TWI741715B - Carrier device - Google Patents

Abstract

This invention provides a carrier device for a testing machine, wherein a limiter is detachably arranged on a placement area of a base, the limiter is pivotally connected to a positioning member that is away from or close to the limiter, and the base is covered with a cover body, such that a probe card is positioned in the placement area through a connection of the limiter and the positioning member, and then the carrier device is mounted on the testing machine to improve the placement stability of the probe card.

Description

Carrying device

The present invention relates to a carrying device, in particular to a removable carrying device used for inspection operations in a semiconductor manufacturing process.

With the vigorous development of the electronics industry, electronic products are gradually moving towards the trend of multi-function and high performance. There are many technologies currently used in the field of chip packaging, such as Chip Scale Package (CSP), Direct Chip Attached (DCA), or Multi-Chip Module (Multi-Chip Module). MCM) and other flip-chip package modules, or the three-dimensional stacking and integration of chips into a three-dimensional integrated circuit (3D IC) chip stacking module.

The electrical testing equipment used by the current packaging and testing plants in the packaging and testing phase adopts standardized testing machines, which test a single electronic package and its terminal products.

However, in conventional inspection operations, the specifications of electronic packages often change, so packaging and testing factories need to configure different probe cards according to the design requirements of different electronic packages, so they need to be configured to match the probe card ( Probe Card) testing machine, the steps to replace the testing machine is very time-consuming, and the cost of purchasing various testing machines is also very expensive, which makes it difficult to reduce the production cost of electronic packages and their terminal products.

Therefore, how to overcome the various deficiencies of the above-mentioned conventional technologies has become an urgent problem to be solved at present.

In order to solve the above-mentioned problems of the prior art, the present invention proposes a bearing device, which includes: a base with a placement area for placing a target; a limiter, which is placed on the base. The target is limited on the area; the positioning member is pivotally connected to the base or the limiting member in a pivotable manner, and is used to position the target on the placement area of the base And the cover, which is pivotally connected to the base to cover the target.

In the aforementioned carrying device, the placing area is hollow to form an accommodating space with the limiting member.

In the aforementioned carrying device, the limiting member is correspondingly disposed on the base in a detachable manner.

In the aforementioned carrying device, the limiting member is a ring-shaped frame.

In the aforementioned carrying device, the limiting member is arranged in a manner capable of rotating relative to the base.

In the aforementioned load-bearing device, the edge of the limiting member is provided with a stopper for fixing the positioning member.

In the aforementioned load-bearing device, the edge of the positioning member is provided with a fixing portion for fixing the limiting member.

In the aforementioned carrying device, at least one telescopic structure is arranged between the positioning member and the base.

In the aforementioned carrying device, at least one telescopic structure is arranged between the cover and the base.

The aforementioned carrying device further includes at least one fixing structure provided on the base to limit the displacement range of the wire of the target.

It can be seen from the above that, when the carrying device of the present invention is in use, the target is positioned in the placement area mainly by the cooperation of the limiting member and the positioning member, and then the carrying device is installed in the inspection machine. Therefore, the load-bearing device can improve the placement stability of the target, so that the target is not easily damaged. Therefore, when the semiconductor package inspection operation is performed by the carrier device, different probe cards (that is, the target) can be exchanged according to the specifications of the electronic package, without the need to replace the inspection machine, so as to save inspection time and only It is necessary to use a single testing machine to cooperate with the carrying device to perform testing operations, which can greatly save equipment costs and help reduce the production costs of electronic packages and their terminal products.

1: Carrying device

10: Protective parts

11: Pedestal

11a: Placement area

112: Supporting structure

12: Limit parts

12a: inner peripheral surface

120: Stop

120a: Port

120b: Orbit

121: Driving Department

13: positioning parts

13a: outer peripheral surface

130: fixed part

131, 141: Telescopic structure

132: Control Department

133: Buffer

14: Lid

142: Handle

143: Gap

15,16: fixed structure

151: Cluster

161: guide slot

2: target

A,A’: target direction

B, C: Pressing direction

S: accommodating space

Figure 1 is a schematic diagram of the carrying device of the present invention.

