KR101044612B1 - Method of manufacturing a semiconductor device - Google Patents

Method of manufacturing a semiconductor device Download PDF

Info

Publication number
KR101044612B1
KR101044612B1 KR1020040055932A KR20040055932A KR101044612B1 KR 101044612 B1 KR101044612 B1 KR 101044612B1 KR 1020040055932 A KR1020040055932 A KR 1020040055932A KR 20040055932 A KR20040055932 A KR 20040055932A KR 101044612 B1 KR101044612 B1 KR 101044612B1
Authority
KR
South Korea
Prior art keywords
electrode layer
insulating film
metal wiring
interlayer insulating
forming
Prior art date
Application number
KR1020040055932A
Other languages
Korean (ko)
Other versions
KR20060007174A (en
Inventor
조진연
Original Assignee
매그나칩 반도체 유한회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 매그나칩 반도체 유한회사 filed Critical 매그나칩 반도체 유한회사
Priority to KR1020040055932A priority Critical patent/KR101044612B1/en
Publication of KR20060007174A publication Critical patent/KR20060007174A/en
Application granted granted Critical
Publication of KR101044612B1 publication Critical patent/KR101044612B1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
    • H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
    • H01L27/0676—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type comprising combinations of diodes, or capacitors or resistors
    • H01L27/0682—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type comprising combinations of diodes, or capacitors or resistors comprising combinations of capacitors and resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
    • H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76841—Barrier, adhesion or liner layers
    • H01L21/7687—Thin films associated with contacts of capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
    • H01L23/5223—Capacitor integral with wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5228—Resistive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20—Resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

본 발명은 반도체 소자의 제조 방법에 관한 것으로, 층간 절연막에 형성된 다마신 패턴 내부에 층간 절연막보다 낮은 높이로 금속 배선을 형성하고 단차가 발생되지 않도록 나머지 공간에 절연막과 전극층을 형성하여, 금속 배선/절연막/전극층으로 이루어진 MIM 구조의 커패시터를 형성함과 동시에, 다른 소자와 연결되지 않는 플로팅 상태의 금속 배선 상에 형성된 전극층으로는 박막 저항을 형성함으로써, 공정 단계를 감소시키면서 커패시터와 박막 저항을 동시에 형성할 수 있다. The present invention relates to a method for fabricating a semiconductor device, wherein the metal wiring is formed inside the damascene pattern formed in the interlayer insulating film at a height lower than that of the interlayer insulating film, and the insulating film and the electrode layer are formed in the remaining space so that no step is generated. At the same time, a capacitor having a MIM structure composed of an insulating film / electrode layer is formed, and a thin film resistor is formed on an electrode layer formed on a floating metal wiring which is not connected to other devices, thereby simultaneously forming a capacitor and a thin film resistor while reducing process steps. can do.

MIM, 커패시터, 박막 저항, 단차MIM, Capacitors, Thin Film Resistors, Steps

Description

반도체 소자의 제조 방법{Method of manufacturing a semiconductor device} Method of manufacturing a semiconductor device             

도 1a 내지 도 1e는 종래 기술에 따른 반도체 소자의 MIM 커패시터 제조 방법을 설명하기 위한 소자의 단면도들이다.1A to 1E are cross-sectional views of devices for describing a method of manufacturing a MIM capacitor of a semiconductor device according to the prior art.

도 2a 내지 도 2g는 본 발명의 실시예에 따른 반도체 소자의 제조 방법을 설명하기 위한 소자의 단면도들이다.
2A to 2G are cross-sectional views of devices for describing a method of manufacturing a semiconductor device in accordance with an embodiment of the present invention.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for main parts of the drawings>

101, 201 : 반도체 기판 104, 106, 209 : 전극층101, 201: semiconductor substrate 104, 106, 209: electrode layer

102, 108, 202, 205, 210 : 층간 절연막102, 108, 202, 205, 210: interlayer insulating film

103, 109, 203, 207, 211 : 금속 배선103, 109, 203, 207, 211: metal wiring

105, 208 : 절연막 107, 204 : 확산 방지막105, 208: insulating film 107, 204: diffusion preventing film

206 : 다마신 패턴
206: damascene pattern

본 발명은 반도체 소자의 제조 방법에 관한 것으로, 특히 MIM(Metal-Insulator-Metal) 구조로 이루어진 커패시터와 박막 저항을 동시에 형성하는 반도체 소자의 제조 방법에 관한 것이다.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a semiconductor device, and more particularly, to a method for manufacturing a semiconductor device for simultaneously forming a capacitor having a metal-insulator-metal (MIM) structure and a thin film resistor.

