JP5136940B2 - 3D measuring device - Google Patents

Description

  The present invention relates to a three-dimensional measuring apparatus capable of measuring a three-dimensional coordinate of an arbitrary point or point group within a measurement range and measuring a shape of a measurement target.

  Conventionally, for example, in order to inspect and measure the shape and dimensions of a machined part, it has a drive shaft having a linear movement mechanism in the directions of the X axis, the Y axis, and the Z axis orthogonal to each other. There is known a three-dimensional measuring instrument that can measure the three-dimensional coordinates of the surface to be measured in units of μm with a probe that can be moved to a space.

  On the other hand, the rotational movement of the column is provided at the top of the column in order to correct in real time the measurement error caused by the static and dynamic rotational movement of the stylus type three-dimensional measuring device composed of a portal frame. A measurement error correction apparatus in a three-dimensional measuring machine has been proposed in which a correction amount vector is obtained from the angle detected by a gyro sensor and a measurement coordinate is corrected in real time (see Patent Document 1).

In addition, in order to correct errors due to thermal expansion of the Z stage and probe unit components due to temperature fluctuations in the measurement environment, the height in the Z-axis direction of the surface to be measured is sequentially measured while scanning on the XY plane. in the three-dimensional shape measuring how to output the shape of the target, and the coordinate data acquisition step of the first trajectory (the line trajectory) and the trajectory of the second to n to measure the surface shape so as to intersect, the i (i = 2 to n), the intersection calculation step for obtaining the intersection in the XY plane with the first locus, and the Z coordinate for obtaining the difference between the Z coordinates of the first locus and the i-th locus at all intersections. There has been proposed a three-dimensional shape measurement method in which the i-th trajectory coordinate data is corrected from the difference between the Z coordinates obtained in the calculation step and the difference calculation step of the Z coordinate (see Patent Document 2).

  However, in these conventional stylus type three-dimensional shape measuring devices, in order to realize high-accuracy measurement in units of 1 μm, the components of the measuring device are manufactured with extremely high accuracy, and in order to keep thermal expansion low. There are problems such as using components made of special materials such as ceramics and further requiring measurement in a temperature-controlled room to avoid a decrease in measurement accuracy due to temperature fluctuations in the measurement environment.

Thus, not only is the measurement apparatus expensive, but when the prior art disclosed in Patent Document 2 is used, it intersects at least one locus in the first direction with the first locus in the XY plane. Record multiple coordinates and time of the measured surface from the trajectory control means that operates the scanning means to measure multiple trajectories in the direction, the output of the coordinate measuring means, the output of the probe device, and the time output by the clock Recording means for calculating intersection points of the intersection points of the first trajectory and all trajectories crossing the first trajectory from the coordinate data recorded in the recording means, Intersection calculation means for obtaining the Z coordinate of each trajectory and obtaining the difference in the Z direction between the first trajectory and all trajectories crossing the first trajectory, all crossing the first trajectory from the difference of the Z-axis coordinates of each intersection Requires coordinate correction means to correct the Z-direction coordinate of the trajectory Etc., there is a problem of apparatus and measuring operation becomes complicated elaboration.

Further, in the processing of general industrial parts and the like, although the three-dimensional measuring apparatus has a measurement accuracy in units of 10 μm, there is no apparatus corresponding to the measurement accuracy. Furthermore, in order to perform quick and efficient three-dimensional measurement, it is necessary to have a three-dimensional measuring apparatus that can automatically and instantaneously return the stylus (measuring head) to the center (original position).

  The present invention automatically and accurately returns the stylus (measuring head) to the center (original position) after measurement at a certain point, which is suitable for three-dimensional measurement of general industrial parts and the like with a simple apparatus configuration. An object of the present invention is to provide a three-dimensional measuring apparatus that can be used in a simple manner.

  Another object of the present invention is to automatically and accurately return the stylus (measuring head) to the center (original position) after measuring a certain point, as well as geometrical errors and assembly of apparatus components. An object of the present invention is to provide a three-dimensional measuring apparatus with an accuracy of 10 μm that can correct errors and can correct errors caused by temperature changes in the measurement environment. In addition, it is to provide a practical and inexpensive three-dimensional measuring device that can easily cope with the development and expansion of its own program tailored to the application.

