JP2838170B2 - Leveling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for placing an object to be measured or a workpiece to be measured whose surface roughness is to be measured, and for determining the orientation of the surface to be measured or the surface to be machined three-dimensionally. The present invention relates to a leveling device that can be set in a posture. In particular, in order to measure and process a mounted object to be subjected to attitude control (tilt correction) with high accuracy, a leveling device capable of obtaining a posture control that minimizes a change in the position of the mounted object before and after the attitude control. About.

[0002]

2. Description of the Related Art As a device in which a mounting member for mounting an object to be mounted can take a desired attitude with respect to a substrate, a mounting member is provided between the substrate and the mounting member. It is conceivable that a support means that can take a desired posture is interposed. Here, in consideration of the configuration of the supporting means, it is conceivable that the mounting member is supported at three points with respect to the substrate as a member having few members and easy production. Further, as a simple posture control, one of the three points for supporting the mounting member with respect to the substrate is supported while maintaining a constant distance between the substrate and the mounting member, and the other two points are supported. A configuration in which the distance between the substrate and the mounting member is variably supported independently of each other can be considered.

[0003]

The mounting member is supported on the substrate by three of a first support, a second support and a third support, and the first support is mounted on the substrate. In a leveling device configured to hold and support the interval between the mounting members at a fixed distance, and the second support portion and the third support portion are configured to independently support the variable interval between the substrate and the mounting member. When the support state of the second support part and the third support part is changed and the distance between the substrate and the mounting member is changed by different amounts to be supported, when the support state is changed, the second support part or the second support part is changed. Either of the three supports gives a greater pressing force between the substrate and the mounting member than the other, corresponding to the difference in the different amounts. By the way, the first supporting portion may be configured to include a pillow ball because the distance between the substrate and the mounting member is kept constant. Thus, in the supporting portion including the pillow ball, the mounting member can rotate in all directions with respect to the substrate around the supporting portion. Therefore, when the mounting member receives the above pressing force, the mounting member rotates with respect to the substrate about the line connecting the substrate-side portion supported by the first support portion and the mounting member-side portion as an axis. Therefore, before and after the attitude control of the mounting member with respect to the substrate, the position of the object to be mounted on the mounting member changes with respect to, for example, a surface roughness meter or a machine tool that holds a fixed position. The problem arises. In particular, the higher the accuracy of the measurement and processing performed on the object to be mounted on the mounting member, the more serious the problem becomes.

[0004] The present invention has been made in view of the above circumstances, and before and after the attitude control of the mounting member with respect to the substrate, the mounting member is mounted on the substrate side supported by the first support. An object of the present invention is to provide a leveling device that does not rotate with a line connecting a supporting portion and a mounting member supporting portion as an axis.

[0005]

According to the present invention, first, second, and third support portions are interposed between a substrate and a mounting member, and the mounting member is disposed on the first support portion with respect to the substrate. Is a leveling device which is provided with a regulating means for preventing rotation when a straight line connecting two portions supporting the substrate and the mounting member is rotated.

