TWI619276B - Actuator - Google Patents

Actuator Download PDF

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Publication number
TWI619276B
TWI619276B TW105128583A TW105128583A TWI619276B TW I619276 B TWI619276 B TW I619276B TW 105128583 A TW105128583 A TW 105128583A TW 105128583 A TW105128583 A TW 105128583A TW I619276 B TWI619276 B TW I619276B
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TW
Taiwan
Prior art keywords
plate
suspension plate
piezoelectric actuator
outer frame
suspension
Prior art date
Application number
TW105128583A
Other languages
Chinese (zh)
Other versions
TW201727957A (en
Inventor
陳世昌
黃啟峰
韓永隆
廖家淯
陳壽宏
黃哲威
廖鴻信
陳朝治
程政瑋
張英倫
張嘉豪
李偉銘
Original Assignee
研能科技股份有限公司
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Application filed by 研能科技股份有限公司 filed Critical 研能科技股份有限公司
Priority to EP17152115.6A priority Critical patent/EP3203077B1/en
Priority to US15/410,037 priority patent/US10615329B2/en
Priority to KR1020170009595A priority patent/KR101959613B1/en
Priority to JP2017010036A priority patent/JP6581124B2/en
Publication of TW201727957A publication Critical patent/TW201727957A/en
Application granted granted Critical
Publication of TWI619276B publication Critical patent/TWI619276B/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10Valves; Arrangement of valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type
    • F05B2210/12Kind or type gaseous, i.e. compressible

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)

Abstract

一種壓電致動器,包含懸浮板、壓電陶瓷板、外框以及支架,懸浮板為正方 形之結構,且可由中心部到外周部彎曲振動,壓電陶瓷板為正方形之結構,貼附於懸浮板之第一表面上,用以施加電壓以驅動懸浮板彎曲振動,外框環繞設置於懸浮板之外側,以及支架連接於懸浮板與外框之間,以提供彈性支撐,其中支架包括有樑部,設置於懸浮板與外框之間之間隙中,其設置之方向係平行於外框及懸浮板,懸浮板連接部,連接於樑部與懸浮板之間,以及外框連接部,連接於樑部與外框之間,並與懸浮板連接部彼此相對應、且設置於同一軸線上。 A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame, and a bracket. The suspension plate is square The piezoelectric ceramic plate has a square structure and is attached to the first surface of the suspension plate for applying a voltage to drive the bending vibration of the suspension plate. The outer frame is arranged around the The outer side of the suspension plate, and the bracket is connected between the suspension plate and the outer frame to provide elastic support. The bracket includes a beam portion, which is arranged in the gap between the suspension plate and the outer frame. The direction of the arrangement is parallel to the outside. Frame and suspension plate, suspension plate connection portion, connected between beam portion and suspension plate, and outer frame connection portion, connected between beam portion and outer frame, and corresponding to suspension plate connection portion and provided on the same On the axis.

Description

壓電致動器 Piezo actuator

本案係關於一種壓電致動器,尤指一種適用於微型超薄且靜音之微型流體控制裝置之壓電致動器。 This case relates to a piezoelectric actuator, especially a piezoelectric actuator suitable for a miniature ultra-thin and quiet micro fluid control device.

目前於各領域中無論是醫藥、電腦科技、列印、能源等工業,產品均朝精緻化及微小化方向發展,其中微幫浦、噴霧器、噴墨頭、工業列印裝置等產品所包含之流體輸送結構為其關鍵技術,是以,如何藉創新結構突破其技術瓶頸,為發展之重要內容。 At present, in all fields, whether in the pharmaceutical, computer technology, printing, energy and other industries, the products are developing towards miniaturization and miniaturization. Among them, micropumps, sprayers, inkjet heads, industrial printing devices and other products The fluid transport structure is its key technology, so how to break through its technical bottlenecks with innovative structures is an important content of development.

舉例來說,於醫藥產業中,許多需要採用氣壓動力驅動之儀器或設備,通常採以傳統馬達及氣壓閥來達成其氣體輸送之目的。然而,受限於此等傳統馬達以及氣體閥之結構的限制,使得此類的儀器設備難以縮小其體積,以至於整體裝置的體積無法縮小,即難以實現薄型化之目標,因此也無法裝設置可攜式裝置上或與可攜式裝置配合使用,便利性不足。此外,該等傳統馬達及氣體閥於作動時亦會產生噪音,令使用者焦躁,導致使用上的不便利及不舒適。 For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power to drive, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitation of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the overall device cannot be reduced in size, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. It is not convenient to use it on or with a portable device. In addition, these traditional motors and gas valves also generate noise when they are actuated, making the user anxious, resulting in inconvenience and discomfort in use.

因此,如何發展一種可改善上述習知技術缺失,可使傳統採用氣壓動力驅動的儀器或設備達到體積小、微型化且靜音,進而達成輕便舒適之可攜式目的之微型流體控制裝置及其所採用之壓電致動器,實為目前迫切需要解決之問題。 Therefore, how to develop a microfluidic control device capable of improving the lack of the above-mentioned conventional techniques and enabling traditional instruments or equipment driven by pneumatic power to be small in size, miniaturized, and silent, thereby achieving portable and comfortable portable purposes The adopted piezoelectric actuator is a problem that needs to be solved urgently at present.

本案之主要目的在於提供一種適用於可攜式或穿戴式儀器或設備中之微型流體控制裝置及其所採用之壓電致動器,藉由壓電致動器高頻作動產生的流體波動,於設計後之流道中產生壓力梯度,而使流體高速流動,且透過流道進出方向之 阻抗差異,將流體由吸入端傳輸至排出端,俾解決習知技術之採用氣壓動力驅動的儀器或設備所具備之體積大、難以薄型化、無法達成可攜式之目的,以及噪音大等缺失。 The main purpose of this case is to provide a micro-fluid control device suitable for use in portable or wearable instruments or equipment and the piezoelectric actuators used by them. The fluid fluctuations generated by the high-frequency actuation of the piezoelectric actuators, A pressure gradient is generated in the designed flow channel, so that the fluid flows at high speed and passes through the flow channel in and out of the direction. The difference in impedance transfers the fluid from the suction end to the discharge end. It solves the problems of the conventional technology-driven instruments or equipment that are large in size, difficult to be thin, unable to achieve the purpose of being portable, and lack of noise. .

為達上述目的,本案之一較廣義實施態樣為提供一種壓電致動器,包含有一懸浮板、一壓電陶瓷板、一外框以及至少一支架,該懸浮板為正方形之結構,且可由一中心部到一外周部彎曲振動,該壓電陶瓷板為正方形之結構,具有不大於該懸浮板邊長之邊長,貼附於該懸浮板之一第一表面上,用以施加電壓以驅動該懸浮板彎曲振動,該外框環繞設置於該懸浮板之外側,以及至少一支架連接於該懸浮板與該外框之間,以提供彈性支撐,其中該支架包括有一樑部,設置於該懸浮板與該外框之間之一間隙中,其設置之方向係平行於該外框及該懸浮板,一懸浮板連接部,連接於該樑部與該懸浮板之間,以及一外框連接部,連接於該樑部與該外框之間,並與該懸浮板連接部彼此相對應、且設置於同一軸線上。 In order to achieve the above object, one of the broader aspects of the present invention is to provide a piezoelectric actuator including a suspension plate, a piezoelectric ceramic plate, an outer frame, and at least one bracket. The suspension plate has a square structure, and It can be bent and vibrated from a central part to an outer peripheral part. The piezoelectric ceramic plate has a square structure with a side length not larger than the side length of the suspension plate, and is attached to a first surface of the suspension plate for applying a voltage. In order to drive the suspension plate to bend and vibrate, the outer frame is arranged around the outer side of the suspension plate, and at least one bracket is connected between the suspension plate and the outer frame to provide elastic support. The bracket includes a beam portion, which is provided. In a gap between the suspension plate and the outer frame, a direction in which it is disposed is parallel to the outer frame and the suspension plate, a suspension plate connection portion is connected between the beam portion and the suspension plate, and a The outer frame connection portion is connected between the beam portion and the outer frame, and corresponds to the suspension plate connection portion to each other, and is disposed on the same axis.

