JPS63262069A - Piezoelectric vibration motor - Google Patents

Piezoelectric vibration motor

Info

Publication number
JPS63262069A
JPS63262069A JP62092440A JP9244087A JPS63262069A JP S63262069 A JPS63262069 A JP S63262069A JP 62092440 A JP62092440 A JP 62092440A JP 9244087 A JP9244087 A JP 9244087A JP S63262069 A JPS63262069 A JP S63262069A
Authority
JP
Japan
Prior art keywords
plate
piezoelectric
plates
driven
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62092440A
Other languages
Japanese (ja)
Other versions
JP2569545B2 (en
Inventor
Mitsuo Inagaki
光夫 稲垣
Akikazu Kojima
昭和 小島
Fumihiro Itoigawa
文広 糸魚川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP62092440A priority Critical patent/JP2569545B2/en
Publication of JPS63262069A publication Critical patent/JPS63262069A/en
Application granted granted Critical
Publication of JP2569545B2 publication Critical patent/JP2569545B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To easily laminate and to increase the driving torque of a piezoelectric vibration motor by providing a piezoelectric unit on the periphery of a driving plate except the contacting surface with a driven plate. CONSTITUTION:A motor housing 5 is formed of a hollow cylinder, and a rotary output shaft 7 is provided at its center. The shaft 7 is rotatably supported by bearings 8a, 8b, and connected to a driven unit. An annular drive plate 1 is disposed around the shaft 7, and contacting surfaces 11 projected upward and downward with the peripheral end as a thickness are provided. Driven plates 3a, 3b are contacted with the surfaces 11. Annular piezoelectric plates 2a, 2b are bonded along the base ends of vibration pieces 12 to the upper and lower surfaces of the outer periphery of the plate 1. Thus, when an AC voltage is applied to the plates 2a, 2b to generate a traveling wave vibration, Similar vibration occurs at the plate 1 integral therewith. Thus, the parts of the surfaces 11 are elliptically moved to obtain a rotary force from the shaft 7 coupled to the plates 3a, 3b.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明はカメラのレンズ駆動装置、自動車の電装品等広
い分野で利用可能な圧電振動モータに関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric vibration motor that can be used in a wide range of fields such as camera lens drive devices and automobile electrical components.

[従来の技術] 圧電素子による超音波振動を駆動力源とする圧電振動モ
ータは、従来の電磁力利用のモータに比し構造が簡単で
応答が速い等の長所を有するため、近年その実用化に向
けて研究開発が進められている(例えば特開昭60−2
00779号)。
[Prior Art] Piezoelectric vibration motors, which use ultrasonic vibrations from piezoelectric elements as a driving force source, have advantages such as a simpler structure and faster response than conventional motors that use electromagnetic force, and have been put into practical use in recent years. Research and development is progressing toward
No. 00779).

従来の圧電振動上〜りの構造を第13図で示すと、1は
円環状の駆動板であり、その下面には圧電体2が一体的
に接合されるとともにハウジング5の底面に設けた支持
体4に支持されている。上記駆動板1の上面には従動板
3が配設され、バネ部材6により駆動板1に押圧密着し
ている。上記圧電体2に交流電圧を印加して進行波振動
を生ぜしぬると上記駆動体1の上部表面は楕円運動を行
ない、この周方向成分を受けて駆動板1に密着する上記
従動板3が回転運動を行なう。かくして上記従動板3の
中央部に固定した回転出力軸7により回転力をモータ外
部に取り出すことができる。
FIG. 13 shows the structure of a conventional piezoelectric vibrator. Reference numeral 1 denotes an annular driving plate, and a piezoelectric body 2 is integrally joined to the lower surface of the drive plate, and a support provided on the bottom of the housing 5. It is supported by body 4. A driven plate 3 is disposed on the upper surface of the driving plate 1, and is pressed into close contact with the driving plate 1 by a spring member 6. When an AC voltage is applied to the piezoelectric body 2 to generate traveling wave vibration, the upper surface of the driving body 1 performs an elliptical motion, and receiving this circumferential component, the driven plate 3 in close contact with the driving plate 1 moves. Perform a rotational movement. Thus, the rotational force can be extracted to the outside of the motor by the rotational output shaft 7 fixed to the center of the driven plate 3.