The detailed configuration is such that a substrate, a mounting member for mounting an object to be mounted thereon, and a substrate interposed between the substrate and the mounting member, and the distance between the substrate and the mounting member being maintained at a constant distance. The first support portion to support as, and the interval between the substrate and the mounting member,
Made from the second and third support portions for supporting a variable independently of each other, the mounting member mounting the substrate provided with support means capable of supporting in a desired orientation, said support means, first, second ,
And the third support are placed on the substrate without being on the same straight line
When the second support portion and / or the third support portion changes the distance between the substrate and the mounting member, the mounting member is positioned relative to the substrate and the first support portion is disposed between the members. If an attempt is made to rotate around a straight line connecting the two parts supporting the substrate and the mounting member, the restricting means for preventing the rotation is provided after the first support portion.
It is a leveling device provided outside . In addition,
The restricting means is provided on one of the substrate and the mounting member.
The regulating member installed on the material and the first support portion
The axis parallel to the straight line connecting the two parts supporting the mounting member
When the regulating member tries to rotate as a line, the regulating portion
Contacting the regulating member or applying pressure to the material
Substrate or mounting part on which the regulating member is installed in contact
The material shall consist of a pressing member installed on the other member
Is preferred. Further, the regulating member and the pressing member of the regulating means are provided.
However, it is preferable to perform rolling engagement or sliding engagement.
Suitable. Further, the regulating member of the regulating means has a groove having a groove.
Member, and the pressing member fits into the groove of the groove member,
It is preferably a spherical roller or a sphere having a partial spherical surface.
is there. Also, the second support portion and the third support portion of the support means
The distance between the substrate and the mounting member is made variable.
First variable means and second variable means,
When the posture with respect to the plate is detected,
When the second support portion and the third support portion operate, the placing member
Control the two variable means so that the
It is preferable that control means for controlling is provided.

[0007]

When the second supporting portion and the third supporting portion change the supporting state and the distance between the substrate and the mounting member is changed by different amounts, and the distance is changed, the distance between the substrate and the mounting member is changed to a different amount. A corresponding force acts between the substrate and the mounting member. When the substrate and the mounting member receive the force, the substrate and the mounting member tend to relatively rotate about an axis as a straight line connecting the two portions supported by the first support portion. Regulate movement.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the embodiments shown in FIGS. However, the present invention is not limited by the embodiment. The leveling device 1 is shown in FIGS.
As shown in FIG. 7, a substrate 2, a mounting member 3, a support unit, variable units 4 and 5, and a control unit 6 are provided. The mounting member 3 is for mounting an object to be measured, which is an object to be measured.

The support means comprises three support portions 7, 8 and 9, and supports the mounting member 3 so as to obtain a desired posture with respect to the substrate 2. The support portion 7 includes a so-called pillow ball. That is, as shown in FIGS. 1, 2, 3 and 5, the support portion 7 includes a round bar 10, a ball 11 fixed on the upper portion of the round bar 10,
A pillow block 12 for fittingly supporting the pillow block 1 in all directions, and a holding member 13 for holding the pillow block 12
It is mainly composed of Then, the holding member 13 is attached and fixed to the lower surface of the mounting member 3 with screws, and the round bar 1 is fixed.
Numeral 0 is fixed to the upper surface of the substrate 2 with screws. With this configuration, the support unit 7 holds the mounting member 3 on the substrate 2 so that the distance between the substrate 2 and the mounting member 3 is kept constant and the mounting member 3 can take any posture with respect to the substrate 2.
It is to support.

As shown in FIG. 1, FIG. 2 and FIG. 3, the support portion 8 has a spherical roller 19, a pivotal support 20 for pivotally supporting the spherical roller 19, and a spherical roller 19 capable of rotating. It mainly comprises a slider 21 to be engaged. Thus, the pivot 20 is fixed to the lower surface of the mounting member 3 and
Numeral 1 is movable on the upper surface of the substrate 2 in the direction of arrow C. The upper surface of the slider 21 is a flat surface 14, and the spherical roller 21 engages with the flat surface 14 for mounting rotation. Further, the flat surface 14 of the slider 21 with which the spherical roller 19 engages with the bottom surface thereof is inclined at an angle of 15 °. With this configuration, the support portion 8 makes the distance between the substrate 2 and the mounting member 3 variable, that is, supports the mounting member 3 so as to be displaceable in the direction of arrow D with respect to the substrate 2.

