CN108507555B - MEMS micromechanical full decoupling closed-loop gyroscope - Google Patents
MEMS micromechanical full decoupling closed-loop gyroscope Download PDFInfo
- Publication number
- CN108507555B CN108507555B CN201810337150.XA CN201810337150A CN108507555B CN 108507555 B CN108507555 B CN 108507555B CN 201810337150 A CN201810337150 A CN 201810337150A CN 108507555 B CN108507555 B CN 108507555B
- Authority
- CN
- China
- Prior art keywords
- driving
- detection
- substructure
- gyroscope
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 claims abstract description 127
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 230000008878 coupling Effects 0.000 claims abstract description 23
- 238000010168 coupling process Methods 0.000 claims abstract description 23
- 238000005859 coupling reaction Methods 0.000 claims abstract description 23
- 239000003990 capacitor Substances 0.000 claims description 86
- 244000126211 Hericium coralloides Species 0.000 claims description 43
- 210000001520 comb Anatomy 0.000 claims description 16
- 230000008859 change Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 10
- 230000009471 action Effects 0.000 claims description 9
- 230000000694 effects Effects 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000036316 preload Effects 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- 239000002210 silicon-based material Substances 0.000 claims description 2
- 238000013461 design Methods 0.000 abstract description 18
- 238000006073 displacement reaction Methods 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 8
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a MEMS micromechanical full decoupling closed-loop gyroscope, which comprises: an insulating layer is arranged among the substrate, the sensitive device layer, the substrate and the sensitive device layer; the sensitive device layer includes: the first substructure, the second substructure and the coupling connection beam; the first substructure and the second substructure both include: the device comprises a driving frame, a driving folding beam, a driving decoupling beam, a Goldng mass block, a detecting frame, a detecting beam, a detecting decoupling beam, a driving fixed comb teeth, a driving movable comb teeth, a driving detecting fixed comb teeth, a driving detecting movable comb teeth, a detecting fixed comb teeth, a detecting movable comb teeth, a force feedback fixed comb teeth, a force feedback movable comb teeth and an anchor point; the generation of quadrature error signals is restrained, the zero bias stability index of the micromechanical gyroscope device is improved, meanwhile, the design structure is compact, the chip area is small, the detection mode sensitive mass block can be prevented from being twisted due to large displacement, the integral linearity is good, and the measurement accuracy is high.
Description
Technical Field
The invention relates to the field of micro-mechanical gyroscope research, in particular to a MEMS micro-mechanical full-decoupling closed-loop gyroscope.
Background
MEMS (Micro-Electro-Mechanical System) Micro-mechanical gyroscope is an inertial device for measuring the rotation angle rate of a base by using the Gong's effect, and has wide use value and market application prospect because of the characteristics of small volume, light weight, high reliability, easy mass production and the like, and is widely applied to the consumer market, and the high-end fields of industrial control, aerospace, national defense and military and the like.
However, the stability problem of the micromechanical gyroscope index is one of the key bottlenecks that hinder the practical application of the micromechanical gyroscope, and the zero offset stability difference seriously hinders the application of the micromechanical gyroscope in the high-end field, and the reason is mainly that the gyroscope output has a part of orthogonal error interference signals due to the fact that the driving mode and the detection mode have larger mechanical coupling due to errors such as structural design and processing of the gyroscope, so that the zero offset and the stability index of the gyroscope are affected. The prior method for structurally improving the zero bias stability of the micromechanical gyroscope mainly adopts a decoupling design scheme, adopts more half decoupling designs, has the advantages of relatively simple design and easier processing, but the scheme can not completely eliminate quadrature error signals, the zero bias stability of the obtained micromechanical gyroscope device is still poorer, the adoption of the full decoupling design scheme has related reports in recent years, the zero bias stability index is greatly improved, the design structure is complex, the chip area is larger, the miniaturization and the integration of the device are not facilitated, simultaneously the possibility of torsion exists in sensitive quality, and finally the measurement precision of the device can be influenced.
Disclosure of Invention
The invention provides a MEMS micromechanical full-decoupling closed-loop gyroscope, which can completely eliminate mechanical coupling between a driving mode and a detection mode through ingenious design of a gyroscope decoupling frame, inhibit the generation of orthogonal error signals, improve the zero bias stability index of a micromechanical gyroscope device, has compact design structure and small chip area, limits the displacement of the gyroscope detection structure by utilizing a closed-loop control mode, can prevent the detection mode sensitive mass block from twisting due to larger displacement, and has good integral linearity and high measurement precision.
In order to achieve the aim of the invention, the application provides a MEMS micromechanical full decoupling closed-loop gyroscope, which comprises a substrate, a sensitive device layer, and an insulating layer arranged between the substrate and the sensitive device layer; the sensitive device layer comprises a first substructure, a second substructure and a coupling connection beam, wherein the first substructure and the second substructure respectively comprise a driving frame, a driving folding beam, a driving decoupling beam, a Goldng mass block, a detecting frame, a detecting beam, a detecting decoupling beam, a driving fixed comb tooth, a driving movable comb tooth, a driving detecting fixed comb tooth, a driving detecting movable comb tooth, a detecting fixed comb tooth, a detecting movable comb tooth, a force feedback fixed comb tooth, a force feedback movable comb tooth and an anchor point, the first substructure and the second substructure are symmetrical about a Y axis, and the anchor point fixes the fixed structure of the sensitive device layer on a substrate through an insulating layer.
The associated comb teeth include: the device comprises a driving fixed comb tooth, a driving movable comb tooth, a driving detection fixed comb tooth, a driving detection movable comb tooth, a detection fixed comb tooth, a detection movable comb tooth, a force feedback fixed comb tooth and a force feedback movable comb tooth; the fixed broach of drive detect fixed broach the fixed broach of drive detect the fixed broach of force feedback all passes through the anchor point is fixed the substrate, the movable broach one end of drive detection with drive frame connects, detect movable broach one end the movable broach one end of force feedback with detect frame connects.
Further, the driving frame is connected with the coriolis mass block through the detection decoupling beam to form a driving mass module, and the detection frame is connected with the coriolis mass block through the driving decoupling beam to form a detection mass module.
