EP2060795B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP2060795B1
EP2060795B1 EP08018521.8A EP08018521A EP2060795B1 EP 2060795 B1 EP2060795 B1 EP 2060795B1 EP 08018521 A EP08018521 A EP 08018521A EP 2060795 B1 EP2060795 B1 EP 2060795B1
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EP
European Patent Office
Prior art keywords
lubricant
vacuum pump
pump
rotor
storage chamber
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EP08018521.8A
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German (de)
French (fr)
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EP2060795A3 (en
EP2060795A2 (en
Inventor
Jörg Stanzel
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2060795A3 publication Critical patent/EP2060795A3/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump with a rotor and with a lubricant circuit, which contains a lubricant reservoir chamber and a lubricant pump, and which serves for lubricating a rotatably supporting the rotor rolling bearing.
  • Vacuum pumps with high-speed rotors in particular turbomolecular pumps, often have roller bearings for supporting the rotor. Due to the fast rotation, which is in the range of tens of thousands of revolutions per minute, the supply of the rolling bearing with lubricant for the life of the bearing is crucial. It is known to provide a lubricant circuit in which lubricant is removed from a lubricant reservoir and fed to the rolling bearing. From there it flows back into the lubricant reservoir. The lubricant circuit is kept in motion by a lubricant pump. The requirements for the lubricant circuit are increased by the fact that the attachment of the vacuum pump in different orientations with respect to the direction of gravity at the plant to be evacuated should be possible.
  • an object of the invention is to provide a vacuum pump whose life is prolonged especially in the head over-running.
  • a lubricant collecting chamber which is provided in addition to the lubricant storage chamber and disposed within the vacuum pump between the rolling bearing and the flange, makes it possible to promote lubricant until the rotor stops in the rolling bearing.
  • This lubricant is collected in the lubricant collection chamber and can not get into the vacuum area of the vacuum pump. This prevents on the one hand a contamination of the vacuum area with lubricant, on the other hand lubricant losses are considerably reduced. A lifetime reduction due to lubricant losses therefore no longer occurs. Since lubrication is guaranteed at all times, operating conditions become poor Lubricant use avoided. As a result, the wear is reduced, thus increasing the life.
  • the lubricant reservoir chamber has a limiting means which prevents complete removal of the lubricant. This always leaves a minimum amount of lubricant in the lubricant reservoir, which can cool down there. Any solids that have passed through the circulation in the lubricant can fail in this minimum quantity. In addition, the usage time per lubricant quantity is lower.
  • a simple embodiment of the restriction means is a collar disposed about the outlet of the lubricant storage chamber.
  • the lubricant reservoir chamber is part of the lubricant pump, whereby a very space-saving design is achieved with few components.
  • the volume of the lubricant collection chamber is dimensioned such that it can accommodate the complete, circulating amount of the lubricant.
  • the lubricant pump has a drive means, through the design of which the delivery rate of the lubricant pump is independent of the rotational speed of the rotor.
  • FIG. 1 shows a vacuum pump 1, which is operated in a head-over arrangement.
  • the flange 28 is at the lower end of the vacuum pump.
  • the lower end is to be understood in relation to the direction of gravity, which is indicated by the direction of the arrowhead of the arrow 9.
  • the flange 28 is connectable to a device to be evacuated. With the flange surrounding the gas inlet 23, the vacuum region 22 of the vacuum pump begins.
  • the pump-active elements are provided. As a result of their action, a gas pressure well below atmospheric pressure is created in the device connected to the vacuum pump and within the vacuum range.
  • the pump-active elements comprise blades carrying rotor disks 25, which are arranged on a vacuum pump rotor 2.
  • the vacuum-side end of the vacuum pump rotor 2 is rotatably supported by a wear and lubricant-free permanent magnet bearing 21.
  • a motor 20 rotates the vacuum pump rotor in rapid rotation, in which the pump-active elements deploy the pumping action.
  • the vacuum pump rotor 2 is rotatably supported by a rolling bearing 5 at the opposite end of the permanent bearing.
  • This rolling bearing is supplied with lubricant by a lubricant circuit.
  • the lubricant circuit contains a lubricant reservoir chamber 3, from which lubricant passes via a lubricant pump inlet 15 to a lubricant pump 4, which keeps the lubricant circuit in motion with its delivery rate.
  • Of the Lubricant pump performs an external inlet 10 to the housing of the vacuum pump, where it is connected to an internal inlet 11. This opens in the region of a spray nut 12. This is mounted on the end of the vacuum pump rotor and has a conical shape.
  • the spray nut rotates, so that along the cone takes place a promotion of lubricant by centrifugal force.
  • the injection nut conveys the lubricant into the rolling bearing. From there it enters an internal return 13, which is connected to an external return 14. Due to the external return, the lubricant finally returns to the lubricant reservoir 3.
  • the described flow of the lubricant is in the FIG. 1 indicated by arrows.
  • a lubricant collecting chamber 6 is arranged between roller bearing 5 and flange 28 and thus in the direction of gravity below the rolling bearing 5. Lubricant exiting the rolling bearing is collected in it before it enters the internal return 13. When switching off the vacuum pump, this is particularly important, because in a previously flooded vacuum pump, the lubricant pump 4 is turned off, lubricant passes through the lubricant pump inlet 15 back into the lubricant reservoir 3. It displaces the air there, which then lubricant through the external return 14 presses into the vacuum pump. This lubricant is collected by the lubricant collecting chamber 6. This prevents the circulating partial amount of the entire lubricant from entering the vacuum area along the vacuum pump rotor 2.
  • the volume of the lubricant collection chamber 3 is sized to accommodate the amount of lubricant circulating. This is the entry of lubricant in the vacuum area even more reliably prevented.
  • the lubricant reservoir chamber 3 has a limiting means 16.
  • FIG. 2 shows the section through a lubricant pump 4 ', the housing 40 forms the lubricant reservoir.
  • the lubricant reservoir chamber 3 ' is penetrated by a hollow axle 32, on which a rotor 33 is slidably mounted. It has a helical channel 34, which promotes lubricant into the hollow axis upon rotation of the rotor. From there it exits through the outlet 31 from the lubricant pump 4 'and into the lubricant circuit. Through an inlet 30, the lubricant from the lubricant circuit comes back into the lubricant reservoir chamber 3 '.
  • the rotor is rotated by a drive means comprising the coils 35 and the rotor-side magnets 36 in rotation.
  • a sleeve-shaped section 16 ' is provided, which surrounds the rotor in the region of the outlet of the lubricant reservoir chamber 3'. Through this sleeve remains in the lubricant reservoir 3 'up to a height H standing, non-circulated lubricant amount 37. Since the circulating amount of lubricant that is heated in the lubrication of the bearing, with this cooler amount of lubricant in exchange, the temperature of the lubricant is total lowered compared to one revolution of the total. This further increases the service life of the rolling bearing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rolling Contact Bearings (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe mit einem Rotor und mit einem Schmiermittelkreislauf, der eine Schmiermittelvorratskammer und eine Schmiermittelpumpe enthält, und der zur Schmierung eines den Rotor drehbar unterstützenden Wälzlagers dient.The invention relates to a vacuum pump with a rotor and with a lubricant circuit, which contains a lubricant reservoir chamber and a lubricant pump, and which serves for lubricating a rotatably supporting the rotor rolling bearing.

