JP2000140759A - Piezoelectric actuator and piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a structure wherein action is stabilized and driving efficiency is high even when weight reduction, miniaturization and thinning of the structure are performed and displacement of a movable body is enlarged within limit of breakage of a piezoelectric body. SOLUTION: In a piezoelectric actuator wherein a vibrating body 3 or a moving body 4 installed on the vibrating body is driven by elastically vibrating the vibrating body 3 constituted of a piezoelectric body 2 and an elastic body 1 by applying an AC voltage to the piezoelectric body 2, the peripheral edge part of the vibrating body 3 is supported and fixed by means of a spring structure and the resonance frequency of the spring structure is set near the resonance frequency of the vibrating body 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric actuator which uses elastic vibration excited by a piezoelectric body as a driving force, and uses the function of the piezoelectric actuator to notify the operating state of a device used by vibration. The present invention relates to a piezoelectric vibrator.

[0002]

2. Description of the Related Art In general, a general device that utilizes excitation of a piezoelectric body and takes out such vibration as a driving force is called a piezoelectric actuator. As a typical structure of a piezoelectric actuator, a structure using bending vibration of a disc as shown in FIG. 47 is generally used. In FIG. 47, the peripheral portion of a vibrating body 103 composed of an elastic body 101 and a piezoelectric body 102 is supported and fixed by a housing 104, and when an AC voltage is applied to the piezoelectric body 102, the amplitude of the central part of the vibrating body 103 is reduced. The maximum bending vibration is excited.

[0003] One of the fields to which such a principle is applied is often a function of informing a user of the operating state of a device by vibration, for example, an incoming call of a mobile phone. Conventionally, an electromagnetic motor is often used to realize such a function, and most of the devices vibrate the entire device or a part of the device by the rotational kinetic energy of the electromagnetic motor.

FIG. 48 shows a schematic diagram of a vibrator using an electromagnetic motor. As shown in FIG.
By installing the eccentric weight 106 with the rotational symmetry broken on the axis of No. 5, the electromagnetic motor itself is vibrated by the centrifugal force caused by the eccentric weight, and the vibration of the electromagnetic motor itself causes the device on which the electromagnetic motor is installed. Is vibrating.

[0005]

In order to obtain a large vibration at a constant voltage in order to improve the performance of the piezoelectric actuator, it is generally effective to drive the vibrator in resonance. However, if the voltage applied to obtain a large vibration is too high, the distortion applied to the vibrating body increases, and there is a problem that the piezoelectric body itself is destroyed beyond the breaking limit of the piezoelectric body itself. Further, it is conceivable to install another mechanism to increase the vibration of the piezoelectric actuator. However, there is a problem that the structure becomes complicated and it is difficult to reduce the size and thickness of the piezoelectric actuator itself.

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, it is an object of the present invention to increase the vibration displacement of a piezoelectric actuator with a simple structure without installing another mechanism, and to cope with a reduction in size and thickness. It is intended to realize a piezoelectric actuator that can be used.

On the other hand, in a conventional vibrator using an electromagnetic motor, in order to increase the vibration of the device by the vibrator, the weight of the eccentric weight is increased or the rotation speed of the eccentric weight is increased. What is necessary is just to increase the rotational kinetic energy of the electromagnetic motor.

However, as the weight, size, thickness, and operation time of devices such as mobile phones that use the vibrator are reduced, the weight, size, thickness, and power consumption of the vibrator itself are demanded. ing. Therefore, for example, the rotational kinetic energy of the electromagnetic motor can be increased by increasing or decreasing the eccentric weight, but it is difficult to reduce the weight by increasing the eccentric weight, and it is difficult to reduce the size and thickness by increasing the eccentric weight. In addition, in order to rotate a heavy weight, a large amount of current must be supplied to the electromagnetic motor, so that power consumption increases. Also, if the volume of the core is increased or the number of windings wound around the core is increased to increase the magnetic flux density in the electromagnetic motor, it becomes difficult to reduce the weight, size, and thickness of the electromagnetic motor. There is a problem.

Another object of the present invention is to provide a piezoelectric vibrator that operates stably and has a high driving efficiency even if it is reduced in weight, size and thickness by utilizing a piezoelectric actuator in order to solve the above-mentioned problems. .

[0010]

In order to achieve the above object, a piezoelectric actuator according to the present invention is characterized in that a vibrating body comprising a piezoelectric body and an elastic body is elastically vibrated by applying an AC voltage to the piezoelectric body. A piezoelectric actuator for driving a vibrating body or a moving body installed on the vibrating body, the peripheral edge of the vibrating body being supported and fixed by a spring structure, and the resonance frequency of the spring structure being It is set near the resonance frequency of the vibrator.

With this configuration, the spring structure also expands and contracts in the vertical direction in resonance with the flexural vibration of the vibrating body, so that the displacement of the moving body can be increased with respect to a constant AC voltage. .

Next, the piezoelectric actuator according to the present invention elastically vibrates a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body.
A piezoelectric actuator for driving a vibrating body or a moving body mounted on the vibrating body, wherein a housing itself for supporting and fixing the vibrating body has a spring structure portion, and a resonance frequency of the spring structure portion of the housing. Is set near the resonance frequency of the vibrating body.

According to this configuration, since the housing itself has the spring structure, the number of parts can be reduced, and the peripheral portion of the vibrating body can be uniformly supported and fixed in the circumferential direction. The vibrating body can perform more stable vibration, and the operation stability of the moving body can be increased.

Next, the piezoelectric actuator according to the present invention elastically vibrates a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body.
A vibrating body or a piezoelectric actuator that drives a moving body installed on the vibrating body, wherein the vibrating body radially forms a beam from the center to the peripheral edge of the vibrating body, and the vibrating body is formed via the beam. It is characterized in that the resonance frequency is supported and fixed, and the resonance frequency of the beam portion is set near the resonance frequency of the vibrating body.

With this configuration, the elastic body, the beam, and the frame that constitute the vibrating body can be formed as one component, so that it is possible to compare the resonance frequency of the vibrating body with the resonance frequency of the beam. Therefore, the piezoelectric actuator can be made thin if the thickness of the vibrating body and the thickness of the vibrating body are equal to the displacement of the vibrating body in the thickness direction.

Further, in the piezoelectric actuator according to the present invention, it is preferable that at least one of the piezoelectric bodies constituting the vibrating body has a shape having a hole. Since there is no piezoelectric body in the center of the vibrating body with the largest displacement, the strain applied to the piezoelectric body when the vibrating body vibrates can be reduced, so the operating life is longer than when a disk-shaped piezoelectric body is used. This is because it can be expected to be longer.

