WO2018016630A1 - Piezoelectric vibration generating device and instrument provided with piezoelectric vibration generating device - Google Patents

Piezoelectric vibration generating device and instrument provided with piezoelectric vibration generating device Download PDF

Info

Publication number
WO2018016630A1
WO2018016630A1 PCT/JP2017/026486 JP2017026486W WO2018016630A1 WO 2018016630 A1 WO2018016630 A1 WO 2018016630A1 JP 2017026486 W JP2017026486 W JP 2017026486W WO 2018016630 A1 WO2018016630 A1 WO 2018016630A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric vibration
generating device
diaphragm
hole
vibration generating
Prior art date
Application number
PCT/JP2017/026486
Other languages
French (fr)
Japanese (ja)
Inventor
清 有沢
雅人 林
Original Assignee
北陸電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北陸電気工業株式会社 filed Critical 北陸電気工業株式会社
Priority to JP2018528896A priority Critical patent/JPWO2018016630A1/en
Publication of WO2018016630A1 publication Critical patent/WO2018016630A1/en

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00Piezoelectric transducers; Electrostrictive transducers
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00Diaphragms for electromechanical transducers; Cones
    • H04R7/02Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04Plane diaphragms
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a piezoelectric vibration generating device and a device including the piezoelectric vibration generating device.
  • Patent Document 1 describes a piezoelectric vibration used for a mobile terminal such as a smartphone or a mobile phone, a device of a tablet terminal, or the like to vibrate the display screen when the display screen is touched.
  • a mobile terminal such as a smartphone or a mobile phone
  • a device of a tablet terminal or the like to vibrate the display screen when the display screen is touched.
  • An example of a generating device is disclosed.
  • Patent Document 1 includes a disk-shaped diaphragm (1), and a first case half having a first through hole in the center and made of an electrically insulating material ( 5a) and an insulating case (5) configured by combining a second case half (5b) made of an electrically insulating material sandwiching the outer periphery of the diaphragm between the first case half and the diaphragm (1 ) And one or more disk-shaped piezoelectric vibration elements (2) having a second through-hole in the center and one end connected to the center of the vibration plate, and the second through-hole of the piezoelectric vibration element And a vibration shaft (4) extending through the hole and the first through hole of the first case half and extending to the outside of the first case half.
  • 5a electrically insulating material
  • insulating case (5) configured by combining a second case half (5b) made of an electrically insulating material sandwiching the outer periphery of the diaphragm between the first case half and the diaphragm
  • FIGS. 1 and 2 are Japanese Patent Laid-Open No. 2001-17917, FIGS. 1 and 2
  • An object of the present invention is to provide a piezoelectric vibration generating device using a disk-shaped diaphragm and a piezoelectric vibration element having high mechanical strength and a long life, and an apparatus including the piezoelectric vibration generating device. .
  • an outer peripheral portion of a diaphragm is formed between a metal disk-shaped diaphragm, a first case half having a first through hole in the center and made of an electrically insulating material, and a first case half.
  • An insulating case formed by combining second case halves made of an electrically insulating material to be sandwiched, and one or more disk-shaped piezoelectric vibrating elements joined to one or both sides of the diaphragm and having a second through hole in the center And one end connected to the central part of the diaphragm, and the other end extending through the second through hole of the piezoelectric vibration element and the first through hole of the first case half and extending to the outside of the first case half.
  • a piezoelectric vibration generating device having a shaft is an object of improvement.
  • the third through hole is formed at the center of the diaphragm.
  • the vibration shaft passes through the third through hole, the second through hole, and the first through hole so that the head portion is located on the second case half side and the screw portion at the tip extends to the outside of the first case half portion.
  • It consists of a screw member arranged to do.
  • a nut member is screwed into the threaded portion or a retaining washer is fitted.
  • a nut member contains the components of the apparatus provided with the internal thread part formed in the driven member which transmits a vibration other than a general nut.
  • the vibration shaft of the piezoelectric vibration generating device can be coupled to the component of the device to be vibrated by screw coupling, it is easy to mount and high coupling strength can be obtained.
  • the second through half of the second case is formed with a fourth through hole having a size corresponding to the head of the screw member. Even if the fourth through hole is provided, the amplitude of the diaphragm increases. Since the fourth through hole serves as a clearance space for the head of the screw member, the diaphragm can be vibrated with a large amplitude without increasing the thickness.
  • the nut member or retaining washer is preferably made of metal.
  • an insulating washer made of an electrically insulating material is disposed between the retaining washer or the nut member and the diaphragm and between the diaphragm and the head of the screw member. That's fine.
  • the nut member or the retaining washer may be formed of a material other than metal.
  • the insulating washer is preferably a resin washer. Since the resin washer is more flexible than the metal washer, the vibration of the diaphragm is restrained more than necessary, and the vibration is not significantly reduced.
  • the insulating washer may be formed of other insulating materials such as ceramic.
  • the insulating washer may be replaced with a metal washer.
  • the diaphragm is formed with a plurality of slits that penetrate the diaphragm in the thickness direction and are arranged at intervals in the circumferential direction so as to surround the periphery of the piezoelectric vibration element.
  • the diaphragm is further disposed in the circumferential direction so as to penetrate the diaphragm in the thickness direction and be positioned between the piezoelectric vibration element and the second through hole so as to surround the periphery of the second through hole.
  • a plurality of slits are formed. Such a plurality of slits also contributes to making the diaphragm flexible in a desired range, which is useful for further increasing the amplitude of the diaphragm.
  • a standing wall portion that rises toward the first case half or the second case half may be provided integrally with the outer peripheral portion of the diaphragm.
  • the standing wall portion is in contact with the first case half and the second case half and the diaphragm is between the first case half or the second case half. Since it is sandwiched, the substantial diameter of the diaphragm can be maximized, and the vibration of the diaphragm can be further increased.
  • the piezoelectric vibration element may be a unimorph type piezoelectric vibration element, but of course, a bimorph piezoelectric vibration element may be used to obtain stronger vibration.
  • the vibration shaft or the insulating case of the piezoelectric vibration generating device may be fixed to the fixed part of the device.
  • both the vibration shaft of the piezoelectric vibration generating device and the insulating case may be fixed to a pair of fixed parts facing each other.
  • FIG. 2 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 1. It is sectional drawing of the piezoelectric vibration generating device of 2nd Embodiment of the piezoelectric vibration generating device of this invention.
  • FIG. 4 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 3.
  • A) is a plan view of a diaphragm used in the third embodiment, and
  • (B) is a half-sectional cross-sectional perspective view taken along the line BB of FIG. 5 (A).
  • FIG. 7 is a half cross-sectional perspective view of the piezoelectric vibration generating device of FIG. 6. It is sectional drawing which shows the other example in the case of fixing the piezoelectric vibration generating device of 5th Embodiment of the piezoelectric vibration generating device of this invention to the case of a portable terminal. It is sectional drawing of an example of the piezoelectric vibration generating device of 6th Embodiment of the piezoelectric vibration generating device of this invention.
  • FIG. 10 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 9. It is sectional drawing of an example of the piezoelectric vibration generating device of 7th Embodiment of the piezoelectric vibration generating device of this invention.
  • FIG. 1 is a cross-sectional view of an example of a piezoelectric vibration generating device 1 using a unimorph piezoelectric vibration element of the present invention
  • FIG. 2 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG.
  • a piezoelectric vibration generating device 1 includes a disk-shaped or annular diaphragm 3 made of metal (brass in the present embodiment) and a first through hole 5 in the center, and an electrically insulating material.
  • An insulating case 11 configured by combining a first case half 7 and a second case half 9 made of an electrically insulating material sandwiching the outer periphery of the diaphragm 3 between the first case half 7 and the first case half 7;
  • a disk-shaped or annular piezoelectric vibration element 15 having a second through-hole 13 in the center and bonded to one surface of the vibration plate 3 and one end 17A are connected to the central portion of the vibration plate 3, 2 and a vibration shaft 17 extending through the first through hole 5 of the first case half 7 and the other end 17 ⁇ / b> B extending to the outside of the first case half 7.
  • the first case half 7 and the second case half 9 are each integrally formed of an insulating resin material, and constitute an insulating case 11 with the diaphragm 3 sandwiched therebetween.
  • the second case half 9 is formed with a fourth through hole 10 having a size that allows the head portion 17C to pass therethrough corresponding to the head portion 17C of the screw member constituting the vibration shaft 17.
  • the fourth through hole 10 is provided, even when the amplitude of the diaphragm 3 is increased, the fourth through hole 10 becomes a clearance space for the head portion 17C of the screw member (17), so that the thickness is not increased.