Further, the driving folding beams are symmetrically distributed on the outer sides of four corners of the driving frame, one end of each driving folding beam is connected with the driving frame, the other end of each driving folding beam is connected with the anchor point, and the driving quality module is fixed on the substrate through the anchor point.
Further, the detection beam is a double-end clamped beam, and because the double-end clamped beam has high rigidity in the non-sensitive axial direction, the interference of the structure from the non-sensitive axial direction can be well restrained, so that the detection Liang Fenbu is taken as an elastic beam in the detection mode direction, the detection Liang Fenbu is arranged on the upper side and the lower side of the detection frame, and the two ends of the detection frame are fixed on the substrate through the anchor points, and meanwhile, the fixation of the detection quality module is realized.
Further, the driving decoupling beams and the detecting decoupling beams are of folding beam structures, and can release internal stress of the structure and simultaneously have good capability of resisting cross error interference, the driving decoupling beams and the detecting decoupling beams are respectively arranged in eight groups, every two orthogonal combinations are respectively positioned at the inner corner and the outer corner of the God's mass block, one end of each driving decoupling beam and one end of each detecting decoupling beam are connected with the God's mass block, the other ends of each driving decoupling beam and each detecting decoupling beam are respectively connected with the detecting frame, the eight driving decoupling beams and the eight detecting decoupling beams realize full decoupling design of driving modes and detecting modes, mechanical coupling of the structure is effectively restrained, orthogonal error interference signals are eliminated, and zero bias stability indexes of micromechanical gyroscope devices are greatly improved.
Further, the fixed driving comb teeth are fixed on the substrate through the anchor points, one end of the movable driving comb teeth is connected with the driving frame, each fixed driving comb tooth and each movable driving comb tooth form a pair of driving capacitors, N pairs of driving capacitors form a group of driving capacitors, the first substructure and the second substructure are respectively provided with four groups of driving capacitors, eight groups of driving capacitors are respectively located at the upper and lower positions of two outer sides of the driving frame, the first substructure and the second substructure are respectively provided with two groups of driving capacitors at each outer side (leftmost side and rightmost side of the structure) of the driving frame, four groups of driving capacitors (each two groups of driving capacitors are fixed by the same anchor point) are combined to form a driving anode of the micromechanical gyroscope, and the driving anode are respectively provided with push-pull driving of the micromechanical gyroscope.
Further, the fixed comb teeth for driving detection are fixed on the substrate through the anchor points, one end of the movable comb teeth for driving detection is connected with the driving frame, each fixed comb tooth for driving detection and each movable comb tooth for driving detection form a pair of driving detection capacitors, N pairs of driving detection capacitors form a group of driving detection capacitors, the first substructure and the second substructure are respectively provided with three groups of driving detection capacitors, six groups are respectively positioned at the middle positions of two outer sides of the driving frame, the first substructure and the second substructure are respectively provided with a group of driving detection capacitors at the outer sides (leftmost side and rightmost side of the structure) of the driving frame, the two groups are combined to form a driving detection anode of the micromechanical gyroscope, the four groups of driving detection capacitors positioned in the middle of the two substructures are fixed by the same anchor point, the driving detection anode and the driving detection anode of the micromechanical gyroscope are combined to form a driving differential detection anode of the micromechanical gyroscope in a variable area mode.
Further, the fixed detection comb teeth are fixed on the substrate through the anchor points, one end of each movable detection comb tooth is connected with the detection frame, each fixed detection comb tooth and each movable detection comb tooth form a pair of detection capacitors, N pairs of detection capacitors form a group of detection capacitors, the first substructure and the second substructure are respectively provided with four groups of detection capacitors, eight groups of detection capacitors are respectively positioned at the upper and lower positions of two inner cavities in the middle of the detection frame, two groups of detection capacitors are positioned at the upper positions of two inner cavities in the middle of the first substructure and the second substructure, four groups of detection capacitors are combined to form a detection anode of the micromechanical gyroscope, two groups of detection capacitors are combined to form a detection cathode of the micromechanical gyroscope, and the detection anode and the detection cathode adopt a variable-interval mode to carry out differential detection on the micromechanical gyroscope.
Further, the force feedback fixed comb teeth are fixed on the substrate through the anchor points, one end of the force feedback movable comb teeth are connected with the detection frame, each force feedback fixed comb tooth and each force feedback movable comb tooth form a pair of force feedback capacitors, N pairs of force feedback capacitors form a group of force feedback capacitors, the first substructure and the second substructure are respectively provided with two groups of force feedback capacitors, four groups of force feedback capacitors are respectively positioned at the upper cavity position and the lower cavity position of the detection frame, one group of force feedback capacitors are respectively positioned at the upper cavity position of the first substructure and the lower cavity position of the second substructure, two groups of force feedback capacitors are respectively combined to form a force feedback positive electrode of the micromechanical gyroscope, two groups of force feedback capacitors are respectively combined to form a force feedback negative electrode of the micromechanical gyroscope, and the force feedback positive electrode and the force feedback negative electrode of the micromechanical gyroscope are controlled in a differential variable area mode.
Furthermore, the coupling connecting beam is of a square structure and is formed by combining two folding beams, has good internal stress release characteristics, can well inhibit cross interference signals, one end of the coupling connecting beam is connected with the first substructure, the other end of the coupling connecting beam is connected with the second substructure, and the two substructure driving mass modules can work in the same-frequency reverse direction through the coupling connecting beam, so that driving mode differential detection is realized.
Further, the coriolis mass block is a shared structure of the driving mass module and the detecting mass module, and the first substructure and the second substructure perform common-frequency reverse motion of the detecting mode under the action effect of the coriolis mass block to realize differential detection.
Further, the substrate material may be silicon or glass material, the insulating layer is silicon dioxide material, the sensitive device layer material is heavily doped silicon material, and the whole micromechanical gyroscope structure is completed through MEMS processing technology.
