KR101957096B1 - Robot system, Manufacturing apparatus of device, Manufacturing method of device and Method for adjusting teaching positions - Google Patents

Abstract

According to the present invention, a robot system comprises: a robot having a shaft unit, a robot arm unit of which one end is rotationally connected to the shaft unit, and a robot hand unit rotationally connected to the other end of the robot arm unit; a control means controlling operation of the robot; and a measurement means to measure a position of the robot hand unit in a direction along a rotating axis through which the robot hand unit rotates. The control means adjusts a position in the direction of the robot hand unit based on the position of the direction measured by the measurement means.

Description

Technical Field [0001] The present invention relates to a robot system, a device manufacturing apparatus, a device manufacturing method, and a teaching position adjusting method.

The present invention relates to a robot system.

BACKGROUND ART [0002] Recently, in a manufacturing line of an organic EL display device receiving a light as a flat panel display device, a substrate and / or a mask are processed in a processing chamber (e.g., a deposition chamber) Buffer chamber, mask stock chamber, and the like.

When the robot is first installed on a manufacturing line or when the robot arm or the robot hand is exchanged for maintenance, in order to allow the robot to carry the substrate or the mask to an accurate target position, A teaching operation is performed for teaching the starting point of the motion and the sequence (conveying trajectory).

As a teaching method of the robot, there is a method of allowing a worker to directly grasp a waiting position and a conveying position of a substrate or a mask by holding the robot hand, a method in which an operator operates the robot with the operation panel to sequentially designate a position to be a starting point of the carrying operation And the like are generally known.

Information about the waiting position and the carrying position of the robot hand taught by the teaching operation is stored in the control means of the robot, and during the actual carrying operation, the robot reproduces the carrying operation in accordance with the stored waiting position and carrying position information.

Normally, the teaching of the waiting position of the robot hand and the carrying position for giving / receiving the substrate / mask is manually performed by the operator. That is, since the operator performs the teaching operation manually while visually confirming the movement of the robot, the operator is required to have a high degree of proficiency, and the teaching operation takes time.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: Japanese Laid-Open Patent Publication No. 2012-54013

In the technique described in Patent Document 1 (Japanese Patent Laid-Open Publication No. 2012-54013), although the entire robot can be moved up and down, the position of the robot hand can not be precisely controlled.

An object of the present invention is to provide a robot system, a device manufacturing apparatus, a device manufacturing method, and a teaching position adjusting method capable of precisely controlling the position of a robot hand unit.

A robot system according to a first aspect of the present invention includes a robot including a shaft portion, a robot arm portion having one end rotatably connected to the shaft portion, and a robot hand portion rotatably connected to the other end of the robot arm portion, And control means for controlling the operation of the robot and measurement means for measuring the position of the robot hand portion in the direction along the rotation axis of the rotation of the robot hand portion, And the position of the robot hand portion in the direction is adjusted based on the position in the direction in which the robot hand is moved.

A device manufacturing apparatus according to a second aspect of the present invention includes a plurality of chambers and a robot system for transporting a carrying object between the plurality of chambers, wherein the robot system is a robot system according to the first aspect of the present invention to be.

A device manufacturing method according to a third aspect of the present invention includes the steps of preparing a robot system including a robot including a robot hand portion and a control means for controlling the operation of the robot; Storing a plurality of teaching positions including a transfer position of the robot hand in a memory portion of the control means of the robot system; setting the robot hand portion to a predetermined position; Measuring the position of the robot hand part in the direction by the measuring means, storing the first information on the measured position of the robot hand part in the direction in the memory part, In a state in which the control for setting the robot hand portion at the predetermined position is performed, A second step of re-measuring the position in the direction by the measuring means; and a step of, based on the first information and the second information on the position of the robot hand portion re- Calculating a positional shift amount in a direction of the vehicle; calculating, based on the positional shift amount in the direction when the positional shift amount in the direction exceeds a predetermined threshold value, And correcting information on the position of the robot hand portion in the direction among the information on the plurality of teaching positions.

A teaching position adjusting method according to a fourth aspect of the present invention is a teaching position adjusting method in a robot system having a robot including a robot hand portion and a control means for controlling the operation of the robot, Storing a plurality of teaching positions of the robot including a plurality of transfer positions in a memory portion of the control means; setting the robot hand portion at a predetermined position, and moving the robot hand portion in a direction Measuring the position of the robot hand part in the direction by the measuring means, storing the first information on the measured position of the robot hand part in the direction in the memory part, In a state in which the control for setting the robot hand portion to the predetermined position is performed, Based on the first information and the second information on the position of the robot hand portion in the direction re-measured again, the position of the robot hand portion in the direction of the robot hand portion Based on the positional shift amount in the direction when the positional shift amount in the direction exceeds the predetermined threshold value, calculating the positional shift amount in the direction And correcting information on a position of the robot hand portion in the direction among the information on the teaching position of the robot hand portion.

According to the present invention, the position of the robot hand portion can be precisely controlled by measuring the position in the direction parallel to the rotation axis of the robot hand portion.

1 is a schematic view of a part of a manufacturing line of an organic EL display device
2 is a schematic diagram of a robot system according to the present invention.
3 is a schematic diagram of a robot system for teaching position adjustment according to the present invention.