The present invention for solving the above-described problems includes a probe unit 36 having a stylus (measuring head) 38 , and an X stage 7 , a Y stage 17 , which displaces the probe unit 36 in the X direction, the Y direction, and the Z direction. And a moving stage composed of a Z stage 27 and a surface plate 5 placed on a machine base, in which the stylus (measuring head) 38 is returned to its original position in the probe unit 36 . A center pin 46 that is coaxially extended with the stylus 38 and is manufactured from the same member, and a pair of stopper pins 47 that extend in parallel with the center pin 46 are sandwiched between the center pin 46 and the outside. defining the same spacing and diameter, a pair of limiters 49 moves horizontally opposed to each other, press the limiter 49 from the back The center pin X direction returning mechanism and the Y-direction return mechanism consists of a compression spring 45 for urging a three-dimensional measuring apparatus comprising a center pin returning mechanism which is disposed in two layers in the Z-axis direction.

The invention described in claim 2 includes a probe unit 36 having a stylus (measuring head) 38 , and an X stage 7 , a Y stage 17 , and a Z that displace the probe unit 36 in the X, Y, and Z directions. A three-dimensional measuring apparatus comprising a moving stage comprising a stage 27 and a surface plate 5 placed on a machine base,
a. Stylus is arranged in the probe unit 36 to allowed to return to (measuring head) 38 to the original position, parallel to the center pin 46 while being made from the same member and a center pin 46 extending over the stylus 38 coaxially A pair of limiters 49 that horizontally move opposite to each other, sandwiching a pair of extending stopper pins 47 and defining the same distance as the outer diameter of the center pin 46 , and a compression that presses and biases the limiters 49 from the back side. A center pin return mechanism comprising a center pin X direction return mechanism and a Y direction return mechanism comprising springs 45 arranged in two layers in the Z-axis direction;
b. A bearing unit disposed on each of the four columns on the machine base so as to adjust the parallelism between the displacement direction of the X stage 7 , the Y stage 17 , and the Z stage 27 and the surface of the surface plate 5. an adjustment screw 52 having a ball receiving seat 54 of inverted conical shape in its upper portion as well as the lift is driven to rotate in the frame 51 of the 50 by screwed manually or motor, X stage while being placed on the adjustment screw 52 Ends of the guide rods 11 and 21 of the 7 and Y stage 17 are inserted in the horizontal direction, and a ball 55 urged downward by a compression spring 57 stored in the frame of the bearing unit 50 from the upper surface thereof . A parallelism adjusting mechanism for the surface of the surface plate of the stage consisting of:
c. This is a three-dimensional measuring apparatus having arithmetic processing means for correcting an error caused by a change in temperature of the measurement environment.

According to a third aspect of the present invention, the probe unit (36) has a plurality of contact-type high-precision displacement sensors (37) and a touch plate (39) on which the lower ends of the contact-type high-precision displacement sensors (37) are placed. The touch plate (39) is fixed integrally with the connecting member of the stylus (38) and the center pin (46), and the connecting member of the stylus (38) and the center pin (46) is fixed to the touch plate (39). ) Is slidably fitted into a hole in the center of the upper horizontal plane of the rotating hemisphere (42) on which the rotating hemisphere (42) is placed, and the rotating hemisphere (42) is disposed below the probe unit (36). The lower half of the rotating hemisphere (42) is supported on at least three support balls (43) which are rotatably supported on the lower frame (60) and fixed and supported at equal intervals in the horizontal circumferential direction. The rotating hemisphere (42) is urged downward by the compression spring (45) through the pressing rod (44), and the center pin (46) and the stylus (measuring head) (38) in the center Z-axis direction of the rotating hemisphere (42). ) Is fixed on the same axis, and the touch plate (39) placed on the upper horizontal surface of the rotating hemisphere (42) is placed on the rotating hemisphere (42) by contacting the tip of the stylus (38) with the surface to be measured. ) Tilts the touch plate (39) in response to the tilting of the support ball (43) on the support ball (43), and measures the tilt of the touch plate (39) with the contact-type high-precision displacement sensor (37). The stylus (measuring head) (38) at the time when the displacement amount of the displacement sensor (37) reaches the set value can be measured from the movement amount of the X, Y, Z stage at the tip of the sphere center. Are those wherein the three-dimensional measuring apparatus according to claim 1 or claim 2.

  According to the present invention, it is suitable for three-dimensional measurement of general industrial parts and the like, and can be quickly and accurately returned to the center (original position) of a stylus (measuring head). Equipment can be provided at low cost. In addition, maintenance is easy because the structure is simple, and functions can be expanded according to the measurement characteristics of the company's products.

