TWI525325B - Elastic probe and its manufacturing method - Google Patents

Description

Elastic probe and method of manufacturing same

The present invention relates to a probe for a probe card, and more particularly to an elastic probe suitable for high frequency spot measurement and a method of manufacturing the same.

When the semiconductor wafer is tested, the test machine is electrically connected to the object to be tested through a probe card, and is subjected to signal transmission and signal analysis to obtain a test result of the object to be tested. The conventional probe card usually consists of a circuit board and a probe device, or further includes a space converter disposed between the circuit board and the probe device, and the probe device is provided with a plurality of corresponding objects to be tested. Probes arranged in electrical contacts to simultaneously contact the electrical contacts by the probes.

With the higher speed and high frequency operation conditions of electronic components, the design of the probe card also needs to correspondingly achieve the function of transmitting high frequency test signals effectively, so as to accurately reflect the test results. Conventional high-frequency probe cards mostly focus on the design of the board and space converter, as well as the design of matching the probe with the test machine and the object to be tested. However, the length of the probe is also a key factor affecting the frequency of the signal that can be effectively transmitted by the probe card. If the probe is shortened and the signal transmission path is shortened, the signal frequency that the probe can transmit can be increased.

Among the probes currently on the market, the thin film probe has a short needle length and can transmit a signal with a higher frequency, but the cost is high, the manufacturing process is complicated, and it is difficult to align during assembly; the cantilever probe is because of its The application method needs to have a considerable length, so it is difficult to increase its transmission signal frequency by reducing its length. In addition, the POGO pin and the vertical buckling needle are two commonly used vertical probes. The spring probe is characterized in that the middle portion has a spring, so that the point contact end can be tested. The electrical contact of the object moves up and down, and the deflection probe can be elastically bent due to the needle body of the middle portion, so that the point end can also move up and down with the height of the electrical contact of the object to be tested. When the probe card with the elastic probe as described above is tested at the same time for different height electrical contacts, the elastic probes can not only be in contact with each electrical contact but also electrically conduct, and can avoid contact. Excessive force causes damage to electrical contacts or improper test pin marks.

However, when the two kinds of elastic probes are used for spot measurement, the contact force transmission path and the signal transmission path are completely the same, so the contact force and the signal transmission will affect each other; and, in order to have sufficient elasticity, the spring probe needs to be set. There are springs of considerable length, and the body of the buckling probe also needs to have a considerable length, so it is difficult to increase the frequency of the signal that can be transmitted by shortening the probe.

In view of the above-mentioned deficiencies, the main object of the present invention is to provide an elastic probe, and a manufacturing method thereof, wherein the elastic probe can adjust the position of the contact portion with the height of the electrical contact of the object to be tested due to the elasticity. It also provides suitable contact force and is shorter than the conventional elastic probe, and separates the contact force and signal transmission path, so it is especially suitable for high frequency testing.

In order to achieve the above object, the elastic probe provided by the present invention comprises a casing, a needle body, and a polymer elastomer. The housing has a top portion, a bottom portion, a side wall between the top portion and the bottom portion, a through hole disposed at the bottom portion, and an accommodating space communicating with the through hole, the housing defining a through hole The imaginary axis. The needle system is disposed in the housing along the imaginary axis, and is electrically connected to the housing. The needle body has a body disposed on the through hole, and is located at one end of the body and is limited a stopper located in the accommodating space, and a contact portion located at the other end of the body and located outside the casing. The polymer elastic system can be elastically deformed by the needle body to be elastically deformed in the housing space of the housing.

The top of the housing is electrically connected to a circuit board or a space converter, and the touch portion of the needle body is used for contacting an electrical contact of the object to be tested, and the needle body and the housing are The electrical conduction relationship enables the electrical contact of the object to be tested to transmit signals to the circuit board or the space converter, and the polymer elastomer allows the needle body to be adjusted according to the height displacement of the electrical contact of the object to be tested. The location of the touch point and provide appropriate contact force. In addition, the contact force transmission path of the elastic probe is separated from the signal transmission path and can be shorter than the conventional elastic probe, and thus is particularly suitable for high frequency testing.

Preferably, the body of the needle body is slidably contacted with an inner wall surface of the perforation of the housing to electrically conduct each other. Alternatively, a side of the stop portion of the needle body is slidably contacting the side wall of the housing to electrically conduct each other. Alternatively, the needle body further has an extension extending from the stop portion, the extension portion being slidably contacting the side wall of the housing to electrically conduct each other. The above three electrical conduction methods may be selected one by one, two, or three.

