TW442370B - Diamond wire saw cutting machine - Google Patents

Diamond wire saw cutting machine Download PDF

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Publication number
TW442370B
TW442370B TW89108218A TW89108218A TW442370B TW 442370 B TW442370 B TW 442370B TW 89108218 A TW89108218 A TW 89108218A TW 89108218 A TW89108218 A TW 89108218A TW 442370 B TW442370 B TW 442370B
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Taiwan
Prior art keywords
diamond wire
cutting
wire saw
guide wheel
diamond
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TW89108218A
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Chinese (zh)
Inventor
Jung-Tang Huang
Yi-Sheng Cheng
Sheng-Hsiung Shih
Tsing-Tshih Tsung
Ho Chang
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Chien Hui Chuan
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Priority to TW89108218A priority Critical patent/TW442370B/en
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Publication of TW442370B publication Critical patent/TW442370B/en

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

This invention is to develop machine tool utilizing a diamond wire saw to cut a non-conductive material. The cutting method is similar to that of the EDM, and can be used to cut the hard and brittle materials, such as ceramics, composite materials, silicon and so on, which can not be machined to the required shape by conventional machining method. This machine tool is a machine utilizing a controller mainly the personal computer to proceed numerical control. The machine uses a diamond wire saw moving in Z-axis or a certain direction to achieve the cutting function. Instead of conventional threading and reeling, winding type of the diamond wire saw is used for easy assembling and disassembling. When used for cutting a specified shape, the shape can be defined numerically, and the X- and Y-axis displacement of the workpiece is controlled by numerical control, so as to control the cutting accuracy within the required range. This cutting machine comprises a guiding wheel set installed before and after the workpiece, which rotates along the extension direction of the diamond wire saw by means of the rotating disk and the rotating beam to give the supporting reaction force no matter what the cutting angle is. Besides, a tension control mechanism is provided under the passive roller to maintain a constant tension. High resolution analysis of optical video camera is also used to measure the degree of wire bending, so as to obtain the cutting force and the reaction force of the workpiece by cuculation, and then the rotational speed of the motor is adjusted to change the wire pulling speed of the diamond wire saw and the workpiece feeding speed, so as to achieve the object of cutting accurately.

Description

442370 五、發明說明(1) 之μ i::ί:種利用鑽石線鋸切削無法用傳統方法加工 料、陶、,此工具機可切割高硬度、易脆…等性質 夕晶圓…等,以彌補-般傳統加工方式 4 η #且2解決新興材料加工切割的各種問題。 需加工晶棒,切割成晶圓,當晶圓的 尺寸愈大時,如十二,吨 es a y _ 才’十/、吋…荨,其晶棒的切割問 題’是很難以現今的加工技術如鑽石 另外如一些新興 ^ ^ ^,, M ^ /p ^ _陶是材枓的加工,也面臨問題:因陶 !材枓具有很多種特性和用《,如耐熱、耐蝕、高硬度、 尚強,、良熱傳導體與電絕緣性與其、 磁…等性質,可作為感測、控制…等特殊功能的 '電;元 陶咨^ 電陶堯材料’醫學陶竟材料 荨。因為陶瓷材科可用於一般材料( 到的用途,但其脆性較古,n “綱#)無法違 無法以-般的傳統加ί;二口 =:,..等特性’使其 屯都非赍的古而ΐ 零件之加工品質及精度要 求都非吊的间,而以傳統之加工方法甚難 傳統之加工方法切削超精度之零件,纟成本力 要:r須透過不同之切削手段才ί應付。 、級的零#,我們選擇了鑽石線鑛 田刀。丨刀八,主要疋將鑽石顆粒透過各種 硬焊方式附著在鋼琴線上。使鑽二黏,電鍍,或 陡並且比鑽石刀具在切削性能上更具優勢。此外更可解442370 V. Description of the invention (1) μ i :: ί: A diamond wire saw can not be used to process materials, ceramics, etc. This machine can cut wafers with high hardness, brittleness, etc ... To make up for the traditional processing methods 4 η # and 2 to solve the various problems of emerging materials processing and cutting. Need to process the ingot and cut it into wafers. When the size of the wafer is larger, such as twelve, tons es ay _ only 'ten / inch ... net, the problem of ingot cutting' is difficult to use today's processing technology Such as diamonds and other emerging ^ ^ ^ ,, M ^ / p ^ _ Tao is a material processing, but also faces problems: because of ceramics! Material has a variety of characteristics and uses, such as heat resistance, corrosion resistance, high hardness, fashion Strong, good thermal conductivity and electrical insulation and its magnetic properties can be used as' electricity 'for special functions such as sensing, control, etc. Yuan Taoshen ^ Electric Tao Yao Materials' medical ceramics materials. Because the ceramic material branch can be used for general materials (to the purpose, but its brittleness is relatively old, n "gang #) can not go against the traditional tradition-Erkou =:, ... The ancient quality of the parts is not the same as the processing quality and accuracy of the parts, and it is difficult to cut the ultra-precision parts with the traditional processing methods. The cost is as follows: r requires different cutting methods. To cope with. 的 零零 #, we chose the diamond wire ore field knife. 丨 Knife Eight, mainly to attach diamond particles to the piano wire through various brazing methods. Make the diamond sticky, electroplated, or steeper than the diamond knife. Better cutting performance. In addition, it is more solvable