 Hereinafter, preferred embodiments and examples of the present invention will be described with reference to the drawings. However, the following embodiments and examples are illustrative of preferred configurations of the present invention, and the scope of the present invention is not limited to these configurations. In the following description, the hardware configuration, the software configuration, the process flow, the manufacturing conditions, the size, the material, the shape, and the like of the apparatus are intended to limit the scope of the present invention unless otherwise specified no.

<Electronic Device Manufacturing Line>

1 is a plan view schematically showing a part of the configuration of a manufacturing line of an electronic device.

The manufacturing line of Fig. 1 is used, for example, in the manufacture of a display panel of an organic EL display device for a smart phone. In the case of a display panel for a smart phone, after forming an organic EL film on a substrate having a full size (about 1500 mm x about 1850 mm) or a half-cut size (about 1500 mm x 925 mm) Are cut out to produce a plurality of panels of small size.

As shown in Fig. 1, the film-forming cluster 1 of the production line of the organic EL display device generally comprises a plurality of film-forming chambers 11 in which processing (for example, film-forming) A plurality of mask stock chambers 12 in which front and rear masks are accommodated, and a transport chamber 13 disposed at the center thereof.

A robot 14 is provided in the transport chamber 13 for transporting the substrate 10 between a plurality of deposition chambers 11 and transporting the mask between the deposition chamber 11 and the mask stock chamber 12. The robot 14 may be, for example, a robot having a structure in which a robot hand for holding the substrate 10 is mounted on a multi-joint arm. The structure of the robot 14 of the present invention will be described in detail with reference to Fig. In the present embodiment, the robot 14 is described as an example of a transport robot for transporting a substrate or a mask. However, the present invention is not limited to this and can be applied to other robots.

Each deposition chamber 11 is provided with a deposition apparatus (also referred to as a deposition apparatus). In the film forming apparatus, the evaporation material stored in the evaporation source is heated and evaporated by the heater, and is deposited on the substrate through the mask. A series of film formation processes such as transferring and receiving the substrate 10 with the robot 14, alignment (alignment) of the relative positions of the substrate 10 and the mask, fixing of the substrate 10 onto the mask, Is automatically performed by the film forming apparatus. The deposition apparatus may be a dual stage type having two stages. In the film deposition apparatus of the dual stage type, alignment is performed with respect to another substrate 10 brought into another stage while the film formation progresses on the substrate 10 carried in one stage.

In the mask stock chamber 12, a mask to be used in the film forming process in the film formation chamber 11 and a used mask are stored in two cassettes. The robot 14 transfers the used mask from the film formation chamber 11 to the cassette of the mask stock chamber 12 and transfers a new mask stored in another cassette of the mask stock chamber 12 to the deposition chamber 11 Return.

The film formation cluster 1 of the production line of the organic EL display device is provided with a pass room 15 for transferring the substrate 10 from the upstream side in the flow direction of the substrate 10 to the film formation closure 1, A buffer chamber 16 for transferring the substrate 10 on which the film formation process has been completed to another film formation cluster on the downstream side is connected. The robot 14 of the transfer chamber 13 receives the substrate 10 from the pass space 15 on the upstream side and transfers the substrate 10 to one of the deposition chambers 11 in the deposition clusters 1. [ The robot 14 receives the substrate 10 on which the film formation process in the film formation cluster 1 has been completed from one of the plurality of deposition chambers 11 and transfers the substrate 10 to the buffer chamber 16 connected to the downstream side.

As described above, the robot 14 transports the substrate and the object to be transferred such as a mask between various chambers disposed around the transfer chamber 13.

1, the deposition clusters 1 of the present invention have been described. However, the deposition clusters 1 of the present invention are not limited thereto, and they may have different kinds of chambers, and the arrangement among the chambers may be different.

Hereinafter, the configuration of the robot system including the robot 14 will be described.

<Robot System>

Fig. 2 exemplarily shows the structure of a robot system including a robot 14. Fig.

In the following description, an XYZ coordinate system in which the direction parallel to the rotation axis of the connection portion between the robot arm portion and the robot hand portion of the robot 14 is the Z axis is used. When the Z-axis direction is the third direction, one of the X and Y directions perpendicular to the Z-axis direction is set as the first direction and the other is set as the second direction. Further, the rotation angle about the Z-axis direction is represented by?, And the rotation direction about the Z-axis is defined as the rotation angle direction.

The robot system of the present invention includes a control means (25) for controlling the operation of the robot (14) and the robot (14).

The robot 14 includes a base 21 provided on the bottom surface of the transport chamber 13 and a shaft 21 extending in the vertical direction or in the Z-axis direction (third direction) from the base 21 and movable in the Z- And a robot arm portion 23 rotatably connected to the shaft portion 22. 2 (a), the robot 14 has one robot arm portion 23, but the robot 14 may have two or more robot arm portions 23. As a result, the transport efficiency of the substrate 10 and the mask can be increased, and the processing time can be shortened.

