CN102460674A - Substrate transfer device - Google Patents

Substrate transfer device Download PDF

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Publication number
CN102460674A
CN102460674A CN2010800257699A CN201080025769A CN102460674A CN 102460674 A CN102460674 A CN 102460674A CN 2010800257699 A CN2010800257699 A CN 2010800257699A CN 201080025769 A CN201080025769 A CN 201080025769A CN 102460674 A CN102460674 A CN 102460674A
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CN
China
Prior art keywords
arm
base plate
switching mechanism
transmission device
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800257699A
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Chinese (zh)
Inventor
相泽真也
中尾裕利
吾乡健二
浅石隆
南展史
中村伸悟
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Ulvac Inc
Original Assignee
Ulvac Inc
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Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN102460674A publication Critical patent/CN102460674A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

Provided is a substrate transfer device wherein the thickness of a mechanism portion to linearly move a substrate can be reduced. The substrate transfer device is comprised of a drive portion (2), a pair of common arms (11a, 11b) coupled to the drive portion (2), a pair of operation arms (12a, 12b) coupled to the common arms, a carrier (14), and a conversion mechanism portion (13). The conversion mechanism portion (13) converts rotational movements of the arms to a linear movement of the carrier (14). The conversion mechanism portion (13) is comprised of a pair of shaft members (131a, 131b) and ring portions (42a, 42b) formed in the tips of the operation arms (12a, 12b). The ring portion rotates about the shaft member. Gear portions (50a, 50b) are formed on the outer peripheral surfaces of the ring portions, and are engaged with each other to rotate the ring portions in conjunction with each other. Bearing members (60a, 60b) are disposed between the ring portions and the shaft portions. The bearing portions and the gear portions are arranged so as to be opposed to each other in the radial directions of the shaft members.

Description

Base plate transmission device
Technical field
The present invention relates to a kind of base plate transmission device that transferring semiconductor substrate, glass substrate etc. are processed substrate that is used for.
Background technology
In recent years, known have a kind of multichamber type vacuum treatment installation, and it disposes a plurality of process chambers around transfer chamber.Be provided with the base plate transmission device that is used for sending into automatically and/or seeing off to chambers substrate in this vacuum treatment installation from transfer chamber.
Record the manipulator of transmission base plate in vacuum chamber in the following patent documentation 1.This manipulator has a pair of two arms that link together, and comes support bearing that a loading plate that is transmitted thing is arranged through a pair of arm, and drives said a pair of arm simultaneously and transmit and be transmitted thing.And said manipulator has as making loading plate do the rotation limiting mechanism portion of straight-line member, and this rotation limiting mechanism portion comprises the gear that combines respectively with an end of each loading plate side of a pair of arm of support bearing plate.
In recent years, the multichamber type vacuum treatment installation is a purpose to improve exhaust efficiency in the process chamber, to reduce variations in temperature in the process chamber etc., has the tendency of the opening of the narrow transmission base plate of between transfer chamber and process chamber formation.Therefore, need carry out slimming to the distal portion of the base plate transmission device through said opening.Therefore, in the said manipulator, make single-stage, realize rotating the slimming of limiting mechanism portion through the bearing that will support each said gear.
[prior art document]
Patent documentation
Patent documentation 1: TOHKEMY 2000-317877 communique (paragraph [0021], Fig. 3)
Summary of the invention
Yet there is following problem in the manipulator of being put down in writing in the patent documentation 1: said gear disposes with the mode of the bearing that supports said gear with stack on their axis direction, has caused restriction therefore for the slimming of rotation limiting mechanism.
In view of above situation, the object of the present invention is to provide a kind of base plate transmission device, it can realize the slimming of portion of mechanism, this portion of mechanism is used to make the substrate rectilinear motion.
In order to reach said purpose, the base plate transmission device of execution mode of the present invention is a kind of base plate transmission device of transmission base plate, and it comprises drive division, a pair of the first arm, a pair of second arm, loading plate and switching mechanism.
