DE60328302D1 - Zusammensetzung zum bilden eines siliziumfilms und verfahren zum bilden eines siliziumfilms - Google Patents

Zusammensetzung zum bilden eines siliziumfilms und verfahren zum bilden eines siliziumfilms

Info

Publication number
DE60328302D1
DE60328302D1 DE60328302T DE60328302T DE60328302D1 DE 60328302 D1 DE60328302 D1 DE 60328302D1 DE 60328302 T DE60328302 T DE 60328302T DE 60328302 T DE60328302 T DE 60328302T DE 60328302 D1 DE60328302 D1 DE 60328302D1
Authority
DE
Germany
Prior art keywords
making
silicon film
composition
silicon
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60328302T
Other languages
English (en)
Inventor
Yasuo Matsuki
Haruo Iwasawa
Hitoshi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002243004A external-priority patent/JP4016419B2/ja
Priority claimed from JP2002376019A external-priority patent/JP2004204094A/ja
Application filed by JSR Corp filed Critical JSR Corp
Application granted granted Critical
Publication of DE60328302D1 publication Critical patent/DE60328302D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/10—Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02—Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B7/00—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions
    • C30B7/005—Epitaxial layer growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H01L21/02601—Nanoparticles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
    • H01L21/02686—Pulsed laser beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Silicon Compounds (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE60328302T 2002-08-23 2003-08-15 Zusammensetzung zum bilden eines siliziumfilms und verfahren zum bilden eines siliziumfilms Expired - Lifetime DE60328302D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002243004A JP4016419B2 (ja) 2002-08-23 2002-08-23 シリコン膜形成用組成物およびシリコン膜の形成方法
JP2002376019A JP2004204094A (ja) 2002-12-26 2002-12-26 シリコン膜形成用組成物およびシリコン膜の形成方法
PCT/JP2003/010380 WO2004019393A1 (ja) 2002-08-23 2003-08-15 シリコン膜形成用組成物およびシリコン膜の形成方法

Publications (1)

Publication Number Publication Date
DE60328302D1 true DE60328302D1 (de) 2009-08-20

Family

ID=31949569

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60328302T Expired - Lifetime DE60328302D1 (de) 2002-08-23 2003-08-15 Zusammensetzung zum bilden eines siliziumfilms und verfahren zum bilden eines siliziumfilms

Country Status (8)

Country Link
US (1) US7473443B2 (de)
EP (1) EP1551057B1 (de)
KR (1) KR20050026692A (de)
CN (1) CN100423197C (de)
AU (1) AU2003262236A1 (de)
DE (1) DE60328302D1 (de)
TW (1) TW200418724A (de)
WO (1) WO2004019393A1 (de)

