JPS57183666U - - Google Patents
Info
- Publication number
- JPS57183666U JPS57183666U JP7219681U JP7219681U JPS57183666U JP S57183666 U JPS57183666 U JP S57183666U JP 7219681 U JP7219681 U JP 7219681U JP 7219681 U JP7219681 U JP 7219681U JP S57183666 U JPS57183666 U JP S57183666U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219681U JPS57183666U (en) | 1981-05-18 | 1981-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7219681U JPS57183666U (en) | 1981-05-18 | 1981-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57183666U true JPS57183666U (en) | 1982-11-20 |
Family
ID=29867982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7219681U Pending JPS57183666U (en) | 1981-05-18 | 1981-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57183666U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6334948A (en) * | 1986-07-29 | 1988-02-15 | Nec Kyushu Ltd | Apparatus for manufacturing semiconductor device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5422639A (en) * | 1977-07-19 | 1979-02-20 | Atsushi Shiromizu | Cart |
| JPS5572029A (en) * | 1978-11-27 | 1980-05-30 | Nec Corp | Tray for semiconductor wafer |
| JPS55143765A (en) * | 1979-04-26 | 1980-11-10 | Mitsubishi Electric Corp | Ion injection device |
| JPS55147365A (en) * | 1979-05-04 | 1980-11-17 | Koito Mfg Co Ltd | Device for warning reduction of capacity of battery |
| JPS562649A (en) * | 1979-06-21 | 1981-01-12 | Nec Corp | Manufacturing device of semiconductor |
-
1981
- 1981-05-18 JP JP7219681U patent/JPS57183666U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5422639A (en) * | 1977-07-19 | 1979-02-20 | Atsushi Shiromizu | Cart |
| JPS5572029A (en) * | 1978-11-27 | 1980-05-30 | Nec Corp | Tray for semiconductor wafer |
| JPS55143765A (en) * | 1979-04-26 | 1980-11-10 | Mitsubishi Electric Corp | Ion injection device |
| JPS55147365A (en) * | 1979-05-04 | 1980-11-17 | Koito Mfg Co Ltd | Device for warning reduction of capacity of battery |
| JPS562649A (en) * | 1979-06-21 | 1981-01-12 | Nec Corp | Manufacturing device of semiconductor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6334948A (en) * | 1986-07-29 | 1988-02-15 | Nec Kyushu Ltd | Apparatus for manufacturing semiconductor device |