When the needle body has the extension portion as described above, the polymer elastic body can abut against the extension portion and press the extension portion against the side wall, so that the extension portion can be more surely contacted with the side wall to Ensure that the housing is in electrical communication with the needle.

The needle body may have an extending portion extending from the stopping portion but not contacting the side wall. In this case, the polymeric elastic body may be abutted against the extending portion and the extending portion may be pushed toward the side wall. Having the body of the needle more positively contact the inner wall surface of the perforation of the housing and/or such that the side of the stop of the needle body more reliably contacts the side wall of the housing to ensure the housing and the housing The electrical conduction relationship of the needle body.

The invention provides a manufacturing method of an elastic probe composed of an upper shell member and a lower cover, comprising the following steps: a. manufacturing the upper shell member, the lower cap and the needle body, and the polymer elastomer Provided in the accommodating space of the upper casing; b. passing the needle through the perforation of the lower cover; and c. fixing the upper casing and the lower cover to each other.

The invention further provides another method for manufacturing the elastic probe as described above, comprising the steps of: a. manufacturing the top of the shell by using a lithography process and electroplating; b. manufacturing the shell by using a lithography process and electroplating a top portion of the body is integrally connected to a first portion of the sidewall, and the receiving space is formed; c. the polymeric elastomer is disposed in the receiving space; d. is fabricated by using a lithography process and electroplating a second portion of the side wall integrally connected, and a stop portion of the needle body on the polymer elastic body; e. using a lithography process and electroplating to manufacture the body portion integrally connected with the second portion of the side wall a third portion of the side wall, and a first portion of the body of the needle body integrally connected with the stopping portion of the needle body; f. manufacturing a third portion of the side wall by using a lithography process and electroplating a bottom portion of the housing to which the housing is coupled, and a second section of the body of the needle body integrally connected to the first section of the body of the needle body and located in the perforation of the bottom of the housing; and The lithography process and electroplating are made with the body of the needle The second section integrally connected to and located outside the housing body portion of a third section of the needle.

Detailed construction, features, assembly or use of the elastic probe and its method of manufacture provided by the present invention will be described in the detailed description of the following embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited by the scope of the invention.

