TWI810694B - Connector for electrical connection - Google Patents

Abstract

The electrical connection connector of an embodiment of the present invention is configured between a tested equipment and a testing device and conducts electricity along the up and down directions to electrically connect the tested equipment and the testing device. The electrical connection connector includes: a mask unit, which divides a plurality of grid regions arranged in a grid pattern and extends in the up and down directions; a conductive unit, which extends in the up and down directions and electrically conducts the upper end of the grid region and the lower end of the grid region; and an insulation unit, which insulates the conductive unit and the mask unit in the grid regions.

Description

Connector for electrical connection

The present invention relates to a connector for electrical connection arranged between a device under test and a test device.

In an inspection program for determining whether a test device such as a fabricated semiconductor device is defective, an electrical connection connector is disposed between the test device and test equipment. There is known an inspection method in which the device under test is electrically connected to a test device with an electrical connection connector, and whether the device under test is defective is determined based on whether the device under test and the test device are energized.

If the terminals of the equipment under test are in direct contact with the terminals of the test device without connectors for electrical connection, the terminals of the test device will be worn or damaged during repeated inspections, resulting in the need to replace the entire test device demand. A connector for electrical connection can be utilized to prevent the need to replace the entire test device.

The connector for electrical connection can be used in an inspection method using a radio frequency (Radio Frequency, RF) signal which is a high-frequency signal. In the case of an inspection method using a radio frequency signal, it is necessary to match the impedance value of the connector for electrical connection according to the frequency band of the radio frequency signal.

The connector for electrical connection may include a plurality of conductive parts that are in contact with terminals of the device under test. It is possible to confirm whether the equipment under test and the test device are powered on by applying radio frequency signals to a plurality of conductive parts. If a radio frequency signal is applied to multiple conductive parts, the multiple conductive parts may interact electromagnetically.

The problem to be solved by the invention

Various embodiments of the present invention provide a stable electrical connection with the device under test and a connector for electrical connection that easily matches impedance values.

Furthermore, various embodiments of the present invention provide a connector for electrical connection that reduces the electromagnetic influence between a plurality of conductive parts.

In an inspection method using a radio frequency signal, a connector for electrical connection needs to have an impedance value matched according to a condition of the inspection method. The connector for electrical connection needs to match the impedance value according to the conditions of the inspection method and provide a stable electrical connection with the device under inspection. If proper impedance matching is not provided, there may be limitations in reliable inspection due to reflection of inspection signals and the like.

In the electrical connection connector, as the cross-sectional area of the conductive portion is larger, a more stable electrical connection between the device under test and the electrical connection connector can be provided. However, it is technically difficult to make the size of the conductive part reach the required level when considering the trend toward finer detail of the equipment under test and the electromagnetic interference and crosstalk explained below.

In the test using radio frequency signals, electromagnetic interference may occur between multiple conductive parts. Connectors for electrical connection may cause cross talk (signal interference). When crosstalk occurs in the connector for electrical connection, it may not be possible to measure whether the connector for electrical connection is energized normally. In the case where crosstalk occurs, the reliability of the inspection method using the connector for electrical connection may decrease. Several embodiments of the present invention address this issue.

Various embodiments of the present invention can easily match the impedance value and provide a stable electrical connection with the device under test by solving this problem.

Various embodiments of the present invention can provide more design margin for the size of the conductive portion.

Moreover, various embodiments of the present invention can prevent electromagnetic interference between the multiple conductive parts of the electrical connector. technical means to solve problems

One embodiment of the present invention provides a plurality of examples of a connector for electrical connection.

According to one embodiment, the connector for electrical connection is arranged between the equipment under test and the test device, and conducts electricity along the vertical direction, so that the device under test and the test device are electrically connected to each other. The above-mentioned connector for electrical connection includes: a shielding part , dividing a plurality of lattice regions arranged in a lattice pattern, and extending along the vertical direction; the conductive part extends along the vertical direction in the above-mentioned lattice region, so that the upper end of the above-mentioned lattice region and the lower end of the above-mentioned lattice region are electrically conductive; and the insulating part , insulating the conductive portion and the mask portion in the lattice region.