One or more technical schemes provided by the application have at least the following technical effects or advantages:
1. the invention adopts eight driving decoupling beams and eight detecting decoupling beams to realize the frame full decoupling design, the driving and detecting decoupling beams are respectively positioned at the inner corner and the outer corner of the Golgi mass block in a pairwise orthogonal combination way, and eight groups are adopted, so that the structural mechanical coupling is effectively inhibited, the orthogonal error interference signals are eliminated, and the zero bias stability index of the micromechanical gyroscope device is improved.
2. The invention adopts a tuning fork structural design, and the driving mode and the detecting mode adopt a differential mode, so that the driving common-mode interference signals and the common-mode interference signals are restrained, and the vibration resistance and the shock resistance of the micromechanical gyroscope device are improved.
3. The invention adopts a tuning fork structural design and a differential detection mode, improves the mechanical sensitivity of the micromechanical gyroscope, enhances the signal-to-noise ratio of the system and is beneficial to the optimization of the zero offset stability of the system.
4. The invention designs the force feedback comb structure, can realize the closed-loop control of the micro-mechanical gyroscope, avoids torsion interference caused by larger displacement of the sensitive mass of the gyroscope detection module, is beneficial to optimizing the nonlinearity of the device and improves the measurement accuracy of the system.
5. The invention has compact structural design, small chip size and light weight, and is favorable for miniaturization and integration of the micromechanical gyroscope device.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and together with the description serve to explain the principle of the invention;
FIG. 1 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope according to the present invention;
FIG. 2 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope drive architecture according to the present invention;
FIG. 3 is a schematic diagram of a detection structure of a MEMS micromechanical fully-decoupled closed-loop gyroscope according to the present invention;
FIG. 4 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope force feedback architecture according to the present invention.
Detailed Description
The invention provides a MEMS micromechanical full-decoupling closed-loop gyroscope, which can completely eliminate mechanical coupling between a driving mode and a detection mode through ingenious design of a gyroscope decoupling frame, inhibit the generation of orthogonal error signals, improve the zero bias stability index of a micromechanical gyroscope device, has compact design structure and small chip area, limits the displacement of the gyroscope detection structure by utilizing a closed-loop control mode, can prevent the detection mode sensitive mass block from twisting due to larger displacement, and has good integral linearity and high measurement precision.
In order that the above-recited objects, features and advantages of the present invention will be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description. In addition, the embodiments of the present application and the features in the embodiments may be combined with each other without conflicting with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than within the scope of the description, and the scope of the invention is therefore not limited to the specific embodiments disclosed below.
FIG. 1 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope according to the present invention. As shown in fig. 1, the micromechanical full-decoupling closed-loop gyroscope according to an embodiment of the present invention includes a substrate 1, the material of which is doped silicon or glass, a thin oxide layer is provided on the substrate 1, the oxide layer plays an insulating isolation and fixed connection role, a sensitive device layer is provided on the oxide layer, the material of which is heavily doped silicon, the sensitive device layer includes a first substructure, a second substructure, and a coupling connection beam 35a, the first substructure and the second substructure each include a driving frame 2a, 2b, a driving folding beam 3a, 3b, a driving decoupling beam 19a, 19b, a brother mass block 17a, 17b, a detecting frame 20a, 20b, a detecting beam 21a, 21b, a detecting decoupling beam 18a, 18b, a driving fixed comb teeth 5a, 8a, 5b, 8b, a driving movable comb teeth 6a, 9a, 6b, 9b, the sensing fixed combs 11a, 14a, 11b, 14b, the sensing movable combs 12a, 15a, 12b, 15b, the sensing fixed combs 24a, 26a, 24b, 26b, the sensing movable combs 23a, 27a, 23b, 27b, the force feedback fixed combs 30a, 32a, 30b, 32b, the force feedback movable combs 29a, 33a, 29b, 33b, the anchors 4a, 7a, 10a, 13a, 16a, 25a, 28a, 31a, 34a, 4b, 7b, 13b, 25b, 28b, 31b, 34b, wherein the first substructure is symmetrical about the Y-axis with the second substructure, and the anchors 4a, 7a, 10a, 13a, 16a, 25a, 28a, 31a, 34a, 4b, 7b, 13b, 25b, 28b, 31b, 34b fix the sensing device layer related structure on the substrate 1 through the oxidation insulating layer.
The coupling connection beam 35a is of a square structure and is formed by combining two folding beams, so that the coupling connection beam has good internal stress release characteristic, meanwhile, cross interference signals can be well restrained, one end of the coupling connection beam 35a is connected with the first substructure, the other end of the coupling connection beam is connected with the second substructure, and the driving quality modules of the two substructures can work in the same-frequency reverse direction through the coupling connection beam 35a, so that differential detection of driving modes is realized.
The driving frames 2a and 2b are connected with the coriolis mass blocks 17a and 17b through detection decoupling beams 18a and 18b to form a driving mass module, the detection frames 20a and 20b are connected with the coriolis mass blocks 17a and 17b through driving decoupling beams 19a and 19b to form a detection mass module, the driving decoupling beams 19a and 19b and the detection decoupling beams 18a and 18b are of folding beam structures, eight groups are respectively arranged at inner corners and outer corners of the coriolis mass blocks 17a and 17b in every two orthogonal combinations, one end of each driving frame is connected with the coriolis mass blocks 17a and 17b, and the other end of each driving frame is connected with the detection frames 20a and 20b and the driving frames 2a and 2 b.
The coriolis mass blocks 17a and 17b are a shared structure of the driving mass module and the detecting mass module, and the first substructure and the second substructure perform common-frequency reverse operation of the detecting mode under the action effect of the coriolis mass blocks 17a and 17b and realize differential detection.
According to the invention, through the ingenious design and layout of the eight driving decoupling beams 19a and 19b, the eight detecting decoupling beams 18a and 18b and the Goldwire mass blocks 17a and 17b, the full decoupling between the driving mode and the detecting mode is realized, the structural mechanical coupling is effectively restrained, the orthogonal error interference signals are eliminated, and the zero bias stability characteristic of the micromechanical gyroscope device is greatly improved.