Next, in order to achieve the above object, a piezoelectric vibrator according to the present invention provides a vibrating body comprising a piezoelectric body and an elastic body by elastically vibrating by applying an AC voltage to the piezoelectric body. A piezoelectric vibrator that generates vibration by driving a weight installed on a body, wherein a peripheral portion of the vibrator is supported and fixed by a spring structure, and a resonance frequency of the spring structure is a resonance frequency of the vibrator. Is set in the vicinity of.

According to this configuration, the spring structure also expands and contracts in the vertical direction in resonance with the flexural vibration of the vibrating body, so that the displacement of the moving body can be increased with respect to a constant AC voltage. .

Next, the piezoelectric vibrator according to the present invention elastically vibrates a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body.
A piezoelectric vibrator that generates vibration by driving a weight installed on a vibrating body, wherein a housing for supporting and fixing the vibrating body has a spring structure, and a resonance frequency of a spring structure portion of the housing. Is set near the resonance frequency of the vibrating body.

According to this configuration, since the housing itself has the spring structure, the number of parts can be reduced, and the peripheral portion of the vibrating body can be uniformly supported and fixed in the circumferential direction. The vibrator can perform more stable vibration, and the stability of the weight vibration, that is, the stability of the vibration of the vibrator can be increased.

Next, the piezoelectric vibrator according to the present invention elastically vibrates a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body.
A piezoelectric vibrator that generates vibration by driving a weight installed on a vibrating body, wherein the vibrating body constitutes a beam portion radially from a center portion to a peripheral portion of the vibrating body,
The vibration member is supported and fixed via the beam portion, and the resonance frequency of the beam portion is set near the resonance frequency of the vibration member.

With this configuration, the elastic body, the beam, and the frame that constitute the vibrating body can be formed as one component, so that it is possible to compare the resonance frequency of the vibrating body with the resonance frequency of the beam. Since it is easy to achieve the structure and it is possible to form the piezoelectric vibrator as long as it has the thickness of the vibrator and the thickness corresponding to the displacement of the vibrator in the thickness direction, the thickness of the piezoelectric vibrator can be reduced.

In the piezoelectric vibrator according to the present invention, it is preferable that at least one of the piezoelectric members constituting the vibrating member has a shape with a hole. Since there is no piezoelectric body in the center of the vibrating body with the largest displacement, the strain applied to the piezoelectric body when the vibrating body vibrates can be reduced, so the operating life is longer than when a disk-shaped piezoelectric body is used. This is because it can be expected to be longer.

[0024]

Embodiment 1 Hereinafter, a piezoelectric actuator according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is an exploded perspective view in which a portion of a piezoelectric actuator according to Embodiment 1 of the present invention is cut away, FIG. 2 is a cut-away cross-sectional view of the piezoelectric actuator shown in FIG. 1, and FIGS. FIG. 13 is a cutaway sectional view showing another example of the first embodiment.
1 to 4, 1 is an elastic body, 2 is a piezoelectric body, 3 is a vibrating body composed of an elastic body 1 and a piezoelectric body 2, 4 is a moving body, 5 is a spring, 6 is a housing, 6a is An upper lid 6b of the housing 6 indicates a lower lid of the housing 6.

In FIGS. 1 and 2, a piezoelectric body 2 is adhered to a main surface of the elastic body 1 on the upper side in the thickness direction to form a vibrating section 3. 4. A plurality of springs 5 are installed on the outer peripheral portion, and the upper lid 6a is
The vibrating body 3 is supported and fixed by the housing 6 configured by the lower lid 6b. The piezoelectric body 2 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction. The resonance frequency of the bending vibration of the vibrating body 3 is determined by the material, thickness, diameter and the like of the elastic body 1 and the piezoelectric body 2. The resonance frequency at which the spring 5 expands and contracts in the vertical direction is the material and wire diameter of the spring 5. , Spring shape, etc.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 3 is applied in the thickness direction of the piezoelectric body 2, the vibrating body 3
Vibrates in the thickness direction so that the displacement near the center becomes maximum. At this time, if the resonance frequency of the expansion and contraction motion of the spring 5 in the vertical direction is made substantially equal to the resonance frequency of the bending vibration of the vibrating body 3, the spring 5 resonates with the bending vibration of the vibrating body 3.
Also, since the vertical movement of the moving body 4 installed on the vibrating body 3 is also performed by the expansion and contraction movement of the spring 5, the displacement of the moving body 4 installed in the vibration body 3 is superimposed on the displacement of the bending vibration of the vibration body 3. It gets even bigger. Therefore, even if a voltage having the same strength as the voltage applied to the conventional piezoelectric actuator is applied, the displacement of the moving body 4 can be further increased.

FIG. 3 shows another example of the piezoelectric actuator according to the first embodiment, in which the vibrating body 3 is formed by bonding the piezoelectric body 2 to the main surface of the elastic body 1 on the lower side in the thickness direction. I have.
In FIG. 3, as in the case shown in FIGS. 1 and 2,
Since the vibration in the thickness direction near the center of the vibrating body 3 and the vertical vibration of the spring 5 resonate, the displacement of the moving body 4 can be further increased even when the same electric energy is applied.

Further, when the mobile unit 4 performs some work to the outside, the mobile unit 4 is used in the example of FIGS.
Excessive external force is applied to the piezoelectric body 2 due to vibration or the like, and the piezoelectric body 2 that is more fragile than the elastic body 1 may be cracked or chipped. In this embodiment, the piezoelectric body 2 and the moving body 4
Since there is no chance that the piezoelectric body 2 comes into direct contact with the
Is less likely to be cracked or chipped due to vibration, impact, etc., and can be expected to have a longer operating life.

FIG. 4 shows another example of the piezoelectric actuator according to the first embodiment. In FIG. 4, the vibrating body 3 is formed by bonding the piezoelectric body 2 to both main surfaces in the thickness direction of the elastic body 1. In this case, since the volume of the piezoelectric body, which is the driving source of the vibration, is twice as large as that in the case of FIGS. 1, 2, and 3, even if the same voltage is applied, a larger driving force is applied. Can be output via the moving body 4.

In the first embodiment, the case where the elastic body 1 and the piezoelectric body 2 are disk-shaped has been described. However, similar effects can be expected with a rectangular shape such as a square. 1 to 4, the case where the vibrating body 3 is supported and fixed by three sets of springs 5 has been described.
Can be set. In addition, if a hole is formed in the outer peripheral portion of the vibrating body 3, the vibrating body 3 can be constituted by one spring in the vertical direction. Further, the shape of the spring 5 has been described as a helical spring, but any shape having a spring structure may be used. For example, if a disc spring is used, it can be constituted by one set of springs.

As described above, according to the first embodiment,
Since the spring 5 also expands and contracts in the vertical direction in resonance with the bending vibration of the vibrating body 3, the displacement of the moving body 4 can be further increased.