Vakuumpumpen mit schnelldrehenden Rotoren, insbesondere Turbomolekularpumpen, weisen häufig Wälzlager zur Lagerung des Rotors auf. Aufgrund der schnellen Drehung, die im Bereich von einigen zehntausend Umdrehungen pro Minute liegt, ist die Versorgung des Wälzlagers mit Schmiermittel für die Lebensdauer des Lagers entscheidend. Es ist bekannt, einen Schmiermittelkreislauf vorzusehen, bei dem Schmiermittel einer Schmiermittelvorratskammer entnommen und dem Wälzlager zugeführt wird. Von dort fließt es dann zurück in die Schmiermittelvorratskammer. Der Schmiermittelkreislauf wird von einer Schmiermittelpumpe in Gang gehalten. Die Anforderungen an den Schmiermittelkreislauf werden dadurch erhöht, dass die Befestigung der Vakuumpumpe in verschiedenen Orientierungen in Bezug zur Schwerkraftrichtung an der zu evakuierenden Anlage möglich sein soll.Vacuum pumps with high-speed rotors, in particular turbomolecular pumps, often have roller bearings for supporting the rotor. Due to the fast rotation, which is in the range of tens of thousands of revolutions per minute, the supply of the rolling bearing with lubricant for the life of the bearing is crucial. It is known to provide a lubricant circuit in which lubricant is removed from a lubricant reservoir and fed to the rolling bearing. From there it flows back into the lubricant reservoir. The lubricant circuit is kept in motion by a lubricant pump. The requirements for the lubricant circuit are increased by the fact that the attachment of the vacuum pump in different orientations with respect to the direction of gravity at the plant to be evacuated should be possible.