[発明が解決しようとする問題点] ところで、上記従来の圧電振動モータは、振動源である
圧電体2が従動板3の直下に位置するために、従動板3
を駆動板コ−に密着せしめるための押圧力が圧電体2の
振動を規制する方向に作用し、駆動効率の低下をまねく
という欠点がある。
[Problems to be Solved by the Invention] By the way, in the conventional piezoelectric vibration motor described above, since the piezoelectric body 2, which is a vibration source, is located directly below the driven plate 3, the driven plate 3
There is a drawback that the pressing force for bringing the piezoelectric body 2 into close contact with the drive plate acts in a direction that restricts the vibration of the piezoelectric body 2, leading to a decrease in drive efficiency.

本発明は上記実情に鑑みなされたものであり駆動効率の
高い圧電振動モータを提倶することを目的とするもので
ある。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a piezoelectric vibration motor with high drive efficiency.

[問題点を解決するための手段] 本発明の圧電振動モータを第1図で説明すると、環状の
駆動板(1)はその内周面ないし外周面を接触面< 1
. ]−)となし、該接触面を除く駆動板(1)の周面
には上記各振動片の基端に沿う周方向へ交互に極性の異
なる圧電体(2a、2b)を配設してこれら圧電体に交
流を印加する手段を有している。上記接触面(11)に
は、回転出力軸〈7〉に設けた従動板(3a、3b)が
バネ部材(6a、6b)により抑圧接触せしめである。
[Means for Solving the Problems] To explain the piezoelectric vibration motor of the present invention with reference to FIG. 1, an annular drive plate (1) has an inner or outer peripheral surface with a contact surface < 1
.. ]-), and piezoelectric bodies (2a, 2b) having different polarities are arranged alternately in the circumferential direction along the base end of each vibrating piece on the circumferential surface of the drive plate (1) excluding the contact surface. It has means for applying alternating current to these piezoelectric bodies. Driven plates (3a, 3b) provided on the rotational output shaft <7> are pressed into contact with the contact surface (11) by spring members (6a, 6b).

[作用] 上記圧電体に交流電圧を印加して進行波振動を生ぜしめ
るとこれと一体に接合された上記駆動板にも同様の進行
波振動が生起する。これに伴なって上記接触面の各部は
楕円運動を行ない該接触面と接する従動板は楕円運動の
周方向成分により回転運動する。このようにして圧電体
の振動は回転運動に変換され、従動板に連結された回転
出力軸を介して回転力がモータ外部に伝達される。
[Operation] When an alternating current voltage is applied to the piezoelectric body to generate traveling wave vibration, a similar traveling wave vibration is also generated in the drive plate that is integrally joined to the piezoelectric body. Accompanying this, each part of the contact surface performs an elliptical motion, and the driven plate in contact with the contact surface rotates due to the circumferential component of the elliptical motion. In this way, the vibration of the piezoelectric body is converted into rotational motion, and the rotational force is transmitted to the outside of the motor via the rotational output shaft connected to the driven plate.

[発明の効果] 上記構成によれば圧電体が従動板との接触面を除く駆動
板の周面に設けられていることにより、従動板を駆動板
に押圧する力が振動源である圧電体に直接加わらないか
ら圧電体の振動が規制されず、従ってモータの駆動効率
を向上させることができる。また、上記構成により容易
に積層化が可能であり、積層化により大きな駆動トルク
を得ることができる。
[Effects of the Invention] According to the above configuration, since the piezoelectric body is provided on the circumferential surface of the drive plate excluding the contact surface with the driven plate, the piezoelectric body whose vibration source is the force that presses the driven plate against the drive plate. Since the piezoelectric body is not directly applied to vibration, the vibration of the piezoelectric body is not restricted, and therefore the driving efficiency of the motor can be improved. Further, the above structure allows easy lamination, and a large driving torque can be obtained by lamination.

[実施例] 以下、図示の実施例により本発明を説明する。[Example] The present invention will be explained below with reference to illustrated embodiments.

第1図において、モータハウジング5は中空の円筒体で
あり、ハウジング中心には回転出力軸7が設けである。
In FIG. 1, a motor housing 5 is a hollow cylindrical body, and a rotation output shaft 7 is provided at the center of the housing.

該回転出力軸7は上下のハウジング壁に設けたベアリン
グ8a、8bにより回転自在に支持され、その一端はハ
ウジング外へ突出して図示しないい被駆動体に連結され
ている。
The rotary output shaft 7 is rotatably supported by bearings 8a and 8b provided on the upper and lower housing walls, and one end thereof projects outside the housing and is connected to a driven body (not shown).

