TWI843249B - Apparatus for fluid measurement - Google Patents

Abstract

The present invention discloses apparatus for measuring fluid, that is, a gas or a liquid. The apparatus includes a chamber implemented with an incident transparent surface and an exit transparent surface and contains the fluid under measuring; a radiation source implemented outside the incident transparent surface; and a wavefront sensing device that detects wavefront and output signals. With the implementation of the present invention, high precision, high sensitivity, good performance against vibrations together with the merit of being applicable for either gas or liquid measuring are provided. More importantly, the apparatus for fluid measurements of the present invention measures not only the average refractive index, the average concentration, or the average temperature of the gas or the liquid, but also the refractive index distribution, the concentration distribution, or the temperature distribution of the gas or the liquid. That is quite outstanding, and no other existing refractive index device can achieve.

Description

Measuring device

The present invention relates to a measuring device, in particular to a measuring device having a wavefront sensor.

With the increasing maturity of material sensing technology and the improvement of the manufacturing technology of required precision electronics and optical components, the accurate measurement of the refractive index, concentration or temperature of fluid materials has been fully trusted in industrial applications, commercial additions, national defense, aerospace technology, academic applications or laboratory data collection.

Among them, the measurement of refractive index of organic polymers, inorganic materials, and organic-inorganic hybrid materials is particularly evident in the increasing demand and contribution to the application of high-reflection or anti-reflection coatings required for lenses, lighting, national defense, etc.; optical adhesives; or fuel property analysis.

However, to date, the refractive index measuring devices or systems provided or improved by the known technology or system often use Abbe refractometers based on the total reflection principle when measuring the refractive index of liquids or solids; and when measuring the refractive index of gases, they often use interferometer systems to calculate the refractive index of gases using the correlation parameters between interference fringes and optical systems. Although it can also obtain the refractive index of gases under certain conditions, the interferometer system has very strict requirements on the precision, vibration-free, and calibration of the detection environment, resulting in a very high setting cost. In addition, due to the display limitations of interference fringes, interferometer systems are usually difficult to correctly detect highly dynamic gases. In addition, the known liquid refractive index measurement devices, solid refractive index measurement devices or liquid and solid measurement systems, and even the interferometer system for measuring the refractive index of gas, are not easy to measure the information of the refractive index distribution in space.

On the other hand, in recent gas refractive index measurement technology, photonic crystals, optical fibers and other components are often used to obtain resonant spectra, which are then analyzed to convert the refractive index; however, since the system must be equipped with a spectrometer, this not only greatly increases the system cost, but also makes the spatial distribution of the refractive index difficult to measure.

In view of this, if a novel and advanced measuring device can be proposed, combining the characteristics of the deflection angle of components such as wavefront sensors and prisms, the shortcomings of the above-mentioned known structure can be improved. In addition to fully exerting its advanced functions of high precision, high sensitivity and good anti-vibration ability, it can accurately measure the refractive index, material content, material mixing state, or material temperature of the material, and can accurately measure the distribution state of the above-mentioned various measurements, and can provide a wider range of scientific applications. For the research and development and industrial applications in the fields of academic fields, national defense military systems, lighting devices, reflective and non-reflective coatings, and aerospace technology, it will be a breakthrough invention with significant contributions.

The present invention is a measuring device, which includes: a cavity containing a fluid to be measured, which has an incident penetration surface or an incident penetration surface and an exit penetration surface; an electromagnetic radiation source placed outside the cavity and corresponding to the incident penetration surface; and a wavefront sensor that senses and receives electromagnetic wave fronts and outputs corresponding signal groups. Through the implementation of the present invention, the measuring device not only has the advantages of high precision, high sensitivity, strong shock resistance and applicability to gas or liquid measurement, but more importantly, the measuring device of the present invention can not only measure the average refractive index, average concentration or average temperature of the gas or liquid, but also can measure the refractive index distribution state, concentration distribution state, or temperature distribution state of the gas or liquid.

