JP5566675B2 - Memory semiconductor device, manufacturing method thereof, and operation method - Google Patents

Description

  The present invention relates to a semiconductor device, a manufacturing method thereof, and an operation method.

  In order to satisfy the excellent performance and low price demanded by consumers, it is required to increase the degree of integration of semiconductor devices. In the case of a memory semiconductor device, the degree of integration is an important factor that determines the price of a product, and thus an increased degree of integration is required. In the case of a conventional two-dimensional or planar memory semiconductor device, the degree of integration is largely determined by the area occupied by a unit memory cell, and thus greatly affects the level of fine pattern formation technology. However, in order to make a pattern finer, very expensive equipment is required. Therefore, the integration degree of a two-dimensional memory semiconductor device is increasing, but it is still limited.

JP 2007-180389 A JP 2005-268438 A Korean Patent Application Publication 2006-89547 Specification

  The present invention has been made in view of the above-described problems, and an object thereof is to provide a memory semiconductor device having an increased degree of integration.

  Another object of the present invention is to provide a method of manufacturing a memory semiconductor device having an increased degree of integration.

  Another object of the present invention is to provide a method of operating a memory semiconductor device having an increased degree of integration.

  In order to achieve the above-described object, a memory semiconductor device according to an aspect of the present invention includes a plurality of semiconductor patterns arranged two-dimensionally having a long axis perpendicular to the upper surface of a substrate, and the plurality of semiconductor patterns. It includes a plurality of word lines that have a long axis across and are three-dimensionally arranged between the semiconductor patterns.

  According to an embodiment, an information storage film pattern (for example, a charge storage film) interposed between the semiconductor pattern and the word line may be further included.

  According to one embodiment, the word line is configured to control the potential of the semiconductor pattern adjacent thereto. Alternatively, the arrangement structure of word lines arranged in the same layer may be substantially the same as the arrangement structure of word lines arranged in another layer.

  According to one embodiment, the memory semiconductor device includes a common source electrode that electrically connects lower regions of the plurality of semiconductor patterns, and an upper region of the plurality of semiconductor patterns along a direction crossing the word line. Can further be included.

  According to an embodiment, the substrate may be a semiconductor substrate including an impurity diffusion region. In this case, the impurity diffusion region serves as a common source electrode that electrically connects lower ends of the plurality of semiconductor patterns. Can be used.

  According to an embodiment, a conductive film used as a common source electrode may be formed between the substrate and the word line.

  According to an embodiment, a conductive pattern parallel to the word line used as a common source electrode may be further formed between the plurality of word lines.

  The substrate may include a cell array region and a core region formed around the cell array region. In this case, the upper surface of the substrate may be lower in the cell array region than in the core region. According to an embodiment, each of the word lines may include a wiring section parallel to the upper surface of the substrate and a contact section inclined to the upper surface of the substrate. At this time, the contact section may be formed in a region adjacent to the core region of the cell array region. The word line is formed such that a contact section thereof is separated from the core region as the wiring section is further away from the upper surface of the substrate. According to an embodiment, the upper surface of the contact section of the word line may be formed at substantially the same height.

  According to another aspect of the present invention, there is provided a memory semiconductor device including a lower wiring, at least one upper wiring disposed on the lower wiring, and a plurality of intermediate wirings stacked in order. At least one intermediate wiring structure disposed between a lower wiring and the upper wiring; at least one semiconductor pattern disposed on a side surface of the intermediate wiring structure and connecting the lower wiring and the upper wiring; And at least one information storage pattern disposed between the semiconductor pattern and the intermediate wiring structure.

  According to an embodiment, each of the intermediate wirings may have a line pattern intersecting with the upper wiring.

  According to an embodiment of the present invention, the semiconductor pattern includes an upper impurity region connected to the upper wiring, and a channel region that is disposed on a sidewall of the intermediate wiring structure and connects the upper impurity region and the lower wiring. Can be included. At this time, the channel region may have a conductivity type different from that of the upper impurity region or may be undoped. According to an embodiment, transmission of a voltage applied to the upper wiring and the lower wiring to the channel region can be controlled by a pair of intermediate wirings closest to each of the upper wiring and the lower wiring.

  According to another aspect of the present invention, there is provided a method of manufacturing a memory semiconductor device comprising: at least one intermediate wiring structure including insulating film patterns and intermediate wirings that are sequentially and repeatedly stacked. Forming. Specifically, the method includes forming the intermediate wiring structure on a substrate, forming at least one information storage film pattern covering at least a sidewall of the intermediate wiring structure, and at least one semiconductor pattern, The method may include forming at least one bit line connected to the semiconductor pattern and crossing the intermediate wiring.

  According to another aspect of the present invention, there is provided an operation method for driving a memory semiconductor device according to the present invention, comprising: a semiconductor pattern having a long axis perpendicular to an upper surface of a substrate; It includes word lines that are three-dimensionally arranged between the semiconductor patterns while having a long axis across the semiconductor patterns. Specifically, in the memory semiconductor device, the common source electrode that electrically connects the lower regions of the plurality of semiconductor patterns and the upper region of the plurality of semiconductor patterns along the direction crossing the word line are electrically connected. The operating method may include an electrical connection between the semiconductor pattern and the common source electrode or the bit line by controlling the potential of the semiconductor pattern using a voltage applied to the word line. A step of controlling the coupling can be included.

  According to the embodiment of the present invention, a plurality of word lines arranged three-dimensionally have a long axis perpendicular to them, and are arranged between a plurality of semiconductor patterns arranged two-dimensionally. Since the plurality of word lines are arranged three-dimensionally, the memory device according to the present invention not only has an increased degree of integration, but each memory cell can be controlled independently.

  On the other hand, some methods for realizing a three-dimensional memory cell by sequentially stacking a plurality of memory cells arranged two-dimensionally have been proposed. However, since such a method is based on repeated process steps, the manufacturing costs are greatly increased. However, according to the present invention, a plurality of word lines and a plurality of semiconductor patterns used as channel regions are actually formed through one process step. Therefore, according to the present invention, a three-dimensionally arranged memory device can be manufactured without a significant increase in manufacturing cost due to an increase in process steps.