1‧‧‧微型氣壓動力裝置 1‧‧‧ Miniature Pneumatic Power Unit

1A‧‧‧微型流體控制裝置 1A‧‧‧Miniature fluid control device

1B‧‧‧微型閥門裝置 1B‧‧‧Miniature valve device

1a‧‧‧殼體 1a‧‧‧shell

10‧‧‧底座 10‧‧‧ base

11‧‧‧進氣板 11‧‧‧Air intake plate

11a‧‧‧進氣板之第二表面 11a‧‧‧Second surface of air inlet plate

11b‧‧‧進氣板之第一表面 11b‧‧‧ the first surface of the air intake plate

110‧‧‧進氣孔 110‧‧‧air inlet

111‧‧‧中心凹部 111‧‧‧ Center recess

112‧‧‧匯流排孔 112‧‧‧ Bus hole

12‧‧‧共振片 12‧‧‧ Resonator

12a‧‧‧可動部 12a‧‧‧movable part

12b‧‧‧固定部 12b‧‧‧Fixed section

120‧‧‧中空孔洞 120‧‧‧ Hollow

121‧‧‧第一腔室 121‧‧‧First Chamber

13‧‧‧壓電致動器 13‧‧‧ Piezo actuator

130‧‧‧懸浮板 130‧‧‧ suspension board

130a‧‧‧懸浮板之第二表面 130a‧‧‧Second surface of suspension board

130b‧‧‧懸浮板之第一表面 130b‧‧‧ the first surface of the suspended plate

130c‧‧‧凸部 130c‧‧‧ convex

130d‧‧‧中心部 130d‧‧‧ Center

130e‧‧‧外周部 130e‧‧‧outer

131‧‧‧外框 131‧‧‧ frame

131a‧‧‧外框之第二表面 131a‧‧‧The second surface of the frame

131b‧‧‧外框之第一表面 131b‧‧‧ the first surface of the frame

132‧‧‧支架 132‧‧‧ Bracket

132a‧‧‧支架之第二表面 132a‧‧‧ The second surface of the bracket

132b‧‧‧支架之第一表面 132b‧‧‧ the first surface of the bracket

133‧‧‧壓電陶瓷板 133‧‧‧Piezoelectric ceramic plate

134、151‧‧‧導電接腳 134, 151‧‧‧ conductive pins

135‧‧‧空隙 135‧‧‧Gap

141、142‧‧‧絕緣片 141, 142‧‧‧ insulating sheet

15‧‧‧導電片 15‧‧‧Conductive sheet

16‧‧‧集氣板 16‧‧‧Gas collecting plate

16a‧‧‧容置空間 16a‧‧‧accommodation space

160‧‧‧表面 160‧‧‧ surface

161‧‧‧基準表面 161‧‧‧ datum surface

162‧‧‧集氣腔室 162‧‧‧Gas collecting chamber

163‧‧‧第一貫穿孔 163‧‧‧The first through hole

164‧‧‧第二貫穿孔 164‧‧‧second through hole

165‧‧‧第一卸壓腔室 165‧‧‧The first pressure relief chamber

166‧‧‧第一出口腔室 166‧‧‧First Exit Room

167、181a‧‧‧凸部結構 167, 181a‧‧‧ convex structure

168‧‧‧側壁 168‧‧‧ side wall

17‧‧‧閥門片 17‧‧‧Valve Disc

170‧‧‧閥孔 170‧‧‧Valve hole

171‧‧‧定位孔洞 171‧‧‧ positioning holes

18‧‧‧出口板 18‧‧‧ export board

180‧‧‧基準表面 180‧‧‧ datum surface

181‧‧‧卸壓通孔 181‧‧‧Pressure Relief Through Hole

182‧‧‧出口通孔 182‧‧‧Exit through hole

183‧‧‧第二卸壓腔室 183‧‧‧Second pressure relief chamber

184‧‧‧第二出口腔室 184‧‧‧Second Outlet Room

185‧‧‧連通流道 185‧‧‧Connecting runner

187‧‧‧第二表面 187‧‧‧Second surface

188‧‧‧限位結構 188‧‧‧ limit structure

19‧‧‧出口 19‧‧‧ export

g0‧‧‧間隙 g0‧‧‧clearance

(a)~(x)‧‧‧壓電致動器之不同實施態樣 (a) ~ (x) ‧‧‧Different implementations of piezoelectric actuators

a0、i0、j0、m0、n0、o0、p0、q0、r0‧‧‧懸浮板 a0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧

a1、i1、m1、n1、o1、p1、q1、r1‧‧‧外框 a1, i1, m1, n1, o1, p1, q1, r1‧‧‧

a2、i2、m2、n2、o2、p2、q2、r2‧‧‧支架、板連接部 a2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, board connection

a3、m3、n3、o3、p3、q3、r3‧‧‧空隙 a3, m3, n3, o3, p3, q3, r3

d‧‧‧壓電致動器之振動位移 d‧‧‧Vibration displacement of piezoelectric actuator

s4、t4、u4、v4、w4、x4‧‧‧凸部 s4, t4, u4, v4, w4, x4‧‧‧ convex

m2’、n2’、o2’、q2’、r2’‧‧‧支架連接於外框之端部 m2 ’, n2’, o2 ’, q2’, r2’‧‧‧ brackets are connected to the ends of the frame

m2”、n2”、o2”、q2”、r2”‧‧‧支架連接於懸浮板之端部 m2 ”, n2”, o2 ”, q2”, r2 ”‧‧‧ brackets are connected to the ends of the suspension board

第1A圖為本案為較佳實施例之微型氣壓動力裝置之正面分解結構示意圖。 FIG. 1A is a schematic exploded front view of a miniature pneumatic power device according to a preferred embodiment of the present invention.

第1B圖為第1A圖所示之微型氣壓動力裝置之正面組合結構示意圖。 Figure 1B is a schematic diagram of the front assembly structure of the miniature pneumatic power device shown in Figure 1A.

第2A圖為第1A圖所示之微型氣壓動力裝置之背面分解結構示意圖。 Fig. 2A is a schematic exploded view of the back of the miniature pneumatic power device shown in Fig. 1A.

第2B圖為第1A圖所示之微型氣壓動力裝置之背面組合結構示意圖。 Fig. 2B is a schematic diagram of the rear assembly structure of the miniature pneumatic power device shown in Fig. 1A.

第3A圖為第1A圖所示之微型氣壓動力裝置之壓電致動器之正面組合結構示意圖。 Fig. 3A is a schematic diagram of the front assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

第3B圖為第1A圖所示之微型氣壓動力裝置之壓電致動器之背面組合結構示意圖。 FIG. 3B is a schematic diagram of the back assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A.

第3C圖為第1A圖所示之微型氣壓動力裝置之壓電致動器之剖面結構示意圖。 Fig. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

第4A至第4C圖為壓電致動器之多種實施態樣示意圖。 4A to 4C are schematic diagrams of various implementation modes of the piezoelectric actuator.

第5A圖至第5E圖為第1A圖所示之微型氣壓動力裝置之微型流體控制裝置之局 部作動示意圖。 Figures 5A to 5E are diagrams of the miniature fluid control device of the miniature pneumatic power device shown in Figure 1A. Schematic diagram of operation.

第6A圖為第1A圖所示之微型氣壓動力裝置之集氣板與微型閥門裝置之集壓作動示意圖。 FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the miniature pneumatic power device shown in FIG.

第6B圖為第1A圖所示之微型氣壓動力裝置之集氣板與微型閥門裝置之卸壓作動示意圖。 FIG. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG.

第7A至第7E圖為第1A圖所示之微型氣壓動力裝置之集壓作動示意圖。 Figures 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in Figure 1A.

第8圖為第1A圖所示之微型氣壓動力裝置之降壓或是卸壓作動示意圖。 Fig. 8 is a schematic diagram of the pressure reduction or pressure relief action of the miniature pneumatic power device shown in Fig. 1A.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上係當作說明之用,而非架構於限制本案。 Some typical embodiments embodying the features and advantages of this case will be described in detail in the description in the subsequent paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and that the descriptions and diagrams therein are essentially for illustration purposes, rather than limiting the case.

本案之微型氣壓動力裝置1係可應用於醫藥生技、能源、電腦科技或是列印等工業,俾用以傳送氣體,但不以此為限。請參閱第1A圖、第1B圖、第2A圖、第2B圖及第7A至7E圖,第1A圖為本案較佳實施例之微型氣壓動力裝置之正面分解結構示意圖,第1B圖為第1A圖所示之微型氣壓動力裝置之正面組合結構示意圖、第2A圖為第1A圖所示之微型氣壓動力裝置之背面分解結構示意圖,第2B圖則為第1A圖所示之微型氣壓動力裝置之背面組合結構示意圖,第7A至7E圖為第1A圖所示之微型氣壓動力裝置之集壓作動示意圖。如第1A圖及第2A圖所示,本案之微型氣壓動力裝置1係由微型流體控制裝置1A以及微型閥門裝置1B所組合而成,其中微型流體控制裝置1A具有殼體1a、壓電致動器13、絕緣片141、142及導電片15等結構,其中,殼體1a係包含集氣板16及底座10,底座10則包含進氣板11及共振片12,但不以此為限。壓電致動器13係對應於共振片12而設置,並使進氣板11、共振片12、壓電致動器13、絕緣片141、導電片15、另一絕緣片142、集氣板16等依序堆疊設置,且該壓電致動器13係由一懸浮板130、一外框131、至少一支架132以及一壓電陶瓷板133所共同組裝而成;以及微型閥門裝置1B包含一閥門片17以及一出口板18但不以此為 限。且於本實施例中,如第1A圖所示,集氣板16不僅為單一的板件結構,亦可為周緣具有側壁168之框體結構,且該集氣板16具有介於9mm至17mm之間的長度、介於9mm至17mm之間的寬度,且該長度及該寬度比值為0.53倍至1.88倍之間,而由該周緣所構成之側壁168與其底部之板件共同定義出一容置空間16a,用以供該壓電致動器13設置於該容置空間16a中,故當本案之微型氣壓動力裝置1組裝完成後,則其正面示意圖會如第1B圖所示,以及第7A至第7E圖所示,可見該微型流體控制裝置1A係與微型閥門裝置1B相對應組裝而成,亦即該微型閥門裝置1B之閥門片17及出口板18依序堆疊設置定位於該微型流體控制裝置1A之集氣板16上而成。而其組裝完成之背面示意圖則可見該出口板18上之卸壓通孔181及出口19,出口19用以與一裝置(未圖示)連接,卸壓通孔181則供以使微型閥門裝置1B內之氣體排出,以達卸壓之功效。 藉由此微型流體控制裝置1A以及微型閥門裝置1B之組裝設置,以使氣體自微型流體控制裝置1A之進氣板11上之至少一進氣孔110進氣,並透過壓電致動器13之作動,而流經多個壓力腔室(未圖示)繼續傳輸,進而可使氣體於微型閥門裝置1B內單向流動,並將壓力蓄積於與微型閥門裝置1B之出口端相連之一裝置(未圖示)中,且當需進行卸壓時,則調控微型流體控制裝置1A之輸出量,使氣體經由微型閥門裝置1B之出口板18上的卸壓通孔181而排出,以進行卸壓。 The micro-pneumatic power unit 1 in this case can be applied to industries such as medicine, biotechnology, energy, computer technology, or printing, and is not used to transmit gas. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, and FIGS. 7A to 7E. FIG. 1A is a schematic exploded front view of the miniature pneumatic power device according to the preferred embodiment of the present invention, and FIG. 1B is FIG. 1A. The schematic diagram of the front assembly structure of the miniature pneumatic power device shown in the figure, FIG. 2A is a schematic diagram of the exploded structure of the rear of the miniature pneumatic power device shown in FIG. 1A, and FIG. 2B is the schematic diagram of the miniature pneumatic power device shown in FIG. 1A. Schematic diagram of the rear assembly structure. Figures 7A to 7E are schematic diagrams of the pressure-collecting operation of the miniature pneumatic power device shown in Figure 1A. As shown in Figures 1A and 2A, the miniature pneumatic power device 1 in this case is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A has a housing 1a and a piezoelectric actuator. The structure of the device 13, the insulating sheets 141, 142, and the conductive sheet 15 includes a casing 1a including a gas collecting plate 16 and a base 10, and the base 10 includes an air intake plate 11 and a resonance sheet 12, but is not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance sheet 12, and the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulation sheet 141, the conductive sheet 15, the other insulation sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 but not this limit. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 on the periphery, and the gas collecting plate 16 has a thickness of 9 mm to 17 mm. Between the length and the width between 9mm and 17mm, and the ratio between the length and the width is between 0.53 times and 1.88 times, and the side wall 168 formed by the periphery and the bottom plate together define a capacity The installation space 16a is used for the piezoelectric actuator 13 to be installed in the accommodation space 16a. Therefore, when the miniature pneumatic power device 1 in this case is assembled, the front schematic diagram will be as shown in FIG. 1B, and As shown in FIGS. 7A to 7E, it can be seen that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the micro valve device. It is formed on the gas collecting plate 16 of the fluid control device 1A. The assembled back view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By this assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one air inlet hole 110 on the air inlet plate 11 of the micro fluid control device 1A and passes through the piezoelectric actuator 13 It will continue to transmit through multiple pressure chambers (not shown), so that the gas can flow unidirectionally in the micro valve device 1B and accumulate pressure in a device connected to the outlet end of the micro valve device 1B. (Not shown), and when pressure relief is required, the output of the micro fluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B for relief. Pressure.