Embodiment 2 Hereinafter, a piezoelectric actuator according to Embodiment 2 of the present invention will be described with reference to FIGS. FIG. 5 is an exploded perspective view of the piezoelectric actuator according to the second embodiment of the present invention, with a part cut away. FIG. 6 is a cutaway sectional view of the piezoelectric actuator shown in FIG. 5, and FIGS. FIG. 14 is a cutaway sectional view showing another example of the piezoelectric actuator according to the second embodiment. 5 to 8, 1 is an elastic body, 2 is a piezoelectric body, 3 is a vibrating body composed of the elastic body 1 and the piezoelectric body 2, 4 is a moving body, 7 is a housing, and 7a is a housing 7. Top lid, 7b
Indicates a lower cover of the housing 7.

In FIGS. 5 and 6, a piezoelectric body 2 is adhered to a main surface of the elastic body 1 on the upper side in the thickness direction to form a vibrating section 3, and a moving body is provided substantially at the center of the vibrating section 3. 4 are installed. The housing 7 includes an upper lid 7a and a lower lid 7b,
The vicinity of the contact portion with the vibrating body 3 has a spring structure in the thickness direction, and the vibrating body 3 is supported and fixed by being sandwiched between the upper lid 7a and the lower lid 7b of the housing 7. The piezoelectric body 2 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 3 is applied in the thickness direction of the piezoelectric body 2, the vibrating body 3
Vibrates in the thickness direction so that the displacement near the center becomes maximum. At this time, if the resonance frequency at which the spring structure portions of the upper lid 7a and the lower lid 7b of the housing 7 move in the vertical direction substantially match the resonance frequency of the flexural vibration of the vibrating body 3, the flexural vibration of the vibrating body 3 and the Since the spring structure portions of the upper lid 7a and the lower lid 7b of the body 7 also move in the vertical direction, the displacement of the moving body 4 installed on the vibrating body 3 in the vertical direction Is further increased by superimposing the displacement of the vertical movement of the spring structure portion at. Therefore, even if a voltage having the same strength as the voltage applied to the conventional piezoelectric actuator is applied, the displacement of the moving body 4 can be further increased.

Since the housing 7 itself has a spring structure, the number of parts can be reduced, and the peripheral portion of the vibrating body 3 can be uniformly supported and fixed in the circumferential direction. The vibrating body 3 can perform more stable vibration,
It is possible to increase the stability of the operation of the moving body 4.

FIG. 7 shows another example of the piezoelectric actuator according to the second embodiment, in which the vibrating body 3 is formed by bonding the piezoelectric body 2 to the lower main surface of the elastic body 1 in the thickness direction. I have.
In FIG. 7, since the piezoelectric body 2 and the moving body 4 do not directly contact each other even if the vibrating body 3 vibrates, there is a possibility that the piezoelectric body 2 is cracked or chipped due to the vibration or impact of the moving body 4. It is small and can be expected to have a long operating life.

FIG. 8 shows another example of the piezoelectric actuator according to the second embodiment. In FIG. 8, the vibrating body 3 is formed by bonding the piezoelectric body 2 to both main surfaces in the thickness direction of the elastic body 1. In this case, since the volume of the piezoelectric body 2 which is a driving source of the vibration is twice as large as that in the case of FIGS. 5, 6, and 7, even if a voltage of the same intensity is applied, a larger driving is performed. The force can be output via the moving body 4.

In the second embodiment, the case where the elastic body 1 and the piezoelectric body 2 are disk-shaped has been described. However, the same effect can be expected with a rectangular shape such as a square. As described above, according to the second embodiment, since the housing 7 itself has the spring structure, it can be configured with a smaller number of parts, and furthermore, the peripheral portion of the vibrating body 3 is arranged in the circumferential direction. Therefore, the vibrating body 3 can perform more stable vibration, and the operation stability of the moving body 4 can be increased.

(Embodiment 3) Hereinafter, a piezoelectric actuator according to Embodiment 3 of the present invention will be described with reference to FIGS. FIG. 9 is an exploded perspective view of the piezoelectric actuator according to the third embodiment of the present invention, in which a portion is cut away. FIG. 10 is a cutaway sectional view of the piezoelectric actuator shown in FIG. 9, FIGS. 13 and 14 are cutaway sectional views showing another example of the piezoelectric actuator according to the third embodiment. 9 to 14, 1 is an elastic body, 2 is a piezoelectric body, and 3 is an elastic body 1.
A vibrating body comprising: a piezoelectric body 2; a moving body 4; a beam 8; a frame 9; a housing 10;
10b denotes a lower cover of the housing 10.

9 and 10, a piezoelectric body 2 is adhered to a main surface on the upper side in the thickness direction of the elastic body 1 to form a vibrating section 3, and a moving body is provided substantially at the center of the vibrating section 3. 4 are installed. The vibrating body 3 is provided with a beam portion 8 radially from the center to the peripheral portion, and is connected to the frame 9 at an end of the beam portion 8 opposite to the vibrating body 3. The vibrating body 3 includes a beam 8,
The frame 10 is supported and fixed by being sandwiched between an upper lid 10 a and a lower lid 10 b of the housing 10 via the frame 9. The piezoelectric body 2 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction.

When an AC voltage having a resonance frequency of the bending vibration of the vibrating body 3 is applied in the thickness direction of the piezoelectric body 2, the vibrating body 3
Vibrates in the thickness direction so that the displacement near the center becomes maximum. At this time, if the resonance frequency of the bending vibration of the beam portion 8 is made substantially equal to the resonance frequency of the bending vibration of the vibrating member 3, the beam portion 8 resonates with the bending vibration of the vibrating member 3 and also vibrates in the vertical direction. The vertical displacement of the moving body 4 installed on the vibrating body 3 is further increased by the displacement of the bending vibration of the beam portion 8 superimposed on the displacement of the bending vibration of the vibrating body 3. Therefore, even if a voltage having the same strength as the voltage applied to the conventional piezoelectric actuator is applied, the displacement of the moving body 4 can be further increased.

Further, the elastic body 2 constituting the vibrating body 3
Since the beam portion 8 and the frame portion 9 can be formed as one component, for example, a thin metal plate can be formed by etching or the like, it is easy to match the resonance frequency of the vibrating body 3 with the resonance frequency of the beam portion 8. In addition, since the piezoelectric actuator can be configured as long as the thickness of the vibrating body 3 and the thickness corresponding to the displacement of the vibrating body 3 are provided in the thickness direction, the piezoelectric actuator can be made thin.

FIG. 11 shows another example of the piezoelectric actuator according to the third embodiment, in which the vibrating body 3 is formed by bonding the piezoelectric body 2 to the lower principal surface of the elastic body 1 in the thickness direction. I have. In FIG. 11, the piezoelectric body 2 and the moving body 4 are
Does not come into direct contact even if vibrated, so that the possibility that the piezoelectric body 2 is broken or chipped due to vibration or impact of the moving body 4 is small, and a long operating life can be expected.