The second end that said a pair of the first arm has the first end that is connected with said drive division respectively and is positioned at the opposition side of said first end.
Said a pair of second arm has the 3rd end and the 4th end respectively; Said the 3rd end is installed on the said the second end of said the first arm with rotating freely, and said the 4th end is positioned at the opposition side of said the 3rd end, and comprises the circular ring portion that is formed with gear part on the outer peripheral face.In said a pair of second arm, said the 4th end is meshing with each other via said gear part.
Said loading plate supports said substrate.
Said switching mechanism is disposed between said the 4th end and said loading plate of said second arm, converts rotatablely moving of the said the first arm and second arm rectilinear motion of said loading plate into.Said switching mechanism comprises main body and bearing components.Said main body has faying face and insertion that combines with said loading plate and a pair of axial region that passes through each said ring portion.Said bearing components is installed in respectively between the inner peripheral surface of outer peripheral face and said ring portion of said axial region, on the diametric(al) of said axial region, arranges side by side with said gear part.
Description of drawings
The stravismus sketch map that the base plate transmission device that Fig. 1 relates to for execution mode of the present invention is looked sideways from the top;
The stravismus sketch map that Fig. 2 looks sideways from the below for said base plate transmission device;
Fig. 3 is the elevational schematic view of the switching mechanism portion periphery of said base plate transmission device;
Fig. 4 is the stravismus sketch map of the switching mechanism portion periphery of said base plate transmission device;
Fig. 5 is the generalized section of the switching mechanism portion of said base plate transmission device; And
Fig. 6 is the summary generalized section of major part with vacuum treatment installation of said base plate transmission device.
Description of reference numerals
1 base plate transmission device
2 drive divisions
8 vacuum treatment installations
10,20 transmission manipulators
12a, 12b, 22a, 22b working arm
13,23 switching mechanism portions
13,24 loading plates
30a, 30b principal arm member
40a, 40b auxiliary arm member
42a, 42b ring portion
50a, 50b gear part
60a, 60b bearing components
80 transfer chambers
81 vacuum processing chambers
The 81w opening
82 gate valves
130 main bodys
131a, 131b shaft component
134 faying faces
The W substrate
Embodiment
The base plate transmission device that execution mode of the present invention relates to is a kind of base plate transmission device of transmission base plate, and it comprises drive division, a pair of the first arm, a pair of second arm, loading plate and switching mechanism.
The second end that said a pair of the first arm has the first end that is connected with said drive division respectively and is positioned at the opposition side of said first end.
Said a pair of second arm has the 3rd end and the 4th end respectively; Said the 3rd end is installed on the said the second end of said the first arm with rotating freely, and said the 4th end is positioned at the opposition side of said the 3rd end, and comprises the circular ring portion that is formed with gear part on the outer peripheral face.In said a pair of second arm, said the 4th end is meshing with each other via said gear part.
Said loading plate supports said substrate.
Said switching mechanism is disposed between said the 4th end and said loading plate of said second arm, converts rotatablely moving of the said the first arm and second arm rectilinear motion of said loading plate into.Said switching mechanism comprises main body and bearing components.Said main body has faying face and insertion that combines with said loading plate and a pair of axial region that passes through each said ring portion.Said bearing components is installed in respectively between the inner peripheral surface of outer peripheral face and said ring portion of said axial region, on the diametric(al) of said axial region, arranges side by side with said gear part.
In said switching mechanism, the axial region of main body constitutes the rotating shaft of each ring portion.A pair of ring portion is meshing with each other via the gear part of the outer peripheral face that is formed at them, and the inner peripheral surface of each ring portion is supported in axial region via bearing components.Through this switching mechanism, will convert the rectilinear motion of loading plate into by the first arm and the rotatablely moving of second arm that drive division carries out.
In said base plate transmission device, the gear part and the bearing components that constitute switching mechanism are relatively arranged respectively on the diametric(al) of axial region side by side.Therefore, with the direction of principal axis of the axial region of said switching mechanism during, on said thickness direction, compare, can dwindle the thickness of switching mechanism with the situation that the mode of stack disposes with gear part and bearing components as thickness direction.Thus, can realize the slimming of switching mechanism.