  In addition to the above effects, the invention according to claim 2 can correct part manufacturing errors, assembly errors, and apparatus dynamic errors, and can also correct errors caused by temperature changes in the measurement environment. Enables practical three-dimensional measurement that is not required. According to the stage parallelism adjusting mechanism using the bearing unit of the present invention, there is an advantage that no stress is generated due to assembly and adjustment of the three-dimensional measuring apparatus, and automatic control can be supported.

  According to the third aspect of the present invention, the three-dimensional coordinates of the stylus (measurement head) tip sphere center are continuously within a certain range, that is, within a range equal to or less than the set value of the displacement amount of the contact-type high-precision displacement sensor. It becomes possible to measure continuously, and continuous three-dimensional measurement of the measurement object is possible. Thus, in the X, Y, Z space, it is possible to measure a three-dimensional coordinate value of an arbitrary point or group of points within the measurement range, and to extend it to perform shape measurement or output in a specified format.

It is a perspective view which shows the whole structure of the three-dimensional measuring apparatus which concerns on one Example of this invention. It is a perspective view which shows the external appearance of the probe unit in the three-dimensional measuring apparatus which concerns on one Example of this invention. It is a longitudinal cross-sectional perspective view which shows the internal structure of the probe unit in the three-dimensional measuring apparatus which concerns on one Example of this invention. It is a perspective view which shows the center (original position) return mechanism of the stylus (measuring head) in the three-dimensional measuring apparatus which concerns on one Example of this invention. (A) Whole perspective view showing center (original position) return mechanism of stylus (measuring head) (b) Vertical cross-sectional perspective view showing internal structure (c) Vertical cross-sectional perspective view showing internal structure. It is a perspective view which shows arrangement | positioning of the stage parallelism adjustment mechanism in the three-dimensional measuring apparatus which concerns on one Example of this invention. It is a perspective view which shows the bearing unit of the stage parallelism adjustment mechanism in the three-dimensional measuring apparatus which concerns on one Example of this invention. (A) External perspective view (b) Longitudinal sectional perspective view showing internal structure It is a block diagram which shows an algorithm when performing a three-dimensional measurement using the three-dimensional measuring apparatus which concerns on one Example of this invention. It is a block diagram which shows the algorithm of the correction | amendment with respect to the temperature change of a measurement environment when performing a three-dimensional measurement using the three-dimensional measuring apparatus which concerns on one Example of this invention.

  Hereinafter, embodiments of the present invention will be described with reference to preferred examples. The three-dimensional measuring apparatus of the present invention is mainly composed of a probe unit, a moving stage, a machine base, and a controller system. A contact-type high-precision displacement sensor is incorporated in the probe unit, and a stylus (measuring head) at the tip of the probe unit contacts the measurement object to sense its position and determine the timing for reading the three-dimensional coordinates. The moving stage (X, Y, Z stage) has a probe unit transfer function.

The machine base is a structure on which a surface plate serving as a measurement table and a moving stage are placed. A height-adjustable bearing unit is fixed on the four pillars of the machine base, and the parallelism of the moving stage with respect to the surface plate is adjusted by this bearing unit. Each moving stage in the X, Y, and Z directions is provided with a high-precision non-contact type laser displacement sensor to accurately measure the moving distance of each moving stage.

  The controller system mainly includes a controller for operating each moving stage and a data processing computer. Operation commands and processing programs for the three-dimensional measuring apparatus are supplied by the controller system.

FIG. 1 shows a three-dimensional measuring apparatus according to an embodiment of the present invention. In FIG. 1, 1 is a three-dimensional measuring device, 2 is a base, 3 is a support, 4 is a connecting member, 6 is a frame, and the base 2, the support 3, the connecting member 4, and the frame 6 are machine bases. The surface plate 5 is placed and fixed by the base 2 and the frame 6. An X stage 7 has one end screwed into the ball screw 20 of the Y stage 17 and displaced in the Y-axis direction as shown in FIG. Reference numeral 8 denotes a laser displacement sensor that measures the distance from the laser reflection plate 9. A ball screw 10 is rotationally driven by the motor 12 and displaces the Z stage 27 in the X-axis direction. Reference numeral 11 denotes a guide rod, both ends of which are supported by the bearing unit 50 and function to guide the displacement of the X stage 7 in the Y-axis direction. Thus, the X stage 7 is supported at one end by the guide rod 11 supported at both ends thereof by the bearing unit 50, and does not generate any stress, and can cope with automatic control.