FIG. 12 shows another example of the piezoelectric actuator according to the third embodiment. The vibrating body 3 is formed by bonding the piezoelectric body 2 to both main surfaces in the thickness direction of the elastic body 1. In this case, since the volume of the piezoelectric body 2 which is a driving source of the vibration is doubled as compared with the case of FIGS. 9, 10 and 11, even if a voltage of the same strength is applied, a larger driving is performed. The force can be output via the moving body 4.

FIG. 13 shows another example of the piezoelectric actuator according to the third embodiment. In FIG. 13, by bending the beam portion 8 in the thickness direction, a spring property is provided, and by adding the spring property to the beam portion 8, the displacement of bending vibration can be increased. FIG. 14 shows another example of the piezoelectric actuator according to the third embodiment in which the beam portion 8 has a spring property by bending the beam portion 8 in the plane direction, and the same effect as in FIG. 13 is obtained. Obtained and the beam 8
It is also possible to give the shape of FIG. 14 a bending spring property in the thickness direction as in the case of FIG.

Although the third embodiment has been described with respect to the case where the elastic body 1 and the piezoelectric body 2 are disk-shaped, similar effects can be expected with a rectangular shape such as a square. Also,
The number, bending shape, and positional relationship of the beam portions 8 can be set according to the displacement of the moving body 4 and the output via the moving body 4.

As described above, according to the third embodiment,
Since the elastic body 2, the beam 8, and the frame 9 constituting the vibrating body 3 can be formed as one component, the vibrating body 3
And the resonance frequency of the beam portion 8 can be easily adjusted, and the thickness of the vibrating body 3 and the vibrating body 3 in the thickness direction can be easily adjusted.
Since it can be configured as long as it has a thickness corresponding to the displacement, the thickness of the piezoelectric actuator can be reduced.

Embodiment 4 Hereinafter, a piezoelectric actuator according to Embodiment 4 of the present invention will be described with reference to FIGS. FIG. 15 is an exploded perspective view of a piezoelectric actuator according to a fourth embodiment of the present invention, in which a portion is cut away. FIG. 16 is a cutaway sectional view of the piezoelectric actuator shown in FIG. 15, and FIGS. FIG. 1 is a cutaway sectional view showing another example of the fourth embodiment.
9 is an exploded perspective view showing another example of the piezoelectric actuator according to the fourth embodiment with a part cut away, FIG. 20 is a cutaway sectional view of the piezoelectric actuator shown in FIG. 19,
FIG. 21 is a cutaway sectional view of another example of the piezoelectric actuator shown in FIG. 19, and FIGS. 22 and 23 show the fourth embodiment.
FIG. 6 is an exploded perspective view with a part cut away showing another embodiment of the piezoelectric actuator according to the present invention. 15 to 23, reference numeral 1 denotes an elastic body, 2 denotes a piezoelectric body, 3 denotes a vibrating body including the elastic body 1 and the piezoelectric body 2, and 4 denotes a moving body. 15 to 21, reference numeral 5 denotes a spring, reference numeral 6 denotes a housing, reference numeral 6a denotes an upper lid of the housing 6, and reference numeral 6b denotes a lower lid of the housing 6. In FIG. 22, reference numeral 7 denotes a housing, and 7a denotes a housing. Reference numeral 7 denotes an upper cover, 7b denotes a lower cover of the housing 7, and in FIG. 23, 8 denotes a beam, 9 denotes a frame, 1
0 is a housing, 10a is a top cover of the housing 10, and 10b is a housing 10
The lower lid is shown.

In FIGS. 15 and 16, an annular piezoelectric body 2 is adhered to the upper principal surface of the elastic body 1 in the thickness direction to form a vibrating section 3, and a substantially central portion of the vibrating section 3 is formed. The moving body 4 is directly installed on the elastic body 1 without the intermediary of the piezoelectric body 2, and a plurality of springs 5 are installed on the outer periphery of the vibrating body 3, and includes an upper lid 6 a and a lower lid 6 b via the spring 5. The housing 3 supports and fixes the vibrating body 3. The piezoelectric body 2 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 3 is applied in the thickness direction of the piezoelectric body 2, the vibrating body 3
Vibrates in the thickness direction so that the displacement near the center becomes maximum. At this time, if the resonance frequency at which the spring 5 expands and contracts in the vertical direction is substantially matched to the resonance frequency of the bending vibration of the vibrating body 3, the spring 5 resonates with the bending vibration of the vibrating body 3 and the spring 5 also expands and contracts in the vertical direction. Therefore, the vertical displacement of the moving body 4 installed on the vibrating body 3 is further increased by the displacement of the bending vibration of the vibrating body 3 being superimposed by the displacement caused by the expansion and contraction movement of the spring 5. Therefore, even if a voltage having the same strength as the voltage applied to the conventional piezoelectric actuator is applied, the displacement of the moving body 4 can be further increased.

Further, since the piezoelectric body 2 is not provided at the center of the vibrating body 3 having the largest displacement, the distortion applied to the piezoelectric body 2 when the vibrating body 3 vibrates can be reduced. It can be expected that the operating life will be longer than when used. Further, since the moving body 4 can be directly installed on the elastic body 1 of the vibrating body 3, the output via the moving body 4 can be increased as compared with the case where a disk-shaped piezoelectric body is used.

FIGS. 17 to 21 show another example of the piezoelectric actuator according to the fourth embodiment. FIG. 17 shows a vibrating body 3 in which an annular piezoelectric body 2 is bonded to both main surfaces in the thickness direction of the elastic body 1, and FIG. 18 shows an annular piezoelectric body on the upper main surface of the elastic body 1. A vibrating body 3 is formed by bonding a disc-shaped piezoelectric body 2 to the lower main surface of the elastic body 1. In these cases, the total volume of the piezoelectric body, which is a driving source of vibration, is increased without reducing the effect of using the annular piezoelectric body. Large driving force can be output. FIG. 19, FIG.
0 and FIG. 21 show an embodiment in which the elastic body 1 is joined to the moving body 4 by making a hole in the connecting portion with the moving body 4. In these cases, the moving body 4 and the elastic body 1 can be more strongly joined than in the case of FIG. 15 and FIG.
In this case, as shown in FIG. 21, the vibrating body 3 is formed by bonding the piezoelectric body 2 to both main surfaces of the elastic body 1 and the output is increased by increasing the volume of the piezoelectric body as shown in FIG. Is also possible.

FIGS. 22 and 23 show another embodiment of the piezoelectric actuator according to the fourth embodiment. FIG. 22 shows a case in which the vibrating body 3 is supported and fixed by the housing 7 having a spring structure. FIG. 23 shows a case in which the outer peripheral portion of the vibrating body 3 is The case where the vibrating body 3 is supported and fixed by the body 10 is shown. 22 and 23, the same effect can be obtained by forming the vibrating body 3 using the ring-shaped piezoelectric body 2 and directly joining the elastic body 1 and the moving body 4. .