1 is a perspective view showing a semiconductor device according to an embodiment of the present invention. It is process sectional drawing for demonstrating the information storage pattern by one Embodiment of this invention. 1 is a circuit diagram for explaining a cell array structure of a memory semiconductor device according to an embodiment of the present invention; 1 is a perspective view showing a part of a cell array of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. It is a perspective view for explaining a manufacturing method of a memory semiconductor device according to an embodiment of the present invention. FIG. 5 is a circuit diagram illustrating a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIG. 5 is a perspective view illustrating a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIG. 5 is a circuit diagram for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. It is a perspective view for demonstrating the manufacturing method of the semiconductor device by other embodiment of this invention. It is a perspective view for demonstrating the manufacturing method of the semiconductor device by other embodiment of this invention. It is a perspective view for demonstrating the electrical connection structure of the some intermediate wiring by embodiment of this invention. It is a perspective view for demonstrating the electrical connection structure of the some intermediate wiring by embodiment of this invention. It is a perspective view for explaining an electrical connection structure of a plurality of lower wirings according to an embodiment of the present invention. It is a perspective view for explaining an electrical connection structure of a plurality of lower wirings according to an embodiment of the present invention. It is a perspective view for explaining an electrical connection structure of a plurality of lower wirings according to an embodiment of the present invention. It is a perspective view for explaining an electrical connection structure of a plurality of lower wirings according to an embodiment of the present invention. FIG. 10 is a perspective view for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIG. 5 is a circuit diagram for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIG. 10 is a perspective view for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIG. 10 is a plan view illustrating a cell array structure of a memory semiconductor device according to another embodiment of the present invention. 1 is a block diagram schematically illustrating an embodiment of a memory card including a flash memory device according to the present invention. 1 is a block diagram schematically illustrating an embodiment of a memory card including a flash memory device according to the present invention.

  The above and other objects, features, and advantages of the present invention will be easily understood through the following preferred embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein, but can be embodied in other forms. The embodiments introduced herein are provided so that the disclosed contents will be thorough and complete, and to fully convey the spirit of the present invention to those skilled in the art.

  As used herein, when any film is referred to as being on a different film or substrate, it can be formed directly on a different film or substrate, or a third film can be interposed therebetween. means. In the drawings, the thicknesses of the films and regions are exaggerated for effective explanation of technical contents. Also, in various embodiments of the present specification, terms such as first, second, and third are used to describe various regions, films, and the like. Must not be limited. These terms are only used to distinguish any given region or film from other regions or films. Thus, a film quality referred to in one embodiment of the first film quality may be referred to as a second film quality in other embodiments. Each embodiment described and illustrated herein includes its complementary embodiments.

  FIG. 1 is a perspective view showing a semiconductor device according to an embodiment of the present invention.

  Referring to FIG. 1, the intermediate wiring structure 200 is disposed on the substrate 10. The intermediate wiring structure 200 includes a plurality of insulating film patterns 131, 132, 133, 134, and 135 and a plurality of intermediate wirings 141, 142, 143, and 144 that are repeatedly stacked in order. At least one semiconductor pattern 65 is disposed on the sidewall of the intermediate wiring structure 200, and an information storage pattern 55 is disposed between the semiconductor pattern 65 and the intermediate wiring structure 200. A lower wiring 20 connecting a plurality of lower regions of the semiconductor pattern 65 is disposed between the semiconductor pattern 65 and the substrate 10, and an upper portion of the intermediate wiring structure 200 is connected to the plurality of semiconductor patterns 65. An upper wiring 75 to be connected can be arranged.

  The substrate 10 may include at least one of a semiconductor, a conductive material, and an insulating material. According to an embodiment, the substrate 10 may be a single crystal silicon film, and the lower wiring 20 may be an impurity diffusion region formed in the substrate 10. In this case, the impurity diffusion regions used as the substrate 10 and the lower wiring 20 may have different conductivity types.

  The semiconductor pattern 65 may be a single crystal semiconductor or a polycrystalline semiconductor. At this time, when the lower wiring 20 is an impurity diffusion region, the semiconductor pattern 65 may have a conductivity type different from that of the lower wiring 20 so as to form a diode with the lower wiring 20. According to an exemplary embodiment, the semiconductor pattern 65 may be an undoped semiconductor.

  Meanwhile, as will be described with reference to FIGS. 20 and 21, the lower wiring 20 may be formed of a conductive material. In this case, the semiconductor pattern 65 may be formed as a rectifier such as a diode. It has at least two parts having different conductivity types. For example, a partial region (hereinafter referred to as a main body portion) B of the semiconductor pattern 65 disposed around the plurality of intermediate wirings 141 to 144 is another region (source region) of the semiconductor pattern 65 in contact with the lower wiring 20. ) And the conductivity type. In addition, a part (hereinafter referred to as a drain region) D of the upper region of the semiconductor pattern 65 may be formed to have a conductivity type different from that of the main body B.

  As shown, the semiconductor pattern 65 extends from one side surface of the intermediate wiring structure 200 and can be connected to another semiconductor pattern 65 disposed on the other side surface of the intermediate wiring structure 200. In this case, the semiconductor pattern 65 is also disposed on the upper surface of the intermediate wiring structure 200, and the upper wiring 75 is formed on the upper surface of the intermediate wiring structure 200 through a predetermined plug 70. The semiconductor pattern 65 can be connected.

  The plurality of intermediate wires 141 to 144 may be at least one of a plurality of conductive materials. For example, the plurality of intermediate wirings 141 to 144 may include at least one of a doped semiconductor, a plurality of metals, a plurality of metal nitrides, and a metal silicide. At this time, the intermediate wires 141 to 144 may be formed in a direction intersecting with the upper wire 75.

  According to an aspect of the present invention, the plurality of intermediate wirings 141 to 144 can control the electrical connection between the upper wiring 75 and the lower wiring 20 by controlling the potential of the semiconductor pattern 65. More specifically, the semiconductor pattern 65 can be configured as a MOS capacitor by capacitively coupling with the intermediate wirings 141 to 144. In this case, the voltage applied to the intermediate wirings 141 to 144 can variably control the potential of the semiconductor pattern 65 adjacent thereto, and the energy band of the semiconductor pattern 65 is set to the intermediate wirings 141 to 144. Inversion can be made according to the voltage applied to 144. Therefore, the electrical connection between the upper wiring 75 and the lower wiring 20 can be controlled by a voltage applied to the plurality of intermediate wirings 141 to 144 constituting the intermediate wiring structure 200.