The robot arm portion 23 may have a structure in which a plurality of arms are rotatably connected to each other through a joint portion. For example, the robot arm portion 23 includes a first arm 231 having one end rotatably connected to the shaft portion 22, a second arm 231 having one end rotatably connected to the other end of the first arm 231, 232). 2 (a) shows a structure in which two arms are rotatably connected to each other through a joint portion. However, the present invention is not limited to this structure, and a structure in which two arms are relatively displaced in the direction of the long side of the arm to expand and contract . The first arm 231 is rotatably connected to the shaft portion 22 but the present invention is not limited thereto and the first arm 231 may be fixedly connected to the shaft portion 22, The shaft portion 22 itself may be rotated.

At the other end of the second arm 232, a robot hand portion 24 is rotatably installed. The robot hand section 24 has a structure in which a substrate and a mask can be placed thereon. Although not shown in Fig. 2, in order to stably support the substrate, the robot hand part 24 intersects the longitudinal direction of the robot hand part 24 (the direction toward the free distal end of the robot hand part from the connection part with the robot arm part) And a plurality of supporting portions extending in a direction in which the plurality of supporting portions are provided. A fluorine coating or the like may be performed on the substrate / mask surface of the robot hand portion 24 to prevent damage to the substrate 10. [ It may also include holding means such as a gripping mechanism to prevent the substrate 10 from moving or dropping on the robot hand portion 24 during transportation.

The robot 14 according to the present invention having such a structure is configured such that the rotation angle of the first arm 231 about the shaft portion 22, the angle between the first arm 231 and the second arm 232, By adjusting the angle between the arm 232 and the robot hand 24 and the height of the shaft 22, the linear movement, the rotational movement, and the compound movement of the substrate or mask placed on the robot hand 24 And move the substrate or mask to any desired location on the XYZ coordinate system.

The robot system of the present invention includes a control means (25) for controlling the operation of the robot (14). The control means 25 may be implemented by a computer having a processor, memory, storage, I / O, and the like. For example, the control means 25 includes a memory unit 251 in which a program for controlling the returning operation of the robot 14 is stored, and a control unit 253 for controlling the robot 14 by executing a program stored in the memory unit 251 And a processor 252. As the computer, a general-purpose personal computer may be used, or an embedded type computer or a PLC (programmable logic controller) may be used. Alternatively, some or all of the functions of the control means 25 may be constituted by a circuit such as an ASIC or an FPGA. In the present embodiment, the control means 25 is described as being installed separately from the robot 14, but the present invention is not limited to this, and the robot 14 may have the control means 25.

In the memory unit 251, information on a plurality of teaching positions (waiting position and carrying position) for controlling the carrying operation of the robot 14 can be stored. The control means 25 controls the robot hand portion 24 to move to the corresponding position based on the information about the teaching position stored in the memory portion 251. [

2 (b), the robot 14 includes a first arm driving portion 2311 for rotating the shaft of the first arm 231, a second arm driving portion 2311 for rotating the shaft of the second arm 231, A robot hand driving section 242 for rotating the shaft of the robot hand section 24 and an elevation driving section 221 for driving the shaft section 22 in a vertical direction.

These drive units each include a servo motor (not shown) and a power transmission mechanism (not shown). The rotary power is transmitted from the servo motor to the shaft of the first arm 231, the shaft of the second arm 232, and the shaft of the robot hand portion 24 via the power transmission mechanism, whereby the first arm 231, The second arm 232, and the robot hand unit 24, respectively.

The lifting drive part 221 is installed in the base part 21 of the robot 14 and can be realized by a ball screw mechanism including a rotary motor. For example, the lifting drive section 221 includes a screw shaft, a ball nut configured to be engaged with the screw shaft, and a rotation motor configured to rotate the screw shaft. In this case, the shaft portion 22 is fixed to the ball nut, and is lifted and lowered together with the ball nut as the screw shaft rotates.

The control means 25 receives information about the angular position of the first arm 231, the angular position of the second arm 232, the angular position of the robot hand portion 24, and the height of the shaft portion 22 from these driving portions It is possible to perform feedback control of each driving unit. Thereby, the robot hand unit 24 can be moved to the teaching position with high accuracy.

<Robot teaching>

The robot 14 transports the substrate 10 between a plurality of deposition chambers 11 in the deposition clusters 1 and the passages 15 or the buffer chambers 16 as described with reference to Fig.

The robot arm portion 23 of the robot 14 is contracted (that is, when the substrate 10 is transferred from the pass room 15 to the first film formation chamber 11a by the robot 14) The joint of the robot arm portion 23 is folded so that the angle between the first arm and the second arm is small) and the free end of the robot hand portion 24 is moved from the first standby position , The robot arm portion 23 is extended to a carrying-out position on the substrate stage in the pass chamber 15 (this position becomes the teaching position for the pass space) and the substrate 10 on the substrate stage of the pass chamber 15 And retracts the robot arm portion 23 to return to the first standby position.

Next, the robot arm portion 23 is pivoted about the shaft portion 22 so that the free end of the robot hand portion 24 is moved to the second standby position (another teaching position . In this state, the robot arm portion 23 is extended again to move to the substrate carry-in position (the teaching position for the first film forming chamber) in the first film forming chamber 11a, thereby bringing the substrate into the first film forming chamber 11a do. Thereafter, the robot hand unit 24 returns to the second standby position.