  The Y stage 17 displaces the X stage 7 in the Y axis direction by rotational driving of the ball screw 20 by the motor 22. Reference numeral 18 denotes a laser displacement sensor that measures the distance from the laser reflection plate 19. Reference numeral 11 denotes a guide rod, both ends of which are supported by the bearing unit 50 and support the Y stage 17.

  The Z stage 27 displaces the yoke support frame 34 in the Z-axis direction by the rotational drive of the ball screw 30 by the motor 32. Reference numeral 28 denotes a laser displacement sensor that measures the distance from the laser reflecting plate 29. The yoke support frame 34 fixes and holds the yoke 35, and the probe unit 36 is fixed to the yoke 35. 37 is a contact-type high-precision displacement sensor, and 38 is a stylus (measuring head). Reference numeral 33 denotes a weight block base, and a weight block (not shown) is fixed to balance with the probe unit 36 so that the vertical load of the Z stage 27 is loaded on the X stage 7 without deviation.

  FIG. 2 shows the appearance of the probe unit 36. In FIG. 2, 37 is a contact-type high-precision displacement sensor, and 38 is a stylus (measuring head). In this embodiment, the tip spherical portion is formed of ruby. Reference numeral 39 denotes a touch plate.

FIG. 3 shows the internal structure of the probe unit 36. As shown in FIG. 3, the lower part of the contact type high precision displacement sensor 37 is in contact with the touch plate 39, and the contact type high precision displacement sensor 37 is displaced in the axial direction in response to the tilting of the touch plate 39. In this embodiment, as shown in FIG. 3, two contact-type high-precision displacement sensors 37 are disposed in the X-axis direction and two in the Y-axis direction. The tilt of the touch plate 39 can be measured even with one, two arrangements in the Y-axis direction. In that case, a press is required to balance the touch plate 39. Further, as shown in FIG. 3, the contact-type high-precision displacement sensor 37 is held by the horizontal arm portion of the yoke 35 and the contact-type high-precision displacement sensor support frame 41.

As shown in FIGS. 3 and 4A, the touch plate 39 is fixed integrally with the coupling member of the stylus 38 and the center pin 46, and the coupling member is formed in the central hole in the upper horizontal plane of the rotating hemisphere 42. The touch plate 39 is tilted in accordance with the X-axis direction component and the Y-axis direction component of the tilt of the rotating hemisphere 42 and is integrated with the stylus (measuring head) 38. The constructed touch plate 39 is displaceable in the axial direction of the through hole formed in the center of the upper surface of the rotating hemisphere 42 with respect to the rotating hemisphere 42. Rotation hemisphere 42 is exhibited thereunder a spherical, the spherical portion, as shown in FIG. 3, rotatably fixed at equal intervals in the horizontal circumferential on the lower frame 60 of the probe unit 36, bearing It is supported so as to be able to roll on at least three support balls 43.

  As shown in FIG. 3, the rotating hemisphere 42 is urged downward by a compression spring 45 through the rotating hemisphere pressing rod 44 from the upper portion thereof and is placed on the support ball 43. Thus, when the tip of the stylus (measuring head) 38 contacts and displaces on the surface to be measured, the stylus (measuring head) 38 is tilted, whereby the rotating hemisphere 42 rolls at an angle on the support ball 43. As a result, the touch plate 39 tilts, and this is detected by the contact-type high-precision displacement sensor 37.

  The displacement of the stylus (measuring head) 38 in the Z-axis direction is detected by the laser displacement sensor 28 in the Z stage 27, and the probe unit stops moving from the controller when the displacement amount (for example, 20 μm) of the contact-type high-precision displacement sensor 37 is greater than or equal to. Upon receiving the command, the spatial coordinates of the center point of the tip sphere (ruby) of the stylus (measuring head) 38 at this time are read from the movement amounts of the X stage, Y stage, and Z stage. In FIG. 3, reference numeral 40 denotes a center return unit.

