Jia et al., 2024 - Google Patents

Characterization and Correction of Multipole Field Effect on Electron Beams from a High-Brightness Continuous-Wave Photocathode Gun

Jia et al., 2024

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Document ID
7300784109136631244
Author
Jia H
Li T
Liu J
Liu Z
Zhang X
Li J
Liu K
Tsai C
Xu H
Huang S
Publication year

External Links

Snippet

Continuous-wave photocathode guns are capable of delivering electron beams with high repetition rates and high average currents. However, they are limited by relatively low accelerating gradients and cathode fields. This limitation leads to a larger beam size at the …
Continue reading at www.preprints.org (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

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