TWI461283B - Vacuum imprinting apparatus, vacuum press-bonding apparatus, and manufacturing method for laminated optical device - Google Patents

Description

Vacuum imprinting device, vacuum pressing device and method for manufacturing layered optical element

The present invention relates to a method for producing a layered optical element and an imprint apparatus and a press-fit apparatus therefor, and more particularly to a method for manufacturing a layered optical element using a vacuum process, a vacuum imprint apparatus therefor, and a vacuum press apparatus.

The conventional layered optical element is formed by forming a plurality of optical layers on a substrate, and the multilayer optical layer is sequentially formed by curing with an optical glue, wherein the optical layer can be printed with a template as needed. In a conventional process, the layered optical element is formed separately in the air by an application process such as coating, rolling, and curing. In the rolling process, the manual or the protective film needs to be aligned with the optical adhesive layer, and then rolled by the rolling wheel, which is easy to cause insufficient bonding precision, and the bonding and rolling are easy to introduce bubbles. Rolling pressure is not easy to control the press-fitting gap, and it is easy to change the thickness of the optical adhesive layer when the machine needs to be transferred before curing. In addition, in the process of forming a optical layer by using a rolling process using a template, the template needs to be manually demolded after the optical adhesive layer is cured, but the process is easy to produce due to large uncertainties in the manual demolding operation. The problem of instability.

In view of the problems in the prior art, one of the objects of the present invention is to provide a vacuum imprinting apparatus which utilizes the characteristics of a vacuum environment and precise positioning of a machine to effectively control the thickness dimension of the optical layer and suppress bubbles generated between the optical layers after curing. phenomenon.

The vacuum imprinting apparatus of the present invention comprises a vacuum chamber, a downloading station, an loading station and a curing device. The downloading station is disposed in the vacuum chamber for carrying a substrate on which an optical adhesive layer is disposed. The loading station is disposed in the vacuum chamber relative to the downloading station for carrying a template, and the loading table can be moved toward the downloading station to imprint a pattern on the optical adhesive layer. The curing device is configured to cure the embossed optical adhesive layer to form an optical layer on the substrate. Thereby, the vacuum imprinting apparatus utilizes a vacuum to suppress the possibility of introducing a void when the template is imprinted with the optical adhesive layer, and can smoothly and accurately control the loading table to be pressed down, so that the cured optical layer has a uniform thickness and no bubble.

Another object of the present invention is to provide a vacuum pressing device which also utilizes the characteristics of a vacuum environment and precise positioning of a machine to effectively control the thickness dimension of the optical layer and suppress the phenomenon of bubbles generated between the optical layer and the protective film after curing.

The vacuum pressing device of the present invention comprises a vacuum chamber, a downloading station, an loading station and a curing device. The downloading station is disposed in the vacuum chamber for carrying a substrate, and a first optical layer is formed thereon, and an optical adhesive layer is disposed on the first optical layer. The loading platform is disposed in the vacuum chamber relative to the downloading station for carrying a protective film, and the loading table can be moved toward the downloading station to lay the protective film on the optical adhesive layer. The curing device is configured to cure the optical adhesive layer to form a second optical layer on the first optical layer. Thereby, the vacuum pressing device also utilizes vacuum to suppress the possibility of introducing a gap when the protective film is laid on the optical adhesive layer, and can smoothly and accurately control the pressing of the loading table, so that the second after curing The optical layer is uniform in thickness and free of air bubbles.

Still another object of the present invention is to provide a manufacturing method using the vacuum imprinting apparatus and the vacuum lamination apparatus of the present invention to manufacture a layered optical component, so that the manufacturing method also utilizes the vacuum environment and the precise positioning characteristics of the machine to effectively The thickness dimension of each of the optical layers of the layered optical element is controlled and the phenomenon of bubbles generated in the layered structure of the layered optical element after curing is suppressed.

The manufacturing method of the present invention utilizes the vacuum imprinting apparatus and the vacuum laminating apparatus of the present invention to manufacture a layered optical component, the vacuum imprinting apparatus comprising a first vacuum chamber, a first downloading station, a first loading station, and a first curing device, the vacuum pressing device comprises a second vacuum chamber, a second downloading station, a second loading station and a second curing device, wherein the first downloading station and the first loading station are disposed on the vacuuming device In the first vacuum chamber, the second downloading station and the second loading station are disposed in the second vacuum chamber; for further description, please refer to the foregoing description, and no further details are provided. The manufacturing method includes: preparing a substrate, placing on the first downloading station; coating a first optical adhesive layer on the substrate; preparing a template, fixing on the first loading stage; and pumping the first vacuum chamber Vacuuming; moving the first loading stage toward the first downloading station to imprint a pattern on the first optical adhesive layer; curing the embossed first optical adhesive layer by the first curing device to form a first optical layer is disposed on the substrate; the substrate and the first optical layer are taken out; the substrate and the first optical layer are placed on the second downloading stage; and a second optical adhesive is coated on the first optical layer Forming a protective film fixed on the second loading stage; evacuating the second vacuum chamber; moving the first loading stage toward the second downloading station to planarize the protective film to the second optical And the second optical layer is cured by the second curing device to form a second optical layer on the first optical layer to form the layered optical element. Thereby, the substrate, the first optical layer, the second optical layer and the protective film of the layered optical element can be accurately positioned, and the thickness of the first optical layer and the second optical layer can be precisely controlled The first optical layer, the second optical layer, and the protective film may also be in close contact with each other.

Briefly, the present invention forms an optical adhesive layer in a vacuum environment to effectively suppress the bubble phenomenon generated in the layered structure formed by the optical layer after curing, and employs an implement to improve process precision and eliminate manual operation instability. Therefore, the present invention can effectively solve the problems of the prior art.