442370 五、發明說明(2) 決高脆性材料的晶體結構在遇摩擦執 溫度升高影響材料的特性,因此所;:=鑽: 二:ΐ切割t在f Γ會有鑛齒狀,或表面 &傷專清形發生。此外在切割易脆晶體時,可避 具的劇烈振動,使工件破裂成碎片,因鑽石線鑛 的換性,當它接觸工件時會抑制振動,比傳統刀具如圓ς 磨料=適,於切割易脆材料。再者續石線鑛與工件“ 面積甚小,在切削時不斷有新的鑽石顆粒與工件接觸,】 此在切割任何材料時,所產生之摩擦熱比傳統刀具要少, 而且切割之後表面附著之鑽石顆粒之磨損裎度很小。 在市面上甚少出現用鑽石線鋸來做切割的機器, US4〇16856專利,談及—種鑽石線鑛切割機’ 一者其公、/ 曰為1 977年4月,已失去專利有效期,二者是 由於其並非電腦控制,且是利用穿線方式而非繞線式,所 以2割速度及精度不佳,只能切割簡單之形狀,無法達到 精密加工之目的’在此專利中,其切削精度不高,僅達到 ± 25,4 Am。另外在美國u S 55644〇9號專利也利用合金線 來刀更碟片由於5玄專利是利用合金線及磨粒來切削,並 非使用鑽石線鑛’故與本專利發明的申請目的不同,為此 本發明特別針對上列的缺點加以改善’利用pc_BASED控 制’使得切削特殊材科的加工精度,能達到產業界的需 求。 ‘’示上所述本發明的目的之一是設計一繞線式機構’ 使鑽石線鋸安裝容易,節省安裝時間。442370 V. Description of the invention (2) The crystal structure of the highly brittle material will affect the characteristics of the material when the friction temperature rises; therefore, == drill: II: ΐ cutting t will have ore-like shape, or surface at f Γ & Trauma occurred. In addition, when cutting fragile crystals, the sharp vibration of the fixture can be avoided to break the workpiece into fragments. Due to the diamond thread's transmutation, it will suppress the vibration when it contacts the workpiece. It is more suitable for cutting than traditional cutting tools such as round abrasives. Brittle material. Furthermore, the area of the spar line and the workpiece "is very small, and new diamond particles are constantly in contact with the workpiece during cutting.] When cutting any material, the frictional heat generated is less than that of traditional tools, and the surface is adhered after cutting. The wear degree of diamond particles is very small. In the market, there are very few machines that use diamond wire saws for cutting. The patent of US4,016,856 talks about a kind of diamond wire mine cutting machine. In April 977, the patent validity period was lost. The two are not computer-controlled and use threading instead of winding. Therefore, the 2-cut speed and accuracy are poor, and only simple shapes can be cut, and precision processing cannot be achieved. Purpose 'In this patent, its cutting accuracy is not high, only reaching ± 25,4 Am. In addition, the US patent No. 55644〇9 also uses alloy wires to cut discs. Since the 5xuan patent uses alloy wires and Abrasive grains are used for cutting instead of using diamond wire ore. Therefore, it is different from the application purpose of this patent invention. For this reason, the present invention specifically improves the disadvantages listed above. 'Using pc_BASED control' makes the cutting of special materials Precision, to achieve the industry needs. '' Shown on the object of the present invention is to design a winding type mechanism 'so that the diamond wire saw easy to install, saving installation time.

/14237 0 五、發明說明(3) 本發明的目的之二是將鑽石線鋸設計成環狀式,可大量節 省製造成本。 本發明的目的之三是設計一張力調整機構,使機器在 切割時,可自行調節張力大小,以免鑽石線發生斷裂現 象。 本發明的目的之四是設計導向輪機構’用以支樓鑽石線 鋸,使得機器無論做哪一方向切割時,工件進給的推力方 命永遠和線鑛所施予的反力方向相反。 本發明的目的之五是設計一偏位感測器,可量測機器在切 割時,鑽石線的偏位量;當偏位過大時,可進行回授控制 與補正,達到精密加工的目的。 為使鈞局審查委員能更清楚本發明專利的功效,詳細 說明如下: 圖示 : 第 圖 鑽 石 線 鋸 切 割 機 之 立 式 機 構 第 攀 1 圖 鑽 石 線 鋸 與 導 向 輪 組 之 相 關 位 置 俯 視圖 第 —— 圖 四 導 輪 導 向 輪 組 之 側 視 圖 第 四 圖 四 導 輪 及 導 輪 導 向 輪 組 之 俯 視 圖 第 五 圖 光 學 攝 影 機 之 放 大 圖 ( 光 學 量 測 鏡 頭) 第 六 圖 鑽 石 線 鋸 受 力 圖 第 七 圖 鑽 石 線 鋸 變 形 量 分 析 圖 第 八 圖 鑽 石 線 鋸 切 割 機 之 臥 式 機 構 圖號: 1鑽石線鋸 2驅動滾輪/ 14237 0 V. Description of the invention (3) The second purpose of the present invention is to design the diamond wire saw into a ring type, which can save a lot of manufacturing costs. The third object of the present invention is to design a force adjustment mechanism so that when the machine cuts, the tension can be adjusted by itself to prevent the diamond thread from breaking. The fourth object of the present invention is to design a guide wheel mechanism for supporting a diamond wire saw, so that when the machine cuts in any direction, the thrust force of the workpiece feed is always opposite to the direction of the counterforce given by the wire mine. The fifth object of the present invention is to design an offset sensor, which can measure the offset of the diamond line when the machine is cutting; when the offset is too large, feedback control and correction can be performed to achieve the purpose of precision machining. In order to make the examiner of the Bureau more clear about the effectiveness of the patent of the present invention, the detailed description is as follows: Figure: The vertical mechanism of the diamond wire saw cutting machine (Figure 1) Figure 1 The top view of the relative position of the diamond wire saw and the guide wheel set— — Fig. 4 Side view of the guide wheel guide wheel set 4 Fig. 4 Top view of the guide wheel guide wheel set and guide wheel set 5 Fig. 5 Enlarged view of the optical camera (optical measuring lens) 6 Fig. 7 Force diagram of the diamond wire saw Figure Diamond wire saw deformation analysis chart Figure 8 Diamond wire saw cutting machine horizontal mechanism Drawing number: 1 diamond wire saw 2 drive roller