請續參閱第1A圖及第2A圖,如第1A圖所示,微型流體控制裝置1A之進氣板11係具有第一表面11b、第二表面11a及至少一進氣孔110,於本實施例中,進氣孔110之數量係為4個,但不以此為限,其係貫穿進氣板11之第一表面11b及第二表面11a,主要用以供氣體自裝置外順應大氣壓力之作用而自該至少一進氣孔110流入微型流體控制裝置1A內。且又如第2A圖所示,由進氣板11之第一表面11b可見,其上具有至少一匯流排孔112,用以與進氣板11第二表面11a之該至少一進氣孔110對應設置。於本實施例中,其匯流排孔112的數量與進氣孔110對應,其數量為4個,但並不以此為限,其中該等匯流排孔112的中心交流處係具有中心凹部111,且中心凹部111係與匯流排孔112相連通,藉此可將自進氣孔110進入匯流排孔112 之氣體引導並匯流集中至中心凹部111傳遞。是以於本實施例中,進氣板11具有一體成型的進氣孔110、匯流排孔112及中心凹部111,且於該中心凹部111處即對應形成一匯流氣體的匯流腔室,以供氣體暫存。於一些實施例中,進氣板11之材質係可為但不限為由一不鏽鋼材質所構成,且其厚度係介於0.4mm至0.6mm之間,而其較佳值為0.5mm,但不以此為限。於另一些實施例中,由該中心凹部111處所構成之匯流腔室之深度與該等匯流排孔112之深度相同,且該匯流腔室及該匯流排孔112之深度之較佳值係介於0.2mm至0.3mm之間,但不以此為限。共振片12係由一可撓性材質所構成,但不以此為限,且於共振片12上具有一中空孔洞120,係對應於進氣板11之第一表面11b之中心凹部111而設置,以使氣體流通。於另一些實施例中,共振片12係可由一銅材質所構成,但不以此為限,且其厚度係介於0.03mm至0.08mm之間,而其較佳值為0.05mm,但亦不以此為限。 Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a, and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but it is not limited to this. It penetrates the first surface 11b and the second surface 11a of the air inlet plate 11 and is mainly used for the gas to comply with the atmospheric pressure from outside the device. This function flows into the micro fluid control device 1A from the at least one air inlet hole 110. As shown in FIG. 2A, it can be seen from the first surface 11 b of the air intake plate 11 that there is at least one bus hole 112 for communicating with the at least one air intake hole 110 of the second surface 11 a of the air intake plate 11. Corresponding setting. In this embodiment, the number of the busbar holes 112 corresponds to the air inlet holes 110, and the number is 4, but is not limited thereto. The central communication portion of the busbar holes 112 has a central recess 111. And the central recess 111 is in communication with the busbar hole 112, so that the airflow from the air inlet hole 110 into the busbar hole 112 can be achieved The gas is guided and converged to be transmitted to the central recessed portion 111. Therefore, in this embodiment, the air inlet plate 11 has an air inlet hole 110, a bus bar hole 112, and a central recess 111 that are integrally formed, and a confluence chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material, and its thickness is between 0.4 mm and 0.6 mm, and its preferred value is 0.5 mm, but Not limited to this. In other embodiments, the depth of the busbar cavity formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred value of the depth of the busbar cavity and the busbar holes 112 is described Between 0.2mm and 0.3mm, but not limited to this. The resonance sheet 12 is composed of a flexible material, but is not limited thereto. The resonance sheet 12 has a hollow hole 120 on the resonance sheet 12 and is provided corresponding to the central recess 111 of the first surface 11 b of the air intake plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but is not limited thereto, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but also Not limited to this.

請同時參閱第3A圖、第3B圖及第3C圖,其係分別為第1A圖所示之微型氣壓動力裝置之壓電致動器之正面結構示意圖、背面結構示意圖以及剖面結構示意圖,壓電致動器13係由一懸浮板130、一外框131、至少一支架132以及一壓電陶瓷板133所共同組裝而成,其中,該壓電陶瓷板133貼附於懸浮板130之第一表面130b,用以施加電壓產生形變以驅動該懸浮板130彎曲振動,懸浮板130具有中心部130d及外周部130e,是以當壓電陶瓷板133受電壓驅動時,懸浮板130可由該中心部130d到外周部130e彎曲振動,以及該至少一支架132係連接於懸浮板130以及外框131之間,於本實施例中,該支架132係連接設置於懸浮板130與外框131之間,其兩端點係分別連接於外框131、懸浮板130,以提供彈性支撐,且於支架132、懸浮板130及外框131之間更具有至少一空隙135,用以供氣體流通,且該懸浮板130、外框131以及支架132之型態及數量係具有多種變化。另外,外框131係環繞設置於懸浮板130之外側,且具有一向外凸設之導電接腳134,用以供電連接之用,但不以此為限。 於本實施例中,懸浮板130係為一階梯面之結構,意即於懸浮板130之第二表面130a更具有一凸部130c,該凸部130c可為但不限為一圓形凸起結構,且凸部130c之高度係 介於0.02mm至0.08mm之間,而較佳值為0.03mm,其直徑為懸浮板130之最小邊長的0.55倍的尺寸。請同時參閱第3A圖及第3C圖即可見,懸浮板130之凸部130c之表面係與外框131之第二表面131a共平面,且懸浮板130之第二表面130a及支架132之第二表面132a亦為共平面,且該懸浮板130之凸部130c及外框131之第二表面131a與懸浮板130之第二表面130a及支架132之第二表面132a之間係具有一特定深度。至於懸浮板130之第一表面130b,則如第3B圖及第3C圖所示,其與外框131之第一表面131b及支架132之第一表面132b為平整之共平面結構,而壓電陶瓷板133則貼附於此平整之懸浮板130之第一表面130b處。於另一些實施例中,懸浮板130之型態亦可為一雙面平整之板狀正方形結構,並不以此為限,可依照實際施作情形而任施變化。於一些實施例中,懸浮板130、支架132以及外框131係可為一體成型之結構,且可由一金屬板所構成,例如可由不鏽鋼材質所構成,但不以此為限。且於一些實施例中,該懸浮板130厚度係介於0.1mm至0.4mm之間,而其較佳值為0.27mm,另該懸浮板130之長度介於4mm至8mm之間,而其較佳值可為6mm至8mm、寬度介於4mm至8mm之間,而其較佳值可為6mm至8mm但不以此為限。至於該外框131之厚度係介於0.2mm至0.4mm之間,而其較佳值為0.3mm,但不以此為限。 Please also refer to FIG. 3A, FIG. 3B, and FIG. 3C, which are a schematic diagram of the front structure, the back structure, and the cross-sectional structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133. The piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130. The surface 130b is used to apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. The bending vibration from 130d to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and at least one gap 135 is provided between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, frame 1 The shape and number of the 31 and the bracket 132 have various changes. In addition, the outer frame 131 is arranged around the outer side of the suspension plate 130 and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In this embodiment, the suspension plate 130 is a stepped structure, which means that the second surface 130a of the suspension plate 130 further has a convex portion 130c. The convex portion 130c may be, but is not limited to, a circular protrusion. Structure, and the height of the convex portion 130c is The size is between 0.02mm and 0.08mm, and the preferred value is 0.03mm. Its diameter is 0.55 times the minimum side length of the suspension plate 130. Please refer to FIG. 3A and FIG. 3C at the same time, the surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the protrusion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 have a specific depth between the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric The ceramic plate 133 is attached to the first surface 130 b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 can also be a flat, square plate-shaped structure with two sides, which is not limited to this, and can be arbitrarily changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be a one-piece structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the thickness of the suspension plate 130 is between 0.1mm and 0.4mm, and the preferred value is 0.27mm. In addition, the length of the suspension plate 130 is between 4mm and 8mm, and A good value may be 6mm to 8mm, and a width is between 4mm to 8mm, and a preferable value may be 6mm to 8mm, but not limited thereto. As for the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but it is not limited thereto.

又於另一些實施例中,壓電陶瓷板133之厚度之係介於0.05mm至0.3mm之間,且其較佳值為0.10mm,而該壓電陶瓷板133具有不大於該懸浮板130邊長之邊長,具有長度介於4mm至8mm之間,而其較佳值可為6mm至8mm、寬度介於4mm至8mm之間,而其較佳值可為6mm至8mm,另長度及寬度比之較佳值為0.5倍至2倍之間,然亦不以此為限。再於另一些實施例中,壓電陶瓷板133之邊長可小於懸浮板130之邊長,且同樣設計為與懸浮板130相對應之正方形板狀結構,但並不以此為限。 In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has a size not larger than the suspension plate 130. The length of the side is between 4mm and 8mm, and the preferred value is 6mm to 8mm and the width is between 4mm and 8mm. The preferred value is 6mm to 8mm. The preferred width ratio is between 0.5 and 2 times, but it is not limited to this. In still other embodiments, the side length of the piezoelectric ceramic plate 133 may be shorter than the side length of the suspension plate 130 and is also designed as a square plate-like structure corresponding to the suspension plate 130, but is not limited thereto.

本案之微型氣壓動力裝置1中的相關實施例,壓電致動器13之所以採用正方形懸浮板130,其原因在於相較於圓形懸浮板(如第4A圖所示之(j)~(l)態樣之圓形懸浮板j0)之設計,該正方形懸浮板130之結構明顯具有省電之優勢, 因在共振頻率下操作之電容性負載,其消耗功率會隨頻率之上升而增加,又因邊長正方形懸浮板130之共振頻率明顯較圓形懸浮板j0低,故其相對的消耗功率亦明顯較低,亦即本案所採用正方形設計之壓電致動器13,令其具有省電優勢,尤其是應用於穿戴裝置,節省電力是非常重要的設計重點。 In the related embodiment of the miniature pneumatic power device 1 of this case, the reason why the piezoelectric actuator 13 uses a square suspension plate 130 is that compared to a circular suspension plate (as shown in (j) of FIG. 4A) l) the design of the circular suspension plate j0), the structure of the square suspension plate 130 obviously has the advantage of saving power, Because of the capacitive load operating at the resonance frequency, its power consumption will increase with the increase of the frequency, and because the resonance frequency of the side suspension plate 130 is significantly lower than the circle suspension plate j0, its relative power consumption is also obvious. The lower, that is, the square-shaped piezoelectric actuator 13 used in this case, has its power saving advantages, especially for wearable devices, and saving power is a very important design focus.