  • the diaphragm can be vibrated with a large amplitude.
  • the insulating case 11 is fitted into the fitting hole 12A of the insulating resin mounting frame 12 having a cylindrical fitting hole 12A at the center and fixed to the mounting frame 12 using an adhesive.
  • the mounting frame 12 is composed of a cylindrical tube body 12B and a flange portion 12C.
  • the mounting frame 12 is used by being fixed to a case (fixed portion) of a portable terminal, an operation panel of a device such as an automobile, or the like. Attachment is performed by inserting attachment screws into attachment holes 12D provided in the attachment frame 12.
  • the third through hole 4 is formed at the center of the diaphragm 3.
  • the vibration shaft 17 has a head (other end) 17C positioned on the second case half 9 side, and a screw portion 17D at the tip (one end 17A) extending to the outside of the first case half 7. It is comprised from the metal (stainless steel) screw member arrange
  • the unimorph piezoelectric vibration element 15 has an annular shape.
  • the piezoelectric vibration element 15 is provided with electrodes on both main surfaces and polarized in the thickness direction. Electric power is supplied to the piezoelectric vibration element 15 by electrically connecting to electrodes provided on two main surfaces in the thickness direction of the piezoelectric vibration element 15 using lead wires (not shown).
  • the electrode on the metal diaphragm 3 side includes, for example, the material of the metal diaphragm 3 made of a conductor such as metal, If the metallic diaphragm 3 and the piezoelectric vibration element 15 are bonded to each other with a conductive adhesive, they can be electrically connected. At this time, even if the adhesive used for bonding is not conductive, the electrical connection can be ensured by bonding the metal diaphragm 3 and the piezoelectric vibration element 15 so as to partially contact each other with the surface roughness. can do.
  • the nut member 19 is made of metal from the viewpoint of mechanical strength. However, since a short circuit problem occurs, in the present embodiment, the nut member 19 and the diaphragm 3 Insulating washers 20A and 20B made of an electrically insulating material are arranged between the diaphragm 3 and the head 17C of the screw member (17).
  • the piezoelectric vibration generating device having the above configuration will be described.
  • an AC voltage having a resonance frequency of flexural vibration of the vibration plate 3 is applied in the thickness direction of the piezoelectric vibration element 15, the piezoelectric vibration element 15 is excited, and the vibration plate 3 is near its center, that is, near the center of the piezoelectric vibration element 15.
  • the vibration is flexed and vibrated in the thickness direction so that the maximum displacement is obtained. Further, in the vibration plate 3, the flexural vibration generated from the piezoelectric vibration element 15 propagates to the entire metal vibration plate 3.
  • the vibration of the diaphragm 3 is transmitted to the vibration shaft 17 as it is, and the vibration of the vibration shaft 17 can be taken out of the piezoelectric vibration generating device 1 as a driving force.
  • the threaded portion 17D of the end of the vibrating shaft 17 is fixed to the driven member 21, the driven member 21 vibrates.
  • a unimorph piezoelectric vibration element is used, but a bimorph piezoelectric vibration element may be used instead of the unimorph piezoelectric vibration element.
  • the nut member 19 prevents the screw member (17) from coming off, but instead of the nut member 19, a retaining washer is attached to the screw portion 17D of the screw member (17) constituting the vibration shaft. Of course, they may be fitted.
  • the retaining washer is a well-known washer having a plurality of claw portions that protrude radially inward from the inside of an annular washer body and are provided at predetermined intervals in the circumferential direction. The plurality of claw portions are fitted into the thread valleys of the screw portion 17D of the screw member (17), thereby realizing the retaining.
  • FIG. 3 is a sectional view of an example of the piezoelectric vibration generating device 1 of the second embodiment of the piezoelectric vibration generating device of the present invention
  • FIG. 4 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG.
  • the piezoelectric vibration element 15 is attached to one side of the diaphragm 3, but in the second embodiment, the piezoelectric vibration elements 15A and 15B are provided on both sides of the diaphragm 3, respectively. This is different from the first embodiment. In other respects, the configuration is the same as that of the first embodiment.
  • FIG. 5A is a plan view of the diaphragm 3 used in the third embodiment
  • FIG. 5B is a cross-sectional perspective view taken along the line BB in FIG. 5A.
  • the diaphragm 3 is formed with a plurality of slits 14 penetrating the diaphragm 3 in the thickness direction and arranged at intervals in the circumferential direction so as to surround the periphery of the piezoelectric vibration elements 15A and 15B. .
  • the flexibility of the diaphragm 3 can be in a desired range without significantly reducing the mechanical strength of the diaphragm 3. Therefore, the amplitude of the diaphragm can be increased.
  • the diaphragm 3 further penetrates the diaphragm 3 in the thickness direction, and is located between the piezoelectric vibrating elements 15A and 15B and the second through hole 13.
  • a plurality of slits 14 ′ arranged at intervals in the circumferential direction so as to surround the periphery of the second through hole 13 may be formed.
  • Such a plurality of slits 14 ′ also contributes to making the flexibility of the diaphragm 3 within a desired range, which is useful when the amplitude of the diaphragm is further increased.
  • FIG. 6 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 of the fourth embodiment of the piezoelectric vibration generating device of the present invention
  • FIG. 7 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG. It is.
  • the same reference numerals as those in FIGS. 1 to 4 are attached to the same portions as those in the first embodiment and the second embodiment shown in FIGS. It is.
  • a flat diaphragm 3 is used.
  • the first case half 7 is formed on the outer periphery of the diaphragm 30.
  • a standing wall portion 30 ⁇ / b> A that rises toward the ′ side is integrally provided.
  • the standing wall portion 30A comes into contact with the first case half portion 7 'and the second case half portion 9 so that the diaphragm 30 is in contact with the first case half portion 7'. Since it is sandwiched between the two case halves 9, the substantial diameter of the diaphragm 30 can be maximized, and the vibration of the diaphragm 30 can be increased.
  • the standing wall 30A stands on the first case half 7 'side, but it goes without saying that the standing wall 30A may rise on the second case half 9 side.
  • FIG. 8 is a cross-sectional view showing another example of the case where the piezoelectric vibration generating device 1 according to the fifth embodiment of the piezoelectric vibration generating device of the present invention is fixed to the case 23 (fixed portion) of the mobile terminal.
  • the same parts as those in the first embodiment and the second embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals as those in FIGS.
  • the screw portion 17D of the vibration shaft 17 is screwed to the case 23.
  • the mounting frame 12 functions as a weight.
  • a screwdriver is inserted into a driver slot (not shown) provided in the head 17C of the screw member constituting the vibration shaft 17, and the screw portion 17D of the vibration shaft 17 is screwed into the female screw portion provided in the case 23. By doing so, the attachment of the piezoelectric vibration generating device 1 is completed.
  • FIG. 9 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 according to the sixth embodiment of the piezoelectric vibration generating device of the present invention
  • FIG. 10 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG. It is. 9 and 10, the same reference numerals as those in FIGS. 1 to 4 are attached to the same portions as those in the first and second embodiments shown in FIGS. It is.
  • the mounting frame 12 is composed of a cylindrical cylindrical body 12B and a flange portion 12C. In the present embodiment, the mounting frame 12 and the first frame are the same.
  • the case half 7 is integrally formed.
  • FIG. 11 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 according to the seventh embodiment of the piezoelectric vibration generating device of the present invention.
  • FIG. 10 shows the first embodiment shown in FIGS. The same reference numerals as those shown in FIG. 1 and FIG.
  • the present embodiment is different from the first embodiment in that the length of the vibration shaft 17 is long and the stopper 18 is fixed to the first case half 7.
  • the stopper 18 is in contact with the vibrating body 21 that vibrates and regulates the vibration range in the radial direction of the vibrating body 21 fixed to the screw portion 17D of the vibration shaft 17.
  • the stopper 18 may have a cylindrical shape with the vibration shaft 17 as the center, or may be a protrusion arranged in an annular shape at intervals in the circumferential direction.
  • the vibration shaft when the vibration shaft is attached to the diaphragm using the screw member and the nut member or the retaining washer, it does not take time for the coupling operation of both, and compared to the case where both are joined by bonding, High bond strength can be obtained.
  • the vibration shaft of the piezoelectric vibration generating device can be coupled to the component of the device to be vibrated by screw coupling, it is easy to mount and high coupling strength can be obtained.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

Provided are: a piezoelectric vibration generating device that is finished with less manufacturing time and has a longer lifespan than the prior art, and that uses a circular vibrating plate and piezoelectric vibrating element; and an instrument provided with said piezoelectric vibration generating device. A vibrating shaft 17 is configured from a metal screw member arranged so as to pass through a third through-hole 4 provided to a vibrating plate 3, a second through-hole 13 of a piezoelectric vibrating element 15, and a first through-hole 5 of a first case half-section 7, so that a head part 17C is positioned on a side near a second case half-section 9 and a screw part 17D at the distal end extends out to the exterior of the first case half-section 7. A metal nut member 19 is fitted with the screw part 17D.

