Kwon et al., 2009 - Google Patents

Frequency tuning of nanowire resonator using electrostatic spring effect

Kwon et al., 2009

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Document ID
13191596285229106768
Author
Kwon J
Choi J
Kim K
Sim J
Kim J
Kim J
Publication year
Publication venue
IEEE transactions on magnetics

External Links

Snippet

We have demonstrated resonant frequency tuning of nanowire resonator operated in both atmospheric circumstance and high vacuum environment using electrostatic spring- softening effect. The nanowire is synthesized at any desired position by focused ion beam …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of micro-electro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2457—Clamped-free beam resonators
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H9/02338—Suspension means

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