11~19‧‧‧elastic probe

20‧‧‧shell

21‧‧‧ top

212‧‧‧Connecting end

22‧‧‧ bottom

23‧‧‧ side wall

232‧‧‧

234‧‧‧ lower surface

236‧‧‧ side surface

23A‧‧‧Part 1

23B‧‧‧Part II

23C‧‧‧Part III

24‧‧‧ accommodating space

25‧‧‧Perforation

252‧‧‧ inner wall

26‧‧‧Upper case

27‧‧‧Under the cover

30‧‧‧ needle

31‧‧‧ Body

31A‧‧‧First Section

31B‧‧‧second section

31C‧‧‧third section

32‧‧‧stops

322‧‧‧ side

324‧‧‧Abutment

33‧‧‧ Touching

34‧‧‧Extension

35‧‧‧ accommodating slots

36‧‧‧Flexible Department

37‧‧‧Apartment

40‧‧‧Polymer elastomer

42‧‧‧ top side

44‧‧‧ bottom side

51‧‧‧Substrate

52‧‧‧ Groove

53‧‧‧ seed layer

54‧‧‧Light resistance

55‧‧‧through hole

56‧‧‧Combination layer

61‧‧‧ glass plate

62‧‧‧Substrate

63‧‧‧Perforation

632‧‧‧ Large diameter section

634‧‧‧Small path

64‧‧‧ seed layer

65‧‧‧Light resistance

66‧‧‧through hole

67‧‧‧metal layer

71‧‧‧First substrate

711‧‧‧ first surface

712‧‧‧Perforation

713‧‧‧ second surface

714‧‧‧ Groove

72‧‧‧Light resistance

73‧‧‧second substrate

74‧‧‧ seed layer

75‧‧‧ rod body

76‧‧‧Light resistance

762‧‧‧through hole

77‧‧‧ Third substrate

78‧‧‧Light resistance

80‧‧‧elastic probe

81‧‧‧Substrate

82‧‧‧ Sacrifice layer

83‧‧‧Light resistance

832‧‧‧through hole

84‧‧‧Light resistance

842‧‧‧through hole

85‧‧‧Light resistance

852‧‧‧through hole

854‧‧‧ inside part

856‧‧‧Outside

D ₁ ‧‧‧Probe length

D ₂ ‧‧‧elastomer length

L‧‧‧ imaginary axis

1 is a cross-sectional view of a resilient probe according to a first preferred embodiment of the present invention; and FIG. 2 is a cross-sectional view of a flexible probe according to a second preferred embodiment of the present invention; FIG. 4 is a cross-sectional view showing a flexible probe according to a third preferred embodiment of the present invention; FIG. 4 is a cross-sectional view showing a flexible probe according to a fourth preferred embodiment of the present invention; FIG. 6 is a cross-sectional view of an elastic probe according to a fifth preferred embodiment of the present invention; FIG. 6 is a cross-sectional view of the elastic probe according to a sixth preferred embodiment of the present invention; A cross-sectional view of a resilient probe provided by a seventh preferred embodiment; FIG. 8 is a cross-sectional view of an elastic probe according to an eighth preferred embodiment of the present invention; 9 is a schematic perspective view of an elastic probe provided by the ninth preferred embodiment of the present invention; FIG. 11 is a cross-sectional view of the elastic probe provided by the ninth preferred embodiment of the present invention; A cross-sectional exploded view of the elastic probe provided by the preferred embodiment; Figs. 12 to 14 are the same FIG. 15 is a cross-sectional view showing the step a of the method for manufacturing the elastic probe provided by the ninth preferred embodiment; and FIGS. 15 to 25 are views showing the manufacture of the elastic probe according to the tenth preferred embodiment of the present invention. A schematic cross-sectional view of the method.

The Applicant first describes the same or similar elements or structural features thereof in the embodiments and the drawings which will be described below.

Please refer to FIG. 1 for the elasticity provided by a first preferred embodiment of the present invention. The probe 11 includes a housing 20, a needle 30, and a polymeric elastomer 40. The housing 20 and the needle body 30 can be made of a metal material or other electrically conductive material, and the polymer elastomer 40 is made of a non-conductive polymer composite material (for example, but not limited to, a polymer organic germanium compound). production.

The housing 20 can be substantially hollow cylindrical and has a top portion 21, a bottom portion 22, and a side wall 23 between the top portion 21 and the bottom portion 22. The top portion 21, the bottom portion 22 and the side wall 23 define a cavity. A space 24 is provided. The bottom portion 22 is provided with a through hole 25 communicating with the accommodating space 24, and the casing 20 defines an imaginary axis L passing through the center of the through hole 25. In this embodiment, the top portion 21 of the housing 20 has a tapered connecting end portion 212 for electrically connecting a circuit board or a space converter (not shown); however, the housing The shape of the connecting end portion 212 of the 20 is not limited, and may be, for example, a hollow column shape (as shown in Fig. 10) or a solid column shape (as shown in Fig. 25).

The needle body 30 has a body portion 31 having a straight rod shape, a stopper portion 32 at one end of the body portion 31 and having a larger cross-sectional area than the body portion 31, and a distal end portion of the body portion 31 for use at the other end of the body portion 31. Touching the contact portion 33 of the object to be tested (not shown), the body portion 31 is slidably disposed along the imaginary axis L to the through hole 25 of the casing 20, and the stopper portion 32 is slid The contact portion 33 is located outside the housing 20 . The shape of the contact portion 33 is not limited to the taper provided in this embodiment, and does not necessarily have a tip end, and the contact portion 33 may also have a cylindrical shape (as shown in FIGS. 10 and 25). And the object to be tested can be touched at the end of the plane. The needle body 30 is displaceable relative to the housing 20 along the imaginary axis L, and the body portion 31 of the needle body 30 is slidably contacting the inner wall surface 252 of the through hole 25 of the housing 20; The needle body 30 is electrically connected to the housing 20, so that the object to be touched by the contact portion 33 and the circuit board or the space converter connected to the top portion 21 of the housing 20 can transmit signals to each other.

The polymeric elastomer 40 is disposed in the accommodating space 24, and may be in the shape of an ellipsoid as in the present embodiment, and may have other shapes such as a cylindrical shape, a spherical shape, a tubular shape, or the like. The polymeric elastomer 40 has a top side 42 and a bottom side 44 substantially opposite to each other. The top side 42 abuts against the top 21 of the housing 20, and the bottom side 44 abuts the needle body. 30 stop portion 32. Thereby, in a state where the needle body 30 is not in contact with the object to be tested, the stopper portion 32 is pressed against the bottom portion 22 of the casing 20 by the polymer elastic body 40, so that the longitudinal direction of the needle body 30 is The imaginary axis L; when the point contact portion 33 of the needle body 30 contacts the electrical contact of the object to be tested, the needle body 30 can The polymer elastic body 40 is elastically deformed by being displaced along the imaginary axis L with the height of the electrical contact while being pressed against the polymeric elastomer 40.