Description

圧電振動発生デバイス及び圧電振動発生デバイスを備えた機器Piezoelectric vibration generating device and apparatus including the piezoelectric vibration generating device
 本発明は、圧電振動発生デバイス及び圧電振動発生デバイスを備えた機器に関するものである。 The present invention relates to a piezoelectric vibration generating device and a device including the piezoelectric vibration generating device.
 特開2001-17917号公報(特許文献1)には、スマートフォンや携帯電話等の携帯端末やタブレット端末の機器等に用いられて、表示画面を触ったときに表示画面を振動させるための圧電振動発生デバイスの一例が開示されている。特許文献1の図1及び図2に示された圧電振動発生デバイスは、円板状の振動板(1)と、中央に第1貫通孔を有し電気絶縁材料からなる第1ケース半部(5a)及び第1ケース半部との間で振動板の外周部を挟む電気絶縁材料からなる第2ケース半部(5b)が組み合わされて構成された絶縁ケース(5)と、振動板(1)の片面または両面に接合されて中央に第2貫通孔を有する1以上の円板状の圧電振動素子(2)と、一端が振動板の中央部に連結され、圧電振動素子の第2貫通孔及び第1ケース半部の第1貫通孔を貫通して他端が第1ケース半部の外部に延び出る振動軸(4)とを備えている。 Japanese Patent Laid-Open No. 2001-17917 (Patent Document 1) describes a piezoelectric vibration used for a mobile terminal such as a smartphone or a mobile phone, a device of a tablet terminal, or the like to vibrate the display screen when the display screen is touched. An example of a generating device is disclosed. The piezoelectric vibration generating device shown in FIGS. 1 and 2 of Patent Document 1 includes a disk-shaped diaphragm (1), and a first case half having a first through hole in the center and made of an electrically insulating material ( 5a) and an insulating case (5) configured by combining a second case half (5b) made of an electrically insulating material sandwiching the outer periphery of the diaphragm between the first case half and the diaphragm (1 ) And one or more disk-shaped piezoelectric vibration elements (2) having a second through-hole in the center and one end connected to the center of the vibration plate, and the second through-hole of the piezoelectric vibration element And a vibration shaft (4) extending through the hole and the first through hole of the first case half and extending to the outside of the first case half.
特開2001-17917号公報 図1及び図2Japanese Patent Laid-Open No. 2001-17917, FIGS. 1 and 2
 特許文献1に記載の圧電振動発生デバイスでは、振動板及び圧電振動素子が円板状または円環状を呈しているため、矩形状の振動板及び矩形状の圧電振動素子を用いた圧電振動発生デバイスよりも大きな振動を得ることができる。 In the piezoelectric vibration generating device described in Patent Document 1, since the vibration plate and the piezoelectric vibration element have a disk shape or an annular shape, the piezoelectric vibration generation device using the rectangular vibration plate and the rectangular piezoelectric vibration element. Larger vibration can be obtained.
 特許文献1には具体的に記載されていないが、特許文献1の図1及び2及びそれらの説明に基づいて推測すると、振動軸は振動板の中央に接着されているものと考えられる。 Although not specifically described in Patent Document 1, it is considered that the vibration axis is bonded to the center of the diaphragm when estimated based on FIGS. 1 and 2 of Patent Document 1 and the description thereof.
 しかしながら接着により振動軸と振動板を接合した場合には、長期間にわたって使用すると、接着部で剥離が生じる可能性が高い。特に、振動軸を介して、例えば、自動車の操作パネルや各種機械の操作パネル等のように重量のある被固定物に振動を与えようとすると、接着部の強度が十分でないために、接着部が破壊されて短い期間で寿命に至る問題が生じる。 However, when the vibration shaft and the vibration plate are joined by bonding, there is a high possibility that peeling will occur at the bonded portion if used for a long time. In particular, if vibration is applied to a heavy object to be fixed such as an operation panel of an automobile or an operation panel of various machines via a vibration shaft, the strength of the adhesion portion is not sufficient. Is destroyed, and a problem occurs that the life span is shortened in a short period of time.
 本発明の目的は、機械的な強度が高く、寿命が長い、円板状の振動板及び圧電振動素子を用いた圧電振動発生デバイス及び該圧電振動発生デバイスを備えた機器を提供することにある。 An object of the present invention is to provide a piezoelectric vibration generating device using a disk-shaped diaphragm and a piezoelectric vibration element having high mechanical strength and a long life, and an apparatus including the piezoelectric vibration generating device. .
 本発明は、金属製の円板状の振動板と、中央に第1貫通孔を有し電気絶縁材料からなる第1ケース半部及び第1ケース半部との間で振動板の外周部を挟む電気絶縁材料からなる第2ケース半部が組み合わされて構成された絶縁ケースと、振動板の片面または両面に接合されて中央に第2貫通孔を有する1以上の円板状の圧電振動素子と、一端が振動板の中央部に連結され、圧電振動素子の第2貫通孔及び第1ケース半部の第1貫通孔を貫通して他端が第1ケース半部の外部に延び出る振動軸とを備えた圧電振動発生デバイスを改良の対象とする。本発明の圧電振動発生デバイスでは、振動板の中央部に第3貫通孔が形成されている。そして振動軸は、頭部が第2ケース半部側に位置し先端のネジ部が第1ケース半部の外部に延び出るように第3貫通孔、第2貫通孔及び第1貫通孔を貫通するように配置されたネジ部材からなる。その上で、ネジ部にナット部材が螺合されているかまたは抜け止めワッシャが嵌合されている。なお本願明細書においてナット部材は、一般的なナットの他、振動を伝える被駆動部材に形成された雌ネジ部を備えた機器の部品を含むものである。 According to the present invention, an outer peripheral portion of a diaphragm is formed between a metal disk-shaped diaphragm, a first case half having a first through hole in the center and made of an electrically insulating material, and a first case half. An insulating case formed by combining second case halves made of an electrically insulating material to be sandwiched, and one or more disk-shaped piezoelectric vibrating elements joined to one or both sides of the diaphragm and having a second through hole in the center And one end connected to the central part of the diaphragm, and the other end extending through the second through hole of the piezoelectric vibration element and the first through hole of the first case half and extending to the outside of the first case half. A piezoelectric vibration generating device having a shaft is an object of improvement. In the piezoelectric vibration generating device of the present invention, the third through hole is formed at the center of the diaphragm. The vibration shaft passes through the third through hole, the second through hole, and the first through hole so that the head portion is located on the second case half side and the screw portion at the tip extends to the outside of the first case half portion. It consists of a screw member arranged to do. In addition, a nut member is screwed into the threaded portion or a retaining washer is fitted. In addition, in this specification, a nut member contains the components of the apparatus provided with the internal thread part formed in the driven member which transmits a vibration other than a general nut.
 本発明のように、ネジ部材とナット部材または抜け止めワッシャを用いて、振動板に振動軸を取り付けると、両者の結合作業に時間を要しない上、接着により両者を接合した場合と比べて、高い結合強度を得ることができる。また圧電振動発生デバイスの振動軸を、振動対象の機器の部品にネジ結合により連結できるので、装着が容易で、しかも高い結合強度を得ることができる。 As in the present invention, using a screw member and a nut member or a retaining washer, and attaching the vibration shaft to the diaphragm, it does not take time to join both, and compared to the case where both are joined by bonding, High bond strength can be obtained. In addition, since the vibration shaft of the piezoelectric vibration generating device can be coupled to the component of the device to be vibrated by screw coupling, it is easy to mount and high coupling strength can be obtained.
 第2ケース半部には、ネジ部材の頭部に対応して頭部が通過できる大きさの第4貫通孔が形成されているのが好ましい。第4の貫通孔を設けると、振動板の振幅が大きくなった場合でも。第4貫通孔がネジ部材の頭部の逃げ空間となるため、厚みを大きくすることなく、大きな振幅で振動板を振動させることができる。 It is preferable that the second through half of the second case is formed with a fourth through hole having a size corresponding to the head of the screw member. Even if the fourth through hole is provided, the amplitude of the diaphragm increases. Since the fourth through hole serves as a clearance space for the head of the screw member, the diaphragm can be vibrated with a large amplitude without increasing the thickness.
 機械的な強度の点からは、ナット部材または抜け止めワッシャは金属製であるのが好ましい。この場合、短絡の問題が発生するので、抜け止めワッシャまたはナット部材と振動板との間及び該振動板とネジ部材の頭部との間には、それぞれ電気絶縁材料からなる絶縁ワッシャを配置すればよい。なおナット部材または抜け止めワッシャは、金属以外の材料によって形成されていてもよい。 From the viewpoint of mechanical strength, the nut member or retaining washer is preferably made of metal. In this case, since a short circuit problem occurs, an insulating washer made of an electrically insulating material is disposed between the retaining washer or the nut member and the diaphragm and between the diaphragm and the head of the screw member. That's fine. Note that the nut member or the retaining washer may be formed of a material other than metal.
 また絶縁ワッシャは、樹脂ワッシャであるのが好ましい。樹脂ワッシャは、金属ワッシャよりも柔軟性があるため、振動板の振動を必要以上に拘束して、振動の著しい低下を招くことがない。なお絶縁ワッシャが、セラミック等の他の絶縁材料によって形成されていてもよいのは勿論である。さらに絶縁ワッシャを金属製のワッシャに置き換えてもよいのは勿論である。 The insulating washer is preferably a resin washer. Since the resin washer is more flexible than the metal washer, the vibration of the diaphragm is restrained more than necessary, and the vibration is not significantly reduced. Of course, the insulating washer may be formed of other insulating materials such as ceramic. Of course, the insulating washer may be replaced with a metal washer.