The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

Please refer to FIG. 1 and FIG. 2, FIG. 1 is a schematic view of a vacuum imprint apparatus 1 according to a preferred embodiment of the present invention, and FIG. 2 is a view showing the vacuum imprint apparatus 1 of FIG. 1 in another state. schematic diagram. The vacuum imprint apparatus 1 includes a vacuum chamber 12, a download station 14, an loading station 16, and a curing device 18. The vacuum chamber 12 is mainly composed of a bottom plate 122 and a cover 124. The cover 124 can be separated from the bottom plate 122 for the object to be placed. When the bottom plate 122 and the cover 124 are closed, as shown in FIG. 2, The evacuation operation can be performed on the vacuum chamber 12, wherein the air extraction device is a conventional technique, which is not illustrated and illustrated in the drawings. The downloading stage 14 is disposed in the vacuum chamber 12 and on the bottom plate 122 for carrying a substrate 42 on which an optical adhesive layer 44 is disposed. The loading table 16 is disposed in the vacuum chamber 12 with respect to the downloading station 14 for carrying a template 20, and the loading table 16 can be moved toward the downloading station 14 to imprint a template 20 on the optical adhesive layer 44. The curing device 18 is used to cure the embossed optical adhesive layer 44 to form an optical layer on the substrate 42.

Further, the vacuum imprint apparatus 1 includes a plurality of L-shaped clamping members 22 disposed on the loading table 16 to form a chute 222. The template 20 can be slid into the chute 222 and clamped by the clamping member 22. In practice, the template 20 can be a nickel plate, and the vacuum imprinting device 1 can further include a plurality of magnets 24 movably disposed in the loading table 16 for adsorbing the template 20 on the loading table 16; Thus, when the magnet 24 moves toward the download stage 14, the magnet 24 can magnetically clamp the template 20 onto the loading table 16, and when the magnet 24 moves away from the download stage 14, the magnetic attraction to the template 20 can be released to move the template 20. Remove from the uploading station 16. It should be noted that the foregoing L-shaped clamping member 22 and the magnet 24 may be used alternatively, and the present invention is not limited to the simultaneous use.

The vacuum imprint apparatus 1 includes three servo shafts 26 (please refer to FIG. 3 at the same time, only two of the servo shafts 26 are shown in FIGS. 1 and 2), and are connected to the loading table 16 through the cover 124. The servo shafts 26 can each be independently controlled to drive the loading station 16 to move relative to the download station 14. The three servo shafts 26 control the flatness between the loading stage 16 and the download stage 14, that is, the flatness between the substrate 42 and the template 20, so that the thickness of the optical adhesive layer 44 is uniform. In the present embodiment, the vacuum imprint apparatus 1 includes three gap sensing devices 28 (please refer to FIG. 3 at the same time, and only two of the gap sensing devices 28 are shown in FIGS. 1 and 2). A corresponding servo axis 26 is provided at the download station 14 for controlling the movement of the uploading station 16. The gap sensing device 28 senses the distance between the loading platform 16 and the downloading station 14 to feedback the actuation of the servo shaft 26 to control the thickness of the optical adhesive layer 44. In the present embodiment, the gap sensing device 28 is directly disposed corresponding to the servo shaft 26 to directly control the actuation of the servo shaft 26, simplifying the control, but the invention is not limited thereto; and the present invention does not set a plurality of servos. The shaft 26 is limited to drive the movement of the loading table 16.

In addition, the position of the servo shaft 26 relative to the loading table 16 is based on the principle of effective control movement of the loading table 16 and the average support, for example, the relative positions of the loading table 16, the servo shaft 26 and the gap sensing device 28 of FIG. In the schematic view, the outline position of the loading table 16 is indicated by a rectangular frame, the large circle indicates the position of the servo shaft 26, the small circle indicates the gap sensing device 28, and the cross mark indicates the position of the center of gravity 162 of the loading table 16. The line connecting the position of the servo shaft 26 to the center of gravity 162 forms three substantially equal angles 262, and the distance from the position of the servo shaft 26 to the center of gravity 162 is also small. The gap sensing device 28 is then placed close to the corresponding servo axis 26 to simplify the feedback control complexity. However, the present invention is not limited to the foregoing arrangement.

Please return to Figure 1 and Figure 2. In the present embodiment, the optical adhesive layer 44 is a UV adhesive. Therefore, the curing device 18 includes an ultraviolet light 182 for irradiating ultraviolet light on the optical adhesive layer 44 to form the optical layer. Moreover, in the present embodiment, the downloading station 14 is transparent, and the ultraviolet lamp 182 is disposed under the downloading stage 14 to directly and uniformly irradiate ultraviolet light on the optical adhesive layer 44. However, the present invention is not limited thereto. In practice, different curing devices can be used to match the different optical adhesive layer characteristics to achieve curing of the optical adhesive layer.

In the present embodiment, the vacuum imprint apparatus 1 includes two ejector pins 30 disposed through the loading table 16 for bending the template 20 when the optical layer is demolded. The thimble 30 can be driven by a pneumatic cylinder. The position of the ejector pin 30 relative to the template 20 can be referred to in FIG. 4, wherein the outline position of the template 20 is indicated by a rectangle, and the four dotted squares indicate the position of the clamping member 22, a small circle. The position of the ejector pin 30 is shown, which is located substantially in the middle of the gripping member 22. When the optical layer (ie, the first optical layer 45 in the following) is demolded, the loading table 16 is moved upward, and the ejector pin 30 is protruded relative to the loading table 16 to bend the template 20, as shown in FIG. Demolding the optical layer.