Ein Beispiel für eine Anordnung, mit der das gelingen kann, gibt die EP 1 477 721 A2 . Diese Schrift stellt eine Schmiermittelpumpe mit einer Spindel mit zwei Förderköpfen vor, von denen jeweils eine in das in der Schmiermittelkammer befindliche Schmiermittel eingetaucht ist. Auf diese Art wird eine Förderung von Schmiermittel in jeder Orientierung erreicht.An example of an arrangement with which this can succeed is given by the EP 1 477 721 A2 , This document provides a lubricant pump with a spindle with two delivery heads, one of which is immersed in the lubricant in the lubricant chamber in each case. In this way, a promotion of lubricant is achieved in any orientation.

Aus der DE 89 09 636 U1 ist eine Vakuumpumpe gemäß dem Oberbegriff des Anspruchs 1 bekannt.From the DE 89 09 636 U1 a vacuum pump according to the preamble of claim 1 is known.

Ferner beschreiben die US 4,140,441 A und die FR 2 310 481 A1 jeweils eine Vakuumpumpe, bei der in einem Schmiermittelkreislauf zusätzlich zu einer Schmiermittelvorratskammer zwischen zwei Wälzlagern eine Schmiermittelsammelkammer vorgesehen ist.Furthermore, the describe US 4,140,441 A and the FR 2 310 481 A1 in each case a vacuum pump in which a lubricant collecting chamber is provided in a lubricant circuit in addition to a lubricant reservoir between two rolling bearings.

Man stellt jedoch fest, dass die Lebensdauer im Kopfüberbetrieb, wenn der Flansch der Vakuumpumpe in Bezug zur Schwerkraftrichtung unterhalb des Wälzlagers angeordnet ist, geringer als bei umgekehrter Ausrichtung der Vakuumpumpe ist.It will be noted, however, that when the flange of the vacuum pump is disposed below the rolling bearing with respect to the direction of gravity, the life in the head over-run is less than in the reverse orientation of the vacuum pump.

Daher besteht eine Aufgabe der Erfindung darin, eine Vakuumpumpe zu schaffen, deren Lebensdauer insbesondere im Kopfüberbetrieb verlängert ist.Therefore, an object of the invention is to provide a vacuum pump whose life is prolonged especially in the head over-running.

Diese Aufgabe wird gelöst durch eine Vakuumpumpe mit den Merkmalen des Anspruchs 1. Die Ansprüche 2 bis 7 geben vorteilhafte Weiterbildungen der Erfindung an.This object is achieved by a vacuum pump with the features of claim 1. The claims 2 to 7 indicate advantageous developments of the invention.