上記ハウジング5内には回転出力軸7のまわりに環状の
駆動板1が配設され、該駆動板1は内周端部を厚肉とし
て上下に突出せしめ、各突出端面を接触面11としであ
る。そして、これら接触面11にそれぞれ従動板3a、
3bが接触せしめである。
An annular drive plate 1 is disposed in the housing 5 around the rotary output shaft 7, and the drive plate 1 has a thick inner peripheral end and projects upward and downward, and each projecting end surface serves as a contact surface 11. be. And, on these contact surfaces 11, driven plates 3a,
3b is the contact point.

上記駆動板1と従動板3a、3bの詳細を第2図に示す
。図において駆動板1は内周部を等間隔で切込んで、こ
れら切込みにより複数の振動片12としである。しかし
て、これら振動片12は先端が径方向へ突出する’MA
部1部上3り(第3図)各舅量部13の上下の端面が上
記接触面11を構成している。
Details of the drive plate 1 and driven plates 3a, 3b are shown in FIG. In the figure, the drive plate 1 has cuts made at equal intervals on its inner periphery, and a plurality of vibrating pieces 12 are formed by these cuts. Therefore, these vibrating pieces 12 have 'MA's whose tips protrude in the radial direction.
Upper and lower end surfaces of each leg portion 13 (FIG. 3) constitute the contact surface 11.

上記駆動板1の外周部上下面には上記各振動片12の基
端に沿って環状の圧電板2a、2bが接合してあり、こ
れら圧電板2a、2bは周方向へ等間隔で交互にその分
極方向が異ならしめである。
Annular piezoelectric plates 2a and 2b are bonded to the upper and lower surfaces of the outer peripheral portion of the drive plate 1 along the base ends of the vibrating pieces 12, and these piezoelectric plates 2a and 2b are arranged alternately at equal intervals in the circumferential direction. The reason is that their polarization directions are different.

この際、上下の各圧電板2a、2bは分極位置が90°
の位相差を有するようにずらして接合しであるく第4図
)。上記各圧電板2a、2bにはそれぞれ環状電極21
a、21bが接合され、これら環状電極はリード線を介
してそれぞれ90°位相のずれた出力を発する交流電源
10a、10bに接続されている。駆動板1は共通の電
極としてアースされている。
At this time, the polarization position of each of the upper and lower piezoelectric plates 2a and 2b is 90°.
(Fig. 4). Each of the piezoelectric plates 2a and 2b has a ring-shaped electrode 21.
a, 21b are joined, and these annular electrodes are connected via lead wires to alternating current power supplies 10a, 10b which respectively emit outputs with a phase shift of 90°. The drive plate 1 is grounded as a common electrode.

駆動板1に接触する上記各従動板3a、3bは環状をな
し、放射状に支持腓を延出せしめた板バネ6a、6bの
脚先端に周面の複数箇所を固定しである。上記板バネ6
a、6bには中心に長円形の取付穴61a、61bがそ
れぞれ設けである。
Each of the driven plates 3a and 3b that contacts the drive plate 1 has an annular shape, and is fixed at a plurality of locations on its circumferential surface to the leg tips of leaf springs 6a and 6b whose support legs extend radially. The above plate spring 6
Oval attachment holes 61a and 61b are provided at the centers of a and 6b, respectively.

そして、従動板3a、3bで上下より駆動板1を挟持し
た状態で上記取付穴61a、61bを回転出力軸7の長
円取付部に嵌装する。
Then, the mounting holes 61a and 61b are fitted into the oblong mounting portion of the rotary output shaft 7 while the drive plate 1 is sandwiched between the driven plates 3a and 3b from above and below.

この時、下方の板バネ6bは上記回転出力軸7の受はフ
ランジ71により支持され、一方、上方の板バネ6aは
回転出力軸7外周のネジ部に螺着したアジヤスティング
ナツト9により押さえられる。かくして、上記アジヤス
ティングナツト9を回転移動せしめることにより駆動板
1と従動板3a、3bの接触圧を調整することができる
At this time, the lower leaf spring 6b is supported by the flange 71 on the rotary output shaft 7, while the upper leaf spring 6a is held down by the adjusting nut 9 screwed onto the threaded portion on the outer periphery of the rotary output shaft 7. . Thus, by rotating the adjusting nut 9, the contact pressure between the drive plate 1 and the driven plates 3a, 3b can be adjusted.

