JPS58160832A - Electrostatic capacity type pressure sensor - Google Patents
Electrostatic capacity type pressure sensorInfo
- Publication number
- JPS58160832A JPS58160832A JP4426682A JP4426682A JPS58160832A JP S58160832 A JPS58160832 A JP S58160832A JP 4426682 A JP4426682 A JP 4426682A JP 4426682 A JP4426682 A JP 4426682A JP S58160832 A JPS58160832 A JP S58160832A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- vacuum
- base support
- hole
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はダイアフラムと基台支持部とを備え、これらの
間に封着部を介して間室ギャップに保たれてなる静電容
量型圧力センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a capacitive pressure sensor comprising a diaphragm and a base supporting part, which are maintained in a gap with a sealing part interposed therebetween.
従来のこの種、ダイアフラムと基台支持部とを備え、こ
れらの間に封着部を介して間室ギャップに保たれてなる
静電容量型圧力センサは、絶対圧検知型の場合、基準圧
力としてギャップの中を真空にするという方法を採る。A conventional capacitive pressure sensor of this kind, which is equipped with a diaphragm and a base support part, and is maintained at a gap between them through a sealing part, is of the absolute pressure detection type, when the reference pressure is The method is to create a vacuum inside the gap.
しかし、一般にギャップは２０μｍ〜８０１ｍと極めて
小さな値に設計されるため、微少な真空漏れに対して長
期の寿命を保障することが困難である。However, since the gap is generally designed to have an extremely small value of 20 μm to 801 m, it is difficult to guarantee a long service life against minute vacuum leaks.
本発明は絶対圧力測定用の静電容量型圧力センサにおい
て微少な真空漏れに対して十分長期に亘っての保障を可
能にすることを目的とするものであり、一対の電気絶縁
材料から成るダイアフラム及び基台支持部と、ダイアフ
ラムに形成された第１の導電層及び基台支持部に形成さ
れた第２の導電層と、ダイアフラムと基台支持部との間
を間室ギャップを保ってシールする封着部と、基台支持
部に形成した真空用貫通孔を外側より覆うように基台支
持部に取り付けられた缶部とを備え、前記ギャップと缶
部内部とを真空にしたものである。The present invention aims to provide a sufficiently long-term guarantee against minute vacuum leaks in a capacitive pressure sensor for measuring absolute pressure, and the present invention uses a diaphragm made of a pair of electrically insulating materials. and the base support, the first conductive layer formed on the diaphragm, the second conductive layer formed on the base support, and the diaphragm and the base support while maintaining a gap between them. and a can part attached to the base support part so as to cover from the outside a vacuum through hole formed in the base support part, and the gap and the inside of the can part are evacuated. be.
以下本発明を実胤の一例を示す図面に基づいて説明する
。図において（１）は圧力を感じて変形するダイアフラ
ム、（２）はこのダイアフラム（１）に対向する基台支
持部であり、これらダイアフラム（１）及び基台支持部
（２）は電気絶縁材料によって形成されている。（３）
は静電容量を発生するためにダイアフラム（１）に設け
た電極（４）と基台支持部（！）に設けた電極（５）と
の間のギャップを形成すると同時にダイアフラム（１）
と基台支持部（２）の周辺間をシールするために設けた
封着部である。前述のように静電容量型圧力センサの電
極（４１（５）間の距離は２０〜８０μｍと極めて小さ
な値であり、電極（４） （Ｉｓ）間ギャップの体積も
極めて小さい。本発明の重要な点は、基台支持部（２）
に電極（４） （ｉ）同体積に比べてかなり大きな体積
を有する中空の金属缶部（６）を配置するところにある
。即ち金属缶部（６）を基台支持部（２）に形成された
真空用貫通孔（７）の下側（外側）に貫通孔（７）を覆
うように配置し、金属缶部（６）の周辺（６ａ）を基台
支持部（２）に固着する。（８）は金属缶部（６）の下
端に形成した空気抜きの孔であり、仁の孔（８）より真
空に引き２半田（９）により真空封止を行ない静電容量
型圧力センサの検知素子部の電極（４） （５）間ギャ
ップと金属缶部（６）の両方を真空状態に保つ。尚輔は
リード線で図外の検知回路部に接続される。上記のよう
な構造を採ることにより真空状態にある体積の増加を図
ることができ、たとえ静電容量型圧力センサに微少な空
気リークが発生していたとしてもその保証期間を長くす
ることが可能となる。ここで、圧力検知素子部の一般的
な形状寸法を基にこの効果全一べてみる。通常絶対圧検