Figure 2 is a schematic top plan view of the carrying device of the present invention when the target is installed.

3A to 3B are partial side views of the limiting member and the positioning member of the carrying device of the present invention when in operation.

The following specific examples illustrate the implementation of the present invention. Those familiar with the art can easily understand the other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structure, ratio, size, etc. shown in the accompanying drawings in this manual are only used to match the content disclosed in the manual for the understanding and reading of those familiar with the art, not for use In order to limit the conditions under which the present invention can be implemented, it does not have a technically essential meaning. Any structural modification, proportional relationship change, or size adjustment does not affect the effects and objectives that can be achieved by the present invention. All should still fall within the scope of the technical content disclosed in the present invention. At the same time, the terms "on", "first", "second" and "one" cited in this specification are only for ease of description and are not used to limit the scope of the present invention. The change or adjustment of the relative relationship shall be regarded as the scope of the implementation of the present invention without substantial change in the technical content.

FIG. 1 is a three-dimensional schematic diagram of the carrying device 1 of the present invention. As shown in FIG. 1, the carrying device 1 includes: a base 11, a limiting member 12, a positioning member 13 and a cover 14.

The base 11 is generally a rectangular base body, which is used to carry a target object 2, as shown in FIG. 2, and can be installed on a testing machine (the figure is omitted).

In this embodiment, the target 2 is a probe card for detection by a testing machine.

Furthermore, a placement area 11a for placing the target 2 is defined at the center of the base 11. For example, the placement area 11a has a circular hollow shape, and a frame-like support structure 112 is formed at the bottom of the hollow. Specifically, a pot-shaped protective member 10 with a hollow bottom is placed in the placement area 11 a, and the supporting structure 112 is a symmetrical frame and is disposed at the bottom of the protective member 10 to stably carry the target 2. It should be understood that there are many types of the placement area 11a, which are not limited to the above, and are hereby described.

The limiting member 12 is a ring-shaped frame, which is provided on the base 11 in a detachable manner corresponding to the placement area 11a, so as to facilitate the replacement of the limiting member 12 of different sizes.

In this embodiment, the limiting member 12 is leaned against the wall surface of the protective member 10 to be placed on the upper surface of the base 11 so that the limiting member 12 will not fall from the placing area 11a. And it is conducive to disassembly and assembly. For example, the limiting member 12 is roughly aligned with the edge of the placement area 11a to form a container in the placement area 11a. The space S is set to frame the target object 2, so it is advantageous to install the target object 2. Specifically, the limiting member 12 can rotate relative to the base 11 to rotate to a desired position. It should be understood that there are many types of the limiting member 12, which are not limited to the above, and are hereby explained.

Furthermore, at least one stop 120 can be arranged on at least one edge of the limiting member 12 to stop the positioning member 13 as required. For example, the stop portion 120 is a corner groove. As shown in FIG. 3A, the stop portion 120 has a port 120a and a track 120b communicating with the port 120a and turning relative to the port 120a. Specifically, the port 120a is connected to the top surface of the limiting member 12, and the track 120b is formed obliquely extending along the inner peripheral surface 12a of the limiting member 12.

In addition, the limiting member 12 can be configured with a driving portion 121 like a handle according to requirements, so as to facilitate pulling or rotating the limiting member 12.

The positioning member 13 is a ring-shaped frame, which is pivotally connected to a side of the base 11 and/or a side of the limiting member 12 in a freely pivotable manner so as to be close to or away from the limiting member 12 performs displacement, and the positioning member 13 is used to position the target 2 on the placement area 11a of the base 11.

In this embodiment, the positioning member 13 is provided with a handle 132, such as a handle, which can be held on the other side relative to the pivot joint, so that the operator can hold the handle 132 and lift or cover it. The positioning member 13.

Furthermore, at least one telescopic structure 131 such as a hydraulic rod or a pneumatic rod can be arranged between the base 11 and the positioning member 13 as required. For example, the telescopic structure 131 is a telescopic rod mechanism, and its opposite ends are respectively connected to the base 11 and the positioning member 13 in a displaceable manner, so that the positioning member 13 is displaced by telescoping. It should be understood that there are many types of telescopic structures 131, such as spring mechanisms, which are not limited to the above.