As described above, according to the fourth embodiment,
Since the piezoelectric body 2 is not provided at the center of the vibrating body 3 having the largest displacement, the strain applied to the piezoelectric body 2 when the vibrating body 3 vibrates can be reduced. Therefore, compared to the case where a disk-shaped piezoelectric body is used. Operating life can be expected to be longer. Further, since the moving body 4 can be directly installed on the elastic body 1 of the vibrating body 3, the output via the moving body 4 can be increased as compared with the case where a disk-shaped piezoelectric body is used.

Embodiment 5 Hereinafter, a piezoelectric vibrator according to Embodiment 5 of the present invention will be described with reference to FIGS. FIG. 24 is an exploded perspective view of the piezoelectric vibrator according to the fifth embodiment of the present invention, in which a portion is cut away. FIG. 25 is a cutaway sectional view of the piezoelectric vibrator shown in FIG. 24, and FIGS. FIG. 14 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the fifth embodiment. 24 to 27, 21 is an elastic body, 22 is a piezoelectric body, and 23 is an elastic body 21 and a piezoelectric body 22.
, A weight 24, a spring 25,
Denotes a housing, 26a denotes an upper lid of the housing 26, and 26b denotes a lower lid of the housing 26.

24 and 25, a piezoelectric member 22 is adhered to the upper principal surface of the elastic member 21 in the thickness direction to form a vibrating part 23, and a weight 24 A plurality of springs 25 are provided on the outer peripheral portion, and the vibrating body 23 is supported and fixed by a housing 26 including an upper lid 26a and a lower lid 26b via the springs 25. The piezoelectric body 22 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 23 is applied in the thickness direction of the piezoelectric body 22, the vibrating body 23 vibrates in the thickness direction such that the displacement near the center becomes maximum. At this time, if the resonance frequency at which the spring 25 expands and contracts in the vertical direction is substantially matched to the resonance frequency of the bending vibration of the vibrating body 23, the spring 25 resonates with the bending vibration of the vibrating body 23 and the spring 25 also expands and contracts in the vertical direction. Vibrator 2 to perform
The vertical displacement of the weight 24 installed on the top 3 is increased by the displacement of the flexural vibration of the vibrating body 23 being superimposed by the displacement caused by the expansion and contraction of the spring 25, and the vibration by the piezoelectric vibrator can also be increased. Becomes

FIG. 26 shows another example of the piezoelectric vibrator according to the fifth embodiment.
Is adhered to the main surface on the lower side in the thickness direction to form the vibrating body 23. In FIG. 26 as well, as in the case shown in FIGS. 24 and 25, the vibration in the thickness direction near the center of the vibrating body 23 and the vibration in the vertical direction of the spring 25 resonate, so that the same electric energy is applied. However, the displacement of the weight 24 can be further increased.

Further, in FIG. 24 and FIG.
Is directly bonded to the piezoelectric body 22, so that if the vibrating body 23 is largely displaced in order to increase the amount of vibration, the piezoelectric body 22 that is more brittle than the elastic body 21 may be broken or chipped. In this embodiment, since there is no chance that the piezoelectric body 22 and the weight 24 come into direct contact with each other, there is little possibility that the piezoelectric body 22 is cracked or chipped due to vibration or impact of the weight 24 and the operating life is extended. I can expect that.

FIG. 27 shows another example of the piezoelectric vibrator according to the fifth embodiment. In FIG. 27, the vibrating body 23 is formed by bonding the piezoelectric body 22 to both main surfaces in the thickness direction of the elastic body 21. In this case, the volume of the piezoelectric body that is the driving source of the vibration is twice as large as that in the case of FIGS. 24, 25, and 26, so that even if a voltage of the same strength is applied, a larger force is applied. The weight 24 can be driven.

In the fifth embodiment, the elastic member 21
Although the case where the piezoelectric body 22 has a disk shape has been described, a similar effect can be expected with a rectangular shape such as a square. Further, in FIGS. 24 to 26, the vibrating body 23 is
Although the description has been made of the case where the spring 25 is supported and fixed, the number of sets of the spring 25 can be set according to the required amount of vibration. In addition, if a hole is formed in the outer peripheral portion of the vibrating body 23, the vibrating body 23 can be constituted by one spring in the vertical direction. Further, the shape of the spring 25 has been described as a helical spring, but any shape may be used as long as it has a spring structure. For example, if a disc spring is used, it can be constituted by one set of springs.

As described above, according to the first embodiment,
Since the spring 5 also expands and contracts in the vertical direction in resonance with the bending vibration of the vibrating body 3, the displacement of the weight 24 can be further increased, and the vibration of the vibrator can be increased.

Embodiment 6 Hereinafter, a piezoelectric vibrator according to Embodiment 6 of the present invention will be described with reference to FIGS. FIG. 28 is an exploded perspective view in which a portion of the piezoelectric vibrator according to the sixth embodiment of the present invention is cut away, FIG. 28 is a cutaway sectional view of the piezoelectric vibrator shown in FIG. 29, and FIGS. FIG. 14 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the sixth embodiment. 28 to 31, 21 is an elastic body, 22 is a piezoelectric body, and 23 is an elastic body 21 and a piezoelectric body 22.
, A weight 24, a housing 27,
a indicates an upper lid of the housing 27, and 27b indicates a lower lid of the housing 27.

In FIGS. 28 and 29, a piezoelectric body 22 is adhered to the main surface on the upper side in the thickness direction of the elastic body 21 to form a vibrating section 23. Is installed. The housing 27 includes an upper lid 27a and a lower lid 2
7b, the vicinity of the contact portion with the vibrating body 23 has a spring structure in the thickness direction, and the vibrating body 23 is sandwiched and fixed between the upper lid 27a and the lower lid 27b of the housing 27. . Electrodes are provided on both main surfaces in the thickness direction of the piezoelectric body 22,
Polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 23 is applied in the thickness direction of the piezoelectric body 22, the vibrating body 23 vibrates in the thickness direction such that the displacement near the center becomes maximum. At this time, the upper lid 27a and the lower lid 2
When the resonance frequency at which the spring structure portion 7b moves in the vertical direction is substantially equal to the resonance frequency of the flexural vibration of the vibrating body 23, the upper lid 27 of the housing 27 is formed together with the flexural vibration of the vibrating body 23.
a and the spring structure of the lower lid 27 b also move in the vertical direction, so that the vertical displacement of the weight 24 installed on the vibrating body 23 changes the displacement of the flexural vibration of the vibrating body 23 by the displacement of the spring structure of the housing 27. The displacement of the up-down motion is superimposed to increase, and the weight 24 can be largely driven in the up-down direction.

