JPS58192757A - Manufacture of grinding stone made from polyvinyl acetal resin - Google Patents
Manufacture of grinding stone made from polyvinyl acetal resinInfo
- Publication number
- JPS58192757A JPS58192757A JP7615682A JP7615682A JPS58192757A JP S58192757 A JPS58192757 A JP S58192757A JP 7615682 A JP7615682 A JP 7615682A JP 7615682 A JP7615682 A JP 7615682A JP S58192757 A JPS58192757 A JP S58192757A
- Authority
- JP
- Japan
- Prior art keywords
- grinding
- resin
- pvat
- suspension
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/30—Resins or natural or synthetic macromolecular compounds for close-grained structure
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、金属類の鏡面仕上、光学部品の最終仕上、電
子部品の精密研磨等に用いられる新規なポリビニルアセ
タール(以下PVAtと略記する)系樹脂砥石の製造方
法に関するものであシ、その目的とするところは、スク
ラッチの発生がなく、砥粒保持性に優れ、種々の砥粒が
使えることによって高精度、高能率研磨を行うことがで
きる■ムを系樹脂砥石の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a novel polyvinyl acetal (hereinafter abbreviated as PVAt) resin grindstone used for mirror finishing of metals, final finishing of optical parts, precision polishing of electronic parts, etc. Its purpose is to create a resin abrasive wheel that does not generate scratches, has excellent abrasive grain retention, and can use a variety of abrasive grains to perform high-precision, high-efficiency polishing. The present invention relates to a manufacturing method.
従来、金属材料、非金属材料や石材等の曲面研磨や仕上
研磨には、■PVAt系樹脂砥石を用いる方法、■遊離
砥粒、ラップ液及びラップクロスを用いるラッピングま
たはポリッシングという研磨方法5■軟質ポリウレタン
フオームに砥粒を付着させたものを用いる方法(特開昭
56−126581号)等が知られている。Conventionally, for curved surface polishing and final polishing of metal materials, non-metallic materials, stone materials, etc., there are two methods: ■ A method using a PVAt-based resin grindstone, ■ A polishing method called lapping or polishing using free abrasive grains, lapping liquid, and lapping cloth 5. ■ Soft polishing method A method using a polyurethane foam to which abrasive grains are attached (Japanese Patent Application Laid-Open No. 126581/1983) is known.
しかし、それぞれ次のような欠点があった。However, each had the following drawbacks.
■のPVAt系樹脂砥石は、ポリビニルアルコール(以
下PVAと略記する)、アルデヒド、酸、気孔生成剤か
らなるPVAt反応系中に%砥粒を分散懸垂せ]、めた
状態で加熱し、アセタール化させることによって製造す
るものであり、他の合成樹脂砥石では得ることができな
い、高弾性、高遠続究孔率及び高砥粒率のものが得られ
るものである。The PVAt-based resin grinding wheel (3) is made by dispersing and suspending % abrasive grains in a PVAt reaction system consisting of polyvinyl alcohol (hereinafter abbreviated as PVA), aldehyde, acid, and a pore-forming agent], then heating it in a wet state to acetalize it. This grindstone has high elasticity, high continuous porosity, and high abrasive grain rate, which cannot be obtained with other synthetic resin grindstones.
しかし7ながら、従来のPVA を系樹脂砥石は、砥粒
が凝集していることによるものと思われるスクラッチが
生じること或いはアセタール化工程を要するので限られ
た種類の砥粒しか用いることができないという欠点があ
った。However, with conventional PVA-based resin grindstones, only limited types of abrasive grains can be used because scratches occur, which is thought to be due to agglomeration of the abrasive grains, and an acetalization process is required. There were drawbacks.
従って、従来のPVAt系樹脂砥石は、ステンレス、銅
、アルミニウム、ニッケル等のミラーポリッシ、レンズ
やプリズム等の光学部品のファイナルボリツシ、
づ:仁士邊ヴ法丑づ=辷、更に、半導体材料のエピタキ
シャル成長を促進するような極めて滑らかな平面度、平
行度を得る必要のある水晶、サファイア単結晶等のポリ
ツシ、ICやLSIのシリコン、ゲルマニウムソの細化
合物半導体のミラーボリッシ等の分野には僅かしか用い
られていないものであった。Therefore, conventional PVAt resin grindstones are suitable for mirror polishing of stainless steel, copper, aluminum, nickel, etc., final polishing of optical components such as lenses and prisms, and also for semiconductor materials. It is rarely used in fields such as polishing of quartz crystals and sapphire single crystals that require extremely smooth flatness and parallelism to promote epitaxial growth, mirror polishing of silicon for ICs and LSIs, and fine compound semiconductors such as germanium. It was something that had not been done yet.
■の研磨方法は、砥粒とラップ液の飛散が多く、作業者
の体や衣服を汚したり、他の部品や機械に付着するので
作業環境が悪いこと、また砥粒、フッ1液、ラップクロ
スを用いるので研磨条件(研磨圧力、研磨剤濃度等)を
均一に長時間維持することが峙しいこと、更に、砥粒と
ラップ液の混合したものを供給しながら研磨するので飛
散等圧より実際に研磨に関与しない砥粒まで捨てること
になるので不経済であるという欠点があった。The polishing method (2) causes a lot of scattering of abrasive grains and lapping liquid, which stains the worker's body and clothes, and adheres to other parts and machines, creating a poor working environment. Since a cloth is used, it is difficult to maintain uniform polishing conditions (polishing pressure, polishing agent concentration, etc.) for a long period of time.Furthermore, since polishing is performed while supplying a mixture of abrasive grains and lapping liquid, it is less likely to scatter at equal pressure. This method has the disadvantage that it is uneconomical because even abrasive grains that do not actually participate in polishing are discarded.
■の研磨方法では、軟質ポリウレタンフォームに含有さ
れる砥^低いこと、軟質ポリウレタンフォームは圧縮強
度が弱く、よって研磨能率が悪 」いという欠
点があった。The polishing method (2) had the disadvantage that the abrasive content contained in the flexible polyurethane foam was low, and the compressive strength of the flexible polyurethane foam was low, resulting in poor polishing efficiency.
それで、前記分野で使用できるPVAt系樹脂砥石が各
ユーザーから要求されていた。Therefore, various users have been requesting a PVAt-based resin grindstone that can be used in the above-mentioned fields.
本発明は、前記■のPVAt系樹脂砥石の改良に関する
ものである。The present invention relates to the above-mentioned improvement of the PVAt resin grindstone.