This process is repeated until all the film forming processes in the film formation clusters 1 are finished and the substrates are transferred to the buffer chamber 16 on the downstream side of the substrate flow. Information on the waiting position in the film formation cluster 1 and the carry-in / carry-out position of the substrate 10 is stored as information of the teaching position in the control means 25 are stored in the memory unit 251. [

(For example, X, Y, Z, and θ coordinate values of the position) of the teaching position to the robot 14 (measuring the position and transmitting it to the memory unit 251 of the control means 25) When the robot 14 is placed in the film formation cluster 1 or when the robot arm portion 23 or the robot hand portion 24 is removed or replaced for maintenance, It is done by the operator.

In the teaching operation, the operator moves the robot hand portion 24 to each teaching position while moving the robot 14 little by little through the operation panel, and moves the robot hand portion 24 to the first The rotation angle of the arm 231, the rotation angle between the first arm 231 and the second arm 232, the rotation angle between the second arm 232 and the robot hand 24, By calculating the coordinate value of the teaching position and storing it in the control means 25 based on the information about the position of the direction. At this time, the angle of rotation and the like are determined by the driving unit 2311 of the shaft of the first arm 231, the driving unit 2321 of the shaft of the second arm 232, the driving unit 242 of the shaft of the robot hand unit 24, And the lifting and driving portion 221 of the shaft portion 22.

Such a teaching operation is usually performed by manually turning the robot arm unit 23 and / or the robot hand unit 24 of the robot 14 by operating the operation panel manually, May be performed in such a manner that the robot hand unit 24 is guided to the target position by using the robot hand unit 24 to obtain the position information thereof. Further, the teaching operation may be performed by a method of recognizing the marker placed on the robot hand unit 24 moved to the target position as a sensor and obtaining the coordinate value of the teaching position.

When the relative position between the chambers is constant, for example, when the teaching position (substrate carry-in / out position) in each chamber is located at substantially the same distance from the shaft portion 22 of the robot 14 14), it is possible to quickly perform a teaching operation for another chamber (teaching position) by using the relative positional relationship between these chambers.

It should be noted that the teaching operation is generally performed in a state in which the substrate 10 is not placed on the robot hand portion 24 but the substrate 10 may be placed on the robot hand portion 24. [ As a result, accurate teaching can be performed in accordance with the actual transporting condition. Particularly, in order to accurately teach the height of the robot hand portion 24 in the Z-axis direction, it is preferable to perform the teaching operation while the substrate 10 is placed on the robot hand portion 24.

<Robot System for Adjustment of Teaching Position>

Hereinafter, a robot system for adjusting the teaching positions (waiting position and carrying position) according to the present invention will be described with reference to Fig.

The robot arm portion 23 is moved in the direction of the robot arm 14 and the robot arm portion 23 when the substrate 14 or the mask is transported using the actual robot 14 after the initial installation of the robot 14 or the maintenance of the robot arm portion 23 / Or the robot hand part 24 may collide with the part constituting the manufacturing line. For example, in the process of transporting the substrate 10 or the mask into each chamber by the robot 14 in the film formation cluster 1, the robot hand portion 24, etc. are transported to the deposition chamber 11, May collide with a substrate holder or substrate stage or substrate support such as the buffer chamber 16 and may collide with the mask receiving cassette in the mask stock chamber 12 or the mask support within the cassette.

The robot hand unit 24 and the robot arm unit 23 may be deformed and the joints between the robot hand unit 24 and the robot arm unit 23 may be deformed .

Even if the collision does not occur, the joint of the robot hand unit 24 is deformed due to the load of the robot hand unit 24 being deformed by the weight of the substrate 10 or being continuously applied to the joint part of the transfer robot, 24 may be different from the initial teaching position.

In this case, based on the information on the teaching position stored in the memory unit 251, the control means 25 instructs the robot arm 24 to move the robot hand unit 24 to the corresponding teaching position, The robot hand portion 24 can not be moved to the teaching position but moves to the position deviated from the teaching position. That is, even if the substrate 10 held by the robot hand section 24 is moved to the teaching position (standby position and carrying position) stored in the control means 25, the substrate does not move to the position assumed at the time of teaching But is shifted to a position shifted in the X, Y, Z, and θ directions. Such a positional deviation may increase the possibility of collision with other apparatuses or the like of the manufacturing line in the process of transporting the substrate or the mask, and may cause a failure in processing (e.g., film formation) on the substrate.

In particular, unlike the semiconductor substrate, since the display substrate is much larger in size, the deflection of the robot hand portion 24 is increased, the risk of collision is increased, and the possibility of positional deviation in the Z-axis direction is increased. Therefore, there is a great need to correct the positional deviation of the robot hand portion 24 in the Z-axis direction.

In the prior art, a positional deviation occurs in the robot hand portion 24 due to a collision or the like of the robot 14, so that the carrying operation of the robot 14 is performed at a position different from that taught at the time of teaching, The teaching operation is again performed for all the teaching positions (the waiting position and the carrying position such as the carrying-in / carrying-out position) in the film-forming cluster 1.

