CN110153994B

CN110153994B - Method for calculating correction value of industrial robot

Info

Publication number: CN110153994B
Application number: CN201910115019.3A
Authority: CN
Inventors: 矢泽隆之; 尾辻淳; 瀧泽典彦
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Instruments Corp
Priority date: 2018-02-16
Filing date: 2019-02-14
Publication date: 2022-09-27
Anticipated expiration: 2039-02-14
Also published as: JP2019141931A; CN110153994A; KR20190099140A; JP6999444B2; KR102205638B1

Abstract

The invention provides a correction value calculation method for an industrial robot, which can relatively easily calculate a correction value for correcting the deviation of a robot coordinate system of an industrial robot after replacement from the coordinates of a teaching position taught in a teaching task of the industrial robot before replacement. In the correction value calculation method for an industrial robot, in the reference position determination step, the reference value of the encoder is determined for the first arm, the second arm, and the hand based on the result of moving the other member, which is rotatably coupled to the one member, to the reference position. In the correction value calculation step, a hand fork (18) on which a detection panel (80) is mounted is moved to a delivery position in a chamber (6), and a correction value when the first arm section is driven by the motor is calculated from the offset between a reference position at the delivery position and a stop position of the detection panel. The correction value calculation step is repeated, but the first arm section, the second arm section, and the hand perform the same pivotal motion.

Description

Method for calculating correction value of industrial robot

Technical Field

The present invention relates to a correction value calculation method for an industrial robot, which calculates a correction value for correcting an operation of the industrial robot.

Background

Conventionally, an industrial robot for conveying a glass substrate is known (for example, see patent document 1). The industrial robot described in patent document 1 is a horizontal articulated robot used in a manufacturing system incorporated in an organic EL (organic electroluminescence) display, and includes a hand on which a glass substrate is mounted, an arm whose tip end side is rotatably connected to the hand, and a main body portion to which the base end side of the arm is rotatably connected.

The arm includes a first arm portion whose base end side is rotatably coupled to the main body portion and a second arm portion whose base end side is rotatably coupled to a tip end side of the first arm portion. The hand tool includes a hand base rotatably coupled to a distal end side of the second arm portion, and a hand fork fixed to the hand base and having a glass substrate mounted thereon. The industrial robot described in patent document 1 includes a motor for rotating the first arm portion with respect to the main body portion, a motor for rotating the second arm portion with respect to the first arm portion, and a motor for rotating the hand base portion with respect to the second arm portion.

Documents of the prior art

Patent literature

Patent document 1: japanese patent laid-open publication No. 2015-139854

Disclosure of Invention

Technical problem to be solved by the invention

When the industrial robot described in patent document 1 is installed in a manufacturing system such as an organic EL display, teaching work of the industrial robot is generally performed in order to generate an operation program of the industrial robot. Further, for example, when an industrial robot provided in the manufacturing system is replaced or a motor of the industrial robot is replaced, the robot coordinate system of the industrial robot after replacement is offset from the coordinates of the teaching position taught in the teaching task of the industrial robot before replacement. Therefore, even when the industrial robot is replaced or the motor of the industrial robot is replaced, the teaching task of the industrial robot is usually performed again.

On the other hand, if the deviation of the robot coordinate system of the industrial robot after the replacement from the coordinates of the teaching position taught in the teaching task of the industrial robot before the replacement is corrected, it is not necessary to perform the troublesome teaching task again. Therefore, the inventors of the present application have studied a method of calculating a correction value for correcting an offset of a robot coordinate system of an industrial robot after replacement with respect to coordinates of a teaching position taught in a teaching task of the industrial robot before replacement, and correcting the offset. In calculating the correction value for correcting the offset, it is desirable that the correction value can be easily calculated.

Therefore, an object of the present invention is to provide a correction value calculation method for an industrial robot, which can calculate a correction value for correcting a deviation of a robot coordinate system of an industrial robot after replacement from coordinates of a taught position taught in a teaching task of the industrial robot before replacement relatively easily.

Technical scheme for solving problems

In order to solve the above-described problems, the present invention provides a method for calculating a correction value for correcting an operation of an industrial robot, the industrial robot including a main body, a first arm portion having a base end side rotatably connected to the main body, a second arm portion having a base end side rotatably connected to a tip end side of the first arm portion, and a hand having a hand fork having a base end side rotatably connected to a tip end side of the second arm portion and on which a transfer object is loaded, the method comprising: a reference position determining step of determining a reference value of the encoder corresponding to the reference position of the other member based on a value of the encoder at a stop position at which the other member is moved and stopped at the reference position with respect to the one member and a value of the encoder at a position at which the other member is moved from the stop position to the reference position by a positioning jig when the other member is positioned at the reference position, when one of the first arm, the second arm, and the hand is one member and the other is the other member; a robot operation step of driving the first arm, the second arm, and the hand by a motor in a condition reflecting the reference value to set the industrial robot to a temporary reference posture; and a correction value calculation step of operating the industrial robot after the robot operation step to move the fork on which the detection panel is mounted to a transfer position of the object to be conveyed, calculating a correction value when the first arm portion is driven by the motor based on an offset between a reference position of the detection panel and a stop position of the detection panel at the transfer position, repeating movement of the fork from the reference posture to the transfer position and movement from the transfer position to the reference posture, and performing the correction value calculation step a plurality of times to determine the correction value.

In the correction value calculating method of the industrial robot according to the present invention, in the reference position determining step, the reference value of the encoder corresponding to the reference position of the other member is determined for the first arm, the second arm, and the hand based on the value of the encoder at the stop position when the other member rotatably coupled to the one member is moved to the reference position and the value of the encoder for moving the other member from the stop position to the reference position, and then, in the robot operating step, the industrial robot is set to the temporary reference posture on the condition that the reference value is reflected, and in the correction value calculating step, the industrial robot is operated to move the hand fork on which the probe panel is mounted to the delivery position of the object to be conveyed. Next, a correction value for driving the first arm by the motor is calculated based on the offset between the reference position of the detection panel at the delivery position and the stop position of the detection panel. Therefore, even if a complicated and time-consuming teaching task is not actually performed, it is possible to relatively easily calculate a correction value for correcting a deviation of the robot coordinate system of the industrial robot after the replacement from the coordinates of the teaching position taught in the teaching task of the industrial robot before the replacement. In addition, since the correction value calculation step is performed a plurality of times, the accuracy of the correction value can be improved.

In the present invention, the following manner may be adopted: in any one of the plurality of correction value calculation steps, the first arm, the second arm, and the hand all perform the same pivotal motion when the hand fork moves from the reference posture to the delivery position, and the first arm, the second arm, and the hand all perform the same pivotal motion when the hand fork moves from the delivery position to the reference posture. According to this aspect, the correction value is less likely to be affected by backlash of the motor or the reduction mechanism.

In the present invention, the following manner may be adopted: in the correction value calculation step of this time out of the plurality of correction value calculation steps, the correction value obtained in the correction value calculation step of the previous time is reflected, and the arm portion is motor-driven to update the correction value. According to this aspect, the accuracy of the correction value can be improved.

In the present invention, the following manner may be adopted: in the correction value calculating step, the first arm, the second arm, and the hand perform the same turning operation as that performed when the conveyance object is conveyed.

In the present invention, the following manner may be adopted: the robot hand has a plurality of chambers for transferring the conveying object, and moves the hand fork to a transfer position of any one of the plurality of chambers in the correction value calculation step.

In the present invention, the following manner may be adopted: the plurality of chambers include a loading chamber for loading the transport object from the outside, an unloading chamber for unloading the transport object from the outside, and a processing chamber for processing the transport object, and the correction value calculation step includes repeating a first correction value calculation step for moving the hand fork to a transfer position of the transport object in the loading chamber or a transfer position of the transport object in the unloading chamber, and a second correction value calculation step for moving the hand fork to a transfer position of the transport object in the processing chamber.

In the present invention, the following manner may be adopted: in the correction value calculating step, the offset amount is detected based on an image pickup result of the probe panel picked up by a camera.

In the present invention, the following manner may be adopted: as the reference position determining step, a first reference position determining step in which the two members are the first arm portion and the second arm portion and a second reference position determining step in which the two members are the second arm portion and the hand are performed. In the present invention, the following manner may be adopted: and a fork positioning step of positioning the fork on the hand by a positioning jig in a state where the hand base portion is stopped at the reference position with respect to the second arm portion after the reference position determining step and before the correction value calculating step.