높은 정밀도를 요구하는 CMOS IC 논리 소자에 적용되는 아나로그 커패시터는 개량된 아나로그 MOS 기술, 특히 A/D 컨버터나 switched-capacitor filter 분야의 핵심 요소이다. 이와 같은 커패시터의 구조로는 폴리실리콘 대 폴리실리콘, 폴리실리콘 대 실리콘, 금속 대 실리콘, 금속 대 폴리실리콘 및 금속 대 금속 등 다양한 커패시터 구조들이 사용되어 왔다. 이들 중 금속 대 금속(Metal to metal) 구조(MIM 구조)는 직렬 저항(Series resistance)이 낮아 높은 정전용량을 갖는 커패시터를 만들 수 있으며, 열부담(Thermal budget) 및 Vcc가 낮은 장점으로 인하여 현재 아나로그 커패시터 구조로 널리 이용되고 있다. 이러한 MIM 구조의 커패시터 제조 방법을 간략하게 설명하면 다음과 같다.Analog capacitors in high-precision CMOS IC logic devices are key elements in advanced analog MOS technology, particularly in A / D converters and switched-capacitor filters. As the structure of such a capacitor, various capacitor structures such as polysilicon to polysilicon, polysilicon to silicon, metal to silicon, metal to polysilicon, and metal to metal have been used. Among them, the metal-to-metal structure (MIM structure) has a low series resistance, which makes it possible to make a capacitor having a high capacitance, and is currently known due to its low thermal budget and low Vcc. It is widely used as a log capacitor structure. Brief description of the capacitor manufacturing method of such a MIM structure is as follows.

도 1a 내지 도 1e는 종래 기술에 따른 반도체 소자의 커패시터와 박막 저항 형성 방법을 설명하기 위한 소자의 단면도들이다.1A to 1E are cross-sectional views of a device for describing a capacitor and a thin film resistor forming method of a semiconductor device according to the prior art.

도 1a를 참조하면, 전체 구조 상부에 층간 절연막(102)이 형성되고 층간 절연막(102)에 형성된 다마신 패턴에는 금속 배선(103)이 형성된 반도체 기판(101) 상에 제1 금속층(104), 절연막(105) 및 제2 금속층(106)을 순차적으로 형성한다. Referring to FIG. 1A, a first metal layer 104 is formed on a semiconductor substrate 101 on which an interlayer insulating film 102 is formed on an entire structure and a metal wiring 103 is formed on a damascene pattern formed on the interlayer insulating film 102. The insulating film 105 and the second metal layer 106 are sequentially formed.

여기서, 제1 금속층(104)은 하부 전극이 되고, 절연막(105)은 유전체막이 되며, 제2 금속층(106)은 상부 전극이된다. 이때, 제1 금속층(104)이나 제2 금속층 (106)은 TaN 또는 TiN으로 형성할 수 있으며, 절연막(105)은 Al2O3, HfO2, ZrO2 및 Ta2O5 중 선택된 어느 하나로 형성할 수 있다. Here, the first metal layer 104 becomes a lower electrode, the insulating film 105 becomes a dielectric film, and the second metal layer 106 becomes an upper electrode. In this case, the first metal layer 104 or the second metal layer 106 may be formed of TaN or TiN, and the insulating layer 105 is formed of any one selected from Al 2 O 3 , HfO 2 , ZrO 2, and Ta 2 O 5 . can do.

도 1b를 참조하면, 커패시터가 형성될 영역에만 잔류되도록 제2 금속층(106), 절연막(105) 및 제1 금속층(104)을 순차적으로 식각한다. Referring to FIG. 1B, the second metal layer 106, the insulating layer 105, and the first metal layer 104 are sequentially etched so as to remain only in the region where the capacitor is to be formed.

도 1c를 참조하면, 후속 공정에서 제1 금속층(104) 상에 플러그를 형성하기 위하여 제1 금속층(104) 상부에 형성된 제2 금속층(106)의 일부를 제거한다. 이때, 절연막(105)이 식각 방지막의 역할을 하면서 제1 금속층(104)은 식각되지 않는다.Referring to FIG. 1C, a portion of the second metal layer 106 formed on the first metal layer 104 is removed to form a plug on the first metal layer 104 in a subsequent process. In this case, the first metal layer 104 is not etched while the insulating film 105 serves as an etch stop layer.

도 1d를 참조하면, 전체 구조 상에 확산 방지막(107) 및 층간 절연막(108)을 형성한다. 이어서, 제1 금속층(104) 및 제2 금속층(106)이 각각 노출되도록 다마신 패턴을 형성한 후 다마신 패턴을 금속 물질로 매립하여 금속 배선(109)을 형성한다. Referring to FIG. 1D, a diffusion barrier film 107 and an interlayer insulating film 108 are formed on the entire structure. Subsequently, after the damascene pattern is formed to expose the first metal layer 104 and the second metal layer 106, the metal line 109 is formed by filling the damascene pattern with a metal material.

