Chen et al., 2013 - Google Patents

Effects of mass layer imperfect bonding on the electrical impedance of a quartz crystal microbalance

Chen et al., 2013

Document ID
3388410088482393556
Author
Chen Y
Wang J
Du J
Yang J
Publication year
Publication venue
Science China Physics, Mechanics and Astronomy

External Links

Snippet

We study electrically forced vibrations of a crystal plate of AT-cut quartz carrying a thin mass layer operating as a quartz crystal microbalance for mass sensing. The mass layer is imperfectly bonded to the crystal plate with their interface described by the so-called …
Continue reading at link.springer.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02818—Density, viscosity
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02039—Characteristics of piezoelectric layers, e.g. cutting angles consisting of a material from the crystal group 32, e.g. langasite, langatate, langanite
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer

Similar Documents

Publication Publication Date Title
Li et al. Excitation and propagation of shear horizontal waves in a piezoelectric layer imperfectly bonded to a metal or elastic substrate
Ma et al. Resonances and energy trapping in AT-cut quartz resonators operating with fast shear modes driven by lateral electric fields produced by surface electrodes
Zhang et al. Sensitivity analysis of multi-layered C-axis inclined zigzag zinc oxide thin-film resonators as viscosity sensors
Liu et al. Transient thickness-shear vibration of a piezoelectric plate of monoclinic crystals
Li et al. Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators
Liu et al. Effects of a mass layer with gradually varying thickness on a quartz crystal microbalance
Du et al. Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes
Zhang et al. Thickness-shear vibration of AT-cut quartz plates carrying finite-size particles with rotational degree of freedom and rotatory inertia [Correspondence]
Schmitt et al. Bulk acoustic wave modes in quartz for sensing measurand-induced mechanical and electrical property changes
Bardong et al. Precise measurements of BAW and SAW properties of langasite in the temperature range from 25° C to 1000° C
Chen et al. Shear-horizontal waves in a rotated Y-cut quartz plate with an imperfectly bonded mass layer
Chen et al. Effects of mass layer imperfect bonding on the electrical impedance of a quartz crystal microbalance
Liu et al. Effect of a biasing electric field on the propagation of symmetric Lamb waves in piezoelectric plates
Chen et al. Five-mode frequency spectra of x 3-dependent modes in AT-cut quartz resonators
Shah et al. Modeling and electrode design optimizations of plano-plano langasite crystal resonator
Gu et al. Effects of the imperfect interface and viscoelastic loading on vibration characteristics of a quartz crystal microbalance
Kong et al. Effects of mass layer dimension on a finite quartz crystal microbalance
Zhang et al. Electroelastic effect of thickness mode langasite resonators
Sun et al. Effect of c-axis tilted orientation ZnO thin film on shear-mode bulk acoustic resonator in liquid environment
He et al. Scalar differential equation for slowly-varying thickness-shear modes in AT-cut quartz resonators with surface impedance for acoustic wave sensor application
Cao et al. Quasi-thickness-shear waves in thin-film piezoelectric resonators of ZnO and AlN with tilted C-axis
Zhang et al. Electrically forced vibration of a rectangular piezoelectric plate of monoclinic crystals
Zhu et al. Thickness-twist and face-shear waves in piezoelectric plates of monoclinic crystals
Kosinski et al. Stress-induced frequency shifts in langasite thickness-mode resonators
Chen et al. Higher-order overtone thickness-shear vibrations of multilayered thin-film acoustic wave resonators and angular rate sensing