 振動板には、振動板を厚み方向に貫通しており且つ圧電振動素子の周囲を囲むように周方向に間隔をあけて配置された複数のスリットが形成されているのが好ましい。このような複数のスリットを設けると、振動板の機械的強度を大幅に低下させることなく、振動板の可撓性を所望の範囲のものとすることができる。したがって振動板の振幅を大きくすることが可能になる。 It is preferable that the diaphragm is formed with a plurality of slits that penetrate the diaphragm in the thickness direction and are arranged at intervals in the circumferential direction so as to surround the periphery of the piezoelectric vibration element. By providing such a plurality of slits, the flexibility of the diaphragm can be made within a desired range without significantly reducing the mechanical strength of the diaphragm. Therefore, the amplitude of the diaphragm can be increased.
 振動板には、さらに振動板を厚み方向に貫通しており且つ圧電振動素子と第2貫通孔との間に位置して第2貫通孔の周囲を囲むように周方向に間隔をあけて配置された複数のスリットが形成されているのが好ましい。このような複数のスリットも、振動板の可撓性を所望の範囲のものとすることに寄与するので、振動板の振幅をさらに大きくする場合に役立つ。 The diaphragm is further disposed in the circumferential direction so as to penetrate the diaphragm in the thickness direction and be positioned between the piezoelectric vibration element and the second through hole so as to surround the periphery of the second through hole. Preferably, a plurality of slits are formed. Such a plurality of slits also contributes to making the diaphragm flexible in a desired range, which is useful for further increasing the amplitude of the diaphragm.
 振動板の外周部には、第1ケース半部または前記第2ケース半部側に立ち上がる起立壁部が一体に設けられていてもよい。このような起立壁部を設けると、起立壁部が第1ケース半部及び第2ケース半部と接触した状態になって振動板が第1ケース半部または第2ケース半部との間に挟持されることになるため、振動板の実質直径を最も大きくすることができ、振動板の振動をより大きなものとすることができる。 A standing wall portion that rises toward the first case half or the second case half may be provided integrally with the outer peripheral portion of the diaphragm. When such a standing wall portion is provided, the standing wall portion is in contact with the first case half and the second case half and the diaphragm is between the first case half or the second case half. Since it is sandwiched, the substantial diameter of the diaphragm can be maximized, and the vibration of the diaphragm can be further increased.
 圧電振動素子は、ユニモルフ型の圧電振動素子でもよいが、より強い振動を得るためには、バイモルフ圧電振動素子を用いても良いのは勿論である。 The piezoelectric vibration element may be a unimorph type piezoelectric vibration element, but of course, a bimorph piezoelectric vibration element may be used to obtain stronger vibration.
 本発明の圧電振動発生デバイスを、携帯端末や自動車等の操作パネル等の機器に用いる場合には、圧電振動発生デバイスの振動軸または絶縁ケースを、機器の被固定部に対して固定すればよい。また圧電振動発生デバイスの振動軸と絶縁ケースの両方を、機器の対向する一対の被固定部に対してそれぞれ固定するようにしても良いのは勿論である。 When the piezoelectric vibration generating device of the present invention is used in a device such as an operation panel of a portable terminal or an automobile, the vibration shaft or the insulating case of the piezoelectric vibration generating device may be fixed to the fixed part of the device. . Needless to say, both the vibration shaft of the piezoelectric vibration generating device and the insulating case may be fixed to a pair of fixed parts facing each other.
本発明のユニモルフ圧電振動素子を用いた圧電振動発生デバイスの一例の断面図である。It is sectional drawing of an example of the piezoelectric vibration generation device using the unimorph piezoelectric vibration element of this invention. 図1の圧電振動発生デバイスの半部断面斜視図である。FIG. 2 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 1. 本発明の圧電振動発生デバイスの第2の実施の形態の圧電振動発生デバイスの断面図である。It is sectional drawing of the piezoelectric vibration generating device of 2nd Embodiment of the piezoelectric vibration generating device of this invention. 図3の圧電振動発生デバイスの半部断面斜視図である。FIG. 4 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 3. (A)は第3の実施の形態で用いる振動板の平面図であり、(B)は図5(A)のB-B線切断半部断面斜視図である。(A) is a plan view of a diaphragm used in the third embodiment, and (B) is a half-sectional cross-sectional perspective view taken along the line BB of FIG. 5 (A). 本発明の圧電振動発生デバイスの第4の実施の形態の圧電振動発生デバイスの断面図である。It is sectional drawing of the piezoelectric vibration generating device of 4th Embodiment of the piezoelectric vibration generating device of this invention. 図6の圧電振動発生デバイスの半部断面斜視図である。FIG. 7 is a half cross-sectional perspective view of the piezoelectric vibration generating device of FIG. 6. 本発明の圧電振動発生デバイスの第5の実施の形態の圧電振動発生デバイスを携帯端末のケースに固定する場合の他の例を示す断面図である。It is sectional drawing which shows the other example in the case of fixing the piezoelectric vibration generating device of 5th Embodiment of the piezoelectric vibration generating device of this invention to the case of a portable terminal. 本発明の圧電振動発生デバイスの第6の実施の形態の圧電振動発生デバイスの一例の断面図である。It is sectional drawing of an example of the piezoelectric vibration generating device of 6th Embodiment of the piezoelectric vibration generating device of this invention. 図9の圧電振動発生デバイスの半部断面斜視図である。FIG. 10 is a half sectional perspective view of the piezoelectric vibration generating device of FIG. 9. 本発明の圧電振動発生デバイスの第7の実施の形態の圧電振動発生デバイスの一例の断面図である。It is sectional drawing of an example of the piezoelectric vibration generating device of 7th Embodiment of the piezoelectric vibration generating device of this invention.
 以下図面を参照して本発明の圧電振動発生デバイスの実施の形態について説明をする。 Embodiments of the piezoelectric vibration generating device of the present invention will be described below with reference to the drawings.
 (実施形態1)
 図1は、本発明のユニモルフ圧電振動素子を用いた圧電振動発生デバイス1の一例の断面図であり、図2は、図1の圧電振動発生デバイス1の半部断面斜視図である。
(Embodiment 1)
FIG. 1 is a cross-sectional view of an example of a piezoelectric vibration generating device 1 using a unimorph piezoelectric vibration element of the present invention, and FIG. 2 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG.
 図1及び図2において、圧電振動発生デバイス1は、金属製(本実施の形態では真鍮)の円板状または円環状の振動板3と、中央に第1貫通孔5を有し電気絶縁材料からなる第1ケース半部7及び第1ケース半部7との間で振動板3の外周部を挟む電気絶縁材料からなる第2ケース半部9が組み合わされて構成された絶縁ケース11と、振動板3の片面に接合されて中央に第2貫通孔13を有する円板状または円環状の圧電振動素子15と、一端17Aが振動板3の中央部に連結され、圧電振動素子15の第2貫通孔13及び第1ケース半部7の第1貫通孔5を貫通して他端17Bが第1ケース半部7の外部に延び出る振動軸17とを備えている。第1ケース半部7及び第2ケース半部9は、それぞれ絶縁樹脂材料によって一体に成形されており、間に振動板3を挟んだ状態で絶縁ケース11を構成している。第2ケース半部9には、振動軸17を構成するネジ部材の頭部17Cに対応して頭部17Cが通過できる大きさの第4貫通孔10が形成されている。第4の貫通孔10を設けると、振動板3の振幅が大きくなった場合でも、第4貫通孔10がネジ部材(17)の頭部17Cの逃げ空間となるため、厚みを大きくすることなく、大きな振幅で振動板を振動させることができる。 1 and 2, a piezoelectric vibration generating device 1 includes a disk-shaped or annular diaphragm 3 made of metal (brass in the present embodiment) and a first through hole 5 in the center, and an electrically insulating material. An insulating case 11 configured by combining a first case half 7 and a second case half 9 made of an electrically insulating material sandwiching the outer periphery of the diaphragm 3 between the first case half 7 and the first case half 7; A disk-shaped or annular piezoelectric vibration element 15 having a second through-hole 13 in the center and bonded to one surface of the vibration plate 3 and one end 17A are connected to the central portion of the vibration plate 3, 2 and a vibration shaft 17 extending through the first through hole 5 of the first case half 7 and the other end 17 </ b> B extending to the outside of the first case half 7. The first case half 7 and the second case half 9 are each integrally formed of an insulating resin material, and constitute an insulating case 11 with the diaphragm 3 sandwiched therebetween. The second case half 9 is formed with a fourth through hole 10 having a size that allows the head portion 17C to pass therethrough corresponding to the head portion 17C of the screw member constituting the vibration shaft 17. When the fourth through hole 10 is provided, even when the amplitude of the diaphragm 3 is increased, the fourth through hole 10 becomes a clearance space for the head portion 17C of the screw member (17), so that the thickness is not increased. The diaphragm can be vibrated with a large amplitude.