442370 、發明說明(4) 3 A被動滾輪 5 C被動滾輪 7負載線 9負載 1 1偏位(張力) 1 3光學攝影機 1 5上導向輪級 1 7夾具 1 9 A皮帶 2 1 CNC床台控制 2 3 β皮帶輪 2 5 X-Y NC 床台 2 7噴嘴 2 9光學鏡頭 3 1資料輪出線 3 3Β光學攝影機 3 5機體 3 7 Β導向輪 4 Β被動滾輪 6旋桿 8負載滾輪 ]_ 0工件 感測器1 2旋轉樑 1 4工作台 1 6下導向輪組 1 8驅動馬達 2 0 Α皮帶輪 器 22旋轉盤馬達 2 4旋轉盤 2 6影像擷取+ 2 8支架 3 0光源輪入α 3 2 Α光學攝影機 3 4PC 3 6 A導向輪 3 8B皮帶 為了達到4述加工精確之目的,如第一圖所示,先將 ί Z線鑛丨/衣繞過驅動滾輪2 ’再穿過A被動滾輪3、β被動 :4與C破動滾輪5,完成一個迴圈 '驅動滾輪2、與三個 、Ϊ 4二5都是裝置於機體3 5且呈似懸臂樑方式, 以此.先就垾接完成的鑽石線鋸環直接套上’不再採442370 、 Explanation of invention (4) 3 A passive roller 5 C passive roller 7 load line 9 load 1 1 offset (tension) 1 3 optical camera 1 5 upper guide wheel stage 1 7 clamp 1 9 A belt 2 1 CNC bed control 2 3 β pulley 2 5 XY NC bed 2 7 Nozzle 2 9 Optical lens 3 1 Data cable outlet 3 3B Optical camera 3 5 Body 3 7 Β Guide wheel 4 Β Passive roller 6 Rotary rod 8 Load roller] _ 0 Work feel Detector 1 2 rotating beam 1 4 table 1 6 lower guide wheel set 1 8 drive motor 2 0 Α belt pulley 22 rotating disk motor 2 4 rotating disk 2 6 image capture + 2 8 bracket 3 0 light source wheel into α 3 2 Α optical camera 3 4PC 3 6 A guide wheel 3 8B belt In order to achieve the purpose of precise processing as described in the first picture, as shown in the first picture, the Ø Z line ore / clothing around the drive roller 2 'before passing through the A passive roller 3, β passive: 4 and C break the roller 5 to complete a loop 'drive roller 2, and three, Ϊ 4 2 5 are installed in the body 3 5 and in a cantilever-like manner, so first. Put the completed diamond wire saw ring directly on the 'no more mining

五、發明說明(5) 用以往繞線、捲線的方式’因為鑽石線鋸]的製作不易, 價格較高,採繞線方式必得使用較長的鑽石線鋸段,故以 環狀方式直接套上能大大節省成本》c被動滾輪5係裝置在 旋桿6上’且由旋桿6拉出一條負載線7經過負載滾輪8,垂 吊一適當重量之配重負載Θ,使鑽石線鋸環在未切割工件 1 0之前’承受一定之張力;且在套上鑽石線鋸環時,被動 滾輪的旋轉微調能使鑽石線鋸環簡易地就套上,大量節,' 套裝鑽石線鋸環所需的時間。根據日本文獻資料所述7 ^ 粒加工學會誌 Vo 1· 43 No. 1 1999 JAN. 40-41 ),,、,紙 , ’ 从雷身+ 焊對接方式所製作的0 · 2刪直徑,並以琴鋼線為基材的 石線錯環約可承受2 kg大小的拉力,故配重負载g的 i鑽 可以此為依據。 、 、更董便 在固定鑽石線鋸1張力方面的設計,乃是利用 輪5所在的旋桿6上拉出一條負'載線7,經過負載 1動滾 一適當負载9,使鑽石線鋸1承受一定之張力,^/垂吊 割造成張力增加時,線的彎曲可使旋桿6作順時^仃切 擺,玎避免封閉接合的鑽石線鋸1承受拉力太大 向偏 焊接處產生斷裂’ $到張力自動調節功能, 而破壞 的切削時間和連續⑯ 切創更準確:持長久 」表面美觀。 U換鑽石線的,可依下列敘 切屑體積 k马之· (1)V. Description of the invention (5) The conventional winding and winding method 'because diamond wire saws' are not easy to make and the price is high. The winding method must use a longer diamond wire saw segment, so it is directly set in a ring manner. Can greatly save costs "c Passive roller 5 is installed on the rotating rod 6 'and a load line 7 is pulled out by the rotating rod 6 through the load roller 8 and a weighted load Θ of an appropriate weight is suspended to make the diamond wire saw ring Before the uncut workpiece 10, 'bear a certain tension; and when the diamond wire saw ring is put on, the rotating fine adjustment of the passive roller can easily put the diamond wire saw ring on a large number of knots,' Time required. According to the Japanese literature, 7 ^ Grain Processing Society Journal Vo 1 · 43 No. 1 1999 JAN. 40-41) ,,, paper, 'Delete the diameter of 0 · 2 produced by the lightning + welding butt joint method, and The stone wire staggered ring with Qin steel wire as the base material can withstand a pulling force of about 2 kg, so the i drill with a counterweight load g can be based on this. The design of fixing the tension of the diamond wire saw 1 is based on the use of a negative load line 7 on the rotating rod 6 where the wheel 5 is located, and a suitable load 9 is rolled through the load 1 to make the diamond wire saw 1Withstand a certain tension, ^ / When the tension increases due to hanging cutting, the bending of the wire can make the rotating rod 6 clockwise ^ 仃 cut and swing, 玎 avoid the diamond wire saw that is closed and joined. Breaking '$ to the automatic tension adjustment function, while the cutting time and continuous cutting damage are more accurate: long lasting' surface is beautiful. If you change the diamond line, you can use the following description. Chip volume k Ma Zhi (1)