Further, since the housing 27 itself has a spring structure, the piezoelectric vibrator can be constructed with a smaller number of parts, and the peripheral portion of the vibrator 23 is uniformly supported and fixed in the circumferential direction. Therefore, the vibration body 23 can perform more stable vibration, and the stability of the operation of the weight 24, that is, the stability of the vibration of the vibrator can be increased.

FIG. 30 shows another example of the piezoelectric vibrator according to the sixth embodiment.
Is adhered to the main surface on the lower side in the thickness direction to form the vibrating body 23. In FIG. 30, the piezoelectric body 22 and the weight 24 do not come into direct contact with each other even when the vibrating body 23 vibrates.
However, there is little possibility that the weight 24 is broken or chipped due to vibration or impact, and the operating life can be expected to be long.

FIG. 31 shows another example of the piezoelectric vibrator according to the sixth embodiment. In FIG. 31, a vibrating body 23 is formed by bonding a piezoelectric body 22 to both main surfaces in the thickness direction of an elastic body 21. In this case, since the volume of the piezoelectric body 22, which is the driving source of the vibration, is twice as large as in the case of FIGS. 28, 29, and 30, a larger force is applied even when the same voltage is applied. Can drive the weight 24.

Although the sixth embodiment has been described with respect to the case where the elastic body 21 and the piezoelectric body 22 are disk-shaped, similar effects can be expected with a rectangular shape such as a square.
As described above, according to the sixth embodiment, since the housing 27 itself has the spring structure, it can be configured with a smaller number of parts, and furthermore, the peripheral portion of the vibrating body 23 is arranged in the circumferential direction. Therefore, the vibrating body 23 can perform more stable vibration, the stability of the operation of the weight 24 can be increased, and a piezoelectric vibrator with stable vibration can be realized.

(Seventh Embodiment) Hereinafter, a piezoelectric vibrator according to a seventh embodiment of the present invention will be described with reference to FIGS. FIG. 32 is an exploded perspective view in which a portion of the piezoelectric vibrator according to the seventh embodiment of the present invention is cut away, and FIG. 33 is a cut-away sectional view of the piezoelectric vibrator shown in FIG. 32, and FIGS. 36 and 37 are cutaway sectional views showing another example of the piezoelectric vibrator according to the seventh embodiment. 32 to 37, 21 is an elastic body, 22 is a piezoelectric body, 23 is a vibrating body composed of the elastic body 21 and the piezoelectric body 22, 24 is a weight, 28 is a beam, 29 is a frame, 30 is The housing, 30a indicates an upper lid of the housing 30, and 30b indicates a lower lid of the housing 30.

32 and 33, a piezoelectric body 22 is adhered to a main surface of the elastic body 21 on the upper side in the thickness direction to form a vibrating section 23, and a weight 24 is provided substantially at the center of the vibrating section 23. Is installed. The vibrator 23 is provided with a beam 28 radially extending from the center to the peripheral portion, and is connected to the frame 29 at the end of the beam 28 opposite to the vibrator 23.
The vibrating body 23 is supported and fixed between the upper lid 30a and the lower lid 30b of the housing 30 via the beam 28 and the frame 29. Electrodes are provided on both main surfaces in the thickness direction of the piezoelectric body 22,
Polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 23 is applied in the thickness direction of the piezoelectric body 22, the vibrating body 23 vibrates in the thickness direction such that the displacement near the center becomes the largest. At this time, if the resonance frequency of the bending vibration of the beam portion 28 is made substantially equal to the resonance frequency of the bending vibration of the vibrating body 23, the beam portion 28 resonates with the bending vibration of the vibrating body 23 and also vibrates vertically. The vertical displacement of the weight 24 installed on the vibrating body 23 is caused by the displacement of the bending vibration of the beam portion 28 being superimposed on the displacement of the bending vibration of the vibrating body 23.
It gets even bigger. Therefore, the displacement of the weight 24 can be further increased, so that the vibration of the vibrator can be further increased.

Further, the elastic body 22 forming the vibrating body 23
In addition, since the beam 28 and the frame 29 can be formed as one component, for example, a thin metal plate can be formed by a method such as etching, it is easy to match the resonance frequency of the vibrator 23 with the resonance frequency of the beam 28. In addition, since the piezoelectric vibrator can be configured as long as the thickness of the vibrating body 23 and the thickness corresponding to the displacement of the vibrating body 23 are provided in the thickness direction, the thickness of the piezoelectric vibrator can be reduced.

FIG. 34 shows another example of the piezoelectric vibrator according to the seventh embodiment.
Is adhered to the main surface on the lower side in the thickness direction to form the vibrating body 23. In FIG. 34, the piezoelectric body 22 and the weight 24 do not directly contact each other even if the vibrating body 23 vibrates.
2 is less likely to be cracked or chipped due to the vibration or impact of the weight 24, and can be expected to have a longer operating life. FIG. 35 shows another example of the piezoelectric vibrator according to the seventh embodiment, in which a vibrating body 23 is formed by bonding a piezoelectric body 22 to both main surfaces in the thickness direction of an elastic body 21. In this case, since the volume of the piezoelectric body 22, which is the driving source of the vibration, is twice as large as in the case of FIGS. 32, 33, and 34, even if the same voltage is applied, a larger force is applied. Can drive the weight 24.

FIG. 36 shows another example of the piezoelectric vibrator according to the seventh embodiment. In FIG. 36, by bending the beam portion 28 in the thickness direction, a spring property is provided, and by adding the spring property to the beam portion 28, the displacement of bending vibration can be increased. FIG. 37 shows, as another example of the piezoelectric vibrator according to the seventh embodiment, a case in which the beam portion 8 is provided with a spring property by bending the beam portion 8 in the surface direction, and the same effect as in the case of FIG. 36 is obtained. It is also possible to provide the beam portion 28 with the shape of FIG. 37 and to have bending spring properties in the thickness direction as in the case of FIG.

In the seventh embodiment, the case where the elastic body 21 and the piezoelectric body 22 are disk-shaped has been described. However, similar effects can be expected with a rectangular shape such as a square.
Further, the number, bending shape, and positional relationship of the beam portions 28 can be set according to the displacement of the weight 24.

As described above, according to the seventh embodiment,
Since the elastic body 22, the beam part 28, and the frame part 29 constituting the vibrating body 23 can be formed as one part,
Since it is easy to match the resonance frequency of the vibrating body 23 with the resonance frequency of the beam portion 28, and the thickness direction can be configured as long as the thickness of the vibrating body 23 and the thickness corresponding to the displacement of the vibrating body 23 are provided, The thickness of the piezoelectric vibrator body can be reduced.

