JPS5787170A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5787170A JPS5787170A JP16416780A JP16416780A JPS5787170A JP S5787170 A JPS5787170 A JP S5787170A JP 16416780 A JP16416780 A JP 16416780A JP 16416780 A JP16416780 A JP 16416780A JP S5787170 A JPS5787170 A JP S5787170A
- Authority
- JP
- Japan
- Prior art keywords
- type
- layer
- region
- substrate
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 6
- 238000009792 diffusion process Methods 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Abstract
PURPOSE:To obtain the bipolar transistor having excellent high frequency characteristics for the subject semiconductor device by a method wherein, when a bipolar type IC is manufactured, a substrate of double-layer structure, having a low density layer on the substrate of high density, is used instead of the one- conductive substrate having a uniformalized impurity density. CONSTITUTION:A P type layer 10 is epitaxially grown on a P<+> type semiconductor substrate 9, and an N<+> type buried region 2 is formed by diffusion on the surfacd layer section of the layer 10. Then, on the whole surface including the above region 2, an N type layer 3 is epitaxially grown, the layer 3 is isolated into an island shape using the P type region 4 reaching the laye 10, a P type base region 5 is formed by diffusion on the layer 3, and an N type emitter region 5 is formed by diffusion on the layer 3, and an N type emitter regin 6 is provided in the region 5. Also, an N<+> type collector contact region 7 is formed by diffusion in the island-type region 3, the whole surface is covered by an SiO2 film 8 and a window to be used for installation of an electrode is provided corresponding to the respective region. Through these procedures, as an inclination is given to the impurity density of the substrate, the junction capacitance between the substrates can be reduced, and high frequency characteristics can be improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16416780A JPS5787170A (en) | 1980-11-20 | 1980-11-20 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16416780A JPS5787170A (en) | 1980-11-20 | 1980-11-20 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5787170A true JPS5787170A (en) | 1982-05-31 |
Family
ID=15787994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16416780A Pending JPS5787170A (en) | 1980-11-20 | 1980-11-20 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5787170A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014167097A (en) * | 2013-01-31 | 2014-09-11 | Toagosei Co Ltd | 2-cyanoacrylate-based adhesive composition |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4925877A (en) * | 1972-07-04 | 1974-03-07 | ||
JPS5011791A (en) * | 1973-06-04 | 1975-02-06 |
-
1980
- 1980-11-20 JP JP16416780A patent/JPS5787170A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4925877A (en) * | 1972-07-04 | 1974-03-07 | ||
JPS5011791A (en) * | 1973-06-04 | 1975-02-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014167097A (en) * | 2013-01-31 | 2014-09-11 | Toagosei Co Ltd | 2-cyanoacrylate-based adhesive composition |
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