By the elastic force of the polymer elastic body 40, the longitudinal direction of the needle body 30 can be maintained not along the imaginary axis L without yaw, and the point contact portion 33 of the needle body 30 can be electrically connected with the object to be tested. The height of the point is adjusted and the appropriate contact force of the object to be tested is provided. Secondly, the elastic restoring force provided by the polymeric elastomer 40 can be controlled by the density and/or shape of the polymeric elastomer, so that the needle 30 can provide different needle pressures to the analyte. In addition, the contact force of the needle body 30 is provided by the polymer elastic body 40, but the signal is transmitted through the housing 20, that is, the contact force transmission path of the elastic probe 11 is separated from the signal transmission path. Moreover, the elastic probe 11 can be made shorter than the conventional elastic probe having the aforementioned elastic characteristics and efficacy, and thus is particularly suitable for high frequency testing. In general, the length of the conventional buckling probe and the spring probe (POGO pin) are about 6 mm and 2.5 mm, respectively, and the elastic probe 11 provided by the present invention can define a probe length D. _{1 is} the maximum distance between the top portion 21 of the housing 20 and the contact portion 33 of the needle body 30, and the probe length D ₁ may be 2 mm or even less than 2 mm, and thus is quite suitable for high frequency detection.

In addition, the elastic probe provided by the present invention can define an elastic body length D ₂ as the length when the polymeric elastic body 40 is not elastically deformed, that is, the top side 42 of the polymeric elastic body 40 when it is not elastically deformed. The maximum distance of the bottom side 44, and the length D ₂ of the elastomer is preferably greater than or equal to 0.3 mm and less than or equal to 1 mm.

Referring to FIG. 2, the elastic probe 12 provided by a second preferred embodiment of the present invention is different from the elastic probe 11 of the first preferred embodiment in that the housing 20 is in the elastic probe 12. The side wall 23 has a first step 232 having a lower surface 234 and a side surface 236. The needle body 30 has an extension 34 extending from the stop portion 32. The polymeric elastomer 40 is The hollow cylinder is disposed between the extending portion 34 and the side wall 23, and the top side 42 and the bottom side 44 thereof respectively abut against the lower surface 234 of the step portion 232 and the stopping portion 32 of the needle body 30. . Thereby, the polymeric elastomer 40 can also be elastically deformed by being pressed against the needle body 30 displaced along the imaginary axis L to achieve the same effect as the first preferred embodiment. In addition, the extension portion 34 of the needle body 30 can slidably contact the side surface 236 of the step portion 232 to electrically conduct each other, so that the electrical conduction relationship between the housing 20 and the needle body 30 can be more ensured.

Please refer to FIG. 3 for an elastic probe provided by a third preferred embodiment of the present invention. In the needle 13, the needle body 30 also has an extending portion 34 extending from the stopping portion 32. Although the extending portion 34 is not in contact with the housing 20, the polymeric elastic body 40 can be made by the elastic body 40. Abutting against the extending portion 34 during compression deformation, the lateral force of the needle body 30 perpendicular to the imaginary axis L is provided, so that the body portion 31 of the needle body 30 more reliably contacts the inner wall surface 252 of the through hole 25, and thus An electrical conduction relationship between the needle body 30 and the housing 20 is ensured. In addition, a side surface 322 of the stopping portion 32 of the needle body 30 can slidably contact the side wall 23 of the housing 20 so as to be electrically connected to each other, so that the housing 20 and the needle body 30 can be more ensured. Electrical conduction relationship. In the first and second preferred embodiments described above, the needle body 30 can also be designed such that the side of the stopper portion 32 can slidably contact the side wall 23.

Referring to FIG. 4, an elastic probe 14 according to a fourth preferred embodiment of the present invention is similar to the elastic probe 13 of the third preferred embodiment, except that the stop portion 32 and the extension of the needle 30 are extended. The portion 34 is formed with a receiving groove 35. The polymer elastic body 40 is disposed in the receiving groove 35, and the extending portion 34 is slidably contacting the side wall 23 of the housing 20, thereby electrically conducting each other. . Thereby, the polymer elastic body 40 provides a lateral force perpendicular to the imaginary axis L of the needle body 30 by abutting against the extending portion 34, and the lateral force can not only make the body portion 31 of the needle body 30 The inner wall surface 252 of the through hole 25 is more reliably contacted, and the extending portion 34 is pressed against the side wall 23, so that the electrical conduction relationship between the needle body 30 and the housing 20 is more sure. In the third preferred embodiment, the needle body 30 can also be designed such that the extension portion 34 can slidably contact the side wall 23, and the extension portion 34 is pressed against the elastic portion 40 by the polymer elastic body 40. Side wall 23.

