framework, so that full-differential quasi-three-dimensional motion of the whole structure of the Z-axis MEMS gyroscope is formed, the total moment of inertia of motion of the in-plane arbitrary proportion superposition direction at any moment is always zero, the full-directional vibration isolation decoupling of the Z-axis MEMS gyroscope to the surrounding environment is realized, and the influence of typical interferences such as temperature, environmental impact, vibration and the like on the accuracy of the gyroscope is comprehensively and effectively restrained.
In summary, the invention realizes the measurement of the full differential angular velocity of the X axis, the Y axis and the Z axis in the same set of driving modes, has small chip size, high device reliability and stability, improves the detection sensitivity of the gyroscope, and meets the coordination and consistency problem of the triaxial gyroscope on working precision.
The above technical solution only represents the preferred technical solution of the present invention, and some changes that may be made by those skilled in the art to some parts of the technical solution represent the principles of the present invention, and the technical solution falls within the scope of the present invention.
Claims (3)
1. A high precision fully decoupled triaxial MEMS gyroscope characterized by comprising a substrate layer (1);
the driving unit is fixedly connected with the substrate layer (1) and is used for providing push-pull driving force in opposite directions;
the driving detection unit is fixedly connected with the substrate layer (1) and is used for providing a differential detection output signal for the driving end;
the first detection unit is fixedly connected with the substrate layer (1), is arranged on one side of the substrate layer (1) and is used for detecting the angular velocity in the X direction;
the second detection unit is fixedly connected with the substrate layer (1), is arranged on the other side of the substrate layer (1) and is used for detecting the angular velocity in the Y direction;
the third detection unit is fixedly connected with the substrate layer (1), is arranged at the left side and the right side of the substrate layer (1) and is used for detecting the angular velocity in the Z direction, and the third detection unit is driven to do butterfly wing type movement;
the feedback detection unit is fixedly connected with the substrate layer (1), is arranged at the left side and the right side of the substrate layer (1) and is used for providing a Z-axis detection output closed-loop control signal;
the X direction, the Y direction and the Z direction are mutually perpendicular;
the God's mass block group (15) comprises a first God's mass block, a second God's mass block, a third God's mass block and a fourth God's mass block, wherein the first God's mass block and the second God's mass block are arranged on one side of the substrate layer (1) and are distributed in a bilateral symmetry manner, and the third God's mass block and the fourth God's mass block are arranged on the other side of the substrate layer (1) and are distributed in an up-down symmetry manner;
the device also comprises a fixing unit which comprises a driving double-end supporting beam (3), a driving frame (4), a driving coupling supporting beam (5), an X-axis detection double-end supporting beam (6), a Z-axis detection frame (16) and a Z-axis detection coupling beam (17), a Z-axis detection frame pivot (18), a Z-axis detection truss (19), a first drive coupling ring beam (20), a second drive coupling ring beam (33), a drive truss (34), a drive truss pivot (35) and a Y-axis detection double-end clamped beam (36);
the driving double-end supporting beam (3) is fixedly connected with the substrate layer (1) through a first anchor point (2); the driving frame (4) is connected with the driving double-end supporting beam (3);
one end of the X-axis detection double-end supporting beam (6) is connected with the driving frame (4), the other end of the X-axis detection double-end supporting beam is connected with each Gong's mass block in the Gong's mass block group (15), one end of the driving coupling supporting beam (5) is connected with each Gong's mass block, the other end of the driving coupling supporting beam is connected with the Z-axis detection truss (19), the other end of the Z-axis detection truss (19) is connected with the Z-axis detection frame (16), two ends of the Z-axis detection coupling beam (17) are respectively connected with the left and right Z-axis detection frames (16) to enable the Z-axis detection frames (16) to be separated in a modal manner, one end of the Z-axis detection frame fulcrum (18) is connected with the Z-axis detection frame (16), one end of the driving coupling annular beam (20) is of an annular structure, two vertical radial directions of the driving truss (34) are connected with each other, the two driving frames (4) connected with each other in a working mode are guaranteed to move cooperatively, one end of the driving truss (35) is connected with the middle point (34) of the driving truss (34), and the driving truss (34) can swing around the driving truss (34) through the driving fulcrum (34);
