Feng et al., 2010 - Google Patents
Low voltage nanoelectromechanical switches based on silicon carbide nanowiresFeng et al., 2010
View PDF- Document ID
- 5345779147677937398
- Author
- Feng X
- Matheny M
- Zorman C
- Mehregany M
- Roukes M
- Publication year
- Publication venue
- Nano letters
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Snippet
We report experimental demonstrations of electrostatically actuated, contact-mode nanoelectromechanical switches based on very thin silicon carbide (SiC) nanowires (NWs). These NWs are lithographically patterned from a 50 nm thick SiC layer heteroepitaxially …
- 229910010271 silicon carbide 0 title abstract description 171
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