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US6599631B2 (en) 2001-01-26 2003-07-29 Nanogram Corporation Polymer-inorganic particle composites
US7226966B2 (en) 2001-08-03 2007-06-05 Nanogram Corporation Structures incorporating polymer-inorganic particle blends
EP1284306B1 (de) * 2001-08-14 2011-08-03 JSR Corporation Silanzusammensetzung, Verfahren zum Herstellen eines Siliziumfilms und einer Solarzelle
US7879696B2 (en) * 2003-07-08 2011-02-01 Kovio, Inc. Compositions and methods for forming a semiconducting and/or silicon-containing film, and structures formed therefrom
US7276385B1 (en) 2003-11-24 2007-10-02 Kovio, Inc. Methods of laser repairing a circuit, compositions and equipment for such methods, and structures formed from such methods
US7294449B1 (en) 2003-12-31 2007-11-13 Kovio, Inc. Radiation patternable functional materials, methods of their use, and structures formed therefrom
CN1981368B (zh) * 2004-07-16 2011-08-17 国立大学法人东北大学 半导体装置的处理液及处理方法
US7485691B1 (en) 2004-10-08 2009-02-03 Kovio, Inc Polysilane compositions, methods for their synthesis and films formed therefrom
JP5888831B2 (ja) * 2005-10-05 2016-03-22 シン フィルム エレクトロニクス エーエスエー 架橋済みポリマー及びその製造方法
RU2404287C2 (ru) * 2006-07-07 2010-11-20 СИЛИКА ТЕК, ЭлЭлСи Установка плазменного осаждения и способ получения поликристаллического кремния
US7709307B2 (en) 2006-08-24 2010-05-04 Kovio, Inc. Printed non-volatile memory
EP2087529A2 (de) * 2006-11-15 2009-08-12 Innovalight, Inc. Verfahren zur herstellung eines verdichteten nanopartikel-dünnfilms mit einem satz verstopfter poren
US20090010833A1 (en) * 2006-11-28 2009-01-08 Cima Nano Tech Israel Ltd. Process for producing ultra-fine powder of crystalline silicon
US7776724B2 (en) 2006-12-07 2010-08-17 Innovalight, Inc. Methods of filling a set of interstitial spaces of a nanoparticle thin film with a dielectric material
EP2102901A1 (de) * 2006-12-13 2009-09-23 Innovalight, Inc. Verfahren zur herstellung einer epitaxieschicht auf einem gruppe-iv-halbleitersubstrat
US7781060B2 (en) * 2006-12-19 2010-08-24 Nanogram Corporation Hollow silica nanoparticles as well as synthesis processes and applications thereof
US7718707B2 (en) 2006-12-21 2010-05-18 Innovalight, Inc. Method for preparing nanoparticle thin films
CN101622319B (zh) 2007-01-03 2013-05-08 内诺格雷姆公司 基于硅/锗的纳米颗粒油墨、掺杂型颗粒、用于半导体应用的印刷和方法
US8968438B2 (en) 2007-07-10 2015-03-03 Innovalight, Inc. Methods and apparatus for the in situ collection of nucleated particles
DE102007050288A1 (de) * 2007-10-18 2009-04-23 Otto Hauser Halbleiterbauteil
US7851336B2 (en) 2008-03-13 2010-12-14 Innovalight, Inc. Method of forming a passivated densified nanoparticle thin film on a substrate
US8247312B2 (en) 2008-04-24 2012-08-21 Innovalight, Inc. Methods for printing an ink on a textured wafer surface
US8500844B2 (en) 2008-05-09 2013-08-06 Cima Nanotech Israel Ltd. Process for producing powders of germanium
US8609799B2 (en) * 2008-05-29 2013-12-17 Ndsu Research Foundation Method of forming functionalized silanes
JP5715141B2 (ja) * 2009-09-21 2015-05-07 ナノグラム・コーポレイションＮａｎｏＧｒａｍ Ｃｏｒｐｏｒａｔｉｏｎ 薄膜太陽電池形成のためのシリコンインク、対応の方法及び太陽電池構造
GB0919830D0 (en) * 2009-11-12 2009-12-30 Isis Innovation Preparation of silicon for fast generation of hydrogen through reaction with water
KR20110077924A (ko) * 2009-12-30 2011-07-07 삼성전자주식회사 태양 전지 및 이의 제조 방법
WO2011094191A1 (en) 2010-01-28 2011-08-04 Ndsu Research Foundation Method of producing cyclohexasilane compounds
US8895962B2 (en) 2010-06-29 2014-11-25 Nanogram Corporation Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods
DE102010037278A1 (de) * 2010-09-02 2012-03-08 Hans Freitag Verfahren zum Herstellen von Silizium-basierenden Schichten oder Silizium-basierenden Strukturen unter Verwendung von Silizium-enthaltenden Tinten
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US8912083B2 (en) 2011-01-31 2014-12-16 Nanogram Corporation Silicon substrates with doped surface contacts formed from doped silicon inks and corresponding processes
JP2012196651A (ja) * 2011-03-23 2012-10-18 Panasonic Corp 静電霧化装置及びその製造方法
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Also Published As

Publication number Publication date
EP1551057A1 (de) 2005-07-06
EP1551057B1 (de) 2009-07-08
AU2003262236A1 (en) 2004-03-11
CN100423197C (zh) 2008-10-01
US7473443B2 (en) 2009-01-06
KR20050026692A (ko) 2005-03-15
CN1579012A (zh) 2005-02-09
TWI307678B (de) 2009-03-21
EP1551057A4 (de) 2006-03-22
US20050145163A1 (en) 2005-07-07
TW200418724A (en) 2004-10-01
WO2004019393A1 (ja) 2004-03-04

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