■において、ヌクラッチが生じる原因である砥化度等の
各条件の枠が定められていることに起因する。最も砥粒
率が低ければ前記砥粒の凝集は緩和できるが研磨能率を
考えると砥粒率を高くしなければならず、この場合砥粒
の凝集を避けることができなかった。このために16μ
m以下の超微粉を凝集させずに分散、懸垂せしめること
Fi極めて難しい点にあった。In (2), this is due to the fact that the framework of each condition such as the degree of abrasiveness, which is the cause of the occurrence of scratches, is determined. If the abrasive grain ratio is the lowest, the agglomeration of the abrasive grains can be alleviated, but in consideration of polishing efficiency, the abrasive grain ratio must be increased, and in this case aggregation of the abrasive grains cannot be avoided. For this purpose 16μ
It is extremely difficult to disperse and suspend ultrafine powder with a particle diameter of less than 100 m without causing agglomeration.
次に1種々の砥粒が使えない理由は、PVAt系樹脂砥
石を得るには、かなり高濃度の酸性領域下でアセタール
化反応を進行させる必要があるために、酸と直接反応す
る砥粒とか、アセタール化反応に微妙に影響を及ぼし満
足すべき気孔形顔を得難くするような砥粒は使用できな
かったのであり必然的に溶融アルミナや嶌化珪素等の砥
粒に限定されでいたのである。そのために、研磨目的に
合わない砥粒により研磨を行うことになり研磨能率が悪
いものであった。また、従来のPVAt系樹脂砥石の製
法では、製造工程中での砥粒の損失が多く、このために
高価なダイヤモンド砥粒等は使用できないものであった
。Next, the reason why various types of abrasive grains cannot be used is that in order to obtain a PVAt-based resin grindstone, it is necessary to proceed with the acetalization reaction in a highly concentrated acidic region. However, it was not possible to use abrasive grains that would subtly affect the acetalization reaction and make it difficult to obtain a satisfactory pore shape, and it was inevitably limited to abrasive grains such as fused alumina and silicon oxide. be. Therefore, polishing was performed using abrasive grains that did not suit the purpose of polishing, resulting in poor polishing efficiency. Furthermore, in the conventional method for manufacturing a PVAt-based resin grindstone, there is a large loss of abrasive grains during the manufacturing process, which precludes the use of expensive diamond abrasive grains.
そこで、本発明者は上述の諸点、に鑑み種々研究した結
果、所期の目的を達成し得る本発明を得ることに成功し
たのである。Therefore, as a result of various studies in view of the above-mentioned points, the present inventor succeeded in obtaining the present invention which can achieve the intended purpose.
即ち、特許請求の範囲に記載した第1番目の発明は、P
VA を系多孔質体に、砥粒、分散剤、分散媒からなる
懸濁液を一定量含浸させた後、乾燥し糸
で%P’VAt恭多孔質体中に砥粒を凝集させることな
く均一に付着させることを特徴とするPVAt系樹脂砥
石の製造方法であり、第2番目の発明は、PVAを系多
孔質体9粒、分散剤、分散媒、水性樹脂からなる懸濁液
を一定量含浸させた後、乾燥して、PVAt系多孔質体
中に砥粒を凝集させるととなく均一に付着させることを
特徴とするPVAt系樹脂砥石の製造方法である7
本発明は基材としてPVAt、系多孔質体を用いるもの
であり、PVAの種類、気孔の大きさ、アセタール化度
等は特に限定することはないが、研磨目的に応じて適宜
用いることができる。That is, the first invention stated in the claims is P
After impregnating a certain amount of a suspension consisting of abrasive grains, a dispersant, and a dispersion medium into a porous material based on VA, it is dried and woven with a thread to prevent the abrasive grains from agglomerating into the porous material. This is a method for producing a PVAt-based resin grindstone, which is characterized by uniformly adhering the grindstone. A method for manufacturing a PVAt-based resin grindstone, which is characterized by impregnating the PVAt-based resin with a certain amount and then drying it so that the abrasive grains are uniformly adhered to the PVAt-based porous material without agglomerating them. A PVAt-based porous body is used, and the type of PVA, the size of the pores, the degree of acetalization, etc. are not particularly limited, but can be used as appropriate depending on the purpose of polishing.
嵩比重についてはO,Oa〜0.45g/ンの範囲のも
のを用いることが望ましい。なぜなら、本発明に用いる
PVAt系多孔質体は連続慨孔性に冨んでいることが必
要である。この連続気孔率は嵩比重が小さい程連続完孔
率が大という逆比例的関係にある。嵩比重が0.[lQ
Δ−より小であると、品質が不安定であり、一方、嵩比
重が0.45 f /Cylより大であると本発明の含
浸に必要な連続気孔率が得られなくなるので好ましくな
い、また、上記範囲はPVAt系樹脂砥石としての機械
的強度を満足させるためのものであり、ホリウレタンフ
ォームのような高圧縮しなくとも十分砥石強度があるも
のである。Regarding the bulk specific gravity, it is desirable to use one in the range of O, Oa to 0.45 g/n. This is because the PVAt-based porous material used in the present invention needs to have continuous porosity. The continuous porosity is in an inversely proportional relationship such that the smaller the bulk specific gravity is, the greater the continuous complete porosity is. Bulk specific gravity is 0. [lQ
If it is smaller than Δ-, the quality will be unstable, while if the bulk specific gravity is larger than 0.45 f/Cyl, it will not be possible to obtain the continuous porosity necessary for the impregnation of the present invention, which is not preferable. The above range is for satisfying the mechanical strength as a PVAt-based resin grindstone, and the grindstone has sufficient strength without being highly compressed like polyurethane foam.
次にpvムを系多孔質体が用いられる理由は、PvAt
系多孔質体が親水性に富むOH基を分子内に多く含むた
め吸水性に優れ、また、独特の気孔形態のために保水力
が優れていることから、後で述べるように本発明の目的
に最適な樹脂であるといえる。この気孔形態については
、複雑な内部構造をもっており、懸濁液を含浸した際に
、砥粒が気孔凹部に吸着され研磨作業時に有効に作用す
る利点がある。Next, the reason why pvm-based porous materials are used is that PvAt
The porous material contains many highly hydrophilic OH groups in its molecules, so it has excellent water absorption properties, and its unique pore structure has excellent water retention capacity. It can be said that it is the most suitable resin for This pore form has a complicated internal structure, and when impregnated with a suspension, the abrasive grains are adsorbed to the pore recesses and have the advantage of being effective during polishing operations.
更圧、本発明の基材として用いるPVAt多孔質体は、
既に砥粒が均一に分散、付着しているものであってもよ
い。Further pressure, the PVAt porous body used as the base material of the present invention is
The abrasive grains may already be uniformly dispersed and adhered thereto.
以上のPVAt系多孔質体は、目的とする製品の形状に
できるだけ近い遍法にし−でおくことがロスを少なくす
ることから望ましい。It is desirable that the above-mentioned PVAt-based porous body be made into a uniform shape as close as possible to the shape of the intended product in order to reduce loss.