なお、駆動板1外周端をハウジング5内周壁に設けたク
ッション材51に当接せしめて、その位置決めと回転防
止を図っている。
The outer circumferential end of the drive plate 1 is brought into contact with a cushion material 51 provided on the inner circumferential wall of the housing 5 for positioning and prevention of rotation.

上記圧電体2a、2bに90°位相のずれた正弦波電圧
を印加すると、駆動板1の周面には第5図の波線で示す
如き進行波振動が生じる。図の(1)、〈2)は進行波
振動の時間的推移を示す。
When sinusoidal voltages having a phase shift of 90° are applied to the piezoelectric bodies 2a and 2b, traveling wave vibrations are generated on the circumferential surface of the drive plate 1 as shown by the broken lines in FIG. Figures (1) and (2) show the time course of traveling wave vibration.

これに伴って駆動板1の内周部に形成された振動片12
は進行波と位相が180°ずれたねじれ振動を行なう(
第5図矢印)。このねじれ振動の共振振動数は振動片1
2の弾性係数と断面形状と質量部13の慣性モーメント
により決定され、これらを適当に設定することにより上
記駆動板1の進行波振動に応じて振動片12は大きく共
振振動する。質量部13の振動変位を第5図の波線に沿
う縦線で示す。
Along with this, a vibrating piece 12 formed on the inner peripheral part of the drive plate 1
performs torsional vibration with a phase shift of 180° from the traveling wave (
Figure 5 arrow). The resonant frequency of this torsional vibration is vibrating piece 1
2, the cross-sectional shape, and the moment of inertia of the mass portion 13, and by appropriately setting these, the vibrating element 12 causes a large resonance vibration in response to the traveling wave vibration of the drive plate 1. The vibrational displacement of the mass part 13 is shown by the vertical line along the wavy line in FIG.

かくして、上記質量部13の上下端は周期的に上下の従
動板3a、3bに接触し、ねじれ振動の周方向成分によ
り図の矢印方向へ抑圧回転せしめられる。
Thus, the upper and lower ends of the mass portion 13 periodically contact the upper and lower driven plates 3a, 3b, and are suppressed to rotate in the direction of the arrow in the figure by the circumferential component of torsional vibration.

上記構造によれば、駆動板1と従動板3a、3bを密着
せしめるための押圧力が駆動源たる圧電体2a、2bに
直接印加されないため圧電体の振動は規制されず、駆動
効率の向上が図れる。また質量部13を設けた振動片1
2により接触面11を構成して、これら振動片12をね
じり共振せしめるようになしたからより大きな回転力を
得ることができる。
According to the above structure, since the pressing force for bringing the drive plate 1 and the driven plates 3a, 3b into close contact is not directly applied to the piezoelectric bodies 2a, 2b, which are the drive sources, the vibration of the piezoelectric bodies is not restricted, and the drive efficiency is improved. I can figure it out. Also, the vibrating piece 1 provided with the mass part 13
2 constitutes the contact surface 11, and the vibrating pieces 12 are made torsionally resonate, so that a larger rotational force can be obtained.

第6図、第7図に本発明の他の実施例示す。第6図にお
いて回転出力軸7のまわりには複数の駆動板1a、1b
が配設され、該駆動板1a、1bの内周部にはこれらを
挾んで交互に従動板3a、3b、3Cが配されてい・る
。従動板3aおよび3Cは板バネ6a、6bに挟持され
ており、回転出力軸7外周部に設けたアジヤスティング
ナツト9を調整することにより駆動板1a、1bと従動
板3a、3b、3cの押圧力が調整できる。第7図はこ
の実施例の部分的な分解斜視図を示す。このように駆動
板および従動板を多板構成とすることにより、さらに大
きな回転出力を得ることができる。
Other embodiments of the present invention are shown in FIGS. 6 and 7. In FIG. 6, a plurality of drive plates 1a, 1b are arranged around the rotation output shaft 7.
are arranged, and driven plates 3a, 3b, 3C are arranged alternately on the inner periphery of the drive plates 1a, 1b, sandwiching them therebetween. The driven plates 3a and 3C are held between leaf springs 6a and 6b, and by adjusting the adjusting nut 9 provided on the outer periphery of the rotary output shaft 7, the driving plates 1a and 1b and the driven plates 3a, 3b and 3c can be pressed. Pressure can be adjusted. FIG. 7 shows a partially exploded perspective view of this embodiment. By forming the driving plate and the driven plate in a multi-plate configuration in this way, even greater rotational output can be obtained.