Said second arm also can comprise first member and second member.Said first member is connected in said the first arm, and has said the 3rd end.Said second member is installed on said first member, and has said the 4th end.
Thus, the part of said switching mechanism can be each said ring portion constituted, thereby the assembleability of base plate transmission device can be improved with slim switching mechanism.
In the execution mode of the present invention, with the direction of principal axis of said axial region during as thickness direction, the thickness of said switching mechanism is made as below the thickness of said first member.And the thickness of said the 4th end side of said first member is less than said the 3rd end portion thickness of said first member.
Thus, can or comprise that the remote area of second arm of switching mechanism constitutes thinner than the 3rd end side with switching mechanism.
And in the execution mode of the present invention, said main body has first parallel with the direction of rotation of said the first arm and said second arm respectively and is positioned at second of said first below.In this case, said a pair of axial region and said faying face are formed in said second.The thickness that thus, can suppress to comprise the switching mechanism of loading plate increases.
Below, with reference to accompanying drawing execution mode of the present invention is described.
[whole formation]
Fig. 1 and Fig. 2 are for representing the stravismus sketch map of the base plate transmission device that execution mode of the present invention relates to.At this, the stravismus sketch map that Fig. 1 sees from the top for base plate transmission device 1, Fig. 2 is for seeing the stravismus sketch map of base plate transmission device 1 from the below.Among Fig. 2, omitted the diagram of loading plate.Among the figure, x axle and y axle are orthogonal trunnion axis, the corresponding horizontal plane in xy plane.And the z axle is the vertical axis with x axle and y axle quadrature.
The base plate transmission device 1 that this execution mode relates to constitutes the base plate transmission device with first transmission manipulator 10 and second transmission manipulator 20.First transmission manipulator 10 mainly is made up of a pair of public arm 11a, 11b (the first arm), a pair of first working arm 12a, 12b (second arm), switching mechanism portion 13 and loading plate 14.Second transmission manipulator 20 mainly is made up of a pair of public arm 11a, 11b, a pair of second working arm 22a, 22b (second arm), switching mechanism portion 23 and loading plate 24.
Base plate transmission device 1 is arranged at the for example inside of the transfer chamber of multichamber type vacuum treatment installation.Said vacuum treatment installation has a plurality of vacuum processing chambers around transfer chamber.These vacuum processing chambers comprise sends into and/or sees off being written into of substrate/relief chamber, film forming room's (various process chambers such as spraying plating chamber, chemical vapour deposition (CVD) (Chemical VaporDeposition, CVD) chamber etc.), thermal chamber.Base plate transmission device 1 is used for for example, being arranged at the bottom (in the xy plane) of transfer chamber at the inside transmission base plate between a plurality of vacuum processing chambers through the transfer chamber of vacuum exhaust.
Base plate transmission device 1, as shown in Figure 1, have drive division 2, this drive division 2 has driving shaft 21.Drive division 2 is arranged at outside the transfer chamber, typically is made up of motor, air cylinder device etc.Driving shaft 21 runs through the bottom of transfer chamber hermetically on the z direction of principal axis, and is connected with each base end part 111a, the 111b (first end) of public arm 11a, 11b.Each base end part 111a, 111b, as shown in the figure, dispose overlappedly.Driving shaft 21, as shown in Figure 2, have the first driving shaft 21a and the second driving shaft 21b that dispose with one heart, the first driving shaft 21a is connected with base end part 111a, and the second driving shaft 21b is connected with base end part 111b.Drive division 2 rotates public arm 11a, 11b or moves up and down at the z direction of principal axis in the xy face.
Public arm 11a, 11b are made up of metal materials such as for example aluminium alloys.The other end (the second end) of public arm 11a, 11b is separately installed with fastening means 3a, 3b.Fastening means 3a, 3b have the first rotating shaft 31a, 31b and the second rotating shaft 32a, 32b; The said first rotating shaft 31a, 31b support the first working arm 12a, 12b rotates freely in the xy plane, and the said second rotating shaft 32a, 32b support the second working arm 22a, 22b rotates freely in the xy plane.