(Eighth Embodiment) Hereinafter, a piezoelectric vibrator according to an eighth embodiment of the present invention will be described with reference to FIGS. FIG. 38 is an exploded perspective view of the piezoelectric vibrator according to the eighth embodiment of the present invention, in which a portion is cut away. FIG. 39 is a cutaway sectional view of the piezoelectric vibrator shown in FIG. 38, and FIGS. FIG. 42 is a cutaway sectional view showing another example of the eighth embodiment, FIG. 42 is an exploded perspective view showing another example of the piezoelectric vibrator according to the eighth embodiment, with a part cut away, and FIG. 44 is a cutaway sectional view of the piezoelectric vibrator shown in FIG. 42, FIG. 44 is a cutaway sectional view of the piezoelectric vibrator showing another example shown in FIG. 42, and FIGS. 45 and 46 are still another example of the eighth embodiment. FIG. 3 is an exploded perspective view with a part cut away.
38 to 46, 21 is an elastic body, 22 is a piezoelectric body, 23 is a vibrating body composed of the elastic body 21 and the piezoelectric body 22, and 24 is a weight. 38 to 44, reference numeral 25 denotes a spring, 26 denotes a housing, 26a denotes an upper lid of the housing 26, 26b denotes a lower lid of the housing 26, and in FIG.
27 is a housing, 27a is an upper cover of the housing 27, and 27b is a housing 2
In FIG. 46, reference numeral 28 denotes a beam, 29 denotes a frame, 30 denotes a housing, 30a denotes an upper cover of the housing 30, and 30b denotes a lower lid of the housing 30.

In FIGS. 38 and 39, a ring-shaped piezoelectric body 22 is adhered to the upper principal surface of the elastic body 21 in the thickness direction to form a vibrating part 23. A weight 24 is installed directly on the elastic body 21 without the piezoelectric body 22 therebetween, and a plurality of springs 25
Are installed, and an upper lid 26a and a lower lid 26b are
The vibrating body 23 is supported and fixed by a housing 26 made of. The piezoelectric body 22 is provided with electrodes on both main surfaces in the thickness direction and is polarized in the thickness direction.

When an AC voltage having the resonance frequency of the bending vibration of the vibrating body 23 is applied in the thickness direction of the piezoelectric body 22, the vibrating body 23 vibrates in the thickness direction such that the displacement near the center becomes maximum. At this time, if the resonance frequency at which the spring 25 expands and contracts in the vertical direction is substantially matched to the resonance frequency of the bending vibration of the vibrating body 23, the spring 25 also expands and contracts in the vertical direction together with the bending vibration of the vibrating body 23. The vertical displacement of the weight 24 installed on the vibrating body 23
The displacement caused by the expansion and contraction movement of the spring 25 is further superimposed on the displacement of the bending vibration of. Therefore, weight 24
Can be further increased, so that the vibration of the vibrator can be further increased.

Further, since the piezoelectric body 22 is not provided at the center of the vibrating body 23 having the largest displacement, the strain applied to the piezoelectric body 2 when the vibrating body 23 vibrates can be reduced.
Can be directly installed on the elastic body 21 of the vibrating body 23, so that the operating life can be expected to be longer than when a disk-shaped piezoelectric body is used.

FIGS. 40 and 41 show another example of the piezoelectric vibrator according to the eighth embodiment. In FIG. 40, by installing the weight 24 also at the center of the lower main surface in the thickness direction of the vibrator 23, the weight of the weight can be increased and the vibration of the piezoelectric vibrator can be increased. FIG.
Numeral 1 is to form a vibrating body 23 by bonding an annular piezoelectric body 22 to both main surfaces in the thickness direction of the elastic body 21. The piezoelectric body 22 is different from the piezoelectric body 22 in FIGS. 38, 39 and 40. Volume of 2
Since the weight is doubled, the weight 24 can be driven with a large driving force, and a large vibration can be obtained.

FIGS. 42, 43 and 44 show another example of the piezoelectric vibrator according to the eighth embodiment.
The contact area between the elastic body 21 and the weight 24 can be reduced and the volume of the piezoelectric body 22 can be increased without changing the weight of the weight 24 as much as possible. Therefore, weight 24
, The vibration of the piezoelectric vibrator can be increased.

FIGS. 45 and 46 show another example of the piezoelectric vibrator according to the eighth embodiment. FIG. 45 shows a case in which the vibrating body 23 is supported and fixed by a housing 27 having a spring structure. FIG. 46 shows a case in which the outer peripheral portion of the vibrating body 23 is framed by a frame portion 29 via a beam portion 28 provided radially. The case where the vibrating body 23 is supported and fixed by the body 30 is shown. 45 and 46, the vibrating body 23 is formed by using the ring-shaped piezoelectric body 22, so that the weight and the displacement of the weight 24 can be increased, so that the vibration of the piezoelectric vibrator can be increased. .

[0085]

As described above, according to the piezoelectric actuator of the present invention, the resonance frequency of the vibrating body and the resonance frequency of the spring structure are substantially matched, so that the moving body can be largely driven even when the same voltage is applied. In addition, the number of components can be reduced by providing the housing with a spring structure, and further, by forming the beam portion from the vibrating body, it is possible to reduce the size by reducing the thickness.

Further, by the piezoelectric vibrator according to the present invention, the resonance frequencies of the vibrating body and the spring structure are made substantially equal to each other, so that even if a voltage of the same strength is applied, the weight is largely driven to increase the vibration. In addition, the number of parts can be reduced by providing the housing with a spring structure, and further, by forming the beam portion from the vibrating body, it is possible to reduce the size by reducing the thickness. The piezoelectric vibrator according to the present invention can be used, for example, by assembling it in a device and vibrating the whole or a part of the device to notify the operating state of the device.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view with a part cut away showing a piezoelectric actuator according to a first embodiment of the present invention.

FIG. 2 is a cutaway sectional view showing the piezoelectric actuator according to the first embodiment of the present invention;

FIG. 3 is a cutaway sectional view showing another example of the piezoelectric actuator according to the first embodiment of the present invention.

FIG. 4 is a cutaway sectional view showing another example of the piezoelectric actuator according to the first embodiment of the present invention.

FIG. 5 is an exploded perspective view showing a piezoelectric actuator according to a second embodiment of the present invention, with a portion cut away.

FIG. 6 is a cutaway sectional view showing a piezoelectric actuator according to a second embodiment of the present invention.

FIG. 7 is a cutaway sectional view showing another example of the piezoelectric actuator according to the second embodiment of the present invention.

FIG. 8 is a cutaway sectional view showing another example of the piezoelectric actuator according to the second embodiment of the present invention.

FIG. 9 is an exploded perspective view showing a piezoelectric actuator according to a third embodiment of the present invention, with a portion cut away.

FIG. 10 is a cutaway sectional view showing a piezoelectric actuator according to a third embodiment of the present invention.

FIG. 11 is a cutaway sectional view showing another example of the piezoelectric actuator according to the third embodiment of the present invention.

FIG. 12 is a cutaway sectional view showing another example of the piezoelectric actuator according to the third embodiment of the present invention.

FIG. 13 is an exploded perspective view with a part cut away showing another example of the piezoelectric actuator according to the third embodiment of the present invention.