In addition, the positioning member 13 may be configured with at least one fixing portion 130 corresponding to the stopping portion 120 of the limiting member 12, so that the fixing portion 130 is engaged with the stopping portion 120, so that the positioning member 13 and the limiting member 12 are fixed to each other. For example, the fixing portion 130 is in the shape of a convex column, which is formed on the outer peripheral surface 13a of the positioning member 13 to The rail 120b enters and exits from the port 120a of the stopper 120. Specifically, as shown in FIGS. 3A to 3B, when the positioning member 13 is covered, the fixing portion 130 enters one side of the rail 120b from the port 120a, and then the positioning member 12 is moved along the target direction A (as shown in FIG. 3A or clockwise as shown in FIG. 1) is rotated so that the fixing portion 130 is located on the other side of the rail 120b, so that the fixing portion 130 cannot leave the rail 120b from the port 120a Therefore, the positioning member 13 and the limiting member 12 are fixedly connected, that is, the positioning member 13 will not spring upward due to the action of the telescopic structure 131.

In addition, the surface of the positioning member 13 facing the limiting member 12 may have a plurality of convex cylindrical buffer portions 133, such as rubber or other elastic materials, which are arranged at intervals along the bottom surface of the ring frame, so when the positioning member 13 is pressed down When the target 2 is pressed, the buffer portions 133 can be pressed against the target 2 to prevent the target 2 from being scratched or cracked.

Therefore, when the target 2 is placed in the accommodating space S, the positioning member 13 is first pivoted in the direction of the limiting member 12 (the downward pressing direction B as shown in FIG. 1) to cover it Above the supporting structure 112, the positioning member 13 is pressed against the periphery of the target 2 so that the main probe of the target 2 (probe card) is exposed on the positioning member 13, and then the limiting member 12 is rotated To fix the positioning member 13. Conversely, when the detection operation is completed or the target 2 needs to be replaced, rotate the limit in the direction opposite to the target direction A (the target direction A'shown in FIG. 3B or counterclockwise in FIG. 1) 12, so that the fixing portion 130 is located at the port 120a of the rail 120b, so that the fixing portion 130 can leave the rail 120b from the port 120a, that is, the positioning member 13 will spring upward under the action of the telescopic structure 131 Open, so that the positioning member 13 is pivoted and lifted, that is, the user can exchange the target 2 from the accommodating space S.

The cover 14 is pivotally connected to the base 11 to move closer to or away from the base 11.

In this embodiment, the cover 14 is provided with a handle 142 for holding on the other side relative to the pivot joint, so that the operator can hold the handle 142 to lift or cover the cover 14. Therefore, when placing the target 2 in the accommodating space S, first the positioning member 13 is pressed against the target 2, and then Rotate the cover 14 in the direction of the base 11 (as shown in FIG. 1 in the downward pressing direction C) to cover the top of the base 11, so that the cover 14 covers the target 2 to achieve dustproof The purpose is to enable the target 2 to operate in the inspection machine. On the other hand, when the detection operation is completed or the target 2 needs to be replaced, the cover 14 and the positioning member 13 can be pivoted and lifted in order to exchange the target 2 from the accommodating space S.

Furthermore, at least one telescopic structure 141 such as a hydraulic rod or a pneumatic rod can be arranged between the base 11 and the cover 14 as required. For example, the telescopic structure 141 is a telescopic rod mechanism, and its opposite ends are respectively connected to the base 11 and the cover 14 in a displaceable manner, so that the cover 14 can correspondingly telescope and rotate when the cover 14 is in motion. It should be understood that there are many types of telescopic structures 141, such as spring mechanisms, which are not limited to the above.

In addition, the cover 14 and the base 11 can be respectively provided with corresponding fixing structures (such as fitting, snapping, buckling, screwing, etc.), so that the cover 14 can temporarily be placed under the cover. The base 11 is fixedly connected to prevent the carrying device 1 from entering the accommodating space S due to the loosening of the cover 14 during the inspection process or the transportation process, and to prevent the target 2 from being damaged.