FIG. 2 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope drive architecture according to the present invention. As shown in fig. 2, the fixed driving combs 5a, 8a, 5b, 8b are fixed on the substrate 1 through anchor points 7a, 10a, 7b, one ends of the fixed driving combs 6a, 9a, 6b, 9b are connected with the driving frames 2a, 2b and can slide leftwards and rightwards along the X axis along with the driving frames 2a, 2b, each fixed driving comb 5a, 8a, 5b, 8b and each movable driving comb 6a, 9a, 6b, 9b form a pair of driving capacitors, N pairs of driving capacitors form a group of driving capacitors, the first substructure and the second substructure respectively have four groups of driving capacitors, eight groups of driving capacitors are respectively positioned at the upper and lower positions of two outer sides of the driving frames 2a, 2b, four groups of driving capacitors are respectively positioned at the outer sides (leftmost side and rightmost side of the structure) of the first substructure and the second substructure, the driving capacitors are combined to form a micromechanical gyroscope driving positive electrode, and four groups of driving capacitors positioned in the middle of the two substructure are combined to form a gyroscope (each two groups of driving capacitors are formed by the same anchor point 10a fixed gyroscope to drive a negative electrode.
The fixed driving and detecting comb teeth 11a, 14a, 11b and 14b are fixed on the substrate 1 through anchor points 13a, 16a and 13b, one end of the movable driving and detecting comb teeth 12a, 15a, 12b and 15b is connected with the driving frames 2a and 2b and can slide leftwards and rightwards along the X axis along with the driving frames 2a and 2b, each fixed driving and detecting comb tooth 11a, 14a, 11b and 14b and each movable driving and detecting comb tooth 12a, 15a, 12b and 15b form a pair of driving and detecting capacitors, N pairs of driving and detecting capacitors form a group of driving and detecting capacitors, the first substructure and the second substructure are respectively provided with three groups of driving and detecting capacitors, six groups are respectively positioned at the middle positions of two outer sides of the driving frames 2a and 2b, one group of driving and detecting capacitors of the outer sides (leftmost side and rightmost side of the structure) of the first substructure and the second substructure are combined to form a micromechanical gyroscope driving and detecting positive electrode, and four groups of driving and detecting capacitors positioned at the middle of the two substructure are combined to form a micromechanical gyroscope driving and detecting gyroscope, and the driving and detecting gyroscope is formed by the same anchor point 16a to drive and fix the micro gyroscope.
The micromechanical full-decoupling closed-loop gyroscope driving structure adopts a comb static driving mode, and when a voltage value is applied to a gyroscope driving positive electrode: v (V) d +V c sin w d t, applying a voltage value to a gyroscope driving negative electrode: v (V) d -V c sin w d t, where V d Is a DC offset voltage, V c sin w d t is an alternating current small signal voltage, and when the driving frames 2a and 2b are grounded, the driving mass modules of the first substructure and the second substructure of the micromechanical gyroscope are subjected to electrostatic force:
wherein epsilon is the dielectric constant of air, T is the thickness of the driving comb teeth and N d D, to drive the total number of single-side comb teeth of the fixed/movable comb teeth d To drive the gaps w between the fixed teeth 5a, 8a, 5b, 8b and the movable teeth 6a, 9a, 6b, 9b d To drive the angular frequency of the small signal. Under the action of electrostatic force, the driving mass modules of the first substructure and the second substructure of the micromechanical gyroscope perform push-pull motion in the same-frequency reverse direction.
When the micromechanical gyroscope driving structure performs push-pull motion under the action of electrostatic force, the driving detection movable comb teeth 12a, 15a, 12b and 15b will have position variation, which will cause the gyroscope to drive and detect the change of the positive electrode capacitance and the negative electrode capacitance, and the change amount is as follows:
wherein N is ds To drive and detect the total number of single-side comb teeth of the fixed/movable comb teeth, d ds In order to drive and detect the gaps between the fixed comb teeth 11a, 14a, 11b, 14b and the movable comb teeth 12a, 15a, 12b, 15b, Δx is the driving displacement of the driving mass module of the first substructure and the second substructure of the micromechanical gyroscope.
The differential detection of the gyroscope driving mode can be realized through the capacitance change of the driving detection positive electrode and the driving detection negative electrode formed by the first substructure and the second substructure of the micromechanical gyroscope, and the capacitance change is fed back to the driving electrode through the peripheral circuit to correspondingly adjust the driving displacement, so that the constant-frequency constant-amplitude closed-loop control of the driving mode is realized.
FIG. 3 is a schematic diagram of a detection structure of a MEMS micromechanical fully-decoupled closed-loop gyroscope according to the present invention. As shown in fig. 3, the fixed detecting combs 24a, 26a, 24b, 26b are fixed on the substrate 1 through anchor points 25a, 28a, 25b, 28b, one ends of the movable detecting combs 23a, 27a, 23b, 27b are connected with the detecting frames 20a, 20b and can slide up and down along the Y axis along with the detecting frames 20a, 20b, each fixed detecting comb 24a, 26a, 24b, 26b and each movable detecting comb 23a, 27b form a pair of detecting capacitors, N pairs of detecting capacitors form a group of detecting capacitors, the first substructure and the second substructure respectively have four groups of detecting capacitors, eight groups of detecting capacitors are respectively located at the upper and lower positions of the middle two cavities of the first substructure and the second substructure, four groups of detecting capacitors are combined to form a micromechanical positive electrode, two groups of detecting capacitors are located at the lower positions of the middle two cavities of the first substructure and the second substructure, and four groups of detecting capacitors are combined to form a micromechanical gyroscope.