請續參閱第4A、4B、4C圖,其係為壓電致動器之多種實施態樣示意圖。 如圖所示,則可見壓電致動器13之懸浮板130、外框131以及支架132係可有多樣之型態,且至少可具有第4A圖所示之(a)~(l)等多種態樣,舉例來說,(a)態樣之外框a1及懸浮板a0係為方形之結構,且兩者之間係由多個支架a2以連結之,例如:8個,但不以此為限,且於支架a2及懸浮板a0、外框a1之間係具有空隙a3,以供氣體流通。於另一(i)態樣中,其外框i1及懸浮板i0亦同樣為方形之結構,惟其中僅由2個支架i2以連結之;另,具有更進一步的相關技術,如第4B、4C圖所示,壓電致動器13之懸浮板亦可有如第4B圖所示之(m)~(r)以及第4C圖所示之(s)~(x)等多種態樣,惟此些態樣中,懸浮板130及外框131均為正方形之結構。舉例來說,(m)態樣之外框m1及懸浮板m0均為正方形之結構,且兩者之間係由多個支架m2以連結之,例如:4個,但不以此為限,且於支架m2及懸浮板m0、外框m1之間係具有空隙m3,以供流體流通。且於此實施例中,連結於外框m1及懸浮板m0之間的支架m2係可為但不限為一板連接部m2,且此板連接部m2具有兩端部m2’及m2”,其中一端部m2’係與外框m1連接,而另一端部m2”則與懸浮板m0連接,且此兩端部m2’及m2”係彼此相對應、且設置於同一軸線上。於(n)態樣中,其同樣具有外框n1、懸浮板n0以及連接於外框n1、懸浮板n0之間的支架n2、以及供流體流通之空隙n3,且支架n2亦可為但不限為一板連接部n2,板連接部n2同樣具有兩端部n2’及n2”,且端部n2’與外框n1連接,而另一端部n2”則與懸浮板n0連接,惟於本實施態樣中,該板連接部n2係以介於0~45度之斜角連接於外框n1及懸浮板n0,換言之,及該兩端部n2’及n2”並未設置於同一水平軸線上,其係為相互錯位之設置關係。於(o)態樣中,其外框o1、 懸浮板o0以及連接於外框o1、懸浮板o0之間的支架o2、以及供流體流通之空隙o3等結構均與前述實施例相仿,其中惟作為支架之板連接部o2之設計型態與(m)態樣略有不同,然於此態樣中,該板連接部o2之兩端部o2’及o2”仍為彼此相對應、且設置於同一軸線上。 Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementation modes of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131, and the bracket 132 of the piezoelectric actuator 13 can have various types, and can have at least (a) to (l) and the like shown in FIG. 4A. Various aspects, for example, (a) the outer frame a1 and the suspension plate a0 have a square structure, and the two are connected by multiple brackets a2, for example, 8 but not This is a limitation, and a gap a3 is provided between the bracket a2, the suspension plate a0, and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square in structure, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 can also have various forms such as (m) ~ (r) shown in Fig. 4B and (s) ~ (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 have a square structure. For example, (m) the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, A gap m3 is provided between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a plate connecting portion m2, and the plate connecting portion m2 has two end portions m2 'and m2 ", One end portion m2 'is connected to the outer frame m1, and the other end portion m2 "is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. Yu (n In the aspect, it also has an outer frame n1, a suspension plate n0, and a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid flow. The bracket n2 may also be, but not limited to, one. The plate connection portion n2, the plate connection portion n2 also has two end portions n2 'and n2 ", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0, but in this embodiment In the embodiment, the plate connection portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2 ′ and n2 ″ are not disposed on the same horizontal axis. It is a setting relationship for mutual dislocation. In the aspect (o), its frame o1, The structures such as the suspension plate o0 and the bracket o2 connected between the outer frame o1, the suspension plate o0, and the space o3 for fluid circulation are similar to the previous embodiment. Among them, the design type of the plate connection portion o2 as the bracket is the same as ( m) The appearance is slightly different, but in this aspect, the two end portions o2 'and o2 "of the plate connection portion o2 are still corresponding to each other and are disposed on the same axis.

又於(p)態樣中,其同樣具有外框p1、懸浮板p0以及連接於外框p1、懸浮板p0之間的支架p2、以及供流體流通之空隙p3等結構,於此實施態樣中,作為支架之板連接部p2更具有懸浮板連接部p20、樑部p21及外框連接部p22等結構,其中樑部p21設置於懸浮板p0與外框p1之間的間隙p3中,且其設置之方向係平行於外框p1及懸浮板p0,以及,懸浮板連接部p20係連接於樑部p21及懸浮板p0之間,且外框連接部p22係連接樑部p21及外框p1之間,且該懸浮板連接部p20與外框連接部p22亦彼此相對應、且設置於同一軸線上。 Also in the (p) aspect, it also has a structure such as an outer frame p1, a suspension plate p0, a bracket p2 connected between the outer frame p1, the suspension plate p0, and a gap p3 for fluid flow. Here, the embodiment is implemented. Among them, the plate connection part p2 as a bracket further has a structure such as a suspension plate connection part p20, a beam part p21, and an outer frame connection part p22, wherein the beam part p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The setting direction is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1. And the suspension board connection part p20 and the outer frame connection part p22 also correspond to each other and are disposed on the same axis.

於(q)態樣中,其外框q1、懸浮板q0以及連接於外框q1、懸浮板q0之間的支架q2、以及供流體流通之空隙q3等結構均與前述(m)、(o)態樣相仿,其中惟作為支架之板連接部q2之設計型態與(m)、(o)態樣略有不同,於此態樣中,該懸浮板q0係為正方形之型態,且其每一邊均具有兩板連接部q2與外框q1連接,且其中每一板連接部q2之兩端部q2’及q2”同樣為彼此相對應、且設置於同一軸線上。然而於(r)態樣中,其亦具有外框r1、懸浮板r0、支架r2以及空隙r3等構件,且支架r2亦可為但不限為一板連接部r2,於此實施例中,板連接部r2係為V字形之結構,換言之,該板連接部r2亦以介於0~45度之斜角連接於外框r1及懸浮板r0,故於每一板連接部r2均具有一端部r2”與懸浮板r0連接,並具有兩端部r2’與外框r1連接,意即該兩端部b2’與端部b2”並未設置於同一水平軸線上。 In the aspect (q), the structures such as the outer frame q1, the suspension plate q0, and the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the aforementioned (m), (o ) The appearance is similar, in which the design of the plate connection part q2, which is only a bracket, is slightly different from the (m), (o) appearance. In this aspect, the suspension plate q0 has a square shape, and Each side thereof has two plate connecting portions q2 connected to the outer frame q1, and both end portions q2 'and q2 "of each plate connecting portion q2 are also corresponding to each other and are disposed on the same axis. However, (r In the aspect, it also has components such as an outer frame r1, a suspended plate r0, a bracket r2, and a gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the plate connection portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an inclined angle between 0 and 45 degrees. Therefore, each plate connection portion r2 has one end portion r2 ”and The suspension plate r0 is connected and has two end portions r2 'connected to the outer frame r1, which means that the two end portions b2' and the end portions b2 "are not disposed on the same horizontal axis.

續如第4C圖所示,該等(s)~(x)態樣之外觀型態大致上對應於第4B圖所示之(m)~(r)之型態,惟於此等(s)~(x)態樣中,每一壓電致動器13的懸浮板130上均設有凸部130c,即如圖中所示之s4、t4、u4、v4、w4、x4等結構,且 無論是(m)~(r)態樣或是(s)~(x)等態樣,該懸浮板130設計為正方形之型態,以達到前述低耗電之功效;且由此等實施態樣可見,無論懸浮板130係為雙面平坦之平板結構,或為一表面具有凸部之階梯狀結構,均在本案之保護範圍內,且連接於懸浮板130及外框131之間的支架132之型態與數量亦可依實際施作情形而任施變化,並不以本案所示之態樣為限。又如前所述,該等懸浮板130、外框131及支架132係可為一體成型之結構,但不以此為限,至於其製造方式則可由傳統加工、或黃光蝕刻、或雷射加工、或電鑄加工、或放電加工等方式製出,均不以此為限。 Continuing as shown in Figure 4C, the appearance types of these (s) ~ (x) appearances roughly correspond to the shapes of (m) ~ (r) shown in Figure 4B, except for these (s ) ~ (x), each of the levitation plates 130 of the piezoelectric actuator 13 is provided with a convex portion 130c, that is, structures such as s4, t4, u4, v4, w4, and x4 as shown in the figure. And Whether in the form of (m) ~ (r) or (s) ~ (x), the suspension plate 130 is designed in a square shape to achieve the aforementioned low power consumption effect; It can be seen that whether the suspension plate 130 is a flat flat structure with two sides or a stepped structure with convex portions on one surface, it is within the protection scope of this case and is connected to the bracket between the suspension plate 130 and the outer frame 131 The type and quantity of 132 can also be changed arbitrarily according to the actual implementation situation, and is not limited to the appearance shown in this case. As mentioned before, the suspension plate 130, the outer frame 131, and the bracket 132 can be a one-piece structure, but not limited to this. As for the manufacturing method, it can be processed by traditional processing, or yellow light etching, or laser. Processing, or electroforming, or electrical discharge machining are not limited to this.

此外,請續參閱第1A圖及第2A圖,於微型流體控制裝置1A中更具有絕緣片141、導電片15及另一絕緣片142係依序對應設置於壓電致動器13之下,且其形態大致上對應於壓電致動器13之外框之形態。於一些實施例中,絕緣片141、142即由可絕緣之材質所構成,例如:塑膠,但不以此為限,以進行絕緣之用;於另一些實施例中,導電片15即由可導電之材質所構成,例如:金屬,但不以此為限,以進行電導通之用。以及,於本實施例中,導電片15上亦可設置一導電接腳151,以進行電導通之用。 In addition, please refer to FIG. 1A and FIG. 2A continuously. In the micro fluid control device 1A, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142 are sequentially disposed under the piezoelectric actuator 13, respectively. And its shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of an insulative material, such as plastic, but not limited to this for insulating purposes. In other embodiments, the conductive sheet 15 is made of an insulating material. It is made of conductive material, such as metal, but it is not limited to it for electrical conduction. And, in this embodiment, a conductive pin 151 may be provided on the conductive sheet 15 for electrical conduction.

