JPS53145476A - Electron beam exposure apparatus - Google Patents

Electron beam exposure apparatus

Info

Publication number
JPS53145476A
JPS53145476A JP6013177A JP6013177A JPS53145476A JP S53145476 A JPS53145476 A JP S53145476A JP 6013177 A JP6013177 A JP 6013177A JP 6013177 A JP6013177 A JP 6013177A JP S53145476 A JPS53145476 A JP S53145476A
Authority
JP
Japan
Prior art keywords
electron beam
exposure apparatus
beam exposure
slit
squarebeams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6013177A
Other languages
Japanese (ja)
Other versions
JPS548073B2 (en
Inventor
Hidekazu Goto
Takashi Soma
Masanori Idesawa
Sakae Miyauchi
Kazumitsu Tanaka
Teruo Someya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
RIKEN Institute of Physical and Chemical Research
Original Assignee
Jeol Ltd
Nihon Denshi KK
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, RIKEN Institute of Physical and Chemical Research filed Critical Jeol Ltd
Priority to JP6013177A priority Critical patent/JPS53145476A/en
Publication of JPS53145476A publication Critical patent/JPS53145476A/en
Publication of JPS548073B2 publication Critical patent/JPS548073B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To improve the sharpness of squarebeams by forming reduced image of a first slit on a second slit.
COPYRIGHT: (C)1978,JPO&Japio
JP6013177A 1977-05-24 1977-05-24 Electron beam exposure apparatus Granted JPS53145476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6013177A JPS53145476A (en) 1977-05-24 1977-05-24 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6013177A JPS53145476A (en) 1977-05-24 1977-05-24 Electron beam exposure apparatus

Publications (2)

Publication Number Publication Date
JPS53145476A true JPS53145476A (en) 1978-12-18
JPS548073B2 JPS548073B2 (en) 1979-04-12

Family

ID=13133264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6013177A Granted JPS53145476A (en) 1977-05-24 1977-05-24 Electron beam exposure apparatus

Country Status (1)

Country Link
JP (1) JPS53145476A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0542480Y2 (en) * 1988-09-22 1993-10-26

Also Published As

Publication number Publication date
JPS548073B2 (en) 1979-04-12

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