The detection structure of the micromechanical full decoupling closed-loop gyroscope carries out differential detection on the micromechanical gyroscope in a variable-spacing mode. When the driving mass module performs simple harmonic vibration under the action of push-pull electrostatic driving force and angular speed is input in the direction perpendicular to the substrate 1, the coriolis mass blocks 17a and 17b are displaced under the action of the coriolis force, and as the driving modes of the first substructure and the second substructure work in the same-frequency reverse direction, the coriolis force applied to the coriolis mass blocks 17a and 17b is also in the same-frequency reverse direction, and the coriolis force applied to the first substructure and the second substructure is:
F c ＝-2m c ω c ×V d (3)
wherein m is c Is the mass omega of the Golgi masses 17a, 17b c For an input angular velocity perpendicular to the substrate 1, V d Is the vibration speed of the driving mode. Due to the action of the coriolis force, the first substructure and the second substructure detect mass modules to displace reversely, and gaps between the movable detecting comb teeth 23a, 27a, 23b, 27b and the fixed detecting comb teeth 24a, 26a, 24b, 26b connected with the mass modules change, so that capacitances of the positive detecting electrode of the micromechanical gyroscope and the negative detecting electrode of the micromechanical gyroscope change, and differential detection of a gyroscope detecting mode can be achieved based on the changes.
The detection mode of the micromechanical gyroscope adopts the variable-gap differential detection mode, so that high mechanical sensitivity test of signals can be realized, and meanwhile, common-mode signal interference such as homodromous acceleration and the like can be eliminated, the performance-to-noise ratio is high, and the vibration resistance and impact resistance are strong.
FIG. 4 is a schematic diagram of a MEMS micromechanical fully decoupled closed-loop gyroscope force feedback architecture according to the present invention. As shown in fig. 4, the force feedback fixed comb teeth 30a, 32a, 30b, 32b are fixed on the substrate 1 through anchor points 31a, 34a, 31b, 34b, one end of the force feedback movable comb teeth 29a, 33a, 29b, 33b is connected with the detecting frames 20a, 20b, each force feedback fixed comb tooth 30a, 32a, 30b, 32b and each force feedback movable comb tooth 29a, 33a, 29b, 33b form a pair of force feedback capacitors, N pairs of force feedback capacitors form a group of force feedback capacitors, the first substructure and the second substructure respectively have two groups of force feedback capacitors, four groups of force feedback capacitors are respectively positioned at the upper cavity position and the lower cavity position of the detecting frames 20a, 20b, one group of force feedback capacitors are positioned at the upper cavity position of the first substructure and the lower cavity position of the second substructure, two groups of the force feedback capacitors form a micromechanical gyroscope force feedback positive pole, one group of force feedback capacitors are positioned at the lower cavity position of the first substructure and the second substructure, and two groups of the micromechanical gyroscope form a micromechanical gyroscope.
The force feedback structure of the micromechanical full decoupling closed-loop gyroscope adopts a differential variable area mode to carry out force balance control on the micromechanical gyroscope. When the micromechanical gyroscope inputs at the external angular velocity, the micromechanical gyroscope detects the positive electrode capacitance and the negative electrode capacitance to generate differential change, at the moment, the differential voltage value generated by the capacitance change quantity is fed back to the micromechanical gyroscope force feedback positive electrode and the micromechanical gyroscope force feedback negative electrode through the peripheral circuit, at the moment, the micromechanical gyroscope detection mass module is subjected to the action of the electrostatic force of the force feedback comb tooth structure, and the electrostatic force balances the Golgi force generated by the external angular velocity, namely:
4N fb εTV ref V fb /d fb ＝-2m c ω c ×V d (4)
wherein N is fb The single-side force feedback comb tooth capacitance logarithm of the micromechanical gyroscope is V ref Pre-load voltage values, V, for force feedback fixation comb teeth 30a, 32a, 30b, 32b of micromechanical gyroscope fb Voltage value fed back for detecting capacitance change of micromechanical gyroscope，d fb The gaps between the fixed comb teeth 30a, 32a, 30b, 32b and the force feedback movable comb teeth 29a, 33a, 29b, 33b are fixed for the force feedback of the micromechanical gyroscope.
The calculation mode of the angular velocity of the micromechanical fully-decoupled gyroscope can be obtained by the formula (4), namely:
wherein K is 1 Is a micro-mechanical gyroscope scale factor.
The method can avoid structural torsion interference caused by larger displacement of sensitive mass of the gyroscope detection module, and is beneficial to optimizing device nonlinearity and improving system measurement precision.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (9)
1. A MEMS micromechanical fully decoupled closed-loop gyroscope, the gyroscope comprising: an insulating layer is arranged among the substrate, the sensitive device layer, the substrate and the sensitive device layer; the sensitive device layer includes: the first substructure, the second substructure and the coupling connection beam; one end of the coupling connecting beam is connected with the first substructure, and the other end of the coupling connecting beam is connected with the second substructure; the first substructure and the second substructure both include: the device comprises a driving frame, a driving folding beam, a driving decoupling beam, a Goldrake mass block, a detecting frame, a detecting beam, a detecting decoupling beam, related comb teeth and anchor points;
the related comb teeth include: the device comprises a driving fixed comb tooth, a driving movable comb tooth, a driving detection fixed comb tooth, a driving detection movable comb tooth, a detection fixed comb tooth, a detection movable comb tooth, a force feedback fixed comb tooth and a force feedback movable comb tooth; the driving fixed comb teeth, the driving detection fixed comb teeth, the detection fixed comb teeth and the force feedback fixed comb teeth are fixed on the substrate through the anchor points, one end of the driving movable comb teeth and one end of the driving detection movable comb teeth are connected with the driving frame, and one end of the detection movable comb teeth and one end of the force feedback movable comb teeth are connected with the detection frame;
