WO2013163450A3 - Time-varying field emission device - Google Patents

Time-varying field emission device Download PDF

Info

Publication number
WO2013163450A3
WO2013163450A3 PCT/US2013/038249 US2013038249W WO2013163450A3 WO 2013163450 A3 WO2013163450 A3 WO 2013163450A3 US 2013038249 W US2013038249 W US 2013038249W WO 2013163450 A3 WO2013163450 A3 WO 2013163450A3
Authority
WO
WIPO (PCT)
Prior art keywords
time
field emission
emission device
varying field
heat engine
Prior art date
Application number
PCT/US2013/038249
Other languages
French (fr)
Other versions
WO2013163450A2 (en
Inventor
Jesse R. CHEATHAM, III
Philip Andrew Eckhoff
William Gates
Roderick A. Hyde
Muriel Y. Ishikawa
Jordin T. Kare
Nathan P. Myhrvold
Tony S. PAN
Robert C. Petroski
Clarence T. Tegreene
David B. Tuckerman
Charles Whitmer
Lowell L. Wood, Jr.
Victoria Y.H. Wood
Original Assignee
Elwha Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US13/545,504 external-priority patent/US9018861B2/en
Priority claimed from US13/587,762 external-priority patent/US8692226B2/en
Priority claimed from US13/666,759 external-priority patent/US8946992B2/en
Priority claimed from US13/774,893 external-priority patent/US9171690B2/en
Priority claimed from US13/790,613 external-priority patent/US8970113B2/en
Application filed by Elwha Llc filed Critical Elwha Llc
Publication of WO2013163450A2 publication Critical patent/WO2013163450A2/en
Publication of WO2013163450A3 publication Critical patent/WO2013163450A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/08—Arrangements for controlling intensity of ray or beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/12—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J45/00—Discharge tubes functioning as thermionic generators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Prevention Of Electric Corrosion (AREA)
  • Control Of Eletrric Generators (AREA)
  • Electric Clocks (AREA)
  • Control Of Vehicle Engines Or Engines For Specific Uses (AREA)

Abstract

A field emission device is configured as a heat engine, wherein the configuration of the heat engine is variable as a function of time.
PCT/US2013/038249 2012-04-26 2013-04-25 Time-varying field emission device WO2013163450A2 (en)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US201261638986P 2012-04-26 2012-04-26
US61/638,986 2012-04-26
US13/545,504 2012-07-10
US13/545,504 US9018861B2 (en) 2011-12-29 2012-07-10 Performance optimization of a field emission device
US13/587,762 2012-08-16
US13/587,762 US8692226B2 (en) 2011-12-29 2012-08-16 Materials and configurations of a field emission device
US13/666,759 2012-11-01
US13/666,759 US8946992B2 (en) 2011-12-29 2012-11-01 Anode with suppressor grid
US13/774,893 2013-02-22
US13/774,893 US9171690B2 (en) 2011-12-29 2013-02-22 Variable field emission device
US13/790,613 2013-03-08
US13/790,613 US8970113B2 (en) 2011-12-29 2013-03-08 Time-varying field emission device

Publications (2)

Publication Number Publication Date
WO2013163450A2 WO2013163450A2 (en) 2013-10-31
WO2013163450A3 true WO2013163450A3 (en) 2013-12-27

Family

ID=49484033

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2013/038249 WO2013163450A2 (en) 2012-04-26 2013-04-25 Time-varying field emission device

Country Status (1)

Country Link
WO (1) WO2013163450A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411312B (en) * 2018-10-31 2020-07-28 中国工程物理研究院流体物理研究所 Ultrafast electron gun based on femtosecond laser modulation and verification method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2404919A (en) * 1940-05-01 1946-07-30 Research Corp Electronic switching device and circuit therefor
US4274035A (en) * 1978-07-21 1981-06-16 Hitachi, Ltd. Field emission electron gun
US5936354A (en) * 1998-11-02 1999-08-10 Motorola, Inc. Field emission display with temperature sensing element and method for the operation thereof
US7157849B2 (en) * 2003-01-21 2007-01-02 Samsung Sdi Co., Ltd. Field emission display including mesh grid and focusing electrode and its method of manufacture
US8018169B2 (en) * 2006-03-31 2011-09-13 Electronics And Telecommunications Research Institute Field emission device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2404919A (en) * 1940-05-01 1946-07-30 Research Corp Electronic switching device and circuit therefor
US4274035A (en) * 1978-07-21 1981-06-16 Hitachi, Ltd. Field emission electron gun
US5936354A (en) * 1998-11-02 1999-08-10 Motorola, Inc. Field emission display with temperature sensing element and method for the operation thereof
US7157849B2 (en) * 2003-01-21 2007-01-02 Samsung Sdi Co., Ltd. Field emission display including mesh grid and focusing electrode and its method of manufacture
US8018169B2 (en) * 2006-03-31 2011-09-13 Electronics And Telecommunications Research Institute Field emission device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109411312B (en) * 2018-10-31 2020-07-28 中国工程物理研究院流体物理研究所 Ultrafast electron gun based on femtosecond laser modulation and verification method thereof

Also Published As

Publication number Publication date
WO2013163450A2 (en) 2013-10-31

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