CN106289210A - A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity - Google Patents
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity Download PDFInfo
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- CN106289210A CN106289210A CN201510247649.8A CN201510247649A CN106289210A CN 106289210 A CN106289210 A CN 106289210A CN 201510247649 A CN201510247649 A CN 201510247649A CN 106289210 A CN106289210 A CN 106289210A
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The invention discloses a kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity, by overlayer polymer hair, middle level silicon micro-sensor and the bottom glass substrate composition being provided with circuit, described middle level silicon micro-sensor includes circular mass and the annulus mass block with circular mass concentric, two torsion beam it are provided with between described circular mass and annulus mass block, described overlayer polymer hair is bonded in circular mass center, the circumferential side portion of described annulus mass block is provided with some comb groups and square wave support beam uniformly, described comb group and the interlaced arrangement of square wave support beam.Present configuration is novel, has stronger sensitivity, compatible with existing planar technology, arranging compared to the most simple planar structure of its overlayer polymer hair, it is possible to effectively amplifies coriolis force effect, improves the sensitivity of structure.
Description
Technical field
The invention belongs to microelectromechanical systems and micro-inertia measuring technical field, be specifically related to a kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity.
Background technology
MEMS sensor is the novel sensor using micromachining technology to manufacture, and is an important branch of MEMS.Development along with microelectric technique, integrated circuit technique and processing technique, MEMS sensor by volume is little, lightweight, low in energy consumption, reliability is high, highly sensitive, be easily integrated and the advantage such as resistance to harsh environments, be greatly promoted the miniaturization of sensor, intellectuality, multifunction and web development.MEMS sensor the most progressively occupies transducer market, and gradually replaces the leading position of traditional mechanical sensor, has obtained the favor in each fields such as consumption electronic product, auto industry, Aero-Space, machinery, chemical industry and medicine.
Hair formula sensor is the most emerging a kind of MEMS sensor mentality of designing.Hair formula sensor is processed by existing MEMS technology technology, the hair structure in nature is copied to carry out sensor design, the sensitive action of sensor has been extended in three-dimensional i.e. spatial dimension by hair formula sensor by conventional two-dimensional structure i.e. planar range, drastically increases the sensing range of MEMS sensor.
In recent years, domestic and international You Duojia research institution has started the research to hair formula sensor.Professor G.J.M.Krijnen of Universiteit Twente of Holland tentatively have developed a kind of hair formula gyroscope, by the polymer cilium at top, coriolis force is carried out sensitivity, it is achieved the measurement of input angular velocity to external world.But, the hair formula gyroscope of major part mechanism research and development at present, function singleness, structure is complex, and practicality is poor.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides the bionical hair formula silicon micro-gyroscope sensitive for angular velocity that a kind of detection sensitivity is high, to-noise ratio is high and testing result degree of accuracy is the highest.
Technical scheme: for solving above-mentioned technical problem, a kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity that the present invention provides, by overlayer polymer hair, middle level silicon micro-sensor and the bottom glass substrate composition being provided with circuit, described middle level silicon micro-sensor includes circular mass and the annulus mass block with circular mass concentric, two torsion beam it are provided with between described circular mass and annulus mass block, described overlayer polymer hair is bonded in circular mass center, the circumferential side portion of described annulus mass block is provided with some comb groups and square wave support beam uniformly, described comb group and the interlaced arrangement of square wave support beam.
Preferably, described annulus mass block being provided with four comb groups and four square wave support beams, two adjacent comb groups are spaced apart 90 degree, and two adjacent square wave support beams are spaced apart 90 degree.
Preferably, said two torsion beam is symmetrical on the basis of the axis of circular mass.
Preferably, described comb group is made up of left comb, right comb and middle comb, and wherein middle comb is fixed on annulus mass block, and left comb and right comb are fixed in bottom glass substrate.
Preferably, described square wave support beam is fixing with anchor point is connected.
Preferably, the tangential direction being oriented parallel to annulus mass block of comb in described comb group.
Preferably, it is provided with the first half-round metal electrode and the second half-round metal electrode with the axis direction of torsion beam for cut direction in described circular mass view field in bottom glass substrate.
The setting of present invention polymeric hair at the middle and upper levels can increase the quality of middle level silicon micro-sensor, it is thus possible to the effective sensitivity improving detection, square wave support beam is connected to anchor point, anchor point is bonded with bottom glass substrate by metal electrode, so make middle level silicon micro-sensor can be suspended on bottom glass substrate, so under the support of two torsion beam, circular mass can carry out left and right at the axis direction residing for torsion beam and reverse, when circular mass is when carrying out left and right and reversing, the spacing of the pole plate of the electric capacity that circular mass and the first half-round metal electrode and the second half-round metal electrode are constituted can change, the capacitor's capacity of the capacitive sensing mechanism that circular mass and the first half-round metal electrode and the second half-round metal electrode are constituted also can change.
In the present invention when annulus mass block is by the active force of its tangential direction, annulus mass block can rotate to an angle around its center of circle, therefore that one end that square wave support beam is connected with annulus mass block also can and then rotate, that one end being connected with anchor point due to square wave support beam maintains static, in rotation process, the square wave configuration in square wave support beam can be elongated, and produces the elastic force contrary with force direction.