the first substructure and the second substructure are symmetrical about a Y-axis in a plane rectangular coordinate system, and anchor points fix a fixed structure of the sensitive device layer on the substrate through the insulating layer; the driving frame is connected with the Coriolis mass block through the detection decoupling beam to form a driving mass module, and the detection frame is connected with the Coriolis mass block through the driving decoupling beam to form a detection mass module; the driving folding beams are symmetrically distributed on the outer sides of four corners of the driving frame, one end of each driving folding beam is connected with the driving frame, the other end of each driving folding beam is connected with the anchor point, and the driving quality module is fixed on the substrate through the anchor point; the detection Liang Fenbu is arranged on the upper side and the lower side of the detection frame, and two ends of the detection beam are fixed on the substrate through the anchor points; eight groups of driving decoupling beams and detection decoupling beams are respectively arranged at the inner corner and the outer corner of the Goldng's mass block in pairs, one ends of the driving decoupling beams and the detection decoupling beams are connected with the Goldng's mass block, and the other ends of the driving decoupling beams and the detection decoupling beams are connected with the detection frame and the driving frame respectively; the fixed comb teeth in the related comb teeth are fixed on the substrate through the anchor points, and the movable comb teeth in the related comb teeth are connected with the driving frame and the detecting frame;
each force feedback fixed comb tooth and each force feedback movable comb tooth form a pair of force feedback capacitors, N pairs of force feedback capacitors form a group of force feedback capacitors, and N is a positive integer greater than or equal to 1; the first substructure and the second substructure are respectively provided with two groups of force feedback capacitors, and the four groups of force feedback capacitors are respectively positioned at the upper inner cavity and the lower inner cavity of the detection frame; the force feedback capacitors are respectively arranged at the positions of the inner cavities at the upper parts of the first substructure and the second substructure and are combined to form a micromechanical gyroscope force feedback positive electrode; the force feedback capacitors are respectively arranged at the inner cavity positions of the lower parts of the first substructure and the second substructure and are combined to form a micromechanical gyroscope force feedback negative electrode; the force feedback positive electrode and the force feedback negative electrode adopt a differential variable area mode to carry out force balance control on the micro-mechanical gyroscope;
when the micromechanical gyroscope inputs at the external angular velocity, the micromechanical gyroscope detects the positive electrode capacitance and the negative electrode capacitance to generate differential change, at the moment, the differential voltage value generated by the capacitance change quantity is fed back to the micromechanical gyroscope force feedback positive electrode and the micromechanical gyroscope force feedback negative electrode through the peripheral circuit, at the moment, the micromechanical gyroscope detection mass module is subjected to the action of the electrostatic force of the force feedback comb tooth structure, and the electrostatic force balances the Golgi force generated by the external angular velocity, namely:
4N fb εTV ref V fb /d fb ＝-2m c ω c ×V d ；
wherein N is fb The single-side force feedback comb tooth capacitance logarithm of the micromechanical gyroscope is V ref Fixing comb pre-load voltage value for force feedback of micro-mechanical gyroscope, V fb Voltage value, d, fed back for detecting capacitance change of micromechanical gyroscope fb The gap between the fixed comb teeth and the movable comb teeth is force feedback of the micromechanical gyroscope, epsilon is air dielectric constant, T is thickness of the driving comb teeth, and V d For driving the vibration velocity of the mode, m c Is the mass of the Golgi mass block omega c Is the input angular velocity perpendicular to the substrate.
2. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein the sense beams are double-ended clamped beams.
3. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein the drive decoupling beams and sense decoupling beams are folded beam structures.
4. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein each of the drive fixed combs and each of the drive movable combs form a pair of drive capacitors, N pairs of drive capacitors forming a set of drive capacitors, N being a positive integer greater than or equal to 1; the first substructure and the second substructure are respectively provided with four groups of driving capacitors, and eight groups of driving capacitors are respectively positioned at the upper and lower positions of the two outer sides of the driving frame; the driving positive pole and the driving negative pole of the micro-mechanical gyroscope are driven in a push-pull mode by the driving positive pole and the driving negative pole.
5. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein each of the drive sense fixed combs and each of the drive sense movable combs form a pair of drive sense capacitors; n pairs of driving detection capacitors form a group of driving detection capacitors, and N is a positive integer greater than or equal to 1; the first substructure and the second substructure are respectively provided with three groups of driving detection capacitors, and the six groups of driving detection capacitors are respectively positioned in the middle positions of the two outer sides of the driving frame; the driving detection capacitors of the first substructure and the second substructure are combined to form a driving detection anode of the micromechanical gyroscope, the driving detection anode and the driving detection anode of the micromechanical gyroscope are combined to form a driving detection cathode of the micromechanical gyroscope, and the driving detection anode and the driving detection cathode adopt a variable-area mode to carry out driving differential detection on the micromechanical gyroscope.
6. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein each of the fixed sensing combs and each of the movable sensing combs form a pair of sensing capacitors, N pairs of sensing capacitors forming a set of sensing capacitors, N being a positive integer greater than or equal to 1; the first substructure and the second substructure are respectively provided with four groups of detection capacitors, and eight groups of detection capacitors are respectively positioned at the upper and lower positions of the two inner cavities in the middle of the detection frame; two groups of detection capacitors positioned at the upper side positions of the two inner cavities in the middle of the first substructure and the second substructure are combined to form a micro-mechanical gyroscope detection anode; and two groups of detection capacitors positioned at the lower side positions of the two inner cavities in the middle of the first substructure and the second substructure are combined to form a detection cathode of the micromechanical gyroscope, and the detection anode and the detection cathode adopt a variable-spacing mode to carry out differential detection on the micromechanical gyroscope.
7. The MEMS micromechanical fully-decoupled closed-loop gyroscope according to claim 1, wherein the coupling connection beam is of a square structure and is formed by combining two folding beams, and the driving mode differential detection is realized by enabling the driving mass modules of the two substructures to work in the same frequency and in opposite directions through the coupling connection beam.
8. The MEMS micromechanical fully-decoupled closed-loop gyroscope of claim 1, wherein the coriolis mass is a shared structure of the driving mass module and the detecting mass module, and the first substructure and the second substructure perform common-frequency reverse motion of the detecting mode under the effect of the coriolis mass, so as to realize differential detection.
