JPS51151177A - Electron beam energy analyser - Google Patents

Electron beam energy analyser

Info

Publication number
JPS51151177A
JPS51151177A JP50074501A JP7450175A JPS51151177A JP S51151177 A JPS51151177 A JP S51151177A JP 50074501 A JP50074501 A JP 50074501A JP 7450175 A JP7450175 A JP 7450175A JP S51151177 A JPS51151177 A JP S51151177A
Authority
JP
Japan
Prior art keywords
electron beam
beam energy
energy analyser
analyser
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50074501A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Akira Tonomura
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50074501A priority Critical patent/JPS51151177A/en
Publication of JPS51151177A publication Critical patent/JPS51151177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: An energy analyser to directly obtain electron beam density distribution of images energitically analysed using an image rotation lens as a projection lens.
COPYRIGHT: (C)1976,JPO&Japio
JP50074501A 1975-06-20 1975-06-20 Electron beam energy analyser Pending JPS51151177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50074501A JPS51151177A (en) 1975-06-20 1975-06-20 Electron beam energy analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50074501A JPS51151177A (en) 1975-06-20 1975-06-20 Electron beam energy analyser

Publications (1)

Publication Number Publication Date
JPS51151177A true JPS51151177A (en) 1976-12-25

Family

ID=13549112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50074501A Pending JPS51151177A (en) 1975-06-20 1975-06-20 Electron beam energy analyser

Country Status (1)

Country Link
JP (1) JPS51151177A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104549A (en) * 1984-10-29 1986-05-22 Jeol Ltd Electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104549A (en) * 1984-10-29 1986-05-22 Jeol Ltd Electron microscope

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