FIG. 14 is an exploded perspective view with a part cut away showing another example of the piezoelectric actuator according to the third embodiment of the present invention;

FIG. 15 is an exploded perspective view with a part cut away showing a piezoelectric actuator according to a fourth embodiment of the present invention.

FIG. 16 is a cutaway sectional view showing a piezoelectric actuator according to a fourth embodiment of the present invention.

FIG. 17 is a cutaway sectional view showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 18 is a cutaway sectional view showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 19 is an exploded perspective view with a part cut away showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 20 is a cutaway sectional view showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 21 is a cutaway sectional view showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 22 is an exploded perspective view with a part cut away showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention.

FIG. 23 is an exploded perspective view with a part cut away showing another example of the piezoelectric actuator according to the fourth embodiment of the present invention;

FIG. 24 is an exploded perspective view with a part cut away showing a piezoelectric vibrator according to a fifth embodiment of the present invention.

FIG. 25 is a cutaway sectional view showing a piezoelectric vibrator according to a fifth embodiment of the present invention.

FIG. 26 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the fifth embodiment of the present invention.

FIG. 27 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the fifth embodiment of the present invention.

FIG. 28 is an exploded perspective view with a part cut away showing a piezoelectric vibrator according to a sixth embodiment of the present invention.

FIG. 29 is a cutaway sectional view showing a piezoelectric vibrator according to a sixth embodiment of the present invention.

FIG. 30 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the sixth embodiment of the present invention.

FIG. 31 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the sixth embodiment of the present invention.

FIG. 32 is an exploded perspective view with a part cut away showing a piezoelectric vibrator according to a seventh embodiment of the present invention.

FIG. 33 is a cutaway sectional view showing a piezoelectric vibrator according to a seventh embodiment of the present invention.

FIG. 34 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the seventh embodiment of the present invention.

FIG. 35 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the seventh embodiment of the present invention.

FIG. 36 is an exploded perspective view with a part cut away showing another example of the piezoelectric vibrator according to the seventh embodiment of the present invention.

FIG. 37 is an exploded perspective view with a part cut away showing another example of the piezoelectric vibrator according to the seventh embodiment of the present invention;

FIG. 38 is an exploded perspective view with a part cut away showing a piezoelectric vibrator according to an eighth embodiment of the present invention.

FIG. 39 is a cutaway sectional view showing a piezoelectric vibrator according to an eighth embodiment of the present invention.

FIG. 40 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention.

FIG. 41 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention.

FIG. 42 is an exploded perspective view with a part cut away showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention;

FIG. 43 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention.

FIG. 44 is a cutaway sectional view showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention.

FIG. 45 is an exploded perspective view with a part cut away showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention;

FIG. 46 is an exploded perspective view with a part cut away showing another example of the piezoelectric vibrator according to the eighth embodiment of the present invention;

FIG. 47 is a schematic perspective view showing an example of a piezoelectric actuator using bending vibration of a disk.

FIG. 48 is a schematic perspective view showing an example of a vibrator using an electromagnetic motor.

[Explanation of symbols]

 1, 21, 101 Elastic body 2, 22, 102 Piezoelectric body 3, 23, 103 Vibration body 4 Moving body 5, 25 Spring 6, 7, 10, 26, 27, 30 Housing 6a, 7a, 10a, 26a, 27a , 30a Upper lid 6b, 7b, 10b, 26b, 27b, 30b Lower lid 8, 28 Beam 9, 29 Frame 24 Weight 104 Support 105 Electromagnetic motor 106 Eccentric weight

Continued on the front page (72) Inventor Katsumi Imada 1006 Kadoma Kadoma, Osaka Pref. Matsushita Electric Industrial Co., Ltd. Person Nobuhiro Takimoto 1006 Kadoma Kadoma, Kadoma City, Osaka Pref. (72) Inventor Kunihiko Minami 1006 Kadoma Kadoma, Kadoma City, Osaka Pref. FF05 FF10 5H680 AA06 AA12 AA19 BC00 DD23 DD24 DD27 DD44 DD53 EE10 FF08

Claims (8)

[Claims] 1. A vibrating body constituted by a piezoelectric body and an elastic body is elastically vibrated by applying an AC voltage to the piezoelectric body, so that the vibrating body or a moving member provided on the vibrating body is elastically vibrated. A piezoelectric actuator for driving a body, wherein a peripheral portion of the vibrating body is supported and fixed by a spring structure,
And a resonance frequency of the spring structure is set near a resonance frequency of the vibrating body. 2. A vibrating body or a moving body mounted on the vibrating body by elastically vibrating a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body. The housing itself for supporting and fixing the vibrating body has a spring structure portion, and the resonance frequency of the spring structure portion of the housing, the resonance frequency of the vibrating body A piezoelectric actuator characterized by being set near. 3. A vibrating body or a moving body mounted on the vibrating body by elastically vibrating a vibrating body composed of a piezoelectric body and an elastic body by applying an AC voltage to the piezoelectric body. A piezoelectric actuator that drives the vibrator, wherein the vibrator forms a beam portion radially from a center portion to a peripheral portion of the vibrator, supports and fixes the vibrator via the beam portion, and the beam portion Wherein the resonance frequency of the piezoelectric actuator is set near the resonance frequency of the vibrator. 4. The piezoelectric actuator according to claim 1, wherein at least one of the piezoelectric bodies constituting the vibrating body has a shape with a hole. 5. A vibrating body composed of a piezoelectric body and an elastic body is elastically vibrated by applying an AC voltage to the piezoelectric body, and the vibration is generated by driving a weight placed on the vibrating body. A piezoelectric vibrator to be generated, wherein a peripheral portion of the vibrator is supported and fixed by a spring structure,
And a resonance frequency of the spring structure is set near a resonance frequency of the vibrating body. 6. A vibrating body composed of a piezoelectric body and an elastic body is elastically vibrated by applying an AC voltage to the piezoelectric body, thereby driving a weight placed on the vibrating body. A piezoelectric vibrator for generating vibration, wherein a housing for supporting and fixing the vibrator has a spring structure, and a resonance frequency of a spring structure portion of the housing is set near a resonance frequency of the vibrator. A piezoelectric vibrator. 7. A vibrating body composed of a piezoelectric body and an elastic body is elastically vibrated by applying an AC voltage to the piezoelectric body, thereby driving a weight placed on the vibrating body. A piezoelectric vibrator that generates vibration, wherein the vibrator forms a beam portion radially from a central portion to a peripheral portion of the vibrator, supports and fixes the vibrator via the beam portion, and the beam A piezoelectric vibrator characterized in that a resonance frequency of the unit is set near a resonance frequency of the vibrating body. 8. The piezoelectric vibrator according to claim 5, wherein at least one of the piezoelectric bodies constituting the vibrating body has a shape with a hole.