V = KvMV = KvM

442 37 Ο 五、發明說明(6) 其中,Κ :切屑體積(CC ) Μ ·鑽石磨粒的重量(gram) 心:體積常數,與切割材料的性質與硬度有關 例如切割花崗岩可切割1 0 , 0 0 0 cc ;而切割較軟的大理 石則可切割1 0 0,0 0 0 CC的體積。 鑽石磨粒的重量可由下式得出: M = nDLpd ί 2 (2) 其中,Z):鑽石線直徑(cm ) i :鑽石線環的長度(cm ) 鑽石的密度(g /cm 3) J :鑽石磨粒的直徑(cm ),通常等於 切屑體積又可等於下式 V^AD (3) 式中,/為鑽石線切割過的工件面積。 根據公式(1 ) - ( 3 ),鑽石線單位長度與切割面積 的關係可表示成: A!L 二 Κ',πνάII ⑷ 由公式(4 )與鑽石線環的長度即可求出鑽石> 線鋸使442 37 〇 5. Description of the invention (6) Among them, K: chip volume (CC) M · diamond abrasive grain weight (gram) center: volume constant, related to the nature and hardness of the cutting material. For example, cutting granite can cut 1 0, 0 0 0 cc; while cutting softer marble can cut a volume of 1 0 0, 0 0 0 CC. The weight of diamond abrasive grains can be obtained from the following formula: M = nDLpd ί 2 (2) where Z): diamond wire diameter (cm) i: diamond wire loop length (cm) diamond density (g / cm 3) J : Diameter of diamond abrasive grains (cm), which is usually equal to the chip volume and can be equal to the following formula V ^ AD (3) where / is the area of the workpiece after diamond wire cutting. According to the formulas (1)-(3), the relationship between the unit length of the diamond wire and the cutting area can be expressed as: A! L two KK ', πνάII 钻石 From the formula (4) and the length of the diamond wire ring, a diamond can be obtained > Wire saw

第II頁 44237 Ο 五、發明說明(7) 用的壽命。 、 將鑽石線鋸偏位感測器11安裝於旋轉樑1 2上,因偏位 感剛器1 1是利用光學攝影機1 3所組成,以致於可得知鑽石 線錄1在切割時鑽石線鋸1的偏位量,進而控制鑽石線鋸1 達到一定的撐緊度。且把工件1〇置於工作台14上,介於上 導向輪組1 5和下導向輪組1 6之間,利用夾具1 7使工件1 〇固 疋於工作台14上。鑽石線鋸1固定在一定位置且能往單一 方向快速移動,利用驅動馬達18的旋轉帶動Α皮帶19轉動Β 皮帶輪20 ’再以之轉動驅動滾輪2,使鑽石線鋸1遵循著 固定的方向和路徑移動。再配合CNC床台控制器21的數值 控制,使得工件1 0能被切割和加工成複雜的形狀。 參考第一圖及第六圖,在鑽石線雜環的固定張力之 下,為了使鑽石線鋸1受到外力時,能產生最小之變形量 且能承受不同方向之外力,在工件之上下端個別安裝上導 向輪組1 5、下導向輪組1 6,使鑽石線鋸1之變形量減為最 小’藉由線的細小特性1使工件1 0切割精度更準確,且能 迫使鑽石線鋸1的變形量在遇到外力的情況下,仍能像一 條直線/樣。因切割工件1 0時,所承受之外力會因切割形 狀複雜,而有不同方向之反力產生’所以利用旋轉盤馬達 22轉動前端的B皮帶輪23,藉由B皮帶38的傳動來使旋轉盤 24轉動’旋轉盤24會帶著下方的旋轉樑12轉動,而上導向 輪組15與下導向輪組16又是裝設在旋轉樑12上,故配合各 種情況下鑽石線鋸1受到不同方向反力時,仍能保持直線 之狀態。再配合偏位感測器〗丨來判別鑽石線鑛1在切割中Page II 44237 〇 5. The life of the invention (7). The diamond wire saw offset sensor 11 is installed on the rotating beam 12 because the offset sensor 11 is composed of an optical camera 1 3, so that it can be known that the diamond wire record 1 is cutting the diamond wire The offset of the saw 1 further controls the diamond wire saw 1 to achieve a certain degree of support. And the workpiece 10 is placed on the worktable 14 between the upper guide wheel set 15 and the lower guide wheel set 16, and the work piece 10 is fixed on the worktable 14 by using the fixture 17. The diamond wire saw 1 is fixed in a certain position and can move rapidly in a single direction. The rotation of the drive motor 18 drives the A belt 19 to rotate the B pulley 20 ', and then drives the roller 2 to rotate the diamond wire saw 1 so that the diamond wire saw 1 follows the fixed direction and The path moves. Together with the numerical control of the CNC bed controller 21, the workpiece 10 can be cut and processed into complex shapes. Referring to the first and sixth figures, under the fixed tension of the diamond wire heterocyclic ring, in order to make the diamond wire saw 1 receive the smallest amount of deformation and can withstand external forces in different directions when it is subjected to external forces, the upper and lower ends of the workpiece are individually Install the upper guide wheel set 15 and the lower guide wheel set 16 to minimize the deformation of the diamond wire saw 1. With the fine characteristics of the wire 1, the workpiece 10 can be cut more accurately and the diamond wire saw 1 can be forced. In the case of external force, the amount of deformation can still look like a straight line. When cutting the workpiece 10, the external force received will be complicated due to the cutting shape, and the opposite force will be generated in different directions. Therefore, the front disk B pulley 23 is rotated by the rotary disk motor 22, and the rotary disk is driven by the transmission of the B belt 38. 24 turns' The rotating disk 24 will rotate with the rotating beam 12 below, and the upper guide wheel set 15 and the lower guide wheel set 16 are installed on the rotating beam 12, so the diamond wire saw 1 is subjected to different directions in various situations. In the reaction force, it can still maintain a straight state. Cooperate with the offset sensor again to determine whether the diamond ore 1 is cutting