知用静電容量型圧力センサの検知素子部の場合、電極間
距離は２０〜８Ｇ、ｓｕｍである。又ダイアフラムの有
効歪径、即ち封着部（３）で囲まれる円の径は２０〜２
６１１１１である。The present invention will be explained below based on drawings showing an example of actual seeds. In the figure, (1) is a diaphragm that deforms when it feels pressure, and (2) is a base support part that faces this diaphragm (1).These diaphragm (1) and base support part (2) are made of electrically insulating material. is formed by. (3)
To generate capacitance, a gap is formed between the electrode (4) provided on the diaphragm (1) and the electrode (5) provided on the base support (!), and at the same time the diaphragm (1)
This is a sealing part provided to seal between the base support part (2) and the periphery of the base support part (2). As mentioned above, the distance between the electrodes (41(5)) of a capacitive pressure sensor is an extremely small value of 20 to 80 μm, and the volume of the gap between the electrodes (4) (Is) is also extremely small. The main point is the base support part (2)
(i) A hollow metal can part (6) having a considerably larger volume compared to the same volume is placed in the electrode (4). That is, the metal can part (6) is arranged below (outside) the vacuum through hole (7) formed in the base support part (2) so as to cover the through hole (7), and the metal can part (6 ) is fixed to the base support part (2). (8) is an air vent hole formed at the lower end of the metal can part (6), which is evacuated through the hole (8) and sealed in vacuum with solder (9) for detection by a capacitive pressure sensor. Both the gap between the electrodes (4) and (5) of the element part and the metal can part (6) are kept in a vacuum state. Naosuke is connected to a detection circuit (not shown) with a lead wire. By adopting the above structure, it is possible to increase the volume in a vacuum state, and even if a small air leak occurs in the capacitive pressure sensor, the warranty period can be extended. becomes. Here, we will examine all of these effects based on the general shape and dimensions of the pressure sensing element section. In the case of a sensing element part of a capacitive pressure sensor for normal absolute pressure sensing, the distance between electrodes is 20 to 8 G, sum. Also, the effective strain diameter of the diaphragm, that is, the diameter of the circle surrounded by the sealing part (3), is 20 to 2
It is 61111.
電極用ギヤ、プ距離として２０μｍを採用し、有効歪径
として２５０を採用すると、電極間ギャップ内体積は、
ｒｘ （１，１６）”Ｘ２０ Ｘ １０−４鈎１０−”
ｃＩ１１３となる。これに対して、金属缶部（６）とし
て径４ｆｆ１＾さ４Ｍの円筒状金属缶を基台支持部（２
）の下側に配置することにより、体積は、
ｘ Ｘ （０，２）” Ｘ Ｏ，４＝ ６ Ｘ １０−
”ａＩＩ’となり、金属缶部（６）がない場合に比べて
６倍の体積が付加されたことになる。又金属缶部（６）
の寸法を径１０１１１、高さ１０鱈とすれば約８０倍の
体積が付加されることとなる。以上の説明から明らかな
ように、静電容量型圧力センサの検知素子部の基台支持
部（２）の下側に中空の金属缶部（６）を配置すること
により、真空状態であるべき体積は増加し、検知素子部
の微少リークの保証年限を確実に向上することが可能で
ある。If 20 μm is used as the electrode gear distance and 250 is used as the effective strain diameter, the volume within the gap between the electrodes is rx (1,16)"X20X10-4 hook10-"
cI113. On the other hand, a cylindrical metal can with a diameter of 4ff1^4M is used as the metal can part (6) at the base support part (2).