なお、本実施例では振動片12は梁の部分が見かけ上存
在せず、質量部13はその中心部まわりにねじれ振動す
る。
In this embodiment, the vibrating piece 12 has no apparent beam portion, and the mass portion 13 torsionally vibrates around its center.

第8図に示す如く、従動板3と駆動板1の上面にのみ接
触せしめた構成としてもよい。図において回転出力軸7
のまわりに配設された駆動板1は、内周端部を厚内とし
て上方に突出せしめ、この突出端面を従動板3との接触
面11とするとともに該接触面11を周方向等間隔で切
込んで先端に質量部13を持つ振動片12としであるく
第9図)。
As shown in FIG. 8, it may be configured such that only the upper surfaces of the driven plate 3 and the driving plate 1 are in contact with each other. In the figure, the rotation output shaft 7
The drive plate 1 disposed around the drive plate 1 has an inner circumferential edge within its thickness and projects upward, and this protruding end surface serves as a contact surface 11 with the driven plate 3, and the contact surface 11 is formed at equal intervals in the circumferential direction. The vibrating piece 12 with a mass part 13 at its tip is cut into a piece (Fig. 9).

上記駆動板1は外周部をハウジング5の底面および内周
面に設けたクッション材51に支持せしめである。
The drive plate 1 has an outer peripheral portion supported by a cushion material 51 provided on the bottom and inner peripheral surfaces of the housing 5.

かかる構造によればモータを偏平な形状とすることがで
き、モータの設置スペースが限られている場合に有利で
ある。
This structure allows the motor to have a flat shape, which is advantageous when the installation space for the motor is limited.

上記振動片12は第10図ないし第11図で示す形状と
してもよい。すなわち、前者は質量部13を中央でえぐ
ってその質量を調整するもので、かかる形状によれば質
量部13の上下方向への突出量を一定に維持して質量の
変更調整が可能である。また後者は振動片12の両側面
に半円満を形成したもので、かかる形状によればねじれ
振動を容易に生起せしめることが可能である。
The vibrating piece 12 may have the shape shown in FIGS. 10 and 11. That is, in the former case, the mass portion 13 is hollowed out at the center to adjust its mass. With this shape, the amount of vertical protrusion of the mass portion 13 is maintained constant and the mass can be changed and adjusted. Further, the latter has a semi-circular shape formed on both sides of the vibrating element 12, and such a shape allows torsional vibration to be easily generated.

上記接触面11を駆動板1の外周部に設けてもよい。第
12図において回転出力軸7のまわりには環状の駆動板
1a、1bが配され、上記駆動板1a、1bは外周端部
を厚内として上下に突出せしめて従動板3a、3b、3
cとの接触面11としてあり、該接触面11は周方向等
間隔で切込んで多数の振動子としである。上記駆動板1
a、1bの内周部上下面には環状の圧電板2a、2bが
接合され、駆動板1a、1bの内周端部は回転出力軸7
との間に設けたクッション材51に当接せしめである。
The contact surface 11 may be provided on the outer periphery of the drive plate 1. In FIG. 12, annular drive plates 1a, 1b are arranged around the rotational output shaft 7, and the drive plates 1a, 1b are made to protrude vertically with their outer circumferential ends within the thickness, and the driven plates 3a, 3b, 3
The contact surface 11 is cut at equal intervals in the circumferential direction to form a large number of vibrators. The above drive plate 1
Annular piezoelectric plates 2a and 2b are joined to the upper and lower surfaces of the inner peripheral parts of the drive plates 1a and 1b, and the inner peripheral ends of the drive plates 1a and 1b are connected to the rotation output shaft 7.
It is brought into contact with a cushion material 51 provided between.