Effects of the invention

In the correction value calculating method of the industrial robot according to the present invention, in the reference position determining step, the reference value of the encoder corresponding to the reference position of the other member is determined for the first arm, the second arm, and the hand based on the value of the encoder at the stop position when the other member rotatably coupled to the one member is moved to the reference position and the value of the encoder for moving the other member from the stop position to the reference position, and then, in the robot operating step, the industrial robot is set to the temporary reference posture on the condition that the reference value is reflected, and in the correction value calculating step, the industrial robot is operated to move the hand fork having the probe panel mounted thereon to the transfer position of the conveyance object in the room. Next, a correction value for driving the first arm by the motor is calculated based on the offset between the reference position of the detection panel at the delivery position and the stop position of the detection panel. Therefore, even if a complicated and time-consuming teaching task is not actually performed, it is possible to relatively easily calculate a correction value for correcting a deviation of the robot coordinate system of the industrial robot after the replacement from the coordinates of the teaching position taught in the teaching task of the industrial robot before the replacement. In addition, since the correction value calculation step is performed a plurality of times, the accuracy of the correction value can be improved.

Drawings

Fig. 1 is a diagram of an industrial robot for calculating a correction value by a correction value calculation method for an industrial robot according to an embodiment of the present invention, where (a) is a plan view and (B) is a side view.

Fig. 2 is a plan view showing a state in which the industrial robot shown in fig. 1 is incorporated in a manufacturing system of an organic EL display.

Fig. 3 is a block diagram illustrating a configuration of the industrial robot shown in fig. 1.

Fig. 4 is an explanatory diagram showing operations of the industrial robot when the substrate is carried into and out of the chamber shown in fig. 2.

Fig. 5 is an explanatory diagram showing an operation of the industrial robot when a substrate is loaded into the processing chamber shown in fig. 2.

Fig. 6 is an explanatory diagram showing an operation of the industrial robot when a substrate is carried into the processing chamber shown in fig. 2.

Fig. 7 is an explanatory diagram showing an operation of the industrial robot when a substrate is loaded into the processing chamber shown in fig. 2.

Fig. 8 is an explanatory diagram showing an operation of the industrial robot when a substrate is carried into the processing chamber shown in fig. 2.

Fig. 9 is a view showing a state in which the first positioning jig, the second positioning jig, and the third positioning jig are attached to the industrial robot shown in fig. 1, wherein (a) is a plan view, and (B) is a side view.

Fig. 10(a) is an enlarged view of a portion E of fig. 9(B), (B) is a view showing the first positioning jig and the like from the direction F-F of (a), and (C) is an enlarged view of a portion G of (a).

Fig. 11(a) is an enlarged view of the H portion of fig. 9(B), (B) is a view showing the second positioning jig and the like from the J-J direction of (a), and (C) is an enlarged view of the K portion of (a).

Fig. 12(a) is an enlarged view of the L portion of fig. 9(a), (B) is an enlarged view of the M portion of fig. 9(B), (C) is a view showing the third positioning jig and the like from the N-N direction of (B), and (D) is an enlarged view of the P portion of (B).

Fig. 13 is an explanatory diagram of a state in which a detection panel used in a correction value calculation step of calculating a correction value for the first arm portion shown in fig. 1 is mounted on a fork.

Fig. 14 is a diagram for explaining the operation of the robot in the correction value calculation step of calculating the correction value of the first arm portion shown in fig. 1.

Fig. 15 is an explanatory diagram showing the field of view and the like of the camera in the correction value calculation step of calculating the correction value of the first arm section shown in fig. 1.

Description of the reference numerals

1 · robot (industrial robot), 2 · substrate (transfer object), 5, 6, 7 · chamber, 8 · hand, 9 · arm, 10 · body, 15 · first arm, 16 · second arm, 17 · hand base, 18 · hand fork, 21 · motor (first motor), 22 · motor (second motor), 23 · motor (third motor), 24 · encoder (first encoder), 25 · encoder (second encoder), 26 · encoder (third encoder), 31 · origin sensor (first origin sensor), 32 · origin sensor (second origin sensor), 33 · origin sensor (third origin sensor), 36 · positioning jig (first positioning jig), 37 · positioning jig (second positioning jig), 38 · positioning jig (third positioning jig), 80 DEG detection panel, 86 DEG first part, 87 DEG second part, 88 DEG first camera, 89 DEG second camera, 860 DEG first reference mark, 870 DEG second reference mark, C1 DEG first center of rotation, C2 DEG second center of rotation, C3 DEG third center of rotation.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(construction of Industrial robot)

Fig. 1 is a diagram of an industrial robot 1 that calculates a correction value by a correction value calculation method for an industrial robot according to an embodiment of the present invention, where (a) is a plan view and (B) is a side view. Fig. 2 is a plan view showing a state in which the industrial robot 1 shown in fig. 1 is incorporated in the manufacturing system 3 of the organic EL display. Fig. 3 is a block diagram illustrating the structure of the industrial robot 1 shown in fig. 1. In fig. 1(B) and 2, the support portions provided in the

hand forks

18 and 19 are not shown.

An industrial robot 1 (hereinafter referred to as "robot 1") shown in fig. 1 is a robot for conveying a glass substrate 2 (hereinafter referred to as "substrate 2") for an organic EL display as a conveyance target. As shown in fig. 2, the robot 1 is a horizontal articulated robot used by incorporating a manufacturing system 3 of an organic EL display. The manufacturing system 3 includes a transfer chamber 4 (hereinafter referred to as "chamber 4") disposed at the center and a plurality of chambers 5 to 7 disposed so as to surround the chamber 4.

The chamber 5 is a processing chamber for performing a predetermined process on the substrate 2. In this embodiment, a plurality of chambers 5 are provided. In this embodiment, two processing chambers 51 and 52 and two processing chambers 53 and 54 provided on the opposite side of the processing chambers 51 and 52 with respect to the transfer chamber 4 are provided as the chamber 5. The chamber 6 is, for example, a supply chamber (loading chamber) for accommodating the substrate 2 supplied to the manufacturing system 3, and the chamber 7 is, for example, a discharge chamber (unloading chamber) for accommodating the substrate 2 discharged from the manufacturing system 3. The chambers 4 to 7 are evacuated. A part of the robot 1 is disposed inside the chamber 4. The robot 1 transports the substrate 2 between the plurality of chambers 5 to 7 by entering the chambers 5 to 7 with

hand forks

18, 19 described later constituting the robot 1.

As shown in fig. 1, the robot 1 includes a hand 8 on which the substrate 2 is mounted, an arm 9 to which the hand 8 is rotatably coupled at a distal end side, and a main body 10 to which a proximal end side of the arm 9 is rotatably coupled. The hand 8 and the arm 9 are disposed on the upper side of the main body 10. The main body 10 includes an elevating mechanism for elevating the arm 9 and a housing 13 for accommodating the elevating mechanism. The case 13 is formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disc shape is fixed to an upper end of the housing 13.

As described above, a part of the robot 1 is disposed inside the chamber 4. Specifically, the upper side of the lower end surface of the flange 14 of the robot 1 is disposed inside the chamber 4. That is, the portion of the robot 1 above the lower end surface of the flange 14 is disposed in the vacuum region VR, and the hand 8 and the arm 9 are disposed in the vacuum chamber (in vacuum). On the other hand, a portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmosphere area AR (in the atmosphere).

The arm 9 includes a first arm portion 15 and a second arm portion 16 rotatably connected to each other. The arm 9 of the present embodiment is composed of two arm portions, i.e., a first arm portion 15 and a second arm portion 16. The base end side of the first arm portion 15 is rotatably connected to the main body portion 10. The base end side of the second arm portion 16 is rotatably connected to the tip end side of the first arm portion 15. The hand 8 is rotatably connected to the tip end side of the second arm portion 16. Further, the first arm portion 15 is provided with a weight 28 on the opposite side to the extending direction of the first arm portion 15.

The second arm portion 16 is disposed above the first arm portion 15. The hand 8 is disposed above the second arm 16. The distance between the center of rotation (the first center of rotation C1) of the first arm portion 15 with respect to the main body portion 10 and the center of rotation (the second center of rotation C2) of the second arm portion 16 with respect to the first arm portion 15 is equal to the distance between the center of rotation (the second center of rotation C2) of the second arm portion 16 with respect to the first arm portion 15 and the center of rotation (the third center of rotation C3) of the hand 8 with respect to the second arm portion 16.