第12頁 442370 五、發明說明(8) -------- 的偏移量之情況’並藉以調整驅動馬達1 8之轉速來改變鑽 石線鋸1之切割速度和調整X_Y 床台25之進給速度’可 使切割更精確,達到所要求之切割精度。此外,旋轉盤 ^紅轉樑12、上導向輪組15與下導向輪紐16之配合具有 繞鑽石線鋸1旋轉的用途,利用導輪的凹槽達到自我對準 中心的功能:避免鑽石線鑛丨偏移及扭轉。達 另外,導向輪組的設計也可設計成如第三圖所示,用 :個導輪,夾角90度且上下錯開的方式設置,ffl U)的 e又置在X各方向力時,支撐點間的間距會不斷地改變,但 仍以工件1 〇為中點;若設置如圖(b ),則支撐點間的間 距不變’但中點會不斷地變化;其俯視圖如第四圖(a ) 所示’鑽石線1被四個導輪限制在導輪中央處,不會因受 到其他方向切削力而發生嚴重的偏位,視實際情形,甚至 可將導輪數由四個減少成三個,夾角丨2〇度,如第四圖(b )所示;採用四導輪或三導輪的導向輪組,其最大優點是 不需有旋轉盤24與旋轉樑1 2的設計,因為導輪在任何時刻 都將鑽石線〗包在正中央’不用隨切割方向來改變導向輪 組的支撐位置。 參考第一圖及第二圖’在上導向輪組15與下導向輪組 1 6方面’為能有效地支撐並抵抗外力,故將之裝置在旋轉 樑1 2上’旋轉盤24係以鑽石線鋸1延伸方向為旋轉中心, 能隨工件所欲加工的形狀而旋轉帶動旋轉樑1 2 ,連帶使得 整個上導向輪組15與下導向輪組16能隨之改變支撐角度位 置’並做成上下錯開且互呈直角的設計,即每一導向輪組Page 12 442370 V. Description of the invention (8) -------- the situation of the offset 'and by adjusting the rotation speed of the drive motor 18 to change the cutting speed of the diamond wire saw 1 and adjust the X_Y bed 25 'Feed speed' can make cutting more accurate and achieve the required cutting accuracy. In addition, the combination of the rotating disk ^ red rotating beam 12, the upper guide wheel set 15 and the lower guide wheel button 16 has the purpose of rotating around the diamond wire saw 1. The groove of the guide wheel is used to achieve self-alignment: avoiding the diamond wire Mine shifts and twists. In addition, the design of the guide wheel set can also be designed as shown in the third figure, using: a guide wheel, an angle of 90 degrees and staggered up and down, ffl U) e is placed in the X direction of the force to support The distance between points will continue to change, but the workpiece will still be used as the midpoint; if it is set as shown in (b), the distance between the support points will not change, but the midpoint will continue to change; its top view is as shown in the fourth figure (A) The 'diamond line 1' is limited to the center of the guide wheel by four guide wheels, and will not be severely deflected due to cutting forces in other directions. Depending on the actual situation, the number of guide wheels can be reduced from four. Into three, with an angle of 20 degrees, as shown in the fourth figure (b); the use of a four-wheel or three-wheel guide wheel set, the biggest advantage is that there is no need to design the rotating disk 24 and rotating beam 12 Because the guide wheel encloses the diamond wire in the center at any time, there is no need to change the support position of the guide wheel set with the cutting direction. With reference to the first and second figures' in the upper guide wheel set 15 and the lower guide wheel set 16 ', in order to effectively support and resist external forces, it is mounted on the rotating beam 12' the rotating disk 24 is made of diamonds The extension direction of the wire saw 1 is the rotation center, which can rotate the rotating beam 12 according to the shape of the workpiece to be processed, and the entire upper guide wheel set 15 and the lower guide wheel set 16 can be changed to support the position of the supporting angle. Designs staggered up and down at right angles, that is, each guide wheel set

