US20130160496A1 - Method and device for producing rod lenses - Google Patents

Method and device for producing rod lenses Download PDF

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Publication number
US20130160496A1
US20130160496A1 US13/721,609 US201213721609A US2013160496A1 US 20130160496 A1 US20130160496 A1 US 20130160496A1 US 201213721609 A US201213721609 A US 201213721609A US 2013160496 A1 US2013160496 A1 US 2013160496A1
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US
United States
Prior art keywords
muffle
rod lens
producing
quartz glass
deposition process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/721,609
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English (en)
Inventor
Lothar Brehm
Frank Coriand
Wolfgang Schmidt
Ulrich Strobel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
J Plasma GmbH
Original Assignee
J Plasma GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by J Plasma GmbH filed Critical J Plasma GmbH
Assigned to J-PLASMA GMBH reassignment J-PLASMA GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BREHM, LOTHAR, CORIAND, FRANK, SCHMIDT, WOLFGANG, STROBEL, ULRICH
Publication of US20130160496A1 publication Critical patent/US20130160496A1/en
Priority to US14/938,069 priority Critical patent/US9738556B2/en
Abandoned legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1407—Deposition reactors therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/045—Tools or apparatus specially adapted for re-forming tubes or rods in general, e.g. glass lathes, chucks
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01884—Means for supporting, rotating and translating tubes or rods being formed, e.g. lathes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/02—Simple or compound lenses with non-spherical faces
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/21—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with molecular hydrogen
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/66—Relative motion