The shield part may include: a plurality of first shield walls extending along one side and spaced from each other along the other side crossing the one side; and a plurality of second shield walls extending along the other side. One side extends and is spaced apart from each other along said side.

The mask portion may extend from an upper end of the insulating portion to a lower end of the insulating portion in a vertical direction.

The vertical length of the mask portion may be equal to or greater than the vertical length of the conductive portion.

The above-mentioned mask portion may be formed of a metal material.

The shield portion may laterally surround the outer surface of the conductive portion so as to reduce electromagnetic interference to the conductive portion respectively located in the plurality of lattice regions.

The transverse cross-section of the above-mentioned grid area may be in the shape of a rectangle.

The conductive part may include at least one of conductive particles and conductive metal wires, at least one of the conductive particles and conductive metal wires may be held by silicone rubber, and the insulating part may be made of the same material as the silicone rubber.

The ratio of the diameter length of the transverse section of the conductive portion to the length of the short side of the transverse section of the lattice region may be 1:2 to 1:5.

The ratio of the diameter length of the transverse section of the conductive portion to the diagonal length of the transverse section of the lattice region may be 1:4 to 1:7.

The mask part may include at least one of copper, aluminum, stainless steel, copper alloy, aluminum alloy, and stainless steel alloy, and the insulating part may include silicon rubber.

The above-mentioned insulating part may form a porous foam structure.

The present invention may further include: an upper end film attached to the upper end of the above-mentioned conductive part; and a lower end film attached to the lower end of the above-mentioned conductive part.

The above-mentioned upper end film may include an upper end pad electrically connected to the upper part of the above-mentioned conductive part, and the above-mentioned lower end film may include a lower end pad electrically connected to the lower part of the above-mentioned conductive part. As for the conduction channel for directional conduction, the vertical length of the above-mentioned conductive channel may be greater than the vertical length of the above-mentioned mask part. Efficacy compared to prior art

According to various embodiments of the present invention, a stable electrical connection to the device under test can be provided.

According to various embodiments of the present invention, the impedance value of the connector for electrical connection can be easily matched.

According to various embodiments of the present invention, the size design margin of the conductive portion of the connector for electrical connection can be larger.

According to the embodiments of the present invention, the electromagnetic influence between the plurality of conductive parts of the connector for electrical connection can be reduced.

The multiple embodiments of the present invention are intended to illustrate the technical idea of the present invention. The claimed scope of the invention is not limited to the various embodiments set forth below or to the specific description of these various embodiments.

In the present invention, "embodiment" is an arbitrary distinction for easily explaining the technical idea of the present invention, and the respective embodiments need not be mutually exclusive. For example, multiple structures disclosed in one embodiment can be applied and implemented in another embodiment, and can be applied and implemented with changes without departing from the scope of the present invention.

Unless otherwise defined, all technical and scientific terms used in the present invention have the meanings commonly understood by those of ordinary skill in the art to which the present invention belongs. All terms used in the present invention are selected for the purpose of more clearly describing the present invention, and are not selected for limiting the protection scope of the present invention.

Unless otherwise mentioned in the words or sentences included in the corresponding expressions, expressions such as "comprising", "having", "having" and the like used in the present invention should be understood as including open-ended terms that may contain other embodiments. Terminology (open-ended terms).

Expressions such as "consisting only of the corresponding structure" used in the present invention should be understood as excluding closed-ended terms that may include other structures besides the structure.

Unless otherwise mentioned, the singular expression described in the present invention may include the plural meaning, which is also applicable to the singular expression described in the scope of protection of the invention.

Expressions such as "first" and "second" used in the present invention are used to distinguish multiple structural elements from each other, and are not used to limit the order or importance of these structural elements.

The direction indicators such as "upper side" and "upper" used in the present invention mean the direction in which the electrical connection connector 100 is used as a reference to contact the device under test, and the direction indicators such as "lower side" and "down" mean in the opposite direction to the upside direction. Referring to FIG. 1 , the upper direction may be a direction indicated by "U", and the lower direction may be a direction indicated by "D". In addition, in the present invention, "horizontal direction" means a direction crossing the "vertical direction". This is only a reference for description so that the present invention can be clearly understood, and the upper side and the lower side may be defined differently depending on the reference.