Beneficial effect: have the advantage that for hinge structure of the present invention
(1) on circular mass, bonded overlayer polymer hair, added the quality of middle level silicon micro-sensor, thus be effectively exaggerated the sensitive action of testing agency, improve the sensitivity of detection.
(2) structure that circular mass, annulus mass block and torsion beam are combined is used so that drive part and detection part separate well, reduce output noise signal, improve to-noise ratio.
(3) design of square wave support beam, compares and the design of conventional straight beam, and its resonant frequency is low, and structural sensitivity is high, can preferably discharge simultaneously and add the residual stress stayed man-hour, reduce the interference to testing result.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the top view of silicon micro-sensor in the present invention；
Fig. 3 is to be produced on the circuit diagram in bottom glass substrate in the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is further described.
nullSuch as Fig. 1、Shown in Fig. 2 and Fig. 3，The present invention provides a kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity，For measuring the angular velocity of X-direction input，The present invention includes overlayer polymer hair 1、Middle level silicon micro-sensor and the bottom glass substrate being provided with circuit，Described overlayer polymer hair 1 is obtained by polymer SU-8 is stretched，Described middle level silicon micro-sensor includes circular mass 2 and the annulus mass block 3 with circular mass 2 concentric，The first torsion beam 4-1 and the second torsion beam 4-2 it is provided with between described circular mass 2 and annulus mass block 3，Described overlayer polymer hair 1 is bonded in circular mass 2 center，The circumferential side portion of described annulus mass block 3 is provided with four comb groups 5 and square wave support beam 6，Described comb group 5 and the interlaced arrangement of square wave support beam 6，Four comb groups 5 are respectively the first comb group 5-1、Second comb group 5-2、3rd comb group 5-3 and the 4th comb group 5-4，Four square wave support beams 6 are respectively the first square wave support beam 6-1、Second square wave support beam 6-2、Third party's ripple support beam 6-3 and the 4th square wave support beam 6-4，Described first square wave support beam 6-1、Second square wave support beam 6-2、Third party's ripple support beam 6-3 and the 4th square wave support beam 6-4 respectively with the first anchor point 7-1、Second anchor point 7-2、3rd anchor point 7-3 and the 4th anchor point 7-4 is connected.
What in the present invention, the first comb group 5-1, the second comb group 5-2, the 3rd comb group 5-3 and the 4th comb group 5-4 structure were the most identical and adjacent is spaced apart 90 degree, specifically as a example by the first comb group 5-1, first comb group 5-1 is made up of comb 5-1c in the first left comb 5-1a, the first right comb 5-1b and first, wherein comb 5-1c is fixed on annulus mass block 3 in first, first left comb 5-1a and the first right comb 5-1b is fixed in bottom glass substrate, and the first left comb 5-1a and the first right comb 5-1b is plugged in first on comb 5-1c.
In the present invention, the comb of the first comb group 5-1, the second comb group 5-2, the 3rd comb group 5-3 and the 4th comb group 5-4 is oriented parallel to the tangential direction of annulus mass block 3, wherein the first comb group 5-1 and the 3rd comb group 5-3 are as driving comb group, composition becomes space type electrostatic capacitance and drives pole plate, second comb group 5-2 and the 4th comb group 5-4 become space type capacitive detecting structure as detection comb group, composition.
In bottom glass substrate in the present invention, the first half-round metal electrode 809b and the second half-round metal electrode 809c is two semicircular electrodes, and electrode 809a and 809d is respectively its electrode drawn；Electrode 801a and the first left comb 5-1a bonding, electrode 801b is its extraction electrode；Electrode 802a and the first right comb 5-1b bonding, electrode 802b is its extraction electrode；Electrode 803a and the second left comb 5-2a bonding, electrode 803b is its extraction electrode；Electrode 804a and the second right comb 5-2b bonding, electrode 804b is its extraction electrode；Electrode 805a and the 3rd left comb 5-3a bonding, electrode 805b is its extraction electrode；Electrode 806a and the 3rd right comb 5-3b bonding, electrode 806b is its extraction electrode；Electrode 807a and the 4th left comb 5-4a bonding, electrode 807b is its extraction electrode；Electrode 808a and the 4th right comb 5-4b bonding, electrode 808b is its extraction electrode；Electrode 810a and the first anchor point 7-1 bonding, electrode 810b and the second anchor point 7-2 bonding, electrode 810c and the 3rd anchor point 7-3 bonding, electrode 810d and the 4th anchor point 7-4 bonding, wherein electrode 810a, electrode 810b, electrode 810c and electrode 810d are connected with each other, and electrode 810e is its extraction electrode.