第13頁 Λ4237 Ο 五、發明說明(9) 都包含有Α導向輪36與Β導向輪37兩個輪子,故旋轉盤24只 要有約270度的旋轉角度範圍,便可涵蓋360度的工作範 園’不致會有在某些角度導向輪無法垂直支撐抵抗外力的 情形發生;也因此一原因’故工作台之架高採用單邊且在 内側的支架2 8來支撐’雖然此一結構在設計上會有力矩產 生,但因主要是從事精密加工,故加工物多屬較輕薄短小 的物件’只要支架2 8的剛性、強度與尺寸選擇適當,此一 問題不會造成太大困擾。 當鑽石線鋸1受到適當的反力,讓線鋸呈現直線的狀 態,可使切割更精碟。為使前述切割工件時,能夠有效地 控制精確度’且讓鑽石線鑛1在往單一方向移動時,能夠 控制在一定範圍之變形量,所以在上導向輪組1 5和工作台 1 4之間’加裝偏位感測器Π來得知線的偏移量之多寡,利 用電腦視覺原理如第五圖所示,為一個光學攝影機丨3,光 源接入口 3 0可連接光纖式鹵素燈源,以同軸落射的方式照 明,並由光學鏡頭2 9放大線鋸的線徑至8 0〜1 2 0倍,以增加 偏位判斷的解析度。再經由資料輸出線31將資料傳輸至影 像擷取卡26來進行讀取,並傳送到pc34處理,當鑽石線鑛 1之變形量太大時’表示切割時進給速率太快或拉線速度 太快’利用偏位感測器2的判別,轉成數位訊號,傳送到 PC34,PC34透過運動控制卡控制X轴位移、γ軸位移、旋轉 盤馬達角度及驅動馬達速度等,藉此可降低工件的進給速 率,達到所要求之精確度;此外,必要時可加裝噴嘴2 7, 以避免所切割出的切屑影響偏位感測器的檢測結果。Page 13 Λ4237 〇 5. Description of the invention (9) Both the A guide wheel 36 and the B guide wheel 37 are included. Therefore, as long as the rotary disk 24 has a rotation angle range of about 270 degrees, it can cover a 360-degree working range. "The garden will not cause the situation where the guide wheel cannot support the external force vertically at certain angles; for this reason, the height of the worktable is supported by a single-sided and inboard bracket 2 8", although this structure is being designed There will be moments generated, but because it is mainly engaged in precision processing, the processed objects are mostly light, thin and short. 'As long as the rigidity, strength and size of the bracket 28 are selected properly, this problem will not cause much trouble. When the diamond wire saw 1 receives an appropriate reaction force, the wire saw is in a straight state, which makes the cutting more precise. In order to effectively control the accuracy when cutting the workpiece, and to allow the diamond wire ore 1 to control a certain range of deformation when moving in a single direction, the upper guide wheel set 15 and the table 14 An offset sensor Π is installed between the windows to find out how much the line is offset. Using the principle of computer vision, as shown in the fifth figure, it is an optical camera. The light source access port 30 can be connected to a fiber-optic halogen lamp source. , The coaxial epi-illumination method is used, and the wire diameter of the wire saw is enlarged by 80 to 120 times by the optical lens 29 to increase the resolution of the offset judgment. Then the data is transmitted to the image capture card 26 for reading through the data output line 31 and sent to pc34 for processing. When the deformation of the diamond line mine 1 is too large, it means that the feed rate during cutting is too fast or the wire drawing speed Too fast 'uses the judgment of the offset sensor 2 and converts it into a digital signal and sends it to PC34. PC34 controls the X-axis displacement, γ-axis displacement, rotary disk motor angle, and drive motor speed through a motion control card, which can reduce The feed rate of the workpiece reaches the required accuracy; in addition, a nozzle 27 can be added if necessary to avoid the cutting chips from affecting the detection result of the offset sensor.

第U頁 Λ4237 Ο 五、發明說明(ίο) --- 利用CNC床台控制器21控制床台移動,在立式 中可使我們不僅能切割單一方向之工#,也能加工複雜之 立體形狀。利用C N C之數位控制能切割—些預定之形狀, 因形狀可數值化’故利用X、γ轴之移動與旋轉盤24的轉 動,即可有效加工成所需之形狀。進而配合上 '下導向輪 組1 5、1 6和偏位感測器1 1,可使鑽石線鋸i能承受各種方 向之負載和受力情況。為避免工件1〇切割完所產生的灰 影響光學攝影機13的結果,在同高且垂直處加裝一個喷嘴 27可解決灰塵堆積在光學攝影機丨3鏡頭上的問題。偏位感 測器的安裝與導向輪組一樣裝在旋轉樑丨2上,且夾在兩導 向輪組之間,如第七圖中A光學攝影機32和3光學攝影 的裝置。 參考第七圖’在鑽石線鑛1受力方面,鑽石線鋸張力 -定時,#即T2與T3的受力-定,當鑽石線鑛i受切 力,來自於Ft與Fn ’會影響θ2與θ3的值,而Ft^Fn^ 拉線速度及工件進給率Vn來決定,因此我們σPage U Λ4237 〇 V. Description of the Invention (-) --- Using the CNC bed controller 21 to control the bed movement, in the vertical position, we can not only cut the work in a single direction, but also process complex three-dimensional shapes. . Some predetermined shapes can be cut by using the digital control of C N C. Since the shapes can be quantified ', the required shapes can be efficiently processed by using the movement of the X and γ axes and the rotation of the rotary disk 24. Furthermore, in cooperation with the upper and lower guide wheel sets 15 and 16, and the offset sensor 11, the diamond wire saw i can withstand loads and forces in various directions. In order to prevent the dust generated by the workpiece 10 from being cut to affect the result of the optical camera 13, adding a nozzle 27 at the same height and vertical position can solve the problem of dust accumulation on the lens of the optical camera. The offset sensor is installed on the rotating beam 2 like the guide wheel set, and is sandwiched between the two guide wheel sets, as shown in the seventh figure of the optical camera A and optical camera 32 and 3 devices. Refer to the seventh picture 'In terms of the force of diamond wire mine 1, the tension and timing of the diamond wire saw ## The force of T2 and T3 is fixed. When the diamond wire mine i is subjected to the shear force, it comes from Ft and Fn', which will affect θ2. And θ3, and Ft ^ Fn ^ is determined by the line speed and workpiece feed rate Vn, so we σ