  On the other hand, such electrical connection is possible when a plurality of regions that are inverted on the side surfaces of the plurality of intermediate wires 141 to 144 are overlapped with each other. The insulating film patterns 132 to 134 between the plurality of intermediate wirings 141 to 144 are formed with a thickness smaller than twice the maximum width of the inverted region so that the plurality of inversion regions can overlap with each other. it can. The insulating film patterns 131 to 135 may be at least one of a plurality of insulating materials, and may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. However, since the uppermost insulating film pattern 135 can be used as an etching mask in a subsequent patterning process, the uppermost insulating film pattern 135 can be formed to be thicker than the other insulating film patterns 131 to 134. In addition, according to the embodiment of the present invention of the flash memory device, a high voltage causing a breakdown phenomenon between the substrate 10 and the lower wiring 20 can be applied to the lowermost intermediate wiring 141. Therefore, the lowermost insulating film pattern 131 can be formed to be thicker than the plurality of insulating film patterns 131 to 134 interposed between the plurality of intermediate wirings 141 to 144 as shown.

  According to another aspect of the present invention, the intermediate wires 141 to 144 can be used together with the semiconductor pattern 65 to change information stored in the information storage pattern 55. According to the aspect of the present invention described above, when the voltage applied to each of the plurality of intermediate wirings 141 to 144 is independently adjusted, the semiconductor pattern 65 on the side surface of the predetermined intermediate wiring is the upper wiring 75 or the It can be selectively connected to one of the lower wirings 20. In other words, a partial region of the semiconductor pattern 65 facing a predetermined intermediate wiring (for example, 142) is formed by the upper wiring 75 or the lower wiring according to the voltage applied to the other plurality of intermediate wirings 141, 143, and 144. The wiring 20 can be equipotential. Accordingly, when a voltage different from that of the upper wiring 75 or the lower wiring 20 is applied to the selected intermediate wiring 142, a potential difference that can be used to change information can be generated at both ends of the corresponding information storage pattern 55. .

  According to an aspect of the present invention, the information storage pattern 55 can be used as a capacitor dielectric film constituting a MOS transistor together with the semiconductor pattern 65 and the intermediate wirings 141 to 144. Therefore, the information storage pattern 55 includes at least one of insulating materials.

  According to another aspect of the present invention, the information storage pattern 55 may constitute a MOS transistor together with the semiconductor pattern 65 and the intermediate wires 141 to 144. In this case, the semiconductor pattern 65 is used as a channel region, the intermediate wirings 141 to 144 are used as gate electrodes, and the information storage pattern 55 is used as a gate insulating film. At this time, a partial region of the semiconductor pattern 65 on the side surface of the insulating film pattern 55 is inverted by a voltage applied to the intermediate wirings 141 to 144, so that it can be used as a source / drain electrode of the MOS transistor. Since the semiconductor pattern 65 is disposed on the sidewalls of the plurality of intermediate wirings 141 to 144, the current direction of the MOS transistor using the semiconductor pattern 65 as a channel region is perpendicular to the upper surface of the substrate 10.

  The information storage pattern 55 includes an insulating material and may include at least one of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, and a high dielectric film. At this time, the high dielectric film means a plurality of insulating materials having a higher dielectric constant than the silicon oxide film, and includes a tantalum oxide film, a titanium oxide film, a hafnium oxide film, a zirconium oxide film, an aluminum oxide film, and an yttrium oxide film. A film, a niobium oxide film, a cesium oxide film, an indium oxide film, an iridium oxide film, a BST film, and a PZT film can be included.

  FIG. 2 is a cross-sectional view for explaining an information storage pattern according to an embodiment of the present invention.

  Referring to FIG. 2, the information storage pattern 55 includes a tunnel insulating film 55a adjacent to the semiconductor pattern 65, a blocking insulating film 55c adjacent to the intermediate wiring structure 200, the tunnel insulating film 55a, and the blocking insulating. A charge storage film 55b interposed between the film 55c and the film 55c can be included.

  At this time, the blocking insulating film 55c may include at least one of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, and a high dielectric film, and according to one embodiment, a multilayer including a high dielectric film. It can be a thin film. The tunnel insulating film 55a may be formed of a material having a dielectric constant lower than that of the blocking insulating film 55c, and the charge storage film 55b may be an insulating thin film (for example, silicon nitride film) rich in charge trap sites or a plurality of charge storage films 55b. Insulating thin film including the conductive particles. According to an embodiment, the tunnel insulating film 55a may be a silicon oxide film, the charge storage film 55b may be a silicon nitride film, and the blocking insulating film 55c may be an insulating film including an aluminum oxide film. . In this case, the intermediate wires 141 to 144 may include a tantalum nitride film.

  FIG. 3 is a circuit diagram for explaining a cell array structure of the memory semiconductor device according to the embodiment of the present invention.

  Referring to FIG. 3, the memory semiconductor device according to the present embodiment includes a plurality of bit lines BL, a common source electrode CSL, and a plurality of semiconductor patterns 65 that connect each of the plurality of bit lines BL and the common source electrode CSL. , Including a plurality of intermediate wirings 140 across the plurality of bit lines BL while facing the plurality of semiconductor patterns 65. A rectifying element may be disposed between the semiconductor pattern 65 and the bit line BL or the common source electrode CSL. An information storage body can be disposed between the intermediate wiring 140 and the semiconductor pattern 65. According to one embodiment, the information storage body may include a charge storage thin film as described with reference to FIG.

  The unit memory cell UC of the memory semiconductor device according to this embodiment includes the semiconductor pattern 65, one intermediate wiring 140 facing the semiconductor pattern 65, and an information storage body interposed therebetween. At this time, a plurality of intermediate lines 140 facing one semiconductor pattern 65 are sequentially disposed between the bit line BL and the common source electrode CSL. Accordingly, the plurality of unit memory cells UC sharing one semiconductor pattern 65 connect the bit line BL and the common source electrode CSL in series. The cell string STR of the memory semiconductor device according to this embodiment includes the bit line BL, the common source electrode CSL, and the plurality of unit memory cells UC connected in series therebetween.

  According to an embodiment, the intermediate line closest to the bit line BL can be used as an upper selection line USL that controls electrical connection between the cell string STR and the bit line BL. In addition, the intermediate line closest to the common source electrode CSL can be used as a lower selection line LSL for controlling electrical connection between the cell string STR and the common source electrode CSL. The plurality of intermediate lines 140 between the upper and lower selection lines USL and LSL can be used as a plurality of word lines WL used for changing information of the unit memory cell UC. For simplicity, two word lines are illustrated in the drawing, but the cell string STR may include a larger number of word lines.

  The plurality of word lines WL can be connected to a plurality of global word lines GWL. At this time, each of the word lines WL constituting one cell string STR is connected to different global word lines GWL. According to one embodiment, as shown, the global word line GWL is disposed in a direction parallel to the bit line BL to electrically connect the word lines WL. On the other hand, when the global word line GWL and the bit line BL are parallel to each other, the upper selection line USL and the lower selection line LSL are used to select the unit memory cell UC. It can be formed in a direction across BL.

