EP2060795B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2060795B1
EP2060795B1 EP08018521.8A EP08018521A EP2060795B1 EP 2060795 B1 EP2060795 B1 EP 2060795B1 EP 08018521 A EP08018521 A EP 08018521A EP 2060795 B1 EP2060795 B1 EP 2060795B1
Authority
EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
pump
rotor
storage chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP08018521.8A
Other languages
German (de)
English (en)
Other versions
EP2060795A3 (fr
EP2060795A2 (fr
Inventor
Jörg Stanzel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2060795A2 publication Critical patent/EP2060795A2/fr
Publication of EP2060795A3 publication Critical patent/EP2060795A3/fr
Application granted granted Critical
Publication of EP2060795B1 publication Critical patent/EP2060795B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump with a rotor and with a lubricant circuit, which contains a lubricant reservoir chamber and a lubricant pump, and which serves for lubricating a rotatably supporting the rotor rolling bearing.
  • Vacuum pumps with high-speed rotors in particular turbomolecular pumps, often have roller bearings for supporting the rotor. Due to the fast rotation, which is in the range of tens of thousands of revolutions per minute, the supply of the rolling bearing with lubricant for the life of the bearing is crucial. It is known to provide a lubricant circuit in which lubricant is removed from a lubricant reservoir and fed to the rolling bearing. From there it flows back into the lubricant reservoir. The lubricant circuit is kept in motion by a lubricant pump. The requirements for the lubricant circuit are increased by the fact that the attachment of the vacuum pump in different orientations with respect to the direction of gravity at the plant to be evacuated should be possible.
  • an object of the invention is to provide a vacuum pump whose life is prolonged especially in the head over-running.
  • a lubricant collecting chamber which is provided in addition to the lubricant storage chamber and disposed within the vacuum pump between the rolling bearing and the flange, makes it possible to promote lubricant until the rotor stops in the rolling bearing.
  • This lubricant is collected in the lubricant collection chamber and can not get into the vacuum area of the vacuum pump. This prevents on the one hand a contamination of the vacuum area with lubricant, on the other hand lubricant losses are considerably reduced. A lifetime reduction due to lubricant losses therefore no longer occurs. Since lubrication is guaranteed at all times, operating conditions become poor Lubricant use avoided. As a result, the wear is reduced, thus increasing the life.
  • the lubricant reservoir chamber has a limiting means which prevents complete removal of the lubricant. This always leaves a minimum amount of lubricant in the lubricant reservoir, which can cool down there. Any solids that have passed through the circulation in the lubricant can fail in this minimum quantity. In addition, the usage time per lubricant quantity is lower.
  • a simple embodiment of the restriction means is a collar disposed about the outlet of the lubricant storage chamber.
  • the lubricant reservoir chamber is part of the lubricant pump, whereby a very space-saving design is achieved with few components.
  • the volume of the lubricant collection chamber is dimensioned such that it can accommodate the complete, circulating amount of the lubricant.
  • the lubricant pump has a drive means, through the design of which the delivery rate of the lubricant pump is independent of the rotational speed of the rotor.
  • FIG. 1 shows a vacuum pump 1, which is operated in a head-over arrangement.
  • the flange 28 is at the lower end of the vacuum pump.
  • the lower end is to be understood in relation to the direction of gravity, which is indicated by the direction of the arrowhead of the arrow 9.
  • the flange 28 is connectable to a device to be evacuated. With the flange surrounding the gas inlet 23, the vacuum region 22 of the vacuum pump begins.