The hand 8 includes a hand base 17 rotatably connected to the distal end side of the second arm 16 and

hand forks

18 and 19 on which the substrate 2 is mounted. The hand 8 of the present embodiment includes two hand forks 18 and two hand forks 19. The

hand forks

18 and 19 are formed linearly. The hand fork 18 and the hand fork 19 are formed in the same shape. The two hand forks 18 are arranged in parallel with a predetermined interval therebetween. The hand fork 18 extends in one horizontal direction from the hand base 17. The two hand forks 19 are arranged in parallel with a predetermined interval therebetween. The hand fork 19 extends from the hand base 17 in the opposite direction to the hand fork 18.

The

hand forks

18, 19 are fixed to the hand base 17. Specifically, the

hand forks

18 and 19 are fixed to the hand base 17 by fixing screws. The

hand forks

18 and 19 are formed with insertion holes through which fixing screws are inserted. The insertion hole is a long hole having a longitudinal direction orthogonal to the longitudinal direction of the

hand fork

18, 19, and the fixing position of the

hand fork

18, 19 to the hand base 17 can be adjusted in the direction orthogonal to the longitudinal direction of the

hand fork

18, 19.

In this embodiment, one substrate 2 is mounted on each of the two forks 18. One substrate 2 is mounted on the two forks 19. A positioning member for positioning the mounted substrate 2 is attached to the upper surface of the hand fork 18. A positioning member for positioning the mounted substrate 2 is also attached to the upper surface of the hand fork 19.

In this embodiment, the two forks 18 are provided with a plurality of first supporting portions 181 protruding in directions away from each other, and a plurality of second supporting portions 182 protruding in directions opposite to each other from the two first supporting portions 181 located at both ends of the plurality of first supporting portions 181. Positioning

members

183, 184 for positioning the substrate 2 are provided at the tip end portions of the first support portions 181 and the tip end portions of the second support portions 182, respectively. The hand fork 19 has the same structure, but illustration of the first support portion, the second support portion, and the like is omitted.

The robot 1 includes a motor 21 for rotating the first arm portion 15 with respect to the main body portion 10, a motor 22 for rotating the second arm portion 16 with respect to the first arm portion 15, a motor 23 for rotating the hand base portion 17 with respect to the second arm portion 16, an encoder 24 for detecting a rotation amount of the motor 21, an encoder 25 for detecting a rotation amount of the motor 22, and an encoder 26 for detecting a rotation amount of the motor 23 (see fig. 3).

The encoder 24 is attached to the motor 21. The encoder 25 is attached to the motor 22, and the encoder 26 is attached to the motor 23. The motor 21 and the encoder 24 are disposed inside the main body 10, for example. The

motors

22 and 23 and the

encoders

25 and 26 are disposed inside the first arm portion 15, for example. The motors 21 to 23 are electrically connected to a control unit 27 of the robot 1. The encoders 24 to 26 are also electrically connected to the control unit 27. The motor 21 of the present embodiment is a first motor, the motor 22 is a second motor, and the motor 23 is a third motor. Encoder 24 is a first encoder, encoder 25 is a second encoder, and encoder 26 is a third encoder.

The robot 1 further includes an origin sensor 31 for detecting an origin position of the first arm portion 15 in the rotational direction of the first arm portion 15 with respect to the main body portion 10, an origin sensor 32 for detecting an origin position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15, and an origin sensor 33 for detecting an origin position of the hand base portion 17 in the rotational direction of the hand base portion 17 with respect to the second arm portion 16. The origin sensor 31 of the present embodiment is a first origin sensor, the origin sensor 32 is a second origin sensor, and the origin sensor 33 is a third origin sensor.

The origin sensors 31 to 33 are proximity sensors, for example. Alternatively, the origin sensors 31 to 33 are, for example, optical sensors having a light emitting element and a light receiving element. The origin sensors 31 to 33 are electrically connected to the control unit 27. The origin sensor 31 is fixed to one of the main body 10 and the first arm 15 at a joint portion which is a connection portion between the main body 10 and the first arm 15, and a detection member which is detected by the origin sensor 31 when the first arm 15 is at the origin position is fixed to the other of the main body 10 and the first arm 15.

Similarly, the origin sensor 32 is fixed to one of the first arm 15 and the second arm 16 at a joint portion that is a connection portion between the first arm 15 and the second arm 16, and a detection member that is detected by the origin sensor 32 when the second arm 16 is at the origin position is fixed to the other of the first arm 15 and the second arm 16. Further, the origin sensor 33 is fixed to one of the second arm portion 16 and the hand base portion 17 at a joint portion which is a connection portion between the second arm portion 16 and the hand base portion 17, and a detection member which is detected by the origin sensor 33 when the hand base portion 17 is at the origin position is fixed to the other of the second arm portion 16 and the hand base portion 17.

(overview of the operation of Industrial robot)

Fig. 4 is an explanatory diagram showing the operation of the industrial robot 1 when the substrate 2 is carried in and out of the

chambers

5 and 6 shown in fig. 2. Fig. 5 is an explanatory diagram showing an operation of the industrial robot 1 when the substrate 2 is carried into the processing chamber 51 shown in fig. 2. Fig. 6 is an explanatory diagram illustrating an operation of the industrial robot 1 when the substrate 2 is loaded into the processing chamber 5 shown in fig. 1. Fig. 7 is an explanatory diagram showing an operation of the industrial robot 1 when the substrate 2 is carried into the processing chamber 53 shown in fig. 1. Fig. 8 is an explanatory diagram showing an operation of the industrial robot 1 when the substrate 2 is carried into the processing chamber 54 shown in fig. 1. In fig. 4 to 8, the support portions provided on the

hand forks

18 and 19 are not shown.

The robot 1 drives the

motors

21, 22, and 23 to transfer the substrate 2 between the

chambers

5, 6, and 7. For example, as shown in fig. 4, the robot 1 carries the substrate 2 out of the chamber 6 and carries the substrate 2 into the chamber 7. More specifically, as shown in fig. 4(a), the robot 1 extends the arm 9 to receive the substrate 2 in the chamber 6 with the fork 18 in parallel with the left-right direction. Further, as shown in fig. 4(B), the arm 9 is retracted until the first arm 15 and the second arm 16 are vertically overlapped, and the substrate 2 is carried out from the chamber 6. After rotating the hand 8 by 180 °, the robot 1 extends the arm 9, and carries the substrate 2 into the chamber 7 as shown in fig. 5 (C). When the substrate 2 is carried out from the chamber 6 and when the substrate 2 is carried into the chamber 7, the hand 8 moves linearly on a virtual line parallel to the left-right direction passing through the first rotation center C1 with respect to the third rotation center C3 of the second arm 16 as viewed in the up-down direction. That is, when the substrate 2 is carried out from the chamber 6 and when the substrate 2 is carried into the chamber 7, the hand 8 linearly moves rightward when viewed from the vertical direction. Thus, when the hand 8 moves linearly toward the inside of the

chambers

6 and 7, the first rotation center C1 is located on the extension line of the movement locus of the hand 8 in both the

chambers

6 and 7.

As shown in fig. 5, the robot 1 carries the substrate 2 into the processing chamber 51. At this time, the robot 1 first drives the

motors

21, 22, and 23 from the state in which the arm 9 is retracted as shown in fig. 5(a), rotates the hand 8, the first arm 15, and the second arm 16 so that the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the rear end side of the hand 8, and substantially aligns the third rotation center C3 with the center of the processing chamber 51 in the left-right direction as shown in fig. 5 (B). Then, the robot 1 extends the arm 9, and carries the substrate 2 into the processing chamber 51 as shown in fig. 5 (C). At this time, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the processing chamber 51 in the left-right direction when viewed from the up-down direction.

As shown in fig. 6, the robot 1 carries the substrate 2 into the processing chamber 52. At this time, the robot 1 first drives the

motors

21, 22, and 23 from the state in which the arm 9 is retracted as shown in fig. 6(a), rotates the hand 8, the first arm 15, and the second arm 16 so that the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the rear end side of the hand 8, and substantially aligns the third rotation center C3 with the center of the processing chamber 52 in the left-right direction as shown in fig. 6 (B). Then, the robot 1 extends the arm 9, and carries the substrate 2 into the processing chamber 52 as shown in fig. 6 (C). At this time, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the processing chamber 52 in the left-right direction when viewed from the up-down direction.

