JPS6412238A - Electrostatic capacitance type pressure sensor - Google Patents
Electrostatic capacitance type pressure sensorInfo
- Publication number
- JPS6412238A JPS6412238A JP16800287A JP16800287A JPS6412238A JP S6412238 A JPS6412238 A JP S6412238A JP 16800287 A JP16800287 A JP 16800287A JP 16800287 A JP16800287 A JP 16800287A JP S6412238 A JPS6412238 A JP S6412238A
- Authority
- JP
- Japan
- Prior art keywords
- insulating material
- diaphragm
- electrodes
- pressure sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE:To achieve a better temperature characteristic, by arranging first and second units in a horizontal symmetry centered on a diaphragm. CONSTITUTION:A sensor unit 22 is made up of a silicon diaphragm 2, first and second housings 4A and 4B, insulating material 8A and 8B packed into internal voids 20A and 20B and electrodes 10A and 10B. A first unit comprises the housing 4A, the insulating material 8A and the electrode 10A while a second unit comprises the housing 4B, the insulating material 8B and the electrode 10B and the electrodes 10A and 10B are arranged symmetrically on both sides of the diaphragm 2 facing it 2 through insulating material 12A and 12B. When pressure measurands P1 and P2 act respectively on pressure receiving diaphragms 48 and 50 of a pressure receiving section 46, the pressures work on the diaphragm 2 horizontally through a sealed liquid to displace it 2 according to a differential pressure therebetween. The displacement is extracted as differential pressure through the electrodes 10A and 10B and terminal pins 34, 36 and 38.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16800287A JPS6412238A (en) | 1987-07-06 | 1987-07-06 | Electrostatic capacitance type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16800287A JPS6412238A (en) | 1987-07-06 | 1987-07-06 | Electrostatic capacitance type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412238A true JPS6412238A (en) | 1989-01-17 |
Family
ID=15859980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16800287A Pending JPS6412238A (en) | 1987-07-06 | 1987-07-06 | Electrostatic capacitance type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412238A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009008693A (en) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
-
1987
- 1987-07-06 JP JP16800287A patent/JPS6412238A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009008693A (en) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| IE822053L (en) | Variable capacitance pressure transducer | |
| GB1318780A (en) | Differential pressure transducer | |
| CA2144832A1 (en) | Capacitive pressure sensors or capacitive differential pressure sensors | |
| JPS6444823A (en) | Pressure detecting device of electrostatic capacity system | |
| SE8504703D0 (en) | ABSOLUTTRYCKTRANSDUKTOR | |
| KR910008414A (en) | Acceleration detector | |
| CA2006672A1 (en) | Capacitive pressure sensor with encircling third plate | |
| IE831376L (en) | Capacitive pressure transducer | |
| WO1997006660A3 (en) | Surface mount conductive polymer devices and method for manufacturing such devices | |
| FR2420210A1 (en) | SEMICONDUCTOR PRESSURE DETECTOR WITH SENSITIVE DIAPHRAGMS AND METHOD OF OPERATION OF THE LATTER | |
| US6058780A (en) | Capacitive pressure sensor housing having a ceramic base | |
| DE3668499D1 (en) | CAPACITIVE PRESSURE SENSOR. | |
| JPS6412238A (en) | Electrostatic capacitance type pressure sensor | |
| JPS5513553A (en) | Crystal vibrator | |
| CA2058916A1 (en) | Piezoresistive pressure transducer with a conductive elastomeric seal | |
| EP0097554A3 (en) | Chemical sensors having a hydrophilic membrane as the electrolyte media | |
| JPS5679225A (en) | Structure of differential pressure gauge | |
| JPS649309A (en) | Electrostatic capacitance type angle of inclination sensor | |
| GB1412631A (en) | Differential pressure transducers | |
| JPS62214329A (en) | Differential pressure transmitter | |
| GB1279984A (en) | Improvements in and relating to capacitive transducers | |
| SU1652839A1 (en) | Capacitive pressure sensor and method of manufacturing the same | |
| JPS57186140A (en) | Differential pressure transmitter | |
| SU1527529A1 (en) | Pressure transducer | |
| GB1372030A (en) | Transducers |