As shown in FIGS. 1, 2 and 4, the support portion 9 has a spherical roller 22, a pivotal support 23 that pivotally supports the spherical roller 22, and a spherical roller 22 that can rotate. It mainly comprises a slider 24 to be engaged. Then, the pivot 23 is fixed to the lower surface of the mounting member 3 and the slider 2
Reference numeral 4 is movable on the upper surface of the substrate 2 in the direction of arrow C. A groove 15 is provided on the upper portion of the slider 24, and the spherical roller 22 is rotatably fitted in the groove 15. Further, the surface of the groove 15 with which the spherical roller 22 engages with the bottom surface of the slider 24 is inclined at an angle of 15 °. With this configuration, the support portion 9 makes the distance between the substrate 2 and the mounting member 3 variable, that is, supports the mounting member 3 so as to be displaceable in the direction of arrow D with respect to the substrate 2.

The three support portions 7, 8 and 9 are arranged so as to form an isosceles triangle with the support portion 7 at the apex. Thus, the length of the base, that is, the distance between the two support portions 8 and 9 is 2 l, and the height, that is, the distance from the support portion 7 to the line connecting the two support portions 8 and 9 is also 2 l. It has become.

As shown in FIGS. 1, 2 and 3, the variable means 4 includes a motor 25 as an output means, a screw rod 26, a joint 28 connecting the output shaft 27 of the motor 25 and the screw rod 26, It is mainly composed of a bush 29. Then, the motor 25 is fixed to the substrate 2, and the bush 29 is screwed to the screw rod 26 and fixed to the slider 21. With this configuration, the variable means 4 causes the slider 21 to slide in the direction of arrow C when the motor 25 is output, and the sliding of the slider 21 causes the pivot 20 to move in the direction of arrow D, which is the vertical direction. Part 8
Is to change the distance between the part of the substrate 2 and the part of the mounting member 3 that are supported.

As shown in FIGS. 1, 2 and 4, the variable means 5 includes a motor 30 as an output means, a screw rod 31, a joint 33 connecting the output shaft 32 of the motor 30 and the screw rod 31, and It is mainly composed of a bush 34. Then, the motor 30 is fixed to the substrate 2, and the bush 34 is screwed to the screw rod 31 and fixed to the slider 24. With this configuration, when the motor 30 is output, the slider 24 slides in the direction of arrow C, and the sliding movement of the slider 24 causes the pivoting member 23 to move in the direction of arrow D, which is the up and down direction. Part 9
Is to change the distance between the part of the substrate 2 and the part of the mounting member 3 that are supported.

Each of the motors 25 and 30 is a step motor that makes one rotation in 1000 steps.
The pitch of the screws of both the screw rods 26 and 31 is determined so that the bushes 29 and 34 respectively move by 0.5 mm in the direction of arrow C by one rotation.

The control means 6, as shown in FIG.
The motor driver 49 and the controller 50 of the motor 25 for outputting the motor 5 as desired, the motor driver 51 and the controller 52 of the motor 30 for outputting the motor 30 as desired, and the output amounts of the motors 25 and 30 are obtained. Amount calculation unit 53 of motors 25 and 30 for
And a data memory 5 for storing data from the detecting unit 36.
4, an average inclination angle calculator 55 for calculating an average inclination angle of the mounting member 3, and a system controller 56. The control means 6 detects the attitude of the mounting member 3 with respect to the substrate 2, and when a desired attitude is determined, outputs a signal for setting the detected attitude to the desired attitude to the variable means 4 and the variable means 5. Is what you do. The detailed operation of the control means 6 will be described later in the description of the use of the leveling device 1.

Further, when the support portion 8 and / or the support portion 9 changes the distance between the substrate 2 and the mounting member 3, the mounting member 3 moves with respect to the substrate 2 by the change.
If the support unit 7 is to rotate about a straight line connecting the two portions supporting the substrate 2 and the mounting member 3 (in the direction of arrow E), a regulating means 63 for preventing the rotation is provided. The restricting means 63, as shown in FIGS.
The groove 15 formed on the upper part of the slider 24 and the spherical roller 2
2 is comprised. The leveling device 1 is configured as described above. In the following, a surface roughness meter 35 will be described using a flowchart (FIG. 8) showing an outline of an operation sequence and a flowchart (FIGS. 9 to 12) showing an operation sequence.
The use of the leveling device 1 when used together with is described.