In this embodiment, each of the processing chambers 51 and 52 is a second chamber in which the first rotation center C1 is located at a position laterally offset from the extension line of the movement locus of the hand 8 when the hand 8 moves linearly toward the inside of the chambers 51 and 52, and the second rotation center C2 is located closer to the traveling direction side of the hand 8 (the processing chamber 51 side or the processing chamber 52 side) than the first rotation center C1 and the third rotation center C3 as shown in fig. 6B.

As shown in fig. 7, the robot 1 carries the substrate 2 into the processing chamber 53. At this time, the robot 1 first drives the

motors

21, 22, and 23 from the state in which the arm 9 is retracted as shown in fig. 7(a), rotates the hand 8, the first arm 15, and the second arm 16 so that the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the front end side of the hand 8, and substantially aligns the third rotation center C3 with the center of the processing chamber 53 in the left-right direction as shown in fig. 7 (B). Then, the robot 1 extends the arm 9 and carries the substrate 2 into the processing chamber 53 as shown in fig. 7 (C). At this time, the third rotation center C3 moves linearly on a virtual line parallel to the front-rear direction passing through the center of the processing chamber 53 in the left-right direction when viewed from the up-down direction.

As shown in fig. 8, the robot 1 carries the substrate 2 into the processing chamber 54. At this time, the robot 1 first drives the

motors

21, 22, and 23 from the state in which the arm 9 is retracted as shown in fig. 8(a), rotates the hand 8, the first arm 15, and the second arm 16 so that the hand fork 18 is parallel to the front-rear direction and the substrate 2 is disposed on the front end side of the hand 8, and substantially aligns the third rotation center C3 with the center of the processing chamber 54 in the left-right direction as shown in fig. 8 (B). Then, the robot 1 extends the arm 9, and carries the substrate 2 into the chamber 54 as shown in fig. 8 (C). At this time, the third rotation center C3 linearly moves on a virtual line parallel to the front-rear direction passing through the center of the processing chamber 54 in the left-right direction when viewed from the up-down direction.

In this embodiment, each of the processing chambers 53 and 54 is a third chamber in which the third rotation center C3 is always located on the side of the second rotation center C2 in the traveling direction of the hand 8 (the processing chamber 53 side or the processing chamber 54 side) and which does not pass through a process in which, when the hand 8 moves linearly toward the chambers 51 and 52, the first rotation center C1 is located at a position laterally offset from the extension line of the movement locus of the hand 8 and the second rotation center C2 is located forward of the first rotation center C1 and the third rotation center C3.

The same operation is performed when the substrate 2 is conveyed by the hand fork 19. When the substrate 2 is carried out from the chamber 5, the operation is reversed from the above description.

(method of calculating correction value of Industrial robot)

Fig. 9 is a view showing a state in which the positioning jigs 36 to 38 are attached to the robot 1 shown in fig. 1, wherein (a) is a plan view and (B) is a side view. Fig. 10(a) is an enlarged view of a portion E of fig. 9(B), fig. 10 (B) is a view showing the positioning jig 36 and the like from the direction F-F of fig. 10(a), and fig. 10(C) is an enlarged view of a portion G of fig. 10 (a). Fig. 11(a) is an enlarged view of the H portion of fig. 9(B), fig. 11(B) is a view showing the positioning jig 37 and the like from the J-J direction of fig. 11(a), and fig. 11(C) is an enlarged view of the K portion of fig. 11 (a). Fig. 12(a) is an enlarged view of the L portion of fig. 9(a), fig. 12(B) is an enlarged view of the M portion of fig. 9(B), fig. 12(C) is a view showing the positioning jig 38 and the like from the N-N direction of fig. 12(B), and fig. 12(D) is an enlarged view of the P portion of fig. 12 (B).

When the robot 1 is installed in the manufacturing system 3, a teaching task of the robot 1 is performed to generate an operation program of the robot 1. Further, for example, when the robot 1 provided in the manufacturing system 3 is replaced, the robot coordinate system of the robot 1 after the replacement is shifted from the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement, and therefore, it is necessary to perform the teaching task of the robot 1 again.

On the other hand, if the deviation of the robot coordinate system of the robot 1 after the replacement from the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement is corrected, it is not necessary to perform the troublesome teaching task again. In this embodiment, when the robot 1 installed in the manufacturing system 3 is replaced, a correction value for correcting a deviation of the robot coordinate system of the robot 1 after the replacement from the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement is calculated, so that it is not necessary to perform a troublesome teaching task again after the replacement of the robot 1. That is, when one of the two rotatably coupled members of the first arm 15, the second arm 16, and the hand 8 is one member and the other is the other member, a reference position determination step of determining a reference value of the encoder corresponding to the reference position of the other member is performed based on a value of the encoder at a stop position at which the other member is moved to stop at the reference position of the other member with respect to the one member and a value of the encoder at a position at which the other member is positioned by the positioning jig from the stop position to the reference position, and then a correction value for correcting the operation of the robot 1 after the replacement is calculated. A method of calculating the correction value will be described below.

In the following description, a predetermined reference position of the second arm portion 16 with respect to the rotation direction of the first arm portion 15 is set as a first reference position, a predetermined reference position of the hand base portion 17 with respect to the rotation direction of the second arm portion 16 is set as a second reference position, a predetermined reference position of the hand fork 18 with respect to the hand base portion 17 in the direction orthogonal to the longitudinal direction is set as a third reference position, and a predetermined reference position of the first arm portion 15 with respect to the rotation direction of the main body portion 10 is set as a fourth reference position.

In this embodiment, when the second arm portion 16 is at the first reference position, the first arm portion 15 and the second arm portion 16 overlap in the vertical direction as shown in fig. 9. Specifically, when the second arm portion 16 is at the first reference position, the first arm portion 15 and the second arm portion 16 are vertically overlapped such that the longitudinal direction of the first arm portion 15 and the longitudinal direction of the second arm portion 16 coincide with each other when viewed from the vertical direction. In this embodiment, the origin position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15 coincides with the first reference position.

When the hand base 17 is at the second reference position, the second arm 16 and the hand fork 18 are overlapped with each other in the vertical direction as shown in fig. 9. Specifically, when the hand base 17 is at the second reference position, the second arm portion 16 and the hand fork 18 are vertically overlapped such that the longitudinal direction of the second arm portion 16 and the longitudinal direction of the hand fork 18 coincide with each other when viewed from the vertical direction. In this embodiment, a position where the hand base 17 is rotated by 90 ° from the origin position of the hand base 17 in the rotational direction of the second arm portion 16 is set as the second reference position.

The fourth reference position may be the same as the origin position of the first arm portion 15 in the rotational direction of the first arm portion 15 with respect to the main body portion 10, and a position where the first arm portion 15 is rotated by a predetermined angle from the origin position of the first arm portion 15 in the rotational direction of the first arm portion 15 with respect to the main body portion 10 may be the fourth reference position.

In addition, in the present embodiment, a positioning jig 36 for positioning the second arm portion 16 at the first reference position, a positioning jig 37 for positioning the hand base portion 17 at the second reference position, and a positioning jig 38 for positioning the hand fork 18 at the third reference position are used. The positioning jig 36 of the present embodiment is a first positioning jig, the positioning jig 37 is a second positioning jig, and the positioning jig 38 is a third positioning jig. The positioning jig 38 is also used when positioning the hand fork 19 at a predetermined reference position of the hand fork 19 with respect to the hand base 17 in a direction orthogonal to the longitudinal direction of the hand fork 19.

As shown in fig. 10, the positioning jig 36 includes a fixing member 41 fixed to the first arm portion 15 and a pin 42. The fixing member 41 is fixed to a side surface of the base end of the first arm portion 15. The fixing member 41 is formed with a through hole 41a into which the pin 42 is inserted. Further, an insertion hole 16a into which the pin 42 is inserted is formed in a side surface of the tip end of the second arm portion 16. When the pin 42 inserted into the through hole 41a of the fixing member 41 is inserted into the insertion hole 16a, the second arm portion 16 is positioned strictly at the first reference position. The fixing member 41 of the present embodiment is a first fixing member, the pin 42 is a first pin, the insertion hole 16a is a first insertion hole, and the through hole 41a is a first through hole.