The present invention provides a measuring device for measuring a fluid to be measured, and includes: a cavity, accommodating the fluid to be measured, and having an incident penetration surface and an exit penetration surface opposite to the incident penetration surface; an electromagnetic radiation source, arranged on one side outside the cavity and corresponding to the incident penetration surface, wherein the electromagnetic radiation source emits a first electromagnetic wave of at least one radiation wavelength to penetrate the incident penetration surface and enter the cavity, and the first electromagnetic wave is modulated by the fluid to be measured into a second electromagnetic wave, then penetrates the exit penetration surface and exits the cavity; and a wavefront sensor, arranged on the other side of the closed cavity and corresponding to the exit penetration surface, sensing the wavefront of the received second electromagnetic wave and converting and outputting a corresponding signal group.

The present invention also provides a measuring device for measuring a fluid to be measured, and includes: a cavity, accommodating the fluid to be measured, and having at least one incident penetration surface; an electromagnetic radiation source, arranged on one side outside the cavity and corresponding to the incident penetration surface, wherein the electromagnetic radiation source emits a first electromagnetic wave of at least one radiation wavelength to penetrate the incident penetration surface and enter the cavity, and the first electromagnetic wave is modulated by the fluid to be measured into a second electromagnetic wave; and a wavefront sensor, arranged in the cavity, sensing the wavefront of the received second electromagnetic wave and converting and outputting a corresponding signal group.

Through the implementation of this invention, at least the following multiple special improvements can be achieved:

1. Streamlining components reduces the overall weight of the system and significantly reduces installation costs.

2. Applicable to the measurement of gas or liquid.

3. It has the characteristics of high precision, high sensitivity and strong shock resistance.

4. It can measure the average refractive index, average concentration, density or average temperature of gas or liquid.

5. It can measure the refractive index distribution, concentration distribution, or temperature distribution of gas or liquid.

In order to enable anyone familiar with the relevant technology to understand the technical content of the present invention and implement it accordingly, and based on the content disclosed in this specification, the scope of the patent application and the drawings, anyone familiar with the relevant technology can easily understand the relevant purposes and advantages of the present invention, so the detailed features and advantages of the present invention will be described in detail in the implementation method.

100: Measuring device

200: Measuring device

10: Cavity

10’: Cavity

11: Incident penetration surface

12: Emission penetration surface

121: Curved surface

20: Electromagnetic radiation source

30: Wavefront sensor

40: Prism structure

52: Straight line notch

55: Annular notch

60: The first electromagnetic wave

70: Second electromagnetic wave

800: Fluid to be tested

900:Signal group

φ: Divergence angle

θ: angle of inclination

A: Top corner

d: Spacing

Figure 1 is a schematic diagram of a measuring device according to an embodiment of the present invention.

Figure 2 is a schematic diagram of another measuring device of an embodiment of the present invention.

Figure 3A is a schematic diagram showing a curved incident penetration surface of a cavity of a measuring device according to an embodiment of the present invention.

Figure 3B is a schematic diagram showing a curved surface of the emission penetration surface of the cavity of a measuring device in an embodiment of the present invention.

Figure 3C is a schematic diagram of a measurement device of an embodiment of the present invention, in which both the incident penetration surface and the exit penetration surface of the cavity are curved surfaces.

Figure 4 is a schematic diagram of another embodiment of the present invention in which the incident penetration surface of the cavity of the measuring device is a curved surface.

Figure 5A is a schematic diagram of a measurement device of an embodiment of the present invention, in which the incident penetration surface of the cavity is at least one prism structure.

Figure 5B is a schematic diagram of a cavity of a measuring device according to an embodiment of the present invention, in which the emission penetration surface is at least one prism structure.

Figure 5C is a schematic diagram of a measurement device of an embodiment of the present invention, in which both the incident and exiting surfaces of the cavity are at least one prism structure.

Figure 6 is a schematic diagram of another embodiment of the present invention in which the incident penetration surface of the cavity of the measuring device is at least one prism structure.

Figure 7A is a three-dimensional schematic diagram of a measurement device of an embodiment of the present invention having a plurality of straight line notches on the surface of the incident penetration surface of the cavity.

Figure 7B is a three-dimensional schematic diagram of a cavity of a measuring device according to an embodiment of the present invention having a plurality of straight line notches on its surface.

Figure 8A is a three-dimensional schematic diagram of a measurement device of an embodiment of the present invention having a plurality of annular notches on the surface of the incident penetration surface of the cavity.