  FIG. 4 is a perspective view showing a part of the cell array of the memory semiconductor device according to the embodiment of the present invention. The memory semiconductor device according to this embodiment has the technical features of the present invention described in the embodiment with reference to FIG. 1 and FIG. Therefore, in order to simplify the description, the description of the overlapping technical features can be omitted.

  Referring to FIG. 4, the memory semiconductor device according to the present embodiment includes a plurality of intermediate wiring structures 200 disposed on the substrate 10. The plurality of intermediate wiring structures 200 may be arranged in parallel to each other, and each of them includes a plurality of insulating film patterns 131 to 135 and a plurality of intermediate wirings 141 to 144 that are sequentially and repeatedly stacked. Can be included.

  A plurality of semiconductor patterns 65 crossing the plurality of intermediate wiring structures 200 may be disposed on both side surfaces of the plurality of intermediate wiring structures 200. According to an exemplary embodiment, the semiconductor patterns 65 may be connected to each other on the top surfaces of the plurality of intermediate wiring structures 200 and the bottom surfaces therebetween. In this case, as shown, the semiconductor pattern 65 may be formed in a line pattern that crosses the plurality of intermediate wiring structures 200 and covers the side surfaces of the plurality of intermediate wiring structures 200.

  An information storage pattern 55 can be disposed between the semiconductor pattern 65 and the intermediate wiring structure 200. According to this embodiment, as described with reference to FIG. 2, the information storage pattern 55 may include a charge storage film, and information stored in the information storage pattern 55 may include the semiconductor pattern 65. And FN tunneling (Fowler-Nordheim tunneling) generated by a voltage difference between the intermediate wires 141 to 144.

  A lower wiring 20 (or a lower impurity region) can be formed in the substrate 10 under the plurality of intermediate wiring structures 200. As shown, the lower impurity region 20 is formed not only under the plurality of intermediate wiring structures 200 but also in the substrate 10 therebetween, to electrically connect the plurality of semiconductor patterns 65. it can. A plurality of upper wirings 75 connected to the semiconductor pattern 65 or crossing the plurality of intermediate wirings 141 to 144 may be disposed on the intermediate wiring structure 200. According to this embodiment, the lower impurity region 20 is used as a common source electrode (CSL in FIG. 3), and the upper wiring 75 is a write voltage for changing information stored in the information storage pattern 55. Or a plurality of bit lines (BL in FIG. 3) for applying a read voltage for reading stored information.

  On the other hand, according to an embodiment of the present invention, the arrangement structure of a plurality of intermediate wirings (for example, 141) arranged in a predetermined layer is arranged in another layer except for a contact section for connection with an upper wiring described later. The arrangement structure of a plurality of intermediate wires (for example, 142 to 144) can be made substantially the same.

  5 to 10 are perspective views for explaining a method of manufacturing a memory semiconductor device according to an embodiment of the present invention.

  Referring to FIG. 5, a substrate 10 having a cell array region and a core region is prepared. The upper surface of the cell array region is formed lower than the upper surface of the core region. According to one embodiment, such a structure may be formed through a patterning step of recessing the substrate 10 in the cell array region. According to another embodiment, such a structure forms a predetermined thin film having a thickness corresponding to a step between the two regions on the substrate 10 and then etches the thin film in the cell array region. Can be formed through stages.

  Thereafter, as shown, a plurality of insulating films 31, 32, 33, 34, and 35 and a plurality of conductive films 41, 42, 43, and 44 are sequentially and repeatedly deposited on the substrate. At this time, the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44 may be conformally formed on the substrate 10. The total thickness of the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44 can be made smaller than the step H between the cell array region and the core region.

  The plurality of insulating films 31 to 35 may be a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. Meanwhile, the thickness of the plurality of insulating films 32 to 34 interposed between the plurality of conductive films 41 to 44 has a technical feature in which the inversion regions described in FIG. 1 are overlapped (overlap inversion regions). It can be selected within the range to be satisfied. However, since the uppermost insulating film 35 can be used as an etching mask in a subsequent patterning process, the uppermost insulating film 35 can be formed with a thickness thicker than the other insulating films 31 to 34. In addition, the lowermost insulating film 31 includes a plurality of conductive films 41 to 44 to prevent a lowermost intermediate wiring (breakdown) between 141 in FIG. 3 and the substrate 10 or the lower impurity region 20. And a plurality of insulating films 32 to 34 interposed therebetween.

  The plurality of conductive films 41 to 44 may include at least one of a doped semiconductor, a metal, a metal nitride, and a metal silicid. As shown in FIG. 1, the memory cell transistor according to an embodiment of the present invention has a vertical channel, and the thickness of the plurality of conductive layers 41 to 44 defines the channel length of the memory cell transistor. To do. In this aspect, the thicknesses of the plurality of conductive films 41 to 44 can be selected within a range that satisfies a technical requirement related to the channel length of the memory cell transistor (for example, prevention of the short channel effect).

  According to one embodiment, the lower impurity region 20 may be formed in the cell array region of the substrate 10 before the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44 are formed. The lower impurity region 20 may be formed to have a conductivity type different from that of the substrate 10 and may be used as the common source electrode CSL described with reference to FIG.

  Referring to FIG. 6, the intermediate wiring structure that defines the plurality of trenches T that expose the upper surface of the substrate 10 by patterning the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44. Form body 200. The intermediate wiring structure 200 includes a plurality of insulating film patterns 131, 132, 133, 134 formed by patterning the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44. 135 and a plurality of intermediate wires 141, 142, 143, 144. As shown, the side surfaces of the plurality of intermediate wirings 141 to 144 and the plurality of insulating film patterns 131 to 135 are exposed to define the trench T.

  The plurality of intermediate wiring structures 200 may be patterned using a photo and an etching process to pattern the top insulating film 135 and then using the patterned top insulating film 135 as a hard mask. It can be formed through the process. According to a modified embodiment, before the plurality of intermediate wiring structures 200 are formed, the etching is performed to reduce difficulty in patterning due to a step between the cell array region and the core region. The method may further include a step of planarizing the resultant after forming another mask film for the mask on the front surface of the substrate.

  According to another modified embodiment, the plurality of intermediate wiring structures 200 may be formed through a plurality of patterning steps. For example, the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44 can be patterned independently in the core region and the cell array region. Specifically, in the patterning step, the thin film is first patterned in the core region, a mask film is formed to cover the patterned core region, and then the cell array region is patterned. Steps can be included.