As shown in fig. 11, the positioning jig 37 includes fixing

members

43 and 44 fixed to the first arm portion 15, and a pin 45. The fixing member 43 is fixed to a side surface of the base end of the first arm portion 15. The fixing member 44 is fixed to a side surface of the fixing member 43. The fixing member 43 is formed with a groove portion for preventing interference with the fixing member 41. The front end surface of the screw 46 for adjusting the vertical position of the fixing member 44 with respect to the fixing member 43 is in contact with the bottom surface of the fixing member 44. The screw 46 is screwed to a screw holding member 47 fixed to a lower end surface of the fixing member 43.

The fixing member 44 is formed with a through hole 44a into which the pin 45 is inserted. In addition, an insertion hole 17a into which the pin 45 is inserted is formed in a side surface of the hand base 17. When the pin 45 inserted into the through hole 44a of the fixing member 44 is inserted into the insertion hole 17a, the hand base 17 is strictly positioned at the second reference position. The fixing

members

43 and 44 of the present embodiment are second fixing members, the pin 45 is a second pin, the insertion hole 17a is a second insertion hole, and the through hole 44a is a second through hole.

As shown in fig. 12, the positioning jig 38 includes fixing

members

48 and 49 fixed to the two forks 18, and a pin 50. The fixing member 48 is fixed to the upper surfaces of the two hand forks 18. The fixing member 49 is fixed to the lower surface of the fixing member 48. The fixing member 49 is formed with a through hole 49a into which the pin 50 is inserted. Further, an insertion hole 16b into which the pin 50 is inserted is formed in a side surface of the base end of the second arm portion 16. When the pin 50 inserted into the through hole 49a of the fixing member 49 is inserted into the insertion hole 16b, the two yokes 18 are strictly positioned at the third reference position. The fixing

members

48 and 49 of the present embodiment are third fixing members, the pin 50 is a third pin, the insertion hole 16b is a third insertion hole, and the through hole 49a is a third through hole.

For example, when the robot 1 provided in the manufacturing system 3 is replaced, first, the second arm portion 16 is rotated to the first reference position (origin position) based on the detection result of the origin sensor 32. That is, the second arm portion 16 is rotated and stopped based on the detection result of the origin sensor 32 to stop the second arm portion 16 at the first reference position.

In addition, the hand base 17 is rotated to the second reference position (the position rotated by 90 ° from the origin position) based on the detection result of the origin sensor 33 and the detection result of the encoder 26. For example, after the hand base 17 is rotated to the origin position based on the detection result of the origin sensor 33, the hand base 17 is rotated from the origin position to the second reference position based on the detection result of the encoder 26. That is, the hand base portion 17 is rotated and stopped based on the detection result of the origin sensor 33 and the detection result of the encoder 26 to stop the hand base portion 17 at the second reference position.

Then, the fixing

members

41, 43, and 44 are fixed to the first arm portion 15, and the fixing

members

48 and 49 are fixed to the two hand forks 18. Further, strictly speaking, the second arm portion 16 that is turned to the first reference position based on the detection result of the origin sensor 32 is slightly deviated from the first reference position. Also, strictly speaking, the hand base portion 17 that has been rotated to the second reference position based on the detection result of the origin sensor 33 and the detection result of the encoder 26 is slightly deviated from the second reference position.

Then, the second arm portion 16 is rotated with respect to the first arm portion 15 to a position where the pin 42 inserted into the through hole 41a of the fixing member 41 is fitted into the insertion hole 16a, the pin 42 is inserted into the insertion hole 16a, and the second arm portion 16 is positioned strictly at the first reference position. The encoder 25 detects the rotation amount of the motor 22 at this time, and the control unit 27 determines the first reference position of the second arm 16 using the detection result of the encoder 25.

That is, the first reference position is determined based on the detection result of the encoder 25 and the value of the encoder 25 when the second arm portion 16 is stopped at the first stop position (first reference position determination step), and the detection result of the encoder 25 is a result of rotating the second arm portion 16 from the first stop position, which is the stop position of the second arm portion 16 when the second arm portion 16 is stopped at the first reference position by stopping the second arm portion 16 based on the detection result of the origin sensor 32, to the position where the second arm portion 16 is positioned at the first reference position by the positioning jig 36.

Then, in a state where the second arm portion 16 is arranged at the first reference position determined in the first reference position determining step, the hand base portion 17 is rotated with respect to the second arm portion 16 to a position where the pin 45 inserted into the through hole 44a of the fixing member 44 is fitted into the insertion hole 17a, and the pin 45 is inserted into the insertion hole 17a so that the hand base portion 17 is positioned at the second reference position strictly. The encoder 26 detects the rotation amount of the motor 23 at this time, and the control unit 27 determines the second reference position of the hand base 17 using the detection result of the encoder 26.

That is, in a state where the second arm portion 16 is arranged at the first reference position determined in the first reference position determining step, the second reference position is determined based on the detection result of the encoder 26 when the base portion 17 is rotated from the second stop position, which is the stop position of the base portion 17 when the base portion 17 is stopped based on the detection result of the origin sensor 33 and the detection result of the encoder 26 in order to stop the base portion 17 at the second reference position, and the value of the encoder 26 when the base portion 17 is stopped at the second stop position (second reference position determining step).

Then, in a state where the second arm portion 16 is disposed at the first reference position determined in the first reference position determining step and the hand base portion 17 is disposed at the second reference position determined in the second reference position determining step, the two hand forks 18 are moved relative to the hand base portion 17 in a direction orthogonal to the longitudinal direction of the hand fork 18 to a position where the pin 50 inserted into the through hole 49a of the fixing member 49 is fitted into the insertion hole 16b, the pin 50 is inserted into the insertion hole 16b, and the two hand forks 18 are positioned at the third reference position.

That is, in a state where the second arm portion 16 is disposed at the first reference position determined in the first reference position determining step and the hand base portion 17 is disposed at the second reference position determined in the second reference position determining step, the two hand forks 18 are positioned by the positioning jig 38 (hand fork positioning step). The positioned hand fork 18 is fixed to the hand base 17 by screws.

Then, at least the positioning jigs 37, 38 are detached, and at the same time, the hand base 17 is rotated 180 ° with respect to the second arm portion 16. In this state, the fixing

members

48 and 49 are fixed to the two hand forks 19. The two hand forks 19 are moved relative to the hand base 17 in a direction perpendicular to the longitudinal direction of the hand forks 19 until the pins 50 inserted into the through holes 49a of the fixing member 49 are fitted into the insertion holes 16b, and the pins 50 are inserted into the insertion holes 16b to position the two hand forks 19 at predetermined reference positions. The positioned hand fork 19 is fixed to the hand base 17 by screws.

(first correction value calculating step in Chamber 6 (first Chamber))

Fig. 13 is an explanatory diagram of a state in which the detection panel 80 used in the correction value calculation step of calculating the correction value of the first arm portion 15 shown in fig. 1 is mounted on the hand fork 18, where (a) is a plan view and (B) is a cross-sectional view. Fig. 14 is a diagram for explaining the operation of the robot 1 in the correction value calculation step of calculating the correction value of the first arm part 15 shown in fig. 1. Fig. 15 is an explanatory diagram showing the field of view of the camera and the like in the correction value calculation step of calculating the correction value of the first arm section 15 shown in fig. 1.

In this embodiment, an explanatory diagram of a correction value calculation step for calculating a correction value for the first arm portion 15 of the robot 1 is shown. In this embodiment, when the correction value calculating step is performed after the first reference position specifying step and the second reference position specifying step, as shown in fig. 13, the detection panel 80 is mounted on the two forks 18 (panel mounting step).

The detection panel 80 is a light-shielding panel used for calculating the correction value. In this embodiment, since the object to be conveyed is a rectangular substrate 2, the detection panel 80 is a plate-like member extending so as to connect two

corners

2a and 2b located diagonally when the substrate 2 is mounted on the hand fork 18. More specifically, the detection panel 80 includes a first portion 81 extending linearly along the fork 18, a second portion 82 extending obliquely from the first portion 81 to a position corresponding to the angle 2a when the substrate 2 is loaded on the fork 18, and a third portion 83 extending obliquely from the first portion 81 to a position corresponding to the angle 2b when the substrate 2 is loaded on the fork 18.