 本実施の形態では、絶縁ケース11は、中央に円柱状の嵌合孔12Aを備えた絶縁樹脂製の取付フレーム12の嵌合孔12A内に嵌合され接着剤を用いて取付フレーム12に固定されている。本実施の形態では、なお取付フレーム12は、円筒状の筒体12Bとフランジ部12Cとから構成されている。なお本実施の形態では、取付フレーム12が携帯端末のケース(被固定部)や、自動車等の機器の操作パネル等に固定されて使用される。取付は取付フレーム12に設けた取付孔12Dに取付ネジを挿入して行う。 In the present embodiment, the insulating case 11 is fitted into the fitting hole 12A of the insulating resin mounting frame 12 having a cylindrical fitting hole 12A at the center and fixed to the mounting frame 12 using an adhesive. Has been. In the present embodiment, the mounting frame 12 is composed of a cylindrical tube body 12B and a flange portion 12C. In the present embodiment, the mounting frame 12 is used by being fixed to a case (fixed portion) of a portable terminal, an operation panel of a device such as an automobile, or the like. Attachment is performed by inserting attachment screws into attachment holes 12D provided in the attachment frame 12.
 本実施の形態の圧電振動発生デバイス1では、振動板3の中央部に第3貫通孔4が形成されている。そして本実施の形態では、振動軸17が、頭部(他端)17Cが第2ケース半部9側に位置し先端(一端17A)のネジ部17Dが第1ケース半部7の外部に延び出るように第3貫通孔4、第2貫通孔13及び第1貫通孔5を貫通するように配置された金属製(ステンレス製)のネジ部材から構成されている。そしてネジ部17Dに金属製(ステンレス製)のナット部材19が嵌合されている。 In the piezoelectric vibration generating device 1 of the present embodiment, the third through hole 4 is formed at the center of the diaphragm 3. In this embodiment, the vibration shaft 17 has a head (other end) 17C positioned on the second case half 9 side, and a screw portion 17D at the tip (one end 17A) extending to the outside of the first case half 7. It is comprised from the metal (stainless steel) screw member arrange | positioned so that it may penetrate through the 3rd through-hole 4, the 2nd through-hole 13, and the 1st through-hole 5. As shown in FIG. A metal (stainless steel) nut member 19 is fitted to the screw portion 17D.
 本発明のように、ネジ部材(17)とナット部材19を用いて、振動板3に振動軸17を取り付けると、両者の結合作業に時間を要しない上、接着により両者を接合した場合と比べて、高い結合強度を得ることができる。 When the vibration shaft 17 is attached to the diaphragm 3 by using the screw member (17) and the nut member 19 as in the present invention, it does not take time to join the two, and compared to the case where both are joined by bonding. Thus, a high bond strength can be obtained.
 ユニモルフ圧電振動素子15は、円環状を呈している。圧電振動素子15は、その両主面に電極が設置されるとともに、厚さ方向に分極されている。圧電振動素子15への電力供給は、図示しないリード線を用いて、圧電振動素子15の厚さ方向の2つの主面上に設置された電極に電気的に接続することにより行う。また、圧電振動素子15の一方の主面に形成された電極のうち、金属製の振動板3側の電極には、例えば金属製の振動板3の材質を金属等の導電体で構成し、導電性の接着剤で金属製の振動板3と圧電振動素子15とを接着すれば、電気的に接続することができる。このとき、接着に用いる接着剤が導電性でない場合でも、金属製の振動板3と圧電振動素子15の互いの表面粗さで部分的に接触するように接着を行えば、電気的接続を確保することができる。 The unimorph piezoelectric vibration element 15 has an annular shape. The piezoelectric vibration element 15 is provided with electrodes on both main surfaces and polarized in the thickness direction. Electric power is supplied to the piezoelectric vibration element 15 by electrically connecting to electrodes provided on two main surfaces in the thickness direction of the piezoelectric vibration element 15 using lead wires (not shown). Of the electrodes formed on one main surface of the piezoelectric vibration element 15, the electrode on the metal diaphragm 3 side includes, for example, the material of the metal diaphragm 3 made of a conductor such as metal, If the metallic diaphragm 3 and the piezoelectric vibration element 15 are bonded to each other with a conductive adhesive, they can be electrically connected. At this time, even if the adhesive used for bonding is not conductive, the electrical connection can be ensured by bonding the metal diaphragm 3 and the piezoelectric vibration element 15 so as to partially contact each other with the surface roughness. can do.
 本実施の形態では、機械的な強度の点からは、ナット部材19は金属製を用いているが、短絡の問題が発生するので、本実施の形態では、ナット部材19と振動板3との間及び振動板3とネジ部材(17)の頭部17Cとの間には、それぞれ電気絶縁材料からなる絶縁ワッシャ20A及び20Bを配置してある。 In the present embodiment, the nut member 19 is made of metal from the viewpoint of mechanical strength. However, since a short circuit problem occurs, in the present embodiment, the nut member 19 and the diaphragm 3 Insulating washers 20A and 20B made of an electrically insulating material are arranged between the diaphragm 3 and the head 17C of the screw member (17).
 以上のような構成を有する本発明の実施の形態による圧電振動発生デバイスについて、その動作を説明する。振動板3の撓み振動の共振周波数を有する交流電圧を、圧電振動素子15の厚さ方向に印加すると、圧電振動素子15は励振し、振動板3はその中心近傍、すなわち圧電振動素子15中心近傍の変位が最も大きくなるよう、厚さ方向に撓み振動する。さらに、振動板3においては、圧電振動素子15から生じた撓み振動は金属製の振動板3全体に伝播する。振動板3の振動は、振動軸17にそのまま伝わり、この振動軸17の振動は、駆動力として圧電振動発生デバイス1の外部へ取り出すことができる。図1においては、振動軸17の一端のネジ部17Dが振動体21に固定されており、この振動体21が振動する。 The operation of the piezoelectric vibration generating device according to the embodiment of the present invention having the above configuration will be described. When an AC voltage having a resonance frequency of flexural vibration of the vibration plate 3 is applied in the thickness direction of the piezoelectric vibration element 15, the piezoelectric vibration element 15 is excited, and the vibration plate 3 is near its center, that is, near the center of the piezoelectric vibration element 15. The vibration is flexed and vibrated in the thickness direction so that the maximum displacement is obtained. Further, in the vibration plate 3, the flexural vibration generated from the piezoelectric vibration element 15 propagates to the entire metal vibration plate 3. The vibration of the diaphragm 3 is transmitted to the vibration shaft 17 as it is, and the vibration of the vibration shaft 17 can be taken out of the piezoelectric vibration generating device 1 as a driving force. In Figure 1, the threaded portion 17D of the end of the vibrating shaft 17 is fixed to the driven member 21, the driven member 21 vibrates.
 上記実施の形態では、ユニモルフ圧電振動素子を用いているが、ユニモルフ圧電振動素子に代えてバイモルフ圧電振動素子を用いてもよい。 In the above embodiment, a unimorph piezoelectric vibration element is used, but a bimorph piezoelectric vibration element may be used instead of the unimorph piezoelectric vibration element.
 また上記実施の形態では、ナット部材19によりネジ部材(17)の抜け止めを図っているが、ナット部材19に代えて抜け止めワッシャを振動軸を構成するネジ部材(17)のネジ部17Dに嵌合させるようにしてもよいのは勿論である。抜け止めワッシャは、円環状のワッシャ本体の内側に径方向内側に突出し、周方向に所定の間隔を開けて設けられた複数の爪部を備えた公知の構造のワッシャである。複数の爪部が、ネジ部材(17)のネジ部17Dのネジ谷に嵌合して抜け止めが実現される。 In the above embodiment, the nut member 19 prevents the screw member (17) from coming off, but instead of the nut member 19, a retaining washer is attached to the screw portion 17D of the screw member (17) constituting the vibration shaft. Of course, they may be fitted. The retaining washer is a well-known washer having a plurality of claw portions that protrude radially inward from the inside of an annular washer body and are provided at predetermined intervals in the circumferential direction. The plurality of claw portions are fitted into the thread valleys of the screw portion 17D of the screw member (17), thereby realizing the retaining.
 (実施形態2)
 図3は、本発明の圧電振動発生デバイスの第2の実施の形態の圧電振動発生デバイス1の一例の断面図であり、図4は、図3の圧電振動発生デバイス1の半部断面斜視図である。図3及び図4には、図1及び図2に示した第1の実施の形態と同じ部分には、図1及び図2に付した符号と同じ符号を付してある。第1の実施の形態では、振動板3の片面に圧電振動素子15を取り付けているが、第2の実施の形態では、振動板3の両面にそれぞれ圧電振動素子15A及び15Bをそれぞれ設けている点で第1の実施の形態と相違する。その他の点は、第1の実施の形態と構成は同じである。
(Embodiment 2)
FIG. 3 is a sectional view of an example of the piezoelectric vibration generating device 1 of the second embodiment of the piezoelectric vibration generating device of the present invention, and FIG. 4 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG. It is. 3 and 4, the same reference numerals as those in FIGS. 1 and 2 are assigned to the same portions as those in the first embodiment shown in FIGS. 1 and 2. In the first embodiment, the piezoelectric vibration element 15 is attached to one side of the diaphragm 3, but in the second embodiment, the piezoelectric vibration elements 15A and 15B are provided on both sides of the diaphragm 3, respectively. This is different from the first embodiment. In other respects, the configuration is the same as that of the first embodiment.
 (実施形態3)
 図5(A)は、第3の実施の形態で用いる振動板3の平面図であり、図5(B)は図5(A)のB-B線切断半部断面斜視図である。この振動板3には、振動板3を厚み方向に貫通しており且つ圧電振動素子15A及び15Bの周囲を囲むように周方向に間隔をあけて配置された複数のスリット14が形成されている。このような複数のスリット14を設けると、振動板3の機械的強度を大幅に低下させることなく、振動板3の可撓性を所望の範囲のものとすることができる。したがって振動板の振幅を大きくすることが可能になる。
(Embodiment 3)