  Referring to FIG. 7, after forming the information storage film pattern 55 covering the side surface of the intermediate wiring structure 200, a semiconductor film 60 is formed on the resultant structure.

  The information storage film pattern 55 extends from a side surface of the intermediate wiring structure 200 and covers an upper surface of the intermediate wiring structure 200. According to this embodiment, the information storage film pattern 55 may be formed to expose the upper surface of the substrate 10 at the bottom of the trench T. Therefore, an etching process for removing the information storage film pattern 55 at the bottom of the trench T can be further performed.

  According to a modified embodiment, in order to prevent the information storage film pattern 55 from being damaged, the etching process may be performed in a state where the information storage film pattern 55 is covered with a predetermined protective film. For example, the semiconductor film 60 can be formed through two or more deposition processes, and a semiconductor film deposited first can be used as the protective film.

  According to one embodiment, the information storage film pattern 55 may include a charge storage film. For example, the information storage layer pattern 55 may include a blocking insulating layer 55c, a charge storage layer 55b, and a tunnel insulating layer 55a, which are sequentially stacked as shown in FIG. The blocking insulating film 55c may include at least one of a silicon oxide film, a silicon nitride film, a silicon oxynitride film, and a high dielectric film, and may include a plurality of films. At this time, the high dielectric film means an insulating material having a higher dielectric constant than the silicon oxide film, and includes a tantalum oxide film, a titanium oxide film, a hafnium oxide film, a zirconium oxide film, an aluminum oxide film, an yttrium oxide film, Niobium oxide films, cesium oxide films, indium oxide films, iridium oxide films, BST films, and PZT films can be included. The tunnel insulating film 55a may be formed of a material having a dielectric constant lower than that of the blocking insulating film 55c, and the charge storage film 55b may be an insulating thin film (for example, silicon nitride film) rich in charge trap sides, Insulating thin film including the conductive particles. According to an embodiment, the tunnel insulating film 55a may be a silicon oxide film, the charge storage film 55b may be a silicon nitride film, and the blocking insulating film 55c may be an insulating film including an aluminum oxide film. .

  The semiconductor film 60 may be a single crystal semiconductor or a polycrystalline semiconductor, and may be formed using a vapor deposition technique or an epitaxial technique. The semiconductor film 60 may be formed in a conformal thickness as shown, or may be formed so as to substantially fill the remaining space of the trench T in which the information storage film pattern 55 is formed. According to an embodiment, the semiconductor layer 60 may have a conductivity type different from that of the lower impurity region 20 so as to form a diode with the lower impurity region 20.

  Referring to FIG. 8, the resultant structure having the semiconductor layer 60 is planarized and etched to expose the upper surface of the substrate 10. On the other hand, as described above, the total thickness t of the plurality of insulating films 31 to 35 and the plurality of conductive films 41 to 44 can be made smaller than the step H between the cell array region and the core region. In the embodiment, the plurality of intermediate wirings 141 to 144 and the plurality of insulating film patterns 131 to 135 are limitedly arranged in the cell array region by the planarization etching.

  Meanwhile, each of the plurality of intermediate wirings 141 to 144 limited to the inside of the cell array region includes a wiring section parallel to the upper surface of the substrate 10 and a contact section extending from one end or both ends of the wiring section. Can have. At this time, contact sections of the plurality of intermediate wires 141 to 144 are arranged near the boundary between the cell array region and the core region, and as a result of the planarization etching, their upper surfaces are exposed to the substrate 10. It can be formed at the same height as the upper surface.

  According to an exemplary embodiment, a buried insulating film 88 that covers the resultant structure on which the semiconductor film 60 is formed and fills the trench T may be further formed before the planarization etching. In this case, the upper surface of the contact section of the plurality of intermediate wirings 141 to 144 is exposed between the substrate 10 and the buried insulating film.

  Referring to FIG. 9, the semiconductor layer 60 is patterned to form a plurality of semiconductor patterns 65 that cross the intermediate wiring structure 200. The step of forming the semiconductor pattern 65 includes patterning the buried insulating film 88 to form a buried insulating film pattern 99 that defines an opening 99a exposing the semiconductor film 60, and then exposing the exposed semiconductor film. Etching 60 may be included. At this time, the opening 99a may be formed in a direction crossing the intermediate wiring structure 200. Accordingly, the semiconductor pattern 65 is formed in a direction crossing the intermediate wiring structure 200.

  The step of etching the buried insulating film may be performed by an anisotropic etching method having etching selectivity with respect to the semiconductor film 60, and the step of etching the semiconductor film 60 may be performed with respect to the buried insulating film. It can be implemented through an etching method having The step of etching the semiconductor film 60 may be performed by an isotropic etching method so that the semiconductor film 60 can be separated from the side surface of the intermediate wiring structure 200. However, the etching process of the semiconductor layer 60 may be performed through an anisotropic etching method, an isotropic etching method, or a combination thereof.

  According to one embodiment, after forming the semiconductor pattern 65, the information storage layer pattern 55 may be further etched so that the intermediate wiring structure 200 is exposed as shown.

  Referring to FIG. 10, an insulating film (not shown) that fills the opening 99 a is formed on the resultant structure on which the semiconductor pattern 65 is formed, and then the semiconductor pattern 65 and the plurality of intermediate wires 141 to 144 are formed. An upper wiring 75 connected to is formed. The upper wiring 75 connected to the semiconductor pattern 65 and the plurality of intermediate wirings 141 to 144 is used as the plurality of bit lines BL and the whole area intermediate wiring GWL described with reference to FIG.

  In addition, after the upper wiring 75 is formed, the upper selection line USL and the lower selection line LSL connected to the uppermost intermediate wiring 144 and the lowermost intermediate wiring 141 can be formed. The upper and lower selection lines USL and LSL may be formed in a direction across the bit line BL as shown.

  11 and 12 are a circuit diagram and a perspective view for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. For the sake of brevity, descriptions of technical features that are the same as those of the embodiment described with reference to FIGS. 3 and 4 are omitted.

  Referring to FIGS. 11 and 12, according to this embodiment, the lower selection line LSL may connect the cell strings STR along a direction parallel to the bit line BL. However, as in the embodiment described with reference to FIG. 3, the upper selection line USL connects the cell strings STR in a direction crossing the bit line BL. In this case, one cell string can be selected by the bit line BL and the upper selection line USL.

  FIG. 13 is a circuit diagram for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. FIGS. 14 and 15 are diagrams for explaining a method of manufacturing a semiconductor device according to this embodiment. It is a perspective view. For the sake of brevity, descriptions of technical features that are the same as those of the embodiment described with reference to FIGS. 3 and 4 are omitted.