In the manufacturing line of the organic EL display device, the teaching position of the robot 14 is the position where the substrate and the mask are placed in the processing chamber (film forming chamber) arranged around the transfer chamber provided with the robot 14, Since it includes a plurality of positions such as a position at which the mask before and after use is stored in the buffer chamber 12, a position at which the mask is transferred to the pass room 15 and the buffer chamber 16, and so forth, It takes.

In addition, the robot 14 may have two robot arm portions 23 so that more carrying operations can be performed for a unit time, and teaching should be separately performed in the atmospheric release state and the vacuum state with respect to the respective teaching positions Therefore, in a large-scale manufacturing line, it takes several tens of times to perform a teaching operation, which takes several hours to teach, and the manufacturing line itself is stopped during this time.

In the present invention, when a positional deviation of the robot (14), particularly, the robot hand unit (24) occurs due to a collision or the like of the robot (14) , The positional deviation amount of the robot hand portion 24 at a predetermined position (in the present embodiment, it is referred to as the origin position, and the origin position may be, for example, the substrate / mask transfer position in the specific chamber) And corrects the position information of the plurality of different teaching positions based on the measured position information. This makes it possible to omit the teaching operation for the other plurality of teaching positions and shorten the time required for the re-teaching operation.

The robot system 30 of the present invention used thereon includes a robot 14, a control means 25 and a measurement means 31 as shown in Fig.

The measuring means 31 of the robot system 30 of the present invention measures the height of the robot hand portion 24, that is, the position in the Z direction, so that the positional deviation of the robot hand portion 24 in the Z- So that it can calculate the amount.

The measuring means 31 measures the height of the robot hand portion 24 in a state where the robot hand portion 24 is set at the home position (for example, the board take-out position in the pass room 15) The robot hand part 24 is provided at a position corresponding to the robot hand part 24. The measuring means 31 can detect the height of the lower surface of the robot hand portion 24 below the substrate stage of the pass room 15 when the origin position is the substrate carry- Axis direction from the lower surface of the robot hand portion 24 so as to be spaced apart from the lower surface of the robot hand portion 24 in the Z-axis direction.

The measuring means 31 is preferably a laser sensor 311 capable of measuring the height of the robot hand portion 24 by detecting the laser beam reflected by the lower surface of the robot hand portion 24, for example, However, the present invention is not limited thereto, and may be any other means as long as the height of the robot hand portion 24 can be detected.

For example, the measuring means 31 of the present invention may be an image pickup camera. In the case of using an image pickup camera, the height of the robot hand portion 24 can be measured using the focal point (focal distance) of the image captured by the camera. When a camera for photographing is used as the measuring means 31, a transparent window may be provided on the bottom surface of the pass room 15, and an imaging camera may be provided outside the pass room 15. However, the present invention is not limited to this, A camera for photographing may be provided in the camera body 15.

The height of the robot hand portion 24 is measured by a measuring means 31 such as a laser sensor or an image pickup camera so that the positional shift amount of the robot hand portion 24, Can be measured.

That is, the robot hand unit 24 is set at the home position before the positional deviation occurs in the robot 14 due to a collision or the like (for example, immediately after the first teaching operation) (Reference position information, first information) about the position of the robot hand unit 24 in the Z-axis direction when the robot hand unit 24 is set at the origin position by measuring the height of the robot arm 24 Can be obtained. Information on the positions of the robot hand section 24 in the X-axis direction, the Y-axis direction, and the rotation angle direction about the Z-axis is stored in the robot hand section 24 in the longitudinal direction of the robot hand section 24 A plurality of mark portions 241 arranged in the longitudinal direction of the robot hand portion (direction from the connecting portion with the robot arm portion toward the free distal end of the robot hand portion) or a linear mark extending in the longitudinal direction of the robot hand portion 24, Or the like.

The acquired reference position information of the robot hand unit 24 includes information about the position of the robot hand unit 24 in at least the Z axis direction and is used as reference position information of the robot hand unit 24 25 in the memory unit 251 of the computer.

Thereafter, when positional deviation occurs due to a collision of the robot 14 or the like, control is performed to set the robot hand section 24 to the home position (even if this control is performed, due to deformation due to collision or the like, The robot hand unit 24 can not move to the original origin position) and the position of the robot hand unit 24 is again measured by the measuring unit 31 to determine the position of the robot hand unit 24 in the Z-axis direction. (Second information) of the re-acquired robot hand unit 24 in the Z-axis direction is compared with the reference position information stored in the memory unit 251, the robot hand unit 24 before and after the collision, The positional deviation DELTA Z in the Z-axis direction can be obtained. The positional shift amounts DELTA X, DELTA Y and DELTA [theta] in the rotational angle direction about the X axis direction, the Z axis direction and the Z axis of the robot hand section 24 are also stored in the memory section 251 Can be obtained by comparing the reference position information and the information on the position in the corresponding direction after the collision.

That is, in the present invention, the position of the robot hand portion 24 is measured by the measuring means 31 before the displacement of the robot hand portion 24 occurs, and the reference position of the robot hand portion 24 is calculated And stores it in the control means 25 in advance. When a positional deviation occurs due to a collision or the like of the robot hand part 24, the control for setting the robot hand part 24 back to the home position is performed, and then the position of the robot hand part 24 is calculated , And calculates the position shift amount? Z of the robot hand unit 24 based on the difference between the calculated position and the reference position.