Hereinafter, several embodiments of the present invention will be described with reference to several drawings. In the drawings, the same reference numerals are assigned to the same or corresponding structural elements. In addition, in the following descriptions of multiple embodiments, repeated description of the same or corresponding structural elements may be omitted. However, even if descriptions about structural elements are omitted, it does not mean that such structural elements are not included in an embodiment.

FIG. 1 is a vertical cross-sectional view of an electrical connection connector 100 according to an embodiment.

The electrical connector 100 of an embodiment can be arranged between the device under test and the testing device. The electrical connection connector 100 can electrically connect the device under test and the testing device to each other. The electrical connection connector 100 may be anisotropic in that it conducts electricity in the vertical direction.

The electrical connector 100 may include a shield portion 110 that divides a plurality of regions 115 . The mask part 110 may extend in an up-down direction. The mask part 110 may extend in an up-down direction and divide a plurality of regions 115 .

For convenience, the area 115 surrounded and divided by the mask 110 may be separated from the mask 110 by a predetermined distance, but not limited thereto, and the area 115 may be an area in contact with the inner surface of the mask 110 . The plurality of regions 115 may be separated respectively. Multiple regions 115 can be spaced at the same pitch. The separation distance of the plurality of regions 115 may be the lateral thickness of the mask portion 110 . The arrangement of the plurality of regions 115 and the shape of the electrical connector 100 based thereon will refer to FIGS. 2 and 3 .

The electrical connector 100 may include a conductive portion 120 . The conductive part 120 can extend in the area 115 along the vertical direction, so that the upper end of the area 115 and the lower end of the area 115 conduct electricity. The upper end of the conductive part 120 may be in contact with a terminal of the device under test. A lower end of the conductive part 120 may be in contact with a terminal of the test device. An electrically conductive structure, such as an elastic conductor, a metal plate, etc., may also be arranged between the upper end of the conductive part 120 and the terminal of the device under test. This structure can further improve the electrical contact with the test device. Between the lower end of the conductive part 120 and the terminal of the test device, a conductive structure can be additionally arranged in the same or similar form.

The conductive part 120 may be respectively arranged in a plurality of regions 115 . Some of the plurality of conductive parts 120 respectively arranged in the plurality of regions 115 may be a ground conductive part in contact with a ground terminal of the device under test. The grounding conductive portion discharges leakage current, static electricity, etc. that may occur in the device under test to the outside of the electrical connection connector 100 . The ground conductive portion 120 can prevent crosstalk (signal interference) from occurring in the electrical connector 100 by releasing leakage current, static electricity, etc. to the outside of the electrical connector 100 . Grounding the conductive parts can remove electromagnetic interference or crosstalk between the conductive parts.

The electrical connector 100 may include an insulating portion 130 that insulates the conductive portion 120 from the shield portion 110 in the region 115 . The insulating part 130 may include an insulating insulating substance. The insulation part 130 may be filled between the conductive part 120 and the mask part 110 in the region 115 . The insulation part 130 may be in contact with the outer surface of the conductive part 120 and the inner surface of the mask part 110 laterally.

FIG. 2 is an example of a plan view of the electrical connection connector 100 viewed from the direction “A” in FIG. 1 .

As an example of the connector 100 for electrical connection, as shown in FIG. 2 , the shield portion 110 may define a cylindrical region 115 . The cylindrical area 115 can be surrounded by the mask part 110 . When the region 115 is cylindrical, the region 115 may have a circular-shaped transverse cross-section. The lateral cross-section of the conductive part 120 disposed in the region 115 may be circular.

When both the region 115 and the conductive part 120 may have a circular cross-section, the conductive part 120 may be separated from the mask part 110 by a prescribed distance. The outer surface of the conductive portion 120 and the inner surface of the mask portion 110 may be spaced apart by the same distance in the lateral direction. The distance between the outer surface of the conductive part 120 and the inner surface of the mask part 110 may be constant along the outer circumference of the conductive part 120 . The outer surface of the conductive part 120 may be a virtual boundary surface on which conductive particles and/or conductive metal wires are arranged. The virtual boundary surface may be set based on the average size of the virtual boundary surface on which the conductive particles and/or conductive metal wires are disposed.

