Du et al., 2009 - Google Patents

Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes

Du et al., 2009

Document ID
17848638142983813628
Author
Du J
Xian K
Wang J
Yang J
Publication year
Publication venue
Ultrasonics

External Links

Snippet

We perform a theoretical analysis of thickness vibrations in piezoelectric plates of crystals with 6mm symmetry. The six-fold axis is tilted with respect to the plate surfaces. The major surfaces of the plate are covered with two layers of electrodes of different metals. The …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezo-electric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezo-electric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezo-electric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezo-electric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports

Similar Documents

Publication Publication Date Title
Chen et al. The effective electromechanical coupling coefficient of piezoelectric thin-film resonators
Du et al. Thickness vibration of piezoelectric plates of 6 mm crystals with tilted six-fold axis and two-layered thick electrodes
Ma et al. Resonances and energy trapping in AT-cut quartz resonators operating with fast shear modes driven by lateral electric fields produced by surface electrodes
Zhu et al. Wave propagation in piezoelectric layered structures of film bulk acoustic resonators
Zhao et al. Energy trapping of thickness-extensional modes in thin film bulk acoustic wave filters
Milyutin et al. Shear mode bulk acoustic wave resonator based on c-axis oriented AlN thin film
Kinoshita et al. Theoretical and experimental study of shear mode bulk acoustic wave transformer based on c-axis zigzag ScAlN multilayer for rectenna application
Li et al. Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators
Sekimoto et al. High-order mode bulk acoustic wave resonators based on polarity-inverted SiAlN/AlN multilayered films for high-frequency operation
Liu et al. Long thickness-extensional waves in thin film bulk acoustic wave filters affected by interdigital electrodes
He et al. Analysis of a monolithic crystal plate acoustic wave filter
Laidoudi et al. Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor
Ralib et al. Piezoelectric thin films for double electrode CMOS MEMS surface acoustic wave (SAW) resonator
Liu et al. An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode
Qin et al. Mass sensitivity of thin film bulk acoustic resonator sensors based on polar c-axis tilted zinc oxide and aluminum nitride thin film
Zhao et al. Mode couplings in high-frequency thickness-extensional vibrations of ZnO thin film resonator based on weak boundary condition
Zhao et al. Predictions of dynamic multimode-coupling and high-frequency vibrations in magneto-electro-elastic heterostructures
Schmitt et al. Bulk acoustic wave modes in quartz for sensing measurand-induced mechanical and electrical property changes
Li et al. Effects of mode couplings on the vibration characteristics of partially electroded thin-film bulk acoustic wave resonators
Han et al. Effect on coupling coefficient of diamond-based surface acoustic wave devices using two layers of piezoelectric materials of different widths
Ostrovskii et al. Domain resonance in two-dimensional periodically poled ferroelectric resonator
Cao et al. Quasi-thickness-shear waves in thin-film piezoelectric resonators of ZnO and AlN with tilted C-axis
Liu et al. Effect of a biasing electric field on the propagation of symmetric Lamb waves in piezoelectric plates
Sun et al. Effect of c-axis tilted orientation ZnO thin film on shear-mode bulk acoustic resonator in liquid environment
Ralib et al. Silicon compatible Acoustic wave resonators: Design, fabrication and performance