As described above, according to the present invention, by measuring the robot hand portion with a measuring means such as a laser sensor, it is possible to detect a position shift amount at a specific position of the robot hand portion (in particular, And corrects information on a plurality of different teaching positions (waiting position and carrying position) of the carrying operation based on the measured positional displacement amount. As a result, the equipment can be restarted only by confirming the teaching position without re-teaching the other plurality of teaching positions, and the time required for re-teaching can be greatly shortened.

In this embodiment, among the plurality of teaching positions in the film formation cluster 1, the substrate carry-out position of the pass room 15 is set as the origin position for measuring the position shift amount of the robot hand portion 24. [ This is because the conveying position of the pass room 15 is the farthest from the shaft portion 22 of the robot 14 among the plurality of teaching positions in the film formation cluster 1 so that the collision of the robot hand portion 24 This is because the positional displacement amount is the largest. Also, unlike the deposition chamber 11 in which the evaporation source is installed at the lower part of the chamber, the pass room 15 is advantageous in that it is easy to install the measuring unit 31 below the substrate stage.

However, the origin position of the present invention is not limited to the substrate carry-out position of the pass room 15 but may be a transport position in another chamber (for example, a film formation chamber, a buffer chamber, a mask stock chamber) , And a standby position of the conveying chamber). By setting the home position to any one of a plurality of standby positions in the transportation room, the installation of the measuring means 31 is facilitated. Furthermore, the origin position of the present invention may be a third position other than the teaching position of the film formation cluster 1.

<Method of Adjusting Teaching Position and Device Manufacturing Method>

A method of correcting a plurality of different teaching positions in the film formation cluster 1 based on the positional shift amount of the robot hand portion 24 at the origin position and a method of manufacturing a device such as an organic EL display device using the same Will be described.

The calculation of the positional shift amount of the robot hand portion 24 in the Z-axis direction can be performed through feedback control or feedback loop control.

In calculating the position shift amount by the feedback control, first, the robot hand unit 24 is set at the origin position, and the position of the robot hand unit 24 in the Z-axis direction is measured by the measuring unit 31 , And stores it as reference position information (first information) in the memory unit 251 of the control means 25. [

The position of the robot hand portion 24 in the Z-axis direction is measured after the control for setting the robot hand portion 24 to the home position is performed when the positional deviation occurs due to the impact of the robot hand portion 24, (Second information) on the re-measured position in the Z-axis direction is compared with the reference position information stored in the memory unit 251 to obtain the first position displacement amount.

Subsequently, the robot hand portion 24 is moved by the first position shift amount, and the position of the robot hand portion 24 in the Z-axis direction is measured by the measuring means 31 and compared with the stored reference position information .

When the measured position of the robot hand portion 24 in the Z-axis direction is different from the reference position information, the second position shift amount is calculated and the robot hand portion 24 is moved by the second position shift amount.

The same process is repeated to determine whether the position of the robot hand 24 in the Z-axis direction is the reference position stored in the memory unit 251 for the first time, the first position shift amount up to that time, And the like are summed and used as correction values for adjusting other teaching positions.

The robot hand unit 24 is set at the home position and the position of the robot hand unit 24 in the Z axis direction is measured by the measuring unit 31 , And stores it as reference position information (first information) in the memory unit 251 of the control means 25.

The position of the robot hand portion 24 in the Z-axis direction is measured after the control for setting the robot hand portion 24 to the home position is performed when the positional deviation occurs due to the impact of the robot hand portion 24, (Second information) of the position in the Z axis direction is compared with the reference position information stored in the memory unit 251 and the robot hand unit 24 is moved to Z Axis direction.

When the current position of the robot hand portion 24 in the Z-axis direction coincides with the reference position stored in the memory portion 251, the movement of the robot hand portion 24 in the Z-axis direction is stopped. The total moving distance of the robot hand 24 up to this time is defined as a correction value for another teaching position.

A method of adjusting another teaching position on the basis of the calculated correction value will be described.

First, a plurality of teaching positions (a carrying position and a standby position) to which the substrate 10 is to be transported are taught to the robot 14. [ That is, position information of a plurality of transporting positions and waiting positions is stored in the memory unit 251 of the control means 25 as teaching position information (S1).

The robot hand portion 24 of the robot 14 is set to the origin position which is one of a plurality of teaching positions (S2). The position of the robot hand portion 24 is measured by the measuring means 31 and the positional information of the robot hand portion 24 calculated on the basis of the measurement result is transmitted to the robot hand portion 24 Is stored in the memory unit 251 of the control means 25 as the reference position information (first information) (S3).

Thereafter, in the case where a displacement occurs in the robot hand portion 24 due to a deformation or the like generated in the robot 14 due to a collision with another portion of the film formation cluster 1 or the like in the transporting process, in order to measure the position displacement amount, Control for setting the hand unit 24 back to the home position is performed (S4). That is, the position information corresponding to the origin position is input to the driving unit of the robot 14. However, due to deformation caused by a collision or the like, the robot hand portion 24 can not move to the origin position before collision, and moves to a position shifted from the original position. The position of the robot hand portion 24 moved to the shifted position is again measured by the measuring means 31 (S5).