상기에서 서술한 커패시터 제조 방법은 포토 마스크 공정과 단계별 세정 공정이 많이 공정 단순화 및 제조 비용에서 불리한 측면이 있다.
In the capacitor manufacturing method described above, the photomask process and the step-by-step cleaning process are disadvantageous in terms of process simplification and manufacturing cost.

이에 대하여, 본 발명이 제시하는 반도체 소자의 제조 방법은 층간 절연막에 형성된 다마신 패턴 내부에 층간 절연막보다 낮은 높이로 금속 배선을 형성하고 단차가 발생되지 않도록 나머지 공간에 절연막과 전극층을 형성하여, 금속 배선/절연막/전극층으로 이루어진 MIM 구조의 커패시터를 형성함과 동시에, 다른 소자와 연결되지 않는 플로팅 상태의 금속 배선 상에 형성된 전극층으로는 박막 저항을 형성함으로써, 공정 단계를 감소시키면서 커패시터와 박막 저항을 동시에 형성할 수 있다. On the other hand, in the method of manufacturing a semiconductor device according to the present invention, a metal wiring is formed inside the damascene pattern formed in the interlayer insulating film at a height lower than that of the interlayer insulating film, and the insulating film and the electrode layer are formed in the remaining space so that a step is not generated. By forming a capacitor having a MIM structure consisting of wiring / insulating film / electrode layer, and forming a thin film resistor on an electrode layer formed on a floating metal wiring that is not connected to other devices, the capacitor and the thin film resistor can be reduced while reducing process steps. It can be formed at the same time.

본 발명의 실시예에 따른 반도체 소자의 제조 방법은 소정의 패턴으로 제1 금속 배선이 형성된 반도체 기판 상에 층간 절연막을 형성하는 단계와, 층간 절연막을 식각하여 커패시터 영역 및 일반 배선 영역에는 상기 제1 금속 배선이 노출되는 제1 다마신 패턴을 형성하면서, 박막 저항 영역에는 트렌치 형태의 제2 다마신 패턴을 형성하는 단계와, 제1 및 제2 다마신 패턴에 층간 절연막보다 낮은 높이로 제2 금속 배선을 형성하는 단계와, 제2 금속 배선 상부의 다마신 패턴에 절연막 및 전극층을 적층 구조로 형성하여, 커패시터 영역에는 제2 금속 배선, 절연막 및 전극층으로 이루어진 커패시터를 형성하고, 박막저항 영역에는 전극층으로 이루어진 박막 저항을 형성하는 단계를 포함한다. A method of manufacturing a semiconductor device according to an embodiment of the present invention includes forming an interlayer insulating film on a semiconductor substrate on which a first metal wiring is formed in a predetermined pattern, etching the interlayer insulating film, and forming the first interlayer insulating film on the capacitor region and the general wiring region. Forming a second damascene pattern in the form of a trench in the thin film resistance region while forming a first damascene pattern to which the metal wiring is exposed; and forming a second damascene pattern in the first and second damascene patterns at a height lower than that of the interlayer insulating layer. Forming a wiring, and forming an insulating film and an electrode layer in a stacked structure on the damascene pattern above the second metal wiring, forming a capacitor including a second metal wiring, an insulating film and an electrode layer in the capacitor region, and an electrode layer in the thin film resistance region. Forming a thin film resistor consisting of.

상기에서, 전극층을 형성한 후, 전극층을 포함한 전체 구조 상에 상부 층간 절연막을 형성하는 단계와, 커패시터 영역에서는 전극층이 노출되고, 일반 배선 영역에서는 제2 금속 배선이 노출되며, 박막 저항 영역에서는 전극층이 노출되는 다마신 패턴을 상부 층간 절연막에 형성하는 단계, 및 상부 층간 절연막의 다마신 패턴에 제3 금속 배선을 형성하는 단계를 더 포함할 수 있다. In the above, after forming the electrode layer, forming an upper interlayer insulating film on the entire structure including the electrode layer, the electrode layer is exposed in the capacitor region, the second metal wiring is exposed in the general wiring region, the electrode layer in the thin film resistance region The method may further include forming the exposed damascene pattern in the upper interlayer insulating layer, and forming a third metal wire in the damascene pattern of the upper interlayer insulating layer.