The measurement of the inclination (posture) of the object 48 placed on the leveling device 1 is performed by using a surface roughness meter 35. That is, in detail, the surface roughness is measured by performing at least two different scans on the surface to be measured (upper surface) of the object to be measured 48 by the surface roughness meter 35, and the three-dimensional relative position of a point in the scan is measured. Find coordinates. An average surface is determined based on a plurality of data obtained by the coordinate measurement, and the determined average surface is regarded as a plane of the measured surface of the measured object 48 (“calculation of average surface” in FIG. 8). Then this plane,
The leveling device 1 is set to be parallel to the scanning direction of the detection unit 36 regardless of the movement of the device under test 48 in the direction of the arrow Y.
Is operated to perform inclination correction (attitude control) of the object 48 to be measured.

When the inclination correction is required only in two dimensions, the surface roughness meter 35 is scanned only once with respect to the object 48 to measure the surface roughness once. Is achieved by operating the leveling device 1 so that the regression line is parallel to the scanning direction of the detection unit 36 (see “To automatically perform inclination correction (posture control) in FIG. 8). , Operation and display panel 4
In the case where n = 1 is set in “Setting the necessary measurement conditions in 2”). In the surface roughness measurement for tilt correction (attitude control), the raw data sent from the detection unit 36, that is, the data representing the cross-sectional curve itself indicating the surface roughness of the measured object 48, so-called raw Data is used, for example, data obtained via a filter for removing a swell component is not used.

As shown in FIG. 7, the surface roughness meter 35 includes a detection unit 36 provided with a stylus (not shown) and a motor 37, and holds the detection unit 36 to scan in the direction of arrow X. A scanning unit 38 and a motor 39 are provided, and a slide unit 41 that slides the scanning unit 38 in the up and down direction, that is, the arrow Z direction along the column 40 is provided.
The front surface of the base 44 of the surface roughness meter 35 is an operation / display panel 42.

The leveling device 1 is mounted on a slider 46 of a slide device 43 on a base 44 of a surface roughness meter 35. The slide device 43 is provided with a motor 45,
The slider 46 is configured to slide in the arrow Y direction with respect to the main body 47. A motor driver 57 and an arrow X direction controller 58, a motor driver 59 and an arrow Z direction controller 60, and a motor driver 61 and an arrow Y direction controller 62 are provided between the system controller 56 and the motors 37, 39 and 45, respectively. Intervened.

Here, the slide device 43 is arranged such that the scanning direction of the detection unit 36 of the surface roughness meter 35 and the moving direction of the slider 46 are perpendicular to each other. Next, the device under test 48 is mounted on the mounting member 3 of the leveling device 1 and
The leveling device 1 such that the surface to be measured, that is, the upper surface of the object to be measured 48 is parallel to the moving direction of the stylus.
Activate

The leveling device 1 includes an operation / display panel 4
By operating 2, the operator first sets various conditions for using the surface roughness meter 35, that is, measurement conditions such as measurement range setting, sampling length setting, measurement length setting, and scanning interval setting. Subsequently, the scanning / display panel 42
To turn on the auto leveling selection key.

Subsequently, measurement conditions for automatically correcting the inclination (position control) of the mounting member 3 on which the object 48 is mounted are set. The scanning unit 38 is operated, the detection unit 36 scans and detects the surface roughness of the object 48, and the slide device 43 is operated to slide the object 48 in the direction of the arrow Y by a distance determined by the scanning interval Dy. The operator sets the number of scans n for performing the scanning detection of the surface roughness later. By setting this number n,
A signal for outputting the motor 45 (n-1) times is sent from the system controller 56 to the arrow Y-direction controller 62. Of course, the greater the number of scans n, the greater the data, and more accurate leveling can be performed. Here, the sampling interval Δ in the arrow Y direction
y is determined.