The electrical connector 100 may include an insulating part 130 that insulates the conductive part 120 from the cover part 110 between the conductive part 120 and the cover part 110 . The transverse section of the insulating part 130 may be in the shape of a cylinder forming an inner cavity. The lateral thickness of the insulating part 130 may be constant along the outer circumference of the conductive part 120 . The lateral thickness of the insulation part 130 may be the lateral distance between the outer surface of the conductive part 120 and the inner surface of the mask part 110 . The insulating part 130 may be in contact with the outer surface of the conductive part 120 and the inner surface of the shielding part 110 laterally. The inner surface of the insulation part 130 may be in contact with the outer surface of the conductive part 120 , and the outer surface of the insulation part 130 may be in contact with the inner surface of the shield part 110 .

FIG. 3 is another example of a plan view of the electrical connection connector 100 viewed from the direction “A” in FIG. 1 .

As another example of the connector 100 for electrical connection, as shown in FIG. 3 , the mask portion 110 can divide a region 115 of rectangular pillars (including square pillars). The area 115 having the lattice pattern may be referred to as a lattice area 115 . The area 115 of the rectangular column may be surrounded by the mask portion 110 . Region 115 may have a rectangular (including square) shape in transverse cross-section. In this case, the lateral cross-section of the conductive part 120 disposed inside the region 115 may have a circular shape.

When the mask part 110 divides the area 115 of the rectangular column, the mask part 110 may include walls extending in an up-down direction. The shroud part 110 may include a plurality of first shroud walls 110a extending along one side in the transverse direction and spaced apart from each other along the other side across the one side. The cover part 110 may include a plurality of second cover walls 110b extending along the other side and spaced apart from each other along one side.

The distance between the plurality of first shield walls 110 a and the distance between the plurality of second shield walls 110 b may be the same. The plurality of first shield walls 110a and the plurality of second shield walls 110b can be arranged to cross each other. The area 115 may be divided by the plurality of first shield walls 110a and the plurality of second shield walls 110b.

In the connector 100 for electrical connection, the regions 115 can be arranged in a grid pattern. The regions 115 may be arranged at the same distance from each other. The regions 115 may be arranged side by side with each other.

When the region 115 has a rectangular cross-section, the distance between the conductive portion 120 and the mask portion 110 changes along the periphery of the conductive portion 120 . In the lateral direction, the outer face of the conductive part 120 and the inner face of the mask part 110 may be spaced apart at different intervals along the outer circumference of the conductive part 120 . As the distance between the conductive part 120 and the mask part 110 changes, the matching of the impedance value can be simpler. Hereinafter, with reference to FIG. 5 , the matching of the impedance value based on the variation of the separation pitch between the conductive portion 120 and the mask portion 110 will be described in more detail.

The electrical connection connector 100 may include an insulating part 130 that insulates the conductive part 120 and the cover part 110 between the conductive part 120 and the cover part 110 . A transverse cross-section of the insulation part 130 may be a rectangular shape forming a circular space inside. The lateral thickness of the insulating part 130 may vary along the outer circumference of the conductive part 120 . The insulation part 130 may be in contact with the outer surface of the conductive part 120 and the inner surface of the mask part 110 . The inner surface of the insulating part 130 may be in contact with the outer surface of the conductive part 120 , and the outer surface of the insulating part 130 may be in contact with the inner surface of the shielding part 110 . The inner surface of the insulating part 130 may be in contact with the outer surface of the conductive part 120 as a virtual boundary surface forming the conductive part 120 .

FIG. 4 is a perspective view of a part of the electrical connection connector 100 shown in FIG. 3 .

A part of the electrical connection connector 100 shown in FIG. 4 may be a unit structure of the electrical connection connector 100 that conducts electricity between the upper side of the electrical connection connector 100 and the lower side of the electrical connection connector 100 .