한편, 제1 금속 배선 또는 제2 금속 배선은 구리로 형성할 수 있으며, 전극층은 TiN 또는 TaNx로 형성할 수 있다. 그리고, 절연막은 SiN, Al2O3, Ta2O5 또는 HfO 중 선택된 어느 하나로 형성하거나 두개 이상 적층된 구조로 형성할 수 있다. Meanwhile, the first metal wire or the second metal wire may be formed of copper, and the electrode layer may be formed of TiN or TaNx. The insulating film may be formed of any one selected from SiN, Al 2 O 3 , Ta 2 O 5, or HfO, or may be formed in a structure in which two or more layers are stacked.

이하, 첨부된 도면을 참조하여 본 발명의 바람직한 실시예를 설명하기로 한다. 그러나, 본 발명은 이하에서 개시되는 실시예에 한정되는 것이 아니라 서로 다른 다양한 형태로 구현될 수 있으며, 본 발명의 범위가 다음에 상술하는 실시예에 한정되는 것은 아니다. 단지 본 실시예는 본 발명의 개시가 완전하도록 하며 통상의 지식을 가진 자에게 발명의 범주를 완전하게 알려주기 위해 제공되는 것이며, 본 발명의 범위는 본원의 특허 청구 범위에 의해서 이해되어야 한다. Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention. However, the present invention is not limited to the embodiments described below, but may be implemented in various forms, and the scope of the present invention is not limited to the embodiments described below. Only this embodiment is provided to complete the disclosure of the present invention and to fully inform those skilled in the art, the scope of the present invention should be understood by the claims of the present application.

한편, 어떤 막이 다른 막 또는 반도체 기판의 '상'에 있다라고 기재되는 경우에 상기 어떤 막은 상기 다른 막 또는 반도체 기판에 직접 접촉하여 존재할 수 있고, 또는 그 사이에 제3의 막이 개재되어질 수도 있다. 또한 도면에서 각 층의 두께나 크기는 설명의 편의 및 명확성을 위하여 과장되었다. 도면 상에서 동일 부호는 동일한 요소를 지칭한다.On the other hand, when a film is described as being "on" another film or semiconductor substrate, the film may exist in direct contact with the other film or semiconductor substrate, or a third film may be interposed therebetween. In the drawings, the thickness or size of each layer is exaggerated for clarity and convenience of explanation. Like numbers refer to like elements on the drawings.

도 2a 내지 도 2g는 본 발명의 실시예에 따른 반도체 소자의 제조 방법을 설명하기 위한 소자의 단면도들이다.2A to 2G are cross-sectional views of devices for describing a method of manufacturing a semiconductor device in accordance with an embodiment of the present invention.

도 2a를 참조하면, 반도체 소자를 형성하기 위한 여러 요소(도시되지 않음)가 형성된 반도체 기판(201)이 제공된다. 예를 들면, 반도체 기판(201)에는 트랜지스터(도시되지 않음)와 같은 요소들이 형성될 수 있다. 이어서, 반도체 기판(201) 상에 제1 층간 절연막(202)을 형성한 후, 듀얼 다마신 공정으로 제1 층간 절연막(202)에 콘택홀(도시되지 않음)과 트렌치로 이루어진 듀얼 다마신 패턴을 형성하고, 듀얼 다마신 패턴을 전도성 물질로 매립하여 제1 금속 배선(203)을 형성한다. 이때, 제1 금속 배선(203)은 구리로 형성할 수 있다. 한편, 제1 금속 배선(203)의 금속 성분이 제1 층간 절연막(202)으로 확산되는 것을 방지하기 위하여 제1 금속 배선(203)과 제1 층간 절연막(202) 사이에 장벽 전극층(도시되지 않음)을 형성할 수도 있다. Referring to FIG. 2A, a semiconductor substrate 201 is provided in which various elements (not shown) are formed for forming a semiconductor device. For example, elements such as transistors (not shown) may be formed in the semiconductor substrate 201. Subsequently, after the first interlayer insulating film 202 is formed on the semiconductor substrate 201, a dual damascene pattern formed of a contact hole (not shown) and a trench is formed in the first interlayer insulating film 202 by a dual damascene process. The first metal wiring 203 is formed by filling the dual damascene pattern with a conductive material. In this case, the first metal wire 203 may be formed of copper. On the other hand, a barrier electrode layer (not shown) between the first metal wiring 203 and the first interlayer insulating film 202 to prevent the metal component of the first metal wiring 203 from being diffused into the first interlayer insulating film 202. ) May be formed.

이어서, 제1 금속 배선(203)을 포함한 전체 구조 상에 확산 방지막(204) 및 제2 층간 절연막(205)을 순차적으로 형성한다. 확산 방지막(204)은 제1 금속 배선(203)의 금속 성분이 제2 층간 절연막(205)으로 확산되는 것을 방지하는 역할을 함과 동시에, 제2 층간 절연막(205)에 듀얼 다마신 패턴 형성 시 식각 방지막의 역할을 한다. Subsequently, the diffusion barrier film 204 and the second interlayer insulating film 205 are sequentially formed on the entire structure including the first metal wiring 203. The diffusion barrier 204 prevents diffusion of the metal component of the first metal interconnection 203 into the second interlayer insulating layer 205 and simultaneously forms a dual damascene pattern in the second interlayer insulating layer 205. It acts as an etch barrier.