Please return to Figure 1 and Figure 2. In the present embodiment, the vacuum imprinting apparatus 1 includes an air blowing device 32 disposed beside the downloading station 14 for blowing the optical layer toward the template 20 by the nozzle 322 when the optical layer is demolded. The air blowing device 32 can be disposed outside the cover 124 to facilitate the setting of the air blowing device 32; however, the invention is not limited thereto. It is to be noted that in the first and second figures, only the nozzle 322 and part of the pipeline of the air blowing device 32 are shown to simplify the drawing, and the construction (including the air source) is a conventional technique, and will not be further described. In addition, in the embodiment, the optical layer is released from the template 20 and is assisted by the ejector pin 30 and the air blowing device 32, as shown in FIG. 5; however, the invention is not limited thereto.

Please refer to FIG. 6 and FIG. 7 , FIG. 6 is a schematic view of a vacuum pressing device 5 according to another preferred embodiment of the present invention, and FIG. 7 is a view showing the vacuum pressing device 5 in FIG. 6 in another state. Schematic diagram. The vacuum press device 5 includes a vacuum chamber 52, a download station 54, an loading station 56, and a curing device 58. The vacuum chamber 52 is mainly composed of a bottom plate 522 and a cover 524. The cover 524 can be separated from the bottom plate 522 for the object to be placed. When the bottom plate 522 and the cover 524 are closed, as shown in FIG. The vacuum chamber 52 can be subjected to a vacuuming operation, wherein the air suction device is a conventional technique, which is not illustrated and illustrated in the drawings. The downloading stage 54 is disposed in the vacuum chamber 12 and on the bottom plate 522 for carrying the substrate 42. The first optical layer 45 is formed on the first optical layer 45. The optical layer 46 is disposed on the first optical layer 45. The loading table 56 is disposed in the vacuum chamber 52 with respect to the downloading station 54 for carrying a protective film 60. The loading table 56 can be moved toward the downloading table 54 to lay the protective film 60 on the optical adhesive layer 46. The curing device 58 is used to cure the optical adhesive layer 46 to form a second optical layer on the first optical layer 45. It should be noted that the substrate 42 and the first optical layer 45 formed thereon may be formed by the vacuum imprint apparatus 1 or may be taken from other semi-finished optical component processes.

Further, the vacuum bonding apparatus 5 includes two magnets 62 and two fixing plates 64. The magnets 62 are disposed in the loading table 56. The fixing plates 64 are attached to the loading table 56 corresponding to the magnets 62 for fixing the protective film 60. In the present embodiment, the protective film 60 is a PET film, but the invention is not limited thereto, and other flexible films may be used; the fixing plate 64 may be an iron piece or other magnetic sheet. In addition, in the present embodiment, the loading table 56 includes a plurality of vent holes 562 for evacuating the vent holes 562 to vacuum-adsorb the protective film 60 on the loading table 56, so that the protective film 60 can be more easily placed on the uploading surface. The table 56 is vented to vent the vent 562 to separate the protective film 60 from the loading table 56, so that the protective film 60 is easily detached from the loading table 56.

In the present embodiment, the vacuum pressing device 5 includes a jig 66 for assisting the protective film 60 to be attached to the loading table 56. Please refer to FIG. 8 , which is a schematic diagram of the jig 66 . The jig 66 includes a bracket 662, two fixing portions 664, and at least one vacuum chuck 666 disposed on each of the fixing portions 664. In use, the fixing plate 64 is placed next to the vacuum chuck 666, and the protective film 60 is placed flat on the fixing plate 64 and the vacuum suction cup 666 and sucked by the vacuum suction cup 666. The jig 66 is inserted into the vacuum chamber 52, and the protective film 60 is brought into flat contact with the loading table 56. The magnet 62 is the adsorption fixing plate 64, and the vacuum suction cup 666 is released from the vacuum, that is, the protective film 60 is attached to the loading table 56. Operation; at this time, the fixture 66 can be removed from the vacuum chamber 52.

Please return to Figures 6 and 7. The vacuum press unit 5 includes three servo shafts 68 that are coupled to the loading table 56 through a cover 524 that can be independently controlled to drive the loading table 56 to move relative to the download station 54. In the present embodiment, the vacuum pressing device 5 includes a three-gap sensing device 70, and the corresponding servo shaft 68 is disposed on the downloading station 54 for controlling the movement of the loading table 56. For other descriptions of the servo shaft 68 and the gap sensing device 70, other descriptions of the servo shaft 26 and the gap sensing device 28 may be directly referred to, and details are not described herein.

In the present embodiment, the optical adhesive layer 46 is a UV adhesive, so the curing device 58 includes an ultraviolet light 582 for irradiating ultraviolet light on the optical adhesive layer 46 to cure to form the second optical layer. Moreover, in the present embodiment, the loading table 56 is transparent, and the ultraviolet lamp 582 is disposed above the loading table 56 to uniformly irradiate the ultraviolet light on the optical adhesive layer 46. However, the present invention is not limited thereto. The above-mentioned curing device 18 is also applicable here, and will not be further described.

In this embodiment, the downloading station further includes a heating device 72, such as a heating rod, for heating the optical adhesive layer 46, which increases the fluidity of the optical adhesive layer 46, and facilitates the protective film 60 to be laid on the optical adhesive layer 46. . It is to be noted that when the protective film 60 has an alignment structure on the surface thereof, when the protective film 60 is pressed onto the optical adhesive layer 46 on the loading table 56, the alignment structure can also be imprinted on the optical adhesive layer 46. .