The shield portion 110 of the electrical connector 100 may be formed of a metal material. For example, the metal material may include at least one of copper, aluminum, stainless steel, copper alloy, aluminum alloy, and stainless steel alloy. The mask portion 110 formed of a metal material can laterally surround outer surfaces of the conductive portions 120 respectively located in the plurality of regions 115 .

The plurality of conductive parts 120 respectively located in the plurality of regions 115 can generate electromagnetic influence with each other. The shield part 110 formed of metal material can laterally surround the outer surfaces of the plurality of conductive parts 120 to reduce the electromagnetic influence that may occur on each conductive part 120 . Since the shield portion 110 is grounded, an area for reducing electromagnetic interference can be formed.

The shield portion 110 can laterally surround the outer surface of the conductive portion 120 to reduce electromagnetic interference to the conductive portion 120 . The conductive portion 120 can be electromagnetically shielded by a predetermined ratio by the shielding portion 110 . As the shielding portion 110 reduces electromagnetic interference to the conductive portion 120 , crosstalk such as electromagnetic noise can be prevented from occurring in the electrical connector 100 . Therefore, the reliability of the inspection method using the electrical connector 100 can be improved.

The conductive portion 120 of the electrical connector 100 may include conductive particles and/or conductive metal wires 121 . The conductive part 120 may include a sustaining part 122 for sustaining the conductive particles and/or the conductive metal wire 121 . The maintaining part 122 may include silicon rubber. As the conductive part 120 includes silicone rubber as the sustaining part 122, the conductive part 120 may have elasticity.

The insulating portion 130 of the electrical connector 100 may be made of the same material as silicon rubber. The insulating part 130 of the electrical connection connector 100 may include an insulating substance. The insulating part 130 may include silicon rubber as an insulating substance. The insulating material of the insulating part 130 may be the same material as the sustaining part 122 that sustains the conductive part 120 of the conductive particles and/or the conductive metal wire 121 . As the insulating part 130 includes silicon rubber as an insulating substance, the insulating part 130 may have elasticity.

The shield portion 110 of the electrical connector 100 may extend from the upper end of the insulating portion 130 to the lower end of the insulating portion 130 . The upper end of the mask part 110 may be located at the same height as the upper end of the insulating part 130 . A lower end of the mask part 110 may be located at the same height as a lower end of the insulating part 130 . The mask part 110 may contact the outer surface of the insulating part 130 laterally, and extend relative to the entire vertical direction of the insulating part 130 .

The vertical length of the mask part 110 may be the same as the vertical length of the conductive part 120 . When the conductive part 120 extends from the upper end of the insulating part 130 to the lower end of the insulating part 130 , the shield part 110 may extend from the upper end of the insulating part 130 to the lower end of the insulating part 130 . Wherein, the vertical length of the conductive portion 120 may be the same as the vertical length of the mask portion 110 .

The vertical length of the mask part 110 may be greater than the vertical length of the conductive part 120 . The conductive part 120 may extend a part of the vertical length of the insulating part 130 . For example, the conductive part 120 may extend 0.2 to 0.8 times the vertical length of the insulating part 130 . The mask part 110 may extend from an upper end of the insulating part 130 to a lower end of the insulating part 130 . Wherein, the vertical length of the mask portion 110 may be greater than the vertical length of the conductive portion 120 .

As the vertical length of the shielding portion 110 is the same as or greater than the vertical length of the conductive portion 120 , the shielding portion 110 can laterally surround the entire vertical length of the conductive portion 120 .

Fig. 5 is a plan view of a part of the electrical connection connector viewed from the "B" direction in Fig. 4 . The matching of the impedance value of the electrical connection connector 100 will be described in more detail with reference to FIG. 5 .

When the electrical connection connector 100 is used in an inspection method using radio frequency signals as high frequency signals, in order to improve power transmission efficiency and reduce signal waveform distortion, the impedance value of the electrical connection connector 100 can be adjusted according to the frequency domain of the radio frequency signal to match. The impedance value of the connector 100 for electrical connection may be based on the impedance value of the region 115 as a structure in contact with the terminal of the device under test.