도 2b를 참조하면, 듀얼 다마신 공정을 적용하여 제2 층간 절연막(205)에 다마신 패턴(206)을 형성한다. 이때, 일부 영역에서는 다마신 패턴(206)이 비아홀이나 트렌치의 형태로만 형성될 수 있으며, 후속 공정에서 형성될 금속 배선과 제1 금속 배선(203)을 연결시키는 영역에서는 트렌치와 비아홀이 동시에 형성될 수 있다. 예를 들면, 커패시터가 형성될 영역에서는 트렌치와 비아홀이 동시에 형성될 있으며, 박막 저항이 형성될 영역에서는 트렌치만 독립적으로 형성될 수 있다. Referring to FIG. 2B, a damascene pattern 206 is formed on the second interlayer insulating layer 205 by applying a dual damascene process. In this case, the damascene pattern 206 may be formed only in the form of a via hole or a trench in some regions, and the trench and the via hole may be simultaneously formed in the region connecting the metal wiring and the first metal wiring 203 to be formed in a subsequent process. Can be. For example, trenches and via holes may be simultaneously formed in the region where the capacitor is to be formed, and only trenches may be formed independently in the region where the thin film resistor is to be formed.

이로써, 제1 금속 배선(203)의 일부 영역이 다마신 패턴(206)을 통해 노출된다. As a result, a portion of the first metal wire 203 is exposed through the damascene pattern 206.                     

도 2c를 참조하면, 다마신 패턴(206)을 금속 물질로 매립하여 제2 금속 배선(207)을 형성한다. 여기서, 제2 금속 배선(207)은 구리로 형성할 수 있으며, 다마신 패턴(206)이 완전히 매립되도록 시드층(도시되지 않음)을 이용한 전기 도금법으로 전극층을 형성한 후, 화학적 기계적 연마 공정으로 제2 절연막(206) 상부의 전극층을 제거하면서 다마신 패턴(206) 내부에만 잔류시키는 방식으로 형성할 수 있다. 이때, 화학적 기계적 연마 공정을 과도하게 실시하여 제2 금속 배선(207)을 제2 층간 절연막(205)의 높이보다 낮게 잔류시킨다. Referring to FIG. 2C, the damascene pattern 206 is filled with a metal material to form a second metal wire 207. Here, the second metal wiring 207 may be formed of copper, and after the electrode layer is formed by an electroplating method using a seed layer (not shown) to completely fill the damascene pattern 206, the chemical mechanical polishing process may be performed. The electrode layer formed on the second insulating layer 206 may be removed in such a manner as to remain only in the damascene pattern 206. At this time, the chemical mechanical polishing process is excessively performed to leave the second metal wiring 207 lower than the height of the second interlayer insulating film 205.

다마신 패턴(206)에서 제2 금속 배선(207)이 낮게 형성되면서 남게된 공간에는 후속 공정에서 커패시터의 유전체막을 형성하기 위한 절연막과 상부 전극을 형성하기 위한 전극층이 형성된다. 따라서, 이들이 형성된 후에도 단차가 발생되지 않도록, 이들 두께를 고려하여 제2 금속 배선(207)의 과도 연마량을 조절하는 것이 바람직하다. An insulating layer for forming a dielectric film of a capacitor and an electrode layer for forming an upper electrode are formed in a space left in the damascene pattern 206 while the second metal wiring 207 is formed low. Therefore, it is preferable to adjust the excessive polishing amount of the second metal wiring 207 in consideration of these thicknesses so that no step occurs after these are formed.

도 2d를 참조하면, 제2 금속 배선(207)을 포함한 전체 구조 상에 절연막(208) 및 전극층(209)을 순차적으로 형성한다. 이때, 절연막(208)은 커패시터의 유전체막을 형성하기 위한 것으로, SiN, Al2O3, Ta2O5 또는 HfO 중 선택된 어느 하나로 형성하거나 두개 이상 적층시켜 할 수 있다. 그리고, 전극층(209)은 커패시터의 상부 전극이나 박막 저항을 형성하기 위한 것으로, TiN 이나 TaN으로 형성할 수 있다. Referring to FIG. 2D, the insulating film 208 and the electrode layer 209 are sequentially formed on the entire structure including the second metal wiring 207. In this case, the insulating film 208 is for forming a dielectric film of the capacitor, and may be formed of any one selected from SiN, Al 2 O 3 , Ta 2 O 5, or HfO, or may be stacked two or more. The electrode layer 209 is for forming an upper electrode or a thin film resistor of the capacitor, and may be formed of TiN or TaN.