Referring to FIG. 5 and FIG. 6 , the elastic probes 15 and 16 of the fifth and sixth preferred embodiments of the present invention are similar to the elastic probes 11 of the first and second preferred embodiments, respectively. 12, a side surface 322 of the stopper portion 32 of the needle body 30 is slidably contacted with the side wall 23 of the casing 20, thereby electrically conducting each other, and one of the stopper portions 32 abuts against the polymer The abutment surface 324 of the elastomer 40 is non-perpendicular and non-parallel to the imaginary axis L. Thereby, the elastic restoring force applied to the abutting surface 324 by the polymer elastic body 40 can decompose the component force toward the side wall 23, so that the body portion 31 and the side surface 322 of the stopping portion 32 are more reliably The inner wall surface 252 and the side wall 23 are contacted. In this way, although the needle body 30 is not provided with an extension portion for the polymer elastic body 40 to be pushed, the polymer elastic body 40 can still provide the lateral force of the needle body 30 perpendicular to the imaginary axis L ( That is, the aforementioned component force) to ensure an electrical conduction relationship between the housing 20 and the needle body 30.

In each of the foregoing embodiments, the housing 20 is directly abutted against the top side 42 of the polymeric elastomer 40 with the top portion 232 of the top portion 21 or the side wall 23, however, the housing 20 is The top side 42 of the polymeric elastomer 40 may also indirectly abut each other, such as those provided in the seventh and eighth preferred embodiments below.

Referring to FIG. 7, in the elastic probe 17 provided by the seventh preferred embodiment of the present invention, the needle body 30 has a body portion 31, the stopping portion 32 and the point contact portion 33, and has a An elastic portion 36 integrally extending from the stopper portion 32 and an abutting portion 37 integrally connected to the elastic portion 36, and the abutting portion 37 is electrically connected to the housing 20 In the top portion 21, the stopper portion 32 and the abutting portion 37 of the needle body 30 abut against the bottom side 44 and the top side 42 of the polymer elastic body 40, respectively. Thereby, the elastic portion 36 of the needle body 30 and the polymer elastic body 40 can be elastically deformed at the same time, so that the point contact portion 33 of the needle body 30 can be displaced with the height of the electrical contact of the object to be tested and provide appropriate The elastic force portion 36 and the elastic elastic body 40 are pressed against the abutting portion 37 to ensure an electrical conduction relationship between the needle body 30 and the casing 20 .

Referring to FIG. 8, the elastic probe 18 of the eighth preferred embodiment of the present invention is similar to the elastic probe 17 of the seventh preferred embodiment, except that the stop portion 32 of the needle 30 is elastic. The portion 36 and the abutting portion 37 are made of a flexible printed circuit board (FPCB), so that the same effects as those of the seventh preferred embodiment can be achieved.

Referring to FIG. 9 to FIG. 11 , an elastic probe 19 according to a ninth preferred embodiment of the present invention is similar to the elastic probe 11 of the first preferred embodiment, except for the shell of the elastic probe 19 . The body 20 is fixed by an upper casing member 26 and a lower cover 27, and the top portion 21, the side wall 23 and the accommodating space 24 of the casing 20 are located on the upper casing member 26, and the bottom portion 22 of the casing 20 and A perforation 25 is located in the lower cover 27. The manufacturing method of the elastic probe 19 includes the following steps:

As shown in FIG. 11, the upper casing member 26, the lower cover 27 and the needle body 30 are manufactured, and the polymeric elastomer 40 is placed in the accommodating space 24 of the upper casing member 26.

This step a can be achieved by the manner shown in FIGS. 12 to 14 . To simplify the drawing, the 12th to 14th drawings are not completely corresponding to the shapes and proportions shown in FIGS. 9 to 11 . Only the features of each component are roughly drawn for illustration.

Fig. 12 is a view showing the manufacturing process of the upper case member 26. First, as shown in Fig. 12A, a pair of upper case members 26 are formed on a substrate 51 (material may be 矽) by photolithography. The outer shape of the groove 52. Then, as shown in FIG. 12B, the substrate 51 is covered with a metal seed layer 53, and a photoresist 54 is formed on the seed layer 53 by a lithography process, and the photoresist 54 has a pair of should a through hole 55 of the groove 52, and then the through hole 55 The upper casing member 26 (the material may be nickel-cobalt alloy) is plated in the groove 52. Then, the polymer composite material is filled into the accommodating space 24 of the upper casing member 26 to form the polymer elastic body 40, as shown in FIG. 12C. At this time, the through hole 55 of the photoresist 54 can be utilized. A bonding layer 56 is deposited on the upper casing member 26 for subsequent bonding with the lower cover 27. Finally, the photoresist 54 is removed and a portion of the seed layer 53 is etched as shown in FIG. 12D.