The detection panel 80 is mounted on the two forks 18 in a state of being positioned on the upper surfaces of the forks 18. Specifically, in the correction value calculating step, the positioning member 29 is fixed to each of the plurality of convex receiving portions 185 for receiving the substrate 2 from below by screws or the like in the hand fork 18. The positioning member 29 is provided with a positioning projection 290 fitted into the positioning hole 84 of the detection panel 80, and the detection panel 80 is positioned by the positioning projection 290.

In this state, the first detection target portions 821 and the second detection target portions 831 formed in the rectangular shape at the end portions of the second portion 82 and the third portion 83 of the detection panel 80 overlap the edges of the

corners

2a and 2b of the substrate 2 when the substrate 2 is mounted on the fork 18.

Next, in order to stop the first arm portion 15 at the fourth reference position, the motor 21 is driven and controlled based on the detection result of the origin sensor 31 or the detection result of the origin sensor 31 and the detection result of the encoder 24, with respect to the third stop position which is the stop position of the first arm portion 15 when the first arm portion 15 is stopped, the motor 22 is driven and controlled based on the first reference position determined in the first reference position determining step, and the motor 23 is driven and controlled based on the second reference position determined in the second reference position determining step, so that the robot 1 is set to the temporary reference posture (robot operating step).

That is, the motor 21 is driven and controlled with reference to the third stop position, the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determining step, and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determining step, so that the robot 1 moves to the temporary home position. In this embodiment, for example, a state in which the first arm portion 15 is stopped at the third stop position, the second arm portion 16 is stopped at the first reference position, and the hand base portion 17 is stopped at a position rotated by 90 ° from the second reference position becomes a temporary home position (temporary reference posture) of the robot 1. This home position is the state shown in fig. 4 (B).

When the origin position of the first arm portion 15 in the rotational direction of the first arm portion 15 with respect to the main body portion 10 coincides with the fourth reference position, the first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 in the robot operation step so that the first arm portion 15 is stopped at the fourth reference position. Further, when the first arm portion 15 reaches the fourth reference position from the position where the first arm portion 15 is rotated by a predetermined angle with respect to the origin position of the first arm portion 15 in the rotation direction of the main body portion 10, the first arm portion 15 is rotated and stopped based on the detection result of the origin sensor 31 and the detection result of the encoder 24 so that the first arm portion 15 is stopped at the fourth reference position in the robot operation step. In addition, the third stop position is slightly deviated from the fourth reference position in strict terms. Before the robot operation step, the positioning jigs 36 and 38 are removed.

Then, the robot 1 is operated to move the hand fork 18 to the delivery position of the substrate 2 (hand moving step). For example, as shown in fig. 14(a), the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6. Specifically, the operation shown by arrow 6a in fig. 4 is performed from the state shown in fig. 4(B), and as shown in fig. 4(a), the arm 9 is extended, and the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6.

Here, as shown in fig. 15, a reference member to which a reference mark indicating a fifth reference position is attached and a camera are disposed in the chamber 6. In this embodiment, the positions of the two detection sections (the first detection section 821 and the second detection section 831) of the detection panel 80 are compared with the reference mark. Therefore, a light-shielding first member 86 to which the first reference mark 860 is attached, a light-shielding second member 87 to which the second reference mark 870 is attached, a first camera 88 to which the first reference mark 860 and the first detection target portion 821 enter the field of view 88a, and a second camera 89 to which the second reference mark 870 and the second detection target portion 831 enter the field of view 89a are provided in the chamber 6.

In this embodiment, the first member 86 and the second member 87 are light-shielding plate-like members and are fixed to the inner wall or the like of the chamber 6. The first reference mark 860 and the second reference mark 870 are holes that penetrate the first member 86 and the second member 87, respectively. In this embodiment, the portions of the first member 86 and the second member 87 where the first fiducial mark 860 and the second fiducial mark 870 are formed are thin plates.

Two first fiducial markers 860 and two second fiducial markers 870 indicate the fifth reference position. Specifically, when the robot 1 before replacement, in which the detection panel 80 is mounted on the hand fork 18, is operated and the hand fork 18 is moved to the transfer position of the board 2 in the chamber 6 and stopped, the positional relationship between the first reference mark 860 and the first detected portion 821 in the imaging result of the first camera 88 and the positional relationship between the second reference mark 870 and the second detected portion 831 in the imaging result of the second camera 89 are set as the fifth reference position in the rotational direction of the first arm portion 15 with respect to the main body portion 10. Here, the rotation direction and rotation angle of the first arm 15 corresponding to the amount of deviation of the first reference mark 860 and the first detected part 821 from the predetermined positional relationship in the result of imaging by the first camera 88 and the amount of deviation of the second reference mark 870 and the second detected part 831 from the predetermined positional relationship in the result of imaging by the second camera 89 are stored in the control part 27 as values corresponding to the detection value in the encoder 24.

Therefore, in the correction value calculation step, the control unit 27 can calculate the correction value based on the detection value of the encoder 24 corresponding to the offset amount without rotating the first arm portion 15 with respect to the main body portion 10 until the first reference mark 860 and the first detected portion 821 have a predetermined positional relationship in the imaging result of the first camera 88 and the second reference mark 870 and the second detected portion 831 have a predetermined positional relationship in the imaging result of the second camera 89.

That is, as shown in fig. 14(a), when the hand fork 18 is moved to the transfer position of the substrate 2 in the chamber 6, the first reference mark 860 and the first detection section 821 are displaced from a predetermined positional relationship in the imaging result of the first camera 88, and the second reference mark 870 and the second detection section 831 are displaced from a predetermined positional relationship in the imaging result of the second camera 89. In this case, in the correction value calculating step, as shown in fig. 14(B), the value of the encoder 24 when the drive motor 21 rotates the first arm portion 15 with respect to the main body portion 10 is calculated and used as the correction value until the first reference mark 860 and the first detection portion 821 have a predetermined positional relationship, and the second reference mark 870 and the second detection portion 831 have a predetermined positional relationship.

Then, the motor 21 is driven and controlled while reflecting the correction value calculated in the correction value calculation step, the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determination step, and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determination step, so that the robot 1 returns to the temporary home position. Specifically, the operation shown by arrow 6B in fig. 4 is performed from the state shown in fig. 4(a), and the operation returns to the temporary home position as shown in fig. 4 (B).

Then, the robot 1 is operated again, and the hand fork 18 is moved to the delivery position of the substrate 2. Then, a new correction value is calculated based on the imaging result of the first camera 88 and the imaging result of the second camera 89 again, the positional relationship between the first reference mark 860 and the first detected part 821, and the positional relationship between the second reference mark 870 and the second detected part 831, and then the new correction value (the current correction value) is reflected to drive and control the

motors

21, 22, and 23 in the same manner as in the previous operation, thereby returning the robot 1 to the temporary home position. Therefore, the correction value is sequentially updated.

This operation is repeated, and when the latest correction value or the offset amount (the offset amount between the first reference mark 860 and the first detected part 821 and the offset amount between the second reference mark 870 and the second detected part 831) is equal to or less than a predetermined threshold value, the correction value is determined, and the determined correction value is reflected, and the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determining step, and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determining step, and the position to which the robot 1 is returned is set to the normal home position.

When the above-described operations are repeated, in any of the steps, the robot 1 is caused to perform the same turning operation as the operation shown in fig. 4 with respect to the first arm portion 15, the second arm portion 16, and the hand 8 in the outward path for moving the hand fork 18 from the temporary home position to the transfer position of the substrate 2 in the chamber 6 and in the return path for returning the hand fork 18 to the temporary home position from the state where the hand fork 18 is located at the transfer position of the substrate 2 in the chamber 6. Therefore, in the correction value calculation step, the influence of backlash of the motor or the speed reduction mechanism that reduces the rotation speed of the motor and transmits the rotation speed to the arm or the like is less likely to be exerted on the correction value.

In this embodiment, when the first reference mark 860 and the first detection part 821 are out of the predetermined positional relationship in the imaging result of the first camera 88 and the second reference mark 870 and the second detection part 831 are out of the predetermined positional relationship in the imaging result of the second camera 89, the value of the encoder 24 corresponding to the offset amount is calculated as the correction value without rotating the first arm part 15 with respect to the main body part 10. However, after the direction of the displacement is detected based on the imaging result of the first camera 88 and the imaging result of the second camera 89, as shown in fig. 14(B), the first arm portion 15 may be rotated with respect to the main body portion 10 so as to cancel the displacement, and the correction value may be calculated based on the detection amount of the encoder 24 at that time. In any case, the correction value calculation process described above may be performed in the chamber 7.