Definitions

  • the invention relates to a method for producing rod lenses with an enveloping diameter of the rod lens face of up to 200 mm and an edge length of at least 800 mm, using a flame hydrolysis method for producing a rod lens base element that is useable for producing the rod lens and a device for producing a rod lens base element.
  • Rod lenses are optical elements and devices that are formed from an elongated element that is transparent and in particular made from quartz glass.
  • the element has the following typical geometric configuration: edge length (L) ⁇ height (H) ⁇ thickness (D), wherein the light entry and exits surfaces are defined by L ⁇ H and wherein the edge length (L) is many times greater than the height (H).
  • edge dimensions (D) and (H) form the two legs of a right triangle, this yields the hypotenuse which simultaneously forms the diameter of the rod lens face.
  • the light entry- and exit surfaces are formed as planar, convex or concave functional surfaces through classic optical processing in L-direction and also in H-direction.
  • Rod lenses are used in display techniques, LED light source arrangements and optical imaging devices.
  • a rod lens base element is produced e.g. as a square rod which subsequently obtains the final shape of the rod lens through grinding and polishing processes.
  • the rod lens element made from synthetic quartz glass or the rod lens produced therefrom has to have a high degree of optical homogeneity over its entire length. In particular they have to be free from bubbles, enclosures, layers and cords.
  • the quartz glass should have an OH content ⁇ 1,000 ppm and a H 2 content ⁇ 0.8 ⁇ 10 18 mol/cm 3 .
  • quartz glass from multi stage melting processes is being used.
  • This means a prefabricated quartz glass element is finished through homogenization steps (DE 10 2005 043 289 B3) and/or additional loading of H 2 (DE 696 13 268 T3) in a complex manner.
  • the quartz glass cylinders thus created have to be thermally formed in an additional process.
  • This means the glass material is put into a mold that is made for example from graphite and subsequently brought to a softening—or flow temperature in a sinking kiln. The glass material thus sinks into the mold.
  • a glass surface is provided which is subsequently separated into particular rod lens elements. Due to the extreme rod lens geometry (L many times greater than H) multiple sinkings are required until the eventually desired shape of the rod lens element is achieved.
  • the sinking method recited supra requires precise control of a position of inhomogeneities within the glass cylinders. It has to be assured that inhomogeneities provided in the quartz glass cylinder, in particular possible layers do not change their orientations in the sinking processes so that the predetermined propagation direction of the light remains oriented perpendicular to these layers in the finished rod lens and does not influence the light propagation direction (D) of the rod lens over its entire edge length.
  • rod lenses are required that are relatively narrow relative to their height. These rod lenses have an edge length of approximately 800 mm and more. Furthermore the rod lenses which are exposed to intense laser irradiation have to have a florescence within the lens element that is as small as possible. In conjunction therewith a high degree of transmissivity of the lens element is required in the ultraviolet spectral range for various applications.
  • rod lenses with the required properties can only be produced through a sinking method in a very complex manner and only within a long production time.
  • precise control of uniform optical properties over the great length of the rod lens element causes problems.
  • the contact with the graphite mold also induces uncontrolled property changes of the glass.
  • Longer rod lens elements furthermore can only be produced in a multi stage process and thus in a time consuming manner.
  • complex finishing has to be performed upon the last sinking block which partially has to be performed with considerable material loses.
  • the graphite molds have a finite service life and their manufacture is expensive. Additionally, the quality of the glass material and the successful execution of the sinking method can eventually only be checked at the finished rod lens.
  • the object is achieved through a method for producing rod lenses with an enveloping diameter of the rod lens face of up to 200 mm and an edge length of at least 800 mm according to the teachings of claim 1 .
  • the object is furthermore achieved through the features of method claim 4 and through a device with the features of claim 5 .
  • the method according to claim 1 is characterized according to the invention in that a rod lens base element made from a synthetic quartz glass material in the form of a fused silica ingots is produced using a flame hydrolysis method. Thereafter a direct single stage deposition process of SIO x particles from a flame flow is provided to a rotating and moveable die.
  • a method of this type is already known from producing comparatively short and thick quartz glass cylinders and similar semi finished products. They are preferably finished into optical wafers and lithographic components, wherein in particular an immaculate and defined material structure is defined along the optical functional direction of the semi finished product or the optical component is important.
  • rod lens base element with the recited length and thickness can be produced using the flame hydrolysis method, wherein it is apparent in particular that the obtained rod lens elements are free from inhomogeneities not only over their cross sections, but additionally over their entire lengths.
  • the flame hydrolysis method does not relate to producing semi finished products that are free from inhomogeneities in longitudinal direction and is therefore not used either for producing long rod lens elements.
  • the rather long rod lens elements produced through this method have proven to be excellent base materials for further processing into finished rod lenses. This is important in particular because the method facilitates producing rod lens elements with excellent optical properties with comparatively large edge length with respect to the previously used sinking method in a rather short time in a continuous process, thus quasi on a conveyor belt in an exact manner.
  • the synthetic quartz glass deposited in the deposition process has an OH-content of more than 1,000 ppm.
  • it is a synthetic quartz glass with a comparatively high content of OH groups and hydrogen in which laser induced florescence is suppressed.