請同時參閱第1A圖及第5A圖至第5E圖,其中第5A圖至第5E圖係為第1A圖所示之微型氣壓動力裝置之微型流體控制裝置1A之局部作動示意圖。首先,如第5A圖所示,可見微型流體控制裝置1A係依序由進氣板11、共振片12、壓電致動器13、絕緣片141、導電片15及另一絕緣片142等堆疊而成,且於本實施例中,係於共振片12及壓電致動器13之外框131周緣之間的間隙g0中填充一材質,例如:導電膠,但不以此為限,以使共振片12與壓電致動器13之懸浮板130之凸部130c之間可維持該間隙g0之深度,進而可導引氣流更迅速地流動,且因懸浮板130之凸部130c與共振片12保持適當距離使彼此接觸干涉減少,促使噪音產生可被降低。 Please refer to FIG. 1A and FIGS. 5A to 5E at the same time, wherein FIGS. 5A to 5E are schematic diagrams of partial operation of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the micro fluid control device 1A is sequentially stacked by an air intake plate 11, a resonance sheet 12, a piezoelectric actuator 13, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142. In this embodiment, a material, such as conductive adhesive, is filled in the gap g0 between the periphery of the outer plate 131 of the resonance plate 12 and the piezoelectric actuator 13, but is not limited to this. The depth of the gap g0 can be maintained between the resonance sheet 12 and the convex portion 130 c of the suspension plate 130 of the piezoelectric actuator 13, so that the airflow can be guided to flow more quickly, and the convex portion 130 c of the suspension plate 130 and the resonance can be guided. The sheet 12 is kept at a proper distance to reduce contact interference with each other, so that noise generation can be reduced.

請續參閱第5A圖至第5E圖,如圖所示,當進氣板11、共振片12與壓電致動器13依序對應組裝後,則於共振片12之中空孔洞120處可與其上的進氣板11共 同形成一匯流氣體的腔室,且在共振片12與壓電致動器13之間更形成一第一腔室121,用以暫存氣體,且第一腔室121係透過共振片12之中空孔洞120而與進氣板11第一表面11b之中心凹部111處的腔室相連通,且第一腔室121之兩側則由壓電致動器13之支架132之間的空隙135而與設置於其下的微型閥門裝置1B相連通。 Please refer to FIGS. 5A to 5E. As shown in the figure, after the air intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are sequentially assembled correspondingly, the cavity 120 in the resonance plate 12 can be connected with it. On the air intake plate 11 The same cavity is formed as a confluent gas, and a first cavity 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 to temporarily store the gas. The first cavity 121 is transmitted through the resonance plate 12. The hollow hole 120 communicates with the cavity at the central recess 111 of the first surface 11b of the air inlet plate 11, and the two sides of the first cavity 121 are defined by the gap 135 between the brackets 132 of the piezoelectric actuator 13. It communicates with the micro valve device 1B provided below.

當微型氣壓動力裝置1之微型流體控制裝置1A作動時,主要由壓電致動器13受電壓致動而以支架132為支點,進行垂直方向之往復式振動。如第5B圖所示,當壓電致動器13受電壓致動而向下振動時,由於共振片12係為輕、薄之片狀結構,是以當壓電致動器13振動時,共振片12亦會隨之共振而進行垂直之往復式振動,即為共振片12對應於該進氣板11之中心凹部111的部分亦會隨之彎曲振動形變,即該共振片12對應於該進氣板11之中心凹部111的部分係為共振片12之可動部12a,是以當壓電致動器13向下彎曲振動時,此時共振片12的可動部12a會因流體的帶入及推壓以及壓電致動器13振動之帶動,而隨著壓電致動器13向下彎曲振動形變,則氣體由進氣板11上的至少一進氣孔110進入,並透過其第一表面11b的至少一匯流排孔112以匯集到中央的中心凹部111處,再經由共振片12上與中心凹部111對應設置的中央孔洞120向下流入至第一腔室121中,其後,由於受壓電致動器13振動之帶動,共振片12亦會隨之共振而進行垂直之往復式振動,如第5C圖所示,此時共振片12之可動部12a亦隨之向下振動,並貼附抵觸於壓電致動器13之懸浮板130之凸部130c上,使懸浮板130之凸部130c以外的區域與共振片12兩側之固定部12b之間的匯流腔室的間距不會變小,並藉由此共振片12之形變,以壓縮第一腔室121之體積,並關閉第一腔室121中間流通空間,促使其內的氣體推擠向兩側流動,進而經過壓電致動器13之支架132之間的空隙135而向下穿越流動。至於第5D圖則為其共振片12之可動部12a經由彎曲振動形變後,而回復至初始位置,而後續壓電致動器13受電壓驅動以向上振動,如此同樣擠壓第一腔室121之體積,又此時由於壓電致動器13係向上抬升,該抬升之位移可為d,因而使得第一腔室121內的氣體會朝兩側流動,進而帶動氣體持續地自進氣板11上的至少一進氣孔110進入,再流入中心凹部111所形成之腔室中,再如 第5E圖所示,該共振片12受壓電致動器13向上抬升的振動而共振向上,共振片12之可動部12a亦至向上位置,進而使中心凹部111內的氣體再由共振片12的中央孔洞120而流入第一腔室121內,並經由壓電致動器13之支架132之間的空隙135而向下穿越流出微型流體控制裝置1A。由此實施態樣可見,當共振片12進行垂直之往復式振動時,係可由其與壓電致動器13之間的間隙g0以增加其垂直位移的最大距離,換句話說,於該兩結構之間設置間隙g0可使共振片12於共振時可產生更大幅度的上下位移,而其中該壓電致動器之振動位移為d,與該間隙g0的差值為x,即x=g0-d,經測試當x≦0um,為有噪音狀態;當x=1至5um,微型氣壓動力裝置1最大輸出氣壓可達到350mmHg;當x=5至10um,微型氣壓動力裝置1最大輸出氣壓可達到250mmHg;當x=10至15um,微型氣壓動力裝置1最大輸出氣壓可達到150mmHg,其數值對應關係係如下列表一所示。上述之數值係在操作頻率為17K至20K之間、操作電壓為±10V至±20V之間。如此,在經此微型流體控制裝置1A之流道設計中產生壓力梯度,使氣體高速流動,並透過流道進出方向之阻抗差異,將氣體由吸入端傳輸至排出端,且在排出端有氣壓之狀態下,仍有能力持續推出氣體,並可達到靜音之效果。 When the miniature fluid control device 1A of the miniature pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage, and the support 132 is used as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by being actuated by a voltage, since the resonance plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central recessed portion 111 of the air intake plate 11 will also be deformed by bending vibration, that is, the resonance plate 12 corresponds to the The part of the central recessed portion 111 of the air intake plate 11 is the movable portion 12 a of the resonance plate 12. When the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12 a of the resonance plate 12 will be brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and deforms downward, the gas enters through at least one air inlet hole 110 on the air inlet plate 11 and passes through its first At least one busbar hole 112 of a surface 11b is collected at the central central recessed portion 111, and then flows down into the first cavity 121 through the central hole 120 corresponding to the central recessed portion 111 on the resonance plate 12, and thereafter, Driven by the vibration of the piezoelectric actuator 13, the resonance plate 12 will also resonate and perform vertical As shown in FIG. 5C, the compound vibration is such that the movable portion 12a of the resonance plate 12 vibrates downwards and attaches to the convex portion 130c of the suspension plate 130 that is in contact with the piezoelectric actuator 13 to make the suspension plate The space between the area other than the convex portion 130c of the 130 and the fixing chamber 12b on both sides of the resonance plate 12 will not be reduced, and the volume of the first chamber 121 will be compressed by the deformation of the resonance plate 12 And close the middle circulation space of the first chamber 121, so that the gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward. As for the 5D figure, the movable portion 12a of the resonance plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so that the first chamber 121 is also squeezed. At this time, since the piezoelectric actuator 13 is lifted upward, the displacement of the lift may be d, so that the gas in the first chamber 121 will flow to both sides, and then the gas will be continuously driven from the air inlet plate. At least one air inlet 110 on 11 enters, and then flows into the cavity formed by the central recess 111, as in As shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 being lifted upward, and the movable portion 12a of the resonance plate 12 is also brought to an upward position, so that the gas in the central recessed portion 111 is passed by the resonance plate 12 again. The central hole 120 flows into the first chamber 121 and passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward through the micro fluid control device 1A. From this aspect, it can be seen that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, the two Setting a gap g0 between the structures can cause the resonance plate 12 to generate a larger up and down displacement when resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference from the gap g0 is x, that is, x = g0-d, tested when x ≦ 0um, it is noisy; when x = 1 to 5um, the maximum output air pressure of micro pneumatic power device 1 can reach 350mmHg; when x = 5 to 10um, the maximum output air pressure of micro pneumatic power device 1 It can reach 250mmHg; when x = 10 to 15um, the maximum output air pressure of the miniature pneumatic power unit 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 1 below. The above values are between an operating frequency of 17K to 20K and an operating voltage of ± 10V to ± 20V. In this way, a pressure gradient is generated in the design of the flow channel through this miniature fluid control device 1A, so that the gas flows at high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path, and there is pressure at the discharge end. In this state, there is still the ability to continuously push out the gas and achieve the effect of silence.

另外,於一些實施例中,共振片12之垂直往復式振動頻率係可與壓電致動器13之振動頻率相同,即兩者可同時向上或同時向下,其係可依照實際施作情形而任施變化,並不以本實施例所示之作動方式為限。 In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonance plate 12 may be the same as the vibration frequency of the piezoelectric actuator 13, that is, both may be upward or downward at the same time, which may be based on the actual implementation situation. However, the change of Ren Shi is not limited to the operation mode shown in this embodiment.

請同時參閱第1A圖、第2A圖及第6A圖、第6B圖,其中第6A圖係為第1A圖所示之微型氣壓動力裝置之集氣板16與微型閥門裝置1B之集壓作動示意圖,第6B圖則為第1A圖所示之微型氣壓動力裝置之集氣板16與微型閥門裝置1B之卸壓作 動示意圖。如第1A圖及第6A圖所示,本案之微型氣壓動力裝置1之微型閥門裝置1B係依序由閥門片17以及出口板18堆疊而成,並搭配微型流體控制裝置1A之集氣板16來運作。 Please refer to FIG. 1A, FIG. 2A, FIG. 6A, and FIG. 6B at the same time, where FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the miniature pneumatic power device shown in FIG. 1A Fig. 6B shows the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. Motion diagram. As shown in Figures 1A and 6A, the miniature valve device 1B of the miniature pneumatic power device 1 in this case is sequentially stacked by a valve plate 17 and an outlet plate 18, and is matched with a gas collection plate 16 of a miniature fluid control device 1A To work.