光影機Π ’在切割工件i。的兩邊各裝學關 係式如下所示: 于呢J T2 cos θ2 - 73 cos 〇ι - Ft r2sini?2+r3sin = FnThe light and shadow machine Π 'is cutting the workpiece i. The relationship between the two sides of each device is as follows: 于 呢 J T2 cos θ2-73 cos 〇ι-Ft r2sini? 2 + r3sin = Fn

Λ42 3 7 ΟΛ42 3 7 Ο

五、發明說明(π) Θ2與Θ3可由光學攝影機13取得鑽石線鋸ι影像偏位 的大小與影像長度,利用三角幾何計算得出β當θ 2與㊀3 超過設定值,亦即影響到精度要求時,即可降低工件進給 Vn,使Θ2與Θ3變小。實際使用時,為節省成本亦可僅^ 用一具光學攝影機13 ,只要量測θ2或θ3,加上校正 可做為精度回饋之用。 @声雖ί1制θ 2與㊀3的方法有改變拉線速度及工件進給 與:動滾L而言4拉5線:^以等速為主,以避免驅動滾輪2 制鑽石線鑛的;曲:/耗’僅調整工件進給速率’來控 有變換切叫方向1又。一般而言,在χ-y平面上,若沒 切割方向,則^仏則進給速率可使用較大值,若經常變換 方向,則X轉y之逮率要較低。例如,先切X方向,再切y 邊緣’而非I八之喜則,要將進給速率降低,才能切出垂直 τ ϋ遺緣。 參考第八圖,以上 方法亦可用热m 4 立式的鑽石線鋸工具的原理及設計 π於队式力口 T 士 _L- 立式工具機的不^。 方式,加工外形複雜的工件,補足V. Description of the invention (π) Θ2 and Θ3 can be obtained by the optical camera 13 for the size and image length of the diamond wire saw. The angle of the image is calculated using triangular geometry. When θ 2 and ㊀3 exceed the set value, it affects the accuracy requirements. At this time, the workpiece feed Vn can be reduced to make Θ2 and Θ3 smaller. In actual use, in order to save costs, only one optical camera 13 can be used, as long as θ2 or θ3 is measured, and correction can be used as precision feedback. @ 声 也 ί1 The method of making θ 2 and ㊀ 3 has to change the wire drawing speed and workpiece feed: for moving roller L, draw 4 wires: ^ It is mainly constant speed to avoid driving the roller 2 to make diamond wire ore; Qu: / Consumption 'Only adjust the workpiece feed rate' to control the change of cutting direction 1 and again. Generally speaking, in the χ-y plane, if there is no cutting direction, ^ 仏 can use a larger value for the feed rate. If the direction is often changed, the catch rate of X to y is lower. For example, first cut the X direction, and then cut the y edge 'instead of the I eight. You need to reduce the feed rate to cut out the vertical τ ϋ remnant. Referring to the eighth figure, the above method can also be used with the principle and design of the hot m 4 vertical diamond wire saw tool. Π is not the same as the vertical force machine. Method, machining complex shapes of workpieces

Claims (1)

