JPS5219958A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5219958A
JPS5219958A JP9635475A JP9635475A JPS5219958A JP S5219958 A JPS5219958 A JP S5219958A JP 9635475 A JP9635475 A JP 9635475A JP 9635475 A JP9635475 A JP 9635475A JP S5219958 A JPS5219958 A JP S5219958A
Authority
JP
Japan
Prior art keywords
electron microscope
scanning electron
enhance
analytic capability
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9635475A
Other languages
Japanese (ja)
Inventor
Shizuya Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9635475A priority Critical patent/JPS5219958A/en
Publication of JPS5219958A publication Critical patent/JPS5219958A/en
Pending legal-status Critical Current

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  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To enhance analytic capability of a scanning electron microscope.
COPYRIGHT: (C)1977,JPO&Japio
JP9635475A 1975-08-07 1975-08-07 Scanning electron microscope Pending JPS5219958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9635475A JPS5219958A (en) 1975-08-07 1975-08-07 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9635475A JPS5219958A (en) 1975-08-07 1975-08-07 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5219958A true JPS5219958A (en) 1977-02-15

Family

ID=14162647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9635475A Pending JPS5219958A (en) 1975-08-07 1975-08-07 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5219958A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61249024A (en) * 1985-04-26 1986-11-06 Canon Inc Liquid crystal optical element
JPS63127056U (en) * 1987-02-12 1988-08-19

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5014267A (en) * 1973-06-06 1975-02-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5014267A (en) * 1973-06-06 1975-02-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61249024A (en) * 1985-04-26 1986-11-06 Canon Inc Liquid crystal optical element
JPH0422492B2 (en) * 1985-04-26 1992-04-17 Canon Kk
JPS63127056U (en) * 1987-02-12 1988-08-19

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