Please refer to FIG. 9, which is a flow chart of a method of fabricating a layered optical element in accordance with a preferred embodiment of the present invention. The manufacturing method utilizes a vacuum imprinting apparatus 1 and a vacuum lamination apparatus 5 to manufacture a layered optical element 4 (refer to FIG. 10), wherein the vacuum imprint apparatus 1 and the vacuum lamination apparatus 5 have been described above, and are not described again. . The manufacturing method first prepares a substrate 42 and places it on the downloading stage 14 of the vacuum imprinting apparatus 1, as shown in step S100. The manufacturing method includes coating an optical adhesive layer 44 on the substrate 42 as shown in step S102. In practice, the optical adhesive layer 44 may be first applied to the substrate 42 and then the substrate 42 together with the optical adhesive layer 44. And placed on the download station 14. This manufacturing method also prepares the template 20, which is fixed to the loading table 16 of the vacuum imprint apparatus 1, as shown in step S104. The steps S100 to S104 are not limited to the order shown in FIG. 9; after the foregoing steps are completed, the state of the vacuum imprint apparatus 1 can be referred to FIG.

The manufacturing method then closes the cover 124 of the vacuum imprint apparatus 1 to the bottom plate 122 to evacuate the vacuum chamber 12 of the vacuum imprint apparatus 1, as shown in step S106; and the loading stage 16 of the vacuum imprint apparatus 1 is oriented. The download stage 14 is moved to cause the template 20 to imprint a pattern on the optical adhesive layer 44 as shown in step S108. This pattern is used to form surface geometries on the optical adhesive layer 44, such as serrated, tapered, wavy, etc., to achieve the desired optical effect. After completing the foregoing steps, the state of the vacuum imprint apparatus 1 can be referred to Fig. 2. The manufacturing method then cures the embossed optical adhesive layer 44 using the curing device 18 of the vacuum imprinting apparatus 1 to form a first optical layer 45, as shown in step S110. In practice, before the step S110 is performed, the vacuum chamber 12 can be vacuumed first, and the downloading station 14 sucks the substrate 42 by vacuum adsorption, which can prevent the first optical layer 45 from introducing excessive residual stress and can be maintained. The relative position of the first optical layer 45 to the substrate 42. After the curing is completed, the cover 124 is raised to facilitate the removal of the substrate 42 and the first optical layer 45 formed thereon, as shown in step S112.

Further, step S104 may include sliding the template 20 into the chute 222 formed by the clamping member 22 for the purpose of being fixed to the loading table 16. Further, since the vacuum imprint apparatus 1 is designed to have a magnetic attraction effect, the step S104 may include moving the magnet 24 toward the download stage 14 to adsorb the template 20 to the loading stage 16 by the magnet 24. For other descriptions of the clamping member 22 and the magnet 24, please refer to the foregoing and will not be described again.

Further, the vacuum imprint apparatus 1 is designed with an independently controllable servo shaft 26 to drive the movement of the loading stage 16, so step S108 may include independently controlling the servo shaft 26 to drive the loading stage 16 to move toward the download stage 14. Moreover, the vacuum imprint apparatus 1 is provided with the gap sensing device 28, so step S108 can independently control the servo shaft 26 to drive the loading stage 16 to move toward the download stage 14 to contact the template 20 with the optical adhesive layer 44, and according to the gap. The feedback signal of the sensing device 28 controls the stop position of the moving loading table 16 to cause the template 20 to imprint the pattern on the optical adhesive layer 44 and to precisely control the thickness of the optical adhesive layer 44. For other descriptions of the servo shaft 26 and the gap sensing device 28, please refer to the foregoing and will not be described again.

In addition, in the embodiment, the curing device 18 includes the ultraviolet lamp 182, so the step S110 may be to vacuum the vacuum chamber 12, and the ultraviolet light 182 disposed under the downloading station 14 is irradiated to the loading table 16 with ultraviolet light. The embossed optical adhesive layer 44 is cured to form the embossed optical adhesive layer 44 to form the first optical layer 45. For other descriptions of the curing device 18, please refer to the foregoing and will not be described again.

In step S112, before the substrate 42 is taken out from the vacuum chamber 12, the first optical layer 45 needs to be demolded from the template 20, and the vacuum imprinting device 1 is designed with a ejector pin 30 and an air blowing device 32 to assist in demoulding, so the steps are performed. S112 includes moving the loading table 16 away from the downloading table 14 while the ejector pin 30 protrudes from the loading table 16 to bend the template 20, and simultaneously blows the air with the first optical layer 45 toward the template 20 by using the air blowing device 32. See Figure 5. For other descriptions of the thimble 30 and the air blowing device 32, please refer to the foregoing and will not be described again.

Next, this manufacturing method will perform another optical layer forming process on the substrate 42 by the vacuum bonding apparatus 5, and will be described below. The manufacturing method then places the substrate 42 and the first optical layer 45 formed thereon on the downloading station 54 of the vacuum pressing device 5, as shown in step S114. The manufacturing method includes coating an optical adhesive layer 46 on the first optical layer 45, as shown in step S116; wherein, in practice, the optical adhesive layer 46 may be first applied to the first optical layer 45, and then The substrate 42 of the first optical layer 45 is placed on the download stage 54 together with the optical adhesive layer 46. This manufacturing method also prepares the protective film 60 and is fixed to the loading table 56 of the vacuum pressing device 5 as shown in step S118. The steps S114 to S118 are not limited to the sequence shown in FIG. 9; after the foregoing steps are completed, the state of the vacuum pressing device 5 can be referred to FIG.

The manufacturing method then closes the cover 524 of the vacuum pressing device 5 to the bottom plate 522 to evacuate the vacuum chamber 52 of the vacuum pressing device 5, as shown in step S120; and the loading table 56 of the vacuum pressing device 5 is oriented. The download stage 54 is moved to cause the protective film 60 to be laid on the optical adhesive layer 46 as shown in step S122. After the completion of the foregoing steps, the state of the vacuum press device 5 can be referred to Fig. 7. The manufacturing method then cures the flattened optical adhesive layer 46 by the curing device 58 of the vacuum pressing device 5 to form a second optical layer 47, thereby forming the layered optical element 4, as by step S124. In practice, before the step S124 is performed, the vacuum chamber 52 can be vacuumed first, and the downloading station 54 sucks the substrate 42 by vacuum adsorption, which can prevent the second optical layer 47 from introducing excessive residual stress and can be maintained. The relative position of the second optical layer 47 to the substrate 42. After the curing is completed, the cover 524 is raised to facilitate the removal of the substrate 42 and the first optical layer 45 and the second optical layer 47 formed thereon, as shown in FIG.