の他、 PVAt、系樹脂砥石において酸と加熱により
使用できないとされていたエメリー、酸化セリウム等の
砥粒であり、特に酸化セリウムは、ガラス研磨に優れて
いる。また、アセタール化反応後、残留した気孔生成剤
、酸、アルデヒドなどを除去させる水洗工程中流出し使
用できないとされていた高価な砥粒、例えばダイヤモン
ド、ポフゾン等も使用でき、優れた研削、研磨を行うこ
とができる。これらを二種以上混合して使用してもよい
。In addition, there are abrasive grains such as PVAt, emery, which was considered unusable due to acid and heating in resin grindstones, and cerium oxide, and cerium oxide is particularly excellent for glass polishing. In addition, it is possible to use expensive abrasive grains, such as diamond and pofzon, which were considered unusable because they flow out during the washing process to remove residual pore-forming agents, acids, aldehydes, etc. after the acetalization reaction, resulting in excellent grinding and polishing. It can be performed. Two or more of these may be used in combination.
砥粒の粒径は75μmよυ小さいものであれば十分本発
明方法に従うことができるが、本発明の目的および効果
を最大限に発揮するのは16μm以下の超微粉である。Although the method of the present invention can be fully carried out as long as the particle size of the abrasive grains is as small as 75 μm, it is ultrafine powder of 16 μm or less that maximizes the objectives and effects of the present invention.
砥粒率は、その研磨目的に応じて懸濁液中の砥粒濃度を
変えるだけで任意に調節できるが、従来の微粉PVAt
系樹脂砥石では得られない60〜90Jチガの高砥粒率
が容易に得られる特徴がある。The abrasive grain ratio can be adjusted arbitrarily by simply changing the abrasive grain concentration in the suspension depending on the purpose of polishing, but conventional fine powder PVAt
It has the characteristic that a high abrasive grain rate of 60 to 90 J, which cannot be obtained with resin based grindstones, can be easily obtained.
本発明に用いる分散剤としては、ポリオキシエチレン型
やソルビタン誘導体の非イオン系、スルホネート型、サ
ルファネート型、ホスフェート型などの陰イオン系、第
四級アンモニウム塩、イミダシリン型などの陽イオン系
のいずれのものも使用できるが、分散および懸垂効果を
高めるためにHLBが11〜18のものが好ましく、さ
らに浸透を考慮した場合は、)ILBが11〜16のも
のが望ましい。Dispersants used in the present invention include nonionic types such as polyoxyethylene type and sorbitan derivatives, anionic types such as sulfonate types, sulfanate types, and phosphate types, and cationic types such as quaternary ammonium salts and imidacillin types. Although any of them can be used, those with an HLB of 11 to 18 are preferred in order to enhance dispersion and suspension effects, and those with an ILB of 11 to 16 are preferred when considering penetration.
本発明の分散線は、FVAt樹脂多孔質体中和均−に砥
粒を含有せしめるために、水または水が主体となるもの
であることが必要な条件である。The dispersion line of the present invention is required to be water or water-based in order to neutralize the FVAt resin porous body and evenly contain the abrasive grains.
なぜなら、PVAt樹脂多樹脂体孔質体中圧多くのOH
基を有しており、これと1vAt樹脂多孔質体れば、水
が最適なキャリヤーとなって砥粒を片ムを樹脂多孔質体
中へ、内部まで均一に導入するものである。また、PV
At樹脂多樹脂体孔質体吸収した状態においては、水が
可塑剤として作用し、非常に柔軟になり圧縮回復弾性に
富むという特性を有することから、PVAt、樹脂多孔
質体に前記懸濁液を浸漬した後、必要に応じて絞りロー
ル、遠心操作等により適当な含浸度にコントロールでき
ること、更に、その後工程としての乾燥工程によって、
砥粒のマグレーションを惹起することなく、水のみが揮
散し、かくして、PVAt@脂多孔質体中に内部まで均
一に砥粒を含有させたPVAtIM脂砥石が得られるか
らである。This is because the PVAt resin multi-resin material porous material has a large amount of medium pressure and OH.
When combined with a 1vAt resin porous body, water becomes an optimal carrier and uniformly introduces the abrasive grains into the resin porous body. Also, PV
In the state in which At resin is absorbed into the porous body of polyresin, water acts as a plasticizer, making it extremely flexible and having high compression recovery elasticity. After soaking, the degree of impregnation can be controlled by squeezing rolls, centrifugation, etc. as necessary, and furthermore, by a drying process as a subsequent process,
This is because only water is volatilized without causing magnification of the abrasive grains, and thus a PVAtIM fat abrasive stone in which the abrasive grains are uniformly contained inside the PVAt@fat porous body can be obtained.
また、アセトン、メチルアルコール等の水に可溶な有機
溶剤を少量加えた水が主体である分散媒を用いた場合は
、水を用いた分散媒の作用効果と同様であり、乾燥時間
が早くなる利点がある。In addition, when using a dispersion medium mainly composed of water to which a small amount of a water-soluble organic solvent such as acetone or methyl alcohol is added, the effect is similar to that of a dispersion medium using water, and the drying time is faster. There are some advantages.
本発明の砥粒、分散剤、分散媒は通常の分散方法によっ
て懸濁液とすることができる。The abrasive grains, dispersant, and dispersion medium of the present invention can be made into a suspension by a conventional dispersion method.
次に、第2の本発明は、砥粒、水、分散剤からなる懸濁
液中に水性の樹脂液を混合して用いることができる。用
いられる樹脂は、市販の水溶液型、エマルジ冒ン型で、
澱粉、カゼイン等の天然高分子や、ビニル系、アクリル
系、ゴム系、ウレタン系、エポキシ系、フェノール系等
の各種合成高分子である。これは、PVAt多孔質体と
砥粒との接着を強固にし、PVA t、多孔質体の機械
的性質、熱的性質等を向上させるものである。Next, in the second aspect of the present invention, an aqueous resin liquid can be mixed into a suspension consisting of abrasive grains, water, and a dispersant. The resin used is a commercially available aqueous solution type or emulsion type.
These include natural polymers such as starch and casein, and various synthetic polymers such as vinyl, acrylic, rubber, urethane, epoxy, and phenol polymers. This strengthens the adhesion between the PVAt porous body and the abrasive grains, and improves the mechanical properties, thermal properties, etc. of the PVAt porous body.
なお、第1の発明において、前記諸性質を向上させるた
めに、懸濁液を含浸後、水性樹脂や溶液型の樹脂で処理
してもよい。In addition, in the first invention, in order to improve the above-mentioned properties, the suspension may be impregnated and then treated with an aqueous resin or a solution type resin.
PVAt多孔質体に、懸濁液を含浸させる方法は、懸濁
液中にPVAt多孔質体を浸漬させるか、PVAを多孔
質体に懸濁液を上から含浸させればよい。A method for impregnating the PVAt porous body with the suspension may be by immersing the PVAt porous body in the suspension, or by impregnating the PVA porous body with the suspension from above.
懸濁液を所定量保持したPVAt多孔質体は、通常の熱
風乾燥賞で水分を除去する。また、前記水性の樹脂液を
用いた場合は、それぞれの樹脂液に見合った温度、時間
が選定され用いられる。The PVAt porous body holding a predetermined amount of the suspension is subjected to ordinary hot air drying to remove moisture. Furthermore, when the aqueous resin liquid is used, the temperature and time appropriate for each resin liquid are selected and used.
本発明は、以上の構成からなるものであるから次のよう
な効果がある。Since the present invention has the above configuration, it has the following effects.
本発明は、PVAt樹脂砥石であるから砥粒等の飛散が
なく作業環境を改善することができ、研磨条件の管理も
容易になり、また砥粒が有効に働く、町ので研磨効率が
よくなり、経済的になった。Since the present invention is a PVAt resin grindstone, there is no scattering of abrasive grains, which improves the working environment. It also makes it easier to manage polishing conditions, and the abrasive grains work effectively, improving polishing efficiency. , became economical.
本発明は、軟質ポリウレタンフォームの方法に比べ、高
砥粒率のものが得られるので、研磨能率がよいものであ
る。Compared to the method using flexible polyurethane foam, the present invention provides a product with a high abrasive grain ratio, so it has good polishing efficiency.
本発明は、PVAt系多孔質体に、砥粒を均一に分散し
たものを含浸させるものであり、砥粒が凝集していない
のでスクラッチが生じないpVAt系樹脂砥石が得られ
るようになった。また、アセタール化工程を要しないの
でいかなる種類の砥粒でも使用することができ、研磨目
的に合った砥粒を用いることにより、高精度、高能率研
磨を行えるようになった。In the present invention, a PVAt-based porous body is impregnated with uniformly dispersed abrasive grains, and since the abrasive grains are not aggregated, a pVAt-based resin grindstone that does not cause scratches can be obtained. Furthermore, since no acetalization step is required, any type of abrasive grain can be used, and by using abrasive grains that match the purpose of polishing, it has become possible to perform highly accurate and highly efficient polishing.
第2の発明では、水性樹脂を加えるのでPVAt多孔質
多孔路体骨格との接着を強力にすると共に諸性質を向上
させることができ、能率のよい研磨ができるのである。In the second invention, since an aqueous resin is added, it is possible to strengthen the adhesion to the PVAt porous path body skeleton, improve various properties, and perform polishing with high efficiency.
次に実施例を挙げて本発明の詳細な説明する。Next, the present invention will be explained in detail with reference to Examples.
実施例 1゜
PTAt多孔質体(アセタール化度78モルチ、気孔率
89%、嵩比重Q、14fl/’CI/ )に、平均粒
径n、sμmの酸化クロム80#、分散剤としてとドロ
キシエチルセルa−ス(ハーキエレス社製NatrOs
O1250H)0.5%水溶液io#からなる懸濁液を
含浸させて乾燥し、成型して、嵩比重0.9417Cw
!、砥粒率$5wt%、気孔率74%のpVAtlJ脂
砥石を得、た。この砥石で45μmのダイヤモンドディ
ヌクで荒うオビングにより厚さを規制したサファイア単
結晶を3μ哨ペースト状ダイヤモンドを用いてラッピン
グにより表面粗さを0.01〜0.05μm度に中仕上
加工したものを、蒸留水を用いて研磨したところ、表面
粗さ105−以下で加工変質層が全くなく、エピタキシ
ャル成長用の基板として使用できる超精密無歪面を得た
。Example 1 A porous body of PTAt (acetalization degree 78 molti, porosity 89%, bulk specific gravity Q, 14 fl/'CI/), chromium oxide 80# with an average particle size n, s μm, and droxy as a dispersant were added. Ethyl cell a-se (NatrOs manufactured by Herkieless)
O1250H) Impregnated with a suspension consisting of 0.5% aqueous solution io#, dried and molded to obtain a bulk specific gravity of 0.9417Cw.
! A pVAtlJ abrasive stone with an abrasive grain content of $5 wt% and a porosity of 74% was obtained. A sapphire single crystal whose thickness was regulated by rough oving with a 45 μm diamond diamond was semi-finished to a surface roughness of 0.01 to 0.05 μm by lapping with a 3 μm diamond paste. When polished using distilled water, an ultra-precision strain-free surface with a surface roughness of 10<5>- or less and no damaged layer was obtained, which can be used as a substrate for epitaxial growth.
比較例 1゜
軟質ポリウレタンフォーム(気孔率97%、平均気孔径
0.4鯉、嵩比重0.049&(シー)を実施例1の懸
濁液中に浸漬して取り出し乾燥し、成型したものは、嵩
比重0.05I//Cm、砥粒率20 vt% 、気孔
率97−であった、この砥石で実施例1と全く同じ条件
で、実施例1のPVAt樹脂砥石の代わりに研磨したと
ころ、通常の顯11Mで観察できる程度のへき開を含む
梨地面の状態であった。基板として用いるには数倍の研
磨時間がかかった。Comparative Example 1. Soft polyurethane foam (porosity 97%, average pore diameter 0.4, bulk specific gravity 0.049) was immersed in the suspension of Example 1, taken out, dried, and molded. , a bulk specific gravity of 0.05 I//Cm, an abrasive grain ratio of 20 vt%, and a porosity of 97. , the surface had a satin surface including cleavage that could be observed with a normal 11M inkstone.It took several times as much polishing time to use it as a substrate.
実施例 Z
pVAt多孔質体(アセタール化度58七ルチ、気孔率
89%、嵩比重0.1’4 fl/C1/)に、Cφ1
500#砥粒76kq、水180&9、メタノール20
#、分散剤(日本乳化剤株式会社製Disrol −S
H) 0.8 #よりなる懸濁液を給み込ませた後、乾
燥して水分を除去した。Example Z pVAt porous body (degree of acetalization 587%, porosity 89%, bulk specific gravity 0.1'4 fl/C1/), Cφ1
500# abrasive grain 76kq, water 180&9, methanol 20
#, Dispersant (Disrol-S manufactured by Nippon Nyukazai Co., Ltd.)
H) After feeding a suspension consisting of 0.8 #, it was dried to remove water.
次にレゾール型フェノール樹脂(住友デ島レス株式会社
製PR−940)のメタノールlOチ溶液中に浸漬して
含浸度(含浸後磁石重量/含浸前砥石重量)が1.6に
なるように脱液し、予備乾燥で揮発分を除去したあと、
150”Cで熱処理許動肩定の寸法に成型した。このP
V A’を樹脂砥石は嵩比重0.67 gΔ7、砥粒
率74wt%、気孔率71チであった。この砥石で、ニ
ッケル板(前加工C”800のPVAt樹脂砥石)を研
磨したところ、スクラッチのまったく入らない鏡面が得
られた。Next, a resol-type phenolic resin (PR-940, manufactured by Sumitomo Dejima Res Co., Ltd.) was immersed in a methanol solution to remove the resin so that the degree of impregnation (magnet weight after impregnation/weight of grindstone before impregnation) was 1.6. After draining and pre-drying to remove volatiles,
It was heat treated at 150"C and molded to the specified dimensions.
The resin grinding wheel VA' had a bulk specific gravity of 0.67 gΔ7, an abrasive grain ratio of 74 wt%, and a porosity of 71 cm. When a nickel plate (pre-processed C"800 PVAt resin grindstone) was polished with this grindstone, a mirror surface with no scratches was obtained.
、 PVAt多孔質体(アセタール化度60七ルチ
、気孔率91%、嵩比重口、 1211/Cd )に、
平均粒子径1.2μmの酸化セリウム50#、水120
#、分散剤(日本乳化剤株式会社製Di、5rO1−8
H) 0.48 kgよりなる懸濁液を含浸した後、乾
燥した。次に、溶剤型熱硬化性アクリル樹脂(三愛レイ
ヨン株式会社製BE−5102)の!2チ1.1.1、
トリクロルエタン溶液中に浸漬17て、含浸度が1.6
になるように脱液し、予備乾燥で揮発分を取り除いてか
ら150℃で熱処理後、所定の寸法に成型して、嵩比重
0.751/ン、砥粒率77載チ、気孔率78%のPv
At411Ii脂砥石を得た。このれた艶が得られた。, PVAt porous body (degree of acetalization 607%, porosity 91%, bulk specific gravity, 1211/Cd),
Cerium oxide 50# with an average particle size of 1.2 μm, water 120
#, dispersant (Di, 5rO1-8 manufactured by Nippon Nyukazai Co., Ltd.
H) A suspension consisting of 0.48 kg was impregnated and then dried. Next, the solvent type thermosetting acrylic resin (BE-5102 manufactured by San-Ai Rayon Co., Ltd.)! 2chi 1.1.1,
Immersed in trichloroethane solution for 17 minutes, the degree of impregnation is 1.6.
After removing the volatile matter through pre-drying, it is heat-treated at 150°C and molded to the specified dimensions, with a bulk specific gravity of 0.751/ton, an abrasive grain ratio of 77%, and a porosity of 78%. Pv of
An At411Ii fat grindstone was obtained. This luster was obtained.
実施例 4゜
PVAt多孔質体(アセタール化度60七ルチ、気孔率
91%、嵩比重(Ll 217Cd )に、平均粒径1
.4戸mの酸化シルコニニウム45#、アクリル酸エス
テル樹脂エマルジ菖ン(昭和高分子株式会社製AP−5
0)2.4#、水9.6に9、分散剤(日本乳化剤株式
会社製Disrol H12) !h、5に4Iよりな
る懸濁液を染み込ませた後、熱風乾燥により水分を除去
し、嵩比重0,641/Crd、砥1a:4A 8o
wt%jFc孔率ao qb cy) PVAt樹脂砥
石を得た。Example 4 PVAt porous material (degree of acetalization 607%, porosity 91%, bulk specific gravity (Ll 217Cd ), average particle size 1
.. 4 m silconinium oxide 45#, acrylic acid ester resin emulsion (AP-5 manufactured by Showa Kobunshi Co., Ltd.)
0) 2.4#, water 9.6 to 9, dispersant (Disrol H12 manufactured by Nippon Nyukazai Co., Ltd.)! h, After impregnating 5 with a suspension consisting of 4I, water was removed by hot air drying, bulk specific gravity 0,641/Crd, abrasive 1a: 4A 8o
wt%jFc porosity ao qb cy) A PVAt resin grindstone was obtained.
このPVAt[脂砥石を用いてシリコンウェファ−を研
磨したところ、スクラッチの入らない鏡面が得られた。When a silicon wafer was polished using this PVAt grindstone, a scratch-free mirror surface was obtained.
実施例 シ
PVAt多孔質体(アセタール化度52七ルチ、気孔率
92%、嵩比重0.1297Cd)を所定の寸法に成型
した。水性ウレタン樹脂水溶液(&5wtチ)中に、ダ
イヤモンド(平均粒径6μ)を1.5wt%含有するよ
うに均一分散した懸濁液を作り、核PVAt多孔質体に
含浸度48倍量を含浸した後、熱風乾燥して。Example A PVAt porous body (degree of acetalization: 527 ruti, porosity: 92%, bulk specific gravity: 0.1297Cd) was molded into predetermined dimensions. A suspension containing 1.5 wt% of diamonds (average particle size 6μ) was prepared in an aqueous urethane resin solution (&5wt), and the core PVAt porous body was impregnated with an amount 48 times the impregnation degree. Then, dry with hot air.
pVAt樹脂砥石(電比i CL 139/(41、コ
ンセントレージ冒ン25、気孔率89%)を得た。A pVAt resin grindstone (electronic ratio i CL 139/(41, concentration ratio 25, porosity 89%) was obtained.
とのPVAt樹脂砥石で蒸留水を用いて研磨したところ
、ヌクラッチのまったく人らない、平面度平行度が特に
優れ、かつ、加工変質層がほとんどない表面が得られ、
工C用のウェファ−として十分通用するものであった。When polished with a PVAt resin grindstone using distilled water, a surface with particularly excellent flatness and parallelism, with no scratches, and almost no damaged layer was obtained.
It was sufficiently usable as a wafer for Process C.
実施例 6゜
PvAt多孔質体(アセタール化度52七ルチ、気孔率
93チ、嵩比重0.09 jJ/Cm’、)を平均粒径
8μmの炭化けい素30幻、平均粒径1.5戸の酸化ク
ロム40kQ、ヒドロキシエチルセルロース(ハーキ纂
しス社F!Nat、roso1250 H) 0.5
To水溶液30紳からなる懸濁液中に浸漬し、含浸度3
.8倍量を含浸したのち、熱風乾燥してPVA t、樹
脂砥石(嵩比重0.27、砥粒率66W′1.%、気孔
率89チ)を得た。Example 6 PvAt porous material (degree of acetalization 527 μm, porosity 93 μm, bulk specific gravity 0.09 jJ/Cm') was mixed with silicon carbide having an average particle size of 8 μm and an average particle size of 1.5 μm. Chromium oxide 40kQ, hydroxyethyl cellulose (Harkissushi F! Nat, roso1250 H) 0.5
It was immersed in a suspension consisting of 30 cm of To aqueous solution, and the impregnation degree was 3.
.. After impregnating 8 times the amount, it was dried with hot air to obtain a PVA t resin grindstone (bulk specific gravity: 0.27, abrasive grain ratio: 66W'1.%, porosity: 89cm).
この砥石を用いて装飾用の真珠の表面を研磨したところ
、キズのまったく入らない、極めて優れた艶が得られた
。When the surface of a decorative pearl was polished using this whetstone, an extremely high luster with no scratches was obtained.
特許出願人
日本特殊研砥株式会社
手続補正書(自発)
1.事件の表示
昭和57年特許願第76156号
2、発明の名称
ポリビニルアセタール系樹脂砥石の製造方法3、補正を
する者
事件との関係 特許出願人
京都市南区吉祥院御池町18番地
4、補正の対象
明細書の「特許請求の範囲」の欄と「発明の詳細な説明
」の欄
1)特許請求の範囲の記載を別紙の通り訂正する。Patent applicant Nippon Tokushu Kento Co., Ltd. procedural amendment (voluntary) 1. Description of the case 1982 Patent Application No. 76156 2 Name of the invention Method for manufacturing polyvinyl acetal resin grindstone 3 Person making the amendment Relationship to the case Patent applicant 18-4 Kisshoin Oike-cho, Minami-ku, Kyoto City, Amendment 1) Correct the claims in the "Claims" column and "Detailed Description of the Invention" column of the subject specification as shown in the attached sheet.
2)第5頁第8行の「最も」を1つとも」に訂正する。2) Correct "most" in line 8 of page 5 to "all."
5)第5頁第U行「しい点にあった。」を「しいもので
あった。」に訂正する。5) On page 5, line U, ``It was at the right point.'' is corrected to ``It was the right thing.''
り第9頁第14行「・・・・・・できるが、」と「従来
」の間に「前記した」を加える。Page 9, line 14, add ``as described above'' between ``I can do it, but'' and ``conventionally''.
5)第9頁第14行の「・・・・樹脂砥石」と「では得
られない・・・・」の間に次のことを加える。5) Add the following on page 9, line 14, between "...resin grindstone" and "it cannot be obtained with...".
「及びその他の合成樹脂砥石」
6)第9頁第14の「・・・・砥粒のマ」と「グレ゛−
シツン・・・・」の間に「イ」を加える。``And other synthetic resin grindstones'' 6) Page 9, No. 14, ``... Abrasive grains'' and ``Gray''
Add "i" between "shitsun...".
7)第9頁第14の「・・・・である。」の後に次のと
とを加える。7) Add the following and after "..." on page 9, number 14.
rpvht樹脂多孔樹脂多孔合体含浸度は特にこだわる
必要はない。つまり、先に述べたとおシ、PTA を樹
脂多孔質体は、分子中に多くの親水性α
に富むOH基を有することと、複雑な内部構造を有する
気孔形態とがあいまって、含浸度の値に関係なく、含浸
後の乾燥工程における砥粒のマイ
〜グレーシロンを引き起こさないことと、含浸液の付着
量の試料内でのバラツキが少ないからである。pyAt
樹脂以外の多孔質体、たとえばウレタンフオームを例
にとるとその気孔形態のために含浸度を高くすると乾燥
中の砥粒のマイグレーションが激しく、一方、激しいマ
イグレーションを起こさない程度まで脱液した場合、試
料内での含浸液の付着量のバラツキが大となり、かつ、
本発明の目的とするような高砥粒率のものは得られない
。」
8)第n頁第4行目の「・・・・を含浸」と「後、・・
・・」の間に次のことを加える。There is no particular need to be particular about the degree of impregnation of the rpvht resin porous resin. In other words, as mentioned earlier, PTA resin porous materials have many hydrophilic α-rich OH groups in the molecule, and the pore morphology has a complex internal structure, which makes it difficult to impregnate. This is because, regardless of the value, the abrasive grains do not become migratory or grayish in the drying process after impregnation, and there is little variation in the amount of impregnating liquid deposited within the sample. pyAt
Taking a porous material other than resin, such as urethane foam, if the degree of impregnation is increased due to its pore form, migration of the abrasive grains during drying will be severe. The amount of adhesion of the impregnating liquid within the sample varies widely, and
A high abrasive grain ratio as aimed at by the present invention cannot be obtained. 8) On page n, line 4, "Impregnate..." and "After...
Add the following between ``...''.
「させ、乾燥した」
9)第し頁第5行「・・・・もよい。」の後に次のこと
を加える。9) On the second page, line 5, add the following after “...is good.”
「ここで使用する樹脂としては、ポリビニルアルコール
、ポリビニルメチルエーテル、酢酸ヒニル、アクリル、
ポリアミド、アルキド、飽和ポリエステル、ポリウレタ
ン、フェノキシ、ポリスルホン、ポリアリルスルホンな
どの熱可塑性樹脂、フェノール、レゾールシノール、ユ
リア、メラミン、フラン、エポキシ、不飽和ポリエステ
ル、アクリル、インシアネート、シリコーン、アクリル
酸ジエステルなどの熱硬化性樹脂、熱可塑性SBR,ブ
チルゴム、ポリクロロプレン、ニトリルゴム、ポリサル
ファイドなどの合成ゴム系などがある。“Resins used here include polyvinyl alcohol, polyvinyl methyl ether, vinyl acetate, acrylic,
Thermoplastic resins such as polyamide, alkyd, saturated polyester, polyurethane, phenoxy, polysulfone, polyallylsulfone, phenol, resorcinol, urea, melamine, furan, epoxy, unsaturated polyester, acrylic, incyanate, silicone, acrylic diester, etc. These include thermosetting resins, thermoplastic SBR, synthetic rubbers such as butyl rubber, polychloroprene, nitrile rubber, and polysulfide.
これらの樹脂を砥粒を付着せしめたPTAt樹脂系樹脂
系多孔金体して均一に付着せしめるには、水または有機
溶剤中に溶解したもの、あるいは、エマルジ曹ン型のも
のを用いる必要がある。In order to uniformly adhere these resins to a PTAt resin porous metal body with abrasive grains attached, it is necessary to use a resin dissolved in water or an organic solvent, or an emulsion carbon type resin. .
有機溶剤は、n−ペンタン、n−へキサン、け1
イソブチレン、テレ曾ン油などの脂肪族炭化水素、トル
エン、キシレン、ベンゼンなどの芳香族炭化水素、塩化
メチレン、メチルエチルケトン、シクロペンタノンなど
のケトン類、メタノ−ル、エタノール、セロソルブ、グ
リセロールなどのアルコール類などを、樹脂の種類に応
じ11) 第13頁第1行の「比べ、」と「高砥粒率
・・・」の間に次のととを加える。Organic solvents include aliphatic hydrocarbons such as n-pentane, n-hexane, isobutylene, and turmeric oil, aromatic hydrocarbons such as toluene, xylene, and benzene, methylene chloride, methyl ethyl ketone, and cyclopentanone. Alcohols such as ketones, methanol, ethanol, cellosolve, glycerol, etc., depending on the type of resin11) Between "Compare" and "High abrasive rate..." in the first line of page 13. Add the following and.
「圧縮成型などを必要とせず容易に」
12) 第13頁第1行の「・・・・高砥粒率」と「
のものが・・・・」の間に次のことを加える。"Easily done without the need for compression molding etc." 12) "...high abrasive ratio" and "
Add the following between "The thing is...".
「高密度」 13) 第13頁第14行目の「・・・・のである。"High density" 13) Page 13, line 14, “...is.
」の後に次のことを加える。” and then add the following:
「さらに第2の発明においても、懸濁液を含浸させ、乾
燥した後、水性樹脂や溶剤型の樹脂で処理してもよい。"Furthermore, in the second invention, the suspension may be impregnated, dried, and then treated with an aqueous resin or a solvent-based resin.
」
14) 第14頁第2行の「10kg」を「100k
g」に訂正する。14) Change “10kg” in the second line of page 14 to “100k
Correct to "g".
15) 第15頁第3行の「・・・・がかかった。15) Page 15, line 3, “...it took a while.
」と第4行の「実施例2.」の間に次のことを加える。” and the fourth line “Example 2.” Add the following.
軟質ポリエステルポリウレタンフォーム(気泡数30個
、j、嵩比重0.[I2)を実施例1の懸濁液中で絞り
ロールを用いて懸濁液をウレタンフオームの内部まで強
制的に入れた後、懸濁液から取υ出し絞りロールを用い
て含浸度が3,5になるように脱液したあと、乾燥し、
成型したものは、電比]i0.[14、砥粒率52.6
wt%、気孔率98%であった。A flexible polyester polyurethane foam (30 cells, j, bulk specific gravity 0.[I2) was put into the suspension of Example 1 using a squeezing roll to force the suspension into the urethane foam, and then After removing the liquid from the suspension and using a squeezing roll to remove the liquid so that the degree of impregnation is 3.5, it is dried.
The molded product has an electrical ratio]i0. [14, Abrasive ratio 52.6
wt%, and the porosity was 98%.
この砥石で実施例1と全く同じ条件で、実施例1のpv
At樹脂砥石の代りに研磨したところ、比較例1の場合
と同様、通常の顕微鏡で観察できる程度のへき開を含む
梨地面の状態であった。基板として用いるには数倍の研
磨時間がかかった。Using this whetstone, the pv of Example 1 was obtained under exactly the same conditions as in Example 1.
When it was polished using an At resin grindstone instead, as in Comparative Example 1, it had a matte surface including cleavages that could be observed with a normal microscope. It took several times as much polishing time to use it as a substrate.
比較例 &
気泡数24個/ex、嵩電比0.035の膜ぬきをおこ
なった網状ポリエステルポリウレタンフォームを実施例
1の懸濁液中で絞りロールを用いて懸濁液をウレタンフ
オームの内部まで強制的に入れた後、懸濁液から取シ出
し、絞りロールを用いて含浸度が5.5になるように脱
液したあと乾燥し、成型したものは嵩比重0.074、
砥−2,6wt%、気孔率96.6%であった。この砥
石で実施例1と全く同じ条件で、実施例1のPvAt樹
脂砥石の代りに研磨したところ、比較例1の場合と同様
、通常の顕微鏡で観察できる程度のへき開を含む梨地面
の状態であった。基板として用いるには数倍の研摩時間
がかかった。Comparative Example & A reticulated polyester polyurethane foam that had been subjected to membrane removal with a number of bubbles of 24/ex and a bulk ratio of 0.035 was placed in the suspension of Example 1 using a squeezing roll to spread the suspension to the inside of the urethane foam. After being forcibly added, it was taken out from the suspension, and the liquid was removed using a squeezing roll so that the degree of impregnation was 5.5, and then dried, and the molded product had a bulk specific gravity of 0.074.
The abrasiveness was 2.6 wt% and the porosity was 96.6%. When this grindstone was used for polishing in place of the PvAt resin grindstone of Example 1 under exactly the same conditions as in Example 1, as in the case of Comparative Example 1, a satin surface state containing cleavage that could be observed with a normal microscope was obtained. there were. It took several times as much polishing time to use it as a substrate.
比較例 4゜
比較例3で得た砥石を圧縮倍率(圧縮後の寸法/圧縮前
の寸法)が百になるように150℃でプレス成型をおこ
なったものは、嵩比重0.89、砥粒率516wt%、
気孔率59.6%であった。とめ砥石で実施例1と全く
同じ条件で実施例1のPVAt樹脂砥石の代シに研磨し
たととる、肉眼で観察できる程度の深いキズが多数みら
れた。基板としては使用できないものであった。Comparative Example 4゜The whetstone obtained in Comparative Example 3 was press-molded at 150°C so that the compression ratio (dimension after compression/dimension before compression) was 100, and the bulk specific gravity was 0.89 and the abrasive grain was rate 516wt%,
The porosity was 59.6%. Many scratches deep enough to be observed with the naked eye were observed, indicating that they were polished using a miter whetstone in place of the PVAt resin whetstone of Example 1 under exactly the same conditions as in Example 1. It could not be used as a substrate.
比較例 5゜
比較例3で得た砥石を圧縮倍率が)になるように150
°Cでプレス成形をおこなったものは、嵩比重0.30
、砥粒率52.6 Wt %、気孔率86.2チであっ
た。Comparative Example 5゜The grindstone obtained in Comparative Example 3 was compressed to 150 so that the compression ratio was ).
Those press-formed at °C have a bulk specific gravity of 0.30.
The abrasive grain content was 52.6 Wt %, and the porosity was 86.2 cm.
この砥石で実施例1と全く同じ条件で実施例1のPVA
t樹脂砥石の代りに研磨したところ、肉眼で観察できる
程度の深いキズが多数みられた。基板としては使用でき
ないものであった。」
別 紙
2、特許請求の範囲
耗
1、 ポリビニルアセタール系多即質体に、砥粒、分散
剤、分散媒からなる懸濁液を一定量含浸させた後、乾燥
して、ポリビニルアセター/L’系多孔質体中に砥粒を
凝集させることなく均一に付着させることを特徴とする
ポリビニルアセタール系樹脂砥石の製造方法。PVA of Example 1 was processed using this whetstone under exactly the same conditions as Example 1.
When polishing was performed instead of using a T-resin grindstone, many deep scratches that could be observed with the naked eye were observed. It could not be used as a substrate. ” Attachment 2, Claim 1, After impregnating a certain amount of a suspension consisting of abrasive grains, a dispersant, and a dispersion medium into a polyvinyl acetal-based polymer, it is dried to form a polyvinyl acetal/ A method for manufacturing a polyvinyl acetal resin grindstone, which is characterized by uniformly adhering abrasive grains to an L'-based porous body without agglomerating them.
2 分散媒が水、または水を主体とするものである特許
請求の範囲第1項記載のポリビニルアセタール系樹脂砥
石の製造方法。2. The method for producing a polyvinyl acetal resin grindstone according to claim 1, wherein the dispersion medium is water or water-based.
リビニルアセタール系樹脂砥石の製造方法。A method for producing a ribinyl acetal resin grindstone.
1ポリビニルアセタ一ル系多孔質体に、砥粒、分散剤、
分散媒、水性樹脂からなる懸濁液を一定量含浸させた後
、乾燥して、ポリビニルアセター/I/系多孔質体中に
砥粒を凝集させるととなく均一に付着させることを特徴
とするポリビニルアセタール系樹脂砥石の製造方法。1 Polyvinyl acetal porous material, abrasive grains, dispersant,
It is characterized by impregnating a certain amount of a suspension consisting of a dispersion medium and an aqueous resin and then drying it to agglomerate and evenly adhere the abrasive grains into the polyvinyl aceter/I/based porous material. A method for manufacturing a polyvinyl acetal resin grindstone.
& 分散媒が、水、または水を主体とするものである特
許請求の範囲第5項記載のポリビニルアセクール系樹脂
砥石の製造方法。゛& The method for producing a polyvinyl acecool resin grindstone according to claim 5, wherein the dispersion medium is water or water-based.゛
Claims (1)
剤、分散媒からなる懸濁液を一定量含浸させた後、乾燥
して、ポリビニルアセタール系多孔質体中には粒を凝集
させることなく均一に付着させることを特徴とするポリ
ビニルアセタール系樹脂砥石の製造方法。 2、分散媒が水、または水を主体とするものである特許
請求の範囲第1項記載のポリビニルアセタール系樹脂砥
石の製造方法。 3、 ポリビニルアセタール系多孔質体に、砥粒、分散
剤、分散媒、水性樹脂からなる懸濁液を一定量含浸させ
た後、乾燥して、ポリビニルアセタール系多孔質体中に
砥粒を凝集させることなく均一に付着させることを特徴
とするポリビニルアセタール系樹脂砥石の製造方法。 本 分散媒が、水、または水を主体とするものである特
許請求の範囲第3項記載のポリビニルアセタール系樹脂
砥石の製造方法。[Claims] 1. A polyvinyl acetal porous material is impregnated with a certain amount of a suspension consisting of abrasive grains, a dispersant, and a dispersion medium, and then dried. A method for manufacturing a polyvinyl acetal resin grindstone, which is characterized by uniformly adhering grains without agglomerating them. 2. The method for producing a polyvinyl acetal resin grindstone according to claim 1, wherein the dispersion medium is water or water-based. 3. After impregnating a certain amount of a suspension consisting of abrasive grains, a dispersant, a dispersion medium, and an aqueous resin into a polyvinyl acetal porous material, drying is performed to agglomerate the abrasive grains in the polyvinyl acetal porous material. A method for producing a polyvinyl acetal resin grindstone, which is characterized by uniformly adhering the grindstone without causing any build-up. The method for producing a polyvinyl acetal resin grindstone according to claim 3, wherein the dispersion medium is water or water-based.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7615682A JPS58192757A (en) | 1982-05-06 | 1982-05-06 | Manufacture of grinding stone made from polyvinyl acetal resin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7615682A JPS58192757A (en) | 1982-05-06 | 1982-05-06 | Manufacture of grinding stone made from polyvinyl acetal resin |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58192757A true JPS58192757A (en) | 1983-11-10 |
JPS6339384B2 JPS6339384B2 (en) | 1988-08-04 |
Family
ID=13597175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7615682A Granted JPS58192757A (en) | 1982-05-06 | 1982-05-06 | Manufacture of grinding stone made from polyvinyl acetal resin |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58192757A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63150162A (en) * | 1986-12-15 | 1988-06-22 | Kanebo Ltd | Grindstone for polishing semiconductive wafer |
JPH02269569A (en) * | 1989-04-07 | 1990-11-02 | Shinano Denki Seiren Kk | Porous grinding stone for magnetic disk base |
EP0656031A1 (en) * | 1992-08-19 | 1995-06-07 | Rodel, Inc. | Polymeric substrate with polymeric microelements |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04116965U (en) * | 1991-04-01 | 1992-10-20 | 上田繊維興業株式会社 | Combined structure of needle body and thread body |
CN108081159B (en) * | 2017-12-13 | 2019-12-06 | 衢州学院 | method for forming organic gel of polyvinyl acetal resin grinding tool |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5115904A (en) * | 1974-07-31 | 1976-02-07 | Mitsubishi Electric Corp | DOTAISOCHI |
-
1982
- 1982-05-06 JP JP7615682A patent/JPS58192757A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5115904A (en) * | 1974-07-31 | 1976-02-07 | Mitsubishi Electric Corp | DOTAISOCHI |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63150162A (en) * | 1986-12-15 | 1988-06-22 | Kanebo Ltd | Grindstone for polishing semiconductive wafer |
JPH02269569A (en) * | 1989-04-07 | 1990-11-02 | Shinano Denki Seiren Kk | Porous grinding stone for magnetic disk base |
EP0656031A1 (en) * | 1992-08-19 | 1995-06-07 | Rodel, Inc. | Polymeric substrate with polymeric microelements |
EP0656031A4 (en) * | 1992-08-19 | 1995-07-26 | Rodel Inc | Polymeric substrate with polymeric microelements. |
US5578362A (en) * | 1992-08-19 | 1996-11-26 | Rodel, Inc. | Polymeric polishing pad containing hollow polymeric microelements |
US5900164A (en) * | 1992-08-19 | 1999-05-04 | Rodel, Inc. | Method for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelements |
US6439989B1 (en) | 1992-08-19 | 2002-08-27 | Rodel Holdings Inc. | Polymeric polishing pad having continuously regenerated work surface |
Also Published As
Publication number | Publication date |
---|---|
JPS6339384B2 (en) | 1988-08-04 |
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