), the volume is x X (0,2)”
"aII", which means that six times the volume has been added compared to the case without the metal can part (6). Also, the metal can part (6)
If the dimensions are 10111 in diameter and 10 in height, approximately 80 times the volume will be added. As is clear from the above explanation, by placing the hollow metal can part (6) under the base support part (2) of the sensing element part of the capacitive pressure sensor, it is possible to maintain a vacuum state. The volume increases, and it is possible to reliably extend the warranty period for minute leaks in the sensing element section.
ところで本発明の具体実施例では、熱的、化学的１機械
的に安全なアルミナからなるダイアフラム（１）と基台
支持部（２）を用いている。ダイアフラム（１）周辺の
封着部（３）は低融点ガラスを用い、電極（４）（５）
はＡｕ系の薄膜電極である。基台支持部（２）に対する
金属缶部（６）の接着はアルミナ基台支持部（２）の貫
通孔（７）の下側周辺に形成したＡｇ系厚膜メタライズ
に半田付を行なった。金属缶部（６）の材質はアルミナ
と熱膨張係数を合わせる意味から、ユバールを用いた。In the specific embodiment of the present invention, the diaphragm (1) and the base support (2) are made of thermally, chemically and mechanically safe alumina. The sealing part (3) around the diaphragm (1) is made of low melting point glass, and the electrodes (4) and (5)
is an Au-based thin film electrode. The metal can part (6) was adhered to the base support part (2) by soldering to the Ag-based thick film metallization formed around the lower side of the through hole (7) of the alumina base support part (2). For the material of the metal can part (6), Uvar was used in order to match the coefficient of thermal expansion with alumina.
その１寸法は内径４真、高さ４ｆｌのものを使用した。The one dimension used was one with an inner diameter of 4 mm and a height of 4 fl.
上記のように配置、組立てられた状態で、金属缶部（６
）の孔（８）より真空に引き、半田（９）で封じた。With the metal can part (6
) was evacuated through the hole (8) and sealed with solder (9).
上記のような構成に作成した圧力センサを１０気圧の空
気中に１年放置し、その後の静電容量値の変化をチェッ
クした。その結果、静電容量の変装置は初期容態のマイ
ナス０．１％以内であった。一方、金属缶部（６）の配
されていないサンプルでは０．５％以内の分布を示して
いた。従って、圧力センサの構成を本発明のようにする
ことにより、少くとも微少リークは６倍以上向上したこ
とになり、リーク特性が極めて向上されたことが判る。The pressure sensor constructed as described above was left in air at 10 atmospheres for one year, and changes in capacitance value thereafter were checked. As a result, the capacitance change device was within minus 0.1% of the initial state. On the other hand, the sample without the metal can part (6) showed a distribution within 0.5%. Therefore, it can be seen that by configuring the pressure sensor as in the present invention, the minute leakage was improved by at least six times or more, and the leakage characteristics were extremely improved.
以上述べたように、本発明によればリーク保証期間が長
く、信頼性の高い圧力センサを提供することができ、特
に自動重用の圧力センサ等の長期高信頼性を要求される
ものに効果的で、工業上寄与するところが大きい。As described above, according to the present invention, it is possible to provide a highly reliable pressure sensor with a long leak guarantee period, and it is particularly effective for pressure sensors that require high reliability over a long period of time, such as pressure sensors for automatic heavy use. Therefore, it has a large industrial contribution.