Further, step S118 may include adsorbing the corresponding magnet 62 on the loading table 56 by the fixing plate 64 to fix the protective film 60 on the loading table 56. When the protective film 60 is fixed to the loading table 56 by using the jig 66, the step S118 may be such that the fixing plate 64 is disposed beside the vacuum suction cup 666, the protective film 60 is laid on the jig 66, and the protective film is adsorbed by the vacuum suction cup 666. 60, the jig 66 is inserted into the vacuum chamber 52, the protective film 60 is attached to the loading table 56, and the fixing plate 64 is attracted to the loading table 56 by the magnet 62 to fix the protective film 60, and the vacuum suction cup 666 is released. The vacuum, as well as the removal of the jig 66. In order to make the protective film 60 more flatly attached to the loading table 56, step S118 may include evacuating the vent 562 to vacuum-adsorb the protective film 60 on the loading table 56. For other descriptions of the jig 66 and the vent 562, please refer to the foregoing and will not be described again.

As with the vacuum imprinting apparatus 1, the vacuum lamination apparatus 5 is also designed with independently controllable servo shafts 68, so step S116 can include independently controlling the servo shaft 68 to drive the loading stage 56 to move toward the downloading stage 54. Similarly, the vacuum pressing device 5 is provided with the gap sensing device 70. Therefore, the step S116 can independently control the servo shaft 68 to drive the loading table 56 to move toward the downloading table 54 to contact the protective film 60 on the optical adhesive layer 46. And according to the feedback signal of the gap sensing device 70, the stopping position of the moving loading table 56 is controlled, so that the protective film 60 is pressed against the optical adhesive layer 46 and the thickness of the optical adhesive layer 46 can be precisely controlled. For other descriptions of the servo shaft 68 and the gap sensing device 70, please refer to the foregoing and will not be described again.

In addition, in the embodiment, the curing device 58 includes the ultraviolet lamp 582. Therefore, the step S124 may be to vacuum the vacuum chamber 52, and the ultraviolet light 582 disposed above the loading table 56 is irradiated with ultraviolet light toward the downloading station 54. The optical adhesive layer 46 is such that the optical adhesive layer 46 is cured to form the second optical layer 47. For other descriptions of the curing device 58, please refer to the foregoing and will not be described again.

In addition, in the present embodiment, the downloading station 56 is provided with the heating device 72. Therefore, the step S116 may include heating the optical adhesive layer 46 by using the heating device 72, which may increase the fluidity of the optical adhesive layer 46, and facilitate the tiling of the protective film 60. On the optical adhesive layer 46. For other descriptions of the heating device 72, please refer to the foregoing and will not be described again. Moreover, when the protective film 60 has an alignment structure on the surface thereof, the step S116 may include imprinting the alignment structure on the optical adhesive layer 46 with the protective film 60. For other explanations of the alignment structure, please refer to the foregoing and will not repeat them.

In addition, it is to be noted that, in practice, the vacuum imprint apparatus of the present invention is not limited to the vacuum imprint apparatus 1 described above, and in particular, the demolding mechanism of the top plate 30 for bending the template 20 is utilized. Referring to Figures 1 and 11, Figure 11 is a schematic view of a vacuum imprinting apparatus 3 in accordance with another embodiment of the present invention. In the present embodiment, the vacuum imprint apparatus 3 is different from the vacuum imprint apparatus 1 of FIG. 1 in that the template 21 used in the vacuum imprint apparatus 3 does not need to use the holding member 22 and the magnet 24, but is changed to two. The folding mechanism 23 and the plurality of fixing members 19 are provided on the loading table 17 of the vacuum imprint apparatus 3. In the vacuum imprinting apparatus 3, the loading table 17 includes a projection 172, and the template 21 is disposed on the projection 172. The folding mechanism 23 is disposed on the loading table 17, and the folding mechanism 23 includes an interlocking rod 232 and an actuating lever. 232 is connected to one of the holding members 234, and the holding member 234 is disposed beside the protruding base 172 so as to be able to hook the opposite sides of the template 21. In practice, the actuating lever 232 is driven by the pneumatic cylinder so that the retaining member 234 can move relative to the loading table 17, but the invention is not limited thereto.

In addition, the fixing member 19 is fixed to the loading table 17, and the template 21 has a plurality of fixing holes 212 corresponding to the plurality of fixing members 19, and the template 21 is disposed on the uploading by the plurality of fixing members 19 through the plurality of fixing holes 212. On the 17th. In this embodiment, the mounting surface of the fixing hole 212 is larger than the bearing surface of the corresponding fixing member 19 passing through the fixing hole 212, and the fixing member 19, for example, a screw, is locked to the loading table 17, and the fixing hole 212 includes a channel portion 2122 and The channel portion 2122 communicates with one of the latching portions 2124, the schematic view of which is shown in FIG. 12; the screw head of the fixing member 19 passes through the channel portion 2122, and then the channel portion 2122 is clamped so that the template 21 can be fixed to the boss 172. . In principle, the holding member 234 can effectively set the template 21 on the protruding base 172. Therefore, the fixing member 19 and the fixing hole 212 are omitted from the setting; however, the setting of the fixing member 19 and the fixing hole 212 still contributes to the template. 21 positioning. Further, in practice, the projections 172 are provided on the main body of the loading table 17, and are not limited to the one-piece forming structure shown in the loading table 17 in Fig. 11.