於本實施例中,集氣板16具有一表面160及一基準表面161,該表面160上係凹陷以形成一集氣腔室162,供該壓電致動器13設置其中,由微型流體控制裝置1A向下傳輸之氣體則暫時蓄積於此集氣腔室162中,且於集氣板16中係具有複數個貫穿孔,其包含有第一貫穿孔163及第二貫穿孔164,第一貫穿孔163及第二貫穿孔164之一端係與集氣腔室162相連通,另一端則分別與集氣板16之基準表面161上的第一卸壓腔室165及第一出口腔室166相連通。以及,在第一出口腔室166處更進一步增設一凸部結構167,例如可為但不限為一圓柱結構,該凸部結構167之高度係高於該集氣板16之基準表面161,且凸部結構167之高度介於0.3mm至0.55mm之間,且其較佳值為0.4mm。 In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161. The surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be disposed therein, which is controlled by a microfluid. The gas transmitted downward by the device 1A is temporarily accumulated in the gas collecting chamber 162, and there are a plurality of through holes in the gas collecting plate 16, including a first through hole 163 and a second through hole 164. One end of the through-hole 163 and the second through-hole 164 is in communication with the gas collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16. Connected. And, a convex structure 167 is further added at the first exit chamber 166, for example, it may be, but not limited to, a cylindrical structure, and the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16, The height of the convex structure 167 is between 0.3 mm and 0.55 mm, and the preferred value is 0.4 mm.

出口板18包含有一卸壓通孔181、一出口通孔182、一基準表面180以及一第二表面187,其中該卸壓通孔181、出口通孔182係貫穿出口板18之基準表面180與第二表面187,該基準表面180上凹陷一第二卸壓腔室183及一第二出口腔室184,該卸壓通孔181設在第二卸壓腔室183中心部分,且於第二卸壓腔室183與第二出口腔室184之間更具有一連通流道185,用以供氣體流通,而出口通孔182之一端與第二出口腔室184相連通,另一端則與出口19相連通,於本實施例中,出口19係可與一裝置相連接(未圖示),例如:壓力機,但不以此為限。 The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 pass through the reference surface 180 of the outlet plate 18 and A second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, and the pressure relief through hole 181 is provided in the center portion of the second pressure relief chamber 183, and There is also a communication channel 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through-hole 182 is in communication with the second outlet chamber 184 and the other end is in communication with the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

閥門片17上具有一閥孔170以及複數個定位孔洞171,該閥門片17之厚度介於0.1mm至0.3mm之間,而其較佳值為0.2mm。 The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

當閥門片17在集氣板16及出口板18之間定位組裝時,該出口板18之卸壓通孔181對應於該集氣板16之該第一貫穿孔163,該第二卸壓腔室183對應於該集氣板16之第一卸壓腔室165,該第二出口腔室184對應於該集氣板16之第一出口腔室166,而該閥門片17設置於該集氣板16及該出口板18之間,阻隔第一卸壓腔室165與 第二卸壓腔室183連通,且該閥門片17之閥孔170設置於該第二貫穿孔164及該出口通孔182之間,且閥孔170位於集氣板16之第一出口腔室166之凸部結構167而對應設置,藉由此單一之閥孔170之設計,以使氣體可因應其壓差而達到單向流動之目的。 When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 and the second pressure relief cavity of the gas collecting plate 16. The chamber 183 corresponds to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is provided in the gas collecting plate Between the plate 16 and the exit plate 18, the first pressure relief chamber 165 and The second pressure relief chamber 183 communicates, and the valve hole 170 of the valve plate 17 is disposed between the second through hole 164 and the outlet through hole 182, and the valve hole 170 is located in the first outlet chamber of the gas collecting plate 16. The convex part structure 167 of 166 is correspondingly arranged, so that the single valve hole 170 is designed so that the gas can achieve the purpose of unidirectional flow according to its pressure difference.

又該出口板18之卸壓通孔181一端可進一部增設一凸出而形成之凸部結構181a,例如可為但不限為圓柱結構,該凸部結構181a之高度係介於0.3mm至0.55mm之間,且其較佳值為0.4mm,而此凸部結構181a透過改良以增加其高度,該凸部結構181a之高度係高於該出口板18之基準表面180,以加強使閥門片17快速地抵觸且封閉卸壓通孔181,並達到一預力抵觸作用完全密封之效果;以及,出口板18更具有至少一限位結構188,該限位結構188之高度為0.32mm,以本實施例為例,限位結構188係設置於第二卸壓腔室183內,且為一環形塊體結構,且不以此為限,其主要為當微型閥門裝置1B進行集壓作業時,供以輔助支撐閥門片17之用,以防止閥門片17塌陷,並可使閥門片17可更迅速地開啟或封閉。 In addition, one end of the pressure-relief through hole 181 of the outlet plate 18 can be further provided with a protruding convex structure 181a. For example, the convex structure 181a can be, but not limited to, a cylindrical structure. The height of the convex structure 181a is 0.3 mm to 0.55mm, and its preferred value is 0.4mm, and the convex structure 181a is improved to increase its height. The height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the valve. The sheet 17 quickly abuts and closes the pressure relief through-hole 181, and achieves the effect of a pre-force abutment and complete sealing; and the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32mm, Taking this embodiment as an example, the position-limiting structure 188 is disposed in the second pressure-relief chamber 183 and is a ring-shaped block structure, and is not limited thereto. It is mainly used when the micro-valve device 1B performs pressure-gathering operation. At this time, it is used to support the valve sheet 17 to prevent the valve sheet 17 from collapsing, and the valve sheet 17 can be opened or closed more quickly.

當微型閥門裝置1B集壓作動時,主要如第6A圖所示,其係可因應來自於微型流體控制裝置1A向下傳輸之氣體所提供之壓力,又或是當外界的大氣壓力大於與出口19連接的裝置(未圖示)的內部壓力時,則氣體會自微型流體控制裝置1A之集氣板16中的集氣腔室162分別經第一貫穿孔163以及第二貫穿孔164而向下流入第一卸壓腔室165及第一出口腔室166內,此時,向下的氣體壓力係使可撓性的閥門片17向下彎曲形變進而使第一卸壓腔室165的體積增大,且對應於第一貫穿孔163處向下平貼並抵頂於卸壓通孔181之端部,進而可封閉出口板18之卸壓通孔181,故於第二卸壓腔室183內的氣體不會自卸壓通孔181處流出。當然,本實施例,可利用卸壓通孔181端部增設一凸部結構181a之設計,以加強使閥門片17快速地抵觸且封閉卸壓通孔181,並達到一預力抵觸作用完全密封之效果,同時並透過環設於卸壓通孔181周邊之限位結構188,以輔助支撐閥門片17,使其不會產生塌陷。另一方面,由於氣體係自第二貫穿孔164而向下流入第一出口腔室166中,且對應於第一出口腔室166處之閥門片17亦向下彎曲形變,故使得其對應的閥孔170向下打開,氣體則可自第一出口腔 室166經由閥孔170而流入第二出口腔室184中,並由出口通孔182而流至出口19及與出口19相連接之裝置(未圖示)中,藉此以對該裝置進行集壓之作動。 When the miniature valve device 1B is actuated under pressure, it is mainly shown in FIG. 6A, which can respond to the pressure provided by the gas transmitted downward from the miniature fluid control device 1A, or when the external atmospheric pressure is greater than the outlet pressure. 19 When the internal pressure of the connected device (not shown), the gas will flow from the gas collecting chamber 162 in the gas collecting plate 16 of the micro fluid control device 1A through the first through hole 163 and the second through hole 164, respectively. It flows down into the first pressure-relief chamber 165 and the first outlet chamber 166. At this time, the downward pressure of the gas causes the flexible valve sheet 17 to bend downward to deform and thereby make the volume of the first pressure-relief chamber 165 down. It is enlarged and corresponds to the first through hole 163 and is flatly pressed down and abuts against the end of the pressure relief through hole 181, so that the pressure relief through hole 181 of the outlet plate 18 can be closed, so it is in the second pressure relief chamber 183 The gas inside does not flow out from the pressure relief through hole 181. Of course, in this embodiment, a design of a convex structure 181a can be added to the end of the pressure relief through hole 181 to strengthen the valve plate 17 to quickly abut against and close the pressure relief through hole 181, and to achieve a pre-pressure resistance fully sealed At the same time, the limiting structure 188 provided around the pressure-relief through hole 181 is also supported through the ring to help support the valve plate 17 so that it will not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first exit chamber 166, and the valve sheet 17 corresponding to the first exit chamber 166 also bends downward, so that it corresponds to Valve hole 170 opens downwards, and gas can exit the mouth The chamber 166 flows into the second outlet chamber 184 through the valve hole 170, and flows from the outlet through hole 182 to the outlet 19 and a device (not shown) connected to the outlet 19 to collect the device. Press it.

請續參閱第6B圖,當微型閥門裝置1B進行卸壓時,其係可藉由調控微型流體控制裝置1A之氣體傳輸量,使氣體不再輸入集氣腔室162中,或是當與出口19連接之裝置(未圖示)內部壓力大於外界的大氣壓力時,則可使微型閥門裝置1B進行卸壓。此時,氣體將自與出口19連接的出口通孔182輸入至第二出口腔室184內,使得第二出口腔室184之體積膨脹,進而促使可撓性之閥門片17向上彎曲形變,並向上平貼、抵頂於集氣板16上,故閥門片17之閥孔170會因抵頂於集氣板16而關閉。當然,在本實施例,可利用第一出口腔室166增設一凸部結構167之設計,故可供可撓性之閥門片17向上彎曲形變更快速抵觸,使閥孔170更有利達到一預力抵觸作用完全貼附密封之關閉狀態,因此,當處於初始狀態時,閥門片17之閥孔170會因緊貼抵頂於該凸部結構167而關閉,則該第二出口腔室184內的氣體將不會逆流至第一出口腔室166中,以達到更好的防止氣體外漏之效果。以及,第二出口腔室184中的氣體係可經由連通流道185而流至第二卸壓腔室183中,進而使第二卸壓腔室183的體積擴張,並使對應於第二卸壓腔室183的閥門片17同樣向上彎曲形變,此時由於閥門片17未抵頂封閉於卸壓通孔181端部,故該卸壓通孔181即處於開啟狀態,即第二卸壓腔室183內的氣體可由卸壓通孔181向外流進行卸壓作業。當然,本實施例,可利用卸壓通孔181端部增設之凸部結構181a或是透過設置於第二卸壓腔室183內之限位結構188,讓可撓性之閥門片17向上彎曲形變更快速,更有利脫離關閉卸壓通孔181之狀態。如此,則可藉由此單向之卸壓作業將與出口19連接的裝置(未圖示)內的氣體排出而降壓,或是完全排出而完成卸壓作業。 Please refer to FIG. 6B continuously. When the micro valve device 1B is depressurized, it can regulate the gas transmission amount of the micro fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the miniature valve device 1B can be depressurized. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, and then the flexible valve sheet 17 is bent and deformed upward, and Flatly affix upwards and abut against the gas collecting plate 16, so the valve hole 170 of the valve sheet 17 will be closed due to abutting against the gas collecting plate 16. Of course, in this embodiment, the design of a convex structure 167 can be added to the first exit chamber 166, so that the flexible valve plate 17 can be bent upward to change and quickly resist, so that the valve hole 170 is more favorable to achieve a predetermined The force resistance fully adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve plate 17 will be closed by abutting against the convex structure 167, and the inside of the second exit chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166 to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber 183. The valve plate 17 of the pressure chamber 183 is also bent upward and deformed. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow outward through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the convex valve structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to bend the flexible valve plate 17 upward. The shape change is fast, which is more conducive to the state of closing the pressure relief through hole 181. In this way, the pressure in the device (not shown) connected to the outlet 19 can be exhausted and reduced by the one-way pressure relief operation, or the pressure relief operation can be completed by completely exhausting.