The first working arm 12a, 12b and the second working arm 22a, 22b are made up of metal materials such as for example aluminium alloys.The first working arm 12a, end 121a, 121b (the 3rd end) and the end 122a that is connected with switching mechanism portion 13,122b (the 4th end) that 12b has to be connected with the first rotating shaft 31a, 31b.Switching mechanism portion 13 converts public arm 11a, 11b and the first working arm 12a, 12b rotatablely moving in the xy plane rectilinear motion of loading plate 14 in the xy plane into.Loading plate 14 has the supporting surface 14a that is mounted with glass substrate or semiconductor substrate etc., thereby loading plate 14 gets into transmission base plate in the vacuum processing chamber (not shown).
Likewise, the second working arm 22a, end 221a, 221b (the 3rd end) and the end 222a that is connected with switching mechanism portion 23,222b (the 4th end) that 22b has to be connected with the second rotating shaft 32a, 32b.Switching mechanism portion 23 converts public arm 11a, 11b and the second working arm 22a, 22b rotatablely moving in the xy plane rectilinear motion of loading plate 24 in the xy plane into.Loading plate 24 has the supporting surface 24a that is mounted with glass substrate or semiconductor substrate etc., thereby loading plate 24 gets into transmission base plate in the vacuum processing chamber (not shown ).Loading plate 14,24 can be made up of metal materials such as for example aluminium alloys, and its shape is not limited to the shape shown in the figure.
Switching mechanism portion 13,23 has identical formation respectively.Below, to switching mechanism portion 13 with and periphery constitute and to carry out detailed explanation.And, in following explanation,, respectively first transmission manipulator 10 only is called transmission manipulator 10 for the ease of explanation, the first working arm 12a, 12b only are called working arm 12a, 12b.
[periphery of switching mechanism portion constitutes]
Fig. 3 to Fig. 5 shows the formation of switching mechanism portion 13.At this, the elevational schematic view that Fig. 3 sees from the below for transmission manipulator 10, the stravismus sketch map that Fig. 4 sees from the below for switching mechanism portion 13, the generalized section that Fig. 5 sees from the x direction of principal axis for switching mechanism portion 13.Among Fig. 3 and Fig. 4, omitted the figure of loading plate.
Like Fig. 3 and shown in Figure 4, working arm 12a, 12b are made up of with the combination of auxiliary arm member 40a, 40b (second member) principal arm member 30a, 30b (first member) respectively.Among principal arm member 30a, the 30b, the end of the opposition side of 121a, 121b in the end has and is used to assemble auxiliary arm member 40a, the installing hole 301a of 40b, 301b.
And the following side of principal arm member 30a, 30b is formed with the 302a of rank portion, 302b respectively.Thus; Like Fig. 1 and shown in Figure 2; With the 302a of rank portion, 302b is the boundary, and principal arm member 30a, 30b are different with the thickness of switching mechanism portion 13 sides at the thickness (z direction of principal axis) of public arm 11a, 11b side, form the thin thickness of the thickness of switching mechanism portion 13 sides than public arm 11a, 11b side.And,, can guarantee the rigidity of principal arm member 30a, 30b through increasing the thickness of public arm 11a, 11b.
Auxiliary arm member 40a, 40b constitute the second end 122a, the 122b of working arm 12a, 12b respectively, and be as shown in Figure 5, and auxiliary arm member 40a, 40b have ring portion 42a, the 42b of board 41a, 41b and ring- type.Board 41a, 41b have the rectangular shape that is parallel to the formation of xy plane, insert also through principal arm member 30a, the installing hole 301a of 30b, 301b.Board 41a, 41b are free to slide with respect to installing hole 301a, 301b, can fix through a plurality of securing member S1 (Fig. 1) in certain position.
On the other hand, ring portion 42a, 42b constitute the part of switching mechanism portion 13, make principal arm member 30a, 30b be connected in switching mechanism portion 13.Below, carry out detailed explanation to switching mechanism portion 13.