First comb group 5-1 and the 3rd comb group 5-3 use comb electric capacity electrostatic drive form as driving comb group, specifically as a example by the first comb group 5-1, when the alternating voltage applying opposite in phase at electrode 801b, 802b respectively
, and the DC offset voltage that superposition is identical, in the case of in first, the level on comb 5-1c is zero, the driving force that in first, comb 5-1c is subject to is:
In formula,Being the single side comb teeth number of comb 5-1c in first, h is the thickness of comb,For dielectric constant,For comb gap.At driving forceEffect under, annulus mass block 3 is under the support of the first square wave support beam 6-1, the second square wave support beam 6-2, third party's ripple support beam 6-3 and the 4th square wave support beam 6-4, with the center of circle of circular mass 2 as center of rotation, XOY plane does crankmotion, annulus mass block 3 drives circular mass 2 also to do crankmotion on XOY plane, as a example by turning clockwise, if now there being the angular velocity along the input of X-axis positive directionThen differentiate rule according to the right hand of coriolis force, with the axis of the first torsion beam 4-1 and the second torsion beam 4-2 as boundary, left semicircle for circular mass 2, it is used by upwards Ge Shi masterpiece, for the right semi-circle of circular mass 2, it is by downward Ge Shi masterpiece use, then drive overlayer polymer hair 1 is overturn by circular mass 2.
Circular mass 2 constitutes two symmetrical capacitance structures with the first half-round metal electrode 809b being arranged on below and the second half-round metal electrode 809c, wherein center of circle mass 2 is as the public pole plate of the two electric capacity, when carrying out angular velocity detection, when circular mass 2 produces upset, the capacitance of two electric capacity that the first half-round metal electrode 809b and the second half-round metal electrode 809c is constituted with circular mass 2 can be followed the angle of upset and be changed, testing circuit detects the change of two capacitor's capacities respectively by electrode 809a and electrode 810e and electrode 809d and electrode 810e, by detecting the change of capacitance, the angle of deflection can be obtained, the size of input angular velocity can be calculated further.
The above is only the preferred embodiment of the present invention; it is noted that, for those skilled in the art; under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (7)
1. the bionical hair formula silicon micro-gyroscope for angular velocity sensitivity, by overlayer polymer hair (1), middle level silicon micro-sensor and the bottom glass substrate composition being provided with circuit, it is characterized in that: described middle level silicon micro-sensor includes circular mass (2) and the annulus mass block (3) with circular mass (2) concentric, two torsion beam (4) it are provided with between described circular mass (2) and annulus mass block (3), described overlayer polymer hair (1) is bonded in circular mass (2) center, the circumferential side portion of described annulus mass block (3) is provided with some comb groups (5) and square wave support beam (6) uniformly, described comb group (5) and square wave support beam (6) interlaced arrangement.
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1, it is characterized in that: on described annulus mass block (3), be provided with four comb groups (5) and four square wave support beams (6), two adjacent comb groups (5) are spaced apart 90 degree, and two adjacent square wave support beams (6) are spaced apart 90 degree.
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1, it is characterised in that: said two torsion beam (4) is symmetrical on the basis of the axis of circular mass (2).
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1 and 2, it is characterized in that: described comb group (5) is made up of left comb (5-a), right comb (5-b) and middle comb (5-c), middle comb (5-c) is fixed on annulus mass block (3), and left comb (5-a) and right comb (5-b) are fixed in bottom glass substrate.
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1 and 2, it is characterised in that: described square wave support beam (6) is fixing with anchor point (7) to be connected.
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1 and 2, it is characterised in that: the tangential direction being oriented parallel to annulus mass block (3) of comb in described comb group (5).
A kind of bionical hair formula silicon micro-gyroscope sensitive for angular velocity the most according to claim 1, it is characterised in that: it is that cut direction is provided with the first half-round metal electrode (809b) and the second half-round metal electrode (809c) with the axis direction of torsion beam (4) in the described circular mass (2) view field in bottom glass substrate.
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| CN107421526B (en) * | 2017-07-04 | 2020-05-05 | 东南大学 | Bionic double-shaft hair sensor device |
| CN107421526A (en) * | 2017-07-04 | 2017-12-01 | 东南大学 | A kind of bionical twin shaft hair sensor device |
| CN107655465B (en) * | 2017-08-28 | 2020-08-14 | 东南大学 | Two-stage lever amplification resonant bionic hair flow velocity and acceleration micro-sensor |
| CN107655465A (en) * | 2017-08-28 | 2018-02-02 | 东南大学 | The bionical hair flow velocity of resonant mode, the acceleration microsensor of two-stage lever amplification |
| CN109353985A (en) * | 2018-10-15 | 2019-02-19 | 北京航天控制仪器研究所 | A kind of arc comb structure of micromechanics electrostatic drive |
| CN109353985B (en) * | 2018-10-15 | 2021-06-11 | 北京航天控制仪器研究所 | Micro-mechanical electrostatic driving arc comb tooth structure |
| CN110850111B (en) * | 2019-10-09 | 2021-03-23 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN110850111A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111521170A (en) * | 2020-05-22 | 2020-08-11 | 东南大学 | Master-slave mass micro mechanical hair gyroscope for driving amplitude amplification |
| CN116907463A (en) * | 2023-09-08 | 2023-10-20 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
| CN116907463B (en) * | 2023-09-08 | 2023-12-15 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
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