CN104015267A - Automatic control system of high-precision multi-line crisp and hard material slicer - Google Patents
Automatic control system of high-precision multi-line crisp and hard material slicer Download PDFInfo
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- CN104015267A CN104015267A CN201310065847.3A CN201310065847A CN104015267A CN 104015267 A CN104015267 A CN 104015267A CN 201310065847 A CN201310065847 A CN 201310065847A CN 104015267 A CN104015267 A CN 104015267A
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Abstract
The invention relates to an electric control system of a high-precision slicer for slicing monocrystalline silicon, quartz crystals, ceramics, rare earth magnetic materials, gems and other crisp and hard materials, and the system is widely applied to the field of aviation, spaceflight, machinery and electronics. The control system enables the slicer to have the advantages of being high in machining precision, high in cutting efficiency, high in raw material utilization rate and good in wafer quality.
Description
Technical field
The present invention relates to the electric control system of the high accuracy slicer of the crisp and hard materials such as a kind of monocrystalline silicon, quartz crystal, pottery, rareearth magnetic material, jewel, be widely used in the fields such as Aeronautics and Astronautics, machinery, electronics.
Background technology
The technical development of section equipment in recent years has several like this aspects: 1. cutting liquid and recovery.In the precision of the precious materials such as silicon chip is cut, cutting liquid is extremely important to the loss of minimizing joint-cutting, raising surface quality with recovery.The features such as desirable cutting liquid should have modest viscosity, stable chemical nature, strong, the easy processing of clean power, biodegradable, harmless, price is low, its general trend is to use the less diamond abrasive of granularity.The requirement that has met green manufacturing and reduced costs is reused in the recovery of cutting liquid.The ARM system of HCL company can be removed more than 70% smear metal, reaches the 90% diamond abrasive grain rate of recovery.2. for meeting the demand of heavy in section section and raising output, guide wheel spacing, guided wheel slot number and saw filament length degree constantly increase, and have improved many, multi-disc while cutting power of large scale silicon ingot.At present, the DS262 molded line saw that MEYERBURGER company produces can cut the silicon rod that 4 long 520mm, cross section are 153mm153mm simultaneously, once cuts out 4400.3. roller groove processing.During multi-wire saw, sheet is thick to be determined by the wire casing spacing on roller.Current trend is that section area is increasing, and thickness is more and more thinner, has promoted the development of new fluting technology.Roller trench bottom circular arc radius of curvature is in the past large, and cutting wire location is inaccurate, has increased total thickness deviation.In addition, the surface of groove is smooth not, and the diamond dust in cutting liquid is easy to infiltrate.It is 50m that new fluting technology makes trench bottom radius, and the inclined-plane roughness of groove reaches Ra0.2～0.4m, and whole groove is that time processing is shaped, and precision is higher.
The control of exploitation multi-line slicer has sizable technical difficulty, and its Major Difficulties is: the 1. reliable and stable development of walking line mechanism and Precise Tension Control System of Digital.Make the Metal Cutting line of Ф 0.16mm～Ф 0.18mm under permanent tension state, realize at a high speed and moving back and forth; 2. the development of high-precision roller rotary system and worktable lifting system, realizes high-precision cutting; 3. sawing parameters optimization.Walk the optimum organization of the various parameters such as temperature of wire rate, workpiece feed rate, the selection of silicon carbide abrasive granularity and the formulation ratio of cutting liquid, metal wire feed rate, cutting liquid.
The external dominant company that produces multi-line cutting machine has: Japanese high bird (Takatori) company, NTC company and Switzerland HCTDeng company.China has several companies to introduce multi-wire saw equipment.And for the production firm of the multi-wire saw equipment of crisp hard nonmetallic materials also seldom.Domestic existing 4 enterprises start to research and develop multi-wire saw machine equipment, but all not yet reach due reliability and stable, and equipment fails to adopt automatic control.