(second correction value calculating step in the processing chamber 51 (second chamber))

In this embodiment, after the correction value calculation step in the chamber 6 is performed, the same correction value calculation step is performed in the processing chamber 51. Therefore, similarly to the chamber 6, the processing chamber 51 is also provided with a first member 86 to which the first reference mark 860 is attached, a second member 87 to which the second reference mark 870 is attached, a first camera 88 to which the first reference mark 860 and the first detection part 821 are brought into view, and a second camera 89 to which the second reference mark 870 and the second detection part 831 are brought into view.

Therefore, substantially the same as the correction value calculation step in the chamber 6, as shown in fig. 5(a), the hand fork 18 is moved from the state in which the robot 1 is in the home position to the transfer position of the substrate 2 in the processing chamber 51 via the state shown in fig. 5(B), and the correction value in the chamber 51 is calculated.

Then, the motor 21 is driven and controlled so that the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determining step and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determining step, while reflecting the correction value in the processing chamber 51 calculated in the correction value calculating step, so that the robot 1 returns to the temporary home position shown in fig. 5(a) via the state shown in fig. 5 (B).

Then, the robot 1 is operated again, the hand fork 18 is moved to the transfer position of the substrate 2 in the processing chamber 51, a new correction value is calculated, and then the robot 1 is returned to the temporary home position by reflecting the new correction value (the current correction value). This operation is repeated, and the correction value is determined when the latest correction value or the like becomes equal to or less than a predetermined threshold value.

When the above-described operations are repeated, in any of the steps, the robot 1 is caused to perform the same turning operation as the operation shown in fig. 5 with respect to the first arm portion 15, the second arm portion 16, and the hand 8 in the outward path for moving the hand fork 18 from the temporary home position to the transfer position of the substrate 2 in the processing chamber 51 and in the return path for returning the hand fork 18 to the temporary home position in the state where the hand fork 18 is located at the transfer position of the substrate 2 in the processing chamber 51. Therefore, in the correction value calculation step, the influence of backlash of the motor or the speed reduction mechanism that reduces the rotation speed of the motor and transmits the rotation speed to the arm or the like is less likely to be exerted on the correction value.

(third correction value calculating step in the processing chamber 53 (third chamber))

In this embodiment, after the correction value calculation step in the chamber 6 and the correction value calculation step in the processing chamber 51 are performed, the same correction value calculation step is also performed in the processing chamber 53. Therefore, similarly to the chamber 6, the processing chamber 53 is also provided with a first member 86 having the first reference mark 860, a second member 87 having the second reference mark 870, a first camera 88 for allowing the first reference mark 860 and the first detection target portion 821 to enter the field of view, and a second camera 89 for allowing the second reference mark 870 and the second detection target portion 831 to enter the field of view.

Therefore, substantially the same as the correction value calculation step in the chamber 6, as shown in fig. 7(a), the hand fork 18 is moved from the state in which the robot 1 is at the home position to the transfer position of the substrate 2 in the processing chamber 53 through the state shown in fig. 7(B), and the correction value in the chamber 53 is calculated.

Then, the motor 21 is driven and controlled so that the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determining step and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determining step, while reflecting the correction value in the processing chamber 53 calculated in the correction value calculating step, so that the robot 1 returns to the temporary home position shown in fig. 7(a) via the state shown in fig. 7 (B).

Then, the robot 1 is operated again, the hand fork 18 is moved to the transfer position of the substrate 2 in the processing chamber 53, a new correction value is calculated, and then the robot 1 is returned to the temporary home position by reflecting the new correction value (the current correction value). This operation is repeated, and the correction value is determined when the latest correction value or the like becomes equal to or less than a predetermined threshold value.

When the above-described operations are repeated, in any of the steps, in the return path for moving the hand fork 18 from the temporary home position to the delivery position of the substrate 2 in the processing chamber 53 and returning the hand fork 18 to the temporary home position from the state where the hand fork 18 is located at the delivery position of the substrate 2 in the processing chamber 53, the robot 1 is caused to perform the same turning operation as the operation shown in fig. 7 with respect to the first arm portion 15, the second arm portion 16, and the hand 8. Therefore, in the correction value calculation step, the influence of backlash of the motor or the speed reduction mechanism that reduces the rotation speed of the motor and transmits the rotation speed to the arm or the like is less likely to be exerted on the correction value.

(adjustment of hand fork 19)

In this embodiment, after the correction value calculation step in the hand fork 18, the hand base 17 is rotated by 180 °, the detection panel 80 is transferred to the two hand forks 19, and then the hand forks 19 are moved to the transfer position of the substrate 2 in the chamber 6. At this time, when the first reference mark 860 and the first detected part 821 are displaced from the predetermined positional relationship in the imaging result of the first camera 88 and the second reference mark 870 and the second detected part 831 are displaced from the predetermined positional relationship in the imaging result of the second camera 89, the fixing position of the fork 19 to the base unit 17 in the direction orthogonal to the longitudinal direction of the fork 19 is adjusted by the positioning jig 38 so that the first reference mark 860 and the first detected part 821 are in the predetermined positional relationship and the second reference mark 870 and the second detected part 831 are in the predetermined positional relationship.

(main effects of the present embodiment)

As described above, in the present embodiment, the first reference position, which is the reference position of the second arm portion 16 in the rotational direction of the second arm portion 16 with respect to the first arm portion 15, is determined using the positioning jig 36 in the first reference position determining step, the second reference position, which is the reference position of the hand base portion 17 in the rotational direction of the hand base portion 17 with respect to the second arm portion 16, is determined using the positioning jig 37 in the second reference position determining step, and the hand fork 18 is positioned at the third reference position, which is the reference position of the hand fork 18 with respect to the hand base portion 17 in the direction orthogonal to the longitudinal direction of the hand fork 18, by the positioning jig 38 in the hand fork positioning step.

In the present embodiment, in the robot operation step thereafter, the motor 22 is driven and controlled with reference to the first reference position determined in the first reference position determining step, and the motor 23 is driven and controlled with reference to the second reference position determined in the second reference position determining step, so that the robot 1 is set to the temporary reference posture, and then the hand fork 18 is moved to the chamber 6, the processing chamber 51, and the processing chamber 53 in the hand moving step, and the correction value calculating step is performed to calculate the correction value for controlling the motor 21. That is, in this embodiment, in a state where the second arm portion 16, the hand base portion 17, and the hand fork 18 are aligned with the predetermined reference positions, the hand fork 18 is moved to the chamber 6, the processing chamber 51, and the processing chamber 53, and the correction value calculation step is performed to calculate the correction value for controlling the motor 21 that drives the first arm portion 15.

In this embodiment, the robot 1 before replacement in which the probe panel 80 is mounted on the fork 18 is operated, and when the fork 18 is moved to the chamber 6, the processing chamber 51, and the processing chamber 53, the positions corresponding to the first detected part 821 and the second detected part 831 of the probe panel 80 in the rotational direction of the first arm part 15 with respect to the main body part 10 become the fifth reference position. Therefore, in this embodiment, by calculating the correction value for controlling the motor 21 in the correction value calculation step, the correction value for correcting the deviation of the robot coordinate system of the robot 1 after the replacement from the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement can be calculated.

That is, in the present embodiment, by calculating the correction value based on the fifth reference position and the offset amount in the rotation direction of the first arm portion 15 with respect to the main body portion 10 of the first detected part 821 and the second detected part 831 of the probe panel 80, it is possible to calculate the correction value for correcting the offset of the robot coordinate system of the robot 1 after the replacement with respect to the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement. Therefore, in the present embodiment, it is possible to relatively easily calculate a correction value for correcting a deviation of the robot coordinate system of the robot 1 after the replacement from the coordinates of the teaching position taught in the teaching task of the robot 1 before the replacement.

In this embodiment, since the correction value calculation step is performed in each of the chamber 6, the processing chamber 51, and the processing chamber 53, the accuracy of the correction value can be improved.