The connector 100 for electrical connection should provide a stable electrical connection with the device under test while matching the impedance value. In the device under test that the connector 100 for electrical connection contacts, the size of the terminals can be changed according to a pitch that is a designed distance between the terminals. For stable electrical connection with the device under test, the electrical connection connector 100 needs to have a conductive portion 120 having a size corresponding to the size of the terminal of the device under test.

Referring to FIG. 5 , the diameter length of the transverse section of the conductive part 120 may be a. The diameter of the transverse section of the conductive part 120 can be measured based on the outer surface of the conductive part 120 as a virtual boundary surface where the conductive particles and/or conductive metal wires 121 (see FIG. 4 ) of the conductive part 120 are arranged. The average length of the diameter.

The transverse cross-section of region 115 may be rectangular in shape. For example, the shape of the transverse cross-section of region 115 may be a square. The length of the short side of the transverse section of the region 115 may be b1. The diagonal length of the transverse section of the region 115 may be b2. The diagonal line may be a line connecting two vertices not adjacent to each other in the transverse section of the region 115 . When the area 115 is a square, since the lengths of the four sides of the transverse section of the area 115 are the same, in the area, the length of the short side means the length of any one of the four sides.

In the connector 100 for electrical connection, the impedance value of the region 115 can be obtained by the following mathematical formula. [mathematical formula 1] In Equation 1, a may be the diameter length of the conductive part 120 in the transverse section, and b may be the portion surrounding the conductive part 120 in the transverse section, that is, may be the average side length of the region 115 filling the insulating part 130 . Also, in Mathematical Formula 1, ε can be the permittivity (permittivity; εγ is the dielectric constant), μ can be the magnetic permeability (permeability), L can be the inductance (inductance), and C can be the capacitance (capacitance) .

Hereinafter, the case where the region 115 has a circular cross section and the case where the region 115 has a rectangular cross section are compared.

Referring to FIG. 2 , in the case where the region 115 has a circular cross section, the average side length b of the region 115 may be the diameter of the region 115 .

As shown in FIG. 2 , the distance from the conductive part 120 to the mask part 110 is the same along the outer circumference of the conductive part 120 . Therefore, if the average side length b of the region 115 is determined, the diameter length a of the conductive portion 120 for matching the impedance value can also be determined according to b.

For stable electrical connection with the device under test, the connector 100 for electrical connection should have a size of the conductive portion 120 corresponding to the size of the terminal of the device under test. When determining the impedance value Z ₀ , the diameter length a of the conductive part 120 is determined according to the average side length b of the region 115 (the diameter of the circular section of the region 115 ). Therefore, a design margin capable of changing the diameter of the conductive part 120 can be reduced, making it difficult to increase the diameter of the conductive part 120 . Therefore, it is difficult to achieve a stable electrical connection with the device under test.

Referring to FIG. 3 , when the area 115 has a rectangular cross section, the average side length b of the area 115 can be obtained based on the short side length, long side length, and diagonal length of the area 115 .

As shown in FIG. 5 , the distance from the conductive portion 120 to the mask portion 110 may vary along the periphery of the conductive portion 120 . The short side length of the transverse section of the region 115 may be b1, and the diagonal length of the transverse section of the region 115 may be b2. The average side length b of the region 115 may be a value between b1 and b2 shown in FIG. 5 . The diagonal length b2 of the transverse section of the region 115 is greater than the short side length b1. Therefore, the average side length b of the region 115 may be greater than the short side length b1.

To sum up, if the region 115 has a square cross section, the region 115 may have a larger average side length b than the case where the region 115 has a circular cross section. Therefore, the diameter a of the conductive part 120 for matching the impedance value may increase.

In order to stably electrically connect with the device under test, the connector 100 for electrical connection should have a conductive portion 120 whose size corresponds to the size of the terminal of the device under test. In the case where the region 115 has a rectangular-shaped cross section, the average side length b may relatively increase, and thus, the diameter a of the conductive portion 120 for setting the design impedance Z ₀ may also increase. Therefore, a stable electrical connection with the device under test can be provided. Also, the design margin of the electrical connector 100 may be larger.