Fig. 13 is a view showing the manufacturing process of the lower cover 27. First, as shown in Fig. 13A, a glass plate 61 is bonded to a substrate 62 (material may be 矽), and a lithography process is used on the glass plate 61. A through hole 63 is formed on the hole 63, and the through hole 63 has a large diameter section 632 and a small diameter section 634. Then, as shown in FIG. 13B, a metal seed layer 64 is covered on the glass plate 61 and the through hole 63, and a photoresist 65 is formed on the seed layer 64 by a lithography process, and the light is formed. The resistor 65 has a pair of through holes 66 which are to be perforated 63, and a metal layer 67 (the material may be nickel-cobalt alloy) is electroplated in the through holes 63 through the through holes 66. Finally, the photoresist 65 is removed as shown in Fig. 13C.

Fig. 14 is a view showing a process of simultaneously manufacturing four needle bodies 30. First, as shown in Fig. 14A, a first surface 711 of a first substrate 71 (material may be 矽) is formed by a lithography process having four The photoresist 72 of the via hole is further etched into the first substrate 71 by the photoresist 72, and the first substrate 71 and the photoresist 72 are bonded to a second substrate 73. A sub-layer 74 (material can be metal). Then, as shown in FIG. 14B, four recesses 714 respectively located at one ends of the through holes 712 are formed on the second surface 713 of the first substrate 71 by lithography and etching, and then the through holes 712 and the recesses are formed. A four-bar 75 (material may be nickel-cobalt alloy) is electroplated in the groove 714, and the rods 75 are ground to be flush with the second surface 713. Or, as shown in FIG. 14C, a photoresist 76 is formed on the second surface 713 of the first substrate 71 by using a lithography process, and the photoresist 76 has four through holes 762 respectively located at one ends of the through holes 712. Electroplating is performed in the through holes 712 and the through holes 762, so that the four rods 75 as described above can also be formed. Then, the structure shown in FIG. 14B or FIG. 14C is bonded to a layer of photoresist 78 on a third substrate 77, and the second substrate 73 and the seed layer 74 are removed by etching, such as the 14th. As shown in FIG. D, finally, each of the rods 75 is removed from the photoresist 78 as the needle body 30.

b. Referring to Figures 10 and 11, the needle 30 is passed through the perforation 25 of the lower cover 27.

c. Fixing the upper casing member 26 and the lower cover 27 to each other, thus completing the bomb Sex probe 19. Among them, the fixing method is not particularly limited, and may be achieved by bonding, sintering, adding a fixing sleeve or fixing a fixture.

The present invention further provides a method for manufacturing an elastic probe for manufacturing an elastic probe similar to that provided in the first preferred embodiment described above, and FIGS. 15 to 25 show simultaneous manufacturing using the manufacturing method. The process of extracting four elastic probes 80 includes the following steps:

a. The top 21 of the housing 20 is fabricated using a lithography process and electroplating. In detail, a sacrificial layer 82 is first plated on a substrate 81. As shown in FIG. 15, a photoresist 83 is formed on the sacrificial layer 82 by a lithography process, and the photoresist 83 has a cross-connection. The hole 832, as shown in Fig. 16, is plated in the through holes 832 to form the connecting end portion 212 of the casing 20. Then, the photoresist 83 is removed by dry etching, and the sacrificial layer 82 is increased by electroplating, and planarization is performed to make the sacrificial layer 82 flush with the connecting ends 212, as shown in FIG. And forming a photoresist 84 on the sacrificial layer 82 by using a lithography process, and the photoresist 84 has four via holes 842 respectively at one ends of the connection ends 212, and then plating in the via holes 842. A complete top 20 of the housing 20 is formed.

b. A first portion 23A of the side wall 23 integrally connected to the top portion 21 of the casing 20 is fabricated by a lithography process and electroplating, and the accommodating space 24 is formed. Before performing step b, the photoresist 84 is removed by dry etching, and the sacrificial layer 82 is raised by electroplating, and planarization is performed to make the sacrificial layer 82 flush with the top 21, as described in Figure 18 shows. Then, the step b is performed by forming a photoresist 85 on the sacrificial layer 82 by using a lithography process, and the photoresist 85 has four annular via holes 852, and then electroplating is formed in the via holes 852. The first portion 23A of the side wall 23 of the housing 20, at this time, the photoresist 85 can be divided into four inner portions 854 respectively located inside the first portions 23A, and a side portion 856 located outside the first portions 23A. A barrier layer (not shown) may be separately disposed on the inner portions 854. The barrier layers may also extend to cover the first portions 23A, and the outer portions 856 of the photoresist 85 may be removed by dry etching. The sacrificial layer 82 is further raised by electroplating, and planarization is performed to make the sacrificial layer 82 flush with the first portions 23A and remove the barrier layers, as shown in FIG. 19, and then dry etching is used. The inner portion 854 of the photoresist 85 is removed to form an accommodating space 24 on the inner side of the first portion 23A.