In this embodiment, the correction value calculation step uses the light-shielding probe panel 80 and the reference marks (the first reference mark 860 and the second reference mark 870) formed by holes in the light-shielding members (the first member 86 and the second member 87), and therefore is suitable for imaging by the cameras (the first camera 88 and the second camera 89). In addition, if the imaging result of the cameras (the first camera 88 and the second camera 89) is used, the amount of displacement of the detection panel 80 from the fifth reference position can be obtained without rotating the first arm portion 15 with respect to the main body portion 10. In addition, if the imaging result of the cameras (the first camera 88 and the second camera 89) is used, the operation amount of the encoder 24 when the first arm portion 15 is rotated with respect to the main body portion 10 can be obtained without rotating the first arm portion 15 with respect to the main body portion 10, and the operation amount can be calculated and used as a correction value.

In the correction value calculation step, when the operation of moving the hand fork 18 to the chamber 6, the processing chamber 51, and the processing chamber 53 and the operation of returning the hand fork from the chamber 6, the processing chamber 51, and the processing chamber 53 to the temporary home position are repeated, the robot 1 causes the first arm section 15, the second arm section 16, and the hand 8 to perform the turning operation similar to the operation shown in fig. 4. Therefore, in the correction value calculation step, the influence of backlash of the motor or the reduction mechanism that reduces the rotation speed of the motor and transmits the reduced rotation speed to the arm or the like is less likely to be exerted on the correction value.

(other embodiments)

The above-described embodiment is an example of the best mode of the present invention, but is not limited thereto, and various modifications can be made without departing from the spirit of the present invention. For example, in the above embodiment, the position of the detection panel 80 is observed by a camera in the correction value calculation step, but a sensor or the like may be used. In this case, a substrate having the same shape and size as the substrate 2 may be used as the detection panel 80.

In the above-described embodiment, the first reference position may be a position where the second arm 16 is rotated by a predetermined angle from the origin position of the second arm 16 in the rotational direction of the first arm 15 with respect to the second arm 16. In this case, when the robot 1 provided in the manufacturing system 3 is replaced, the second arm portion 16 is rotated and stopped based on the detection result of the origin sensor 32 and the detection result of the encoder 25, so that the second arm portion 16 is stopped at the first reference position.

In the above-described embodiment, the origin position of the hand base 17 in the rotational direction of the hand base 17 with respect to the second arm portion 16 may be matched with the second reference position. In this case, when the robot 1 provided in the manufacturing system 3 is replaced, the hand base portion 17 may be rotated and stopped based on the detection result of the origin sensor 33 so that the hand base portion 17 is stopped at the second reference position. In the above-described embodiment, the panel loading step may be performed after the robot operation step.

In the above-described embodiment, the first reference position specifying step, the second reference position specifying step, and the fork positioning step are performed with respect to the robot 1 installed in the manufacturing system 3, but the first reference position specifying step, the second reference position specifying step, and the fork positioning step may be performed with respect to the robot 1 installed before the manufacturing system 3. For example, in an assembly factory of the robot 1, the first reference position specifying step, the second reference position specifying step, and the hand fork positioning step may be performed on the robot 1.

Further, when the robot 1 is transported from the assembly plant to the manufacturing system 3 with the

hand forks

18 and 19 removed so that the

long hand forks

18 and 19 do not become an obstacle to the transportation when the robot is transported from the assembly plant to the manufacturing system 3, the first reference position specifying step and the second reference position specifying step may be performed on the robot 1 at the assembly plant, and the hand fork positioning step may be performed on the robot 1 after being installed on the manufacturing system 3.

In the above-described aspect, the fixing member 41 may be fixed to the second arm portion 16. In this case, an insertion hole as a first insertion hole into which the pin 42 is inserted is formed in a side surface of the base end of the first arm portion 15. In the above-described embodiment, the fixing member 44 may be fixed to the hand base 17. In this case, an insertion hole as a second insertion hole into which the pin 45 is inserted is formed in a side surface of the base end of the first arm portion 15. Further, in the above-described embodiment, the fixing

members

48 and 49 may be fixed to the second arm portion 16. In this case, insertion holes as third insertion holes into which the pins 50 are inserted are formed in the two yokes 18.

In the above-described embodiment, the hand 8 may not include the hand fork 19. In the above-described embodiment, the object to be conveyed by the robot 1 is the substrate 2 for the organic EL display, but the object to be conveyed by the robot 1 may be a glass substrate for a liquid crystal display, a semiconductor wafer, or the like. In the above-described embodiment, the robot 1 may be disposed in a space at atmospheric pressure.

Claims

1. A method for calculating a correction value for correcting the motion of an industrial robot, characterized in that,

the industrial robot includes a main body, a first arm having a base end side rotatably connected to the main body, a second arm having a base end side rotatably connected to a tip end side of the first arm, and a hand having a hand base rotatably connected to a tip end side of the second arm and a hand fork for loading a conveyance object,

the method for calculating the correction value of the industrial robot comprises the following steps:

a reference position determining step of determining a reference value of the encoder corresponding to the reference position of the other member based on a value of the encoder at a stop position at which the other member is moved and stopped at the reference position with respect to the one member and a value of the encoder at a position at which the other member is moved from the stop position to the reference position by a positioning jig when the other member is positioned at the reference position, when one of the first arm, the second arm, and the hand is one member and the other is the other member;

a robot operation step of driving the first arm, the second arm, and the hand by a motor in a condition reflecting the reference value to set the industrial robot to a temporary reference posture;

a correction value calculation step of operating the industrial robot after the robot operation step to move the fork having the detection panel mounted thereon to a transfer position of the object to be conveyed, and calculating a correction value when the first arm portion is driven by the motor based on an offset between a reference position of the detection panel and a stop position of the detection panel at the transfer position,

repeating the movement of the hand fork from the reference posture to the delivery position and the movement from the delivery position to the reference posture, performing the correction value calculating step a plurality of times, and determining the correction value,

the correction value is a correction value for correcting a deviation of the robot coordinate system of the industrial robot after the replacement from the coordinates of the teaching position taught in the teaching task of the industrial robot before the replacement.

2. The correction value calculation method for an industrial robot according to claim 1,

in any one of the plurality of correction value calculation steps, the first arm section, the second arm section, and the hand all perform the same pivotal motion when the hand fork moves from the reference posture to the delivery position, and the first arm section, the second arm section, and the hand all perform the same pivotal motion when the hand fork moves from the delivery position to the reference posture.

3. The correction value calculation method for an industrial robot according to claim 2,

in the correction value calculation step of this time out of the plurality of correction value calculation steps, the correction value obtained in the correction value calculation step of the previous time is reflected, and the arm portion is motor-driven to update the correction value.

4. The method for calculating the correction value of the industrial robot according to any one of claims 1 to 3,

in the correction value calculating step, the first arm section, the second arm section, and the hand perform the same turning operation as that performed when the conveyance target object is conveyed.

5. The method for calculating the correction value of the industrial robot according to any one of claims 1 to 3,

a plurality of chambers for transferring the object to be conveyed,

in the correction value calculating step, the hand fork is moved to a transfer position of any one of the conveyance objects in the plurality of chambers.

6. The correction value calculation method for an industrial robot according to claim 5,

the plurality of chambers include a loading chamber for loading the transport object from the outside, an unloading chamber for unloading the transport object from the outside, and a processing chamber for processing the transport object,

as the correction value calculating step, a first correction value calculating step of moving the hand fork to a transfer position of the object to be conveyed in the loading chamber or a transfer position of the object to be conveyed in the unloading chamber is repeatedly performed, and a second correction value calculating step of moving the hand fork to a transfer position of the object to be conveyed in the processing chamber is repeatedly performed.

7. The method for calculating the correction value of the industrial robot according to any one of claims 1 to 3,

in the correction value calculating step, the offset amount is detected based on an image pickup result of the probe panel picked up by a camera.

8. The method for calculating the correction value of the industrial robot according to any one of claims 1 to 3, characterized in that,

as the reference position determining step, a first reference position determining step in which the two members are the first arm portion and the second arm portion and a second reference position determining step in which the two members are the second arm portion and the hand are performed.

9. The method for calculating the correction value of the industrial robot according to any one of claims 1 to 3,

and a fork positioning step of positioning the fork on the hand base portion with a positioning jig in a state where the hand base portion is stopped at the reference position with respect to the second arm portion after the reference position determining step and before the correction value calculating step.