Figure 8B is a three-dimensional schematic diagram of a cavity of a measuring device according to an embodiment of the present invention having a plurality of annular notches on its surface.

Please refer to FIG. 1, which is a measuring device 100 of an embodiment for measuring a fluid 800 to be measured. The measuring device 100 includes: a cavity 10; an electromagnetic radiation source 20; and a wavefront sensor 30.

The target fluid 800 that can be measured by the aforementioned measuring device 100 can be a fluid of a uniform material (liquid or gas) or a fluid of a non-uniform material.

As shown in FIG. 1, the cavity 10 of the measuring device 100 is used to accommodate the fluid 800 to be measured. The cavity 10 also has an incident penetration surface 11 and an exit penetration surface 12 opposite to the incident penetration surface 11.

As shown in Figure 1, in order to obtain the best detection effect, the angle θ between the incident penetration surface 11 and the exit penetration surface 12 can be set between 0 degrees and 160 degrees.

As for the introduction of the fluid 800 to be tested into the cavity 10 or the extraction of the fluid 800 from the cavity 10, it is a generally known technology in the relevant field and is not within the scope of the present invention. It can be achieved by using at least one additional filling and extraction component without causing the fluid 800 to leak, or by natural diffusion, and will not be elaborated here.

As shown in FIG. 1, the electromagnetic radiation source 20 of the embodiment is disposed on one side outside the cavity 10 and corresponds to the incident penetration surface 11 of the cavity 10, that is, the radiation path or light path of the electromagnetic radiation source 20 directly irradiates the incident penetration surface 11. The electromagnetic radiation source 20 can emit a first electromagnetic wave 60 having at least one radiation wavelength, and the emitted first electromagnetic wave 60 penetrates the incident penetration surface 11 and enters the cavity 10 and is modulated by the fluid 800 to be measured in the cavity 10 into a second electromagnetic wave 70, and then penetrates the exit penetration surface 12 and exits the cavity 10.

As shown in Figure 1, the wavefront sensor 30 is disposed on the other side outside the cavity 10 and corresponds to the emission penetration surface 12. The wavefront sensor 30 senses the wavefront (WAVEFRONT) of the second electromagnetic wave 70, and converts the sensed and received wavefront and outputs a corresponding analog or digital or analog-digital mixed signal group 900.

Next, please refer to FIG. 2, which is another embodiment of a measuring device 200 for measuring a uniform material or a non-uniform material of a fluid 800 (liquid or gas). The measuring device 200 includes: a cavity 10'; an electromagnetic radiation source 20; and a wavefront sensor 30.

As shown in FIG. 2, the cavity 10' of the measuring device 200 is used to accommodate the fluid 800 to be measured, wherein the cavity 10' has at least one incident penetration surface 11. The introduction of the fluid 800 to be measured into the cavity 10' or the exit of the cavity 10' is a technology known in the relevant technical field and will not be elaborated here.

As shown in FIG. 2, the electromagnetic radiation source 20 of the measuring device 200 is disposed on one side outside the cavity 10' and corresponds to the incident penetration surface 11 of the cavity 10'. The electromagnetic radiation source 20 emits a first electromagnetic wave 60 having at least one radiation wavelength, which penetrates the incident penetration surface 11 and enters the cavity 10', and is modulated by the fluid 800 to be measured in the cavity 10' into a second electromagnetic wave 70.

As shown in FIG. 2, the wavefront sensor 30 of the measuring device 200 of this embodiment is disposed in the cavity 10'. The wavefront sensor 30 senses the wavefront of the second electromagnetic wave 70, and converts the sensed wavefront and outputs a corresponding analog or digital or analog-digital mixed signal group 900.

As shown in the embodiment of FIG. 1 and FIG. 2, the measuring device 100 or the measuring device 200 senses the wavefront of the second electromagnetic wave 70 after being refracted by the fluid 800 to be measured by the wavefront sensor 30, and converts and outputs the corresponding signal group 900. The signal group 900 is then received, analyzed and processed by an external signal processing device (SIGNAL PROCESSING DEVICE), and then the average refractive index, refractive index distribution, average concentration, concentration distribution, average density, density distribution, average temperature or temperature distribution of the fluid 800 to be measured in the cavity 10 or cavity 10' are obtained.

