DE69133239D1 - Maschine zum Zerschneiden von Einkristallbarren in Wafern mittels einer Innenlochsäge - Google Patents

Maschine zum Zerschneiden von Einkristallbarren in Wafern mittels einer Innenlochsäge

Info

Publication number
DE69133239D1
DE69133239D1 DE69133239T DE69133239T DE69133239D1 DE 69133239 D1 DE69133239 D1 DE 69133239D1 DE 69133239 T DE69133239 T DE 69133239T DE 69133239 T DE69133239 T DE 69133239T DE 69133239 D1 DE69133239 D1 DE 69133239D1
Authority
DE
Germany
Prior art keywords
wafers
machine
single crystal
hole saw
internal hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69133239T
Other languages
English (en)
Other versions
DE69133239T2 (de
Inventor
Ichiro Katayama
Yoshio Kamoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Application granted granted Critical
Publication of DE69133239D1 publication Critical patent/DE69133239D1/de
Publication of DE69133239T2 publication Critical patent/DE69133239T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D5/00—Planing or slotting machines cutting otherwise than by relative movement of the tool and workpiece in a straight line
    • B23D5/02—Planing or slotting machines cutting otherwise than by relative movement of the tool and workpiece in a straight line involving rotary and straight-line movements only, e.g. for cutting helical grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D47/00—Sawing machines or sawing devices working with circular saw blades, characterised only by constructional features of particular parts
    • B23D47/005—Vibration-damping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B23D59/002—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S125/00—Stone working
    • Y10S125/901—Stone working forming piezoelectric crystals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00—Cutting
    • Y10T83/141—With means to monitor and control operation [e.g., self-regulating means]
    • Y10T83/148—Including means to correct the sensed operation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
DE69133239T 1990-05-10 1991-05-08 Maschine zum Zerschneiden von Einkristallbarren in Wafern mittels einer Innenlochsäge Expired - Fee Related DE69133239T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12037090 1990-05-10
JP6032991A JP2505930B2 (ja) 1990-05-10 1991-03-25 スライシングマシンの切断方法

Publications (2)

Publication Number Publication Date
DE69133239D1 true DE69133239D1 (de) 2003-05-22
DE69133239T2 DE69133239T2 (de) 2003-10-30

Family

ID=26401401

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69104766T Expired - Fee Related DE69104766T2 (de) 1990-05-10 1991-05-08 Schneidemachine und Abschneideverfahren mit dieser Maschine.
DE69133239T Expired - Fee Related DE69133239T2 (de) 1990-05-10 1991-05-08 Maschine zum Zerschneiden von Einkristallbarren in Wafern mittels einer Innenlochsäge

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69104766T Expired - Fee Related DE69104766T2 (de) 1990-05-10 1991-05-08 Schneidemachine und Abschneideverfahren mit dieser Maschine.

Country Status (5)

Country Link
US (2) US5174270A (de)
EP (2) EP0456223B1 (de)
JP (1) JP2505930B2 (de)
KR (1) KR970009143B1 (de)
DE (2) DE69104766T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2615377B2 (ja) * 1990-05-10 1997-05-28 株式会社東京精密 スライシングマシンの切断装置
JPH05318460A (ja) * 1992-05-25 1993-12-03 Tokyo Seimitsu Co Ltd 半導体ウエハのスライシング方法
US5351444A (en) * 1992-09-25 1994-10-04 Silicon Technology Corporation Blade track control system
JP2979870B2 (ja) * 1992-11-27 1999-11-15 信越半導体株式会社 半導体インゴットのコーン状端部切除方法
JP2823493B2 (ja) * 1993-01-18 1998-11-11 トーヨーエイテック株式会社 スライシング装置のブレード撓み検出方法及び装置並びにブレード撓み制御装置
US5628673A (en) * 1993-11-26 1997-05-13 Seiko Seiki Kabushiki Kaisha Dicing machine with non-contact setup function
US5632666A (en) * 1994-10-28 1997-05-27 Memc Electronic Materials, Inc. Method and apparatus for automated quality control in wafer slicing
JP3085136B2 (ja) * 1995-03-25 2000-09-04 信越半導体株式会社 ワークのスライシング方法および装置
JP2943673B2 (ja) * 1995-10-31 1999-08-30 日本電気株式会社 半導体基板の製造装置及び製造方法
US5694821A (en) * 1995-12-08 1997-12-09 Simonds Industries, Inc. Method for controlling work feed rate for cutting wood, metal and other materials
JP3102364B2 (ja) 1996-11-06 2000-10-23 株式会社村田製作所 スライシング方法およびスライシング装置
CA2251526C (en) * 1997-11-07 2006-12-05 Simonds Industries, Inc. Method for variably controlling work feed rate for cutting wood, metal and other materials
US7118446B2 (en) * 2003-04-04 2006-10-10 Strasbaugh, A California Corporation Grinding apparatus and method
DE102013202442B4 (de) * 2013-02-14 2014-09-25 Hilti Aktiengesellschaft Verfahren zur Steuerung eines Gerätesystems mit einem Werkzeuggerät und einer motorischen Vorschubeinrichtung
DE102016111545A1 (de) 2016-06-23 2017-12-28 Keuro Besitz Gmbh & Co. Edv-Dienstleistungs Kg Sägemaschine und Führungseinrichtung für ein Sägeband oder Sägeblatt einer Sägemasschine
CN106827261A (zh) * 2017-03-21 2017-06-13 刘合融 原石器皿的制作方法及由该方法制得的原石器皿
US11504869B2 (en) * 2019-03-06 2022-11-22 Tokyo Seimitsu Co., Ltd. Workpiece processing device and method
WO2020179790A1 (ja) 2019-03-06 2020-09-10 株式会社東京精密 ワーク加工装置及び方法
CN112605468A (zh) * 2020-11-17 2021-04-06 肇庆高峰机械科技有限公司 磁材切片机