When the appropriate impedance value _Z0 of the electrical connection connector 100 has been determined, the ratio of the diameter length a of the transverse section of the conductive part 120 to the short side length b1 of the transverse section of the region 115 may be 1:2 to 1:5 .

When the appropriate impedance value _Z0 of the electrical connection connector 100 has been determined, the ratio of the diameter length a of the transverse section of the conductive part 120 to the diagonal length b2 of the transverse section of the region 115 may be 1:4 to 1: 7.

FIG. 6 is a perspective view of a part of an electrical connector 100 according to yet another embodiment.

The electrical connector 100 of another embodiment may also include the structural elements of the electrical connector 100 of the first embodiment. In the drawings, the same reference numerals may mean the same structural elements.

In still another embodiment of the electrical connector 100 , the insulating portion 130 may form a porous foam structure. A plurality of pores may be formed in the porous foam structure of the insulating part 130 . As the insulating part 130 forms a porous foam structure, the permittivity (permittivity) of the insulating part 130 may decrease. When the permittivity of the insulating portion 130 is lowered, it is possible to more effectively prevent electromagnetic interference between the plurality of conductive portions 120 of the electrical connector 100 . As the insulating part 130 forms a porous foam structure, the insulating part 130 may have elasticity.

FIG. 7 is a vertical cross-sectional view of an electrical connection connector 100 according to another embodiment.

The electrical connection connector 100 of another embodiment may include an upper end film 140 attached to the upper end of the conductive part 120 . The upper end film 140 may include an upper end pad 141 electrically connected to an upper portion of the conductive part 120 . The upper end film 140 may be in contact with an upper portion of the conductive part 120 . The shape and size of the upper pad 141 may correspond to the shape and size of the conductive part 120 . The upper pad 141 may have conductivity. The upper pad 141 may include conductive particles. The upper film 140 may include an upper maintaining sheet 142 maintaining the upper pad 141 . The upper end maintaining sheet 142 may include at least one of silicon rubber, silicon rubber, and synthetic resin (eg, polyimide). The maintaining sheet 142 is in the shape of a film, and may include silicone rubber, silicon rubber, and synthetic resin.

The electrical connection connector 100 of another embodiment may include a lower end film 150 attached to the lower end of the conductive part 120 . The lower end film 150 may include a lower end pad 151 electrically connected to a lower portion of the conductive part 120 . The lower end film 150 may be in contact with a lower portion of the conductive part 120 . The shape and size of the lower end pad 151 may correspond to the shape and size of the conductive part 120 . The lower end pad 151 may have conductivity. The lower end pad 151 may include conductive particles. The lower end film 150 may include a lower end maintaining sheet 152 maintaining the lower end pad 151 . The lower end maintaining sheet 152 may include at least one of silicon rubber, silicon rubber, and synthetic resin (eg, polyimide).

The upper pad 141 , the conductive portion 120 and the lower pad 151 can form a conductive channel 160 conducting electricity along the vertical direction. The upper end of the electrical connection connector 100 and the lower end of the electrical connection connector 100 can conduct electricity through the conductive channel 160 .

The vertical length of the conductive part 120 may be the same as or smaller than the vertical length of the mask part 110 . The vertical length of the conductive channel 160 including the upper pad 141 , the conductive portion 120 and the lower pad 151 may be greater than the vertical length of the mask portion 110 .

Various embodiments provide the electrical connection connector 100 that is stably electrically connected to the device under test. According to various embodiments of the present invention, the impedance value of the electrical connector 100 can be easily matched. Moreover, according to multiple embodiments of the present invention, the electromagnetic influence between the plurality of conductive parts 120 of the electrical connector 100 can be reduced.

Above, although the technical idea of the present invention has been described through some embodiments and the examples shown in the accompanying drawings, various replacements can be made within the technical idea and scope of the present invention that can be understood by those of ordinary skill in the technical field of the present invention , deformation and change. Moreover, such substitutions, deformations and changes shall fall within the protection scope of the appended invention claims.