請同時參閱第1A圖、第2A圖及第7A圖至第7E圖,其中第7A圖至第7E圖係為第1A圖所示之微型氣壓動力裝置之集壓作動示意圖。如第7A圖所示,微型氣壓動力裝置1即由微型流體控制裝置1A以及微型閥門裝置1B所組合而成,其中微型流體控制裝置1A係如前述,依序由進氣板11、共振片12、壓電致動器13、絕緣片 141、導電片15、另一絕緣片142及集氣板16等結構堆疊組裝定位而成,且於共振片12與壓電致動器13之間係具有一間隙g0,且於共振片12與壓電致動器13之間具有第一腔室121,以及,微型閥門裝置1B則同樣由閥門片17以及出口板18等依序堆疊組裝定位在該微型流體控制裝置1A之集氣板16上而成,且於微型流體控制裝置1A之集氣板16與壓電致動器13之間係具有集氣腔室162、於集氣板16之基準表面161更凹陷一第一卸壓腔室165以及第一出口腔室166,以及於出口板18之基準表面180更凹陷一第二卸壓腔室183及第二出口腔室184,在本實施例中,藉由該微型氣壓動力裝置之操作頻率為27K至29.5K之間、操作電壓為±10V至±16V,以及藉由該等多個不同的壓力腔室搭配壓電致動器13之驅動及共振片12、閥門片17之振動,以使氣體向下集壓傳輸。 Please refer to FIG. 1A, FIG. 2A, and FIG. 7A to FIG. 7E at the same time, where FIGS. 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the miniature pneumatic power device 1 is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A is, as described above, sequentially composed of an air inlet plate 11 and a resonance plate 12 , Piezo actuator 13, Insulation sheet 141, conductive sheet 15, another insulating sheet 142, and gas collecting plate 16 are stacked and assembled, and there is a gap g0 between the resonant sheet 12 and the piezoelectric actuator 13, and between the resonant sheet 12 and the piezoelectric actuator 13 There is a first chamber 121 between the piezoelectric actuators 13, and the micro valve device 1B is also stacked and assembled on the gas collecting plate 16 of the micro fluid control device 1A in the same order by the valve plate 17 and the outlet plate 18 and the like. And a gas collecting chamber 162 is provided between the gas collecting plate 16 and the piezoelectric actuator 13 of the micro fluid control device 1A, and a first pressure relief chamber is further recessed on the reference surface 161 of the gas collecting plate 16 165 and the first outlet chamber 166, and the second pressure relief chamber 183 and the second outlet chamber 184 are further recessed on the reference surface 180 of the outlet plate 18. In this embodiment, the micro-pneumatic power device is used. The operating frequency is between 27K and 29.5K, the operating voltage is ± 10V to ± 16V, and the vibration of the resonance plate 12, the valve plate 17 and the vibration of the piezo actuator 13 are driven by the plurality of different pressure chambers. To make the gas transfer to the downward pressure.

如第7B圖所示,當微型流體控制裝置1A之壓電致動器13受電壓致動而向下振動時,則氣體會由進氣板11上的進氣孔110進入微型流體控制裝置1A中,並經由至少一匯流排孔112以匯集到其中心凹部111處,再經由共振片12上的中空孔洞120向下流入至第一腔室121中。其後,則如第7C圖所示,由於受壓電致動器13振動之共振作用,共振片12亦會隨之進行往復式振動,即其向下振動,並接近於壓電致動器13之懸浮板130之凸部130c上,藉由此共振片12之形變,使得進氣板11之中心凹部111處之腔室之體積增大,並同時壓縮第一腔室121之體積,進而促使第一腔室121內的氣體推擠向兩側流動,進而經過壓電致動器13之支架132之間的空隙135而向下穿越流通,以流至微型流體控制裝置1A與微型閥門裝置1B之間的集氣腔室162內,並再由與集氣腔室162相連通之第一貫穿孔163及第二貫穿孔164向下對應流至第一卸壓腔室165及第一出口腔室166中,由此實施態樣可見,當共振片12進行垂直之往復式振動時,係可由其與壓電致動器13之間的間隙g0以增加其垂直位移的最大距離,換句話說,於該兩結構之間設置間隙g0可使共振片12於共振時可產生更大幅度的上下位移。 As shown in FIG. 7B, when the piezoelectric actuator 13 of the micro-fluid control device 1A is vibrated downward by being actuated by a voltage, the gas will enter the micro-fluid control device 1A through the air inlet hole 110 on the air inlet plate 11 And is collected at the central recess 111 through at least one busbar hole 112, and then flows down into the first cavity 121 through the hollow hole 120 on the resonance sheet 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonance plate 12 will also perform reciprocating vibration, that is, it vibrates downward and approaches the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance plate 12 to increase the volume of the cavity at the central recess 111 of the air intake plate 11 and compress the volume of the first cavity 121 at the same time. The gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward to flow to the micro fluid control device 1A and the micro valve device. The gas collection chambers 162 between 1B, and then flow through the first through holes 163 and the second through holes 164 communicating with the gas collection chambers 162 to the first pressure relief chamber 165 and the first outlet respectively. In the oral cavity 166, it can be seen from this embodiment that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, In other words, setting the gap g0 between the two structures can cause the resonance plate 12 to generate a larger amplitude when the resonance occurs. The upper and lower displacement.

接著,則如第7D圖所示,由於微型流體控制裝置1A之共振片12回復至 初始位置,而壓電致動器13受電壓驅動以向上振動,而其中該壓電致動器之振動位移為d,與該間隙g0的差值為x,即x=g0-d,經測試當x=1至5um、該操作頻率為27k至29.5KHz、操作電壓為±10V至±16V時,其最大輸出氣壓可達到至少300mmHg,但不以此為限。如此同樣擠壓第一腔室121之體積,使得第一腔室121內的氣體朝兩側流動,並由壓電致動器13之支架132之間的空隙135持續地輸入至集氣腔室162、第一卸壓腔室165以及第一出口腔室166中,如此更使得第一卸壓腔室165及第一出口腔室166內的氣壓越大,進而推動可撓性的閥門片17向下產生彎曲形變,則於第二卸壓腔室183中,閥門片17則向下平貼並抵頂於卸壓通孔181端部之凸部結構181a,進而使卸壓通孔181封閉,而於第二出口腔室184中,閥門片17上對應於出口通孔182之閥孔170係向下打開,使第二出口腔室184內之氣體可由出口通孔182向下傳遞至出口19及與出口19連接的任何裝置(未圖示),進而以達到集壓作業之目的。最後,則如第7E圖所示,當微型流體控制裝置1A之共振片12共振向上位移,進而使進氣板11第一表面11b的中心凹部111內的氣體可由共振片12的中空孔洞120而流入第一腔室121內,再經由壓電致動器13之支架132之間的空隙135而向下持續地傳輸至集氣板16中,則由於其氣體壓係持續向下增加,故氣體仍會持續地經由集氣腔室162、第二貫穿孔164、第一出口腔室166、第二出口腔室184及出口通孔182而流至出口19及與出口19連接的任何裝置中,此集壓作業係可經由外界之大氣壓力與裝置內的壓力差以驅動之,但不以此為限。 Then, as shown in FIG. 7D, the resonance piece 12 of the micro fluid control device 1A returns to The initial position, and the piezoelectric actuator 13 is driven by voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is d, and the difference between the piezoelectric actuator 13 and the gap g0 is x, that is, x = g0-d. When x = 1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ± 10V to ± 16V, the maximum output air pressure can reach at least 300mmHg, but not limited to this. The volume of the first chamber 121 is also squeezed in this way, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13. 162. In the first pressure relief chamber 165 and the first outlet chamber 166, this further increases the pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve sheet 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flat downward and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve hole 170 on the valve sheet 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19 And any device (not shown) connected to the outlet 19, so as to achieve the purpose of collecting pressure. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A moves upward in resonance, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be removed by the hollow hole 120 of the resonance plate 12. It flows into the first chamber 121 and is continuously transmitted downward to the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13. Since its gas pressure system continues to increase downward, the gas Will continue to flow through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collecting operation can be driven by the external atmospheric pressure and the pressure difference in the device, but it is not limited to this.

當與出口19連接的裝置(未圖示)內部的壓力大於外界的壓力時,則微型氣壓動力裝置1係可如第8圖所示進行降壓或是卸壓之作業,其降壓或是卸壓之作動方式主要係如前所述,可藉由調控微型流體控制裝置1A之氣體傳輸量,使氣體不再輸入集氣腔室162中,此時,氣體將自與出口19連接的出口通孔182輸入至第二出口腔室184內,使得第二出口腔室184之體積膨脹,進而促使可撓性之閥門片17向上彎曲形變,並向上平貼、抵頂於第一出口腔室166之凸部結構167上,而使閥門片17之閥孔170關閉,即第二出口腔室184內的氣體不會逆流至第一出口腔室166中;以及,第 二出口腔室184中的氣體係可經由連通流道185而流至第二卸壓腔室183中,再由卸壓通孔181以進行卸壓作業;如此可藉由此微型閥門結構1B之單向氣體傳輸作業將與出口19連接的裝置內的氣體排出而降壓,或是完全排出而完成卸壓作業。 When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the miniature pneumatic power unit 1 can perform pressure reduction or pressure relief operations as shown in FIG. 8. The operation of pressure relief is mainly as described above. By regulating the gas transmission volume of the micro fluid control device 1A, the gas is no longer input into the gas collection chamber 162. At this time, the gas will come from the outlet connected to the outlet 19 The through-hole 182 is input into the second exit chamber 184, so that the volume of the second exit chamber 184 expands, thereby urging the flexible valve sheet 17 to bend upward and deform, and flatly upwardly press against the first exit chamber. 166 on the convex structure 167, and the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and The gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, and then the pressure relief through hole 181 is used for pressure relief operation; thus, the micro valve structure 1B The one-way gas transmission operation exhausts the gas in the device connected to the outlet 19 to reduce the pressure, or completely exhausts the pressure to complete the pressure relief operation.