Switching mechanism portion 13 is as shown in Figure 5, has the metal main body 130 that comprises base portion 133 and a pair of shaft component 131a, 131b.A pair of shaft component 131a, 131b are installed on the following side of base portion 133.
The base portion 133 of main body 130 is as shown in Figure 4, has the faying face 134 that combines with loading plate 14.The thin zone that the downside of base portion 133 forms via the 133s of rank portion, the downside in this thin zone is as faying face 134.Faying face 134 engages with the base portion upper side of loading plate 14 via a plurality of securing member S2 (Fig. 1).
The height (degree of depth) of the 133s of rank portion is set at identical with the base portion thickness of loading plate 14.And, be below thickness by loading plate 14 substrate supported with the thickness setting in the thin zone of the base portion 133 that constitutes faying face 134.
Shaft component 131a, 131b form the cylindrical shape with same diameter respectively.Shaft component 131a, 131b run through auxiliary arm member 40a, the ring portion 42a of 40b, 42b, and are fixed in base portion 133 via securing member 132a, 132b.Be equiped with bearing components 60a, 60b respectively between the inner peripheral surface of the outer peripheral face of shaft component 131a, 131b and ring portion 42a, 42b, make auxiliary arm member 40a, 40b can center on shaft component 131a, 131b rotation.
Bearing components 60a, 60b are made up of single parts of bearings respectively.The kind of parts of bearings does not have special qualification, in this execution mode, uses the parts of bearings of 2 brace types.This parts of bearings can for example be: angle bearing (angular contact ball bearing), comprise vacuum grease as parts of bearings of lubriation material etc.Also can use the parts of bearings of 4 brace types.Bearing components 60a, 60b be clamped in the side-prominent edge part 42c of in the upper end radius vector of ring portion 42a, 42b direction and outside the outer peripheral face radius vector of shaft component 131a, 131b the mode between the side-prominent 131s of rank portion of direction, fix with respect to main body 130.
On the other hand, the outer peripheral face of ring portion 42a, 42b is respectively equipped with gear part 50a, 50b.Each gear part 50a, 50b are meshing with each other, and thus, each ring portion 42a, the mutual interlock of 42b are around shaft component 131a, 131b rotation.That is, each ring portion 42a, 42b rotate with the identical anglec of rotation respectively around shaft component 131a, 131b simultaneously.
In this execution mode, gear part 50a, 50b are made up of the geared parts of the ring-type of the outer peripheral face that is installed in ring portion 42a, 42b respectively.Gear part 50a, 50b can use and for example implement the excellent geared parts of vacuum hardening processing and abrasion performance.Gear part 50a, 50b also can be formed directly on the outer peripheral face of ring portion 42a, 42b.Gear part 50a, 50b are installed in a plurality of securing member 71a, the 72b of the following side of ring portion 42a, 42b through supporting bracket 70a, 70b with ring-type, with supporting bracket 70a, 70b with respect to ring portion 42a, 42b and be fixed.The downside of the downside of supporting bracket 70a, 70b and auxiliary arm member 40a, 40b belongs in the same plane.
As shown in Figure 5, bearing components 60a, 60b and gear part 50a, 50b with clamping ring portion 42a, 42b and on the diametric(al) of shaft component 131a, 131b relative to each other mode and and put.Especially in this execution mode, bearing components 60a, 60b and gear part 50a, 50b are roughly to be positioned at all sides and the outer circumferential side that mode on the same plane is disposed at ring portion 42a, 42b respectively.Thus, compare, can control the gauge that dwindles switching mechanism portion 13 with the formation that these shaft components and gear part dispose with the mode of stack on the direction of principal axis of shaft component.
In the switching mechanism portion 13 that is as above constituted, working arm 12a, 12b rotate the spinning movement that continues public arm 11a, 11b through ring portion 42a, the 42b that makes auxiliary arm member 40a, 40b around shaft component 131a, 131b.At this moment, ring portion 42a, 42b be owing to being meshing with each other via gear part 50a, 50b, so phase mutually synchronization and with opposite direction rotation.Consequently, loading plate 14 straight line around z axle rotation but in the xy plane moves.