Eine Schmiermittelsammelkammer, die zusätzlich zur Schmiermittelvorratskammer vorgesehen und innerhalb der Vakuumpumpe zwischen Wälzlager und Flansch angeordnet ist, ermöglicht es, bis zum Stillstand des Rotors Schmiermittel in das Wälzlager zu fördern. Dieses Schmiermittel wird in der Schmiermittelsammelkammer aufgefangen und kann nicht in den Vakuumbereich der Vakuumpumpe gelangen. Dies verhindert zum einen eine Kontamination des Vakuumbereichs mit Schmiermittel, zum anderen werden Schmiermittelverluste erheblich verringert. Eine Lebensdauerverringerung durch Schmiermittelverluste tritt daher nicht mehr auf. Da jederzeit Schmierung gewährleistet ist, werden Betriebszustände mit mangelndem Schmiermitteleinsatz vermieden. Dadurch wird der Verschleiß herabgesetzt und somit die Lebensdauer erhöht.A lubricant collecting chamber, which is provided in addition to the lubricant storage chamber and disposed within the vacuum pump between the rolling bearing and the flange, makes it possible to promote lubricant until the rotor stops in the rolling bearing. This lubricant is collected in the lubricant collection chamber and can not get into the vacuum area of the vacuum pump. This prevents on the one hand a contamination of the vacuum area with lubricant, on the other hand lubricant losses are considerably reduced. A lifetime reduction due to lubricant losses therefore no longer occurs. Since lubrication is guaranteed at all times, operating conditions become poor Lubricant use avoided. As a result, the wear is reduced, thus increasing the life.

Erfindungsgemäß weist die Schmiermittelvorratskammer ein Begrenzungsmittel auf, das eine vollständige Entnahme des Schmiermittels verhindert. Dadurch bleibt immer eine Mindestmenge Schmiermittel in der Schmiermittelvorratskammer, die dort Abkühlen kann. Etwaige durch den Umlauf in das Schmiermittel gelangte Festkörper können in dieser Mindestmenge ausfallen. Zudem ist die Nutzungszeit pro Schmiermittelmenge geringer.According to the invention, the lubricant reservoir chamber has a limiting means which prevents complete removal of the lubricant. This always leaves a minimum amount of lubricant in the lubricant reservoir, which can cool down there. Any solids that have passed through the circulation in the lubricant can fail in this minimum quantity. In addition, the usage time per lubricant quantity is lower.

Eine einfache Ausführungsform des Begrenzungsmittels ist ein Kragen, der um den Auslass der Schmiermittelvorratskammer herum angeordnet ist.A simple embodiment of the restriction means is a collar disposed about the outlet of the lubricant storage chamber.

In einer vorteilhaften Weiterbildung ist die Schmiermittelvorratskammer Teil der Schmiermittelpumpe, wodurch ein sehr platzsparender Aufbau mit wenigen Bauteilen erreicht wird.In an advantageous development, the lubricant reservoir chamber is part of the lubricant pump, whereby a very space-saving design is achieved with few components.

Eine Verunreinigung des Vakuumbereichs wird verhindert, indem in einer Weiterbildung das Volumen der Schmiermittelsammelkammer derart bemessen ist, dass sie die komplette, im Umlauf befindliche Menge des Schmiermittels aufnehmen kann.Contamination of the vacuum area is prevented by, in a further development, the volume of the lubricant collection chamber is dimensioned such that it can accommodate the complete, circulating amount of the lubricant.

In einer anderen Weiterbildung weist die Schmiermittelpumpe ein Antriebsmittel auf, durch dessen Gestaltung die Förderleistung der Schmiermittelpumpe unabhängig von der Drehzahl des Rotors ist. Damit wird dem Wälzlager bei in den Stillstand übergehendem Rotor weiterhin Schmiermittel zugeführt, wodurch ein Abreißen der Schmierung verhindert wird. Dadurch wird die Lebensdauer des Wälzlagers weiter erhöht.In another development, the lubricant pump has a drive means, through the design of which the delivery rate of the lubricant pump is independent of the rotational speed of the rotor. Thus, the rolling bearing continues to be supplied to the rolling bearing in the standstill rotor lubricant, whereby tearing off the lubrication is prevented. As a result, the life of the bearing is further increased.

Anhand eines Ausführungsbeispiels soll die Erfindung näher erläutert und weitere Vorteile aufgezeigt werden. Es zeigen:

  • Fig. 1: Schnitt durch eine Vakuumpumpe mit Schmiermittelkreislauf
  • Fig. 2: Schnitt durch eine Schmiermittelpumpe, die gemäß einer Weiterbildung der Erfindung eine Schmiermittelvorratskammer umfasst.
Reference to an embodiment, the invention will be explained in more detail and further advantages will be shown. Show it:
  • Fig. 1 : Section through a vacuum pump with lubricant circuit
  • Fig. 2 : Section through a lubricant pump, which comprises a lubricant reservoir according to a further development of the invention.