上記駆動板1a、1bは外周面の複数箇所に棒状ストッ
パー14を立設して、各ストッパー先端を対向するハウ
ジング5側壁に設けた係止穴52内に挿入しである。上
記係止穴52は上下方向に延びる長穴状としてあり、か
くして駆動板1は上下振動可能であるとともに回転は阻
止される。
The drive plates 1a, 1b have rod-shaped stoppers 14 erected at a plurality of locations on the outer peripheral surface, and the tips of each stopper are inserted into locking holes 52 provided in the opposing side walls of the housing 5. The locking hole 52 is in the shape of an elongated hole extending in the vertical direction, so that the drive plate 1 can vibrate vertically and is prevented from rotating.

かかる構成によれば、接触面11の加工が容易であり、
比較的高価な圧電体を小さくできるのでコストの低減が
図れる。
According to this configuration, processing of the contact surface 11 is easy;
Since the relatively expensive piezoelectric body can be made smaller, costs can be reduced.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第5図は本発明の一実施例を示し、第1図は圧
電振動モータの全体断面図、第2図は部分分解斜視図、
第3図は要部拡大図、第4図は駆動板斜視図、第5図は
作動説明図であり、第6図、第7図は本発明の第2の実
施例を示し、第6図は全体断面図、第7図は部分分解斜
視図、第8図〜第9図は本発明の第3の実施例を示し、
第8図は全体断面図、第9図は要部拡大図であり、第1
0図、第11図はそれぞれ本発明の第4、第5の実施例
を示す要部拡大図、第12図は本発明の第6の実施例を
示す全体断面図、第13図は従来例を示す全体断面図で
ある。 1.1a、1b・・・・・・駆動板 11・・・・・・接触面 2.2a、2b・・・・・・圧電板(圧電体)3.3a
、3b、3 c −−−−−・従動板6.6a、、6b
・・・・・・板バネ 7・・・・・・回転出力軸 10a、10b・・・・・・交流電源 輩1図 v、2図 第3図 第4図 10a 10b 第5図 第6図 第7図 第8図 第9図 第10図        第11図 第12図 第13図
1 to 5 show an embodiment of the present invention, FIG. 1 is an overall sectional view of a piezoelectric vibration motor, FIG. 2 is a partially exploded perspective view,
FIG. 3 is an enlarged view of the main parts, FIG. 4 is a perspective view of the drive plate, FIG. 5 is an explanatory diagram of the operation, FIGS. 6 and 7 show a second embodiment of the present invention, 7 is an overall sectional view, FIG. 7 is a partially exploded perspective view, and FIGS. 8 to 9 show a third embodiment of the present invention,
Figure 8 is an overall sectional view, Figure 9 is an enlarged view of the main parts, and
0 and 11 are enlarged views of main parts showing the fourth and fifth embodiments of the present invention, respectively, FIG. 12 is an overall sectional view showing the sixth embodiment of the present invention, and FIG. 13 is a conventional example. FIG. 1.1a, 1b... Drive plate 11... Contact surface 2.2a, 2b... Piezoelectric plate (piezoelectric body) 3.3a
, 3b, 3c -----・Following plate 6.6a, 6b
・・・・・・Plate spring 7・・・・・・Rotation output shaft 10a, 10b・・・・・・AC power source 1 Figure v, 2 Figure 3 Figure 4 Figure 10a 10b Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 13

Claims (3)

【特許請求の範囲】[Claims] (1)駆動板を環状となしてその内周面ないし外周面を
従動板との接触面となし、該接触面を除く駆動板の周面
には周方向へ交互に極性の異なる圧電体を配設して、こ
れら圧電体に交流電圧を印加して上記接触面に周方向へ
移動する進行波振動を生ぜしめるようになし、かつ回転
出力軸に設けた上記従動板を上記接触面に弾性的に接触
せしめたことを特徴とする圧電振動モータ。
(1) The drive plate is annular and its inner or outer circumferential surface is used as a contact surface with the driven plate, and piezoelectric materials with different polarities are arranged alternately in the circumferential direction on the circumferential surface of the drive plate other than the contact surface. The piezoelectric body is arranged so that an alternating voltage is applied to the piezoelectric bodies to generate traveling wave vibration that moves in the circumferential direction on the contact surface, and the driven plate provided on the rotational output shaft is elastically applied to the contact surface. A piezoelectric vibration motor characterized by being brought into contact with the
(2)上記接触面を周方向等間隔で切込んでこれら切込
みにより複数の振動片に区画し、各振動片は先端を径方
向へ突出する質量部となしてねじり振動を生ぜしめ、上
記各質量部の突出端面に上記従動板を弾性的に接触せし
めた特許請求の範囲第1項記載の圧電振動モータ。
(2) The contact surface is cut at equal intervals in the circumferential direction and divided into a plurality of vibrating pieces by these cuts, and each vibrating piece has its tip as a mass part that projects in the radial direction to generate torsional vibration, and each of the above The piezoelectric vibration motor according to claim 1, wherein the driven plate is brought into elastic contact with the protruding end surface of the mass part.
(3)上記駆動板および従動板を複数段積層化した積層
構造を有することを特徴とする特許請求の範囲第1項ま
たは第2項記載の圧電振動モータ。
(3) The piezoelectric vibration motor according to claim 1 or 2, characterized in that the piezoelectric vibration motor has a laminated structure in which the driving plate and the driven plate are laminated in multiple stages.
JP62092440A 1987-04-15 1987-04-15 Piezoelectric vibration motor Expired - Lifetime JP2569545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62092440A JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62092440A JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Publications (2)