FIG. 5A is a plan view of the diaphragm 3 used in the third embodiment, and FIG. 5B is a cross-sectional perspective view taken along the line BB in FIG. 5A. The diaphragm 3 is formed with a plurality of slits 14 penetrating the diaphragm 3 in the thickness direction and arranged at intervals in the circumferential direction so as to surround the periphery of the piezoelectric vibration elements 15A and 15B. . When such a plurality of slits 14 are provided, the flexibility of the diaphragm 3 can be in a desired range without significantly reducing the mechanical strength of the diaphragm 3. Therefore, the amplitude of the diaphragm can be increased.
 また図5(A)に破線で示すように、振動板3には、さらに振動板3を厚み方向に貫通しており且つ圧電振動素子15A及び15Bと第2貫通孔13との間に位置して第2貫通孔13の周囲を囲むように周方向に間隔をあけて配置された複数のスリット14´が形成されていてもよい。このような複数のスリット14´も、振動板3の可撓性を所望の範囲のものとすることに寄与するので、振動板の振幅をさらに大きくする場合に役立つ。 5A, the diaphragm 3 further penetrates the diaphragm 3 in the thickness direction, and is located between the piezoelectric vibrating elements 15A and 15B and the second through hole 13. A plurality of slits 14 ′ arranged at intervals in the circumferential direction so as to surround the periphery of the second through hole 13 may be formed. Such a plurality of slits 14 ′ also contributes to making the flexibility of the diaphragm 3 within a desired range, which is useful when the amplitude of the diaphragm is further increased.
 (実施形態4)
 図6は、本発明の圧電振動発生デバイスの第4の実施の形態の圧電振動発生デバイス1の一例の断面図であり、図7は、図6の圧電振動発生デバイス1の半部断面斜視図である。図6及び図7には、図1乃至図4に示した第1の実施の形態及び第2の実施の形態と同じ部分には、図1乃至図4に付した符号と同じ符号を付してある。第1の実施の形態及び第2の実施の形態では、振動板3として平坦なものを用いているが、第4の実施の形態では、振動板30の外周部に、第1ケース半部7´側に立ち上がる起立壁部30Aが一体に設けられている。このような起立壁部30Aを設けると、起立壁部30Aが第1ケース半部7´及び第2ケース半部9と接触した状態になって振動板30が第1ケース半部7´と第2ケース半部9との間に挟持されることになるため、振動板30の実質直径を最も大きくすることができ、振動板30の振動をより大きなものとすることができる。本実施の形態では、起立壁部30Aは第1ケース半部7´側に立ち上がっているが、起立壁部30Aは第2ケース半部9側に立ち上がっていてもよいのは勿論である。
(Embodiment 4)
FIG. 6 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 of the fourth embodiment of the piezoelectric vibration generating device of the present invention, and FIG. 7 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG. It is. In FIGS. 6 and 7, the same reference numerals as those in FIGS. 1 to 4 are attached to the same portions as those in the first embodiment and the second embodiment shown in FIGS. It is. In the first embodiment and the second embodiment, a flat diaphragm 3 is used. However, in the fourth embodiment, the first case half 7 is formed on the outer periphery of the diaphragm 30. A standing wall portion 30 </ b> A that rises toward the ′ side is integrally provided. When such a standing wall portion 30A is provided, the standing wall portion 30A comes into contact with the first case half portion 7 'and the second case half portion 9 so that the diaphragm 30 is in contact with the first case half portion 7'. Since it is sandwiched between the two case halves 9, the substantial diameter of the diaphragm 30 can be maximized, and the vibration of the diaphragm 30 can be increased. In the present embodiment, the standing wall 30A stands on the first case half 7 'side, but it goes without saying that the standing wall 30A may rise on the second case half 9 side.
 (実施形態5)
 図8は、本発明の圧電振動発生デバイスの第5の実施の形態の圧電振動発生デバイス1を携帯端末のケース23(被固定部)に固定する場合の他の例を示す断面図である。図8には、図1乃至図4に示した第1の実施の形態及び第2の実施の形態と同じ部分には、図1乃至図4に付した符号と同じ符号を付してある。本実施の形態では、振動軸17のネジ部17Dをケース23にネジ止めしている。この例では、取付フレーム12が重錘の機能を果たしている。本実施の形態では、振動軸17を構成するネジ部材の頭部17Cに設けた図示しないドライバスロットにドライバを挿入し、振動軸17のネジ部17Dをケース23に設けた雌ネジ部に螺合させることにより、圧電振動発生デバイス1の取付が完了する。
(Embodiment 5)
FIG. 8 is a cross-sectional view showing another example of the case where the piezoelectric vibration generating device 1 according to the fifth embodiment of the piezoelectric vibration generating device of the present invention is fixed to the case 23 (fixed portion) of the mobile terminal. In FIG. 8, the same parts as those in the first embodiment and the second embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals as those in FIGS. In the present embodiment, the screw portion 17D of the vibration shaft 17 is screwed to the case 23. In this example, the mounting frame 12 functions as a weight. In the present embodiment, a screwdriver is inserted into a driver slot (not shown) provided in the head 17C of the screw member constituting the vibration shaft 17, and the screw portion 17D of the vibration shaft 17 is screwed into the female screw portion provided in the case 23. By doing so, the attachment of the piezoelectric vibration generating device 1 is completed.
 (実施形態6)
 図9は、本発明の圧電振動発生デバイスの第6の実施の形態の圧電振動発生デバイス1の一例の断面図であり、図10は、図9の圧電振動発生デバイス1の半部断面斜視図である。図9及び図10には、図1乃至図4に示した第1の実施の形態及び第2の実施の形態と同じ部分には、図1乃至図4に付した符号と同じ符号を付してある。第1の実施の形態及び第2の実施の形態では、取付フレーム12が、円筒状の筒体12Bとフランジ部12Cとから構成されているが、本実施の形態では、取付フレーム12と第1ケース半部7とが一体に形成されている。その他の点は、第1及び第2の実施の形態と同様である。このような一体構造を採用すると、部品点数を減らすことができる。なお第1乃至第5の実施の形態においても、取付フレーム12と第1ケース半部7とを一体に形成する構造を採用してもよいのは勿論である。
(Embodiment 6)
FIG. 9 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 according to the sixth embodiment of the piezoelectric vibration generating device of the present invention, and FIG. 10 is a half sectional perspective view of the piezoelectric vibration generating device 1 of FIG. It is. 9 and 10, the same reference numerals as those in FIGS. 1 to 4 are attached to the same portions as those in the first and second embodiments shown in FIGS. It is. In the first embodiment and the second embodiment, the mounting frame 12 is composed of a cylindrical cylindrical body 12B and a flange portion 12C. In the present embodiment, the mounting frame 12 and the first frame are the same. The case half 7 is integrally formed. Other points are the same as in the first and second embodiments. When such an integrated structure is adopted, the number of parts can be reduced. In the first to fifth embodiments, it is needless to say that a structure in which the mounting frame 12 and the first case half 7 are integrally formed may be employed.
 (実施形態7)
 図11は、本発明の圧電振動発生デバイスの第7の実施の形態の圧電振動発生デバイス1の一例の断面図であり,図10には図1及び図2に示した第1の実施の形態と同じ部分には、図1及び図2に付した符号と同じ符号を付してある。本実施の形態では、振動軸17の長さが長くなっており、第1のケース半部7にストッパ18が固定されている点で、第1の実施の形態と相違する。ストッパ18は、振動する被振動体21と接触して振動軸17のネジ部17Dに固定された被振動体21の径方向への振動範囲を規制する。ストッパ18は、振動軸17を中心とする円筒形状でもよいし、周方向に間隔をあけて環状に並ぶ突起であってもよい。
(Embodiment 7)
FIG. 11 is a cross-sectional view of an example of the piezoelectric vibration generating device 1 according to the seventh embodiment of the piezoelectric vibration generating device of the present invention. FIG. 10 shows the first embodiment shown in FIGS. The same reference numerals as those shown in FIG. 1 and FIG. The present embodiment is different from the first embodiment in that the length of the vibration shaft 17 is long and the stopper 18 is fixed to the first case half 7. The stopper 18 is in contact with the vibrating body 21 that vibrates and regulates the vibration range in the radial direction of the vibrating body 21 fixed to the screw portion 17D of the vibration shaft 17. The stopper 18 may have a cylindrical shape with the vibration shaft 17 as the center, or may be a protrusion arranged in an annular shape at intervals in the circumferential direction.
 本発明によれば、ネジ部材とナット部材または抜け止めワッシャを用いて、振動板に振動軸を取り付けると、両者の結合作業に時間を要しない上、接着により両者を接合した場合と比べて、高い結合強度を得ることができる。また圧電振動発生デバイスの振動軸を、振動対象の機器の部品にネジ結合により連結できるので、装着が容易で、しかも高い結合強度を得ることができる。 According to the present invention, when the vibration shaft is attached to the diaphragm using the screw member and the nut member or the retaining washer, it does not take time for the coupling operation of both, and compared to the case where both are joined by bonding, High bond strength can be obtained. In addition, since the vibration shaft of the piezoelectric vibration generating device can be coupled to the component of the device to be vibrated by screw coupling, it is easy to mount and high coupling strength can be obtained.
 1 圧電振動発生デバイス
 3 振動板
 4 第3貫通孔
 5 第1貫通孔
 7 第1ケース半部
 9 第2ケース半部
 10 第4貫通孔
 11 絶縁ケース
 12 取付フレーム
 13 第2貫通孔
 15 圧電振動素子
 17 振動軸
 18 ストッパ
 19 抜け止めワッシャ
 21 被振動体
 23 ケース
DESCRIPTION OF SYMBOLS 1 Piezoelectric vibration generating device 3 Diaphragm 4 3rd through-hole 5 1st through-hole 7 1st case half 9 Second case half 10 4th through-hole 11 Insulation case 12 Mounting frame 13 2nd through-hole 15 Piezoelectric vibration element 17 Vibrating shaft 18 Stopper 19 Retaining washer 21 Vibrated body 23 Case