In the three-dimensional measuring apparatus of the present invention, the measurement of coordinate values in the Z direction of the tip sphere (ruby) of the stylus (measuring head) 38 is performed as follows.
1) Before the stylus (measuring head) 38 contacts the surface to be measured, the touch plate 39 integrated with the stylus (measuring head) 38 is composed of four contact-type high-precision displacement sensors in this embodiment. The initial pressure of 37 and the center return mechanism shown in FIG.
2) When the probe unit 36 is lowered and the tip of the stylus (measuring head) 38 comes into contact with the surface to be measured, the touch plate 39 is lifted with respect to the rotating hemisphere 42, and the contact-type high-precision displacement sensor 37 is further displaced. Give birth. At the same time, the center return mechanism shown in FIGS. 4A, 4B, and 4C allows a stylus (measuring head) even if there is a minute difference in reaction force due to displacement of each contact-type high-precision displacement sensor 37. The vertical movement of 38 is secured.

3) When the touch plate 39 rises with respect to the rotating hemisphere 42, the relative movement is only in the axial direction of the central hole in the upper horizontal plane of the rotating hemisphere 42. As shown in FIG. 3, the rotating hemisphere 42 is urged downward by a compression spring 45 through the rotating hemisphere pressing rod 44 from the upper portion thereof and is placed on the support ball 43.
4) Conversion processing such as offset is performed on the value measured by the laser displacement sensor 28 at the moment when the movement amount of the stylus (measuring head) 38 and the interlocking touch plate 39 reaches a set value, for example, 5 μm, to be measured. Determine the 3D coordinate value of a point.
5) Issue a measurement stop command in the Z direction. After a certain amount of movement due to signal transmission delay or inertia continues, the stylus (measuring head) 38 moves away from the measurement point, and the measurement operation at one point is completed.

  4A, 4B, and 4C show a center return mechanism of a stylus (measuring head) 38 according to one embodiment of the present invention. 4A, 4B, and 4C, 40 is a center return unit, 38 is a stylus (measuring head), 39 is a touch plate, and 42 is a rotating hemisphere. Reference numeral 46 denotes a center pin, which is fitted and fixed so as to extend in the Z-axis direction at the center of the rotating hemisphere 42 coaxially with the stylus (measuring head) 38 as shown in FIG.

  As shown in FIGS. 4B and 4C, the center return unit 40 includes a stopper pin 47, a limiter 49, and a compression spring 45. The stopper pin 47 is made of the same member as the center pin 46 and has the same outer diameter. Thus, when the stylus (measuring head) 38 is detached from the surface to be measured, the limiter 49 pressed by the compression spring 45 is displaced horizontally toward the axis of the center pin 46 and pinches the stopper pin 47. .

  The combination of the compression spring 45, the stopper pin 47, and the limiter 49 has a multilayer structure in the Z-axis direction in the X-axis direction and the Y-axis direction, and a pair of stopper pins 47 independently in the X-axis direction and the Y-axis direction. Is sandwiched between a pair of limiters 49. Thus, when the stylus (measuring head) 38 is in a free state, the center pin is instantaneously formed by two pairs of limiters 49 that sandwich the pair of stopper pins 47 independently in the X-axis direction and the Y-axis direction. A horizontal square appears that matches the outer diameter of 46. By constraining the center pin 46 to this square, the center (original position) return of the stylus (measuring head) 38 is instantaneously and accurately performed.

  FIG. 5 shows a stage parallelism adjusting mechanism in the three-dimensional measuring apparatus according to one embodiment of the present invention. The description of the components having the same reference numerals as those in FIG. In FIG. 5, 50 is a bearing unit, 55 is a ball, and 57 is a compression spring. The stage parallelism adjusting mechanism functions to make the upper surface of the surface plate 5 shown in FIG. 1 parallel to the X stage 7 and the Y stage 17.

  6A and 6B show the structure of the bearing unit 50 in the stage parallelism adjusting mechanism. FIG. 6A is a perspective view showing the appearance of the bearing unit 50, and FIG. 6B is a longitudinal sectional view showing the internal structure. 6A and 6B, 51 is a frame, 52 is an adjustment screw, 53 is a hexagon hole for adjusting screw rotation, and 54 is a ball receiving seat, which are formed on the upper portion of the adjustment screw 52. 55 is a ball, 56 is a fixing screw hole, and 57 is a compression spring. 6A and 6B, 11 is a guide rod for the X stage 7, and 21 is a guide rod for the Y stage 17.