Please refer to FIG. 5 and FIG. 13 , and FIG. 13 is a schematic view showing the demolding of the vacuum imprint apparatus 3 of FIG. 11 . The vacuum imprinting device 3 is substantially the same as the demolding mechanism of the vacuum imprinting device 1 in FIG. 5, and the main difference is that when the loading table 17 moves away from the downloading table 14, the vacuum imprinting device 1 is mainly driven and held by the actuating lever 232. The piece 234 moves away from the download stage 14 relative to the loading table 17 to bend the template 21. In this embodiment, the fixing member 19 does not completely fix the two sides of the template 21, so that the template 21 as a whole can be bent, which helps the template 21 to be separated from the first optical layer 45, especially the edge of the first optical layer 45. The portion is separated from the template 21; wherein the fixing hole 212 and the fixing member 19 are not completely in close contact with each other, so that when the template 21 is bent, the template 21 can be slid relative to the fixing member 19 by the fixing hole 212 to prevent the template 21 from being excessively bent. limits. In addition, in principle, the holding member 234 can bend the template 21, but in practice, the vacuum imprinting device 3 can also assist in using the thimble 30 to strengthen the bending degree of the template 21, and also contribute to the template 21 and the first optical layer 45. Separation. For other descriptions of the various components of the vacuum imprinting apparatus 3, please refer to the foregoing and will not be described again.

In addition, in the present embodiment, the projections 172 respectively form a lead angle 1722 on the two edges of the two flap mechanism 23, so that the template 21 can be closely attached to the guide angle 1722 when bent, so as to avoid the excessively sharp edge scratching the template 21 Moreover, the curved cross-sectional profile of the template 21 can be made smoother; however, the invention is not limited thereto. In addition, when the template 21 is bent using the ejector pin 30, after the template 21 is completely bent, the template 21 is actually separated from the protrusion 172, which can make the template 21 more curved and contribute to the first optics. Layer 45 is separated from template 21. In addition, in the embodiment, the loading table 17 has an accommodating space for the folding mechanism 23 to move therein. Therefore, if the template 21 has no structural interference when bending, for example, the template 21 is bent into the accommodating space. The structure of 172 can also be omitted. Moreover, the actual curved profile of the template 21 may be due to the relative position of the related components (eg, the folding mechanism 23, the fixing member 19, the boss 172, etc.), the structural size, and even the material properties of the template 21, as shown in FIG. The present invention may be practiced based on the spirit of the present invention, and will not be described again.

In summary, the present invention establishes a vacuum manufacturing environment to utilize the vacuum property to suppress the bubble phenomenon of the optical layer formed by the optical adhesive layer after curing, and uses the operation of the implement to improve the process precision and eliminate the instability of manual operation. Sex to effectively solve the problems of prior art.

The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

1, 3. . . Vacuum stamping device

4. . . Layered optical component

5. . . Vacuum press device

12, 52. . . Vacuum chamber

14, 54. . . Download station

16, 17, 56. . . Upload station

18, 58. . . Curing device

19. . . Fastener

20, 21. . . template

twenty two. . . Clamping piece

twenty three. . . Folding mechanism

twenty four. . . magnet

26, 68. . . Servo axis

28, 70. . . Gap sensing device

30. . . thimble

32. . . Blowing device

42. . . Substrate

44, 46. . . Optical adhesive layer

45. . . First optical layer

47. . . Second optical layer

60. . . Protective film

62. . . magnet

64. . . Fixed plate

66. . . Fixture

72. . . heating equipment

122, 522. . . Bottom plate

124, 524. . . Cover

162. . . Center of gravity

182, 582. . . Ultraviolet light

172. . . Burst

212. . . Fixed hole

222. . . Chute

262. . . Angle

232. . . Actuating lever

234. . . Holder

322. . . nozzle

562. . . Vent

662. . . support

664. . . Fixed part

666. . . Vacuum chuck

1722. . . Leading angle

2122. . . Channel department

2124. . . Holder

S100~S124. . . Implementation steps

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a vacuum imprint apparatus in accordance with a preferred embodiment of the present invention.

Fig. 2 is a view showing the vacuum imprint apparatus of Fig. 1 in another state.

Fig. 3 is a schematic view showing the relative arrangement positions of the loading table, the servo shaft, and the gap sensing device.

Figure 4 is a schematic view showing the relative positions of the thimble, the stencil and the holding member.

Figure 5 is a schematic illustration of the release of the optical layer from the template.

Figure 6 is a schematic illustration of a vacuum compression apparatus in accordance with another preferred embodiment of the present invention.

Fig. 7 is a view showing the vacuum pressing device in Fig. 6 in another state.

Figure 8 is a schematic diagram of the fixture.

Figure 9 is a flow chart showing a method of fabricating a layered optical element in accordance with a preferred embodiment of the present invention.

Figure 10 is a schematic illustration of a layered optical component.

Figure 11 is a schematic view of a vacuum imprint apparatus according to another embodiment of the present invention.

Fig. 12 is a view showing the fixing hole of the template of the vacuum imprinting apparatus of Fig. 11.

Figure 13 is a schematic view showing the demolding of the vacuum imprinting apparatus of Figure 11.