100: connector for electrical connection 110: shield part 110a: first shield wall 110b: second shield wall 115: area 120: conductive part 121: conductive particles and/or conductive metal wire 122: sustaining part 130 : insulating part 140: upper end film 141: upper end pad 142: upper end maintaining sheet 150: lower end film 151: lower end pad 152: lower end maintaining sheet 160: conductive channel a, b, b ₁ , b ₂ : length D: lower side direction U : upside direction

Fig. 1 is a vertical cross-sectional view of an electrical connection connector according to an embodiment. Fig. 2 is an example of a plan view of the electrical connection connector viewed from the direction "A" in Fig. 1 . Fig. 3 is another example of a plan view of the electrical connection connector viewed from the direction "A" in Fig. 1 . Fig. 4 is a perspective view of a part of the electrical connection connector shown in Fig. 3 . Fig. 5 is a plan view of a part of the electrical connection connector viewed from the "B" direction in Fig. 4 . Fig. 6 is a perspective view of a part of an electrical connection connector according to yet another embodiment. Fig. 7 is a cross-sectional view in the vertical direction of another embodiment of the connector for electrical connection.

100: Connector for electrical connection

110: mask part

110a: first mask wall

110b: second shield wall

115: area

120: conductive part

130: insulation part

Claims (12)

A connector for electrical connection, arranged between the tested equipment and the test device, conducts electricity along the vertical direction, so that the above-mentioned tested equipment and the above-mentioned test device are electrically connected to each other, including: a mask part, divided by a grid pattern A plurality of lattice regions are arranged and extend along the vertical direction; the conductive part extends along the vertical direction in the above-mentioned lattice region, so that the upper end of the above-mentioned lattice region and the lower end of the above-mentioned lattice region are electrically conductive; and the insulating part is in the above-mentioned lattice region Insulate the above-mentioned conductive portion and the above-mentioned shield portion; wherein, the above-mentioned shield portion is formed of a metal material, and the above-mentioned shield portion laterally surrounds in a manner to reduce electromagnetic interference to the above-mentioned conductive portion respectively located in the plurality of grid regions The outer surface of the above-mentioned conductive part. The connector for electrical connection according to claim 1, wherein the shield portion includes: a plurality of first shield walls extending along one side and spaced from each other along the other side crossing the one side; and A plurality of second shield walls extend along the other side and are spaced apart from each other along the one side. The electrical connection connector according to claim 1, wherein the shield portion extends from the upper end of the insulating portion to the lower end of the insulating portion along the vertical direction. The connector for electrical connection according to claim 1, wherein the above-mentioned shielding part The length in the vertical direction is the same as or greater than the length in the vertical direction of the conductive portion. The connector for electrical connection according to claim 1, wherein the transverse cross-section of the grid area is rectangular. The connector for electrical connection according to claim 1, wherein the conductive part includes at least one of conductive particles and conductive metal wires, at least one of the conductive particles and conductive metal wires is maintained by silicone rubber, and the insulating The part is made of the same material as the above-mentioned silicone rubber. The connector for electrical connection according to claim 1, wherein the ratio of the diameter length of the transverse section of the conductive portion to the length of the short side of the transverse section of the grid region is 1:2 to 1:5. The connector for electrical connection according to claim 1, wherein the ratio of the diameter length of the transverse section of the conductive portion to the diagonal length of the transverse section of the grid area is 1:4 to 1:7. The connector for electrical connection according to claim 1, wherein the shielding portion includes at least one of copper, aluminum, stainless steel, copper alloy, aluminum alloy, and stainless steel alloy, and the insulating portion includes silicon rubber. The connector for electrical connection according to claim 1, wherein the insulating part has a porous foam structure. The connector for electrical connection according to claim 1, further comprising: an upper end film attached to the upper end of the above-mentioned conductive part; and The lower end film is attached to the lower end of the conductive portion. The connector for electrical connection according to claim 11, wherein the upper end film includes an upper end pad electrically connected to the upper part of the conductive part, the lower end film includes a lower end pad electrically connected to the lower part of the conductive part, the upper end pad, the The conductive portion and the lower end pad form a conductive channel conducting electricity along the vertical direction, and the vertical length of the conductive channel is greater than the vertical length of the shielding portion.