Figur 1 zeigt eine Vakuumpumpe 1, die in Kopfüberanordnung betrieben wird. Das bedeutet, dass sich der Flansch 28 am unteren Ende der Vakuumpumpe befindet. Das untere Ende ist dabei in Bezug auf die Schwerkraftrichtung zu verstehen, die durch die Richtung der Pfeilspitze des Pfeils 9 angezeigt wird. Der Flansch 28 ist mit einer zu evakuierenden Einrichtung verbindbar. Mit dem Flansch, der den Gaseinlass 23 umgibt, beginnt der Vakuumbereich 22 der Vakuumpumpe. In diesem sind die pumpaktiven Elemente vorgesehen. Durch deren Wirkung entsteht in der mit der Vakuumpumpe verbundenen Einrichtung und innerhalb des Vakuumbereichs ein Gasdruck weit unterhalb des Atmosphärendrucks. Im Beispiel umfassen die pumpaktiven Elemente Schaufeln tragende Rotorscheiben 25, die an einem Vakuumpumpenrotor 2 angeordnet sind. Ihnen stehen ebenfalls Schaufeln tragende Statorscheiben 26 gegenüber, wobei sich Rotor- und Statorscheiben entlang des Vakuumpumpenrotors abwechseln. Die Statorscheiben werden durch Distanzringe 27 auf axialem Abstand gehalten. Das durch die pumpaktiven Elemente verdichtete Gas wird durch einen Gasauslass 24 aus der Pumpe ausgestoßen. Das vakuumseitige Ende des Vakuumpumpenrotors 2 ist durch ein verschleiß- und schmiermittelfreies Permanentmagnetlager 21 drehbar unterstützt. Ein Motor 20 versetzt den Vakuumpumpenrotor in schnelle Drehung, bei der die pumpaktiven Elemente die Pumpwirkung entfalten. FIG. 1 shows a vacuum pump 1, which is operated in a head-over arrangement. This means that the flange 28 is at the lower end of the vacuum pump. The lower end is to be understood in relation to the direction of gravity, which is indicated by the direction of the arrowhead of the arrow 9. The flange 28 is connectable to a device to be evacuated. With the flange surrounding the gas inlet 23, the vacuum region 22 of the vacuum pump begins. In this the pump-active elements are provided. As a result of their action, a gas pressure well below atmospheric pressure is created in the device connected to the vacuum pump and within the vacuum range. In the example, the pump-active elements comprise blades carrying rotor disks 25, which are arranged on a vacuum pump rotor 2. They are also opposite blades bearing stator 26, with alternating rotor and stator along the vacuum pump rotor. The stator discs are held by spacers 27 at an axial distance. The gas compressed by the pumping elements is expelled from the pump through a gas outlet 24. The vacuum-side end of the vacuum pump rotor 2 is rotatably supported by a wear and lubricant-free permanent magnet bearing 21. A motor 20 rotates the vacuum pump rotor in rapid rotation, in which the pump-active elements deploy the pumping action.