Here, the start key is turned ON to start the preliminary measurement. With the start of this preliminary measurement, the system controller 56 sends the arrow X direction controller 58
The output of the motor 37, that is, a signal for operating the scanning unit 38 is sent, and the detection data is sent from the detection unit 36 to the data memory 54 of the control unit 6. Therefore, the scanning unit 38 and the detecting unit 3 of the surface roughness meter 35
6 is activated and the data memory 54 takes in discrete data in the range of the distance Lx. Data acquisition is performed on the DUT 48
Is ensured to be within a measurable range, and is performed by n times of scanning detection.

At the time of this scanning detection, the slide device 43
Performs (n-1) times of slide operations,
The position j in the arrow Y direction 6 and the moving distance Dy in the arrow Y direction until the next scan detection are given by the equations shown in the flowchart of FIG. If the measurement exceeds the measurable range, that is, if an overrange condition occurs or the limit of the slide device 43 is exceeded, the preliminary measurement is interrupted and a new preliminary measurement is performed again.

By the above preliminary measurement, an average plane is obtained based on a plurality of data obtained from the coordinate measurement. The average plane determined here is regarded as the plane of the measured surface of the measured object 48. Note that the average plane is set as Z = a + bX + cY, and the constants b and c are obtained from this. Then, from the constants b and c, the inclination components of the average plane in the arrow X direction and the arrow Y direction with respect to the arrow Z direction are obtained. That is, a component λ in the direction of the arrow X and a component μ in the direction of the arrow Y of the direction cosine vector of the average plane Z are obtained. The data stored in the data memory 54 of the control means 6 is transmitted to the system controller 5
6 is sent to the average inclination angle calculation section 55, and the inclination angle of the average plane is obtained. Here, the inclination components of the average plane in the arrow X direction and the arrow Y direction with respect to the arrow Z direction are obtained.

Here, the system controller 56 sends a signal for calculating the output amount of the motors 25 and 30 of the variable means to the output amount calculating section 53 of the motors 25 and 30, and in the case of the automatic function ("h" in FIG. 9). = 0 ”) is the motor 3
The signal 9 is output and the slide unit 41 is operated to send a signal for raising the detecting unit 36 by 10 mm from the measured object 48 to the arrow Z direction controller 60, and the detecting unit 36 moves up by 10 mm in the arrow Z direction.

Here, the leveling function of the leveling device 1 operates, and the inclination correction (attitude control) of the measured surface of the measured object 48 is executed. Output amount calculation unit 5 for motors 25 and 30
3, the system controller 56 sends the motor 25 and the motor 30 to the controller 50 of the motor 25 and the controller 52 of the motor 30.
Are sent to output a predetermined amount.

The variable means 4 and the variable means 5 are operated by the outputs of the motor 25 and the motor 30, respectively. That is, the slider 21 in the variable means 4 and the slider 24 in the variable means 5 slide by a predetermined distance in the direction of arrow C, and by this sliding, the slider 21 engages with the spherical roller 19 and the slider 24 engaged with the slider 21. Each of the spherical rollers 22 moves in the direction of arrow D by a predetermined amount, and the distance between the substrate 2 supported by the support portion 8 and the mounting member 3 and the position of the substrate 2 supported by the support portion 9 are set. The distance between the members 3 changes. On the other hand, the distance between the substrate 2 and the mounting member 3 supported by the support unit 7 does not change and remains constant.
By determining the support state of these three support portions 7, 8 and 9, tilt correction (posture control) of the mounting member 3 with respect to the substrate 2 is performed, and as a result, tilt correction (posture) of the measurement surface of the DUT 48 is performed. Control) is performed.

When the mounting member 3 is within the limit, the tilt correction (posture control) is repeated so that the degree of correction obtained by the tilt correction (posture control) becomes as much as desired by the measurer. A state where the measurement object 48 is in a desired posture is obtained. The measurer can use the surface roughness meter 35 to measure the surface roughness of the object 48 in a desired posture.