도 2e를 참조하면, 절연막(208)과 전극층(209)을 제2 금속 배선(207) 상에만 잔류시킨다. 예를 들어, 제2 층간 절연막(205)이 노출될때까지 화학적 기계적 연마 공정을 실시하면 절연막(208)과 전극층(209)을 제2 금속 배선(207) 상에만 잔류시킬 수 있다. Referring to FIG. 2E, the insulating film 208 and the electrode layer 209 are left only on the second metal wiring 207. For example, if the chemical mechanical polishing process is performed until the second interlayer insulating film 205 is exposed, the insulating film 208 and the electrode layer 209 may be left only on the second metal wire 207.

이로써, 제1 금속 배선(203), 절연막(208) 및 전극층(209)으로 이루어진 커패시터(C200)와, 전극층(209)으로 이루어진 박막 저항(R200)이 형성된다. 박막 저항(R200)이 형성되는 영역에서는 절연막(208)에 의해 전극층(209)이 제2 금속 배선(207)과 전기적으로 격리되기 때문에 전극층(209)만으로 박막 저항(R200)이 형성된다. As a result, the capacitor C200 including the first metal wiring 203, the insulating film 208, and the electrode layer 209, and the thin film resistor R200 including the electrode layer 209 are formed. In the region where the thin film resistor R200 is formed, since the electrode layer 209 is electrically isolated from the second metal wire 207 by the insulating film 208, the thin film resistor R200 is formed only by the electrode layer 209.

이하, 커패시터(C200)와 박막 저항(R200)을 주변 소자들과 연결시키기 위한 배선을 형성하는 방법을 설명하기로 한다. Hereinafter, a method of forming a wiring for connecting the capacitor C200 and the thin film resistor R200 with the peripheral devices will be described.

도 2f를 참조하면, 후속 공정에서 형성될 금속 배선과 제2 금속 배선(207)을 직접 연결시켜야 할 부분에서는 전극층(209)을 선택적으로 제거한다. 즉, 박막 저항(R200)이나 커패시터(C200)가 형성되는 영역 이외의 영역에 형성된 전극층(209)을 제거한다. Referring to FIG. 2F, the electrode layer 209 is selectively removed at the portion where the metal wire to be formed in the subsequent process and the second metal wire 207 are to be directly connected. That is, the electrode layer 209 formed in a region other than the region where the thin film resistor R200 or the capacitor C200 is formed is removed.

이로써, 전극층(209)이 제거된 영역에서는 절연막(208)이 노출된다. As a result, the insulating film 208 is exposed in the region where the electrode layer 209 is removed.

도 2g를 참조하면, 전극층(209)을 포함한 전체 구조 상에 제3 층간 절연막(210)을 형성한다. 이후, 다마신 공정으로 제3 층간 절연막(210)의 일부 영역과 제3 층간 절연막(210)이 식각되면서 노출된 절연막(208)을 연속적으로 식각하여 다마신 패턴을 형성한다. 이어서, 다마신 패턴을 금속 물질로 매립하여 제3 금속 배선(211)을 형성한다. 이로써, 커패시터(C200)의 상부 전극인 전극층(209)과, 배선을 형성하기 위한 제2 금속 배선(207)과 박막 저항(R200)인 전극층(209)의 양 가장자리가 각각의 제3 금속 배선(211)과 연결된다. Referring to FIG. 2G, a third interlayer insulating layer 210 is formed on the entire structure including the electrode layer 209. Subsequently, a portion of the third interlayer insulating layer 210 and the third interlayer insulating layer 210 are etched by the damascene process, thereby sequentially etching the exposed insulating layer 208 to form a damascene pattern. Subsequently, the third metal wiring 211 is formed by filling the damascene pattern with a metal material. As a result, both edges of the electrode layer 209 which is the upper electrode of the capacitor C200, the second metal wiring 207 for forming the wiring, and the electrode layer 209 which is the thin film resistor R200 are formed on the third metal wiring ( 211).

상술한 바와 같이, 본 발명은 층간 절연막에 형성된 다마신 패턴 내부에 층간 절연막보다 낮은 높이로 금속 배선을 형성하고 단차가 발생되지 않도록 나머지 공간에 절연막과 전극층을 형성하여, 금속 배선/절연막/전극층으로 이루어진 MIM 구조의 커패시터를 형성함과 동시에, 다른 소자와 연결되지 않는 플로팅 상태의 금속 배선 상에 형성된 전극층으로는 박막 저항을 형성함으로써, 공정 단계를 감소시키면서 커패시터와 박막 저항을 동시에 형성할 수 있다. As described above, the present invention forms a metal wiring at a lower height than the interlayer insulating film inside the damascene pattern formed in the interlayer insulating film, and forms an insulating film and an electrode layer in the remaining space so that no step occurs, thereby forming a metal wiring / insulating film / electrode layer. By forming a capacitor having a MIM structure, a thin film resistor is formed on an electrode layer formed on a floating metal wiring that is not connected to another device, thereby simultaneously forming a capacitor and a thin film resistor while reducing a process step.