First transmission manipulator 10 constitutes like above-mentioned mode.And second transmission manipulator 20 is also to constitute with first transmission manipulator, 10 identical modes.Next, the typical action to this execution mode base plate transmission device 1 of constituting in the above-described manner describes.
[action of base plate transmission device]
Drive division 2 moves loading plate 14,24 straight lines through making the first driving shaft 21a and the second driving shaft 21b rotation round about respectively that constitutes driving shaft 21.That is, in the state shown in Figure 1, from the top, if respectively driving shaft 21a is turned clockwise, driving shaft 21b is rotated counterclockwise, then loading plate 14,24 (x) is moving on the direction respectively.On the contrary,, if respectively driving shaft 21a is rotated counterclockwise, driving shaft 21b is turned clockwise from the top, then loading plate 14,24 respectively (+x) move on the direction.
On the other hand, drive division 2 makes first transmission manipulator 10 and second transmission manipulator 20 around the rotation of z axle through the first driving shaft 21a and the second driving shaft 21b are rotated at equidirectional.And then drive division 2 moves up and down first transmission manipulator 10 and second transmission manipulator 20 through the first driving shaft 21a and the second driving shaft 21b are stretched on the z direction of principal axis.
As stated, loading plate 14,24 moves to locus arbitrarily.Thus, can use loading plate 14,24 from certain transmission location to other transmission locations transmission base plate accurately.
Wherein, in this execution mode base plate transmission device 1, gear part 50a, 50b and bearing components 60a, the 60b that constitutes switching mechanism portion 13,23 with respectively on the diametric(al) of shaft component 131a, 131b relative mode dispose.Therefore, compare, can dwindle the thickness of switching mechanism portion 13,23, can realize the slimming of switching mechanism portion 13,23 with gear part and bearing components stack and the formation that disposes on the z direction of principal axis.The thickness of switching mechanism portion 13,23, as shown in Figure 5, can be suppressed at below the thickness (T) of distal portion of principal arm member 30a that auxiliary arm member 40a, 40b are installed, 30b.
And in this execution mode base plate transmission device 1, working arm 12a, 12b (22a, 22b) are made up of principal arm member 30 and auxiliary arm member 40 these two kinds of members.Thus, the part of switching mechanism portion 13,23 can be auxiliary arm member 40a, the ring portion 42a of 40b, 42b constituted, and the assembleability of base plate transmission device 1 can be improved with slim switching mechanism.
And in this execution mode base plate transmission device 1, the thickness of the end 122a of working arm 12a, 12b (22a, 22b), 122b (222a, 222b) side forms than end 121a, 121b (221a, 221b) side and approaches.Thus, can the remote area of the working arm 12a that comprise switching mechanism portion 13 (23), 12b (22a, 22b) be constituted thinner than end 121a, 121b (221a, 221b) side.
And in this execution mode base plate transmission device 1, the following side of the base portion 133 of switching mechanism portion 13 (23) is combined with loading plate 14 (24).Thus, compare, can the thickness of the loading plate that comprises substrate thickness 14 (24) be suppressed at below the thickness of switching mechanism portion 13 (23) with the situation that loading plate 14 (24) is incorporated into the upper face side of base portion 133.
As stated, according to this execution mode, can constitute the remote area of working arm 12a, 12b (22a, 22b) than unfertile land.Thus, the opening of narrow transmission base plate can be between transfer chamber and vacuum processing chamber, formed, the high vacuum treatment installation of productivity can be constituted.