  As shown in FIG. 6 (b), the end portions of the guide rods 11 and 21 are horizontally inserted into the ball 55 so that the axis of the guide rods 11 and 21 passes through the ball center. The ball 55 is pressed against an inverted conical (conical bowl-shaped) ball receiving seat 54 formed on the top of the adjusting screw 52 by a compression spring 57 whose upper end is fixed to the frame 51. Thus, in order to keep the parallelism between the X stage 7 and the Y stage 17 with the upper surface of the surface plate 5 within a desired accuracy, for example, 3 μm, a hexagonal screwdriver (bar A wrench is inserted and rotated manually or by motor drive, and the ball 55 is moved up and down for adjustment. The bearing units 50 are disposed at the upper four positions of the machine base and can be lifted and lowered independently.

  FIG. 7 shows an algorithm for performing three-dimensional measurement using the three-dimensional measuring apparatus according to one embodiment of the present invention. The three-dimensional measuring apparatus of the present invention is premised on being used in a normal room temperature environment or a production site. After starting the measurement, first, parameters such as temperature and measurement range are input as initial values. Next, the parallelism of the X stage and Y stage working plane is tested with respect to the upper plane of the surface plate 5 serving as a reference in the XY direction. As a result, if it is within the set allowable value ε (for example, 3 μm), the procedure proceeds to the geometric error correction procedure in the XYZ directions. If the parallelism of the X-stage and Y-stage working planes exceeds ε, the adjustment screws 52 in the four bearing units attached to the upper part of the support column 3 are rotated, and the adjustment is sequentially repeated within ε. Perform calibration so that

  Next, a spatial error when the three-dimensional measuring apparatus is operated is corrected. A reference block gauge is placed on the surface plate 5. The scale of the CMM is calibrated with reference to its dimensions and geometric shape.

After performing calibration of the three-dimensional measuring apparatus, three-dimensional measurement of an actual workpiece (measurement object) becomes possible. The probe unit 36 continues to move until the tip spherical portion of the stylus (measuring head) 38 contacts the point to be measured. When contact is started, a slight tilt starts to occur on the touch plate 39. When the set displacement amount ε ₂ (for example, 20 μm) or more is reached, the probe unit 36 receives a movement stop command, and the spatial position of the center of the tip spherical portion of the stylus (measurement head) 38 at this moment is determined as the X stage, Y stage, and Z Read from the amount of stage movement. When the stage moves and the tip spherical portion of the stylus (measuring head) 38 moves away from the measurement point, the center returning unit 40 operates, and the stylus (measuring head) 38 instantaneously returns to the center. If there is a next measurement point, move to that point. When measuring a plurality of points, the same repetition as described above is performed.

  The obtained spatial coordinate data is sent to the data processing personal computer via the AD boat. Corresponding calculations and coordinate transformations are performed according to dimensions or geometric shapes such as length, flatness, roundness, etc., and necessary results are output in a specified format.

  FIG. 8 shows an algorithm for correcting an error due to a temperature change in the environment when performing a three-dimensional measurement using the three-dimensional measuring apparatus according to one embodiment of the present invention. In the three-dimensional measuring apparatus of the present invention, a coordinate system at a designated reference temperature, for example, 23 ° C. is set as a reference coordinate system, and an error caused by a temperature difference is corrected when the environmental temperature changes. Depending on the configuration of the three-dimensional measuring apparatus, not a simple linear thermal expansion (shrinkage) amount, but a combined change amount of the system assembly state is made into a database and dynamically corrected according to the temperature at the use site.

DESCRIPTION OF SYMBOLS 1 3D measuring apparatus 2 Base 3 Support | pillar 4 Connecting member 5 Surface plate 6 Frame 7 X stage 8 Laser displacement sensor 9 Laser light reflecting plate 10 Ball screw 11 Guide rod 12 Motor 17 Y stage 18 Laser displacement sensor 19 Laser light reflecting plate 19 20 ball screw 21 guide rod 22 motor 27 Z stage 28 laser displacement sensor 29 laser light reflecting plate 30 ball screw 31 guide rod 32 motor 33 weight block base 34 yoke support frame 35 yoke 36 probe unit 37 contact type high precision displacement sensor 38 stylus (Measurement head)
39 Touch Plate 40 Center Return Unit 41 Support Frame 42 Rotating Hemisphere 43 Support Ball 44 Rotating Hemisphere Pressing Rod 45 Compression Spring 46 Center Pin 47 Stopper Pin 48 Compression Spring 49 Limiter 50 Bearing Unit 51 Frame 52 Adjustment Screw 53 Adjustment Screw Rotating Hexagon Hole 54 Ball seat 55 Ball 56 Fixing screw 57 Compression spring
60 lower frame