The control means 25 determines whether or not the information about the re-measured position of the robot hand portion 24 (second information) and the information about the reference position previously stored in the memory portion 251 of the control means 25 1 information), the positional shift amount of the robot hand portion 24 before and after the collision is calculated. According to the configuration of the present invention, it is possible to measure the displacement amount in the Z direction. Similarly, the positional shift amount of the robot hand portion 24 in the X-axis direction, the Y-axis direction, and the? Direction is also measured.

The control means 25 compares the measured positional shift amount with a predetermined threshold value for each of the X-axis direction, the Y-axis direction, the Z-axis direction, and the? Direction. If it is determined that the positional shift amount in any one of the X-axis direction, the Y-axis direction, the Z-axis direction, and the &thetas; direction exceeds the threshold value in the corresponding direction, the control means 25 calculates the positional shift amount The position information on the plurality of teaching positions stored in the memory unit 251 is corrected.

For example, the positional deviation amount in the corresponding direction calculated by the control means 25 is added to or subtracted from the positional information in the corresponding direction of the other teaching position to adjust the positional information of the corresponding teaching position.

When the position information on all the teaching positions is corrected, the robot 14 is operated on the basis of the corrected teaching position so that the robot hand portion 24 is moved to the other portion of the film formation cluster 1 And whether or not it is moving properly to the target position without collision. If it is confirmed that the robot 14 can carry out the transportation operation to a plurality of teaching positions without any problem, the transportation of the substrate / mask by the robot 14 is resumed.

As described above, according to the teaching position adjusting method of the present invention, after the robot 14 is caused to collide with other parts of the film formation cluster 1, instead of performing the teaching operation for all of the plurality of teaching positions, Only the position shift amount of the hand unit 24 is measured, and correction for the other teaching positions is performed. As a result, it is possible to greatly shorten the time required for reattaching the robot 14 after the collision.

In the present embodiment, when a positional deviation occurs in the robot hand portion 24 due to a collision or the like, the control for setting the robot hand portion 24 to the origin position is performed and then the position of the mark portion 241 is remeasured The present invention is not limited to this and the robot hand unit 24 may be controlled to set the robot hand unit 24 to the origin position after the robot 14 has been used for a predetermined time or longer even if no collision occurs, 24 can be remeasured. This makes it possible to prevent the robot 14 from colliding with other parts of the deposition clusters 1 due to the deformation of joints or the like due to the continuous use of the robots 14. [

The above-described embodiment shows an example of the present invention, and the present invention is not limited to the configuration of the above-described embodiment, and may be appropriately modified within the scope of the present invention.

1: Tape Clusters
11: Deposition chamber (treatment chamber)
12: mask stock chamber
13: Carrier
14: Robot
15: Pass room
16: buffer chamber
22: shaft portion
23: robot arm arm
24: Robot hand part
25: control means
31: Measuring means
241:

Claims (26)