9. The MEMS micromachined fully decoupled closed-loop gyroscope of claim 1 wherein the substrate material is silicon or glass material, the insulating layer is silicon dioxide material, the sensitive device layer material is heavily doped silicon material, and the entire micromachined gyroscope structure is completed by MEMS processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810337150.XA CN108507555B (en) | 2018-04-16 | 2018-04-16 | MEMS micromechanical full decoupling closed-loop gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810337150.XA CN108507555B (en) | 2018-04-16 | 2018-04-16 | MEMS micromechanical full decoupling closed-loop gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108507555A CN108507555A (en) | 2018-09-07 |
| CN108507555B true CN108507555B (en) | 2024-04-05 |
Family
ID=63382325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810337150.XA Active CN108507555B (en) | 2018-04-16 | 2018-04-16 | MEMS micromechanical full decoupling closed-loop gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108507555B (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109110724B (en) * | 2018-09-30 | 2024-08-02 | 南京理工大学 | Be applied to MEMS force sensitive device's second grade stress isolation structure |
| CN109682364B (en) * | 2018-12-13 | 2020-10-20 | 中国科学院半导体研究所 | Piezoelectric MEMS decoupling structure and MEMS gyroscope |
| CN109883310B (en) * | 2019-02-28 | 2020-02-21 | 华中科技大学 | Self-balancing variable-area array capacitance displacement detection device and method |
| CN110095632B (en) * | 2019-05-29 | 2024-04-05 | 四川知微传感技术有限公司 | MEMS accelerometer based on zero correction |
| CN110307833B (en) * | 2019-06-27 | 2020-12-01 | 深迪半导体(上海)有限公司 | High-precision Z-axis gyroscope |
| CN110440779B (en) * | 2019-09-05 | 2020-11-24 | 中国海洋大学 | Force balance control method for high-dynamic MEMS resonant gyroscope |
| CN110926445B (en) * | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| CN113137959B (en) * | 2020-01-17 | 2022-06-17 | 北京大学 | Micromechanical tuning fork gyroscope |
| CN113390402A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Micromechanical tuning fork gyroscope |
| CN112113554B (en) * | 2020-09-02 | 2024-10-29 | 美新半导体(天津)有限公司 | Decoupling micro-gyroscope |
| CN113091721B (en) * | 2021-03-19 | 2022-11-18 | 武汉大学 | MEMS gyroscope and preparation and packaging method thereof |
| CN113686325B (en) * | 2021-08-26 | 2023-03-21 | 武汉大学 | MEMS fully decoupled gyroscope |
| CN113959423A (en) * | 2021-09-30 | 2022-01-21 | 瑞声开泰科技(武汉)有限公司 | MEMS gyroscope and electronic equipment |
| CN115077508A (en) * | 2022-07-19 | 2022-09-20 | 苏州米洛微纳电子科技有限公司 | MEMS device and forming method thereof |
| CN115164861B (en) * | 2022-08-26 | 2024-03-08 | 南京高华科技股份有限公司 | MEMS gyroscope and preparation method thereof |
| CN116147599B (en) * | 2023-04-18 | 2023-06-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
| CN116907463B (en) * | 2023-09-08 | 2023-12-15 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980031895A (en) * | 1996-10-31 | 1998-07-25 | 김광호 | Constant Power Tuning Fork Micro Gyroscopes |
| CN101319899A (en) * | 2008-07-24 | 2008-12-10 | 北京大学 | Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope |
| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN201780110U (en) * | 2009-07-21 | 2011-03-30 | 深迪半导体(上海)有限公司 | Mems gyroscope |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN102175236A (en) * | 2011-02-14 | 2011-09-07 | 厦门大学 | Micro gyroscope capable of regulating and reducing quadrature errors |
| CN102252668A (en) * | 2011-06-23 | 2011-11-23 | 南京理工大学 | Silicon micro angular vibration output gyroscope |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN104764903A (en) * | 2014-01-08 | 2015-07-08 | 北京卓锐微技术有限公司 | Silicon capacitor type accelerometer of mechanical modulation |
| CN204831318U (en) * | 2015-08-06 | 2015-12-02 | 东南大学 | Mechanical coupling error suppression device of MEMS gyroscope |
| CN105157726A (en) * | 2015-08-06 | 2015-12-16 | 东南大学 | Device and method for inhibiting mechanical coupling error of dual-mass silicon microgyroscope |
| CN105352488A (en) * | 2015-10-08 | 2016-02-24 | 北京理工大学 | Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope |
| CN105466406A (en) * | 2015-12-28 | 2016-04-06 | 南京理工大学 | Silicon micromechanical vibrating gyroscope of I-shaped structure |
| CN106153026A (en) * | 2015-03-30 | 2016-11-23 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope |
| EP3106834A1 (en) * | 2015-06-19 | 2016-12-21 | NXP USA, Inc. | Mems device with common mode rejection structure |
| CN106813654A (en) * | 2016-10-08 | 2017-06-09 | 南京理工大学 | A kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability |
| CN107063222A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | The double quality silicon micromechanical gyroscopes of three frame-types of direct rate-adaptive pacemaker |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
| CN107289920A (en) * | 2017-05-10 | 2017-10-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of direct-coupled four masses micromechanical gyro of angular speed sensitive direction |
| CN107782295A (en) * | 2016-08-26 | 2018-03-09 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope sensitive structure with frequency modulation function |
| CN208140130U (en) * | 2018-04-16 | 2018-11-23 | 四川知微传感技术有限公司 | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope structure |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6964195B2 (en) * | 2004-01-30 | 2005-11-15 | Bei Technologies, Inc. | Micromachined vibratory gyroscope and method with electronic coupling |
| FR2894661B1 (en) * | 2005-12-13 | 2008-01-18 | Thales Sa | VIBRANT GYROMETER BALANCED BY AN ELECTROSTATIC DEVICE |
| US8322213B2 (en) * | 2009-06-12 | 2012-12-04 | The Regents Of The University Of California | Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection |
| ITUB20159197A1 (en) * | 2015-12-29 | 2017-06-29 | St Microelectronics Srl | MICROELETTROMECHANICAL GYROSCOPE WITH DISORDER REJECTION AND METHOD OF DETECTING AN ANGULAR SPEED |