Der Vakuumpumpenrotor 2 wird durch ein Wälzlager 5 am dem Permanentlager gegenüberliegenden Ende drehbar unterstützt. Dieses Wälzlager wird durch einen Schmiermittelkreislauf mit Schmiermittel versorgt. Der Schmiermittelkreislauf enthält eine Schmiermittelvorratskammer 3, von der Schmiermittel über einen Schmiermittelpumpenzulauf 15 zu einer Schmiermittelpumpe 4 gelangt, welche mit ihrer Förderleistung den Schmiermittelkreislauf in Gang hält. Von der Schmiermittelpumpe führt ein externer Zulauf 10 zum Gehäuse der Vakuumpumpe und ist dort mit einem internen Zulauf 11 verbunden. Dieser mündet im Bereich einer Spritzmutter 12. Diese ist auf dem Ende des Vakuumpumpenrotors befestigt und weist eine konische Gestalt auf. Durch die Drehung des Vakuumpumpenrotors dreht sich die Spritzmutter, so dass entlang des Konus eine Förderung von Schmiermittel durch Fliehkraftwirkung stattfindet. Die Spritzmutter fördert das Schmiermittel in das Wälzlager. Von dort gelangt es in einen internen Rücklauf 13, der mit einem externen Rücklauf 14 verbunden ist. Durch den externen Rücklauf gelangt das Schmiermittel schließlich zurück in die Schmiermittelvorratskammer 3. Der beschriebene Fluss des Schmiermittels ist in der Figur 1 durch Pfeile angedeutet.The vacuum pump rotor 2 is rotatably supported by a rolling bearing 5 at the opposite end of the permanent bearing. This rolling bearing is supplied with lubricant by a lubricant circuit. The lubricant circuit contains a lubricant reservoir chamber 3, from which lubricant passes via a lubricant pump inlet 15 to a lubricant pump 4, which keeps the lubricant circuit in motion with its delivery rate. Of the Lubricant pump performs an external inlet 10 to the housing of the vacuum pump, where it is connected to an internal inlet 11. This opens in the region of a spray nut 12. This is mounted on the end of the vacuum pump rotor and has a conical shape. Due to the rotation of the vacuum pump rotor, the spray nut rotates, so that along the cone takes place a promotion of lubricant by centrifugal force. The injection nut conveys the lubricant into the rolling bearing. From there it enters an internal return 13, which is connected to an external return 14. Due to the external return, the lubricant finally returns to the lubricant reservoir 3. The described flow of the lubricant is in the FIG. 1 indicated by arrows.

Zwischen Wälzlager 5 und Flansch 28 und damit in Schwerkraftrichtung unterhalb des Wälzlagers 5 ist eine Schmiermittelsammelkammer 6 angeordnet. Schmiermittel, welches aus dem Wälzlager austritt, wird in ihr gesammelt, bevor es in den internen Rücklauf 13 gelangt. Beim Abschalten der Vakuumpumpe ist dies besonders wichtig, denn wenn bei einer bereits mit Luft gefluteten Vakuumpumpe die Schmiermittelpumpe 4 abgeschaltet wird, läuft Schmiermittel durch den Schmiermittelpumpenzulauf 15 zurück in die Schmiermittelvorratskammer 3. Es verdrängt die dort befindliche Luft, welche dann Schmiermittel durch den externen Rücklauf 14 in die Vakuumpumpe drückt. Dieses Schmiermittel wird von der Schmiermittelsammelkammer 6 aufgefangen. Hierdurch wird verhindert, dass die im Umlauf befindliche Teilmenge des gesamten Schmiermittels entlang des Vakuumpumpenrotors 2 in den Vakuumbereich eintritt. Daher wird eine Kontamination der an die Vakuumpumpe angeschlossenen Kammer verhindert. Gleichzeitig wird auch verhindert, dass Schmiermittel aus dem Schmiermittelkreislauf verloren geht, indem es in den Vakuumbereich eintritt. Von dort kann es nicht mehr in den Schmiermittelkreislauf zurückgebracht werden. Das Volumen der Schmiermittelsammelkammer 3 ist derart bemessen, dass es die im Umlauf befindliche Schmiermittelmenge aufnehmen kann. Dadurch ist der Eintrag von Schmiermittel in den Vakuumbereich noch zuverlässiger unterbunden. Durch die Schmiermittelsammelkammer 3 ist es möglich, bis zum Stillstand des Rotors 2 Schmiermittel in das Wälzlager 5 zu fördern, ohne dass es zur Kontamination des Vakuumbereichs kommen kann. Um die Menge des im Umlauf befindlichen Schmiermittels zu begrenzen, weist die Schmiermittelvorratskammer 3 ein Begrenzungsmittel 16 auf.Between roller bearing 5 and flange 28 and thus in the direction of gravity below the rolling bearing 5, a lubricant collecting chamber 6 is arranged. Lubricant exiting the rolling bearing is collected in it before it enters the internal return 13. When switching off the vacuum pump, this is particularly important, because in a previously flooded vacuum pump, the lubricant pump 4 is turned off, lubricant passes through the lubricant pump inlet 15 back into the lubricant reservoir 3. It displaces the air there, which then lubricant through the external return 14 presses into the vacuum pump. This lubricant is collected by the lubricant collecting chamber 6. This prevents the circulating partial amount of the entire lubricant from entering the vacuum area along the vacuum pump rotor 2. Therefore, contamination of the chamber connected to the vacuum pump is prevented. At the same time it also prevents lubricant from being lost from the lubricant circuit by entering the vacuum area. From there it can no longer be returned to the lubricant circuit. The volume of the lubricant collection chamber 3 is sized to accommodate the amount of lubricant circulating. This is the entry of lubricant in the vacuum area even more reliably prevented. By means of the lubricant collecting chamber 3, it is possible to convey lubricant into the roller bearing 5 until the rotor 2 stops, without it being possible for the vacuum region to be contaminated. In order to limit the amount of lubricant in circulation, the lubricant reservoir chamber 3 has a limiting means 16.