In the operation of the leveling device 1 described above,
When the variable means 4 and the variable means 5 output different amounts, the force of the amount corresponding to each output is applied to the supporting unit 8.
And the supporting portion 9 act on the substrate 2 and the placing member 3 to move the placing member 3 in the direction of arrow D with respect to the substrate 2 in accordance with the respective forces. By the movement in the direction of the arrow D, the pillow block 12 on the side of the mounting member 3 with respect to the ball 11 on the side of the substrate 2 in the support section 7 causes two straight lines orthogonal to the axis of rotation in the direction of the arrow E. (The directions of arrows A and B). With this rotation,
The mounting member 3 can take a desired posture with respect to the substrate 2.

Here, when the output of the variable means 4 and the output of the variable means 5 are different, considering the force generated by the difference of the different force amounts, this force acts on the ball 11 and the pillow block 12. When the ball 11 and the pillow block 12 are relatively rotated in the direction of arrow E by the action of this force, relative rotation in the direction of arrow E occurs between the substrate 2 and the mounting member 3. Will be. However, since the slider 24 is held on the substrate 2 side and the spherical roller 22 is pivotally supported on the mounting member 3 side, when the above relative rotation is to be performed, the spherical roller 22 and the slider 24
The pressing force acts between the groove portions 15 of the first and second portions to restrict the rotation. Therefore, the mounting member 3 does not rotate in the direction of the arrow E with respect to the substrate 2 but rotates only in the directions of the arrows A and B. Therefore, even if the mounting member 3 performs the inclination correction (posture control) on the substrate 2, the object 48 mounted on the mounting member 3 does not control the surface roughness meter 35 except for the posture control. There is no problem of causing a position change.

In the following, another embodiment of the present invention will be described with reference to FIG. The leveling device 1a differs from the above-described leveling device 1 only in the configuration of the restricting means, but is otherwise the same.

The regulating means 63a of the leveling device 1a
It comprises a regulating member 64a and a pressing member 65a. The restricting member 64a is formed with a groove 15a having a V-shaped cross section and extending in the vertical direction for performing the restricting action. The regulating member 64a is fixed to the substrate 2a. The pressing member 65a has a spherical body 66a at its tip,
4a is engaged with the groove 15a. The pressing member 65a is fitted in the dovetail groove 67a formed in the mounting member 3, and is pressed by an arrow Fa by the pressing force of the coil spring 68a.
It is slidably biased in the direction.

When the supporting portions 8a and 9a change the support state of the substrate 2a and the mounting member 3a so that the variable means 4a and 5a operate to change the distance between the substrate 2a and the mounting member 3a, respectively. The mounting member 3a is positioned on the substrate 2a by the arrow E
There is a case where it is attempted to rotate in the a direction. This rotation is in the direction of the arrow Ea about the support portion 7a. However, the sphere 66a of the pressing member 65a is moved to the groove 15 of the regulating member 64a.
a in the direction of arrow Ea to restrict the mounting member 3a from rotating in the direction of arrow Ea with respect to the substrate 2a.
And the mounting member 3a does not relatively rotate in the direction of the arrow Ea. In the leveling device 1, the support device 9 is provided with only one control device 63, but the support device 8 may be provided with another control device.

In the leveling device 1a, when the mounting member 3a changes its attitude (inclination) with respect to the substrate 2a, the pressing member 6
The sphere 66a of 5a slides with respect to the groove 15a of the regulating member 64a. By using a spherical roller in place of the spherical body 66a, a configuration in which rolling engagement is performed can be achieved.

