JPS56157067A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS56157067A
JPS56157067A JP6018580A JP6018580A JPS56157067A JP S56157067 A JPS56157067 A JP S56157067A JP 6018580 A JP6018580 A JP 6018580A JP 6018580 A JP6018580 A JP 6018580A JP S56157067 A JPS56157067 A JP S56157067A
Authority
JP
Japan
Prior art keywords
substrate
electrode
type gaas
layer
rear side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6018580A
Other languages
Japanese (ja)
Inventor
Tatsuo Tokue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6018580A priority Critical patent/JPS56157067A/en
Publication of JPS56157067A publication Critical patent/JPS56157067A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/80Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE:To make a substrate have a structure in which a source bonding pad is removed from the surface of the substrate, to effectively utilize a chip area and to improve the reliability by a method wherein a source electrode is taken from the rear side of the substrate. CONSTITUTION:An N type GaAs layer 16 and a high density P type GaAs layer 17 are formed on a high density P type GaAs substrate 15. Then, an insulating film 18 is formed, the source electrode 19 and a drain electrode 20 are formed, and metal and the semiconductor are made alloy. In the following, a gate electrode 22 and an outgoing electrode 21 of a drain are formed by the same metal, and finally, a good conductor metallic layer such as an Au layer is formed all over the rear side of the semiconductor substrate.
JP6018580A 1980-05-07 1980-05-07 Semiconductor device Pending JPS56157067A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6018580A JPS56157067A (en) 1980-05-07 1980-05-07 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6018580A JPS56157067A (en) 1980-05-07 1980-05-07 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS56157067A true JPS56157067A (en) 1981-12-04

Family

ID=13134843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6018580A Pending JPS56157067A (en) 1980-05-07 1980-05-07 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56157067A (en)

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