  According to this embodiment, as shown in FIG. 14, a plurality of localized semiconductor patterns 65 a and 65 b can be arranged on both side surfaces of one intermediate wiring structure 200. Unlike the previous embodiment, the semiconductor patterns 65a and 65b according to this embodiment are not extended to the opposite side of the intermediate wiring structure 200, but are cut at the top thereof. At this time, the semiconductor pattern 65 a disposed on one side surface of the intermediate wiring structure 200 may be disposed between a plurality of semiconductor patterns 65 b disposed on the other side surface of the intermediate wiring structure 200. That is, the semiconductor patterns 65 a and 65 b are alternately arranged on both sides along the intermediate wiring structure 200. In order to form such a structure, the opening 99a of the buried insulating film pattern 99 can be formed to obliquely cross the intermediate wiring structure 200 in both different directions. That is, the opening 99a can be formed in a net structure.

  As shown in FIG. 15, the semiconductor pattern 65a disposed on one side surface of the intermediate wiring structure 200 and the adjacent semiconductor pattern 65b disposed on the other side surface are connected to a plurality of different bit lines BL. The In this case, as shown in FIG. 13, each localized semiconductor pattern 65a, 65b constitutes an independently controlled cell string STR, so the implementation described with reference to FIG. 3 above. Compared to the embodiment, an increased number of memory cells can be formed in a cell array region having the same area.

  16 and 17 are perspective views for explaining the electrical connection structure of the intermediate wiring according to the embodiment of the present invention.

  As described with reference to FIG. 5, the plurality of conductive films 41 to 44 can be formed conformally. In this case, the angle between the contact section of the plurality of intermediate wirings 141 to 144 and the upper surface of the substrate 10 is an angle at which the boundary surface between the cell array region and the core region becomes the upper surface of the substrate 10. It can be substantially the same. For example, as shown in FIG. 16, when the boundary surface between the cell array region and the core region is perpendicular to the upper surface of the substrate 10, the contact sections of the plurality of intermediate wires 141 to 144 are also formed on the substrate 10. It is formed perpendicular to the top surface.

  Meanwhile, according to another embodiment of the present invention, as shown in FIG. 17, the boundary surface between the cell array region and the core region forms an angle θ smaller than 90 degrees with respect to the upper surface of the substrate 10. In this case, the areas of the upper surfaces of the plurality of intermediate wirings 141 to 144 exposed by the above-described planarization etching are increased as compared with the previous embodiment. Specifically, when the thickness and width of the intermediate wiring are a and b, respectively, the exposed area of the intermediate wiring is ab in the previous embodiment, and ab / in this embodiment. sin θ. Accordingly, as the angle decreases, the exposed area of the plurality of intermediate wires 141 to 144 increases. According to one embodiment, the angle may be between 30 and 90 degrees.

  18 to 21 are perspective views for explaining an electrical connection structure of lower wirings according to modified embodiments of the present invention.

  Referring to FIG. 18, according to this embodiment, the lower impurity region 20 may be formed through an ion implantation process using the intermediate wiring structure 200 as an ion mask after the intermediate wiring structure 200 is formed. In this case, the lower impurity region 20 can be locally formed between the plurality of intermediate wiring structures 200 (that is, in the substrate 10 of the trench).

  Meanwhile, the lower impurity regions 20 can be electrically connected to each other so that they can be used as the common source electrode CSL as described above. For example, as shown in FIG. 19, the lower impurity region 20 may extend from the cell array region to the sidewall and upper surface of the core region. In this case, electrical connection to the lower impurity region 20 used as the common source electrode CSL is facilitated. That is, as shown in FIG. 19, the extended lower impurity region 20 can be connected to the source line SL for transmitting a source voltage.

  According to a modified embodiment of the present invention, the lower wiring 20 for the common source electrode CSL may be formed of a conductive material. For example, as shown in FIG. 20, a conductive line 20a formed under the trench T can be used as the common source electrode CSL. In this case, a source impurity region S having a conductivity type different from that of the main body B may be formed under the semiconductor pattern 65 so as to constitute a diode. The source impurity region S is required to be formed lower than the lowermost intermediate wiring 141 so that the conductive line 20a can be used as the common source electrode CSL. Therefore, the lowermost insulating layer pattern 131 can be formed with a thickness greater than the thickness of the semiconductor layer 60 and the conductive line 20a.

  According to another modified embodiment, as shown in FIG. 21, the semiconductor pattern 65 may be connected to an upper surface of a predetermined conductive plate 20b used as the common source electrode CSL. In this case, the conductive plate 20b can be patterned so as to be limited within the cell array region. Meanwhile, according to such an embodiment, the substrate 10 need not be limited to a semiconductor material. Therefore, this embodiment can be applied to a system in which the above-described cell array structure is formed on an insulating substrate and then connected to a peripheral circuit through a wafer bonding technique or the like. However, when the substrate 10 is a semiconductor or a conductive material, an insulating thin film 12 may be further interposed between the substrate 10 and the conductive plate 20b.

  22 and 23 are a perspective view and a circuit diagram, respectively, for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. For the sake of brevity, descriptions of technical features that are the same as those described with reference to FIGS. 1 to 21 may be omitted.

  22 and 23, a substrate 10 including a ground selection region GSR, a string selection region SSR, and a memory region MMR disposed therebetween is provided.

  At least one word line structure and at least one semiconductor pattern 65 are disposed on the memory region MMR of the substrate 10. The word line structure includes a plurality of word lines WL stacked in order, and the semiconductor pattern 65 faces the word line structure and crosses the word line WL. An information storage pattern 55 may be interposed between the word line structure and the semiconductor pattern 65. The information storage pattern 55 may be the same as that of the embodiment described with reference to FIG.

  A plurality of ground selection transistors GST using the ground selection line GSL as a gate electrode are disposed on the ground selection region GSR of the substrate 10. The string selection line SSL is gated on the string selection region SSR of the substrate 10. A string selection transistor SST used as an electrode is arranged. The ground selection line GSL and the string selection line SSL may be formed to have a long axis parallel to the word line WL. In one embodiment, the ground selection transistor GST and the string selection transistor SST may be MOSFETs (Metal-Oxide-Semiconductor Field-Effect-Transistors) that use the substrate 10 as a channel region. Impurity regions 25 used as the source and drain electrodes of the ground selection transistor GST can be formed in the substrate 10 on both sides of the ground selection line GSL and in the substrate 10 on both sides of the string selection transistor SST. According to one embodiment, the semiconductor pattern 65 may be formed to have a conductivity type different from that of the impurity region 25.