442370 夂、申請專利範圍 1. ' 種 鑽 石 線鑛 切 割 機 之 發 制 器 來 進 行 數值 控 制 切 割 的 一 鑽 石 線 鋸 的型 式 不 再 採 用 更 容 易 裝 卸 的繞 線 方 式 作 成 — 在 被 動 滾 輪之 下 J 裝 有 張 定 9 當 用 來 切割 些 預 定 的 利 用 數 值 控 制來 控 制 X 件 的 的 精 度 控 制 在所 需 的 範 圍 内 — 此 切 割 機 包括 導 向 輪 組 5 著 以 鑽 石 線 鑛的 延 伸 方 向 為 樑 也 可 設 計成 由 四 導 輪 或 得 不 論 在 任 何角 度 切 割 時 都 — 利 用 光 學 攝影 機 的 解 析 經 由 計 算 , 可得 知 工 件 的 切 轉 速 並 藉 以改 變 鑽 石 線 鋸 達 到 切 割 準 確之 目 的 Τ 一 其 中 繞線 式機構 之 驅 動 滚 裝 ax 於 機 體 上, 藉 由 旋 桿 的 石 線 鑛 套 在 機構 上 可 簡 化 2. 如 中 請 專 利範 圍 1 所 述 之 鑽 石 線 環 1 不再 像 以 前 採 用 的 鑽 石 線 因為 鑽 石 線 鋸 的 省 成 本 0 3. 如 中 請 專 利範 圍 1 所 述 之 明,係利用個人電腦為主的抻 功能;其特徵為: 以往的穿線、捲線式,而採用 鑽石線環; 力控制機構,可使張力維持— 形狀時,形狀可數值定義,並 x、Y軸的移動位置,使切割 9 安裝於工件的上、下端,可藉 中心旋轉的旋轉盤來帶動旋^ 二導輪所組成的導向輪組,使 也給予支撐反力; 度分析’量出線彎曲的程度, 削力及反力,進而調整馬達的 的拉線速度及工件進給速度, 輪與被動滾輪都以旋臂樑方式 旋轉調整可輕易地將環狀的^ 安裝的程序及節省安裝時間。 鑽石線鋸切割機,其設計中之 穿線式或捲線式般需要相當長 製作成本相當高,故可大量節 鑽石線雜切割機,其設計中之442370 申请, patent application scope 1. 'A diamond wire saw with a diamond wire ore cutting machine for numerically controlled cutting. The type of diamond wire saw is no longer made with a winding method that is easier to load and unload — under the passive roller J Zhang Ding 9 When used to cut some predetermined X-pieces with numerical control to control the accuracy within the required range — this cutting machine includes a guide wheel set 5. It can also be designed in the direction of the extension of the diamond wire mine It can be made by four guide wheels or when cutting at any angle-using the analysis of the optical camera, the cutting speed of the workpiece can be known and the diamond wire saw can be changed to achieve accurate cutting. One of the winding mechanism drives Ro-Ro ax on the body, the structure can be simplified by the rock wire ore sleeve of the rotating rod 2. The diamond wire ring 1 as described in the patent scope 1 is no longer used as before Diamond wire because of the cost savings of diamond wire saws 0 3. As stated in the patent claim 1, it uses the personal computer as the main function; its characteristics are: the previous threading and winding type, and the diamond wire ring is used The force control mechanism can maintain the tension—the shape can be numerically defined during the shape, and the x and y axis movement positions, so that the cutting 9 is installed at the upper and lower ends of the workpiece, and the rotation can be driven by the rotating disk in the center ^ 2 The guide wheel group composed of guide wheels also gives support reaction force; degree analysis' measures the degree of wire bending, cutting force and reaction force, and then adjusts the wire drawing speed and workpiece feed speed of the motor, wheels and passive rollers Both can be adjusted by the swing arm beam, which can easily install the ring ^ and save installation time. The diamond wire saw cutting machine requires a long threading or coiling type in its design. The production cost is quite high, so it can save a lot of diamond wire cutting machine. 第18頁 44237 0 六、_請專利範圍 張力調整機構是在旋桿上拉出一條負載線,經 垂吊一適當負载,使鑽石線鋸承受一定 過負栽滾輪 〜〜浪力,來 割造成張力增加時’線的彎曲可使旋桿作順 §進行切 擺,可避免封閉接合的鑽石線鋸承受拉力太大斜方向偏 接處產生斷裂,達到張力自動調節功能,進而纟’而破壞焊 切削時間和連續性,可使切割更準確和切割表=^長久的 4 如申請專利範圍1所述之鑽石線鋸切割機,其設f 之 方疋轉盤係以鑽石線鑛延伸方向為旋轉中心,可帶動旋轉樑 上之導向輪組’使得線鋸在進行任一方向切割時都能提供 反向的支撐力;將上、下導向輪組設計成上下錯開且互呈 垂直’如此旋轉盤僅需約270度的旋轉角度範圍,便可支 撐360度的工作範圍’也因此工作台僅以内側單邊支架來 支撑;導向輪組上的凹槽尚有自我對準中心的功能,可避 免鑽石線鋸偏移及扭轉。 5. 如申請專利範圍1所述之鑽石線鋸切割機,其設計中之 導向輪組的另一設計方法為利用四個導輪夾角90度或三個 導輪夾角1 2 0度,作成上下錯開的方式設置,如此可將鑽 石線限制在導輪中間,不論受到那個方向的切削力時’都 能有效地支撐鑽石線,不會有偏位的現象發生。 6. 如申清專利範圍1所述之鑽石線鑛切割機’其設計中之 偏位感測器’係一種利用電腦視覺原理,將光學攝影機接 入光纖式鹵素燈源,以同軸落射方式照明,並由光學鏡頭 放大線鋸之線徑來增加偏位判斷的解析度;再經資料輸出 線傳輸、影像擷取卡讀取,最後傳送到電腦處理;當線鋸Page 18 44237 0 Sixth, _ please patent scope The tension adjustment mechanism is to pull a load line on the rotating rod, and by hanging an appropriate load, the diamond wire saw can bear a certain overloading roller ~ ~ wave force to cut When the tension is increased, the bending of the wire can make the rotating rod cut in accordance with §, which can prevent the closed joint diamond wire saw from being subjected to too much tensile force, and the oblique direction of the oblique direction can cause breakage, and the automatic tension adjustment function can be achieved. The cutting time and continuity can make the cutting more accurate and the cutting table = ^ Long-term 4 The diamond wire saw cutting machine as described in the scope of patent application 1, the square turntable of f is set with the diamond wire mine extension direction as the rotation center , Can drive the guide wheel set on the rotating beam 'so that the wire saw can provide reverse support force when cutting in any direction; the upper and lower guide wheel sets are designed to stagger up and down and perpendicular to each other, so the rotating disc is only A rotation angle range of about 270 degrees is required to support a 360-degree working range '. Therefore, the table is only supported by the inner single-sided bracket; the groove on the guide wheel set still has the function of self-centering , To avoid the diamond wire saw offset and twist. 5. As for the diamond wire saw cutting machine described in the patent application scope 1, another design method of the guide wheel set in the design is to use four guide wheel angles of 90 degrees or three guide wheel angles of 120 degrees to make up and down. The staggered way is set so that the diamond wire can be limited in the middle of the guide wheel, and it can effectively support the diamond wire regardless of the cutting force in that direction, and no misalignment will occur. 6. As described in the patent claim 1, the diamond wire ore cutting machine 'the offset sensor in its design' is a computer vision principle that connects an optical camera to a fiber-optic halogen lamp source and illuminates in a coaxial epi-emission method , And the optical lens enlarges the wire diameter of the wire saw to increase the resolution of the misalignment judgment; it is then transmitted through the data output line, read by the image capture card, and finally sent to the computer for processing; when the wire saw 第19頁 442370Page 442 370 第20頁Page 20
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