[0038]

According to the present invention, three support portions are provided between the substrate and the mounting member so as not to be on the same straight line , and the mounting member is disposed on the substrate, and the first support portion is disposed on the substrate. When the rotation is made about a straight line connecting the two parts supporting the mounting member and the axis, the restricting means for preventing the rotation is provided from the first support portion onward.
By being provided outside, when the inclination correction (posture control) of the mounting member is performed on the substrate, the two portions of the substrate and the mounting member supported by the support unit are connected before and after the inclination correction. This is a leveling device in which the substrate and the mounting member do not relatively rotate about a line segment, and the object on the mounting member does not rotate on a plane parallel to the substrate.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a plan view of the embodiment shown in FIG. 1 when a mounting member is removed.

FIG. 3 is a sectional view taken along line II of FIG. 1;

FIG. 4 is a side view of the embodiment shown in FIG.

FIG. 5 is a cross-sectional view of a first support portion and its vicinity in the embodiment shown in FIG. 1;

FIG. 6 is an explanatory diagram showing a control system including the configuration of the control means of the embodiment shown in FIG. 1 and operating when operated together with the surface roughness meter and the slider device.

FIG. 7 is an overall perspective view when the embodiment shown in FIG. 1 is operated together with a surface roughness meter and a slider device.

FIG. 8 is a flowchart showing an outline of an operation sequence when the embodiment shown in FIG. 1 is operated together with the surface roughness meter and the slider device.

FIG.

FIG.

FIG.

FIG. 12 is a flowchart showing an operation sequence when the embodiment shown in FIG. 1 is operated together with the surface roughness meter and the slider device.

FIG. 13 is a diagram corresponding to FIG. 1 of another embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Leveling device 2 Substrate 3 Mounting member 7, 8, 9 Supporting part (supporting means) 22 (spherical roller), 65a Pressing member 24 (slider), 64a Controlling member 63 Controlling means

Continuation of the front page (56) References JP-A-4-58307 (JP, A) JP-A-4-300148 (JP, A) JP-A-4-283049 (JP, A) (58) Fields investigated (Int .Cl. ⁶ , DB name) B23Q 17/20 G01B 21/22 G05B 3/00

Claims (5)

(57) [Claims] 1. A substrate, a mounting member on which an object to be mounted is mounted, and a support member interposed between the substrate and the mounting member, wherein the distance between the substrate and the mounting member is maintained at a fixed distance and supported. The first support portion, and the second and third support portions that variably support the distance between the substrate and the mounting member independently of each other, can support the mounting member in a desired posture with respect to the substrate. A supporting means, wherein the supporting means has a first, a second, and a third supporting portion which are the same;
When the second support and / or the third support change the distance between the substrate and the mounting member, the mounting member is disposed on the substrate when the second supporting portion and / or the third supporting portion changes the distance between the substrate and the mounting member. On the other hand, when the first support unit tries to rotate around a straight line connecting the two parts supporting the substrate and the mounting member, a restricting means for preventing the rotation is provided in addition to the first support unit. Leveling device provided. Wherein regulating means includes a regulating member installed on one of members of a substrate or mounting member, a straight line first support portion connecting the two sites for supporting the substrate and the mounting member in parallel A substrate on which the regulating member is installed in contact with or in contact with the regulating member so as to apply a pressing force to the regulating member when the regulating member is about to rotate about the axis.
2. The leveling device according to claim 1, wherein the mounting member comprises a pressing member installed on a member on the other side. 3. The leveling device according to claim 2, wherein the regulating member and the pressing member of the regulating means perform rolling engagement or sliding engagement. 4. The leveling device according to claim 3, wherein the regulating member of the regulating means is a groove member having a groove, and the pressing member is a spherical roller or a sphere having a partial spherical surface, which fits into the groove of the groove member. . 5. A first variable means and a second variable means provided on the second support part and the third support part of the support means, respectively, for varying the distance between the substrate and the mounting member; When the posture of the member with respect to the substrate is detected, based on the detection result, the second support unit and the third support unit are operated to operate the two variable means so that the mounting member can take a desired posture. The leveling device according to claim 1, further comprising control means for controlling.