  In addition, the source electrode of the ground selection transistor GST is commonly connected to a common source line CSL parallel to the word line WL, and each drain electrode of the ground selection transistor GST is connected to one end of the semiconductor pattern 65. Can connect. Therefore, the semiconductor pattern 65 can be extended from the memory region MMR to the ground selection region GSR. The drain electrode of the string selection transistor SST is connected to a plurality of bit lines BL having a major axis in a direction crossing the word line WL, and the source electrode of the string selection transistor SST is connected to the other end of the semiconductor pattern 65. it can. Therefore, the semiconductor pattern 65 can be extended from the memory region MMR to the string selection region SSR.

  According to one embodiment, a lower insulating layer 12 may be disposed under the word line structure. The lower insulating layer 12 may be an isolation layer that defines an active region, for example, shallow trench isolation (STI). Accordingly, the semiconductor pattern 65 on the memory region MMR can be formed separately from the substrate 10.

  The semiconductor pattern 65 may be a polycrystalline silicon film treated with a gas including hydrogen or deuterium, and may have a thickness of 5 nm to 100 nm. According to an embodiment, the semiconductor pattern 65 may have a thickness of about 15 nm to 25 nm. The semiconductor pattern 65 can be used as an electrical path connecting the ground selection transistor GST and the string selection transistor SST or the common source line CSL and the bit line BL.

  On the other hand, such an electrical path is selectively selected according to a voltage applied to the word line WL adjacent to the semiconductor pattern 65 and a potential (electric potential) of the information storage pattern 65 adjacent to the word line WL. It can be completed, and the potential of the information storage pattern 65 can be different depending on the information stored in the information storage pattern 55. As a result, as shown in FIG. 23, each of the semiconductor patterns 65 constitutes one of the cell strings constituting the NAND array.

  24 and 25 are a perspective view and a plan view for explaining a cell array structure of a memory semiconductor device according to another embodiment of the present invention. In order to simplify the description, the description of the technical features that overlap the embodiment described with reference to FIGS. 1 to 23 may be omitted.

  Referring to FIGS. 24 and 25, a plurality of intermediate wiring structures 200 spaced apart from each other are disposed, and the plurality of intermediate wiring structures 200 are separated from each other by ground selection structures GSS, and A string selection structure SSS and at least one word line structure WLS disposed therebetween can be included. At this time, each of the plurality of intermediate wiring structures 200 may include a plurality of intermediate wirings stacked in order. Accordingly, the ground selection structure GSS includes a plurality of stacked intermediate wires used as the ground selection line GSL, and the string selection structure SSS is used as a plurality of stacked selection lines SSL. Including the intermediate wiring, the word line structure WLS may include a plurality of stacked intermediate wirings used as the word line WL. According to an embodiment, the ground selection structure GSS, the string selection structure SSS, and the word line structure WLS may all be formed with substantially the same structure.

  A plurality of semiconductor patterns 65 may be disposed across the intermediate wiring structure 200 on both side surfaces of the intermediate wiring structure 200. According to an exemplary embodiment, the semiconductor patterns 65 may be connected to each other on the upper surface of the intermediate wiring structure 200 and the bottom surface therebetween. In this case, as shown in FIG. 24, the semiconductor pattern 65 may be formed in a line pattern covering the side surface of the intermediate wiring structure 200 while traversing the plurality of intermediate wiring structures 200.

  An information storage pattern 55 can be disposed between the semiconductor pattern 65 and the intermediate wiring structure 200. According to this embodiment, as described with reference to FIG. 2, the information storage pattern 55 can include a charge storage film, and information stored in the information storage pattern 55 is stored between the semiconductor pattern 65 and the intermediate pattern. It can be changed by using FN tunneling generated by the voltage difference between the wirings 141 to 144.

  The partial area 65d of the semiconductor pattern 65 adjacent to the string selection structure SSS and the ground selection structure GSS may have a different conductivity type from the other areas 65b. For example, the partial region 65d of the semiconductor pattern 65 disposed on the string selection structure SSS and the ground selection structure GSS may be a part of the semiconductor pattern 65 adjacent to the sidewall of the word line structure WLS. It can be formed to have a conductivity type different from that of the region 65b. According to another embodiment, as shown in FIG. 25, a sidewall of the intermediate wiring structure 200 is interposed between the upper portions of the plurality of intermediate wiring structures 200 and the plurality of intermediate wiring structures 200. An impurity region 65d doped with an impurity of a conductivity type different from that of the main body portion 65b covering the substrate can be formed. The impurity region 65d can be formed through an ion implantation process using a spacer SP that covers the sidewall of the intermediate wiring structure 200 as an ion implantation mask. The distance between the impurity region 65d and the intermediate wiring structure 200 can be smaller than the maximum width of the inversion region generated by the voltage applied to the intermediate wiring.

  A plurality of bit lines BL are disposed above the plurality of intermediate wiring structures 200. The plurality of bit lines BL may be connected to the impurity region 65d adjacent to the string selection structure SSS through the bit line plug BL_PLG. A common source line CSL that electrically connects the impurity region 65d adjacent to the ground selection structure GSS may be disposed on the plurality of intermediate wiring structures 200.

  According to the embodiment described with reference to FIGS. 24 and 25, as described above, the ground selection structure GSS, the string selection structure SSS, and the word line structure WLS are all substantially The same structure can be formed. Therefore, it is possible to simplify the manufacturing method as compared with the case where these are formed with different structures. Compared to the embodiment described with reference to FIGS. 22 and 23, according to this embodiment, not only can the area for the ground selection transistor and the string selection transistor be reduced, but also the word line stacked with the ground selection line and The technical difficulty in the manufacturing process due to the height difference between can be reduced. Moreover, in the resulting structure, in the case of the semiconductor device of FIG. 24, the chip area and the complexity of the manufacturing process are not increased, and the number of grounds and string selection transistors constituting one cell string can be increased. . Since the increase in the number of selection transistors enables effective suppression of leakage current, the NAND flash memory device according to the present embodiment has improved electrical characteristics.

  FIG. 26 is a block diagram schematically illustrating an embodiment of a memory card 1200 including a flash memory device according to the present invention. Referring to FIG. 25, a memory card 1200 is equipped with a flash memory device 1210 according to the present invention to support a high capacity data storage capability. A memory card 1200 according to the present invention includes a memory controller 1220 that controls various data exchanges between a host and a flash memory device 1210.