Summary of the invention
The technical scheme that the present invention is directed to above-mentioned several object employings is: the present invention relates to the electric control system of the high accuracy slicer of the crisp and hard materials such as a kind of monocrystalline silicon, quartz crystal, pottery, rareearth magnetic material, jewel, be widely used in the fields such as Aeronautics and Astronautics, machinery, electronics.The present invention includes servomotor, frequency modulation motor, PLC control system, with realize be different from import machine walk line mechanism and Precise Tension Control System of Digital, met the requirement of high accuracy crisp and hard material fly-cutting.Servomotor, as the main motor of driving of roller, drives the forward and reverse rotation rhythmically of roller high speed, and line of cut is moved back and forth.Frequency modulation motor, as the main motor of driving of ureeling barrel, drives the forward and reverse rotation rhythmically of ureeling barrel high speed, and line of cut is moved back and forth.Servomotor, frequency modulation motor PLC control system are by PLC programme-control, main control PLC (Programmable Logic Controller) is controlled main motor, retractable line motor, according to the feedback signal of tension pick-up, the magnetic force of magnetic powder cluth is regulated to (PLC control signal is delivered to magnetic powder cluth after the current amplifier of development voluntarily) simultaneously.To the control of workbench and to the control of bus cable device, by pair control PLC, realized.Colored man-machine interface and operated key can complete the data setting of all operations and cutting, coiling.The present invention is by adopting servomotor, frequency modulation motor PLC control system, to realize the tension control technology of steel wire: a coil line in use, constantly from actinobacillus wheel, move towards take-up pulley, so the line bag diameter of actinobacillus wheel constantly dwindles, the winding diameter of take-up pulley constantly increases.When roller invariablenes turning speed, for keeping constant tension, the rotating speed of actinobacillus wheel and take-up pulley must constantly change, and the change at random that adds frictional force also causes the variation of steel wire tension force, overtension can cause steel wire to be broken, and steel wire tension changes directly can make wafer surface roughness not reach requirement.Particularly, when the direction of motion is overturn, steel wire tension is controlled difficulty especially.The present invention adopts servomotor, frequency modulation motor, and driven rotary roller and retractable line cylinder are made reciprocating rotating respectively, making line of cut make (300m/min～400m/min) at a high speed moves back and forth, workbench drives workpiece (crystal bar) to rise simultaneously, touch after the cutting planes of metal wire, with feed speed rising.When the cutting liquid that contains silicon carbide abrasive is sprayed onto between workpiece and saw silk, the rapid movement of saw silk is brought diamond dust cutting liquid into workpiece joint-cutting, produces shear action.Because Metal Cutting line is in cutting crisp and hard material, oneself is also worn.By PLC programme-control, make the forward stroke of Metal Cutting line be greater than reverse stroke, the line of cut of wearing and tearing is left to cut surface gradually and collected by wire winding tube.The present invention adopt be different from import machine walk line mechanism and Precise Tension Control System of Digital, met the requirement of high accuracy crisp and hard material fly-cutting.
The present invention is mainly reflected in the advantage that domestic like product is compared:
1, roller shaft main shaft is by driven by servomotor, each is driven retractable cable wheel by frequency modulation motor, and designed a set of reliably, high sensitivity computer PLC control system, the speed of the main motor stand-by motor relevant to each is being carried out adapting under control like clockwork, the sensitivity of software was controlled within 1/10 second, had reached the object that keeps constant tension; 2, select high material, high-precision imported bearing, high accuracy line slideway, high precision ball screw mandrel, guarantee that processing parts reaches designing requirement, final assembly reaches design accuracy requirement;
2, designed high accuracy planker and be placed in below workbench, grating range unit has been installed, precision 0.005mm, the accurate location of digital display working bench.
3, the invention enables slicer to cut to have that machining accuracy is high, cutting efficiency is high, utilization rate of raw materials is high, the measured advantage of wafer matter.The wafer surface cutting out is highly polished, can omit sorting, corase grind operation.And because Metal Cutting line is flexible large, the residual stress while having reduced cutting, makes the micro-crack on quartz wafer surface and serious distortion, damage layer thickness be significantly less than Multi-knife machine.
Import multi-line slicer is because of expensive (approximately 250,000 dollars/platform), and general medium-sized and small enterprises are difficult to bear, and only has relatively large enterprise just to use on a small quantity.So the present invention has obvious Social benefit and economic benefit.
Description of drawings 1 is the control block diagram of multi-thread crisp and hard material slicer.
Specific embodiment explanation
Main technical schemes: adopt inlet servo motor to drive rotating roller main shaft, by two frequency modulation motors, by magnetic powder cluth, drive take-up pulley and actinobacillus wheel, and adopt assembly pulley and extension spring to cushion, in programming, make steel wire at traffic direction upset moment Speed Reduction, reach the object of buffering, in case velocity jump causes tension force overshoot to break steel wire.When steel wire high-speed cruising, programme-control magnetic powder cluth magnetic force makes retractable cable wheel speed and drive motors rotating speed produce slippage, to reach the object of Self Adaptive Control, maintenance steel wire constant tension.Frequency modulation motor is by import Siemens transducer drive, Siemens PLC C(Programmable Logic Controller), system is carried out to on-line monitoring, control and data demonstration.