In addition, one side of the cover 14 is provided with a notch 143 for the wire (not shown in the figure) of the target 2 to pass through. For example, a fixing structure 16 corresponding to the notch 143 can be arranged on the base 11, and the upper edge of the fixing structure 16 can be provided with a plurality of guiding grooves 161 to guide the wire of the target 2 such as a radio frequency cable (RF cable) to pass through. Electrical connection testing machine. Specifically, after the cover 14 is covered, the notch 143 cooperates to accommodate the fixing structure 16 to limit the displacement range of the wire of the target 2 so that the wire of the target 2 is controlled by the cover 14 and the The fixing structure 16 does not move, and can prevent the wire from being bent, so that the stability of the signal transmission of the wire can be maintained.

It should be understood that, depending on the type of wiring of the target 2, the carrying device 1 can be designed with various fixing structures on the base 11, such as a flat-wire fixing structure 15 with a condensing portion 151, so as to achieve this goal. The flat wire of the target 2 is integrated in the bundle portion 151 to avoid bending of the flat wire of the target 2.

Therefore, when the carrying device 1 of the present invention is in use, the target 2 can be positioned in the accommodating space S by the cooperation of the limiting member 12 and the positioning member 13, and then the carrying device 1 can be installed in the accommodating space S. In the inspection machine, the wire of the target 2 is electrically connected to the inspection machine or the electronic package. Therefore, the carrier device 1 can not only improve the stability of the target 2 but also make the target 2 not easily damaged. , And can ensure the good condition of the wire of the target 2 by the fixing structures 15, 16 to stably transmit the signal to ensure the reliability of the detection operation.

To sum up, the carrier device 1 of the present invention can be used to exchange different probe cards (that is, the target 2) according to the specifications of the electronic package during semiconductor package inspection operations, without the need to replace the inspection machine. Save inspection time, and only need to use a single inspection machine to cooperate with the carrying device 1 to perform inspection operations (for example, directly replace the carrying device 1 according to the specifications of the target 2), which can greatly save equipment costs and help reduce The production cost of electronic packages and their end products.

The above-mentioned embodiments are used to exemplify the principles and effects of the present invention, but not to limit the present invention. Anyone familiar with this technique can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.

1: Carrying device

10: Protective parts

11: Pedestal

11a: Placement area

112: Supporting structure

12: Limit parts

12a: inner peripheral surface

120: Stop

121: Driving Department

13: positioning parts

13a: outer peripheral surface

130: fixed part

131, 141: Telescopic structure

132: Control Department

133: Buffer

14: Lid

142: Handle

143: Gap

15,16: fixed structure

151: Cluster

161: guide slot

A: Target direction

B, C: Pressing direction

S: accommodating space

Claims (10)

A bearing device includes: The base has a placement area for placing the target; The limiter is set on the placement area of the base to limit the target; The positioning member is pivotally connected to the base or the limiting member in a pivotable manner, and is used to position the target on the placement area of the base; and The cover is pivotally connected to the base to cover the target. The carrying device according to claim 1, wherein the placing area is hollow to form an accommodating space with the limiting member. The carrying device according to claim 1, wherein the limiting member is correspondingly disposed on the base in a detachable manner. The carrying device according to claim 1, wherein the limiting member is a ring-shaped frame. The carrying device according to claim 1, wherein the limiting member is arranged in a manner capable of rotating relative to the base. The carrying device according to claim 1, wherein a stop portion for fixing the positioning member is arranged at the edge of the limiting member. The carrying device according to claim 1, wherein the edge of the positioning member is provided with a fixing part for fixing the limiting member. The carrying device according to claim 1, wherein at least one telescopic structure is arranged between the positioning member and the base. The carrying device according to claim 1, wherein at least one telescopic structure is arranged between the cover and the base. The carrying device according to claim 1, further comprising at least one fixing structure provided on the base to limit the displacement range of the wire of the target.

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