For wavefront detection, the wavefront sensor 30 in each embodiment can use a Shack-Hartmann measurement method or a lateral shearing interferometry measurement method. In this way, the wavefront sensor used has a very high precision and can even detect very small changes in the wavefront. As for the analysis or processing of the signal group 900 by the external signal processing device, it is better to use the Zernike Polynomial analysis method in which each item has linear independence characteristics to represent the wavefront aberration, thereby obtaining precise state information such as refractive index distribution, concentration distribution, density distribution, or temperature distribution.

Please refer to Figures 1 and 2 again. In a preferred embodiment, the electromagnetic radiation source 20 of the measuring device 100 or the measuring device 200 can use a laser light source with a divergence angle φ between 0 degrees and 160 degrees. The advantage is that the selection of the electromagnetic radiation source 20 can be diversified while meeting the precise measurement requirements, thereby reducing the difficulty of obtaining the light source and effectively reducing the overall setting cost of the measuring device 100 or the measuring device 200.

Next, please refer to Figures 3A to 3C. The incident penetration surface 11 or the exit penetration surface 12 of the cavity 10 of the measuring device 100 can be set as a curved surface 121 with a curvature radius greater than 1 mm. In this way, the wavefront change of the first electromagnetic wave 60 can be effectively increased and the precision of the wavefront focusing collection and wavefront change of the second electromagnetic wave 70 can be improved. When both the incident penetration surface 11 and the exit penetration surface 12 are set as curved surfaces 121, curved surfaces 121 with different curvature radii can be used respectively.

As shown in FIG. 4, in order to achieve the aforementioned better effect, the incident penetration surface 11 of the cavity 10' of the measuring device 200 can also be set as a curved surface 121 with a curvature radius greater than 1 mm.

Furthermore, as shown in FIGS. 5A to 5C, the incident penetration surface 11 or the exit penetration surface 12 of the cavity 10 of the measuring device 100 can also be set as at least one prism structure 40, and the top angle A of the prism structure 40 can be selected to be between 0 degrees and 60 degrees. In this way, the divergent refractive effect of the prism can also effectively increase the wavefront variation of the first electromagnetic wave 60 and improve the focusing collection of the wavefront of the second electromagnetic wave 70 and the precision of measuring the wavefront variation.

Similarly, in order to achieve the aforementioned better effect, as shown in FIG. 6 , the incident penetration surface 11 of the cavity 10' of the measuring device 200 can also be set as at least one prism structure 40, and the top angle A of the prism structure 40 can also be selected to be between 0 degrees and 60 degrees.

In order to achieve the same better measurement effect, as shown in Figures 7A, 7B and Figures 8A, 8B, in different embodiments, the surface of the incident penetration surface 11 or the exit penetration surface 12 of the cavity 10 of the measuring device 100 can be made to form a plurality of straight line marks 52 or a plurality of annular marks 55, and in order to improve the measurement precision of the wavefront or the wavefront variation, the distance d between any two adjacent straight line marks 52 or any two adjacent annular marks 55 can be selected to be between 0.3 microns and 0.5 mm.

As shown in Figures 7A and 8A, in another embodiment, the surface of the incident penetration surface 11 of the cavity 10' of the measuring device 200 can also be made to form a plurality of straight line marks 52 or a plurality of annular marks 55, and the distance d between any two adjacent straight line marks 52 or any two adjacent annular marks 55 is also between 0.3 microns and 0.5 millimeters.

That is, in order to achieve the best measurement effect, the incident penetration surface 11 or the exit penetration surface 12 of the cavity 10 of the measuring device 100, or the incident penetration surface 11 of the cavity 10' of the measuring device 200, can be selected as a curved surface 121 with a radius of curvature greater than 1 mm, at least one prism structure 40 with a vertex angle A between 0 degrees and 60 degrees, or a straight line notch 52 or annular notch 55 with a spacing d between 0.3 micrometers and 0.5 millimeters formed on the surface.