The recycling of cutting liquid is controlled: under the enough prerequisite of main engine power, improve feed-speed, can improve cutting efficiency, but feed speed is too fast, wafer surface fineness cannot reach requirement, and surface also there will be cut.Adopt the W14 diamond dust that wafer corase grind operation uses (than W28 fine size one times), guaranteeing, under the prerequisite of cutting speed, greatly to have improved wafer surface fineness, omitted the corase grind operation of wafer process; By selecting cutting liquid formulation ratio, met the suspension degree requirement of diamond dust; With slave computer, control the operation of mortar machine, the detection of temperature and flow, by RS232 serial port and host exchanging data, is presented on master control display screen; After once having cut, utilize the abrasive material recyclings such as retracting device separating and recovering gold emery, cut down finished cost.
The embodiment of Precise Tension Control System of Digital: this multi-line cutting machine is a wires of Ф 0.16mm～Ф 0.18mm to be wrapped in to three be on the rotating roller that isosceles triangle arranges, bottom surface at isosceles triangular prism forms a cut surface being comprised of hundreds of bar parallel metal lines, and steel wire two is strained by payingoff mechanism and take-up mechanism respectively.Adopt a servomotor as the main motor of driving of roller, drive the forward and reverse rotation rhythmically of roller high speed, line of cut is moved back and forth.Line of cut should keep the constant forward-reverse again of tension force in cutting process.Because Metal Cutting line is in cutting crisp and hard material, oneself is also worn, and under computer control, the forward stroke of Metal Cutting line is greater than reverse stroke, makes worn out line of cut leave cut surface gradually and is collected by wire winding tube.The tension force general control of line of cut is at 2.5～3.0kg, reciprocal 15 times of maximum per minute (can establish).Multi-thread machine requires very high to the synchronism of ureeling barrel and wire winding tube, ureeling barrel is put line how long, and wire winding tube must be received line how long.Retractable line cylinder is driven by the logical AC induction motor of two Daeporis respectively, uses SIEMENS frequency converter timing, some tension force control wheels is housed between retractable cable mechanism and roller, in order to control the rigidity of steel wire.When the tension force of line of cut changes, by tension pick-up feedback signal, by PLC Programmable Logic Controller, regulated the magnetic force of magnetic powder cluth, realize fine adjustment tension force, keep tension stability.In tension force control accuracy 5%, control sensitivity 0.1 second.Met the control requirement of line of cut tension force.Generally, increase the tensile force of saw silk, can reduce the amplitude of saw silk; But tensile force is excessive, can make again to saw deformation of filament excessive, shorten its service life.Therefore must quantitatively control saw silk tensile force size.
Near the embodiment of cabling mechanism control system: in order to shorten saw silk tension length, also have two aiding support wheels to be also conducive to reduce the amplitude of saw silk cut workpiece.Trace speed 300m/min～400m/min, reach the technical merit of import machine, and manufacturing cost declines greatly.Walk the bus cable device that wire system also comprises take-up side.During wire winding tube take-up, fitly winding displacement is extremely important, because line of cut moves back and forth, if the bad meeting of winding displacement causes line of cut overlapping stuck, during reversion unwrapping wire, will break.Except line of cut, row need to change winding displacement direction when to take-up pulley both sides, and wire winding tube original during reversion becomes ureeling barrel, and ureeling barrel originally becomes wire winding tube, also will change winding displacement direction, and this controls and brought difficulty to winding displacement.When the control signal of change rotation direction is sent, the position of line of cut on take-up pulley changes, the signal overlap while likely at a time arriving wire winding tube both sides with line of cut.By a set of algorithm, solve this control problem.
The method of work of cutting liquid temperature automatic regulating system: by temperature sensor, temperature control instrument, refrigeration systems etc., realize the constant of mortar temperature.The worktable lifting and the feed system that stepper motor, harmonic speed reducer, ball screw, high accuracy grating scale, consist of, adopt PLC Controlled by Programmable Controller, in workbench full stroke (100mm), and deviation 0.03mm.In normal cutting stroke, deviation 0.01mm.