Japanese Patent Laid-Open No. 08-247756 JP2004-2

Claims (3)

A probe unit (36) having a stylus (measuring head) (38) , an X stage (7) for displacing the probe unit (36) in the X direction, the Y direction, and the Z direction, a Y stage (17) , and A three-dimensional measuring device comprising a moving stage comprising a Z stage (27) and a surface plate (5) placed on a machine base,
The stylus (measuring head) (38) is manufactured from the same member as the center pin (46) extending coaxially with the stylus (38) disposed in the probe unit (36) to return the stylus ( 38) to its original position. defining an outer diameter and the same spacing Rutotomoni center pin (46) held between a pair of stopper pins (47) extending parallel to to said center pin (46), opposed to the pair of limiters to horizontal movement ( 49) and a center pin return mechanism comprising a compression pin (45) that presses and urges the limiter (49) from the back thereof, and a center pin return mechanism in which the Y direction return mechanism is disposed in two layers in the Z-axis direction. A three-dimensional measuring apparatus. A probe unit (36) having a stylus (measuring head) (38) , an X stage (7) for displacing the probe unit (36) in the X direction, the Y direction, and the Z direction, a Y stage (17) , and A three-dimensional measuring device comprising a moving stage comprising a Z stage (27) and a surface plate (5) placed on a machine base,
a. The stylus (measuring head) (38) is manufactured from the same member as the center pin (46) extending coaxially with the stylus (38) disposed in the probe unit (36) to return the stylus ( 38) to its original position. defining an outer diameter and the same spacing Rutotomoni center pin (46) held between a pair of stopper pins (47) extending parallel to to said center pin (46), opposed to the pair of limiters to horizontal movement ( 49) and a center pin return mechanism comprising a compression pin (45) that presses and urges the limiter (49) from the back thereof, and a center pin return mechanism in which the Y direction return mechanism is disposed in two layers in the Z-axis direction. When,
b. Upper portions of the four columns on the machine base to adjust the parallelism between the displacement direction of the X stage (7) , Y stage (17) and Z stage (27) and the surface of the surface plate (5). The adjusting screw (52 ) is screwed into the frame (51) of the bearing unit (50) and is driven manually or by a motor to move up and down and has an inverted conical ball receiving seat (54) on the upper part thereof. a), the ends of the guide rods (11, 21) of the X stage (7) and the Y stage (17) while being mounted on the adjustment screw (52) is inserted horizontally from its upper surface the bearing unit (50) platen (5) surface of the stage consisting ball (55) which is urged downward by a compression spring which is collection (57) to the frame of the And parallelism adjusting mechanism,
c. A three-dimensional measuring apparatus comprising arithmetic processing means for correcting an error caused by a change in temperature of the measurement environment. The probe unit (36) has a plurality of contact-type high-precision displacement sensors (37), a touch plate (39) on which a lower end of the contact-type high-precision displacement sensor (37) is placed, and the touch plate (39) A rotating hemisphere which is fixed integrally with the coupling member of the stylus (38) and the center pin (46), and thus the coupling member of the stylus (38) and the center pin (46) has the touch plate (39) mounted thereon. The rotating hemisphere (42) is slidably fitted in a hole in the center of the upper horizontal plane of (42), and rotates on the lower frame (60) disposed below the probe unit (36). The lower half of the rotating hemisphere (42) is supported on at least three support balls (43) fixed and supported at equal intervals in the horizontal circumferential direction, and the rotating hemisphere (42) is pressed. The center pin (46) and the stylus (measuring head) (38) are coaxially fixed in the center Z-axis direction of the rotating hemisphere (42) by being biased downward by the compression spring (45) through the pad (44). Further, the touch plate (39) placed on the upper horizontal surface of the rotating hemisphere (42) is brought into contact with the surface of the measuring object at the tip of the stylus (38). ) The touch plate (39) is tilted in response to the above tilting, the tilt of the touch plate (39) is measured by the contact type high precision displacement sensor (37), and the contact type high precision displacement sensor (37) The stylus (measuring head) (38) at the time when the amount of displacement reaches a set value is configured so that the three-dimensional coordinates of the tip sphere center can be measured from the amount of movement of the X, Y, and Z stages. Also Three-dimensional measurement apparatus according to claim 2.

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