In summary, as shown in each embodiment, the measuring device 100 or the measuring device 200 of the present invention includes a cavity 10 or a cavity 10' with defined characteristics and connection relationships, an electromagnetic radiation source 20 that irradiates and penetrates the incident penetration surface 11, and a wavefront sensor 30 disposed outside the cavity 10 or inside the cavity 10', thereby achieving simplified components, reducing the overall weight of the system and significantly reducing the installation cost; being suitable for measuring gas or liquid; having the characteristics of high precision, high sensitivity, and strong shock resistance; and being able to accurately measure the average refractive index, average concentration, density, average temperature, refractive index distribution, concentration distribution, density distribution, or temperature distribution of the gas or liquid. In order to obtain the best measurement effect, the incident penetration surface 11 or the exit penetration surface 12 can be set as a curved surface 121, at least one prism structure 40, or the surface has a plurality of straight line notches 52 or a plurality of annular notches 55.

However, the above-mentioned embodiments are used to illustrate the features of the present invention. Their purpose is to enable those familiar with the technology to understand the content of the present invention and implement it accordingly, rather than to limit the patent scope of the present invention. Therefore, any other equivalent modifications or amendments that do not deviate from the spirit disclosed by the present invention should still be included in the scope of the patent application described below.

100: Measuring device

10: Cavity

11: Incident penetration surface

12: Emission penetration surface

20: Electromagnetic radiation source

30: Wavefront sensor

60: The first electromagnetic wave

70: Second electromagnetic wave

800: Fluid to be tested

900:Signal group

φ: Divergence angle

θ: angle of inclination

Claims (10)

A measuring device is used to measure a fluid to be measured, and includes: a cavity, accommodating the fluid to be measured, and having an incident penetration surface and an exit penetration surface opposite to the incident penetration surface; an electromagnetic radiation source, arranged on one side outside the cavity and corresponding to the incident penetration surface, wherein the electromagnetic radiation source emits a first electromagnetic wave of at least one radiation wavelength to penetrate the incident penetration surface and enter the cavity, and the first electromagnetic wave is modulated by the fluid to be measured into a second electromagnetic wave, then penetrates the exit penetration surface and exits the cavity; and a wavefront sensor, arranged on the other side outside the cavity and corresponding to the exit penetration surface, sensing the wavefront of the received second electromagnetic wave and converting and outputting a corresponding signal group. The measuring device as described in item 1 of the patent application scope, wherein the angle between the incident penetration surface and the exit penetration surface is between 0 degrees and 160 degrees. The measuring device as described in item 1 of the patent application scope, wherein the incident penetration surface or the exit penetration surface is at least one prism structure, and a top angle of the prism structure is between 0 degrees and 60 degrees. The measuring device as described in item 1 of the patent application scope, wherein the surface of the incident penetration surface or the exit penetration surface is formed with a plurality of straight line notches or a plurality of annular notches, and the distance between any two adjacent straight line notches or any two adjacent annular notches is between 0.3 micrometers and 0.5 millimeters. A measuring device is used to measure a fluid to be measured, and includes: a cavity to accommodate the fluid to be measured, the cavity having at least one incident penetration surface; an electromagnetic radiation source, arranged on one side outside the cavity and corresponding to the incident penetration surface, wherein the electromagnetic radiation source emits a first electromagnetic wave of at least one radiation wavelength to penetrate the incident penetration surface and enter the cavity, and the first electromagnetic wave is modulated by the fluid to be measured into a second electromagnetic wave; and a wavefront sensor, arranged in the cavity, sensing the wavefront of the received second electromagnetic wave and converting and outputting a corresponding signal group. The measuring device as described in item 5 of the patent application scope, wherein the incident penetration surface is at least one prism structure, and a top angle of the prism structure is between 0 degrees and 60 degrees. The measuring device as described in item 5 of the patent application scope, wherein the surface of the incident penetration surface is formed with a plurality of straight line scratches or a plurality of annular scratches, and the distance between any two adjacent straight line scratches or any two adjacent annular scratches is between 0.3 micrometers and 0.5 millimeters. A measuring device as described in item 1 or item 5 of the patent application, wherein a divergence angle of the electromagnetic radiation source is between 0 degrees and 160 degrees. A measuring device as described in item 1 or item 5 of the patent application scope, wherein the incident penetration surface or the exit penetration surface is a curved surface with a curvature radius greater than 1 mm. A measuring device as described in item 1 or item 5 of the patent application scope, wherein the signal group provides refractive index distribution information, concentration distribution information, density distribution information or temperature distribution information of the fluid to be measured.

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