  The SRAM 1221 is used as an operation memory for the processing unit 1222. The host interface 1223 includes a host data exchange protocol connected to the memory card 1200. The error correction block 1224 detects and corrects errors included in the data read from the multi-bit flash memory device 1210. The memory interface 1225 interfaces with the flash memory device 1210 of the present invention. The processing unit 1222 executes various control operations for data exchange of the memory controller 1220. Although not shown in the drawings, the memory card 1200 according to the present invention can be further provided with a ROM (not shown) for storing code data for interfacing with the host host. It is obvious to those who have

  According to the above flash memory device, memory card, or memory system of the present invention, a highly reliable memory system can be provided through the flash memory device 1210 with improved erase characteristics of dummy cells. In particular, the flash memory device of the present invention can be provided in a memory system such as a semiconductor disk device (Solid State Disk: hereinafter referred to as SSD), which has been actively used recently. In this case, a highly reliable memory system can be implemented by blocking a read error generated from the dummy cell.

  FIG. 27 is a block diagram schematically showing an information processing system 1300 equipped with a flash memory system 1310 according to the present invention. Referring to FIG. 27, the flash memory system 1310 of the present invention is installed in an information processing system such as a mobile device or a desktop computer. The information processing system 1300 according to the present invention includes a flash memory system 1310, a modem 1320 electrically connected to each system berth 1360, a central processing unit 1330, a RAM 1340, and a user interface 1350. The flash memory system 1310 can be configured substantially the same as the previously described memory system or the flash memory system. The flash memory system 1310 stores data processed by the central processing unit 1330 or data input from the outside. Here, the above-described flash memory system 1310 can be configured by a semiconductor disk device SSD, and in this case, the information processing system 1300 can stably store a large amount of data in the flash memory system 1310. As the reliability increases, the flash memory system 1310 can save resources required for error correction, so that a high-speed data exchange function is provided to the information processing system 1300. Although not shown, the information processing system 1300 according to the present invention is further provided with an application chipset, a camera image processor (CIS), an input / output device, and the like. It is self-evident to those with specific knowledge.

  The flash memory device or the memory system according to the present invention can be implemented in various forms of packing. For example, the flash memory device or the memory system according to the present invention includes PoP (Package on Package), Ball grid arrays (BGAs), Chip scale packages (CSPs), Plastic Leaded Chip Carrier (PLCC), and Plastic In-Duy-Lune PDIP), Die in Waffle Pack, Die in Wafer Form, Chip On Board (COB), Ceramic Dual In-Line Package (CERDIP), Plastic Metric Quad Pt, M ( SOIC), Shrink Small Out Line Package (SSOP), Thin Small Out Line (TSOP), Thin Quad Flat Pack (TQFP), System In Package (SIP), Multi Chip Package P, Multi Chip Package P , And packed into a system such as Wafer-Level Processed Stack Package (WSP).

DESCRIPTION OF SYMBOLS 10 Board | substrate 20 Lower wiring 55 Information storage pattern 65 Semiconductor pattern 75 Upper wiring 131,132,133,134,135 Insulating film pattern 141,142,143,144 Intermediate wiring 200 Intermediate wiring structure

Claims (11)

A ground selection structure and a string selection structure that are spaced apart from each other;
At least one memory structure including a plurality of word lines stacked in sequence and disposed between the ground and string selection structure;
At least one semiconductor pattern covering an upper surface and sidewalls of the memory structure and coupled to the ground and string selection structure across the plurality of word lines ;
The ground and string selection structure further includes a substrate disposed under the word line structure. The ground and string selection structure includes a plurality of MOS-FETs that use the substrate as a channel. Contains
The plurality of ground and string selection structures include a plurality of MOS-FETs that are parallel to the plurality of word lines and use the ground selection line and the string selection line as gate electrodes, respectively. Including a plurality of MOS-FETs using the plurality of word lines stacked in order as gate electrodes,
One end of the semiconductor pattern is connected to the drain electrode of the ground selection transistor, and the other end of the semiconductor pattern is connected to the source electrode of the string selection transistor.
A memory semiconductor device. It further includes an information storage film pattern interposed between the semiconductor pattern and the memory structure.
The memory semiconductor device according to claim 1. The memory semiconductor device according to claim 2, wherein the information storage film pattern includes a charge storage film. The memory structure includes the plurality of MOS-FETs stacked in the order in which the semiconductor pattern is used as a channel.
The memory semiconductor device according to claim 1. The ground selection structure includes a first impurity region and a second impurity region formed in the substrate on both sides of the ground selection line, and the plurality of first and second impurity regions are respectively included in the first and second impurity regions. Connect to a semiconductor pattern and a common source line parallel to the ground selection line,
The string selection structure includes a third impurity region and a fourth impurity region formed in the substrate on both sides of the string selection line, and the plurality of third and fourth impurity regions are respectively included in the plurality of impurity regions. A semiconductor pattern and a bit line crossing the string selection line are connected.
The memory semiconductor device according to claim 1 . The semiconductor pattern is extended from the periphery of the memory structure to cover an upper surface and a sidewall of the ground and string selection structure,
Each of the ground and string selection structures includes a plurality of MOS-FETs that are sequentially stacked using a plurality of conductive lines sequentially stacked as gate electrodes and the semiconductor pattern as a channel.
The memory semiconductor device according to claim 1. The plurality of conductive lines of the ground and string selection structure are substantially the same as the plurality of word lines of the memory structure in material, thin film thickness, and number of stacked layers.
The memory semiconductor device according to claim 6 . Further comprising a common source line parallel to the plurality of word lines, and at least one bit line across the plurality of word lines;
The common source line is connected to a portion of the semiconductor pattern extending to the top of the ground selection structure;
The bit line is connected to another portion of the semiconductor pattern extended to the top of the string selection structure.
The memory semiconductor device according to claim 6 . The semiconductor pattern includes a main body adjacent to a sidewall of the plurality of word lines and a plurality of impurity regions adjacent to an upper surface of the ground and string selection structure, and the main body is different from the impurity regions. Have conductivity type
The memory semiconductor device according to claim 1. Further comprising: a ground and string selection structure; and a substrate disposed under the word line structure.
The plurality of impurity regions may be between the upper portion of the memory structure and the memory structure, between the memory structure and the ground selection structure, and between the memory structure and the string selection structure. The memory semiconductor device according to claim 9 , further formed in at least one position . And further comprising a plurality of spacers disposed on a side surface of the word line structure and covering the semiconductor pattern.
The memory semiconductor device according to claim 9 .

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