Filipovic et al., 2015 - Google Patents

Processing of integrated gas sensor devices

Filipovic et al., 2015

View PDF
Document ID
11537684407680161836
Author
Filipovic L
Selberherr S
Publication year
Publication venue
TENCON 2015-2015 IEEE Region 10 Conference

External Links

Snippet

The integration of gas sensor components into wearable electronics will provide individuals the ability to detect harmful chemicals and pollutants in the environment. The key to this integration is the development of processing techniques for the fabrication of sensor …
Continue reading at www.iue.tuwien.ac.at (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
    • G01N27/04—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—Specially adapted to detect a particular component
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Similar Documents

Publication Publication Date Title
Young et al. Multi-walled carbon nanotubes decorated with silver nanoparticles for acetone gas sensing at room temperature
Smith et al. Resistive graphene humidity sensors with rapid and direct electrical readout
CN109682863B (en) TMDCs-SFOI heterojunction-based gas sensor and preparation method thereof
Bejaoui et al. Theoretical and experimental study of the response of CuO gas sensor under ozone
EP2762866B1 (en) CMOS gas sensor and method for manufacturing the same
CN104914138A (en) Humidity sensor, humidity sensor array and preparation method thereof
Filipovic et al. System-on-chip SMO gas sensor integration in advanced CMOS technology
US20150210532A1 (en) Mems gas sensing device
Das et al. Enhanced response of co-planar MEMS microheater-based methane gas sensor
Omran et al. Design and fabrication of capacitive interdigitated electrodes for smart gas sensors
Lu et al. A bifacial SnO 2 thin-film ethanol gas sensor
Bendahan et al. Morphology, electrical conductivity, and reactivity of mixed conductor CuBr films: development of a new ammonia gas detector
Fobelets et al. Ammonia sensing using arrays of silicon nanowires and graphene
Oh et al. In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes
Filipovic et al. Processing of integrated gas sensor devices
KR102014069B1 (en) Fabrication method of graphene reference electrode
Sinha et al. Fabrication, characterization, and modeling of an aluminum oxide-gate ion-sensitive field-effect transistor-based pH sensor
KR20120126977A (en) CNT-based three electrode system, fabrication of the same and electrochemical biosensor using the same
Arakelyan et al. Room temperature gas sensor based on porous silicon/metal oxide structure
Zhao et al. Schottky Contacts Regularized Linear Regression for Signal Inconsistency Circumvent in Resistive Gas Micro‐Nanosensors
RU2659903C1 (en) Method for forming the sensor structure of gaseous toxic substances based on graphene films
Bakharev et al. The effect of the periodic boundary conditions of a ZnO-coated nanospring on its surface redox-induced electrical response
Filipovic et al. System-on-chip sensor integration in advanced CMOS technology
Preiss et al. Comparative study of large area pulsed laser deposited metal oxides for gas sensors applications
Filipovic et al. Stress in three-dimensionally integrated sensor systems