c. The polymeric elastomer 40 is placed in the accommodating space 24. As shown in FIG. 20, the accommodating space 24 can be filled with a polymer composite material to form the polymer elastic property. Body 40.

d. A second portion 23B of the side wall 23 integrally connected to the first portion 23A of the side wall 23 and a stopper portion 32 of the needle body 30 on the polymer elastic body 40 are produced by a lithography process and electroplating. As shown in Figure 21. In detail, a photoresist (not shown) is formed on the sacrificial layer 82 as shown in FIG. 20 by using a lithography process, and the second portion 23B of the sidewalls 23 is electroplated by the photoresist. And the stoppers 32 are removed by dry etching, and the sacrificial layer 82 is increased by electroplating, and the sacrificial layer 82 and the second portions 23B are blocked. Part 32 is flush.

e. A third portion 23C of the side wall 23 integrally connected to the second portion 23B of the side wall 23 and the needle body 30 integrally connected to the stopper portion 32 of the needle body 30 are manufactured by a lithography process and electroplating. A first section 31A of the body portion 31 is as shown in FIG. In detail, a photoresist (not shown) is formed on the sacrificial layer 82 as shown in FIG. 21 by using a lithography process, and the third portion 23C of the sidewalls 23 is electroplated by the photoresist. And the first segment 31A of the body portion 31 is removed by dry etching, and the sacrificial layer 82 is increased by electroplating, and the sacrificial layer 82 and the third portion are planarized. 23C and the first section 31A are flush.

f. manufacturing a bottom portion 22 of the housing 20 integrally connected to the third portion 23C of the side wall 23 by lithography and electroplating, and integrally connected to the first section 31A of the body portion 31 of the needle body 30 and located A second section 31B of the body portion 31 of the needle body 30 in the perforation of the bottom portion 22 of the housing 20 is as shown in FIG. In detail, a photoresist (not shown) is formed on the sacrificial layer 82 as shown in FIG. 22 by using a lithography process, and the bottom portion 22 and the body portions 31 are electroplated by the photoresist. The second segment 31B is removed by dry etching, and the sacrificial layer 82 is increased by electroplating, and the sacrificial layer 82 and the bottom portion 22 and the second segment 31B are planarized. Qi Ping.

g. A third section 31C of the body 31 of the needle body 30 integrally connected to the second section 31B of the body portion 31 of the needle body 30 and located outside the housing 20 by lithography and electroplating As shown in Figure 24. In detail, a photoresist (not shown) is formed on the sacrificial layer 82 as shown in FIG. 23 by using a lithography process, and the third portion of the body 31 is electroplated by the photoresist. 31C, the photoresist is removed by dry etching. Finally, as long as the sacrificial layer 82 is removed by etching, four elastic probes 80 can be completed, as shown in FIG. In this implementation In the example, the contact portion 33 of the needle body 30 is the end portion of the body portion 31 outside the housing 20, so that the step g also forms the point contact portion 33 of the needle body 30; or, After the step g, the dot contact portion 33 of the needle body 30 is fabricated by a lithography process and electroplating.

Finally, it is to be noted that the constituent elements disclosed in the foregoing embodiments are merely illustrative and are not intended to limit the scope of the present invention, and alternative or variations of other equivalent elements should also be the scope of the patent application of the present application. Covered.

11‧‧‧Elastic probe

20‧‧‧shell

21‧‧‧ top

212‧‧‧Connecting end

22‧‧‧ bottom

23‧‧‧ side wall

24‧‧‧ accommodating space

25‧‧‧Perforation

252‧‧‧ inner wall

30‧‧‧ needle

31‧‧‧ Body

32‧‧‧stops

33‧‧‧ Touching

40‧‧‧Polymer elastomer

42‧‧‧ top side

44‧‧‧ bottom side

L‧‧‧ imaginary axis

D ₁ ‧‧‧Probe length

D ₂ ‧‧‧elastomer length

Claims (17)