-
2018
- 2018-04-16 CN CN201810337150.XA patent/CN108507555B/en active Active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19980031895A (en) * | 1996-10-31 | 1998-07-25 | 김광호 | Constant Power Tuning Fork Micro Gyroscopes |
| CN101319899A (en) * | 2008-07-24 | 2008-12-10 | 北京大学 | Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope |
| CN201780110U (en) * | 2009-07-21 | 2011-03-30 | 深迪半导体(上海)有限公司 | Mems gyroscope |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN101876547A (en) * | 2009-12-08 | 2010-11-03 | 北京大学 | Horizontal shaft micro-mechanical tuning fork gyroscope adopting electrostatic balance comb tooth driver |
| CN102175236A (en) * | 2011-02-14 | 2011-09-07 | 厦门大学 | Micro gyroscope capable of regulating and reducing quadrature errors |
| CN102252668A (en) * | 2011-06-23 | 2011-11-23 | 南京理工大学 | Silicon micro angular vibration output gyroscope |
| CN102435185A (en) * | 2011-09-01 | 2012-05-02 | 中国航空工业第六一八研究所 | Internal and external truss type three-frame micro-mechanical gyro structure |
| CN104764903A (en) * | 2014-01-08 | 2015-07-08 | 北京卓锐微技术有限公司 | Silicon capacitor type accelerometer of mechanical modulation |
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN106153026A (en) * | 2015-03-30 | 2016-11-23 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope |
| EP3106834A1 (en) * | 2015-06-19 | 2016-12-21 | NXP USA, Inc. | Mems device with common mode rejection structure |
| CN105157726A (en) * | 2015-08-06 | 2015-12-16 | 东南大学 | Device and method for inhibiting mechanical coupling error of dual-mass silicon microgyroscope |
| CN204831318U (en) * | 2015-08-06 | 2015-12-02 | 东南大学 | Mechanical coupling error suppression device of MEMS gyroscope |
| CN105352488A (en) * | 2015-10-08 | 2016-02-24 | 北京理工大学 | Variable area capacitive-type bimodal optimized tuning-fork-type micromechanical gyroscope |
| CN105466406A (en) * | 2015-12-28 | 2016-04-06 | 南京理工大学 | Silicon micromechanical vibrating gyroscope of I-shaped structure |
| WO2017113911A1 (en) * | 2015-12-28 | 2017-07-06 | 南京理工大学 | Silicon-based micromechanical vibratory gyroscope with i-shaped structure |
| CN107782295A (en) * | 2016-08-26 | 2018-03-09 | 北京自动化控制设备研究所 | A kind of tuning-fork-type microelectromechanicgyroscope gyroscope sensitive structure with frequency modulation function |
| CN106813654A (en) * | 2016-10-08 | 2017-06-09 | 南京理工大学 | A kind of double quality blocks tuning fork angular rate gyroscope with structure decoupling ability |
| CN107063222A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | The double quality silicon micromechanical gyroscopes of three frame-types of direct rate-adaptive pacemaker |
| CN107063223A (en) * | 2017-04-17 | 2017-08-18 | 东南大学 | One chip Micromachined Accelerometer Based on Resonant Principle gyroscope arrangement |
| CN107289920A (en) * | 2017-05-10 | 2017-10-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of direct-coupled four masses micromechanical gyro of angular speed sensitive direction |
| CN208140130U (en) * | 2018-04-16 | 2018-11-23 | 四川知微传感技术有限公司 | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope structure |
Non-Patent Citations (4)
| Title |
|---|
| Decoupled Quadrature and Force Feedback Control of Capacitive MEMS Gyroscopes;Markus 等;IFAC Proceedings Volumes;20110101;第44卷(第1期);13534-13539 * |
| 一种三框架电容式硅微机械陀螺结构设计与仿真;李锦明;郭慧芳;刘俊;;传感技术学报;20080215(02);258-260 * |
| 王琨琦 等.工程测试技术.兵器工业出版社,2009,第91-94页. * |
| 蝶翼式硅微陀螺数字测控系统的力平衡控制方法研究;郑鹏程;中国优秀硕士学位论文全文数据库 信息科技辑;20180415(2018年第04期);I140-764 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108507555A (en) | 2018-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108507555B (en) | MEMS micromechanical full decoupling closed-loop gyroscope | |
| CN104807454B (en) | A kind of single-chip integration six degree of freedom micro inertial measurement unit and its processing method | |
| CN101319899B (en) | Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope | |
| CN1948906B (en) | Capacitive type complete decoupling horizontal axis miniature mechanical gyro | |
| CN106970244B (en) | Multi-range MEMS closed-loop accelerometer | |
| CN208140130U (en) | MEMS (micro-electromechanical system) micro-mechanical fully-decoupled closed-loop gyroscope structure | |
| CN209746002U (en) | micromechanical MEMS accelerometer based on zero correction | |
| CN112284368A (en) | Fully-differential high-precision X-axis silicon micro-gyroscope | |
| CN220153593U (en) | Decoupling tuning fork silicon micromechanical gyroscope capable of realizing isolation of interference modes | |
| CN110095632B (en) | MEMS accelerometer based on zero correction | |
| CN116147599B (en) | Four-mass full-differential double-shaft MEMS gyroscope | |
| CN114088976B (en) | Comb gap adjustable MEMS accelerometer | |
| CN113686325B (en) | MEMS fully decoupled gyroscope | |
| CN117537794B (en) | Four-mass micromechanical gyroscope with driving and amplifying coupling structure | |
| CN112014597A (en) | Triaxial resonance capacitance type micro-electromechanical accelerometer | |
| CN1710383A (en) | Tuning-type micro electro-mechanical gyroscope | |
| CN113138292A (en) | Capacitance type micromechanical accelerometer | |
| CN116124110A (en) | In-plane torsion type four-mass MEMS gyroscope | |
| CN117330043A (en) | Gyroscope with lever | |
| CN113390403B (en) | Double-shaft silicon micro-gyroscope with single-element double decoupling | |
| CN104236536A (en) | Micro-mechanical three-axis angular velocity transducer | |
| CN109613301B (en) | Micro sensor capable of simultaneously measuring horizontal direction acceleration and angular velocity | |
| CN114034884A (en) | Multi-differential capacitance type acceleration sensor | |
| CN115235442B (en) | Decoupling type double-mass silicon micromechanical gyroscope structure with tuning fork type driving mechanism | |
| CN221404310U (en) | Single-axis gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |