JPS57186140A - Differential pressure transmitter - Google Patents

Differential pressure transmitter

Info

Publication number
JPS57186140A
JPS57186140A JP7083581A JP7083581A JPS57186140A JP S57186140 A JPS57186140 A JP S57186140A JP 7083581 A JP7083581 A JP 7083581A JP 7083581 A JP7083581 A JP 7083581A JP S57186140 A JPS57186140 A JP S57186140A
Authority
JP
Japan
Prior art keywords
sensor
diaphragm
silicon
capacity
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7083581A
Other languages
Japanese (ja)
Inventor
Satoshi Shimada
Motohisa Nishihara
Kiyomitsu Suzuki
Kazuji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7083581A priority Critical patent/JPS57186140A/en
Publication of JPS57186140A publication Critical patent/JPS57186140A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To eliminate the hysteresis of pressure and capacity variation characteristics by forming a diaphragm as a movable electrode by using silicon single crystal, and then forming a gap between sensor bases by etching the silicon. CONSTITUTION:Differential pressures led from pressure intakes provided at the center parts of flanges 64 and 66 clampikg a pressure receiving part body 10 operate upon sealed diaphragms 56 and 58 to operate upon the 2nd measurement rooms 60 and 62 through the 1st sealed liquids, thereby displaying a sensor diaphragm 12 to one side. As a result, capacity between the sensor diaphragm 12 as a movable electrode and one electrode is decreased and capacity with other electrode is increased. Those electric signals are led out through lead wires 48 and 50. The sensor diaphragm 12 is made of silicon single crystal with a (100) crystal surface and a gap between sensor bases 18 and 20 is formed at the same time by etching the silicon with alkali.
JP7083581A 1981-05-13 1981-05-13 Differential pressure transmitter Pending JPS57186140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7083581A JPS57186140A (en) 1981-05-13 1981-05-13 Differential pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7083581A JPS57186140A (en) 1981-05-13 1981-05-13 Differential pressure transmitter

Publications (1)

Publication Number Publication Date
JPS57186140A true JPS57186140A (en) 1982-11-16

Family

ID=13443017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7083581A Pending JPS57186140A (en) 1981-05-13 1981-05-13 Differential pressure transmitter

Country Status (1)

Country Link
JP (1) JPS57186140A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143628A (en) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd Capacitance type pressure sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04143628A (en) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd Capacitance type pressure sensor

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