Determining of driving water mean place and upright position: show precision 0.005mm after being measured by grating scale by display screen.When cutting of steel silk thread is done to move back and forth at a high speed, workpiece rises to and touches after wire cutting planes with workbench, and with feed speed rising, workpiece is cut.The parameters such as table feed speed, the amount of feeding can be set by display screen.For adapting to the processing request of different user, also specialized designs angle adjustable working table top, when guaranteeing work top precision, horizontal azimuth can regulate arbitrarily in 8 scopes.During being cut with of quartz tuning-fork, need secondary cut, cut to after certain depth, allow workpiece exit the cutting planes of line of cut, after moving a certain distance toward horizontal direction, then cutting for the second time.The high accuracy carriage device of development has met the requirement of secondary cut.
Claims (5)
1. the present invention relates to the electric control system of the high accuracy slicer of the crisp and hard materials such as a kind of monocrystalline silicon, quartz crystal, pottery, rareearth magnetic material, jewel, be widely used in the fields such as Aeronautics and Astronautics, machinery, electronics.The present invention includes servomotor, frequency modulation motor, PLC control system, with realize be different from import machine walk line mechanism and Precise Tension Control System of Digital, met the requirement of high accuracy crisp and hard material fly-cutting.
2. the electric control system of high accuracy slicer according to claim 1, is characterized in that described servomotor is as the main motor of driving of roller, drives the forward and reverse rotation rhythmically of roller high speed, and line of cut is moved back and forth.
3. the electric control system of high accuracy slicer according to claim 1, is characterized in that described frequency modulation motor is as the main motor of driving of ureeling barrel, drives the forward and reverse rotation rhythmically of ureeling barrel high speed, and line of cut is moved back and forth.
4. the electric control system of high accuracy slicer according to claim 1, it is characterized in that described servomotor, frequency modulation motor PLC control system are by PLC programme-control, main control PLC (Programmable Logic Controller) is controlled main motor, retractable line motor, according to the feedback signal of tension pick-up, the magnetic force of magnetic powder cluth is regulated to (PLC control signal is delivered to magnetic powder cluth after the current amplifier of development voluntarily) simultaneously.To the control of workbench and to the control of bus cable device, by pair control PLC, realized.
5. the electric control system of high accuracy slicer according to claim 1, is characterized in that described colored man-machine interface and operated key can complete the data setting of all operations and cutting, coiling.
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| CN201310065847.3A CN104015267A (en) | 2013-03-01 | 2013-03-01 | Automatic control system of high-precision multi-line crisp and hard material slicer |
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Cited By (5)
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| CN105897068B (en) * | 2016-04-07 | 2019-04-26 | 武汉菲仕运动控制系统有限公司 | A kind of hard brittle material multi-wire butting machine bi-motor torque synchronous control system |
| CN111908245A (en) * | 2020-07-07 | 2020-11-10 | 西安交通大学 | Device and method for cutting continuous fiber unidirectional prepreg by linear blade |
| CN113911803A (en) * | 2021-10-25 | 2022-01-11 | 福建省计量科学研究院（福建省眼镜质量检验站） | Constant tension control system of mask machine based on variable frequency transmission |
| CN114227949A (en) * | 2021-11-30 | 2022-03-25 | 西安空间无线电技术研究所 | Physical cutting method of magnetic base material |
| CN116197475A (en) * | 2023-02-06 | 2023-06-02 | 青岛高测科技股份有限公司 | Feed control method, medium, control device of feed assembly and wire cutting machine |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105897068B (en) * | 2016-04-07 | 2019-04-26 | 武汉菲仕运动控制系统有限公司 | A kind of hard brittle material multi-wire butting machine bi-motor torque synchronous control system |
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| CN113911803A (en) * | 2021-10-25 | 2022-01-11 | 福建省计量科学研究院（福建省眼镜质量检验站） | Constant tension control system of mask machine based on variable frequency transmission |
| CN114227949A (en) * | 2021-11-30 | 2022-03-25 | 西安空间无线电技术研究所 | Physical cutting method of magnetic base material |
| CN114227949B (en) * | 2021-11-30 | 2024-03-15 | 西安空间无线电技术研究所 | Physical cutting method of magnetic substrate |
| CN116197475A (en) * | 2023-02-06 | 2023-06-02 | 青岛高测科技股份有限公司 | Feed control method, medium, control device of feed assembly and wire cutting machine |
| CN116197475B (en) * | 2023-02-06 | 2024-05-17 | 青岛高测科技股份有限公司 | Feed control method, medium, control device of feed assembly and wire cutting machine |
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Application publication date: 20140903 |