Claims (10)

  1.  金属製の円板状の振動板と、
     中央に第1貫通孔を有し電気絶縁材料からなる第1ケース半部及び前記第1ケース半部との間で前記振動板の外周部を挟む電気絶縁材料からなる第2ケース半部が組み合わされて構成された絶縁ケースと、
     前記振動板の片面または両面に接合されて中央に第2貫通孔を有する1以上の円板状の圧電振動素子と、
     一端が前記振動板の中央部に連結され、前記圧電振動素子の前記第2貫通孔及び前記第1ケース半部の前記第1貫通孔を貫通して他端が前記第1ケース半部の外部に延び出る振動軸とを備えた圧電振動発生デバイスであって、
     前記振動板の中央部に第3貫通孔が形成され、
     前記振動軸は、頭部が前記第2ケース半部側に位置し先端のネジ部が前記第1ケース半部の外部に延び出るように前記第3貫通孔、前記第2貫通孔及び前記第1貫通孔を貫通するように配置されたネジ部材からなり、
     前記ネジ部材にナット部材が螺合されているかまたは抜け止めワッシャが嵌合されていることを特徴とする圧電振動発生デバイス。
    A metal disc-shaped diaphragm,
    A first case half made of an electrically insulating material having a first through hole in the center and a second case half made of an electrically insulating material sandwiching the outer periphery of the diaphragm between the first case half and the first case half An insulated case configured and
    One or more disk-shaped piezoelectric vibration elements bonded to one or both surfaces of the vibration plate and having a second through hole in the center;
    One end is connected to the central portion of the diaphragm, the second through hole of the piezoelectric vibration element and the first through hole of the first case half, and the other end outside the first case half. A piezoelectric vibration generating device having a vibration axis extending to
    A third through hole is formed in the center of the diaphragm;
    The vibration shaft includes the third through hole, the second through hole, and the first through hole so that a head portion is positioned on the second case half side and a screw portion at a tip extends outside the first case half portion. It consists of a screw member arranged to penetrate one through hole,
    A piezoelectric vibration generating device, wherein a nut member is screwed to the screw member or a retaining washer is fitted.
  2.  前記第2ケース半部には、前記ネジ部材の前記頭部に対応して前記頭部が通過できる大きさの第4貫通孔が形成されている請求項1に記載の圧電振動発生デバイス。 The piezoelectric vibration generating device according to claim 1, wherein a fourth through hole having a size through which the head can pass is formed in the second case half corresponding to the head of the screw member.
  3.  前記ナット部材または前記抜け止めワッシャは金属製であり、
     前記ナット部材または前記抜け止めワッシャと前記振動板との間及び該振動板と前記ネジ部材の頭部との間には、それぞれ電気絶縁材料からなる絶縁ワッシャが配置されている請求項1または2に記載の圧電振動発生デバイス。
    The nut member or the retaining washer is made of metal,
    An insulating washer made of an electrically insulating material is disposed between the nut member or the retaining washer and the diaphragm and between the diaphragm and the head of the screw member, respectively. The piezoelectric vibration generating device according to 1.
  4.  前記絶縁ワッシャが、樹脂ワッシャである請求項3に記載の圧電振動発生デバイス。 The piezoelectric vibration generating device according to claim 3, wherein the insulating washer is a resin washer.
  5.  前記振動板には、前記振動板を厚み方向に貫通しており且つ前記圧電振動素子の周囲を囲むように周方向に間隔をあけて配置された複数のスリットが形成されている請求項1乃至4のいずれか1項に記載の圧電振動発生デバイス。 2. The plurality of slits are formed in the diaphragm so as to penetrate the diaphragm in the thickness direction and are arranged at intervals in the circumferential direction so as to surround the periphery of the piezoelectric vibration element. 5. The piezoelectric vibration generating device according to any one of 4 above.
  6.  前記振動板には、前記振動板を厚み方向に貫通しており且つ前記圧電振動素子と前記第2貫通孔との間に位置して前記第2貫通孔の周囲を囲むように周方向に間隔をあけて配置された複数のスリットが形成されている請求項5に記載の圧電振動発生デバイス。 The diaphragm is spaced in the circumferential direction so as to penetrate the diaphragm in the thickness direction and to be located between the piezoelectric vibrating element and the second through hole and to surround the second through hole. The piezoelectric vibration generating device according to claim 5, wherein a plurality of slits arranged with gaps are formed.
  7.  前記振動板の外周部には、前記第1ケース半部または前記第2ケース半部側に立ち上がる起立壁部が一体に設けられている請求項6に記載の圧電振動発生デバイス。 The piezoelectric vibration generating device according to claim 6, wherein an upstanding wall portion that rises toward the first case half portion or the second case half portion side is integrally provided on an outer peripheral portion of the diaphragm.
  8.  前記圧電振動素子は、バイモルフ圧電振動素子である請求項1乃至7のいずれか1項に記載の圧電振動発生デバイス。 The piezoelectric vibration generating device according to any one of claims 1 to 7, wherein the piezoelectric vibration element is a bimorph piezoelectric vibration element.
  9.  請求項1乃至8のいずれか1項に記載の圧電振動発生デバイスの前記振動軸または前記絶縁ケースが、被固定部に対して固定されていることを特徴とする機器。 9. An apparatus, wherein the vibration shaft or the insulating case of the piezoelectric vibration generating device according to claim 1 is fixed to a fixed part.
  10.  請求項1乃至8のいずれか1項に記載の圧電振動発生デバイスの前記振動軸と前記絶縁ケースが、対向する一対の被固定部に対してそれぞれ固定されていることを特徴とする機器。 9. The apparatus according to claim 1, wherein the vibration shaft and the insulating case of the piezoelectric vibration generating device according to any one of claims 1 to 8 are respectively fixed to a pair of opposed fixed portions.
PCT/JP2017/026486 2016-07-21 2017-07-21 Piezoelectric vibration generating device and instrument provided with piezoelectric vibration generating device WO2018016630A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018528896A JPWO2018016630A1 (en) 2016-07-21 2017-07-21 Piezoelectric vibration generating device and apparatus provided with piezoelectric vibration generating device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016143707 2016-07-21
JP2016-143707 2016-07-21