1. . . Vacuum stamping device

12. . . Vacuum chamber

14. . . Download station

16. . . Upload station

18. . . Curing device

20. . . template

twenty two. . . Clamping piece

twenty four. . . magnet

26. . . Servo axis

28. . . Gap sensing device

30. . . thimble

32. . . Blowing device

42. . . Substrate

44. . . Optical adhesive layer

122. . . Bottom plate

124. . . Cover

182. . . Ultraviolet light

222. . . Chute

322. . . nozzle

Claims (42)

A vacuum imprinting apparatus comprising: a vacuum chamber; a downloading station disposed in the vacuum chamber for carrying a substrate, wherein an optical adhesive layer is disposed thereon; and an loading station disposed in the vacuum chamber relative to the downloading station For carrying a template, the loading table can be moved toward the downloading station to imprint a pattern on the optical adhesive layer; a curing device for curing the embossed optical adhesive layer to form an optical layer On the substrate; and a thimble disposed through the loading table for bending the template. The vacuum imprinting apparatus of claim 1, further comprising a plurality of L-shaped clamping members disposed on the loading table to form a sliding slot for clamping the template. The vacuum imprinting apparatus of claim 1, further comprising a magnet movably disposed in the loading stage for adsorbing the template on the loading stage. The vacuum imprinting apparatus of claim 1, further comprising a three servo shaft connected to the loading station for driving the loading station to move relative to the downloading station. The vacuum imprinting apparatus of claim 4 further includes a three-gap sensing device, and the three servo axes are disposed on the downloading station for controlling the movement of the loading platform. The vacuum imprinting apparatus of claim 1, wherein the curing apparatus comprises an ultraviolet lamp for irradiating ultraviolet light to the optical adhesive layer to cure to form the optical layer. The vacuum imprinting apparatus of claim 6, wherein the downloading station is transparent, and the ultraviolet light is disposed below the downloading station. The vacuum imprinting apparatus of claim 1, further comprising a two-folding plate mechanism disposed on the loading platform and capable of hooking opposite sides of the template, wherein the folding plate mechanism is away from the downloading table relative to the loading platform The two-fold plate mechanism bends the template as it moves. The vacuum imprinting apparatus of claim 8, further comprising a plurality of fixing members fixed to the loading table, wherein the template has a plurality of fixing holes corresponding to the plurality of fixing members, wherein the template is provided by the plurality of fixing members And passing through the plurality of fixing holes to be disposed on the loading platform, the mounting surface of the fixing hole is larger than the bearing surface of the corresponding fixing member passing through the fixing hole portion. The vacuum imprinting apparatus of claim 8, wherein the loading platform comprises a projection, the template is disposed on the projection, and the two folding mechanism is oppositely disposed on opposite sides of the projection. The vacuum imprinting apparatus according to claim 10, wherein the projections respectively form a lead angle on the two edges of the two-folding mechanism, and the template abuts the guide angle when being bent. The vacuum imprinting apparatus of claim 1, further comprising an air blowing device disposed adjacent to the downloading station for blowing air to the optical layer toward the template. A vacuum pressing device comprising: a vacuum chamber; a downloading station disposed in the vacuum chamber for carrying a substrate, wherein a first optical layer is formed thereon, and an optical adhesive layer is disposed on the first optical layer; The loading station is disposed in the vacuum chamber relative to the downloading station for carrying a protective film, and the loading table can be moved toward the downloading station to lay the protective film on the optical adhesive layer; a curing device is used for The optical adhesive layer is cured to form a second optical layer on the first optical layer; and three servo axes are coupled to the loading stage for driving the loading stage to move relative to the downloading stage. The vacuum pressing device according to claim 13, further comprising a second magnet and two fixing plates, wherein the magnet is disposed in the loading platform, and the fixing plate is opposite to the loading platform for fixing the protective film. The vacuum pressing device of claim 14, further comprising a jig comprising a vacuum chuck for adsorbing the protective film by the vacuum chuck and extending into the vacuum chamber to fix the protective film On the uploading platform. The vacuum compression device of claim 14, wherein the loading station comprises a plurality of vent holes for evacuating the venting port to vacuum-adsorb the protective film on the loading table, and for ventilating the venting hole The protective film was separated from the loading stage. The vacuum pressing device according to claim 13, further comprising a three-gap sensing device, wherein the three servo axes are disposed on the downloading station for controlling the movement of the loading platform. The vacuum compression device of claim 13, wherein the curing device comprises an ultraviolet lamp for irradiating ultraviolet light to the optical adhesive layer to cure to form the second optical layer. The vacuum compression device of claim 18, wherein the loading station is transparent, and the ultraviolet lamp is disposed above the loading table. The vacuum compression device of claim 13, wherein the downloading station further comprises a heating device for heating the optical adhesive layer. The vacuum compression device of claim 13, wherein the protective film has an alignment structure for embossing the alignment structure on the optical adhesive layer. A manufacturing method for manufacturing a layered optical component by using a vacuum imprinting apparatus and a vacuum pressing apparatus, the vacuum imprinting apparatus comprising a first vacuum chamber, a first downloading station, a first loading station, and a first a curing device, the vacuum pressing device comprising a second vacuum chamber, a second downloading station, a second loading station and a second curing device, The first downloading station and the first loading station are disposed in the first vacuum chamber, and the second downloading station and the second loading station are disposed in the second vacuum chamber. The manufacturing method comprises the following steps: (a) preparing a substrate Placed on the first downloading station; (b) coating a first optical adhesive layer on the substrate; (c) preparing a template, fixed on the first loading stage; (d) the first vacuum chamber Vacuuming; (e) moving the first loading station toward the first downloading station to imprint a pattern on the first optical adhesive layer; (f) curing the imprinted using the first curing device a first optical adhesive layer to form a first optical layer on the substrate; (g) removing the substrate and the first optical layer; (h) placing the substrate and the first optical layer on the second downloading stage; (i) coating a second optical adhesive layer on the first optical layer; (j) preparing a protective film fixed on the second loading stage; (k) vacuuming the second vacuum chamber; (l) Moving the first loading station toward the second downloading station to lay the protective film on the second optical adhesive layer; and (m) using the second curing device The second optical adhesive layer to form a second optical layer on the first optical layer, thereby forming the layered optical element. The