Figur 2 zeigt den Schnitt durch eine Schmiermittelpumpe 4', deren Gehäuse 40 die Schmiermittelvorratskammer bildet. Die Schmiermittelvorratskammer 3' wird von einer hohlen Achse 32 durchsetzt, auf der ein Rotor 33 gleitgelagert ist. Er weist einen schraubenförmigen Kanal 34 auf, der bei Drehung des Rotors Schmiermittel in die hohle Achse hineinfördert. Von dort tritt es durch den Auslass 31 aus der Schmiermittelpumpe 4' aus und in den Schmiermittelkreislauf ein. Durch einen Einlass 30 kommt das Schmiermittel aus dem Schmiermittelkreislauf wieder in die Schmiermittelvorratskammer 3' hinein. Der Rotor wird von einem die Spulen 35 und die rotorseitigen Magnete 36 umfassenden Antriebsmittel in Drehung versetzt. Um die im Schmiermittelkreislauf umlaufende Schmiermittelmenge zu begrenzen, ist ein hülsenförmiger Abschnitt 16' vorgesehen, der den Rotor im Bereich des Auslasses der Schmiermittelvorratskammer 3' umgibt. Durch diese Hülse verbleibt in der Schmiermittelvorratskammer 3' eine bis zur Höhe H stehende, nicht-umgewälzte Schmiermittelmenge 37. Da die umlaufende Schmiermittelmenge, welche bei der Schmierung des Wälzlagers erwärmt wird, mit dieser kühleren Schmiermittelmenge in Austausch steht, wird die Temperatur des Schmiermittels insgesamt gegenüber einem Umlauf der Gesamtmenge abgesenkt. Damit wird die Lebensdauer des Wälzlagers weiter erhöht. FIG. 2 shows the section through a lubricant pump 4 ', the housing 40 forms the lubricant reservoir. The lubricant reservoir chamber 3 'is penetrated by a hollow axle 32, on which a rotor 33 is slidably mounted. It has a helical channel 34, which promotes lubricant into the hollow axis upon rotation of the rotor. From there it exits through the outlet 31 from the lubricant pump 4 'and into the lubricant circuit. Through an inlet 30, the lubricant from the lubricant circuit comes back into the lubricant reservoir chamber 3 '. The rotor is rotated by a drive means comprising the coils 35 and the rotor-side magnets 36 in rotation. In order to limit the amount of lubricant circulating in the lubricant circuit, a sleeve-shaped section 16 'is provided, which surrounds the rotor in the region of the outlet of the lubricant reservoir chamber 3'. Through this sleeve remains in the lubricant reservoir 3 'up to a height H standing, non-circulated lubricant amount 37. Since the circulating amount of lubricant that is heated in the lubrication of the bearing, with this cooler amount of lubricant in exchange, the temperature of the lubricant is total lowered compared to one revolution of the total. This further increases the service life of the rolling bearing.