Publications (1)

Publication Number Publication Date
WO2018016630A1 true WO2018016630A1 (en) 2018-01-25

Family

ID=60992632

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/026486 WO2018016630A1 (en) 2016-07-21 2017-07-21 Piezoelectric vibration generating device and instrument provided with piezoelectric vibration generating device

Country Status (2)

Country Link
JP (1) JPWO2018016630A1 (en)
WO (1) WO2018016630A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022516897A (en) * 2018-12-31 2022-03-03 アップ2ユー Amplified deformation type piezoelectric actuator

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6032583Y2 (en) * 1980-08-18 1985-09-28 日本特殊陶業株式会社 vibration detector
JPS618716Y2 (en) * 1980-01-14 1986-03-18
JPS6117670Y2 (en) * 1980-09-05 1986-05-29
JPS62281505A (en) * 1986-05-29 1987-12-07 Tdk Corp Chip type vibrator
JPS6345119Y2 (en) * 1982-08-27 1988-11-22
JPH0523268Y2 (en) * 1986-10-29 1993-06-15
JPH0714955Y2 (en) * 1985-08-13 1995-04-10 シチズン時計株式会社 Stop structure for watch diaphragm and case back
JPH0947048A (en) * 1995-08-01 1997-02-14 Toyota Central Res & Dev Lab Inc Oscillator for ultrasonic actuator
JPH09271187A (en) * 1996-03-29 1997-10-14 Toyota Central Res & Dev Lab Inc Vibrator for ultrasonic actuator
JP2000140759A (en) * 1998-11-09 2000-05-23 Matsushita Electric Ind Co Ltd Piezoelectric actuator and piezoelectric vibrator
WO2005006809A1 (en) * 2003-07-09 2005-01-20 Shimada Manufacturing Co., Ltd. Piezoelectric vibration generator and vibratory sound transmitter
WO2007026736A1 (en) * 2005-08-31 2007-03-08 Nec Corporation Piezoelectric actuator, acoustic element, and electronic device
JP2008540966A (en) * 2005-05-19 2008-11-20 フラウンホファー ゲセルシャフトツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー.ファオ. Vibration isolator

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618716Y2 (en) * 1980-01-14 1986-03-18
JPS6032583Y2 (en) * 1980-08-18 1985-09-28 日本特殊陶業株式会社 vibration detector
JPS6117670Y2 (en) * 1980-09-05 1986-05-29
JPS6345119Y2 (en) * 1982-08-27 1988-11-22
JPH0714955Y2 (en) * 1985-08-13 1995-04-10 シチズン時計株式会社 Stop structure for watch diaphragm and case back
JPS62281505A (en) * 1986-05-29 1987-12-07 Tdk Corp Chip type vibrator
JPH0523268Y2 (en) * 1986-10-29 1993-06-15
JPH0947048A (en) * 1995-08-01 1997-02-14 Toyota Central Res & Dev Lab Inc Oscillator for ultrasonic actuator
JPH09271187A (en) * 1996-03-29 1997-10-14 Toyota Central Res & Dev Lab Inc Vibrator for ultrasonic actuator
JP2000140759A (en) * 1998-11-09 2000-05-23 Matsushita Electric Ind Co Ltd Piezoelectric actuator and piezoelectric vibrator
WO2005006809A1 (en) * 2003-07-09 2005-01-20 Shimada Manufacturing Co., Ltd. Piezoelectric vibration generator and vibratory sound transmitter
JP2008540966A (en) * 2005-05-19 2008-11-20 フラウンホファー ゲセルシャフトツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー.ファオ. Vibration isolator
WO2007026736A1 (en) * 2005-08-31 2007-03-08 Nec Corporation Piezoelectric actuator, acoustic element, and electronic device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022516897A (en) * 2018-12-31 2022-03-03 アップ2ユー Amplified deformation type piezoelectric actuator

Also Published As

Publication number Publication date
JPWO2018016630A1 (en) 2019-07-11

Similar Documents

Publication Publication Date Title
KR101320136B1 (en) Vibrating actuator
JP4830592B2 (en) Piezoelectric generator
JPWO2007083752A1 (en) Ultrasonic actuator
WO2013042316A1 (en) Directional loudspeaker
JP5211267B1 (en) Excitation device
JP2019146020A (en) Ultrasonic sensor, ultrasonic device, and method for manufacturing ultrasonic sensor
KR101500587B1 (en) Acoustic generator, acoustic generation device, and electronic device
WO2018016630A1 (en) Piezoelectric vibration generating device and instrument provided with piezoelectric vibration generating device
CN109427957B (en) Vibration device and acoustic device
WO2014097862A1 (en) Acoustic generator, acoustic generation device, and electronic device
JP2017005794A5 (en)
JP2014127843A (en) Acoustic generator, acoustic generating device, and electronic apparatus
JP5525351B2 (en) Piezoelectric sounding body
JP2014082572A (en) Electroacoustic transducer
JP6411958B2 (en) SOUND GENERATOR, SOUND GENERATOR HAVING THE SAME, AND ELECTRONIC DEVICE
JP2013172237A (en) Electro-acoustic transducer and electronic apparatus
WO2016017475A1 (en) Piezoelectric element, acoustic generator, acoustic generation device, and electronic apparatus
JP5992928B2 (en) Piezoelectric vibration device
JP2012209669A (en) Capacitor microphone unit
CN116419136A (en) Microelectromechanical device with multiple vibrating portions
JP2007312600A (en) Piezoelectric element and ultrasonic actuator
JP2015005795A (en) Electro-acoustic transducer and electronic apparatus
JP6514079B2 (en) Sound generator
JP5871753B2 (en) SOUND GENERATOR, SOUND GENERATOR, AND ELECTRONIC DEVICE
WO2014103427A1 (en) Sound generator, sound generating apparatus, and electronic apparatus

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2018528896

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17831146

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17831146

Country of ref document: EP

Kind code of ref document: A1