図面は本発明の実施の一例を示し、第１図は断面図、第
２図は斜視図である。
（１）・・・ダイアフラム、（２）・・・基台支持部、
（３）・・・封着部、（４） （５）・・・電極、（６
）・・・金属缶部、（７）・・・貫通孔、（８）・・孔
、（９）・・・半田The drawings show an example of the implementation of the present invention, with FIG. 1 being a sectional view and FIG. 2 being a perspective view. (1)...Diaphragm, (2)...Base support part,
(3)... Sealing part, (4) (5)... Electrode, (6
)...Metal can part, (7)...Through hole, (8)...Hole, (9)...Solder
Claims (1)
台支持部と、ダイアフラムに形成された第１の導電層及
び基台支持部に形成された第２の導電層と、ダイアフラ
ムと基台支持部との間を間室ギャップを保ってシールす
る封着部と、基台支持部に形成した真空用貫通孔を外側
より覆うように基台支持部に取り付けられた缶部とを備
え、前記ギャップと缶部内部とを真空にした静電容量型
圧力センサ。l. A diaphragm and a base support made of a pair of electrically insulating materials, a first conductive layer formed on the diaphragm and a second conductive layer formed on the base support, and a diaphragm and a base support. a sealing part that maintains and seals a gap between the parts, and a can part attached to the base support part so as to cover the vacuum through hole formed in the base support part from the outside, A capacitive pressure sensor that creates a vacuum inside the can.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426682A JPS58160832A (en) | 1982-03-18 | 1982-03-18 | Electrostatic capacity type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4426682A JPS58160832A (en) | 1982-03-18 | 1982-03-18 | Electrostatic capacity type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58160832A true JPS58160832A (en) | 1983-09-24 |
Family
ID=12686703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4426682A Pending JPS58160832A (en) | 1982-03-18 | 1982-03-18 | Electrostatic capacity type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58160832A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2610109A1 (en) * | 1987-01-23 | 1988-07-29 | Sovar Sarl | Device for converting a mechanical magnitude into an electrical measurement signal |
| US5897155A (en) * | 1995-10-30 | 1999-04-27 | Mercedes-Benz Ag | Center console for a motor vehicle |
| JP2008516231A (en) * | 2004-10-07 | 2008-05-15 | エム ケー エス インストルメンツ インコーポレーテッド | Method and apparatus for generating a reference pressure in a chamber of a capacitive sensor |
| JP2009008693A (en) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
-
1982
- 1982-03-18 JP JP4426682A patent/JPS58160832A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2610109A1 (en) * | 1987-01-23 | 1988-07-29 | Sovar Sarl | Device for converting a mechanical magnitude into an electrical measurement signal |
| US5897155A (en) * | 1995-10-30 | 1999-04-27 | Mercedes-Benz Ag | Center console for a motor vehicle |
| JP2009008693A (en) * | 1997-12-23 | 2009-01-15 | Inficon Gmbh | Capacitive vacuum measuring cell |
| JP2008516231A (en) * | 2004-10-07 | 2008-05-15 | エム ケー エス インストルメンツ インコーポレーテッド | Method and apparatus for generating a reference pressure in a chamber of a capacitive sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4389895A (en) | Capacitance pressure sensor | |
| US4388668A (en) | Capacitive pressure transducer | |
| US4399707A (en) | Stress sensitive semiconductor unit and housing means therefor | |
| US5757608A (en) | Compensated pressure transducer | |
| US5201228A (en) | Pressure sensor | |
| JP5877248B2 (en) | Pressure sensor and sensor unit including the same | |
| US4703658A (en) | Pressure sensor assembly | |
| US5209121A (en) | Pressure sensor | |
| US4774626A (en) | Pressure sensor with improved capacitive pressure transducer | |
| GB2086058A (en) | Capacitive fluid pressure sensors | |
| EP0165302A1 (en) | Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm | |
| JPH09237847A (en) | Hermetic structure for electronic component | |
| JPS58160832A (en) | Electrostatic capacity type pressure sensor | |
| JP5889540B2 (en) | Pressure sensor | |
| US4459855A (en) | Semiconductor pressure sensor | |
| JPH05332866A (en) | Oil-sealed type semiconductor pressure sensor | |
| JPH02138776A (en) | Semiconductor pressure sensor | |
| US6324914B1 (en) | Pressure sensor support base with cavity | |
| JPH11281509A (en) | Semiconductor pressure sensor and its manufacture | |
| JPS6318271A (en) | Piezoelectric type mechanical quantity sensor | |
| JPH0629819B2 (en) | Semiconductor pressure sensor | |
| JPS6017332A (en) | Differential pressure/capacity transducer | |
| JP2007139517A (en) | Method for manufacturing pressure sensor, pressure sensor, and method for mounting pressure sensor | |
| JPH06102127A (en) | Pressure/difference pressure transmitter | |
| JPS6316240A (en) | Pressure detector |