Claims (7)

  1. A vacuum pump (1) having a flange (28), having a rotor (2) and having a lubricant circuit which includes a lubricant storage chamber (3) and a lubricant pump (4; 4') and which serves for the lubrication of a rolling element bearing (5) rotatably supporting the rotor,
    wherein, as a component of the lubricant circuit in addition to the lubricant storage chamber (3), a lubricant collection chamber (6) is arranged within the vacuum pump between the flange (28) and the rolling element bearing (5),
    characterized in that
    the lubricant storage chamber (3) has a limiting means (16; 16') which prevents a complete removal of the lubricant.
  2. A vacuum pump (1) in accordance with claim 1,
    characterized in that
    the limiting means comprises a collar (16') arranged around an outlet of the lubricant storage chamber (3).
  3. A vacuum pump (1) in accordance with claim 1 or claim 2, characterized in that
    the lubricant storage chamber (3) and the lubricant pump (4; 4') are arranged outside a housing of the vacuum pump (1).
  4. A vacuum pump (1) in accordance with any one of the preceding claims, characterized in that
    the lubricant collection chamber (6) is arranged in the lubricant circuit between the rolling element bearing (5) and the lubricant storage chamber (3).
  5. A vacuum pump (1) in accordance with any one of the preceding claims, characterized in that
    the lubricant storage chamber (3) is part of the lubricant pump (4; 4').
  6. A vacuum pump (1) in accordance with any one of the preceding claims, characterized in that
    the volume of the lubricant collection chamber (6) is dimensioned such that it can receive the quantity of a lubricant present in the lubricant circuit that is in circulation.
  7. A vacuum pump (1) in accordance with any one of the preceding claims, characterized in that
    the lubricant pump (4; 4') has a drive means (35, 36) through whose design the conveying power of the lubricant pump is independent of the speed of rotation of the vacuum pump rotor.
EP08018521.8A 2007-11-15 2008-10-23 Vacuum pump Active EP2060795B1 (en)

Applications Claiming Priority (1)

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DE200710054632 DE102007054632A1 (en) 2007-11-15 2007-11-15 vacuum pump

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EP2060795A2 EP2060795A2 (en) 2009-05-20
EP2060795A3 EP2060795A3 (en) 2013-11-06
EP2060795B1 true EP2060795B1 (en) 2019-03-20

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109929A1 (en) * 2011-08-10 2013-02-14 Pfeiffer Vacuum Gmbh vacuum pump
DE102012220040A1 (en) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh vacuum pump
DE102012023727B4 (en) * 2012-12-05 2020-03-19 Pfeiffer Vacuum Gmbh Lubricant device for a rolling bearing
DE102013210109A1 (en) * 2013-05-29 2014-12-04 Pfeiffer Vacuum Gmbh vacuum pump
BE1022719B1 (en) * 2015-02-13 2016-08-23 Atlas Copco Airpower Naamloze Vennootschap Compressor device
GB2552700A (en) * 2016-08-04 2018-02-07 Edwards Ltd Turbomolecular pump lubricant supply systems
EP3473858B1 (en) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Method for optimizing the life cycle of roller bearings of a vacuum pump
JP7141332B2 (en) * 2018-12-28 2022-09-22 株式会社荏原製作所 vacuum pump equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8909636U1 (en) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vacuum pump with one rotor and rotor bearings operated under vacuum
EP0589362A1 (en) * 1992-09-21 1994-03-30 Hitachi, Ltd. Vacuum pump apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1032818B (en) * 1975-05-06 1979-06-20 Rava E IMPROVEMENT TO LECULAR TURBOM PUMPS
US4140441A (en) * 1977-04-11 1979-02-20 Patterson Williams G Turbomolecular pump lubrication system
JPS6053695A (en) * 1983-09-02 1985-03-27 Hitachi Ltd Turbo-molecule pump
DE3817290A1 (en) * 1988-05-20 1989-11-30 Leybold Ag TURBOMOLECULAR PUMP
DE10321326A1 (en) 2003-05-13 2005-02-10 Pfeiffer Vacuum Gmbh Device for supplying oil to the bearing points of a rotating shaft

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8909636U1 (en) * 1989-08-11 1990-12-06 Leybold AG, 6450 Hanau Vacuum pump with one rotor and rotor bearings operated under vacuum
EP0589362A1 (en) * 1992-09-21 1994-03-30 Hitachi, Ltd. Vacuum pump apparatus

Also Published As

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DE102007054632A1 (en) 2009-05-20
EP2060795A3 (en) 2013-11-06
JP2009121467A (en) 2009-06-04
JP5412087B2 (en) 2014-02-12
EP2060795A2 (en) 2009-05-20

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