Fig. 6 has the schematic cross section sketch map of major part of formation example of the substrate board treatment of base plate transmission device 1 for expression.Vacuum treatment installation 8 shown in the figure comprises transfer chamber 80, vacuum processing chamber 81 and is connected in the gate valve 82 between them.Base plate transmission device 1 is arranged at the inside of transfer chamber 80.Vacuum processing chamber 81 and transfer chamber 80 between have the opening 81w that is used to send into substrate W, gate valve 82 has the valve body (omitting in the diagram) that opens and closes opening 81w.In the example shown in the figure, the opening 81w that shows gate valve 82 opens, and the loading plate 14 of base plate transmission device 1 gets into the inside of vacuum processing chamber 81 and sends into the situation of substrate W.
As shown in Figure 6, use this execution mode base plate transmission device 1, compared with prior art can realize the slimming of switching mechanism portion 13, therefore, can the height dimension of opening 81w be constituted littler than of the prior art.For example, use this execution mode, can the thickness of switching mechanism portion 13 be suppressed at below the 14mm.In this case, can the height dimension of opening 81w be set in the scope of 25mm～30mm.
And in this execution mode base plate transmission device 1, it is identical with the gauge of switching mechanism portion 13 that the remote area of working arm 12a, 12b can form.Thus, as shown in Figure 6, the remote area of working arm 12a, 12b is got in the vacuum processing chamber 81, and can improve the operation property of sending into and seeing off of substrate W.
More than be illustrated to execution mode of the present invention, certainly, the present invention is not limited thereto, and on the basis of technological thought of the present invention, can implement various distortion.
For example, in the superincumbent execution mode, for example clear base plate transmission device 1 with first transmission manipulator 10 and second transmission manipulator 20, but the present invention is also applicable to the base plate transmission device that does not possess second transmission manipulator.
And in above execution mode, for example clear have first driving shaft 21a of concentric arrangement and the drive division 2 of the second driving shaft 21b, but also can adopt the twin shaft drive division of the non-concentric arrangement of two driving shafts.In this case, each base end part of a pair of public arm connects with corresponding driving shaft respectively.

Claims (5)

1. the base plate transmission device of a transmission base plate is characterized in that, comprising:
Drive division;
A pair of the first arm, the second end that has the first end that is connected with this drive division respectively and be positioned at the opposition side of this first end;
A pair of second arm has the 3rd end and the 4th end respectively; The 3rd end is installed on this second end of this first arm with rotating freely; The 4th end is positioned at the opposition side of the 3rd end; And comprising that outer peripheral face is formed with the circular ring portion of gear part, in this a pair of second arm, the 4th end is meshing with each other via this gear part;
Loading plate supports this substrate; And
Switching mechanism is disposed between the 4th end and this loading plate of this second arm, convert rotatablely moving of this first arm and this second arm the rectilinear motion of this loading plate into, and this switching mechanism comprises main body and bearing components; This main body has faying face and the insertion that combines with this loading plate and passes through the respectively a pair of axial region of this ring portion; This bearing components is installed in respectively between the inner peripheral surface of outer peripheral face and this ring portion of this axial region, and on the diametric(al) of this axial region, arranges side by side with this gear part.
2. base plate transmission device according to claim 1 is characterized in that, said second arm comprises:
First member is connected in said the first arm, and has said the 3rd end; And
Second member is installed on this first member, and has said the 4th end.
3. base plate transmission device according to claim 2 is characterized in that said switching mechanism has thickness direction on the direction of principal axis of said axial region, and the thickness of this switching mechanism is below the thickness of said first member.
4. base plate transmission device according to claim 3 is characterized in that, the thickness of said the 4th end side of said first member is less than said the 3rd end portion thickness of said first member.
5. base plate transmission device according to claim 4 is characterized in that, said main body has first parallel with the direction of rotation of said the first arm and said second arm respectively and is positioned at second of this below of first;
Said a pair of axial region and said faying face are respectively formed in this second.
CN2010800257699A 2009-06-15 2010-06-15 Substrate transfer device Pending CN102460674A (en)

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JP2009-141935 2009-06-15
PCT/JP2010/003978 WO2010146840A1 (en) 2009-06-15 2010-06-15 Substrate transfer device

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JP2013049113A (en) * 2011-08-31 2013-03-14 Yaskawa Electric Corp Robot arm structure, and robot

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Application publication date: 20120516