  • the method is performed so that the synthetic quartz glass deposited in the deposition process has a maximum transmissivity for ultraviolet radiation in the wave length range of approximately 193-400 nm.
  • Another aspect of the invention includes using a flame hydrolysis method with a direct single stage deposition process of SiO x particles from a flame stream onto a rotating and moveable die for producing a rod lens element for producing a rod lens.
  • a muffle kiln with a multi shell tubular or tunnel shaped muffle is provided with a burner inserted from a first side into the muffle with a supply for a silicon containing reaction agent and a moveable die that is arranged opposite to the burner.
  • the device is characterized in that the muffle has a muffle geometry with a distance between the enveloping surface of a formed FS ingot and an inner wall of the muffle in a range of 40-75 mm and a distance between the muffle and the melting surface of the FS ingot between 10 and 25 mm and the muffle has a vent air controlled kiln temperature of 1,100 to 1,300° C.
  • the muffle includes a temperature stabilizing lateral oven extension with a length of at least 50 mm.
  • FIGS. 1 and 2 are being used for further illustration. Identical reference numerals are being used in the figures for identical or equivalent components wherein:
  • FIG. 1 illustrates a basic muffle configuration
  • FIG. 2 illustrates an oven extension
  • the proposed flame hydrolysis method is performed in a muffle oven.
  • the muffle oven includes a configuration that is known for ovens of this type. It is made from a tubular or tunnel shaped muffle 1 in which the deposition process is performed.
  • the muffle has a multi shell wall configuration from a porous heat insulating material 1 a , in particular a fibrous and/or ceramic material, a concrete- or fire brick wall 1 b and an inner fairing 1 c made from a material that is sufficiently resistant with respect to high temperatures in particular aluminum oxide or silicon carbide.
  • the muffle 1 has respective openings at its ends. One of the two openings is used for inserting a die 4 .
  • the opposite opening includes a burner 2 inserted therein which can also be configured with plural flames.
  • the burner 2 is configured with a feed line 3 for a reactant that includes silicon which is introduced in gaseous form into the burner portion and oxidized into silicon oxide SiO x .
  • the silicon oxide particles thus formed are driven in the flame stream towards the die 4 and deposit on the die.
  • the die 4 is rotatably supported, so that an even coverage of the die surface is provided with the particle flow. This forms a growing layer of synthetically generated quartz glass in the form of a fused silica ingot (FS-ingot) 5 on the surface of the die 4 .
  • FS-ingot fused silica ingot
  • the process is run so that the distance between the flame portions of the burner 2 and the surface of the forming quartz glass layer is substantially maintained constant.
  • the die 4 is pulled back with a continuous speed so that a quartz glass cylinder or the FS-ingot 5 forms with an increasing length on the die 4 .
  • It represents the forming rod lens base element which can be removed, cooled tested and subsequently be directly used as a semi finished product for producing one or plural rod lenses immediately after the deposition process is completed.
  • the method provides high temperature uniformity over the entire deposition process and for large portions of the rod lens element.
  • a melting length that is as long as possible in the FS ingot is important, wherein inhomogeneitites can be effectively prevented in longitudinal direction of the FS-Ingot.
  • Kiln temperatures in a range of 1,100-1,300° C. have proven advantageous, wherein the temperature is controlled through adjustment and monitoring of the exhaust air temperature.
  • an exhaust air temperature of 230-270° C. has proven useful.
  • the distance b between the muffle inner wall and the melting surface of the deposited FS-ingot is preferably kept constant through a light beam monitoring. Distances of 10-25 mm have proven useful.
  • Adjusting and preselecting a reproducible reaction cavity volume between the forming FS ingot and the muffle inside is advantageous.
  • respective different muffle geometries are used which provide a distance a between the enveloping surface of the FS-ingot and the muffle inner wall in a range of 40-75 mm.
  • an adapted and variably configured extension 7 of the oven cavity is advantageous which laterally connects to the actual muffle 1 .
  • An oven extension of this type is illustrated in FIG. 2 .
  • the oven extension additionally contributes to temperature consistency in the muffle cavity.
  • the extension includes for example a length L of approximately 50-250 mm.
  • Typical lengths of the rod length element are at least at 800 mm and can be 1500 mm and more without problems.
  • the edge length L is many times greater than the height H or the thickness D for comparatively normal rod lenses.
  • the synthetic quartz glass of the finished rod lens element is completely homogenous over its entire length without bubbles, layers, inclusions and cords. It includes a high content of OH groups of at least 1,000 ppm, in particular 1,200 ppm and more.
  • the content of molecular hydrogen H 2 is above 0.8 ⁇ 10 18 molecules per cm 3 , typically 1.2 ⁇ 10 18 molecules per cm 3 .
  • the value of the stress double refraction is less than 5 nm/cm and is typically below 3 nm/cm. In axial direction a high refractive index homogeneity with a deviation of 4 ⁇ 10 ⁇ 6 and less is achieved.
  • the glass material has a maximum transmissivity for light in the ultra violet spectral range, this means in a range of 193 to 400 nm over its entire length. Simultaneously this suppresses undesirable fluorescences under the influence of irradiated laser light in the finished rod lens.
  • rod lens base element quartz glass cylinder (rod lens base element) which are essential identical with respect to their material properties irrespective from which section of the original cylinder the eventually provided rod lens has been cut.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Glass Compositions (AREA)
  • Glass Melting And Manufacturing (AREA)
US13/721,609 2011-12-23 2012-12-20 Method and device for producing rod lenses Abandoned US20130160496A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US14/938,069 US9738556B2 (en) 2011-12-23 2015-11-11 Method and device for producing rod lenses