  • the pump-active elements are provided. As a result of their action, a gas pressure well below atmospheric pressure is created in the device connected to the vacuum pump and within the vacuum range.
  • the pump-active elements comprise blades carrying rotor disks 25, which are arranged on a vacuum pump rotor 2.
  • the vacuum-side end of the vacuum pump rotor 2 is rotatably supported by a wear and lubricant-free permanent magnet bearing 21.
  • a motor 20 rotates the vacuum pump rotor in rapid rotation, in which the pump-active elements deploy the pumping action.
  • the vacuum pump rotor 2 is rotatably supported by a rolling bearing 5 at the opposite end of the permanent bearing.
  • This rolling bearing is supplied with lubricant by a lubricant circuit.
  • the lubricant circuit contains a lubricant reservoir chamber 3, from which lubricant passes via a lubricant pump inlet 15 to a lubricant pump 4, which keeps the lubricant circuit in motion with its delivery rate.
  • Of the Lubricant pump performs an external inlet 10 to the housing of the vacuum pump, where it is connected to an internal inlet 11. This opens in the region of a spray nut 12. This is mounted on the end of the vacuum pump rotor and has a conical shape.
  • the spray nut rotates, so that along the cone takes place a promotion of lubricant by centrifugal force.
  • the injection nut conveys the lubricant into the rolling bearing. From there it enters an internal return 13, which is connected to an external return 14. Due to the external return, the lubricant finally returns to the lubricant reservoir 3.
  • the described flow of the lubricant is in the FIG. 1 indicated by arrows.
  • a lubricant collecting chamber 6 is arranged between roller bearing 5 and flange 28 and thus in the direction of gravity below the rolling bearing 5. Lubricant exiting the rolling bearing is collected in it before it enters the internal return 13. When switching off the vacuum pump, this is particularly important, because in a previously flooded vacuum pump, the lubricant pump 4 is turned off, lubricant passes through the lubricant pump inlet 15 back into the lubricant reservoir 3. It displaces the air there, which then lubricant through the external return 14 presses into the vacuum pump. This lubricant is collected by the lubricant collecting chamber 6. This prevents the circulating partial amount of the entire lubricant from entering the vacuum area along the vacuum pump rotor 2.
  • the volume of the lubricant collection chamber 3 is sized to accommodate the amount of lubricant circulating. This is the entry of lubricant in the vacuum area even more reliably prevented.
  • the lubricant reservoir chamber 3 has a limiting means 16.
  • FIG. 2 shows the section through a lubricant pump 4 ', the housing 40 forms the lubricant reservoir.
  • the lubricant reservoir chamber 3 ' is penetrated by a hollow axle 32, on which a rotor 33 is slidably mounted. It has a helical channel 34, which promotes lubricant into the hollow axis upon rotation of the rotor. From there it exits through the outlet 31 from the lubricant pump 4 'and into the lubricant circuit. Through an inlet 30, the lubricant from the lubricant circuit comes back into the lubricant reservoir chamber 3 '.
  • the rotor is rotated by a drive means comprising the coils 35 and the rotor-side magnets 36 in rotation.
  • a sleeve-shaped section 16 ' is provided, which surrounds the rotor in the region of the outlet of the lubricant reservoir chamber 3'. Through this sleeve remains in the lubricant reservoir 3 'up to a height H standing, non-circulated lubricant amount 37. Since the circulating amount of lubricant that is heated in the lubrication of the bearing, with this cooler amount of lubricant in exchange, the temperature of the lubricant is total lowered compared to one revolution of the total. This further increases the service life of the rolling bearing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)