本案採用之懸浮板130係為正方形型態,當懸浮板130的邊長縮小,而懸浮板130的面積隨之也逐漸縮小時,會發現縮小尺寸一方面使得懸浮板130的剛性得以提升,並且因內部的氣體流道容積減小,有利於空氣的推動或壓縮,以致能提升輸出氣壓值;並且另一方面亦可減少懸浮板130於垂直振動時所產生之水平方向的變形,進而使壓電致動器13運作時能夠維持在同一垂直方向上而不易傾斜,藉此能夠減少壓電致動器13與共振片12或其他組裝元件之間的碰撞干涉,以致能降低噪音的產生,進而使得品質的不良率降低。綜上,當壓電致動器13的懸浮板130的尺寸縮小時,壓電致動器13亦可做得更小,藉此除可提升輸出氣壓之性能外,亦能減少噪音,且能夠降低產品的不良率;而反之,發現大尺寸的懸浮板130之輸出氣壓值較低且不良率較高。 The suspension plate 130 used in this case is a square type. When the side length of the suspension plate 130 is reduced, and the area of the suspension plate 130 is gradually reduced, it will be found that the reduced size on the one hand improves the rigidity of the suspension plate 130, and Because the volume of the internal gas flow path is reduced, it is conducive to the pushing or compression of air, which can increase the output air pressure value; on the other hand, it can also reduce the horizontal deformation of the suspension plate 130 when it vibrates vertically, which in turn makes the pressure The electric actuator 13 can be maintained in the same vertical direction during the operation and is not easy to tilt, thereby reducing the collision interference between the piezoelectric actuator 13 and the resonance plate 12 or other assembly components, so that the generation of noise can be reduced, and The quality defect rate is reduced. In summary, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, thereby reducing the noise and improving the performance of the output air pressure. Reduce the defective rate of the product; on the contrary, it is found that the output air pressure value of the large-sized suspension plate 130 is lower and the defective rate is higher.

再者,懸浮板130及壓電陶瓷板133係該微型氣壓動力裝置1的核心,隨著兩者面積的縮減,得以將該微型氣壓動力裝置1的面積同步的縮小、減輕其重量,令該微型氣壓動力裝置1可以輕易地裝設於可攜式裝置上,而不會因為體積過大而受限。當然,本案微型氣壓動力裝置1為達到薄型化之趨勢,將微型流體控制裝置1A組裝微型閥門裝置1B之總厚度介於2mm至6mm的高度,進而使微型氣體動力裝置1達成輕便舒適之可攜式目的,並可廣泛地應用於醫療器材及相關設備之中。 In addition, the suspension plate 130 and the piezoelectric ceramic plate 133 are the core of the miniature pneumatic power device 1, and as the areas of the two are reduced, the area of the miniature pneumatic power device 1 can be reduced in size and reduced in weight. The miniature pneumatic power device 1 can be easily installed on a portable device without being limited due to its large size. Of course, in order to reduce the thickness of the miniature pneumatic power device 1 in this case, the total thickness of the miniature fluid control device 1A assembled with the miniature valve device 1B is between 2mm and 6mm, thereby making the miniature gas power device 1 portable and comfortable. It can be widely used in medical equipment and related equipment.

綜上所述,本案所提供之微型氣壓動力裝置,主要藉由微型流體控制裝置及微型閥門裝置之相互組接,使氣體自微型流體控制裝置上之進氣孔進入,並利用壓電致動器之作動,使氣體於設計後之流道及壓力腔室中產生壓力梯度,進而使氣體高速流動而傳遞至微型閥門裝置中,再透過微型閥門裝置之單向閥門設計,使氣體以單方向流動,進而可將壓力累積於與出口連接的任何裝置中;而當欲進行降壓或卸壓時,則調控微型流體控制裝置之傳輸量,並使氣體可由與出口連接的裝置中傳輸至微型閥 門裝置之第二出口腔室,並由連通流道將之傳輸至第二卸壓腔室,再由卸壓通孔流出,進而以達到可使氣體迅速地傳輸,且同時可達到靜音之功效,更可使微型氣體動力裝置之整體體積減小及薄型化,進而使微型氣體動力裝置達成輕便舒適之可攜式目的,並可廣泛地應用於醫療器材及相關設備之中。因此,本案之微型氣體動力裝置極具產業利用價值,爰依法提出申請。 In summary, the micro-pneumatic power device provided in this case is mainly connected with the micro fluid control device and the micro valve device, so that the gas enters from the air inlet of the micro fluid control device and is actuated by piezoelectricity. The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transferred to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is unidirectional Flow, which can accumulate pressure in any device connected to the outlet; and when pressure reduction or pressure relief is required, the transmission volume of the micro fluid control device is regulated, and gas can be transmitted from the device connected to the outlet to the micro valve The second outlet chamber of the door device is transmitted to the second pressure-relieving chamber by the communication channel, and then flows out from the pressure-relief through hole, so as to achieve rapid transmission of gas and at the same time achieve the effect of silence In addition, the overall volume of the miniature gas power device can be reduced and thinned, so that the miniature gas power device can be portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the miniature gas power plant in this case has great industrial use value, and applied for it in accordance with the law.

縱使本發明已由上述實施例詳細敘述而可由熟悉本技藝人士任施匠思而 為諸般修飾,然皆不脫如附申請專利範圍所欲保護者。 Although the present invention has been described in detail by the above embodiments, it can be used by those skilled in the art. For all kinds of modifications, but it is not as good as those who want to protect the scope of patent application.

13‧‧‧壓電致動器 13‧‧‧ Piezo actuator

130‧‧‧懸浮板 130‧‧‧ suspension board

130a‧‧‧懸浮板之第二表面 130a‧‧‧Second surface of suspension board

130c‧‧‧凸部 130c‧‧‧ convex

130d‧‧‧中心部 130d‧‧‧ Center

130e‧‧‧外周部 130e‧‧‧outer

131‧‧‧外框 131‧‧‧ frame

131a‧‧‧外框之第二表面 131a‧‧‧The second surface of the frame

132‧‧‧支架 132‧‧‧ Bracket

132a‧‧‧支架之第二表面 132a‧‧‧ The second surface of the bracket

134‧‧‧導電接腳 134‧‧‧ conductive pins

135‧‧‧空隙 135‧‧‧Gap

Claims (12)

一種壓電致動器,包含:一懸浮板,為正方形之結構,具有介於4mm-8mm之邊長,且可由一中心部到一外周部彎曲振動;一壓電陶瓷板,為正方形之結構,具有不大於該懸浮板邊長之邊長,貼附於該懸浮板之一第一表面上,用以施加電壓以驅動該懸浮板彎曲振動;一外框,環繞設置於該懸浮板之外側;以及至少一支架,連接於該懸浮板與該外框之間,以提供彈性支撐,其中該支架包括有:一樑部,設置於該懸浮板與該外框之間之一間隙中,其設置之方向係平行於該外框及該懸浮板;一懸浮板連接部,連接於該樑部與該懸浮板之間;以及一外框連接部,連接於該樑部與該外框之間,並與該懸浮板連接部彼此相對應、且設置於同一軸線上。 A piezoelectric actuator includes: a suspension plate having a square structure having a side length between 4mm and 8mm and bending vibration from a central portion to an outer peripheral portion; a piezoelectric ceramic plate having a square structure Has a side length that is not greater than the side length of the suspension board, and is attached to one of the first surfaces of the suspension board to apply a voltage to drive the suspension board to vibrate and vibrate; And at least one bracket connected between the suspension plate and the outer frame to provide elastic support, wherein the bracket includes: a beam portion disposed in a gap between the suspension plate and the outer frame, wherein The setting direction is parallel to the outer frame and the suspension plate; a suspension plate connection portion is connected between the beam portion and the suspension plate; and an outer frame connection portion is connected between the beam portion and the outer frame. And corresponding to the suspension plate connecting part with each other and arranged on the same axis. 如申請專利範圍第1項所述壓電致動器,其中該至少一支架為一板連接部,用以連接該懸浮板與該外框。 The piezoelectric actuator according to item 1 of the scope of patent application, wherein the at least one bracket is a plate connection portion for connecting the suspension plate and the outer frame. 如申請專利範圍第2項所述壓電致動器,其中該板連接部之兩端部係彼此相對應、且設置於同一軸線上。 The piezoelectric actuator according to item 2 of the scope of patent application, wherein both end portions of the plate connecting portion are corresponding to each other and are disposed on the same axis. 如申請專利範圍第2項所述壓電致動器,其中該板連接部係以介於0~45度之斜角連接於該懸浮板與該外框。 According to the piezoelectric actuator described in item 2 of the patent application scope, the plate connecting portion is connected to the suspension plate and the outer frame at an inclined angle of 0 to 45 degrees. 如申請專利範圍第1項所述壓電致動器,其中該懸浮板為正方形之結構,具有4mm至6mm之邊長。 The piezoelectric actuator according to item 1 of the scope of the patent application, wherein the suspension plate has a square structure with a side length of 4 mm to 6 mm. 如申請專利範圍第1項所述壓電致動器,其中該懸浮板為正方形之結構,具有6mm至7.5mm之邊長。 The piezoelectric actuator according to item 1 of the scope of patent application, wherein the suspension plate has a square structure with a side length of 6 mm to 7.5 mm. 如申請專利範圍第1項所述壓電致動器,其中該懸浮板為正方形之結構, 具有7.5mm至8mm之邊長。 The piezoelectric actuator according to item 1 of the scope of patent application, wherein the suspension plate has a square structure, It has a side length of 7.5mm to 8mm. 如申請專利範圍第1項所述壓電致動器,其中該懸浮板之一第二表面上具有一凸部。 The piezoelectric actuator according to item 1 of the patent application, wherein a second surface of the suspension plate has a convex portion. 如申請專利範圍第8項所述壓電致動器,其中該懸浮板之該凸部高度係介於0.02mm至0.08mm之間。 According to the piezoelectric actuator described in item 8 of the patent application scope, the height of the convex portion of the suspension plate is between 0.02 mm and 0.08 mm. 如申請專利範圍第8項所述壓電致動器,其中該懸浮板之該凸部為一圓形凸起結構,直徑為該懸浮板之最小邊長的0.55倍的尺寸。 The piezoelectric actuator according to item 8 of the scope of the patent application, wherein the convex portion of the suspension plate is a circular protrusion structure with a diameter of 0.55 times the minimum side length of the suspension plate. 如申請專利範圍第1項所述壓電致動器,其中該懸浮板之厚度介於0.1mm至0.4mm之間。 The piezoelectric actuator according to item 1 of the scope of the patent application, wherein the thickness of the suspension plate is between 0.1 mm and 0.4 mm. 如申請專利範圍第1項所述壓電致動器,其中該壓電陶瓷板之厚度介於0.05mm至0.3mm之間。 The piezoelectric actuator according to item 1 of the patent application range, wherein the thickness of the piezoelectric ceramic plate is between 0.05 mm and 0.3 mm.
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TW105213593U TWM538546U (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128577A TWI633239B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128578A TWI626373B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
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TW105213586U TWM540196U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
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TW105213579U TWM539009U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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