As a robot system,
A robot including a shaft portion, a robot arm portion having one end rotatably connected to the shaft portion, and a robot hand portion rotatably connected to the other end of the robot arm portion,
Control means for controlling the operation of the robot,
And a measuring means for measuring a position of the robot hand portion in a direction along a rotation axis of the robot hand portion,
Wherein the control means includes a memory portion for storing information on a plurality of teaching positions used for controlling the operation of the robot,
Wherein the control unit controls the robot hand unit based on first information on the position of the robot hand unit in the direction measured by the measuring unit while the robot hand unit is set at a predetermined position, And information on the position of the robot hand portion in the direction with respect to at least two of the information about the teaching position of the robot hand portion. The robot hand according to claim 1, wherein, based on the first information, information on the position in the direction of the robot hand portion in relation to all of the information about the plurality of teaching positions stored in the memory Respectively. The robot system according to claim 1, wherein the control unit stores the first information in the memory unit. The information processing apparatus according to claim 3, wherein the control means controls the robot hand portion in a state in which the first information stored in the memory portion and the control means perform control for setting the robot hand portion to the predetermined position, And adjusts the position of the robot hand portion in the direction based on second information about the position of the robot hand portion in the direction. 5. The robot system according to claim 4, wherein the control means calculates a position shift amount in the direction of the robot hand portion based on the first information and the second information. 6. The information processing apparatus according to claim 5, wherein, when the positional shift amount exceeds a predetermined threshold value, the control unit sets, based on the positional shift amount, at least two of the information on the plurality of teaching positions stored in the memory unit And corrects information about the position of the robot hand unit in the direction. 4. The robot system according to claim 3, wherein the measuring means is installed at a position spaced apart from the robot hand portion set at the predetermined position. 8. The method of claim 7,
Wherein the measuring means is a laser sensor. The robot system according to claim 7, wherein the measuring means is a camera for imaging. 10. The method of claim 9,
Wherein the control means calculates the position of the robot hand portion in the direction based on the degree of focus of the image of the robot hand portion captured by the imaging camera. 6. The method of claim 5,
And the control means calculates the position shift amount by feedback control. 6. The method of claim 5,
Wherein the control means calculates the position shift amount by feedback loop control. The method of claim 3,
Wherein the predetermined position is one of the plurality of teaching positions. The robot system according to claim 13, wherein the teaching position corresponding to the predetermined position is a position at which the robot hand portion is farthest away from the shaft portion in a direction perpendicular to the shaft portion, out of the plurality of teaching positions. A device manufacturing apparatus comprising:
A plurality of chambers,
And a robot system for transporting the carrying object between the plurality of chambers,
Wherein the robot system is a robot system according to any one of claims 1 to 14
Device manufacturing apparatus. 16. The method of claim 15,
The plurality of chambers includes a processing chamber in which processing is performed on a first object to be transferred, a second object carrying chamber in which a second object to be loaded is stored, and a second object to be transferred in the flow direction on the upstream side in the flow direction of the first object, And a buffer chamber on the downstream side in the flow direction,
Wherein a measuring means for measuring a position of the robot hand portion in a direction along a rotation axis of the robot hand portion of the robot system is installed in the pass room. A device manufacturing method comprising:
Preparing a robot system including a robot including a robot hand unit and a control means for controlling the operation of the robot,
Storing a plurality of teaching positions including a plurality of transfer positions to which a substrate used in a device is to be transferred in a memory portion of the control means of the robot system;
Measuring a position of the robot hand in the direction by a measuring means set in a predetermined position and spaced in a direction parallel to a rotating axis of rotation of the robot hand;
Storing the first information on the measured position of the robot hand in the direction in the memory unit;
Measuring the position of the robot hand portion in the direction by the measuring means while the control means performs control for setting the robot hand portion to the predetermined position;
Calculating a position shift amount in the direction of the robot hand unit based on the first information and second information on a re-measured position in the direction of the robot hand unit;
Wherein, when the positional shift amount in the direction exceeds the predetermined threshold value, at least two of the information on the plurality of teaching positions stored in the memory unit , And correcting information on the position of the robot hand portion in the direction
/ RTI &gt; 18. The method of claim 17,
Wherein the predetermined position is one of the plurality of teaching positions. 18. The method of claim 17,
And the step of calculating the position shift amount calculates the position shift amount by feedback control. The device manufacturing method according to claim 17, wherein the step of calculating the position shift amount calculates the position shift amount by feedback loop control. A teaching position adjustment method in a robot system having a robot including a robot hand portion and a control means for controlling the operation of the robot,
Storing a plurality of teaching positions of the robot including a plurality of transfer positions to which a carrying object is to be transferred in a memory section of the control means;
Measuring a position of the robot hand in the direction by a measuring means set in a predetermined position and spaced in a direction parallel to a rotating axis of rotation of the robot hand;
Storing the first information on the measured position of the robot hand in the direction in the memory unit;
Measuring the position of the robot hand portion in the direction by the measuring means while the control means performs control for setting the robot hand portion to the predetermined position;
Calculating a position shift amount in the direction of the robot hand unit based on the first information and second information on a re-measured position in the direction of the robot hand unit;
Wherein, when the positional shift amount in the direction exceeds the predetermined threshold value, at least two of the information on the plurality of teaching positions stored in the memory unit , And correcting information on the position of the robot hand portion in the direction
How to adjust the teaching position. The robot system according to claim 1, wherein at least two of the plurality of teaching positions include information about at least one teaching position different from the predetermined position among the plurality of teaching positions. The robot system according to claim 1, wherein said at least two information includes information about at least two teaching positions different from said predetermined position among said plurality of teaching positions. The robot control apparatus according to claim 6, wherein, when the positional shift amount exceeds a predetermined threshold value, the control means controls the robot to perform a predetermined operation on all of the information on the plurality of teaching positions stored in the memory unit, And corrects information on the position of the hand unit in the direction. A device manufacturing method comprising:
Preparing a robot system including a robot including a robot hand unit and a control means for controlling the operation of the robot,
Storing a plurality of teaching positions including a plurality of transfer positions to which a substrate used in a device is to be transferred in a memory portion of the control means of the robot system;
Measuring a position of the robot hand in the direction by a measuring means set in a predetermined position and spaced in a direction parallel to a rotating axis of rotation of the robot hand;
Wherein at least two pieces of information on the plurality of teaching positions stored in the memory unit are stored in the memory unit in the direction of the robot hand unit based on first information on the measured position of the robot hand unit in the direction And correcting information on the position
/ RTI &gt; A teaching position adjustment method in a robot system having a robot including a robot hand portion and a control means for controlling the operation of the robot,
Storing a plurality of teaching positions of the robot including a plurality of transfer positions to which a carrying object is to be transferred in a memory section of the control means;
Measuring a position of the robot hand in the direction by a measuring means set in a predetermined position and spaced in a direction parallel to a rotating axis of rotation of the robot hand;
Wherein at least two pieces of information on the plurality of teaching positions stored in the memory unit are stored in the memory unit in the direction of the robot hand unit based on first information on the measured position of the robot hand unit in the direction And correcting information on the position
How to adjust the teaching position.

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