Claims (7)

  1. Pompe à vide (1) comportant une bride (28), un rotor (2) et un circuit de lubrifiant qui comprend une chambre de réserve de lubrifiant (3) et une pompe à lubrifiant (4 ; 4') et qui sert à lubrifier un palier à roulement (5) soutenant en rotation le rotor,
    dans laquelle
    en supplément à la chambre de réserve de lubrifiant (3), une chambre de collecte de lubrifiant (6) est agencée à l'intérieur de la pompe à vide entre la bride (28) et le palier à roulement (5) en faisant partie du circuit de lubrifiant, caractérisée en ce que
    la chambre de réserve de lubrifiant (3) comprend un moyen de délimitation (16 ; 16') qui empêche un prélèvement complet du lubrifiant.
  2. Pompe à vide (1) selon la revendication 1,
    caractérisée en ce que
    le moyen de délimitation comprend une collerette (16') agencée autour d'une sortie de la chambre de réserve de lubrifiant (3).
  3. Pompe à vide (1) selon la revendication 1 ou 2,
    caractérisée en ce que
    la chambre de réserve de lubrifiant (3) et la pompe à lubrifiant (4 ; 4') sont agencées à l'extérieur d'un boîtier de la pompe à vide (1).
  4. Pompe à vide (1) selon l'une des revendications précédentes, caractérisée en ce que
    la chambre de collecte de lubrifiant (6) est agencée dans le circuit de lubrifiant entre le palier à roulement (5) et la chambre de réserve de lubrifiant (3).
  5. Pompe à vide (1) selon l'une des revendications précédentes, caractérisée en ce que
    la chambre de réserve de lubrifiant (3) fait partie de la pompe à lubrifiant (4 ; 4').
  6. Pompe à vide (1) selon l'une des revendications précédentes, caractérisée en ce que
    le volume de la chambre de collecte de lubrifiant (6) est dimensionné de manière à accueillir la quantité en circulation d'un lubrifiant situé dans le circuit de lubrifiant.
  7. Pompe à vide (1) selon l'une des revendications précédentes, caractérisée en ce que
    la pompe à lubrifiant (4 ; 4') comprend un moyen d'entraînement (35, 36) dont la configuration est telle que le débit de la pompe à lubrifiant est indépendant de la vitesse de rotation du rotor de la pompe à vide.
EP08018521.8A 2007-11-15 2008-10-23 Pompe à vide Active EP2060795B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200710054632 DE102007054632A1 (de) 2007-11-15 2007-11-15 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2060795A2 EP2060795A2 (fr) 2009-05-20
EP2060795A3 EP2060795A3 (fr) 2013-11-06
EP2060795B1 true EP2060795B1 (fr) 2019-03-20

Family

ID=40042850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08018521.8A Active EP2060795B1 (fr) 2007-11-15 2008-10-23 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2060795B1 (fr)
JP (1) JP5412087B2 (fr)
DE (1) DE102007054632A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109929A1 (de) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012023727B4 (de) * 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Schmiermitteleinrichtung für ein Wälzlager
DE102013210109A1 (de) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
BE1022719B1 (nl) * 2015-02-13 2016-08-23 Atlas Copco Airpower Naamloze Vennootschap Compressorinrichting
GB2552700A (en) * 2016-08-04 2018-02-07 Edwards Ltd Turbomolecular pump lubricant supply systems
EP3473858B1 (fr) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Procédé d'optimisation de durée de vie des paliers à rouleaux d'une pompe à vide
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8909636U1 (de) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vakuumpumpe mit einem Rotor und mit unter Vakuum betriebenen Rotorlagerungen
EP0589362A1 (fr) * 1992-09-21 1994-03-30 Hitachi, Ltd. Appareil de pompe à vide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
JPS6053695A (ja) * 1983-09-02 1985-03-27 Hitachi Ltd タ−ボ分子ポンプ
DE3817290A1 (de) * 1988-05-20 1989-11-30 Leybold Ag Turbomolekularpumpe
DE10321326A1 (de) 2003-05-13 2005-02-10 Pfeiffer Vacuum Gmbh Einrichtung zur Ölversorgung der Lagerstellen einer rotierenden Welle

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8909636U1 (de) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vakuumpumpe mit einem Rotor und mit unter Vakuum betriebenen Rotorlagerungen
EP0589362A1 (fr) * 1992-09-21 1994-03-30 Hitachi, Ltd. Appareil de pompe à vide

Also Published As

Publication number Publication date
DE102007054632A1 (de) 2009-05-20
EP2060795A3 (fr) 2013-11-06
JP2009121467A (ja) 2009-06-04
JP5412087B2 (ja) 2014-02-12
EP2060795A2 (fr) 2009-05-20

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