An elastic probe includes: a housing having a top portion, a bottom portion, a side wall between the top portion and the bottom portion, a through hole disposed at the bottom portion, and a receiving space communicating with the through hole. The housing can define an imaginary axis passing through the through hole; a needle body is movably disposed in the housing along the imaginary axis, and is electrically connected to the housing, and the needle body has a a body of the perforation, a stop portion at one end of the body and limited to the accommodating space, and a contact portion located at the other end of the body and outside the casing; and a polymeric elastomer The elastic probe can be elastically deformed to be disposed in the housing space of the housing; the elastic probe can define a probe length that is the maximum of the contact between the top of the housing and the needle body. Distance, and the length of the probe is less than or equal to 2 mm. The elastic probe according to claim 1, wherein the body of the needle body is slidably contacted with an inner wall surface of the perforation of the housing to electrically conduct each other. The elastic probe according to claim 1, wherein the polymeric elastomer has a top side and a bottom side substantially opposite to the opposite direction, and the stopper of the needle body abuts against the polymer elastic On the bottom side of the body, the casing abuts against the top side of the polymeric elastomer. The elastic probe of claim 3, wherein the top of the housing abuts against a top side of the polymeric elastomer. The elastic probe of claim 3, wherein the side wall of the housing has a first step having a lower surface and a side surface; the needle The body further has an extending portion extending from the stopping portion, the extending portion slidingly contacting the side surface of the step portion to electrically conduct each other; the polymer elastic system is disposed at the extension portion of the needle body Between the side wall of the casing, the lower surface of the step of the casing abuts against the top side of the polymeric elastomer. The elastic probe according to claim 1, wherein a side surface of the stopper portion of the needle body is slidably contacting the side wall of the housing to electrically conduct each other. The elastic probe according to claim 1, wherein the needle body further has an extending portion extending from the stopping portion, the polymeric elastic body abutting the extending portion and guiding the extending portion The side wall is pushed. The elastic probe of claim 1, wherein the needle body further has an extending portion extending from the stopping portion, the extending portion slidably contacting the side wall of the housing, thereby mutually Electrically conductive. The elastic probe of claim 8, wherein the polymeric elastomer abuts the extension and presses the extension against the sidewall. The elastic probe of the seventh or eighth aspect of the invention, wherein the blocking portion and the extending portion of the needle body form a receiving groove, and the polymer elastic system is disposed in the receiving groove. The elastic probe according to claim 1, wherein the stopper portion of the needle body has an abutting surface abutting the polymer elastic body, and the abutting surface is non-perpendicular and non-parallel to the Imaginary axis. The elastic probe of claim 1, wherein the needle body further has an elastic portion extending from the stopping portion, and is coupled to the elastic portion and electrically conductively abuts the shell Abutment at the top of the body; the polymer bomb The sexual body has a top side and a bottom side substantially opposite to the opposite direction, and the stopper portion and the abutting portion of the needle body abut against the bottom side and the top side of the polymer elastic body, respectively. The elastic probe according to claim 12, wherein the stopper, the elastic portion and the abutting portion of the needle body are made of a flexible circuit board. The elastic probe of claim 1, wherein the casing is fixed by an upper casing member and a lower cover, and the top, the side wall and the accommodating space of the casing are located on the upper casing member. The bottom of the housing and the perforation are located in the lower cover. The elastic probe according to claim 1, wherein the length of the elastic body is a length when the polymeric elastomer is not elastically deformed, and the length of the elastic body is greater than or equal to 0.3 mm and less than or equal to 1 Millimeter. A method for manufacturing an elastic probe according to claim 14, comprising the steps of: a. manufacturing the upper shell member, the lower lid and the needle body, and setting the polymer elastomer thereon a housing space of the case member; b. passing the needle body through the through hole of the lower cover; and c. fixing the upper case member and the lower cover member to each other. A method for manufacturing an elastic probe according to claim 1, comprising the steps of: a. manufacturing the top of the casing by using a lithography process and electroplating; b. manufacturing by using a lithography process and electroplating a first portion of the side wall of the housing is integrally connected to the first portion of the side wall, and the accommodating space is formed; c. the polymeric elastic body is disposed in the accommodating space; d. using a lithography process and electroplating to produce a second portion of the sidewall integrally connected to the first portion of the sidewall, and a stop portion of the needle on the polymeric elastomer; e. using a lithography process And electroplating a third portion of the side wall integrally connected to the second portion of the side wall, and a first portion of the body of the needle body integrally connected with the stop portion of the needle body; The lithography process and electroplating produce a bottom portion of the housing integrally coupled to the third portion of the sidewall, and the needle integrally coupled to the first section of the body of the needle body and located within the perforation at the bottom of the housing a second section of the body portion; and g. utilizing a lithography process and electroplating to produce a body of the body of the needle that is integrally connected to the second section of the body of the needle and located outside the housing The third section.