manufacturing method of claim 22, wherein the vacuum imprinting device further comprises a plurality of L-shaped clamping members disposed on the first downloading station to form a chute, step (c) It also includes the following steps: Slide the template into the chute. The manufacturing method of claim 22, wherein the vacuum imprinting apparatus comprises a magnet movably disposed in the first loading stage, and the step (c) is performed by moving the magnet toward the first downloading station. And adsorbing the template to the first loading stage by the magnet. The manufacturing method of claim 22, wherein the vacuum imprinting apparatus comprises three servo axes connected to the first loading stage, and the step (e) further comprises the steps of independently controlling the three servo axes to drive the first The uploading station moves toward the first download station. The manufacturing method of claim 25, wherein the vacuum imprinting device further comprises a three-gap sensing device, wherein the three servo axes are disposed on the first downloading station, and the step (e) is performed by the following steps: independently controlling the three a servo shaft for driving the first loading stage to move toward the first downloading station to contact the template with the first optical adhesive layer; and controlling the first loading stage of the moving according to the feedback signal of the three-gap sensing device a stop position to cause the template to imprint the pattern on the first optical adhesive layer. The manufacturing method of claim 22, wherein the first curing device comprises an ultraviolet lamp, and the step (f) is carried out by the following steps: Breaking the vacuum of the first vacuum chamber; and irradiating ultraviolet light to the embossed first optical adhesive layer with the ultraviolet light to cure the embossed first optical adhesive layer to form the first optical layer. The manufacturing method of claim 27, wherein the first download station is transparent, the ultraviolet light is disposed under the first download station, and in step (f), the ultraviolet light is from the first download station. The ultraviolet light is irradiated toward the first loading stage. The manufacturing method of claim 22, wherein the vacuum imprinting apparatus further comprises a thimble disposed through the first loading stage, and the step (g) further comprises the step of: moving the first loading station away from the first downloading station Moving while the ejector is protruded from the first loading station to bend the template. The manufacturing method of claim 22, wherein the vacuum imprinting apparatus further comprises a blowing device disposed beside the first downloading station, and the step (g) further comprises the step of: moving the first loading station away from the first A download station moves while simultaneously blowing the first optical layer toward the template by the air blowing device. The manufacturing method of claim 22, wherein the vacuum imprinting device further comprises a two-folding mechanism disposed on the first loading platform and capable of holding opposite sides of the template, and the step (g) further comprises the following steps: The two flap mechanism is moved away from the first download station relative to the first uploading table to bend the template. The manufacturing method according to claim 31, wherein the vacuum imprinting apparatus further comprises a plurality of fixing members having a plurality of fixing holes corresponding to the plurality of fixing members, and the step (c) is carried out by the following steps: The fixing member passes through the plurality of fixing holes and is fixed to the first loading table to set the template on the first loading table, wherein the loading surface of the fixing hole is larger than the corresponding fixing member passes through the fixing hole portion surface. The manufacturing method of claim 31, wherein the first loading stage comprises a protruding platform, and the two folding plate mechanism is oppositely disposed on two sides of the protruding platform, and the protruding platform corresponds to two edges of the two folding plate mechanism respectively Forming a lead angle, in the step (c), the template is disposed on the protrusion, and in the step (g), the template is in close contact with the lead angle when being bent. The manufacturing method of claim 22, wherein the vacuum pressing device further comprises two magnets and two fixing plates, the magnet is disposed in the second loading table, and the step (j) is performed by the following steps: A corresponding magnet is adsorbed on the second loading stage to fix the protective film on the second loading stage. The manufacturing method of claim 22, wherein the vacuum pressing device further comprises a jig, the jig comprising two vacuum chucks, the vacuum pressing device further comprising two magnets and two fixing plates, wherein the magnet is disposed on the In the second loading station, the step (j) is carried out by the following steps: the two fixing plates are arranged beside the two vacuum suction cups; Laying the protective film on the jig; adsorbing the protective film by using the vacuum chuck; extending the jig into the second vacuum chamber; attaching the protective film to the second loading table, and The fixing plate is adsorbed on the second loading stage by the magnet; releasing the vacuum chuck; and removing the jig. The manufacturing method according to claim 35, wherein the second loading stage comprises a plurality of vent holes, and the step (j) further comprises the steps of: pumping the vent holes to vacuum-adsorb the protective film on the second loading stage. . The manufacturing method of claim 22, wherein the vacuum pressing device comprises three servo axes connected to the second loading stage, and the step (1) further comprises the steps of: independently controlling the three servo axes to drive the second The uploading station moves toward the second download station. The manufacturing method of claim 37, wherein the vacuum pressing device further comprises a three-gap sensing device, wherein the three servo axes are disposed on the second downloading station, and the step (1) is performed by the following steps: independently controlling the three a servo shaft for driving the second loading stage to move toward the second downloading station to contact the protective film on the second optical adhesive layer; and controlling the movement according to the feedback signal of the three-gap sensing device Second uploading station The stop position is such that the protective film is pressed against the second optical adhesive layer. The manufacturing method of claim 22, wherein the second curing device comprises an ultraviolet lamp, and the step (m) is performed by: vacuuming the second vacuum chamber; and irradiating the ultraviolet light with the ultraviolet lamp The second optical adhesive layer is configured to cure the second optical adhesive layer to form the second optical layer. The manufacturing method of claim 39, wherein the second uploading station is transparent, the ultraviolet light is disposed above the second loading stage, and in the step (m), the ultraviolet light is from above the second loading stage The ultraviolet light is illuminated toward the second download station. The manufacturing method of claim 22, wherein the second downloading station further comprises a heating device, and the step (1) further comprises the step of: utilizing the heating device to heat the second optical adhesive layer. The manufacturing method according to claim 22, wherein the protective film has an alignment structure, and the step (1) further comprises the step of: imprinting the alignment structure on the second optical adhesive layer with the protective film.