the driving frame (4) and the X-axis detection double-end supporting beams (6) are used for fixing a first detection unit, the driving frame (4) and the Y-axis detection double-end supporting beams (36) are used for fixing a second detection unit, and the Z-axis detection frame (16), the Z-axis detection coupling beams (17), the Z-axis detection frame pivot 18 and the Z-axis detection truss (19) are used for fixing a third detection unit;
the device also comprises a driving double-end supporting beam (3) which is fixedly connected with the substrate layer (1);
the driving frame (4) is connected with the driving double-end supporting beam (3);
the Goldng mass block group (15) is fixedly connected with the driving frame (4);
the driving unit is fixedly connected with the driving double-end supporting beam (3), the driving unit comprises two groups of driving positive electrode comb tooth pairs (10) and driving negative electrode comb tooth pairs (8) which are respectively fixed on the substrate layer (1), the two groups of driving positive electrode comb tooth pairs (10) and driving negative electrode comb tooth pairs (8) are respectively arranged on the left side and the right side of the substrate layer (1), one group of driving positive electrode comb tooth pairs (10) and driving negative electrode comb tooth pairs (8) are distributed in bilateral symmetry and are connected with the driving unit, and the other group of driving positive electrode comb tooth pairs (10) and driving negative electrode comb tooth pairs (8) are distributed in vertical symmetry;
the driving detection unit comprises two groups of driving detection positive electrode comb tooth pairs (12) and driving detection negative electrode comb tooth pairs (14) which are respectively fixed on the substrate layer (1), wherein the two groups of driving detection positive electrode comb tooth pairs (12) and driving detection negative electrode comb tooth pairs (14) are respectively arranged on the left side and the right side of the substrate layer (1), one group of driving detection positive electrode comb tooth pairs (12) and driving detection negative electrode comb tooth pairs (14) are distributed in a bilateral symmetry manner and are vertically symmetrical to the driving unit, and the other group of driving detection positive electrode comb tooth pairs (12) and driving detection negative electrode comb tooth pairs (14) are distributed in a bilateral symmetry manner and are laterally symmetrical to the driving unit;
the first detection unit is arranged on one side of the substrate layer (1) and comprises an X-axis detection positive electrode (30), a variable gap plate capacitor is formed by the X-axis detection positive electrode (30) and the first Goldrake mass, and the X-axis detection positive electrode (30) is fixed on the substrate layer (1);
an X-axis detection negative electrode (29) which forms a variable gap plate capacitor with the second Golgi mass, wherein the X-axis detection negative electrode (29) is fixed on a substrate layer (1);
the X-axis detection positive electrode (30) is bilaterally symmetrical to the X-axis detection negative electrode (29);
the second detection unit is arranged on the other side of the substrate layer (1) and comprises a Y-axis detection positive electrode (32), a variable gap plate capacitor is formed by the Y-axis detection positive electrode (32) and the third Goldng's mass block, and the Y-axis detection positive electrode (32) is fixed on the substrate layer (1);
a Y-axis detection negative electrode (31) which forms a variable gap plate capacitor with the fourth Golgi mass, wherein the Y-axis detection negative electrode (31) is fixed on the substrate layer (1);
the Y-axis detection positive electrode (32) and the Y-axis detection negative electrode (31) are vertically symmetrical.
2. The high-precision fully-decoupled triaxial MEMS gyroscope according to claim 1, wherein the third detection unit comprises a pair of Z-axis detection positive electrode comb teeth (26) and a pair of Z-axis detection negative electrode comb teeth (22) fixed on the substrate layer (1), electrodes respectively and correspondingly connected with the pair of Z-axis detection positive electrode comb teeth (26) and the pair of Z-axis detection negative electrode comb teeth (22) form a group of differential capacitance electrodes, the two differential capacitance electrodes are respectively arranged on the left side and the right side of the substrate layer (1), and the pair of Z-axis detection positive electrode comb teeth (26) and the pair of Z-axis detection negative electrode comb teeth (22) are driven to do butterfly wing type movement.
3. The high-precision fully-decoupled triaxial MEMS gyroscope according to claim 2, wherein the feedback detection unit comprises a pair of Z-axis detection feedback positive electrode comb teeth (28) and a pair of Z-axis detection feedback negative electrode comb teeth (24) fixed on the substrate layer (1), the electrodes respectively correspondingly connected to the pair of Z-axis detection feedback positive electrode comb teeth (28) and the pair of Z-axis detection feedback negative electrode comb teeth (24) form a group of differential capacitor electrodes, and the pair of detection feedback positive electrode comb teeth and the pair of Z-axis detection feedback negative electrode comb teeth (24) are respectively arranged on the left side and the right side of the substrate layer (1).
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