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1502455A1 (de) * 1964-02-04 1969-06-26 Inm Ind Corp Trennschneidscheibenanordnung und Verfahren zur Herstellung derselben
CH527014A (de) * 1970-08-07 1972-08-31 Meyer & Burger Ag Maschf Spannvorrichtung für ein Innen-Trennsägeblatt
JPS541961Y2 (de) * 1974-07-15 1979-01-27
US4502459A (en) * 1982-10-04 1985-03-05 Texas Instruments Incorporated Control of internal diameter saw blade tension in situ
JPS6198513A (ja) * 1984-10-19 1986-05-16 日立金属株式会社 切断装置
JPS61122811A (ja) * 1984-11-16 1986-06-10 株式会社ドリーム総合研究所 マツトレス
JPS62225308A (ja) * 1986-03-27 1987-10-03 古河電気工業株式会社 内周刃切断装置
DE3640645A1 (de) * 1986-11-28 1988-06-09 Wacker Chemitronic Verfahren zum zersaegen von kristallstaeben oder -bloecken vermittels innenlochsaege in duenne scheiben
JPS63312812A (ja) * 1987-06-16 1988-12-21 Sumitomo Metal Ind Ltd 硬脆材料の切断方法
JPH01110105A (ja) * 1987-10-23 1989-04-26 Sumitomo Metal Ind Ltd 硬脆材料の切断方法
DE3884903T2 (de) * 1987-10-29 1994-02-10 Tokyo Seimitsu Co Ltd Vorrichtung und Verfahren zum Abschneiden einer Halbleiterscheibe.
JPH0671727B2 (ja) * 1988-01-18 1994-09-14 マツダ株式会社 スライシングマシンおよびその制御方法
JPH02108507A (ja) * 1988-10-18 1990-04-20 Nippon Steel Corp 石材薄板の切出し方法及び装置
JP2598314B2 (ja) * 1988-11-14 1997-04-09 住友シチックス株式会社 硬脆材料の切断装置
DE3906091A1 (de) * 1989-02-27 1990-08-30 Wacker Chemitronic Verfahren zum zersaegen von stabfoermigen werkstuecken in scheiben mittels innenlochsaege, sowie innenlochsaegen zu seiner durchfuehrung
JPH06198513A (ja) * 1993-01-05 1994-07-19 Amada Co Ltd 丸鋸盤

Also Published As

Publication number Publication date
DE69104766D1 (de) 1994-12-01
EP0456223B1 (de) 1994-10-26
EP0456223A1 (de) 1991-11-13
EP0610967A3 (de) 1995-08-02
JPH04211909A (ja) 1992-08-03
KR910019738A (ko) 1991-12-19
DE69133239T2 (de) 2003-10-30
KR970009143B1 (ko) 1997-06-07
JP2505930B2 (ja) 1996-06-12
US5174270A (en) 1992-12-29
US5287843A (en) 1994-02-22
EP0610967A2 (de) 1994-08-17
EP0610967B1 (de) 2003-04-16
DE69104766T2 (de) 1995-03-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee