WO2021085846A1 - Electropolishing apparatus - Google Patents

Electropolishing apparatus Download PDF

Info

Publication number
WO2021085846A1
WO2021085846A1 PCT/KR2020/012357 KR2020012357W WO2021085846A1 WO 2021085846 A1 WO2021085846 A1 WO 2021085846A1 KR 2020012357 W KR2020012357 W KR 2020012357W WO 2021085846 A1 WO2021085846 A1 WO 2021085846A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
jig
workpiece
electrolytic polishing
work
Prior art date
Application number
PCT/KR2020/012357
Other languages
French (fr)
Korean (ko)
Inventor
미첼 빅토르 강
Original Assignee
주식회사 더블유에스지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 더블유에스지 filed Critical 주식회사 더블유에스지
Publication of WO2021085846A1 publication Critical patent/WO2021085846A1/en

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/16Polishing
    • C25F3/22Polishing of heavy metals
    • C25F3/24Polishing of heavy metals of iron or steel
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • C25F7/02Regeneration of process liquids

Definitions

  • the present invention relates to an electrolytic polishing apparatus, and more particularly, to an electrolytic polishing apparatus used for surface treatment of an inner surface of a stainless steel tube.
  • Surface treatment technologies such as mechanical processing or electropolishing processing are technologies that physically or chemically attach metals and non-metals or change surface properties in order to improve the aesthetics and durability of materials and parts, or to impart functionality.
  • electro-polishing is required, which is a non-contact polishing method that has escaped from the contact method's inner and outer surface polishing machining method.
  • Electrolytic polishing is applied to various industrial fields that require both surface precision and cleanliness, such as semiconductor manufacturing equipment, food hygiene equipment, medical equipment, ultrapure water manufacturing equipment, high purity gas containers, precision molds and nuclear equipment.
  • Electrolytic polishing is a polishing method using an electro-chemical reaction, and is a polishing method that improves surface smoothness, glossiness, corrosion resistance, etc. by using metal elution from the surface of the anode by using the workpiece as the anode and the electrode as the cathode.
  • Electrolytic polishing is basically a processing method that utilizes the elution of metal, and when this method is used, current is concentrated in the protruding portion of the anodized layer, so that the polishing through metal melting proceeds rapidly.
  • stainless steel tubes containing about 10 to 11% chromium have characteristics such as corrosion resistance, high hardness, low maintenance cost, low cost, and high gloss, so they are suitable to be applied as Bio Processing Equipment (BPE) standard stainless steel tubes. It can be used in various industrial fields such as semiconductors, food and beverages, and automobiles.
  • BPE Bio Processing Equipment
  • an electrolytic polishing method is more suitable than mechanical polishing, and it is necessary to develop a non-contact surface-treated metal electrode for this.
  • Conventional Korean Patent Publication No. 10-2014-0002964 relates to an electrode for electrolytic polishing of tubes and pipes, and provides a front electrode, middle electrode, rear electrode, and guide to reduce defects caused by electrode during electrolytic polishing.
  • An object of the present invention is to provide a non-contact surface treatment electrolytic polishing apparatus having excellent electrical conductivity capable of forming an optimal chromium oxide thin film upon surface treatment of a stainless steel tube.
  • An electrolytic polishing apparatus for solving the above problem includes an electrolytic cell in which a workpiece to be electropolished and an accommodation space for receiving an electrolyte are provided therein, and the workpiece is fixed at one end of the workpiece.
  • a positive electrode jig provided so as to be provided, an electrode rod disposed spaced apart from the work piece at a predetermined interval, a negative electrode jig provided at one end of the electrode rod so that the electrode rod may be spaced apart from the work piece, and a current in the positive electrode jig and the negative electrode jig It is configured to include a rectifier to supply.
  • the electrolyte is characterized in that it is a mixture of sulfuric acid, phosphoric acid and ultrapure water.
  • a circulation pump for circulating the electrolyte in the electrolytic cell is further provided.
  • the electrolytic polishing apparatus has an effect of providing a non-contact surface treatment electrolytic polishing apparatus having excellent electrical conductivity through an electrolyte solution, an electrolytic bath, a negative electrode jig, a positive electrode jig, an electrode, and a power supply unit.
  • FIG. 1 shows a conceptual diagram according to an embodiment of an electrolytic polishing apparatus according to the present invention.
  • FIG. 2 is a conceptual diagram showing a stainless tube polishing step according to an embodiment of the electrolytic polishing apparatus according to the present invention.
  • 3 shows the surface roughness of the stainless steel tube according to the current density during electropolishing, and shows that the surface roughness decreases as the current density increases.
  • FIG. 5 shows the surface roughness according to the temperature of the surface treatment solution during electropolishing, and shows a trend of decreasing the surface roughness as the temperature increases, but shows that the surface roughness increases at a temperature of the surface treatment solution above a certain temperature. will be.
  • the electrolytic polishing apparatus includes an electrolytic cell 1 in which a receiving space for receiving an electrolytic polishing object (A) and an electrolyte solution 2 is provided therein, and the work ( A positive electrode jig provided to fix the work (A) at one end of A), an electrode (3) spaced apart from the work (A) at a predetermined interval, and the electrode (3) is the work (A)
  • a negative electrode jig provided at one end of the electrode rod 3 so as to be spaced apart from the electrode 3 may include a rectifier supplying current to the positive electrode jig and the negative electrode jig.
  • the electrolyzer 1 may be configured with an accommodation space in which the work A and the electrolyte 2 are accommodated.
  • the workpiece (A) is placed on the positive electrode using an electrochemical reaction, and the low electrode rod is placed on the negative electrode to improve surface smoothness, gloss, and corrosion resistance by using metal elution from the surface of the positive electrode. It's magic.
  • the work piece (A) may be provided with a stainless steel tube.
  • stainless steel tubes containing about 10 to 11% chromium have properties such as corrosion resistance, high hardness, low maintenance cost, low cost manufacturing and high gloss, so they are used in various industrial fields such as pharmaceuticals, semiconductors, food and beverages, and automobiles. Can be.
  • the stainless steel tube used as the work piece (A) may have an outer diameter of 1 to 4 inches and a length of 1 to 6 m.
  • the electrolyte solution 2 may be composed of a mixture of sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), and ultrapure water (H 2 O).
  • the ratio of sulfuric acid, phosphoric acid, and ultrapure water in the electrolyte solution 2 is preferably 3:6:1, but may vary depending on the use environment.
  • the temperature of the electrolyte solution 2 is 60 to 80°C when surface treatment of the work piece (A).
  • the anode jig may be provided to fix the work A at one end of the work A.
  • anode jig is electrically connected to the rectifier.
  • the electrode 3 is characterized in that it is spaced apart from the work (A) at a predetermined interval.
  • the electrode 3 may be made of any one material selected from copper, silver, or platinum.
  • the electrode 3 is located on the cathode, the work A is located on the anode where metal melting occurs, and between the electrode 3 and the work A
  • the gap of, the structure and material of the electrode 3, and the size of the work A are important factors.
  • the electrode 3 may be formed to have a length of 300 to 500 mm, and may be surface-treated 5 to 10 mm apart from the stainless tube provided as the work (A).
  • FIG. 2 is a conceptual diagram showing a step of polishing a stainless steel tube according to an embodiment of the electrolytic polishing apparatus according to the present invention, showing that the stainless steel tube is gradually etched and smoothed, and a chromium oxide thin film is formed.
  • the cathode jig may be provided at one end of the electrode 3 so that the electrode 3 may be spaced apart from the electrolytic polishing object.
  • the cathode jig is required to prevent electric shock between the work (A) and the electrode (3) during the electrolytic polishing process, and at the same time, it is required to be fixed by maintaining an optimum separation distance.
  • the positive electrode jig and the negative electrode jig may be made of an insulating material having strong corrosion resistance and no electrical conductivity.
  • the positive electrode jig and the negative electrode jig may be made of Teflon or insulating rubber.
  • the processing distance between the electrode and the object is mainly in the range of 0.1 to 0.7 mm, and the electrolyte solution 2 is flowed at a high speed of about 10 m/s or more at a high current density of 50 to 500 A/cm 2.
  • the cathode jig may play a role.
  • the rectifier may supply current to the cathode jig and the anode jig.
  • the rectifier is a configuration provided to stably supply power to the electrode 3 and the work (A).
  • the rectifier may include an input circuit, an inrush current prevention circuit, and a power factor improvement circuit.
  • the specifications of the rectifier for stable current supply are shown in Table 1 below.
  • PIPE SIZE (inch) Current used Ieast maximum One 70A 150A 1.5 70A 150A 2 90A 150A 2.5 150A 200A 3 180A 250A 4 350A 600A
  • a circulation pump for circulating the electrolyte solution 2 in the electrolytic cell 1 may be further provided.
  • the circulation pump may further include a driving unit, a driving motor, and a controller for controlling the speed of electropolishing surface treatment.
  • the circulation pump may adjust the temperature of the electrolyte solution 2 from room temperature to 100°C.
  • the temperature of the electrolytic solution 2 may gradually increase to exceed a preset value. If the temperature of the electrolyte 2 is 40°C or higher, the processing efficiency may decrease and the processing condition may deteriorate. In such a case, it is necessary to install the cooling device for the electrolyte 2 to manage the temperature of the electrolyte 2.
  • 3 shows the surface roughness of the stainless steel tube according to the current density during electropolishing, and it can be seen that the surface roughness decreases as the current density increases.
  • the surface roughness 5 shows the surface roughness according to the temperature of the electrolyte solution 2 during electrolytic polishing. As the temperature increases, the surface roughness decreases, but at the temperature of the surface treatment solution above a certain temperature, the surface roughness increases. , The appropriate temperature can be selected according to the user.
  • a cathode electrode (metal electrode, 3) the main reaction: 2H 2 O + 2e- ⁇ H 2 + 2OH -
  • the electrolytic polishing processing method using the electrolytic polishing apparatus according to the present invention can be performed while maintaining a constant average space gap between the inner surface of the stainless steel tube and the electrode 3, so that the processing completion can be improved.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

The present invention relates an electropolishing apparatus and, more specifically, to an electropolishing apparatus which is used when the inner surface of a stainless tube is subjected to surface treatment, the electropolishing apparatus comprising: an electrolysis tank having an inner receiving space in which a workpiece to be electropolished and an electrolyte are received; an anode jig provided at one end of the workpiece to fix the workpiece; an electrode rod spaced a predetermined distance apart from the workpiece; a cathode jig provided at one end of the electrode rod to allow the electrode rod to be fixed while being spaced apart from the workpiece; and a rectifier supplying current to the anode jig and the cathode jig.

Description

전해연마 장치Electrolytic polishing device
본 발명은 전해연마 장치에 관한 것으로, 자세하게는 스테인리스 튜브 내면 표면처리 시 사용되는 전해연마 장치에 관한 것이다.The present invention relates to an electrolytic polishing apparatus, and more particularly, to an electrolytic polishing apparatus used for surface treatment of an inner surface of a stainless steel tube.
최근 초정밀 가공 분야에서는 다양한 연구결과와 새로운 공정의 개발이 끊임없이 이루어지고 있다. 또한 대량 생산을 주 목적으로 두어 다양한 기계적 생산 및 가공 방법들이 활용되고 있는 추세이다.Recently, in the field of ultra-precision processing, various research results and the development of new processes are constantly being made. Also, with mass production as the main purpose, various mechanical production and processing methods are being used.
기계적 가공법 또는 전해연마 가공법과 같은 표면처리 기술은 소재·부품의 미관 및 내구성을 개선시키거나 기능성을 부여하기 위하여 금속 및 비금속을 물리·화학적으로 부착시키거나 표면의 특성을 변화시키는 기술이다.Surface treatment technologies such as mechanical processing or electropolishing processing are technologies that physically or chemically attach metals and non-metals or change surface properties in order to improve the aesthetics and durability of materials and parts, or to impart functionality.
최근에는 관련 시장 급성장과 복합 다기능 표면기능의 적용으로 다양한 시장 창출이 가능하게 됨에 따라 고효율 고부가가치화 및 미래 지향적 신기술의 융합화가 이루어지고 있으며, 초소형화, 복합기능화, 친환경 에너지절감 및 고생산성 등 미래제품 및 산업에 대한 대응을 위한 마이크로화, 그린화 및 IT 접목 등의 융합화로 신개념의 표면처리 기술요구 및 산업화가 진행되는 추세이다.In recent years, the rapid growth of related markets and the application of complex multifunctional surface functions have enabled the creation of various markets, resulting in high-efficiency, high-value-added and future-oriented new technologies convergence, and future products such as miniaturization, complex functionalization, eco-friendly energy saving and high productivity. In addition, new concept of surface treatment technology demand and industrialization are in progress through convergence of micro-ization, greening, and IT grafting for countermeasures to the industry.
한편, 기계적 가공방법으로는 재료 혹은 부품 표면에 공구가 접촉하여 가공하게 되므로 공구가 마모되고, 가공 후 표면에 미세한 요철 형태의 가공 흔적이 남아 있어 흔적부에 불순물이 잔재할 수 있다.Meanwhile, as a mechanical processing method, since the tool is processed by contacting the surface of a material or part, the tool is worn, and after processing, a processing trace in the form of fine irregularities remains on the surface, so that impurities may remain in the trace.
이러한 불순물은 최근 급성장하고 있는 반도체 산업, 의료·제약 산업, 첨단 신소재 산업, 식품 위생·청정 산업 등의 고품위·고청정도를 요구하는 분야에는 적절하지 못하다.These impurities are not suitable for fields that require high quality and high degree of cleanliness, such as the semiconductor industry, medical and pharmaceutical industries, high-tech new material industries, and food hygiene and cleaning industries, which are rapidly growing in recent years.
특히, 반도체 산업 분야에서 고순도 가스공급용 튜브류(tubes) 및 피팅류(fittings) 부품의 경우 부식방지 및 가스오염방지를 위하여 극청정·고정밀 조건이 요구된다.Particularly, in the case of tubes and fittings for supplying high-purity gas in the semiconductor industry, extremely clean and high-precision conditions are required to prevent corrosion and gas pollution.
또한, 의료·제약, 식품 위생 분야에서 사용되는 튜브류 등의 경우 표면에 미세한 결점들은 부식 발생과 표면에 세균 증식을 유발 할 수 있어 최종 생산물에 치명적인 악영향을 주게 된다.In addition, in the case of tubes used in medical/pharmaceutical and food hygiene fields, microscopic defects on the surface can cause corrosion and bacterial growth on the surface, so that the final product has a fatal adverse effect.
따라서 이러한 접촉 방식의 내·외면 연마 기계 가공법에서 탈피한 비접촉 연마 방식인 전해연마(EP, Electro-Polishing)가 필요하다. 전해연마는 반도체 제조장비, 식품위생기기, 의료기기, 초순수 제조기, 고순도 가스용기, 정밀 금형 및 원자력기기 등 표면의 정밀도와 청정도가 함께 요구되는 다양한 산업분야에 응용되고 있다.Therefore, electro-polishing (EP) is required, which is a non-contact polishing method that has escaped from the contact method's inner and outer surface polishing machining method. Electrolytic polishing is applied to various industrial fields that require both surface precision and cleanliness, such as semiconductor manufacturing equipment, food hygiene equipment, medical equipment, ultrapure water manufacturing equipment, high purity gas containers, precision molds and nuclear equipment.
전해연마는 전기-화학적 반응을 이용한 연마법으로 공작물을 양극(Anode), 전극을 음극(Cathode)으로 하여 양극 표면에서의 금속용출을 이용해 표면 평활도, 광택도, 내식성 등을 향상시키는 연마법이다.Electrolytic polishing is a polishing method using an electro-chemical reaction, and is a polishing method that improves surface smoothness, glossiness, corrosion resistance, etc. by using metal elution from the surface of the anode by using the workpiece as the anode and the electrode as the cathode.
적절한 전해액 속에 양극인 공작물과 음극인 전극을 넣고 전류를 인가하면 양극 측에서 미량의 산소가 발생하면서 금속의 용해가 이루어지고, 음극 측에서는 용해작용에 의해 다량의 수소가 발생한다. 이는 어떤 형상의 금속에 전기를 인가하면 모서리, 뾰족한 부분 그리고 불규칙한 부분에 전류가 집중되는 현상을 이용한 것이다. 전해연마는 근본적으로 금속의 용출을 이용하는 가공법이며 이 방법을 이용하면 양극 산화층에서 돌출된 부분에 전류가 집중하여 빠르게 금속용해를 통한 연마가 진행되게 된다.When the work as the positive electrode and the electrode as the negative electrode are put in an appropriate electrolyte and a current is applied, a trace amount of oxygen is generated on the positive electrode side and the metal is dissolved, and a large amount of hydrogen is generated on the negative electrode side by the dissolution action. This takes advantage of the phenomenon that when electricity is applied to a metal of a certain shape, current is concentrated in corners, sharp parts, and irregular parts. Electrolytic polishing is basically a processing method that utilizes the elution of metal, and when this method is used, current is concentrated in the protruding portion of the anodized layer, so that the polishing through metal melting proceeds rapidly.
한편, 크롬을 10~11% 정도 함유한 스테인리스 튜브는 내부식성, 고경강도, 적은 유지비, 저비용 및 고광택 등의 특성을 가지고 있어 Bio Processing Equipment(BPE) 규격 스테인리스 튜브로 적용되기에 적합하며, 제약·반도체·식음료·자동차 등 다양한 산업분야에 활용가능하다.On the other hand, stainless steel tubes containing about 10 to 11% chromium have characteristics such as corrosion resistance, high hardness, low maintenance cost, low cost, and high gloss, so they are suitable to be applied as Bio Processing Equipment (BPE) standard stainless steel tubes. It can be used in various industrial fields such as semiconductors, food and beverages, and automobiles.
따라서, 상기한 바와 같은 스테인리스 튜브를 제조하기 위해서는 기계적 연마보다는 전해연마 방법이 더 적합하며 이를 위한 비접촉식 표면처리 금속 전극봉의 개발이 필요한 실정이다.Therefore, in order to manufacture a stainless steel tube as described above, an electrolytic polishing method is more suitable than mechanical polishing, and it is necessary to develop a non-contact surface-treated metal electrode for this.
종래의 기술 대한민국 공개특허 제10-2014-0002964호는 튜브 및 파이프 전해연마용 전극봉에 관한 것으로, 앞단전극봉, 중간전극봉, 뒷단전극봉, 가이드를 제공하여 전해연마시 전극봉으로 인해 발생되었던 불량를 감소시키는 효과를 제공하나, 미세 이격을 통한 최적의 산화 박막을 형성하는 데에는 어려움이 있었다.Conventional Korean Patent Publication No. 10-2014-0002964 relates to an electrode for electrolytic polishing of tubes and pipes, and provides a front electrode, middle electrode, rear electrode, and guide to reduce defects caused by electrode during electrolytic polishing. However, it was difficult to form an optimal oxide thin film through fine separation.
본 발명의 목적은 스테인리스 튜브 표면처리 시 최적의 크롬 산화 박막을 형성할 수 있는 전기전도성이 우수한 비접촉식 표면처리 전해연마 장치를 제공하는 데 있다.An object of the present invention is to provide a non-contact surface treatment electrolytic polishing apparatus having excellent electrical conductivity capable of forming an optimal chromium oxide thin film upon surface treatment of a stainless steel tube.
본 발명이 해결하고자 하는 과제들은 이상에서 언급한 과제로 제한되지 않으며, 여기에 언급되지 않은 본 발명이 해결하고자 하는 또 다른 과제들은 아래의 기재로부터 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에게 명확하게 이해될 수 있을 것이다.The problems to be solved by the present invention are not limited to the problems mentioned above, and other problems to be solved by the present invention not mentioned here are those of ordinary skill in the technical field to which the present invention belongs from the following description. Will be clearly understood.
상기 과제를 해결하기 위한 본 발명의 일 실시예에 따른 전해연마 장치는, 전해연마 대상물이 되는 공작물과 전해액이 수용되는 수용공간이 내부에 마련되는 전해조와, 상기 공작물의 일단부에서 상기 공작물을 고정하도록 마련되는 양극지그와, 상기 공작물과 기지정된 간격으로 이격 배치되는 전극봉과, 상기 전극봉이 상기 공작물과 이격 고정될 수 있도록 상기 전극봉 일단부에 마련되는 음극지그 및 상기 양극지그와 상기 음극지그에 전류를 공급하는 정류기를 포함하여 구성된다.An electrolytic polishing apparatus according to an embodiment of the present invention for solving the above problem includes an electrolytic cell in which a workpiece to be electropolished and an accommodation space for receiving an electrolyte are provided therein, and the workpiece is fixed at one end of the workpiece. A positive electrode jig provided so as to be provided, an electrode rod disposed spaced apart from the work piece at a predetermined interval, a negative electrode jig provided at one end of the electrode rod so that the electrode rod may be spaced apart from the work piece, and a current in the positive electrode jig and the negative electrode jig It is configured to include a rectifier to supply.
바람직하게는, 상기 전해액은 황산, 인산 및 초순수의 혼합물인 것을 특징으로 한다.Preferably, the electrolyte is characterized in that it is a mixture of sulfuric acid, phosphoric acid and ultrapure water.
바람직하게는, 상기 전해조 내의 상기 전해액을 순환시키는 순환펌프가 더 마련되는 것을 포함한다.Preferably, a circulation pump for circulating the electrolyte in the electrolytic cell is further provided.
본 발명에 따른 전해연마 장치는, 전해액, 전해조, 음극지그, 양극지그, 전극봉, 전원부를 통해 전기전도성이 우수한 비접촉식 표면처리 전해연마 장치를 제공하는 효과가 있다.The electrolytic polishing apparatus according to the present invention has an effect of providing a non-contact surface treatment electrolytic polishing apparatus having excellent electrical conductivity through an electrolyte solution, an electrolytic bath, a negative electrode jig, a positive electrode jig, an electrode, and a power supply unit.
도 1은, 본 발명에 따른 전해연마 장치의 일 실시예에 따른 개념도를 나타낸 것이다.1 shows a conceptual diagram according to an embodiment of an electrolytic polishing apparatus according to the present invention.
도 2는, 본 발명에 따른 전해연마 장치의 일 실시예에 따른 스테인리스 튜브 연마 단계를 개념도로 나타낸 것이다.2 is a conceptual diagram showing a stainless tube polishing step according to an embodiment of the electrolytic polishing apparatus according to the present invention.
도 3은, 전해연마 시 전류밀도에 따른 스테인리스 튜브의 표면 거칠기를 나타낸 것으로, 전류밀도가 높을수록 표면 거칠기가 감소하는 것을 나타낸 것이다.3 shows the surface roughness of the stainless steel tube according to the current density during electropolishing, and shows that the surface roughness decreases as the current density increases.
도 4는, 전해연마 시 가공시간에 따른 표면 거칠기를 나타낸 것으로, 가공시간이 길어질수록 표면 거칠기가 감소하는 것을 나타낸 것이다.4 shows the surface roughness according to the processing time during electropolishing, and shows that the surface roughness decreases as the processing time increases.
도 5는, 전해연마 시 표면처리용액의 온도에 따른 표면 거칠기를 나타낸 것으로, 온도가 상승할수록 표면 거칠기가 감소하는 추세를 보이나, 일정 온도 이상의 표면처리용액의 온도에서는 오히려 표면 거칠기가 증가하는 것을 나타낸 것이다.5 shows the surface roughness according to the temperature of the surface treatment solution during electropolishing, and shows a trend of decreasing the surface roughness as the temperature increases, but shows that the surface roughness increases at a temperature of the surface treatment solution above a certain temperature. will be.
이상과 같은 본 발명에 대한 해결하고자 하는 과제, 과제의 해결수단, 발명의 효과를 포함한 구체적인 사항들은 다음에 기재할 실시예 및 도면들에 포함되어 있다. 본 발명의 이점 및 특징, 그리고 그것들을 달성하는 방법은 첨부되는 도면과 함께 상세하게 후술되어 있는 실시예들을 참조하면 명확해질 것이다.Specific matters, including the problems to be solved, means for solving the problems, and effects of the present invention as described above, are included in the following examples and drawings. Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail together with the accompanying drawings.
본 발명에 따른 전해연마 장치는, 도 1에 도시된 바와 같이, 전해연마 대상물이 되는 공작물(A)과 전해액(2)이 수용되는 수용공간이 내부에 마련되는 전해조(1)와, 상기 공작물(A)의 일단부에서 상기 공작물(A)을 고정하도록 마련되는 양극지그와, 상기 공작물(A)과 기지정된 간격으로 이격 배치되는 전극봉(3)과, 상기 전극봉(3)이 상기 공작물(A)과 이격 고정될 수 있도록 상기 전극봉(3) 일단부에 마련되는 음극지그 및 상기 양극지그와 상기 음극지그에 전류를 공급하는 정류기를 포함할 수 있다.The electrolytic polishing apparatus according to the present invention, as shown in FIG. 1, includes an electrolytic cell 1 in which a receiving space for receiving an electrolytic polishing object (A) and an electrolyte solution 2 is provided therein, and the work ( A positive electrode jig provided to fix the work (A) at one end of A), an electrode (3) spaced apart from the work (A) at a predetermined interval, and the electrode (3) is the work (A) A negative electrode jig provided at one end of the electrode rod 3 so as to be spaced apart from the electrode 3 may include a rectifier supplying current to the positive electrode jig and the negative electrode jig.
먼저, 상기 전해조(1)는 상기 공작물(A)과 상기 전해액(2)이 수용되는 수용공간이 내부에 마련되어 구성될 수 있다.First, the electrolyzer 1 may be configured with an accommodation space in which the work A and the electrolyte 2 are accommodated.
전해연마는 전기·화학적 반응을 이용하여 양극에 상기 공작물(A)을 배치하고, 음극에 상기 저극봉을 배치하여, 양극 표면에서 일어나는 금속용출을 이용해 표면 평활도, 광택도, 내식성 등을 향상시키는 연마법이다.In electrolytic polishing, the workpiece (A) is placed on the positive electrode using an electrochemical reaction, and the low electrode rod is placed on the negative electrode to improve surface smoothness, gloss, and corrosion resistance by using metal elution from the surface of the positive electrode. It's magic.
바람직하게는, 상기 공작물(A)은 스테인리스 튜브로 마련될 수 있다.Preferably, the work piece (A) may be provided with a stainless steel tube.
더욱 자세하게는, 크롬을 10 내지 11% 정도 함유한 스테인리스 튜브는 내부식성, 고경강도, 낮은 유지비용, 저비용 제조 및 고광택 등의 특성을 가지고 있어, 제약, 반도체, 식음료, 자동차 등 다양한 산업분야에 활용될 수 있다.In more detail, stainless steel tubes containing about 10 to 11% chromium have properties such as corrosion resistance, high hardness, low maintenance cost, low cost manufacturing and high gloss, so they are used in various industrial fields such as pharmaceuticals, semiconductors, food and beverages, and automobiles. Can be.
상기 공작물(A)로 사용되는 스테인리스 튜브는 외경 1 내지 4인치, 길이 1 내지 6m 사이즈로 마련될 수 있다.The stainless steel tube used as the work piece (A) may have an outer diameter of 1 to 4 inches and a length of 1 to 6 m.
다음으로, 상기 전해액(2)은 황산(H 2SO 4), 인산(H 3PO 4) 및 초순수(H 2O)의 혼합물로 구성될 수 있다.Next, the electrolyte solution 2 may be composed of a mixture of sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), and ultrapure water (H 2 O).
바람직한 실시예로, 상기 전해액(2)의 황산, 인산, 초순수의 비율은 3:6:1이 되는 것이 바람직하나, 사용 환경에 따라 가변될 수 있다.In a preferred embodiment, the ratio of sulfuric acid, phosphoric acid, and ultrapure water in the electrolyte solution 2 is preferably 3:6:1, but may vary depending on the use environment.
또한, 상기 공작물(A)의 표면처리 시 상기 전해액(2)의 온도는 60 내지 80℃ 인 것이 바람직하다.In addition, it is preferable that the temperature of the electrolyte solution 2 is 60 to 80°C when surface treatment of the work piece (A).
다음으로, 상기 양극지그는 상기 공작물(A)의 일단부에서 상기 공작물(A)을 고정하도록 마련될 수 있다.Next, the anode jig may be provided to fix the work A at one end of the work A.
또한, 상기 양극지그는 상기 정류기와 전기적으로 연결된다.In addition, the anode jig is electrically connected to the rectifier.
다음으로, 상기 전극봉(3)은 상기 공작물(A)과 기지정된 간격으로 이격 배치되는 것을 특징으로 한다.Next, the electrode 3 is characterized in that it is spaced apart from the work (A) at a predetermined interval.
구체적으로, 상기 전극봉(3)은 구리, 은 또는 백금 중 선택되는 어느 하나의 재질로 마련될 수 있다.Specifically, the electrode 3 may be made of any one material selected from copper, silver, or platinum.
이는 구리, 은 또는 백금이 전기전도성이 우수하면 안정적인 전류 공급이 가능하기 때문이다.This is because if copper, silver or platinum has excellent electrical conductivity, stable current supply is possible.
일반적으로, 전해연마를 통한 표면처리를 하기 위해서는 음극에 상기 전극봉(3)이 위치하고, 금속용해가 발생하는 양극에 상기 공작물(A)이 위치하며, 상기 전극봉(3)과 상기 공작물(A) 사이의 간극, 상기 전극봉(3)의 구조 및 재질, 상기 공작물(A)의 크기가 중요 요소 인자이다.In general, in order to perform surface treatment through electrolytic polishing, the electrode 3 is located on the cathode, the work A is located on the anode where metal melting occurs, and between the electrode 3 and the work A The gap of, the structure and material of the electrode 3, and the size of the work A are important factors.
바람직한 실시예로, 상기 전극봉(3)은 300 내지 500mm의 길이로 형성되고, 상기 공작물(A)로 마련되는 스테인리스 튜브와 5 내지 10mm 이격되어 표면처리를 할 수 있다.In a preferred embodiment, the electrode 3 may be formed to have a length of 300 to 500 mm, and may be surface-treated 5 to 10 mm apart from the stainless tube provided as the work (A).
도 2는, 본 발명에 따른 전해연마 장치의 일 실시예에 따른 스테인리스 튜브 연마 단계를 개념도로 나타낸 것으로, 스테인리스 튜브가 점차 식각되어 평활화 되고, 크롬 산화 박막을 형성하는 것을 나타낸 것이다.2 is a conceptual diagram showing a step of polishing a stainless steel tube according to an embodiment of the electrolytic polishing apparatus according to the present invention, showing that the stainless steel tube is gradually etched and smoothed, and a chromium oxide thin film is formed.
다음으로, 상기 음극지그는 상기 전극봉(3)이 상기 전해연마 대상물과 이격될 수 있도록 상기 전극봉(3) 일단부에 마련될 수 있다.Next, the cathode jig may be provided at one end of the electrode 3 so that the electrode 3 may be spaced apart from the electrolytic polishing object.
자세하게는, 상기 음극지그는 전해연마 공정 시 상기 공작물(A)과 상기 전극봉(3)의 Electric shock을 방지하기 위해 필요하며, 동시에 최적의 이격 거리를 유지하여 고정되기 위해 필요하다.Specifically, the cathode jig is required to prevent electric shock between the work (A) and the electrode (3) during the electrolytic polishing process, and at the same time, it is required to be fixed by maintaining an optimum separation distance.
또한, 상기 양극지그 및 상기 음극지그는 부식저항이 강하면서 전기전도성이 없는 절연 재질의 물질로 마련될 수 있다.In addition, the positive electrode jig and the negative electrode jig may be made of an insulating material having strong corrosion resistance and no electrical conductivity.
더욱 구체적으로는, 상기 양극지그 및 상기 음극지그는 테프론 또는 절연 고무로 마련될 수 있다.More specifically, the positive electrode jig and the negative electrode jig may be made of Teflon or insulating rubber.
종래의 경우, 전극과 대상물 사이의 가공 간격은 주로 0.1 내지 0.7mm 범위에서 통상 10m/s 정도 이상의 고속으로 전해액(2)을 유동시켜 50 내지 500A/cm 2의 고전류 밀도의 가공조건에서 이루어졌다.In the conventional case, the processing distance between the electrode and the object is mainly in the range of 0.1 to 0.7 mm, and the electrolyte solution 2 is flowed at a high speed of about 10 m/s or more at a high current density of 50 to 500 A/cm 2.
이는 낮은 전류 밀도와 전극 간격이 클 경우 전해연마가 제대로 이루어지지 않기 때문이다.This is because electrolytic polishing is not performed properly when the current density is low and the electrode gap is large.
하지만 전극간극이 아주 근접한 경우 방전현상의 발생으로 스파크가 발생해 가공 공작물(A)의 표면에 홈이 파이는 현상이 나타나 문제가 된다.However, when the electrode gap is very close, a spark occurs due to the occurrence of a discharge phenomenon, and a phenomenon in which grooves are formed on the surface of the workpiece (A) becomes a problem.
즉, 이와 같은 문제로 인해 상기 전극봉(3)과 상기 공작물(A) 사이의 미세 이격을 유지해 줄 미세 지그가 필요하게 되고, 본 발명에서는 상기 음극지그가 그 역할을 할 수 있다.That is, due to such a problem, a fine jig is required to maintain a fine separation between the electrode 3 and the work A, and in the present invention, the cathode jig may play a role.
다음으로, 상기 정류기는 상기 음극지그와 상기 양극지그에 전류를 공급할 수 있다.Next, the rectifier may supply current to the cathode jig and the anode jig.
구체적으로, 상기 정류기는 상기 전극봉(3)과 상기 공작물(A)에 안정적으로 전원을 공급하기 위해 마련되는 구성이다.Specifically, the rectifier is a configuration provided to stably supply power to the electrode 3 and the work (A).
상세하게는, 상기 정류기는 입력회로, 돌입전류 방지회로, 역률 개선회로를 포함하여 구성될 수 있다.Specifically, the rectifier may include an input circuit, an inrush current prevention circuit, and a power factor improvement circuit.
바람직한 실시예로, 안정적인 전류 공급을 위한 정류기 제원은 아래의 표 1과 같다.In a preferred embodiment, the specifications of the rectifier for stable current supply are shown in Table 1 below.
1차전원Primary power AC 220V ~ 380VAC 220V ~ 380V
주파수frequency 50Hz, 60Hz50Hz, 60Hz
출력전압Output voltage DC 0V ~ 30VDC 0V ~ 30V
출력전류Output current DC 0A ~ 5000ADC 0A ~ 5000A
안정도Stability 정전압, 정전류 1% 이하Constant voltage, constant current 1% or less
또한, 상기 공작물(A)로 사용되는 스테인리스 튜브의 사이즈별 최적화 전류는 아래의 표 2와 같다.In addition, the optimized current for each size of the stainless steel tube used as the work piece (A) is shown in Table 2 below.
PIPE SIZEPIPE SIZE (inch)(inch) 사 용 전 류Current used
최소Ieast 최대maximum
1One 70A70A 150A150A
1.51.5 70A70A 150A150A
22 90A90A 150A150A
2.52.5 150A 150A 200A200A
33 180A 180A 250A250A
44 350A350A 600A600A
다음으로, 상기 전해조(1) 내의 상기 전해액(2)을 순환시키는 순환펌프가 더 마련될 수 있다.Next, a circulation pump for circulating the electrolyte solution 2 in the electrolytic cell 1 may be further provided.
구체적으로, 상기 순환펌프는 전해연마 표면처리의 속도 제어를 위한 구동부, 구동 모터 및 제어기를 더 포함하여 구성될 수 있다.Specifically, the circulation pump may further include a driving unit, a driving motor, and a controller for controlling the speed of electropolishing surface treatment.
일 실시예로, 상기 순환펌프는 상기 전해액(2)의 온도를 상온에서 100℃로 조절 가능할 수 있다.In one embodiment, the circulation pump may adjust the temperature of the electrolyte solution 2 from room temperature to 100°C.
또한, 상기 전해액(2)의 가열 기능뿐만 아니라 냉각 기능을 포함하여 구성될 수 있다. 이는, 전해연마를 연속적으로 장시간에 걸쳐 진행하면 상기 전해액(2)의 온도가 서서히 증가하여 기설정치를 초과할 수 있다. 만일 상기 전해액(2)의 온도가 40℃ 이상이 되면 가공효율이 저하하고 가공상태가 나빠지게 될 수 있다. 이와 같은 경우에는 상기 전해액(2) 냉각장치를 설치하여 상기 전해액(2)의 온도를 관리하는 것이 필요하다.In addition, it may be configured to include a cooling function as well as a heating function of the electrolyte solution 2. In this case, when electrolytic polishing is continuously performed over a long period of time, the temperature of the electrolytic solution 2 may gradually increase to exceed a preset value. If the temperature of the electrolyte 2 is 40°C or higher, the processing efficiency may decrease and the processing condition may deteriorate. In such a case, it is necessary to install the cooling device for the electrolyte 2 to manage the temperature of the electrolyte 2.
이하, 본 발명에 따른 전해연마 장치의 실시예에 따른 상기 공작물(A)의 표면 거칠기를 도면과 함께 설명하도록 한다.Hereinafter, the surface roughness of the work piece A according to an embodiment of the electrolytic polishing apparatus according to the present invention will be described with reference to the drawings.
도 3은, 전해연마 시 전류밀도에 따른 스테인리스 튜브의 표면 거칠기를 나타낸 것으로, 전류밀도가 높을수록 표면 거칠기가 감소하는 것을 확인 할 수 있다.3 shows the surface roughness of the stainless steel tube according to the current density during electropolishing, and it can be seen that the surface roughness decreases as the current density increases.
도 4는, 전해연마 시 가공시간에 따른 표면 거칠기를 나타낸 것으로, 가공시간이 길어질수록 표면 거칠기가 감소하는 것을 확인할 수 있다.4 shows the surface roughness according to the processing time during electropolishing, and it can be seen that the surface roughness decreases as the processing time increases.
도 5는, 전해연마 시 상기 전해액(2)의 온도에 따른 표면 거칠기를 나타낸 것으로, 온도가 상승할수록 표면 거칠기가 감소하는 추세를 보이나, 일정 온도 이상의 표면처리용액의 온도에서는 오히려 표면 거칠기가 증가하므로, 적절한 온도가 사용자에 따라 선택될 수 있다.5 shows the surface roughness according to the temperature of the electrolyte solution 2 during electrolytic polishing. As the temperature increases, the surface roughness decreases, but at the temperature of the surface treatment solution above a certain temperature, the surface roughness increases. , The appropriate temperature can be selected according to the user.
본 발명에 따른 전해연마 장치의 일 실시예에 따른 전해연마 가공의 특징을 다음과 같이 나타낼 수 있다.Features of the electrolytic polishing process according to an embodiment of the electrolytic polishing apparatus according to the present invention can be expressed as follows.
양극전극(스테인리스 튜브 내면) 주반응 : Fe → Fe 2+ + 2e - An anode electrode (stainless steel tube inner surface), the main reaction: Fe → Fe 2+ + 2e -
음극전극(금속 전극봉(3)) 주반응 : 2H 2O + 2e- → H 2 +2OH - A cathode electrode (metal electrode, 3) the main reaction: 2H 2 O + 2e- → H 2 + 2OH -
위와 같은 반응에 따라 상기 공작물(A)인 스테인리스 튜브의 경도와 인성 등에 무관계하게 고속도의 가공과 복잡한 형상을 하나의 공정으로 가공할 수 있는 특징을 가진다.According to the reaction as described above, it is possible to process high-speed processing and complex shapes in one process regardless of the hardness and toughness of the stainless steel tube, which is the work piece (A).
가공속도에 있어, 전해연마 가공법은 스테인리스 튜브 속을 따라 흐르는 전해액(2)에 의해 전류가 흐르는 것으로, 양극간의 저항은 스테인리스 튜브 내면과 상기 전극봉(3) 표면 사이의 갭(gap) g에 비례하고 전극면적 S 및 전해질의 도전율에 반비례한다. 따라서 전류효율을 100%라고 하면 전해연마 가공법에 의한 금속의 용출속도는 다음과 같다.In terms of processing speed, in the electrolytic polishing method, current flows by the electrolyte (2) flowing through the stainless steel tube, and the resistance between the anodes is proportional to the gap g between the inner surface of the stainless steel tube and the surface of the electrode (3). It is inversely proportional to the electrode area S and the conductivity of the electrolyte. Therefore, if the current efficiency is 100%, the elution rate of the metal by the electropolishing process is as follows.
dV = S · dgdV = S dg
또한 본 발명에 따른 전해연마 장치를 이용한 전해연마 가공법은 스테인리스 튜브 내면과 상기 전극봉(3) 사이의 평균가공간격을 일정하게 유지하면서 진행 할 수 있어 가공 완성도가 향상될 수 있다.In addition, the electrolytic polishing processing method using the electrolytic polishing apparatus according to the present invention can be performed while maintaining a constant average space gap between the inner surface of the stainless steel tube and the electrode 3, so that the processing completion can be improved.
이와 같이, 상술한 본 발명의 기술적 구성은 본 발명이 속하는 기술분야의 당업자가 본 발명의 그 기술적 사상이나 필수적 특징을 변경하지 않고서 다른 구체적인 형태로 실시될 수 있다는 것을 이해할 수 있을 것이다.As described above, it will be appreciated that the above-described technical configuration of the present invention can be implemented in other specific forms without changing the technical spirit or essential features of the present invention by those skilled in the art.
그러므로 이상에서 기술한 실시예들은 모든 면에서 예시적인 것이며 한정적인 것이 아닌 것으로서 이해되어야 하고, 본 발명의 범위는 상기 상세한 설명보다는 후술하는 특허청구범위에 의하여 나타나며, 특허청구범위의 의미 및 범위 그리고 그 등가 개념으로부터 도출되는 모든 변경 또는 변형된 형태가 본 발명의 범위에 포함되는 것으로 해석되어야 한다.Therefore, the embodiments described above should be understood as illustrative and non-limiting in all respects, and the scope of the present invention is indicated by the claims to be described later rather than the detailed description, and the meaning and scope of the claims and the All changes or modifications derived from the equivalent concept should be construed as being included in the scope of the present invention.
A : 공작물 A: Workpiece
1 : 전해조1: electrolyzer
2 : 전해액2: electrolyte
3 : 전극봉3: electrode

Claims (3)

  1. 전해연마 대상물이 되는 공작물과 전해액이 수용되는 수용공간이 내부에 마련되는 전해조;An electrolytic cell in which a receiving space for receiving an electrolytic solution and a workpiece to be electrolytically polished is provided therein;
    상기 공작물의 일단부에서 상기 공작물을 고정하도록 마련되는 양극지그;An anode jig provided to fix the work at one end of the work;
    상기 공작물과 기지정된 간격으로 이격 배치되는 전극봉;An electrode disposed spaced apart from the workpiece at a predetermined interval;
    상기 전극봉이 상기 공작물과 이격 고정될 수 있도록 상기 전극봉 일단부에 마련되는 음극지그; 및A negative electrode jig provided at one end of the electrode rod so that the electrode rod is spaced and fixed to the work piece; And
    상기 양극지그와 상기 음극지그에 전류를 공급하는 정류기;를 포함하는 것을 특징으로 하는 전해연마 장치.And a rectifier for supplying current to the anode jig and the cathode jig.
  2. 제1항에 있어서,The method of claim 1,
    상기 전해액은 황산, 인산 및 초순수의 혼합물인 것을 특징으로 하는 전해연마 장치.The electrolytic polishing apparatus, characterized in that the electrolyte is a mixture of sulfuric acid, phosphoric acid and ultrapure water.
  3. 제1항에 있어서,The method of claim 1,
    상기 전해조 내의 상기 전해액을 순환시키는 순환펌프;가 더 마련되는 것을 포함하는 전해연마 장치.Electrolytic polishing apparatus comprising a; circulation pump for circulating the electrolyte in the electrolyzer; further provided.
PCT/KR2020/012357 2019-10-30 2020-09-14 Electropolishing apparatus WO2021085846A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2019-0136061 2019-10-30
KR20190136061 2019-10-30

Publications (1)

Publication Number Publication Date
WO2021085846A1 true WO2021085846A1 (en) 2021-05-06

Family

ID=75715301

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2020/012357 WO2021085846A1 (en) 2019-10-30 2020-09-14 Electropolishing apparatus

Country Status (1)

Country Link
WO (1) WO2021085846A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114622267A (en) * 2022-03-18 2022-06-14 合肥工业大学 Special-shaped part electrolytic polishing equipment and polishing method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990085634A (en) * 1998-05-20 1999-12-15 윤종용 Plating material removal device and method by electrolysis
KR20110034226A (en) * 2009-09-28 2011-04-05 에스티엑스메탈 주식회사 Surface treatment method of stainless steel for end plate of proton exchange membrane fuel cell
KR101510042B1 (en) * 2014-02-21 2015-04-09 인하대학교 산학협력단 Rotational metal bar electropolishing device
JP2016202636A (en) * 2015-04-23 2016-12-08 株式会社カネカ Method for manufacturing tubular body
WO2018145132A2 (en) * 2017-02-01 2018-08-09 Aeroment Technologies Soluton, Llc Method and apparatus for removing coatings

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990085634A (en) * 1998-05-20 1999-12-15 윤종용 Plating material removal device and method by electrolysis
KR20110034226A (en) * 2009-09-28 2011-04-05 에스티엑스메탈 주식회사 Surface treatment method of stainless steel for end plate of proton exchange membrane fuel cell
KR101510042B1 (en) * 2014-02-21 2015-04-09 인하대학교 산학협력단 Rotational metal bar electropolishing device
JP2016202636A (en) * 2015-04-23 2016-12-08 株式会社カネカ Method for manufacturing tubular body
WO2018145132A2 (en) * 2017-02-01 2018-08-09 Aeroment Technologies Soluton, Llc Method and apparatus for removing coatings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114622267A (en) * 2022-03-18 2022-06-14 合肥工业大学 Special-shaped part electrolytic polishing equipment and polishing method thereof
CN114622267B (en) * 2022-03-18 2024-04-02 合肥工业大学 Special-shaped part electrolytic polishing equipment and polishing method thereof

Similar Documents

Publication Publication Date Title
WO2011040679A1 (en) High field anodizing apparatus
WO2021085846A1 (en) Electropolishing apparatus
CN101560687A (en) Method and device for continuously preparing high-silicon steel thin strip
CN108570705B (en) Electrolytic polishing equipment for inner wall of stainless steel pipe
CN106925849A (en) A kind of flow field fixture of L-shaped curved surface class workpiece Electrolyzed Processing
KR102468324B1 (en) Method for manufacturing Anodized Coating Layer on Aluminium Member and Aluminium Member for Semiconductor Manufaturing Device by the Same
CN212420604U (en) Device for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles
CN104404591B (en) Micro-arc oxidation device for improving film thickness evenness and energy utilizing rate based on separate type compensation cathode
WO2021085845A1 (en) Surface treatment metal electrode bar for electropolishing
CN110528053B (en) Multi-station electroplating equipment for local electroplating of tubular hardware
KR101172813B1 (en) apparatus for tubular type high-field fabrication of anodic nanostructures
CN202169424U (en) Horizontal type electrochemical machining tool
CN207062401U (en) A kind of small-sized micro-arc oxidation device
CN1152634A (en) Aluminium material electrolytic polishing of reversal current method
KR102203764B1 (en) Gas regulator body electrolytic polishing jig device
CN114717641A (en) Runner surface aftertreatment device in laser powder bed melting forming piece
CN108183034A (en) The preparation method of aluminium electrolutic capacitor high voltage anodization film
JP3455705B2 (en) Electro-copper plating apparatus and copper plating method using said apparatus
CN113664302A (en) Metal niobium surface processing reconstruction method and reconstruction device
CN207659528U (en) A kind of circuit board corrosion liquid regenerating unit
JPS6357515B2 (en)
CN106048708B (en) A kind of method of titanium alloy electrobrightening
CN111941157A (en) Device and method for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles
KR102382082B1 (en) Method for manufacturing Anodized Coating Layer on Aluminium Member and Aluminium Member for Semiconductor Manufaturing Device by the Same
CN214361759U (en) Low-temperature anodic oxidation device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20880579

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20880579

Country of ref document: EP

Kind code of ref document: A1