Claims (5)

소정의 패턴으로 제1 금속 배선이 형성된 반도체 기판 상에 층간 절연막을 형성하는 단계;Forming an interlayer insulating film on the semiconductor substrate on which the first metal wiring is formed in a predetermined pattern; 상기 층간 절연막을 식각하여 커패시터 영역 및 일반 배선 영역에는 상기 제1 금속 배선이 노출되는 제1 다마신 패턴을 형성하면서, 박막 저항 영역에는 트렌치 형태의 제2 다마신 패턴을 형성하는 단계;Etching the interlayer insulating layer to form a first damascene pattern to expose the first metal wiring in the capacitor region and the general wiring region, and to form a second damascene pattern in the form of a trench in the thin film resistance region; 상기 제1 및 제2 다마신 패턴에 상기 층간 절연막보다 낮은 높이로 제2 금속 배선을 형성하는 단계;Forming a second metal wire on the first and second damascene patterns at a height lower than that of the interlayer insulating film; 상기 제2 금속 배선 상부의 상기 다마신 패턴에 절연막 및 전극층을 적층 구조로 형성하여, 상기 커패시터 영역에는 상기 제2 금속 배선, 상기 절연막 및 상기 전극층으로 이루어진 커패시터를 형성하고, 상기 박막저항 영역에는 상기 전극층으로 이루어진 박막 저항을 형성하는 단계를 포함하는 반도체 소자의 제조 방법.The insulating layer and the electrode layer are formed in the damascene pattern on the second metal wiring in a stacked structure, and the capacitor region includes a capacitor including the second metal wiring, the insulating layer, and the electrode layer, and the thin film resistance region includes the capacitor. A method of manufacturing a semiconductor device comprising the step of forming a thin film resistor consisting of an electrode layer. 제 1 항에 있어서, 상기 전극층을 형성한 후, The method of claim 1, wherein after forming the electrode layer, 상기 전극층을 포함한 전체 구조 상에 상부 층간 절연막을 형성하는 단계;Forming an upper interlayer insulating film on the entire structure including the electrode layer; 상기 커패시터 영역에서는 상기 전극층이 노출되고, 상기 일반 배선 영역에서는 상기 제2 금속 배선이 노출되며, 상기 박막 저항 영역에서는 상기 전극층이 노출되는 다마신 패턴을 상기 상부 층간 절연막에 형성하는 단계; 및Forming a damascene pattern on the upper interlayer insulating layer in which the electrode layer is exposed in the capacitor region, the second metal wiring is exposed in the general wiring region, and the electrode layer is exposed in the thin film resistance region; And 상기 상부 층간 절연막의 상기 다마신 패턴에 제3 금속 배선을 형성하는 단계를 더 포함하는 반도체 소자의 제조 방법.And forming a third metal wiring on the damascene pattern of the upper interlayer insulating film. 제 1 항에 있어서,The method of claim 1, 상기 제1 금속 배선 또는 상기 제2 금속 배선이 구리로 형성된 반도체 소자의 제조 방법.The manufacturing method of the semiconductor element in which the said 1st metal wiring or the said 2nd metal wiring was formed from copper. 제 1 항에 있어서,The method of claim 1, 상기 전극층이 TiN 또는 TaNx로 형성되는 반도체 소자의 제조 방법.The method of manufacturing a semiconductor device wherein the electrode layer is formed of TiN or TaNx. 제 1 항에 있어서,The method of claim 1, 상기 절연막이 SiN, Al2O3, Ta2O5 또는 HfO 중 선택된 어느 하나로 형성하거나 두개 이상 적층된 구조로 형성되는 반도체 소자의 제조 방법.The insulating film is formed of any one selected from SiN, Al 2 O 3 , Ta 2 O 5 or HfO, or a semiconductor device manufacturing method of a two or more stacked structure.
KR1020040055932A 2004-07-19 2004-07-19 Method of manufacturing a semiconductor device KR101044612B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020040055932A KR101044612B1 (en) 2004-07-19 2004-07-19 Method of manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020040055932A KR101044612B1 (en) 2004-07-19 2004-07-19 Method of manufacturing a semiconductor device

Publications (2)