Publication Number Publication Date
JPS63262069A true JPS63262069A (en) 1988-10-28
JP2569545B2 JP2569545B2 (en) 1997-01-08

Family

ID=14054479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62092440A Expired - Lifetime JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Country Status (1)

Country Link
JP (1) JP2569545B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172023A (en) * 1990-11-09 1992-12-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Ultrasonic motor
US5254899A (en) * 1991-09-17 1993-10-19 Seiko Instruments Inc. Micro-traveller with ultrasonic motor
JPH0617392U (en) * 1992-08-03 1994-03-04 アスモ株式会社 Ultrasonic motor
US5852336A (en) * 1994-01-31 1998-12-22 Nikon Corporation Vibration actuator which effectively transmits micro-amplitude vibrations
US5909074A (en) * 1994-02-09 1999-06-01 Nec Corporation Vibration motor for obtaining a starting torque with a small current
US6323757B1 (en) 1998-09-16 2001-11-27 Nec Corporation Vibration motor assembly
WO2008007013A2 (en) * 2006-07-13 2008-01-17 Sagem Defense Securite Rotary piezoelectric motor
JP2010094017A (en) * 2008-10-07 2010-04-22 Samsung Electronics Co Ltd Ultrasonic motor, and carrying apparatus with the same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043082A (en) * 1983-08-17 1985-03-07 Sony Corp Elastic wave motor
JPS61277384A (en) * 1985-06-03 1986-12-08 Shinsei Kogyo:Kk Motor for utilizing ultrasonic wave oscillation
JPS62196085A (en) * 1986-02-20 1987-08-29 Matsushita Electric Ind Co Ltd Ultrasonic motor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043082A (en) * 1983-08-17 1985-03-07 Sony Corp Elastic wave motor
JPS61277384A (en) * 1985-06-03 1986-12-08 Shinsei Kogyo:Kk Motor for utilizing ultrasonic wave oscillation
JPS62196085A (en) * 1986-02-20 1987-08-29 Matsushita Electric Ind Co Ltd Ultrasonic motor

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172023A (en) * 1990-11-09 1992-12-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Ultrasonic motor
US5254899A (en) * 1991-09-17 1993-10-19 Seiko Instruments Inc. Micro-traveller with ultrasonic motor
JPH0617392U (en) * 1992-08-03 1994-03-04 アスモ株式会社 Ultrasonic motor
US5852336A (en) * 1994-01-31 1998-12-22 Nikon Corporation Vibration actuator which effectively transmits micro-amplitude vibrations
US5909074A (en) * 1994-02-09 1999-06-01 Nec Corporation Vibration motor for obtaining a starting torque with a small current
US6323757B1 (en) 1998-09-16 2001-11-27 Nec Corporation Vibration motor assembly
WO2008007013A2 (en) * 2006-07-13 2008-01-17 Sagem Defense Securite Rotary piezoelectric motor
FR2903825A1 (en) * 2006-07-13 2008-01-18 Sagem Defense Securite ROTARY PIEZOELECTRIC MOTOR
WO2008007013A3 (en) * 2006-07-13 2008-06-05 Sagem Defense Securite Rotary piezoelectric motor
JP2010094017A (en) * 2008-10-07 2010-04-22 Samsung Electronics Co Ltd Ultrasonic motor, and carrying apparatus with the same

Also Published As

Publication number Publication date
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