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102011122184.4 2011-12-23
DE102011122184 2011-12-23
DE102012000418A DE102012000418A1 (de) 2011-12-23 2012-01-12 Verfahren zum Herstellen von Stablinsen und Vorrichtung hierfür
DE102012000418.4 2012-01-12

Related Child Applications (1)

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US14/938,069 Continuation US9738556B2 (en) 2011-12-23 2015-11-11 Method and device for producing rod lenses

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US20130160496A1 true US20130160496A1 (en) 2013-06-27

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US13/721,609 Abandoned US20130160496A1 (en) 2011-12-23 2012-12-20 Method and device for producing rod lenses
US14/938,069 Active US9738556B2 (en) 2011-12-23 2015-11-11 Method and device for producing rod lenses

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US (2) US20130160496A1 (de)
EP (1) EP2607325B1 (de)
JP (1) JP5763612B2 (de)
KR (1) KR20130073846A (de)
DE (1) DE102012000418A1 (de)
IL (1) IL223764A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10207470B2 (en) 2013-12-20 2019-02-19 Dexerials Corporation Cylindrical base, master and master manufacturing method

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Publication number Priority date Publication date Assignee Title
CN111320360A (zh) * 2020-03-04 2020-06-23 广州精点科技有限公司 一种用于光学镜片热压成型的自动化上下料的装置

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US6423656B1 (en) * 1997-03-07 2002-07-23 Schott Ml Gmbh Synthetic quartz glass preform
US20020144517A1 (en) * 1997-05-14 2002-10-10 Nikon Corporation Synthetic silica glass optical member and method of manufacturing the same
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US20100167906A1 (en) * 2008-12-29 2010-07-01 Lars Ortmann Process of making a dense synthetic silica glass, a muffle furnace for performing the process, and silica glass obtained from said process
US20120213685A1 (en) * 2009-10-30 2012-08-23 Asahi Glass Company, Limited Optical member for deep ultraviolet and process for producing same
US20120291488A1 (en) * 2007-05-15 2012-11-22 Opto-Electronics Laboratory, Inc. Copper-contaning silica glass, method for producing the same, and xenon flash lamp using the same

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US4421540A (en) * 1980-12-12 1983-12-20 Nippon Telegraph & Telephone Public Corporation System for producing an optical fiber preform with gas volume control
US5086352A (en) * 1989-06-09 1992-02-04 Shin-Etsu Quartz Products Co., Ltd. Optical members and blanks or synthetic silica glass and method for their production
US5908482A (en) * 1995-01-06 1999-06-01 Nikon Corporation Method for producing a silica glass
US6518210B1 (en) * 1995-01-06 2003-02-11 Nikon Corporation Exposure apparatus including silica glass and method for producing silica glass
US6423656B1 (en) * 1997-03-07 2002-07-23 Schott Ml Gmbh Synthetic quartz glass preform
US20020144517A1 (en) * 1997-05-14 2002-10-10 Nikon Corporation Synthetic silica glass optical member and method of manufacturing the same
US6473226B1 (en) * 1999-06-21 2002-10-29 Nikon Corporation Silica glass member
US20070049482A1 (en) * 2005-08-11 2007-03-01 Shin-Etsu Chemical Co., Ltd. Synthetic quartz glass substrate for excimer lasers and making method
US20080115533A1 (en) * 2006-09-07 2008-05-22 Shin-Etsu Chemical Co., Ltd. Manufacture of synthetic quartz glass ingot and synthetic quartz glass member
US20120291488A1 (en) * 2007-05-15 2012-11-22 Opto-Electronics Laboratory, Inc. Copper-contaning silica glass, method for producing the same, and xenon flash lamp using the same
US20100167906A1 (en) * 2008-12-29 2010-07-01 Lars Ortmann Process of making a dense synthetic silica glass, a muffle furnace for performing the process, and silica glass obtained from said process
US20120213685A1 (en) * 2009-10-30 2012-08-23 Asahi Glass Company, Limited Optical member for deep ultraviolet and process for producing same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10207470B2 (en) 2013-12-20 2019-02-19 Dexerials Corporation Cylindrical base, master and master manufacturing method
US11090886B2 (en) 2013-12-20 2021-08-17 Dexerials Corporation Cylindrical base, master and master manufacturing method
US12097675B2 (en) 2013-12-20 2024-09-24 Dexerials Corporation Cylindrical base, master and master manufacturing method

Also Published As

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US20160060155A1 (en) 2016-03-03
JP5763612B2 (ja) 2015-08-12
DE102012000418A1 (de) 2013-06-27
EP2607325B1 (de) 2019-08-21
EP2607325A1 (de) 2013-06-26
KR20130073846A (ko) 2013-07-03
IL223764A (en) 2017-05-29
US9738556B2 (en) 2017-08-22
JP2013133277A (ja) 2013-07-08

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