Publication Number Publication Date
KR20060007174A KR20060007174A (en) 2006-01-24
KR101044612B1 true KR101044612B1 (en) 2011-06-29

Family

ID=37118541

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040055932A KR101044612B1 (en) 2004-07-19 2004-07-19 Method of manufacturing a semiconductor device

Country Status (1)

Country Link
KR (1) KR101044612B1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9190402B2 (en) 2013-08-30 2015-11-17 Samsung Electronics Co., Ltd. Semiconductor device comprising capacitor and method of manufacturing the same
US9299659B2 (en) 2013-08-19 2016-03-29 Samsung Electronics Co., Ltd. Semiconductor devices including multiple interconnection structures

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102070094B1 (en) 2012-12-13 2020-01-29 삼성전자주식회사 Semiconductor Device Having a Resistor Electrode

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020055174A (en) * 2000-12-28 2002-07-08 박종섭 Method for fabricating analog device
KR20030002800A (en) * 2001-06-29 2003-01-09 주식회사 하이닉스반도체 Method for forming the resister polysilicon in semiconductor device
KR20040050514A (en) * 2002-12-10 2004-06-16 주식회사 하이닉스반도체 Method of manufacturing analog device
JP2004193602A (en) 2002-12-02 2004-07-08 Chartered Semiconductor Mfg Ltd Method for manufacturing metal-insulator-metal (mim) capacitor and metal register for subsequent process (beol) with copper

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020055174A (en) * 2000-12-28 2002-07-08 박종섭 Method for fabricating analog device
KR20030002800A (en) * 2001-06-29 2003-01-09 주식회사 하이닉스반도체 Method for forming the resister polysilicon in semiconductor device
JP2004193602A (en) 2002-12-02 2004-07-08 Chartered Semiconductor Mfg Ltd Method for manufacturing metal-insulator-metal (mim) capacitor and metal register for subsequent process (beol) with copper
KR20040050514A (en) * 2002-12-10 2004-06-16 주식회사 하이닉스반도체 Method of manufacturing analog device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9299659B2 (en) 2013-08-19 2016-03-29 Samsung Electronics Co., Ltd. Semiconductor devices including multiple interconnection structures
US9190402B2 (en) 2013-08-30 2015-11-17 Samsung Electronics Co., Ltd. Semiconductor device comprising capacitor and method of manufacturing the same

Also Published As

Publication number Publication date
KR20060007174A (en) 2006-01-24

Similar Documents

Publication Publication Date Title
KR100505658B1 (en) Semiconductor device having MIM capacitor
US7332764B2 (en) Metal-insulator-metal (MIM) capacitor and method of fabricating the same
US7220652B2 (en) Metal-insulator-metal capacitor and interconnecting structure
US8716100B2 (en) Method of fabricating metal-insulator-metal (MIM) capacitor within topmost thick inter-metal dielectric layers
US7560795B2 (en) Semiconductor device with a capacitor
US20090200638A1 (en) Mim capacitor integration
US20050263848A1 (en) Metal-insulator-metal capacitor having a large capacitance and method of manufacturing the same
US20060138517A1 (en) Capacitor structure and fabricating method thereof
KR100356135B1 (en) Method for fabricating a semiconductor device
KR100835409B1 (en) Method for manufacturing damascene mim type capacitor of semiconductor device
KR100572829B1 (en) Method of fabricating semiconductor device with MIM capacitor
KR20090046578A (en) Capacitor of semiconductor device and method for manufacturing thereof
KR101044612B1 (en) Method of manufacturing a semiconductor device
KR100724249B1 (en) Method for fabricating semiconductor device
KR100548516B1 (en) method for manufacturing Metal-Insulator-Metal capacitor
US20020153544A1 (en) Semiconductor device and its manufacturing method
KR100650192B1 (en) Semiconductor device and method for forming the same
US7005343B2 (en) Semiconductor device and method of manufacturing the same
KR100965215B1 (en) Method of manufacturing Metal- Insulator-Metal capacitor of a semiconductor device
KR20070052484A (en) Mim capacitor and method for forming the same
US20070145599A1 (en) Metal-insulator-metal (MIM) capacitor and methods of manufacturing the same
KR100457044B1 (en) Method for manufacturing semiconductor device
JP2007214284A (en) Semiconductor device
KR100667914B1 (en) MIM capacitor having horizontal structure and fabricating method thereof
KR101057753B1 (en) Method of manufacturing semiconductor device

Legal Events

Date Code Title Description
N231 Notification of change of applicant
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20140519

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20150518

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20160518

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20170529

Year of fee payment: 7

FPAY Annual fee payment

Payment date: 20180517

Year of fee payment: 8

FPAY Annual fee payment

Payment date: 20190516

Year of fee payment: 9